CN117840542A - High-precision eutectic welding table with multi-station quick-dismantling heating plate - Google Patents
High-precision eutectic welding table with multi-station quick-dismantling heating plate Download PDFInfo
- Publication number
- CN117840542A CN117840542A CN202410224888.0A CN202410224888A CN117840542A CN 117840542 A CN117840542 A CN 117840542A CN 202410224888 A CN202410224888 A CN 202410224888A CN 117840542 A CN117840542 A CN 117840542A
- Authority
- CN
- China
- Prior art keywords
- plate
- heating plate
- eutectic
- base
- linear motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 84
- 230000005496 eutectics Effects 0.000 title claims abstract description 79
- 238000003466 welding Methods 0.000 title claims abstract description 47
- 238000003825 pressing Methods 0.000 claims abstract description 41
- 238000009413 insulation Methods 0.000 claims abstract description 31
- 230000007246 mechanism Effects 0.000 claims abstract description 27
- 239000012298 atmosphere Substances 0.000 claims abstract description 19
- 239000011521 glass Substances 0.000 claims abstract description 10
- 239000000919 ceramic Substances 0.000 claims abstract description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 26
- 238000005476 soldering Methods 0.000 claims description 15
- 229910052757 nitrogen Inorganic materials 0.000 claims description 13
- 238000001179 sorption measurement Methods 0.000 claims description 9
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 8
- 230000006835 compression Effects 0.000 claims description 5
- 238000007906 compression Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000004806 packaging method and process Methods 0.000 abstract description 2
- 230000009467 reduction Effects 0.000 abstract description 2
- 230000000903 blocking effect Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000001816 cooling Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- ZLHLYESIHSHXGM-UHFFFAOYSA-N 4,6-dimethyl-1h-imidazo[1,2-a]purin-9-one Chemical compound N=1C(C)=CN(C2=O)C=1N(C)C1=C2NC=N1 ZLHLYESIHSHXGM-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/04—Heating appliances
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
- B23K3/085—Cooling, heat sink or heat shielding means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
The invention discloses a high-precision eutectic welding table with a multi-station quick-detachable heating plate, and relates to the technical field of chip packaging production. The chip substrate positioning device comprises an XY moving platform and a eutectic welding device, wherein the chip substrate is precisely positioned through the XY moving platform, and the quick temperature rise and the quick temperature drop of a product are realized by means of the eutectic welding device. The XY moving platform comprises an X-direction base, an X-direction guide rail, an X-direction linear motor, an X-direction sensor baffle, an X-direction sensor, an XY connecting plate, a Y-direction base, a Y-direction guide rail, a Y-direction linear motor, a eutectic supporting seat, a Y-direction sensor baffle and a Y-direction sensor; the eutectic welding device comprises a connecting block, a heat insulation plate, a supporting piece, a heating plate, a pressing plate mechanism, an atmosphere cover and a glass cover. According to the invention, the XY linear motor is adopted to realize accurate position positioning of the welding element, the two ceramic heating plates and the supporting piece thereof realize rapid temperature rise and reduction of the eutectic product, and meanwhile, the pressing plate mechanism is adopted to realize rapid disassembly and assembly of the heating plates, so that the precision and the working efficiency are improved.
Description
Technical Field
The invention relates to the technical field of chip packaging production, in particular to a high-precision eutectic welding table with a multi-station quick-detachable heating plate.
Background
Along with the continuous development of microelectronic packaging technology, the requirements on miniaturization and efficiency of electronic components are higher and higher, so that the demands on improving the accuracy and efficiency of the chip mounting equipment are urgent. The full-automatic eutectic chip mounter is a device for mounting a substrate and a chip, wherein a eutectic table heats and melts soldering tin on the substrate in a short time, the chip is eutectic on the substrate through a manipulator, the precision requirement is +/-10 um, and the full-automatic eutectic chip mounter is a core device for completing the production of a semiconductor laser, wherein the eutectic table is a core component for realizing eutectic chip. After the CDD camera positions the substrate and the chip, the eutectic station controls the temperature profile to melt the solder and bond them together. In addition, the material size is updated rapidly, and the heating plate with the negative pressure holes with specific size is required to be matched with the material size aiming at the substrates with different sizes, so that the convenience of the replacement of the heating plate is very important, and the existing eutectic table structure is required to be improved, so that the heating plate can be disassembled quickly.
Disclosure of Invention
The invention provides a high-precision eutectic welding table with a multi-station quick-detachable heating plate, which aims to solve the problems that the existing eutectic welding table needs to realize quick temperature rise and reduction of products and improve the working efficiency and precision.
