CN209859725U - Superconducting magnet and magnetic control straight pulling single crystal equipment - Google Patents
Superconducting magnet and magnetic control straight pulling single crystal equipment Download PDFInfo
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- CN209859725U CN209859725U CN201920863470.9U CN201920863470U CN209859725U CN 209859725 U CN209859725 U CN 209859725U CN 201920863470 U CN201920863470 U CN 201920863470U CN 209859725 U CN209859725 U CN 209859725U
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Abstract
The embodiment of the utility model provides a superconducting magnet and a magnetic control czochralski single crystal equipment. The superconducting magnet comprises a superconducting switch, superconducting coils, a coil framework and a cryostat, wherein the superconducting coils are fixed on the coil framework and are connected in series. The superconducting switch is connected with the superconducting coil in parallel and is fixed on the coil framework. The coil skeleton is arranged in the cryostat, and the cryostat is provided with a refrigerator. By setting the superconducting switches to be opened and closed, the current between each superconducting coil and each superconducting switch is closed and conducted, so that an excitation power supply is removed. The utility model solves the problems of excessive power consumption cost and use cost of the superconducting magnet in the prior magnetic control straight pulling single crystal equipment, poor quality of the produced monocrystalline silicon and low operation safety.
Description
Technical Field
The embodiment of the utility model relates to semiconductor manufacturing technical field especially relates to a superconducting magnet and magnetic control vertical pulling single crystal equipment.
Background
Monocrystalline silicon is an important component in crystal materials and is widely applied to the field of manufacturing semiconductors such as large-scale integrated circuits, rectifiers, high-power transistors, diodes, solar panels and the like. The production method of the monocrystalline silicon is generally a Czochralski method, and the process steps of the Czochralski method comprise seeding, necking, shouldering, equal-diameter growth, ending and discharging. With the rapid development of the manufacturing technology of devices such as semiconductor microelectronic devices, large-scale integrated circuits and the like, the requirements on the quality and the size of monocrystalline silicon are higher and higher, and the preparation requirement on the monocrystalline silicon which is a semiconductor material is stricter.
The magnetic control Czochralski single crystal pulling technology comprises the following steps: on the basis of the conventional Czochralski single crystal method, a strong magnetic field is applied outside the single crystal furnace, so that the heat convection of a melt is inhibited, the impurity content of the crystal is reduced, the longitudinal and radial impurity distribution nonuniformity is improved, and the high-quality single crystal is obtained. With the development of superconducting technology, it is found that superconducting magnets can generate magnetic fields which are several times that of conventional electromagnets or permanent magnets, and the influence of melt thermal convection on the quality of single crystals can be obviously reduced, so that more and more magnetic control czochralski single crystal equipment is provided with the magnetic control czochralski single crystal superconducting magnets.
In the prior art, a superconducting magnet for magnetically controlled Czochralski single crystal is usually of a four-coil structure, and is generally made of NbTi (niobium titanium) superconducting wire or MgB2(magnesium diboride) a superconducting magnet is manufactured, and comprises a low-temperature container and a refrigerator. With MgB2The superconducting magnet is manufactured, and the problems of complex system, huge power consumption and refrigeration of the common superconducting magnet for magnetically controlled Czochralski single crystal are solvedHigh cost. When the existing superconducting magnet for magnetically controlling the Czochralski single crystal is used, an excitation power supply is required to continuously supply power so as to maintain the stable existence of a magnetic field.
However, since the silicon single crystal ingot used for the large scale integrated circuit generally has a size of 300mm in diameter and about 2m in length, the equal diameter growth time of the silicon single crystal ingot usually needs to last for several days to one week, and during the period, the magnetic field needs to be continuously stabilized, so that the continuous power supply support of the excitation power supply is needed, a large amount of electric power cost is consumed, one device needs to occupy one excitation power supply for a long time, and the use cost is also increased. In addition, the ripple of the excitation power supply can cause magnetic field fluctuation, which is not beneficial to the stability of the magnetic field, and further influences the quality of the produced monocrystalline silicon. Moreover, the excitation power supply and the cable need to be connected with the superconducting magnet at any time, which is not beneficial to the space arrangement and the operation safety of the monocrystalline silicon production.
SUMMERY OF THE UTILITY MODEL
In view of this, the embodiment of the present invention provides a superconducting magnet and a magnetic control czochralski single crystal apparatus, so as to solve the problems that the electric consumption and the use cost of the conventional magnetic control czochralski single crystal superconducting magnet are high, the magnetic field is not stable enough to affect the single crystal quality and the power source occupation space, etc.