The invention is realized by the following technical scheme: the utility model provides a but high accuracy eutectic welding platform of multistation quick detach hot plate, includes XY moving platform and eutectic welding device, realizes the accurate positioning of chip substrate through XY moving platform, relies on eutectic welding device to realize the quick heating up and cooling of product. The XY moving platform comprises an X-direction base, an X-direction guide rail, an X-direction linear motor, an X-direction sensor baffle, an X-direction sensor, an XY connecting plate, a Y-direction base, a Y-direction guide rail, a Y-direction linear motor, a eutectic supporting seat, a Y-direction sensor baffle and a Y-direction sensor; the X-direction guide rail is perpendicular to the Y-direction guide rail; the eutectic welding device comprises a connecting block, a heat insulation plate, a supporting piece, a heating plate, a pressing plate mechanism, an atmosphere cover and a glass cover.
The X-direction base is a base of the whole eutectic welding table, two X-direction guide rails are arranged on the X-direction base in parallel, the X-direction linear motor is positioned between the two X-direction guide rails and comprises an X-direction linear motor stator and an X-direction linear motor rotor, the X-direction linear motor stator is arranged on the X-direction base, the X-direction linear motor rotor is arranged at the bottom of an XY connecting plate, and the Y-direction base is fixed on the upper part of the XY connecting plate; the XY connecting plate is arranged on the two X-direction guide rails through two groups of sliding blocks on the bottom surface; when the mover moves, the XY connecting plate can move back and forth along the X-direction guide rail along with the mover, and the Y-direction base is represented to move along with the mover, so that the movement of the chip substrate in the X-direction is realized. Because the movement along the X direction is limited, two groups of X-direction sensors and two X-direction sensor blocking sheets are arranged, and the X-direction sensors are respectively arranged at two angular positions of the front part of the X-direction base along the X direction and are two boundaries of the X-direction movement of the XY connecting plate; the X-direction sensor baffle plates are also provided with two X-direction sensor baffle plates which are respectively arranged at two angular positions of the front end surface of the XY connecting plate along the X direction, the two X-direction sensor baffle plates are respectively matched with the two groups of X-direction sensors, and when the X-direction sensor baffle plates move to the boundaries of the two X-direction ends, the X-direction sensor baffle plates sense the X-direction sensor baffle plates, so that the XY connecting plate stops moving. The Y-direction guide rails are arranged in two and are mutually parallel to each other and are arranged on the Y-direction base; the Y-direction linear motor is positioned between the two Y-direction guide rails and comprises a Y-direction linear motor stator and a Y-direction linear motor rotor, the Y-direction linear motor stator is arranged on the Y-direction base, and the Y-direction linear motor rotor is fixed at the bottom of the eutectic supporting seat; the Y-direction sensors are provided with two groups and are respectively arranged at two angular positions of the left part of the Y-direction base along the Y direction; the Y-direction sensor baffle plates are arranged at two angular positions along the Y direction on the left side of the eutectic supporting seat, and are respectively matched with the two groups of Y-direction sensors; the center position of the eutectic supporting seat is provided with a mounting hole for connecting a eutectic welding device, the movement of the eutectic supporting seat in the Y direction and the movement of the eutectic supporting seat in the X direction are the same, the mover drives the eutectic supporting seat to move along the Y-direction guide rail, and the movement boundary of the eutectic supporting seat is controlled by the Y-direction sensor and the Y-direction sensor baffle. The whole process realizes the accurate positioning of the chip substrate in the X direction and the Y direction.
The connecting block is detachably arranged on the eutectic supporting seat; this feature enables the connection of the XY moving platform and the eutectic soldering apparatus. The heat insulation plate is arranged on the connecting block, a plurality of welding stations are arranged on the heat insulation plate, each welding station is formed by combining a supporting piece, a heating plate and a pressing plate mechanism, and the heating plate is pressed on the supporting piece through the pressing plate mechanism; the support piece is abutted against and mounted in a square hole formed in the heat insulation plate, and the mounting mode enables the position of the support piece to be stable but also can be detached. And the heating plate is provided with a negative pressure adsorption hole for adsorbing the welded element. The upper part of the support piece is provided with five struts, comprising four struts at four corners and a middle strut, wherein the four struts at the four corners play a role in supporting and fixing the heating plate, the middle strut is provided with a vertical negative pressure hole, and the support piece is also provided with two vertical cold nitrogen holes for blowing nitrogen to reduce the temperature of the heating plate; the two cold nitrogen holes are respectively positioned on two sides of the middle support column, and the positions of the negative pressure adsorption holes on the heating plate are just opposite to the positions of the negative pressure holes, so that the negative pressure exists in the negative pressure adsorption holes on the heating plate, and the welded element can be firmly adsorbed. The atmosphere cover covers the outer side of each welding station, and a glass cover is further arranged at the top of the atmosphere cover, so that the atmosphere cover and the heat insulation plate form a nitrogen atmosphere, and the purpose of quickly cooling the heating plate can be realized by cold nitrogen; and the heat insulation board is arranged, so that the heating plate can realize rapid temperature rise, and the heat during heating is not easy to dissipate.
Preferably, four pillars on the support piece four corners divide into two left side pillars and two right side pillars, two left side pillars highly are the same, two right side pillars highly are the same, right side pillar is higher than left side pillar, two left side pillars and the top surface inboard of two right side pillars are opened respectively and are had the bottom surface to lie in the groove of same altitude face with middle part pillar top surface, two left side pillars, two right side pillars and middle part pillar top surface form the hot plate groove of placing the hot plate jointly, and the size in hot plate groove and hot plate assorted, the groove that left side pillar and right side pillar formed also can be with the perfect joint in hot plate four corners, the right side face of two right side pillars still is provided with compression screw, compression screw and the right side threaded connection of right side pillar, the hot plate is compressed tightly together by clamp plate mechanism and compression screw, fixed hot plate position that can be better.
Preferably, the pressing plate mechanism comprises a base body, a follow-up connecting rod base, an execution connecting rod, a connecting rod, a follow-up block, an execution rotating shaft, a follow-up rotating shaft, a first connecting rotating shaft, a second connecting rotating shaft and a pressing plate; the base body is fixed on the heat insulation plate; the front side and the rear side of the base body are respectively provided with a vertical groove, the execution connecting rod is connected in the vertical groove at the front side of the base body through a horizontal execution rotating shaft, and the connection connecting rod is connected with the execution connecting rod through a first connection rotating shaft; the follow-up connecting rod base is detachably arranged in the vertical groove at the rear side of the base body; the top of the follow-up connecting rod base is a U-shaped member, the follow-up connecting rod is connected into the U-shaped member at the top of the follow-up connecting rod base through a horizontal follow-up rotating shaft, one end of the top of the follow-up connecting rod is fixedly connected with a pressing plate, the other end of the top of the follow-up connecting rod is connected with a follow-up block through a second connecting rotating shaft, and the follow-up block is connected with the connecting rod through a long bolt; the heating plate is pressed on the supporting piece through the pressing plate, and the pressing plate mechanism forms a four-bar mechanism. The working process is as follows: when the execution connecting rod is operated to rotate, the connection connecting rod also randomly and correspondingly rotates, so that the follow-up block also correspondingly displaces, and accordingly drives the follow-up connecting rod to rotate, and the pressing plate also correspondingly rotates, so that the pressing plate is tightly pressed or loosened on the heating plate, and the heating plate is tightly pressed when the pressing plate is in a lower position.
Preferably, the support piece and the pressing plate are made of zirconia ceramics, so that heat transfer loss can be greatly reduced during heating.
Preferably, the bottom of the supporting piece abuts against the bottom of the square hole formed in the heat insulation plate, and the supporting piece is in clearance fit with the square hole of the heat insulation plate. The square clearance hole formed in the heat insulating plate can accurately determine the position of the supporting piece, the installation is convenient, and the supporting piece is made of ceramic materials and is not easy to process threads, so that the installation is realized by adopting the mode.
Compared with the prior art, the invention has the following beneficial effects: according to the high-precision eutectic welding table with the multi-station quick-detachable heating plate, the XY-direction linear motor is adopted to realize accurate position positioning, the contact area between the ceramic support piece and the pressing plate and the heating plate is reduced as much as possible, and heat dissipation is reduced, so that the heating plate is heated quickly; meanwhile, the atmosphere cover can ensure the atmosphere of the product at the heating plate and ensure the welding effect; cooling air is blown out from the cold nitrogen hole on the support piece, so that the heating plate is rapidly cooled, and the purpose of rapidly increasing and decreasing the temperature of the eutectic table is achieved; the heating plate can be quickly disassembled, and the application range of equipment is enlarged aiming at the material replaceable heating plates with different sizes, so that the requirements of high-efficiency and high-precision work are met.
Drawings
Fig. 1 is a schematic diagram of the overall structure of a high-precision eutectic soldering station with a multi-station quick-detachable heating plate.
Fig. 2 is a schematic diagram of the structure of an XY moving platform.
Fig. 3 is a schematic structural diagram of a eutectic soldering apparatus.
Fig. 4 is a schematic structural view of the support.
Fig. 5 is a schematic structural view of the platen mechanism.
The figures are labeled as follows: 1-XY moving platform, 2-eutectic welding device, 101-X direction sensor, 102-X direction base, 103-X direction sensor baffle, 104-XY connecting plate, 105-Y direction base, 106-X direction guide rail, 107-Y direction linear motor, 108-Y direction sensor, 109-Y direction sensor baffle, 110-Y direction linear motor, 111-eutectic supporting seat, 112-Y direction guide rail, 2-eutectic welding device, 201-connecting block, 202-heat insulating plate, 203-supporting piece, 204-heating plate, 205-pressing plate mechanism, 206-atmosphere cover, 207-glass cover, 20301-negative pressure hole, 20302-cold nitrogen hole, 20303-left side pillar, 20304-right side pillar, 20305-pressing screw, 20401-negative pressure adsorption hole, 20501-base, 20502-follow-up connecting rod base, 20503-execution connecting rod, 20504-connecting rod, 20505-follow-up block, 20507-execution spindle, 20583-follow-up spindle, 20509-first connecting spindle, 20509-second spindle, 20509-62-second spindle, 20511-second spindle.