In a first aspect, embodiments of the present invention provide a superconducting magnet for use in a magnetically controlled czochralski single crystal manufacturing process, the superconducting magnet: the superconducting switch, the superconducting coil, the coil framework and the cryostat are included; wherein:
the number of the superconducting coils is one group or multiple groups, the superconducting coils are fixed on the coil framework, and the superconducting coils are mutually connected in series;
the number of the superconducting switches is at least one, the superconducting switches are connected with the superconducting coils in parallel and are used for being closed when the superconducting coils are excited to a set magnetic field through an excitation power supply so as to communicate the superconducting coils to form a closed loop;
the superconducting switch is fixed in a set low magnetic field area of the coil framework;
the coil bobbin is placed in the cryostat, and the cryostat is provided with a refrigerator and used for manufacturing an environment meeting a set low-temperature condition so as to enable the superconducting coil and the superconducting switch to be in a superconducting state.
Preferably, the superconducting magnet further comprises a hoop for fixing the superconducting coil and the coil skeleton.
Preferably, the structure of the cryostat is a liquid helium immersion structure, and the superconducting switch is a heating type superconducting switch.
Preferably, the superconducting switch includes: the superconducting switch comprises a non-inductive coil, a heater, a switch framework and a binding post, wherein the non-inductive coil is wound on the switch framework in a non-inductive winding mode, an incoming line and an outgoing line of the non-inductive coil are connected with the binding post, the superconducting coil is connected with the binding post, the heater and the non-inductive coil are arranged in a close fit mode and are wound and fixed by glass fiber cloth, and the incoming line and the outgoing line of the heater are led out from the superconducting magnet and are connected with an external heating power supply module and used for controlling the on and off of the superconducting switch.
Preferably, epoxy resin is used to fill the gap generated by the superconducting switch during winding.
Preferably, the switch framework is made of metal materials, and a layer of insulating materials is pasted on the inner surface of the switch framework.
Preferably, the structure of the cryostat may also be a direct cooling structure without liquid helium; the superconducting switch is a heating type superconducting switch or a mechanical type superconducting switch.
Preferably, the superconducting magnet further comprises: and the quench protection module is connected with the superconducting switch in parallel, and is used for limiting the voltage at two ends of the superconducting switch when the superconducting coil quenches or the superconducting switch quenches, and the quench protection module is used as a magnetic field energy release path.
Preferably, the quench protection module comprises a set of diodes connected in anti-parallel.
In a second aspect, the embodiment of the present invention further provides a magnetic control czochralski single crystal device, including a single crystal furnace and a superconducting magnet, wherein, the magnetic control czochralski single crystal device is adopted the superconducting magnet provided by the embodiment of the first aspect, the superconducting magnet is disposed in the outside of the single crystal furnace, and is used for being closed when the excitation power supply excites a set magnetic field, the superconducting switch makes the superconducting coil form a magnetic field required by the magnetic control czochralski single crystal.
The embodiment of the utility model provides a superconducting magnet and magnetic control vertical pulling single crystal equipment, through the disconnection and the closure of control superconducting switch, can make the electric current form closed circuit between superconducting switch and each superconducting coil to remove excitation power, realized not needing the continuous supply of excitation power when application magnetic control vertical pulling technique preparation single crystal, and then saved electric power cost and use cost, prevented that excitation power ripple from influencing the single crystal quality, be favorable to the spatial arrangement and the operation safety of single crystal production.
Drawings
Fig. 1 is a schematic structural diagram of a superconducting magnet according to a first embodiment of the present invention;
fig. 2 is a schematic plan view of a superconducting switch according to a second embodiment of the present invention;
FIG. 3 is a schematic axial view of a magnetically controlled Czochralski single crystal growing apparatus according to a third embodiment of the present invention.