Detailed Description
The invention is further illustrated below with reference to specific examples.
High-precision eutectic welding table of multi-station quick-detachable heating plate is shown in fig. 1: comprises an XY moving platform 1 and a eutectic welding device 2. As shown in fig. 2, the XY moving platform 1 includes an X-direction base 102, an X-direction guide rail 106, an X-direction linear motor 107, an X-direction sensor shutter 103, an X-direction sensor 101, an XY connecting plate 104, a Y-direction base 105, a Y-direction guide rail 112, a Y-direction linear motor 110, a eutectic support 111, a Y-direction sensor shutter 109, and a Y-direction sensor 108; the X-direction guide rail 106 is perpendicular to the Y-direction guide rail 112; the eutectic soldering apparatus 2, as shown in fig. 3, includes a connection block 201, a heat insulating plate 202, a support 203, a heating plate 204, a platen mechanism 205, an atmosphere cover 206, and a glass cover 207.
The X-direction base 102 is a base of the whole eutectic welding table, two X-direction guide rails 106 are arranged on the X-direction base 102 in parallel, the X-direction linear motor 107 is positioned between the two X-direction guide rails 106, the X-direction linear motor 107 comprises an X-direction linear motor stator and an X-direction linear motor rotor, the X-direction linear motor stator is arranged on the X-direction base 102, the X-direction linear motor rotor is arranged at the bottom of the XY connecting plate 104, and the Y-direction base 105 is fixed on the upper part of the XY connecting plate 104; the XY connecting plate 104 is arranged on two X-direction guide rails 106 through two groups of sliding blocks on the bottom surface; the X-direction sensor 101 is provided with two groups and is respectively arranged at two angular positions along the X direction at the front part of the X-direction base 102; the two X-direction sensor blocking pieces 103 are also arranged at two angular positions along the X direction of the front end surface of the XY connecting plate 104, and the two X-direction sensor blocking pieces 103 are respectively matched with the two groups of X-direction sensors 101 for use; the Y-direction guide rails 112 are arranged in two and are mutually parallel to each other and are arranged on the Y-direction base 105; the Y-direction linear motor 110 is located between two Y-direction guide rails 112, the Y-direction linear motor 110 includes a Y-direction linear motor stator and a Y-direction linear motor mover, the Y-direction linear motor stator is mounted on the Y-direction base 105, and the Y-direction linear motor mover is fixed at the bottom of the eutectic supporting seat 111; the Y-direction sensors 108 are provided with two groups and are respectively arranged at two corner positions of the left part of the Y-direction base along the Y direction; the two Y-direction sensor blocking pieces 109 are arranged at two angular positions along the Y-direction on the left side of the eutectic supporting seat 111, and the two Y-direction sensor blocking pieces 109 are respectively matched with the two groups of Y-direction sensors 108; the center of the eutectic supporting seat 111 is provided with a mounting hole for connecting the eutectic welding device 2.
The connecting block 201 is detachably mounted on the eutectic supporting seat 111; the heat insulation plate 202 is mounted on the connecting block 201, a plurality of welding stations are arranged on the heat insulation plate 202, each welding station is formed by combining a supporting piece 203, a heating plate 204 and a pressing plate mechanism 205, and the heating plate 204 is pressed on the supporting piece 203 through the pressing plate mechanism 205; the supporting piece 203 is abutted against and installed in a square hole formed on the heat insulation plate 202; the heating plate 204 is provided with a negative pressure adsorption hole 20401; the upper part of the supporting piece 203 is provided with five struts, comprising four struts at four corners and a middle strut, wherein the four struts at the four corners play a role in supporting and fixing the heating plate 204, the middle strut is provided with a vertical negative pressure hole 20301, the supporting piece 203 is also provided with two vertical cold nitrogen holes 20302, the two cold nitrogen holes 20302 are respectively positioned at two sides of the middle strut, and the positions of the negative pressure adsorption holes on the heating plate 204 are directly matched with the positions of the negative pressure holes 20301; the atmosphere cover 206 covers the outer side of each welding station and is mounted on the heat insulation plate 202, and a glass cover 207 is further arranged on the top of the atmosphere cover 206.