In the figure, 1, a superconducting coil; 2. a coil bobbin; 3. a superconducting switch; 4. a quench protection module; 5. a cryostat; 6. a refrigerator; 7. a non-inductive coil; 8. a switch frame; 9. a heater; 10. a binding post; 11. a single crystal furnace; 12. and (3) single crystal.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
Example one
Fig. 1 is a schematic structural diagram of a superconducting magnet according to an embodiment of the present invention. As shown in figure 1, the superconducting magnet is used in the magnetic control czochralski single crystal preparation process, and specifically comprises a superconducting switch 3, a superconducting coil 1, a coil framework 2 and a cryostat 5, wherein: the number of the superconducting coils 1 is one group or a plurality of groups, the superconducting coils 1 are fixed on the coil framework 2, and the superconducting coils 1 are mutually connected in series. The number of the superconducting switches 3 is at least one, and the superconducting switches are connected with the superconducting coils 1 in parallel and are used for being closed when the superconducting coils 1 are excited to a set magnetic field through an excitation power supply so as to communicate the superconducting coils 1 to form a closed loop. The superconducting switch 3 is fixed to a set low magnetic field region of the bobbin 1. The coil bobbin 2 is placed in a cryostat 5, and the cryostat 5 is provided with a refrigerator 6 for creating an environment satisfying a set low temperature condition to make the superconducting coil 1 and the superconducting switch 3 in a superconducting state.
Preferably, the coil bobbin 2 is a hollow cylindrical structure, and a circular protrusion structure is arranged on the surface of the coil bobbin, so that the superconducting coil 1 is wound on the coil bobbin 2.
The low magnetic field region set in the above scheme may be: the magnetic field generated by the employed superconducting coil 1 is calculated to determine the lowest magnetic field region, or measured with a gauss meter to determine the lowest magnetic field region. The magnetic field generated by the superconducting coil 1 may be generated without affecting the stable operation of the superconducting switch 3.
Preferably, a protrusion structure is provided at the coil bobbin 2 at a position where a low magnetic field is set, for fixing the superconducting switch 3. The superconducting switch 3 is positioned in a set low magnetic field area, so that the reduction of the current carrying performance of the superconducting switch can be reduced, and the superconducting switch 3 can safely and stably operate.
Preferably, the cryostat 5 is a torus container, the interior of the torus is hollow, the three-layer structure is arranged from outside to inside, the outer layer is a normal temperature vacuum container, and the material is generally stainless steel, so as to maintain the vacuum state of the system; the middle layer is a radiation-proof screen, is made of aluminum or copper generally, and is used for shielding radiation heat at the temperature below 50K; the innermost layer is a liquid helium temperature zone for containing liquid helium. The coil framework 2 is arranged in a liquid helium temperature zone of the cryostat 5, the liquid helium submerges the superconducting switch 3, and the superconducting coil 1 is partially submerged. The cryostat 5 comprises a refrigerator 6, the refrigerator 6 is connected with a cold head, the refrigerator 6 is arranged outside the vacuum container, the cold head extends to a liquid helium temperature zone and keeps the sealing performance of the container, the cryogenic environment is manufactured, and the temperature is preferably reduced to below 5K, so that the superconducting coil 1 and the superconducting switch 3 are in a superconducting state.
Because there is great electromagnetic force between the coil, need take the reinforcement measure between superconducting coil 1 and the coil skeleton 2, it is preferred the embodiment of the utility model provides a still include the staple bolt for fixed superconducting coil 1 and coil skeleton 2, in order to prevent that the electromagnetic force is great and lead to superconducting coil 1 to quench or damage.
Further, the superconducting magnet in this embodiment further includes: and the quench protection module 4 is connected in parallel with the superconducting switch 3 and used for limiting the voltage at two ends of the superconducting switch 3 when the superconducting coil 1 or the superconducting switch 3 is quenched due to an unexpected condition, and is used as a magnetic field energy release path to prevent the superconducting coil 1 and the superconducting switch 3 from being burnt due to high voltage breakdown or high current heating.
In particular, the quench protection module 4 comprises a set of diodes connected in anti-parallel.
The working process of the superconducting magnet is as follows:
after the superconducting magnet is vacuumized, the refrigerator 6 is started, when the temperature reaches below 5K, the superconducting coil 1 is excited by the excitation power supply, so that the superconducting magnet can generate a stable strong magnetic field, and the superconducting switch 3 is switched off; when the required magnetic field is excited, the superconducting switch 3 is closed, so that a closed loop is formed between the superconducting switch 3 and each superconducting coil 1, and the excitation power supply is removed.
Compared with the prior art, the superconducting magnet for the magnetically controlled Czochralski single crystal preparation process can remove the excitation power supply in the working process, and saves the electric power cost and the use cost.
Example two
Fig. 2 is a schematic plan view of a superconducting switch according to a second embodiment of the present invention, and based on the first embodiment, it is preferable that the cryostat 5 is a liquid helium immersion structure, and the superconducting switch 3 is a heating superconducting switch.
As shown in fig. 2, the heating type superconducting switch specifically includes: a non-inductive coil 7, a heater 9, a switch framework 8 and a binding post 10.