The following preferred scheme is adopted in the embodiment: four struts at four corners of the supporting member 203 are divided into two left struts 20303 and two right struts 20304, the heights of the two left struts 20303 are the same, the heights of the two right struts 20304 are the same, the right struts 20304 are higher than the left struts 20303, grooves with the bottom surfaces at the same height with the top surfaces of the middle struts are respectively formed on the inner sides of the top surfaces of the two left struts 20303 and the two right struts 20304, the two left struts 20303, the two right struts 20304 and the top surfaces of the middle struts form a heating plate groove for placing the heating plate 204 together, and the size of the heating plate groove is matched with that of the heating plate 204; the right side surfaces of the two right side posts 20304 are further provided with pressing screws 20305, and the pressing screws 20305 are screwed with the right side surfaces of the right side posts 20304. The platen mechanism 205 includes a base 20501, a follower link base 20502, an execution link 20503, a connection link 20504, a follower link 20505, a follower block 20506, an execution shaft 20507, a follower shaft 20508, a first connection shaft 20509, a second connection shaft 20510, and a platen 20511; the base 20501 is fixed to the heat shield 202; the front side and the rear side of the base 20501 are respectively provided with a vertical groove, the execution connecting rod 20503 is connected in the front vertical groove of the base 20501 through a horizontal execution rotating shaft 20507, and the connecting rod 20504 is connected to the execution connecting rod 20503 through a first connecting rotating shaft 20509; the follow-up connecting rod base 20502 is detachably arranged in a vertical groove at the rear side of the base 20501; the top of the follow-up connecting rod base 20502 is a U-shaped member, the follow-up connecting rod 20505 is connected into the U-shaped member at the top of the follow-up connecting rod base 20502 through a horizontal follow-up rotating shaft 20508, one end of the top of the follow-up connecting rod 20505 is fixedly connected with a pressing plate 20511, the other end of the top of the follow-up connecting rod 20505 is connected with a follow-up block 20506 through a second connecting rotating shaft 20510, and the follow-up block 20506 is connected to a connecting rod 20504 through a long bolt; the heating plate 204 is pressed against the supporting member 203 by the pressing plate 20511, and the pressing plate mechanism 205 constitutes a four-bar mechanism.
The following preferred scheme is also adopted in this embodiment: the diameter of the suction holes of the heating plate 204 was 0.8mm. The support 203 and the pressure plate 20511 are made of zirconia ceramics. The connecting block 201 is mounted on the eutectic supporting seat 111 through four screws; the heat insulation plate 202 is mounted on the connection block 201 by screws. The bottom of the supporting member 203 abuts against the bottom of the square hole formed in the heat insulation plate 202, and the supporting member 203 is in clearance fit with the square hole of the heat insulation plate 202. The atmosphere cover 206 is mounted on the heat insulating plate 202 by screws. The heat insulation plate 202 is provided with two welding stations, and the two welding stations have the same structure. The present embodiment is thus a duplex eutectic soldering station.
The specific assembly operation of the embodiment is as follows: (1) two X-direction guide rails 106 in the XY moving platform 1 are screwed to the X-direction base 102 in parallel with each other, and a stator of the X-direction linear motor 107 is screwed to the X-direction base 102; the XY connection plate 104 is screwed to the sliders of the two X-direction guide rails 106, the mover of the X-direction linear motor 107 is screwed to the bottom of the XY connection plate 104, the Y-direction base 105 is screwed to the upper part of the XY connection plate 104, the two Y-direction guide rails 112 are screwed to the Y-direction base 105 in parallel, and the stator of the Y-direction linear motor 110 is mounted on the Y-direction base 105; the X-direction sensor baffle 103 is fixed on the XY connecting plate 104 by a screw, and the X-direction sensor 101 is fixed on the X-direction base 102; the Y-sensor block 109 is fixed to the eutectic support 111, and the Y-sensor 108 is mounted to the Y-base 105. The X-guide rail 106 and the Y-guide rail 112 are mounted at 90 ° to each other. (2) The connection block 201 in the eutectic soldering apparatus 2 is fixed to the eutectic support base 111 in the XY moving platform 1 with four screws. The heat insulating plate 202 of the eutectic welding apparatus 2 is fixed to the connection block 201 with screws. The two welding stations have the same structure, and the rear welding station is taken as an example for explanation. Screws are used to pass through the lower part of the heat insulation plate 202 so as to be fixed in threaded holes at the bottom of the supporting piece 203, and the supporting piece 203 is in clearance fit with square holes of the heat insulation plate 202. Heating plate 204 is placed in a heating plate groove formed by four struts of supporting member 203 such that two cold nitrogen holes 20302 are aligned with the front and rear sides of heating plate 204, such that the negative pressure suction holes of heating plate 204 are aligned with negative pressure holes 20301 of the middle strut, and one end of heating plate 204 is pressed by pressing screws 20305 through the screw holes. After the support 203 and the heating plate 204 are mounted, the atmosphere cover 206 is screwed to the heat insulating plate 202, the pressing plate mechanism 205 is screwed to the heat insulating plate 202, and the glass plate 207 is covered on the atmosphere cover 206. (3) The assembly process of the platen mechanism 205 is as follows: the base 20501 is mounted to the heat shield 202 and the follower link mount 20502 is then secured to the back of the base 20501. The execution link 20503 is coupled to the base 20501 using an execution shaft 20507; the follower link 20505 is coupled to the follower link base 20502 using a follower shaft 20508; one end of the first connecting rotating shaft 20509 is inserted into a circular hole of the execution connecting rod 20503, and the other end is inserted into a circular hole of the connecting rod 20504; the second connection shaft 20510 is inserted into the circular holes of the follower block 20506 and the follower link 20505. The pressure plate 20511 is screwed to the follower link 20505 so that the pressure plate 20511 follows the movement of the follower link 20505. The platen mechanism constitutes a four bar mechanism, with the actuator link 20503 moving up and down, the platen 20511 moving up and down, and the platen 20511 being in a lower position to press against the heater plate 204.