The non-inductive coil 7 is wound on the switch framework 8 in a non-inductive winding mode, an incoming line and an outgoing line of the non-inductive coil 7 are connected with a binding post 10, the superconducting coil 1 is connected with the binding post 10, the heater 9 and the non-inductive coil 7 are arranged in a close fit mode and are wound and fixed through glass fiber cloth, and the incoming line and the outgoing line of the heater 9 are led out from the superconducting magnet and are connected with an external heating power supply module and used for controlling the disconnection and the connection of the superconducting switch 1.
Preferably, the switch frame 8 is a cylinder made of G10 material or metal material such as aluminum alloy, copper alloy, etc. and having flanges at two ends, and the inner surface of the cylinder is coated with a layer of insulating material, and the outer side of the flange at one end is provided with the binding post 10.
Preferably, the non-inductive coil 7 is generally made of a copper-nickel superconducting wire or a high-temperature superconducting strip, and is wound on the switch framework 8 in a non-inductive winding manner.
Preferably, the heater 9 is closely attached to the non-inductive coil 7 and is wound and fixed by glass fiber cloth to ensure that the superconducting switch 3 is heated uniformly.
Preferably, epoxy resin is used to fill the gap generated during winding of the superconducting switch 3, so as to increase the thermal conductivity of the superconducting switch 3, reduce the switching time between on and off states, improve the structural strength of the superconducting switch 3, and increase the current carrying capacity and stability of the superconducting switch.
Alternatively, the cryostat 5 may be a direct cooling structure without liquid helium; the superconducting switch 3 is a heating type superconducting switch or a mechanical type superconducting switch.
When the single crystal is prepared, the superconducting switch 3 is always in an ultralow temperature environment, and when the superconducting switch 3 needs to be disconnected, the heater power supply is turned on, so that the temperature of the superconducting switch 3 is higher than the critical temperature, and the superconducting switch 3 can be in a non-superconducting disconnection state; when the superconducting switch is required to be closed, the heater power supply is disconnected, and when the temperature of the superconducting switch 3 is close to the critical temperature, the superconducting closed state can be recovered, so that the opening and closing of the superconducting switch 3 are realized.
The superconducting switch 3 provided by the embodiment has good current-carrying performance, high stability, uniform heating and good heat conduction performance when in work. Applied to the superconducting magnet provided by any embodiment of the utility model, a closed loop can be formed between the superconducting switch 3 and each superconducting coil 1, so that an excitation power supply is removed, and the electricity consumption cost and the use cost of the superconducting magnet are reduced.
EXAMPLE III
FIG. 3 is a schematic axial view of a magnetically controlled Czochralski single crystal growing apparatus according to a third embodiment of the present invention. As shown in fig. 3, a third embodiment of the present invention provides a magnetically controlled czochralski single crystal growing apparatus, which includes a single crystal furnace 11 and a superconducting magnet provided by any embodiment of the present invention. The superconducting magnet is arranged outside the single crystal furnace 11 and used for closing the superconducting switch 3 when the superconducting magnet is excited to a set magnetic field by an excitation power supply, so that the superconducting coil 1 forms a magnetic field required by magnetically controlling the Czochralski single crystal, and the excitation power supply is removed.
In the magnetic control czochralski single crystal equipment provided by the embodiment, when the single crystal is prepared, the magnet is vacuumized, then the switch of the refrigerator 6 is turned on, the superconducting magnet is cooled to the ultralow temperature, preferably below 5K, and the superconducting coil 1 and the superconducting switch 3 are cooled to the superconducting state. The heater power supply is turned on, the superconducting switch 3 is heated by joule heat generated by the current passing through the heater 9, and when the temperature of the superconducting switch 3 is higher than the critical temperature, the superconducting state is lost, and the superconducting switch is in the off mode. When a magnetic field needs to be added, an excitation power supply is turned on to excite the superconducting coil 1. When the magnetic field strength reaches the required magnetic field strength, preferably 3000Gs, the heater power supply is turned off, the temperature of the superconducting switch 3 is reduced to be lower than the critical temperature, the superconducting switch 3 is restored to the superconducting state and is in a closed conduction mode, at the moment, the current forms a closed loop in the superconducting switch 3 and the superconducting coil 1 and does not pass through the excitation power supply, the excitation power supply can be removed, at the moment, the superconducting magnet can still keep a continuous and constant magnetic field, and the preparation of the single crystal 12 is continuously completed in the single crystal furnace.