The specific operation of this embodiment is as follows:
1) The moving process in the X and Y directions is as follows: when the X-direction linear motor 107 works, the stator of the X-direction linear motor is fixed, the X-direction linear motor rotor drives the XY connecting plate 104 to move back and forth on the X-direction base 102 along the X-direction guide 106, the X-direction sensors 101 at the two ends and the corresponding X-direction sensor blocking pieces 103 feed back the positions, sense whether the XY connecting plate 104 reaches the boundary or not and control the XY connecting plate to stop moving, and when the XY connecting plate 104 moves, all parts which are arranged on the XY connecting plate and can move in the Y direction move along the X direction; similarly, the movement in the Y direction is controlled by the Y-direction linear motor 110, the stator of the Y-direction linear motor is fixed, the mover of the Y-direction linear motor drives the eutectic supporting seat 111 to reciprocate on the Y-direction base 105 along the Y-direction guide rail 112, the position feedback is performed by the Y-direction sensors 108 at two ends and the corresponding Y-direction sensor blocking pieces 109, whether the eutectic supporting seat 111 reaches the boundary is sensed, and the movement is controlled to stop, when the eutectic supporting seat 111 moves, the eutectic welding device 2 mounted on the eutectic supporting seat moves along with the eutectic supporting seat, and the eutectic welding device 2 can precisely move along the X and Y directions in the working process.
2) The operation during welding is as follows: the heating plate 204 is clamped in a heating plate groove formed on the supporting piece 203, the heating plate 204 is tightly pressed together with the pressing plate 20511 through the pressing screw, and the negative pressure hole 20301 on the supporting piece 203 ensures that the part to be welded arranged on the heating plate 204 is reliably adsorbed on the heating plate 204, and the heating plate 204 adopts zirconia ceramics, so that the heat transfer loss is greatly reduced when the temperature is raised, and the rapid temperature rise is realized; during cooling, cold nitrogen is blown out from the two cold nitrogen holes 20302 of the support 203, so that the heating plate 204 is rapidly cooled, and the atmosphere cover 206, the glass cover 207 and the heat insulation plate 202 form a nitrogen atmosphere.
3) The quick assembly and disassembly operations are as follows: the operation execution link 20503 moves up and down, driving the connection link 20504 to move, so that the follower block 20506 drives the follower link 20505 to rotate, so that the pressing plate 20511 moves up and down, the pressing plate 20511 is just pressed against the heating plate 204 when the pressing plate 20511 is in the lower position, and the heating plate 204 is released when the pressing plate 20511 is in the upper position.
The scope of the present invention is not limited to the above embodiments, and various modifications and alterations of the present invention will become apparent to those skilled in the art, and any modifications, improvements and equivalents within the spirit and principle of the present invention are intended to be included in the scope of the present invention.