Compared with the prior art, the magnetic control czochralski single crystal pulling equipment with the structure of the embodiment can ensure that the excitation power supply is supplied discontinuously, thereby saving the electric power and the use cost. In addition, the influence of the excitation power supply ripple on the magnetic field is reduced, the magnetic field stability is increased, the quality of the single crystal is improved, the spatial arrangement of magnetic control straight pulling single crystal equipment is reduced, and the safety of single crystal production operation is improved.
The foregoing is considered as illustrative of the preferred embodiments of the invention only, and is for the purpose of promoting an understanding of the principles of the invention, and it is to be understood that the scope of the invention is not limited by such specific language. All the possible equivalents and modifications made in the above description are considered to fall within the scope of the present invention.
Claims (10)
1. A superconducting magnet for use in a magnetically controlled Czochralski single crystal production process, the superconducting magnet comprising: the superconducting switch, the superconducting coil, the coil framework and the cryostat; wherein:
the number of the superconducting coils is one group or multiple groups, the superconducting coils are fixed on the coil framework, and the superconducting coils are mutually connected in series;
the number of the superconducting switches is at least one, the superconducting switches are connected with the superconducting coils in parallel and are used for being closed when the superconducting coils are excited to a set magnetic field through an excitation power supply so as to communicate the superconducting coils to form a closed loop;
the superconducting switch is fixed in a set low magnetic field area of the coil framework;
the coil bobbin is placed in the cryostat, and the cryostat is provided with a refrigerator and used for manufacturing an environment meeting a set low-temperature condition so as to enable the superconducting coil and the superconducting switch to be in a superconducting state.
2. A superconducting magnet according to claim 1, wherein: the coil framework is characterized by further comprising a hoop, and the hoop is used for fixing the superconducting coil and the coil framework.
3. A superconducting magnet according to claim 1, wherein: the structure of the cryostat is a liquid helium soaking structure, and the superconducting switch is a heating superconducting switch.
4. A superconducting magnet according to claim 3, wherein: the superconducting switch includes: the device comprises a non-inductive coil, a heater, a switch framework and a binding post;
the non-inductive coil is wound on the switch framework in a non-inductive winding mode;
the inlet wire and the outlet wire of the non-inductive coil are connected with the wiring terminal;
the superconducting coil is connected to the binding post;
the heater is closely attached to the non-inductive coil and is wound and fixed by glass fiber cloth;
and the incoming line and the outgoing line of the heater are led out from the superconducting magnet and are connected with an external heating power supply module for controlling the on and off of the superconducting switch.
5. A superconducting magnet according to claim 4, wherein: and filling gaps generated during winding of the superconducting switch with epoxy resin.
6. A superconducting magnet according to claim 4, wherein: the switch framework is made of metal materials, and a layer of insulating materials is pasted on the inner surface of the switch framework.
7. A superconducting magnet according to claim 1, wherein: the structure of the cryostat can be a direct cooling structure without liquid helium; the superconducting switch is a heating type superconducting switch or a mechanical type superconducting switch.
8. A superconducting magnet according to any of claims 1-7, wherein: further comprising: and the quench protection module is connected with the superconducting switch in parallel, and is used for limiting the voltage at two ends of the superconducting switch when the superconducting coil quenches or the superconducting switch quenches, and the quench protection module is used as a magnetic field energy release path.
9. A superconducting magnet according to claim 8, wherein: the quench protection module comprises a set of diodes connected in anti-parallel.
10. A magnetic control czochralski single crystal equipment comprises a single crystal furnace and a superconducting magnet, and is characterized in that: the superconducting magnet is the superconducting magnet as claimed in any one of claims 1 to 9, and the superconducting magnet is arranged outside the single crystal furnace and used for closing the superconducting switch when being excited to a set magnetic field by an excitation power supply, so that the superconducting coil forms a magnetic field required by magnetically controlling the Czochralski single crystal.
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| CN201920863470.9U CN209859725U (en) | 2019-06-10 | 2019-06-10 | Superconducting magnet and magnetic control straight pulling single crystal equipment |
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| CN201920863470.9U CN209859725U (en) | 2019-06-10 | 2019-06-10 | Superconducting magnet and magnetic control straight pulling single crystal equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110136915A (en) * | 2019-06-10 | 2019-08-16 | 杭州慧翔电液技术开发有限公司 | A kind of superconducting magnet and magnetic control pulling of crystals equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110136915A (en) * | 2019-06-10 | 2019-08-16 | 杭州慧翔电液技术开发有限公司 | A kind of superconducting magnet and magnetic control pulling of crystals equipment |
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