Claims (9)
1. But high accuracy eutectic welding platform of multistation quick detach hot plate, its characterized in that: comprises an XY moving platform (1) and a eutectic welding device (2);
the XY moving platform (1) comprises an X-direction base (102), an X-direction guide rail (106), an X-direction linear motor (107), an X-direction sensor baffle (103), an X-direction sensor (101), an XY connecting plate (104), a Y-direction base (105), a Y-direction guide rail (112), a Y-direction linear motor (110), a eutectic supporting seat (111), a Y-direction sensor baffle (109) and a Y-direction sensor (108); the X-direction guide rail (106) is perpendicular to the Y-direction guide rail (112);
the eutectic welding device (2) comprises a connecting block (201), a heat insulation plate (202), a supporting piece (203), a heating plate (204), a pressing plate mechanism (205), an atmosphere cover (206) and a glass cover (207);
the X-direction base (102) is a base of the whole eutectic welding table, two X-direction guide rails (106) are arranged on the X-direction base (102) in parallel, an X-direction linear motor (107) is positioned between the two X-direction guide rails (106), the X-direction linear motor (107) comprises an X-direction linear motor stator and an X-direction linear motor rotor, the X-direction linear motor stator is arranged on the X-direction base (102), the X-direction linear motor rotor is arranged at the bottom of an XY connecting plate (104), and the Y-direction base (105) is fixed on the upper part of the XY connecting plate (104); the XY connecting plate (104) is arranged on the two X guide rails (106) through two groups of sliding blocks on the bottom surface; the X-direction sensor (101) is provided with two groups and is respectively arranged at two angular positions of the front part of the X-direction base (102) along the X direction; the X-direction sensor baffle plates (103) are also provided with two X-direction sensor baffle plates which are respectively arranged at two angular positions of the front end surface of the XY connecting plate (104) along the X direction, and the two X-direction sensor baffle plates (103) are respectively matched with the two groups of X-direction sensors (101); the Y-direction guide rails (112) are arranged in two and are mutually parallel to each other and are arranged on the Y-direction base (105); the Y-direction linear motor (110) is positioned between the two Y-direction guide rails (112), the Y-direction linear motor (110) comprises a Y-direction linear motor stator and a Y-direction linear motor rotor, the Y-direction linear motor stator is arranged on the Y-direction base (105), and the Y-direction linear motor rotor is fixed at the bottom of the eutectic supporting seat (111); the Y-direction sensors (108) are provided with two groups and are respectively arranged at two angular positions of the left part of the Y-direction base along the Y direction; the Y-direction sensor baffle plates (109) are provided with two Y-direction sensor baffle plates, and are respectively arranged at two angular positions along the Y direction on the left side of the eutectic supporting seat (111), and the two Y-direction sensor baffle plates (109) are respectively matched with two groups of Y-direction sensors (108);
the connecting block (201) is detachably arranged on the eutectic supporting seat (111); the heat insulation plate (202) is arranged on the connecting block (201), a plurality of welding stations are arranged on the heat insulation plate (202), each welding station is formed by combining a supporting piece (203), a heating plate (204) and a pressing plate mechanism (205), and the heating plate (204) is pressed on the supporting piece (203) through the pressing plate mechanism (205); the supporting piece (203) is abutted against and installed in a square hole formed in the heat insulation plate (202); the heating plate (204) is provided with a negative pressure adsorption hole (20401); five struts are arranged on the upper portion of the supporting piece (203), the five struts comprise four struts at four corners and a middle strut, the four struts at the four corners play a role in supporting and fixing the heating plate (204), a vertical negative pressure hole (20301) is formed in the middle strut, two vertical cold nitrogen holes (20302) are formed in the supporting piece (203), the two cold nitrogen holes (20302) are respectively located on two sides of the middle strut, and the positions of the negative pressure adsorption holes on the heating plate (204) are directly matched with the positions of the negative pressure holes (20301);
the atmosphere cover (206) covers the outer side of each welding station and is mounted on the heat insulation plate (202), and a glass cover (207) is further arranged on the top of the atmosphere cover (206).
2. The high-precision eutectic soldering station of the multi-station quick-detachable heating plate according to claim 1, wherein: four struts at four corners of the supporting piece (203) are divided into two left struts (20303) and two right struts (20304), the heights of the two left struts (20303) are the same, the heights of the two right struts (20304) are the same, the heights of the right struts (20304) are higher than those of the left struts (20303), grooves with the bottom surfaces at the same height with the top surfaces of the middle struts are respectively formed in the inner sides of the top surfaces of the two left struts (20303) and the two right struts (20304), and the two left struts (20303), the two right struts (20304) and the top surfaces of the middle struts form a heating plate groove for placing a heating plate (204) together, and the heating plate groove is matched with the heating plate (204) in size; the right sides of the two right side supports (20304) are further provided with compression screws (20305), and the compression screws (20305) are in threaded connection with the right sides of the right side supports (20304).
3. The high-precision eutectic soldering station of the multi-station quick-detachable heating plate according to claim 1, wherein: the pressing plate mechanism (205) comprises a base body (20501), a follow-up connecting rod base (20502), an execution connecting rod (20503), a connecting rod (20504), a follow-up connecting rod (20505), a follow-up block (20506), an execution rotating shaft (20507), a follow-up rotating shaft (20508), a first connecting rotating shaft (20509), a second connecting rotating shaft (20510) and a pressing plate (20511); the base body (20501) is fixed on the heat insulation plate (202); the front side and the rear side of the base body (20501) are respectively provided with a vertical groove, the execution connecting rod (20503) is connected into the vertical groove at the front side of the base body (20501) through a horizontal execution rotating shaft (20507), and the connecting rod (20504) is connected to the execution connecting rod (20503) through a first connecting rotating shaft (20509); the follow-up connecting rod base (20502) is detachably arranged in a vertical groove at the rear side of the base body (20501); the top of the follow-up connecting rod base (20502) is a U-shaped member, the follow-up connecting rod (20505) is connected into the U-shaped member at the top of the follow-up connecting rod base (20502) through a horizontal follow-up rotating shaft (20508), one end of the top of the follow-up connecting rod (20505) is fixedly connected with a pressing plate (20511), the other end of the top of the follow-up connecting rod (20505) is connected with a follow-up block (20506) through a second connecting rotating shaft (20510), and the follow-up block (20506) is connected to a connecting rod (20504) through a long bolt; the heating plate (204) is pressed on the supporting piece (203) through the pressing plate (20511), and the pressing plate mechanism (205) forms a four-bar mechanism.
4. The high-precision eutectic soldering station of the multi-station quick-detachable heating plate according to claim 1, wherein: the diameter of the negative pressure adsorption hole on the heating plate (204) is 0.8mm.
5. The high-precision eutectic soldering station of the multi-station quick-detachable heating plate according to claim 1, wherein: the support piece (203) and the pressing plate (20511) are made of zirconia ceramics.
6. The high-precision eutectic soldering station of the multi-station quick-detachable heating plate according to claim 1, wherein: the connecting block (201) is arranged on the eutectic supporting seat (111) through four screws; the heat insulation plate (202) is mounted on the connecting block (201) through screws.
7. The high-precision eutectic soldering station of the multi-station quick-detachable heating plate according to claim 1, wherein: the bottom of the supporting piece (203) is abutted against the bottom of the square hole formed by the heat insulation plate (202), and the supporting piece (203) is in clearance fit with the square hole of the heat insulation plate (202).
8. The high-precision eutectic soldering station of the multi-station quick-detachable heating plate according to claim 1, wherein: the atmosphere cover (206) is mounted on the heat insulation plate (202) through screws.
9. The high-precision eutectic soldering station of the multi-station quick-detachable heating plate according to claim 1, wherein: two welding stations are arranged on the heat insulating plate (202), and the two welding stations are identical in structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410224888.0A CN117840542A (en) | 2024-02-29 | 2024-02-29 | High-precision eutectic welding table with multi-station quick-dismantling heating plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410224888.0A CN117840542A (en) | 2024-02-29 | 2024-02-29 | High-precision eutectic welding table with multi-station quick-dismantling heating plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117840542A true CN117840542A (en) | 2024-04-09 |
Family
ID=90534775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410224888.0A Pending CN117840542A (en) | 2024-02-29 | 2024-02-29 | High-precision eutectic welding table with multi-station quick-dismantling heating plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117840542A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117798567A (en) * | 2024-02-29 | 2024-04-02 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Eutectic welding table capable of rapidly increasing and decreasing temperature |
-
2024
- 2024-02-29 CN CN202410224888.0A patent/CN117840542A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117798567A (en) * | 2024-02-29 | 2024-04-02 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Eutectic welding table capable of rapidly increasing and decreasing temperature |
| CN117798567B (en) * | 2024-02-29 | 2024-06-04 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Eutectic welding table capable of rapidly increasing and decreasing temperature |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN117840542A (en) | High-precision eutectic welding table with multi-station quick-dismantling heating plate | |
| CN111390319B (en) | Chip eutectic welding equipment | |
| CN108161208B (en) | Rotary automatic hot-press welding device | |
| CN108213684B (en) | Rotary hot pressing equipment | |
| CN103433585B (en) | The wheeled automatic brazing machine of a kind of Timing Belt | |
| CN111863676A (en) | High-precision intelligent eutectic crystal mounting equipment and processing method thereof | |
| CN111189777A (en) | Double-station ACF adhesive high-precision shearing and attaching mechanism | |
| CN105437843A (en) | Feeding and blanking device of engraving machine | |
| CN111787781A (en) | Automatic welding device for SMD LED lamp bead substrate | |
| CN112635359A (en) | Novel rapid visual alignment repair equipment and visual alignment method thereof | |
| CN112045268A (en) | Full-automatic selective wave soldering device | |
| CN208099741U (en) | Automatic assembling gripper | |
| CN212577735U (en) | Full-automatic selective wave soldering device | |
| CN117798567B (en) | Eutectic welding table capable of rapidly increasing and decreasing temperature | |
| CN210172739U (en) | LD chip eutectic welding system | |
| CN114952037B (en) | Laser cutting equipment for trimming outer contour of thin plate | |
| CN111132538A (en) | Large-temperature-area multifunctional automatic BGA repair table | |
| CN213583715U (en) | Novel quick vision is counterpointed and is reprocessed equipment | |
| CN105751485A (en) | Optical module welding device | |
| CN213257669U (en) | Laser forming equipment for mica electrothermal film | |
| CN115263886B (en) | Automatic change equipment | |
| CN108581921B (en) | Disassembling jig for large-size BGA (ball grid array) packaged chip and control method thereof | |
| CN217701822U (en) | High-precision automatic laser welding equipment | |
| CN115003148B (en) | Power conversion module induction welding device and welding method thereof | |
| CN221313098U (en) | Warp-preventing welding device for chip and substrate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |