CN215933291U - Magnetic control single crystal pulling superconducting magnet for conduction cooling - Google Patents
Magnetic control single crystal pulling superconducting magnet for conduction cooling Download PDFInfo
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- CN215933291U CN215933291U CN202121678574.6U CN202121678574U CN215933291U CN 215933291 U CN215933291 U CN 215933291U CN 202121678574 U CN202121678574 U CN 202121678574U CN 215933291 U CN215933291 U CN 215933291U
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Abstract
A magnetic control single crystal pulling superconducting magnet for conduction cooling comprises a coil framework, wherein the arc section of the coil framework is connected with a left coil cold conduction connecting device and a right coil cold conduction connecting device; the upper sides of the left and right coil cold conduction connecting devices are provided with cold shield cold conduction devices, and the lower sides of the left and right coil cold conduction connecting devices are provided with coil cold conduction devices; connecting the primary cold head of the G-M refrigerator with the secondary cold head of the G-M refrigerator by using a heat pipe; the upper side of the cold screen cold guide device is connected with the G-M refrigerator; arranging a cooling magnetic control single crystal pulling superconducting magnet; filling gas into the heat pipe, and opening the G-M refrigerator to cool the test sample; the superconducting coil is cooled quickly; has the characteristic of high cooling efficiency.
Description
Technical Field
The utility model belongs to the technical field of magnetic control single crystal pulling application, and particularly relates to a superconducting magnet for conduction cooling magnetic control single crystal pulling.
Background
The high-purity monocrystalline silicon is widely applied to industries such as solar cells, integrated circuits, semiconductors and the like, is one of key materials of high and new technology industries such as photovoltaic power generation, electronic information and the like, and has an important strategic position in terms of energy, information and national safety. However, due to the high design technical difficulty, the high processing and manufacturing difficulty, the high cost and the high risk of the large-scale superconducting strong magnet device, which is the core component of the magnetic pulling single crystal technology, the related basic research and the technology accumulation in China are caused, and the technology is completely monopolized by the countries of the day, the U.S. and the Germany.
According to the research and study of the existing documents, the regional and monopolized property of the processing and preparation of the single crystal silicon in the field of the superconducting magnet for magnetically controlled pulling of the single crystal leads to that the prior foreign development units are mainly enterprises such as Sumitomo, Toshiba and Japan superconducting technology company (JASTEC), and the magnet preparation technology in the field is almost completely in a confidential and blocked state. Although the related research of domestic monocrystalline silicon starts with japan, the production technology level is still relatively low in the present general, and most of the domestic integrated circuits and silicon wafers thereof still depend on importation. However, the accumulation and development of the superconducting magnet are catching up over the years, and related patents are protected and applied in recent years, such as patent document with publication number (CN 103106994A), and a MgB2 superconducting magnet for magnetically controlled Czochralski single crystal is proposed; patent document No. (CN 110136915A) proposes a superconducting magnet and a magnetic control czochralski single crystal pulling apparatus, however, most of the prior magnets have the following problems that the cooling is performed by liquid helium or by direct heat conduction of a G-M refrigerator, the liquid helium cooling method is adopted, the cost is very high due to the liquid helium being a scarce resource, the G-M refrigerator direct heat conduction cooling method is adopted, the required cooling time is very long, according to the quality of a cold body of the magnet, the cooling of the superconducting magnet of 8 inches and 12 inches generally requires 14-20 days, the cost of the cooling time is very high, and the problem is that the production efficiency is seriously affected in the use process of the magnet at present. Meanwhile, in the actual operation process, the temperature of the superconducting magnet is increased due to magnet quench caused by various conditions, so that the temperature needs to be reduced to below the critical operating temperature of the superconducting magnet again. Therefore, the temperature reduction time of the superconducting magnet is long and short, and the use efficiency of the magnet in actual production is seriously influenced in practice.
Disclosure of Invention
In order to overcome the defects of the prior art, the utility model aims to provide a superconducting magnet for conduction cooling magnetic control single crystal pulling, which is introduced with a heat pipe, so that the cooling efficiency of the magnet is improved, the time for cooling the magnet from room temperature to the temperature below the critical operating temperature of a superconducting wire is shortened, the time cost is reduced, and the production efficiency of the magnet is improved.
In order to achieve the purpose, the utility model adopts the technical scheme that: a magnetic control single crystal pulling superconducting magnet for conduction cooling comprises a coil framework, wherein the arc section of the coil framework is connected with a left coil cold conduction connecting device and a right coil cold conduction connecting device; the upper sides of the left and right coil cold conduction connecting devices are provided with cold shield cold conduction devices, and the lower sides of the left and right coil cold conduction connecting devices are provided with coil cold conduction devices; connecting the primary cold head of the G-M refrigerator with the secondary cold head of the G-M refrigerator by using a heat pipe; the upper side of the cold shield cold guide device 8 is connected with the G-M refrigerator.
The upper end of the heat pipe is provided with a heat pipe upper end connected with a cold conducting piece, and the lower end of the heat pipe is provided with a heat pipe lower end connected with a cold conducting piece; the upper end of the heat pipe is connected with the lower part of the cold conducting part and is connected with a heat pipe high-temperature end condenser, and the heat pipe high-temperature end condenser is positioned in the heat pipe cavity; the lower end of the heat pipe is connected with the upper part of the cold conducting part and is connected with a heat exchanger at the lower end of the heat pipe, and the heat exchanger at the lower end of the heat pipe is positioned in the cavity of the heat pipe; the upper end of the heat pipe cavity is communicated with a gas inlet pipe of the heat pipe condenser.
The heat conduction coefficient of the heat pipe upper end connecting cold conduction piece and the heat pipe lower end connecting cold conduction piece is 200-700W/m.
The upper end of the heat pipe is connected with the cold guide piece and the condenser at the high temperature end of the heat pipe, and the material of the cold guide piece and the condenser at the high temperature end of the heat pipe is high-purity oxygen-free copper or high-purity aluminum.
The heat conduction coefficient of the materials at the upper end and the lower end of the heat pipe cavity is 0.1-1W/m.
The upper end and the lower end of the heat pipe cavity are made of stainless steel, brass, beryllium copper or titanium alloy.
The cold conduction structure of the heat pipe upper end connecting cold conduction piece and the heat pipe lower end connecting cold conduction piece adopts a multilayer nested structure.
The gas inlet pipe of the heat pipe condenser sequentially penetrates through the upper end of the heat pipe to be connected with the cold conducting piece and the heat pipe high-temperature end condenser.
The utility model has the beneficial effects that:
1) the design concept of the heat pipe is introduced on the basis of the saddle-shaped coil structure, the heat pipe is adopted to connect the primary cold head and the secondary cold head of the G-M refrigerator, the characteristic that the refrigerating power of the primary cold head is high is utilized, when the temperature of the superconducting coil is higher, the gas in the heat pipe connects the primary cold head and the secondary cold head, so that the cooling of the coil can be far greater than the cold quantity of the secondary cold head by means of the primary cold head of the G-M refrigerator, the cooling speed of the coil is accelerated, and the cooling efficiency is improved. When the temperature of the superconducting coil is lower than the liquefaction temperature of the filled gas, the low-temperature end of the heat pipe can solidify the gas liquid helium even, so that a vacuum-like form is formed in the heat pipe, and the primary cold head is disconnected with the secondary cold head, so that the problem that the primary cold head influences the cooling of the secondary cold head at low temperature is avoided.
2) The saddle-shaped coil structure ensures that the using amount of the superconducting wire is less under the condition of unit magnetic field intensity, so that the inductance and the energy storage of the magnet are smaller compared with the traditional magnetic control single crystal pulling magnet, and the quench protection is facilitated. Meanwhile, after the magnet is quenched, partial stored energy of the magnet is discharged at the room temperature end, so that the temperature rise of the magnet is much lower than that of the traditional magnet, and the temperature of the coil is reduced by adopting a G-M refrigerator in a short time through a heat pipe, the magnetic field of the magnet is recovered, and the production quality and efficiency of pulling the single crystal are prevented from being influenced.
3) The upper end of the heat pipe is connected with the cold conducting piece, the lower end of the heat pipe is connected with the cold conducting piece, the cold conducting piece is made of materials with high heat conduction coefficients, such as high-purity oxygen-free copper, high-purity aluminum and the like, and the connecting cavity body of the upper end part and the lower end part is made of stainless steel, brass, beryllium copper or titanium alloy materials and the like with very small heat conduction coefficients. Meanwhile, the cold guide structure of the upper end part heat exchanger and the lower end part heat exchanger adopts a multilayer nested structure, the heat exchange area with gas is increased, the heat exchange efficiency is improved, and the cooling time can be shortened by more than half by adopting the technology of the patent application.
4) The heat pipe is connected with the first-stage cold head and the second-stage cold head of the G-M refrigerator through bolts, but considering that the cold head of the G-M refrigerator is stressed due to the fact that different materials have different cold contraction and thermal expansion coefficients, flexible structures such as but not limited to corrugated pipes, flexible connection structures and the like are introduced into the connection structure.
Compared with the traditional magnetic pulling single crystal superconducting magnet, the magnet of the utility model can provide higher cooling efficiency, and greatly shorten the cooling time of the magnet from room temperature to superconducting critical temperature. Meanwhile, the method can better solve the problem that the production efficiency is affected due to an emergency situation in the actual production process of the magnetic control pulling of the single crystal or too long cooling time after the magnet is heated due to magnet maintenance, and has important practical requirements for better promoting the localization, batch, stability, efficient use and other problems of the magnet prepared from the single crystal silicon.
By the utility model, the applicant introduces the design concept of the heat pipe on the basis of the saddle-shaped novel superconducting coil structure, the primary cold head and the secondary cold head of the G-M refrigerator are connected by adopting the heat pipe, and the characteristic of high refrigerating power of the primary cold head is utilized, when the temperature of the superconducting coil is higher, the primary cold head and the secondary cold head are connected by gas in the heat pipe, so that the cooling of the coil can be far greater than the cold quantity of the secondary cold head by the aid of the primary cold head of the G-M refrigerator, the cooling speed of the coil is accelerated, the cooling efficiency is improved, and related data show that the cooling time can be at least shortened by more than half compared with the cooling time of the traditional G-M refrigerator directly, thereby greatly improving the production and use efficiency of the monocrystalline silicon magnet.
Drawings
FIG. 1 is a general diagram of a novel magnetic control single crystal pulling superconducting magnet with conduction cooling by means of heat pipe cooling.
FIG. 2 is a side view of a magnet with heat pipe cooling.
FIG. 3 is a schematic diagram of the connection of a heat pipe to a chiller assembly.
FIG. 4 is a schematic diagram of the heat pipe structure and operation principle.
In the figure: 1. a magnetic shield iron yoke; 2. a vacuum outer Dewar; 3. cooling the screen; 4. a coil bobbin; 5. a superconducting coil; 6. a coil cold conducting device; 7. a G-M refrigerator; 8. a cold shield cold guide device; 9. a heat pipe; 10. cold conducting connecting pieces for the left coil and the right coil; 11. a primary cold head of the G-M refrigerator; 12. a secondary cold head of the G-M refrigerator; 13. the upper end of the heat pipe is connected with a cold conducting piece; 14. a heat pipe high temperature end condenser; 15. a heat pipe cavity; 16. a heat exchanger at the lower end of the heat pipe; 17. the lower end of the heat pipe is connected with a cold conducting piece; 18. and a heat pipe condenser gas inlet pipe.
Detailed Description
The utility model will be described in more detail with reference to the following examples and the accompanying drawings
A magnetic control single crystal pulling superconducting magnet for conduction cooling comprises a coil framework 4, wherein the arc section of the coil framework 4 is connected with a left coil and a right coil cold conduction connecting device 10; the upper side of the left and right coil cold conduction connecting devices 10 is provided with a cold shield cold conduction device 8, and the lower side of the left and right coil cold conduction connecting devices 10 is provided with a coil cold conduction device 6; a primary cold head 11 of the G-M refrigerator is connected with a secondary cold head 12 of the G-M refrigerator by a heat pipe 9; the upper side of the cold screen cold guide device 8 is connected with the G-M refrigerator 7.
The upper end of the heat pipe 9 is provided with a heat pipe upper end connecting cold-conducting piece 13, and the lower end is provided with a heat pipe lower end connecting cold-conducting piece 17; the upper end of the heat pipe is connected with the lower part of the cold conducting piece 13 and is connected with a heat pipe high-temperature end condenser 14, and the heat pipe high-temperature end condenser 14 is positioned in the heat pipe cavity 15; the upper part of the heat pipe lower end connecting cold-conducting piece 17 is connected with a heat pipe lower end heat exchanger 16, and the heat pipe lower end heat exchanger 16 is positioned in the heat pipe cavity 15; the upper end of the heat pipe cavity 15 is communicated with a heat pipe condenser gas inlet pipe 18.
And the heat conduction coefficient of the heat pipe upper end connecting cold conduction piece 13 and the heat pipe lower end connecting cold conduction piece 17 is 200-700W/m.
The upper end of the heat pipe is connected with the cold conducting piece 13 and the high-temperature end condenser 14 of the heat pipe, and the material is high-purity oxygen-free copper or high-purity aluminum.
The heat conduction coefficient of the materials at the upper end and the lower end of the heat pipe cavity 15 is 0.1-1W/m.
The upper end and the lower end of the heat pipe cavity 15 are made of stainless steel, brass, beryllium copper or titanium alloy.
The cold guide structure of the heat pipe upper end connecting cold guide part 13 and the heat pipe lower end connecting cold guide part 17 adopts a multilayer nested structure.
The heat pipe condenser gas inlet pipe 18 sequentially penetrates through the upper end of the heat pipe to be connected with the cold conducting piece 13 and the heat pipe high-temperature end condenser 14.
A cooling method for conduction cooling of a magnetically controlled single crystal pulling superconducting magnet comprises the following steps:
the saddle-shaped superconducting coils 5 are symmetrically arranged left and right, the superconducting coils 5 are wound on the coil framework 4, and the arc sections of the coil framework 4 are connected with the left and right coil cold-conducting connecting devices 10; the upper side of the left and right coil cold conduction connecting devices 10 is provided with a cold shield cold conduction device 8, and the lower side of the left and right coil cold conduction connecting devices 10 is provided with a coil cold conduction device 6; a primary cold head 11 of the G-M refrigerator is connected with a secondary cold head 12 of the G-M refrigerator by a heat pipe 9; the upper side of the cold shield cold guide device 8 is connected with the G-M refrigerator 7; the upper end of the heat pipe 9 is provided with a heat pipe upper end connecting cold-conducting piece 13, and the lower end is provided with a heat pipe lower end connecting cold-conducting piece 17; the upper end of the heat pipe is connected with the lower part of the cold conducting piece 13 and is connected with a heat pipe high-temperature end condenser 14, and the heat pipe high-temperature end condenser 14 is positioned in the heat pipe cavity 15; the upper part of the heat pipe lower end connecting cold-conducting piece 17 is connected with a heat pipe lower end heat exchanger 16, and the heat pipe lower end heat exchanger 16 is positioned in the heat pipe cavity 15; the upper end of the heat pipe cavity 15 is communicated with a heat pipe condenser gas inlet pipe 18;
step 3, in the early stage of cooling, when the temperature of the superconducting coil is higher, the gas in the heat pipe connects the primary cold head 11 with the secondary cold head 12, even when the temperature of the G-M refrigerator is lower than the liquefaction temperature of the gas, the gas is liquefied by the condenser 14 at the high-temperature end of the heat pipe, the liquefied gas is dripped into the lower end of the heat pipe due to gravity to be connected with the cold conducting piece 17, so that the cooling of the superconducting coil is far higher than the cold quantity of the secondary cold head of the G-M refrigerator by virtue of the primary cold head of the G-M refrigerator, the cooling speed of the superconducting coil is accelerated, and the cooling efficiency is improved; when the temperature of the superconducting coil is lower than the liquefaction temperature of the charged gas, the lower end of the heat pipe is connected with the cold-conducting piece 17 to solidify the gas liquid helium even to form a vacuum form in the heat pipe, and the primary cold head of the G-M refrigerator is disconnected with the secondary cold head of the G-M refrigerator, so that the problem that the temperature of the secondary cold head of the G-M refrigerator is influenced by the high temperature of the primary cold head of the G-M refrigerator at low temperature can be avoided, and the rapid cooling of the superconducting coil is finally realized.
The gas is inert gas, including but not limited to nitrogen, argon, neon.
A secondary cold head and coil cold-conducting piece 6 of the G-M refrigerator; cold shield cold guide device 8
The system comprises the following components: the novel cooling for the conduction cooling magnetic control single crystal pulling superconducting magnet in the patentThe method comprises the steps that firstly, the magnet is in a left-right symmetrical structure as shown in figure formed by a saddle-shaped superconducting coil 5, the superconducting coil 5 is wound on a coil framework 4, the coil framework 4 provides structural support for the coil to resist coil deformation caused by electromagnetic force during operation, meanwhile, the coil framework 4 also serves as a cold conducting component of the superconducting coil, and a secondary cold head of a G-M refrigerator is connected with a coil cold conducting piece 6 and a G-M refrigerating secondary cold head 12 through the G-M refrigerator, as shown in figure 2, because the G-M refrigerator has low cold energy at low temperature, in order to ensure that the superconducting coil can be cooled below the critical temperature of a superconducting wire, firstly, the superconducting coil 5 is isolated from a vacuum outer Dewar 2 through a superconducting coil cold body supporting structure, and simultaneously, the vacuum outer Dewar 2 also provides a vacuum cooling environment for the superconducting coil, in order to reduce the heat radiation, the cold screen 3 and the primary cold head 11 of the G-M refrigerator are passed throughCold shield cold guide deviceAnd 8, the temperature of the cold shield 3 is reduced, and the heat radiation and heat leakage between the superconducting coil and the outer dewar in vacuum are reduced. During operation, according to the use requirement, a magnetic shielding iron yoke 1 can be additionally arranged outside the superconducting magnet vacuum outer Dewar to carry out magnetic field shielding so as to further reduce the influence of magnetic leakage on nearby electromagnetic equipment.
Finally, a design concept of a heat pipe is introduced on the basis of a saddle-shaped coil structure, a primary cold head 11 and a secondary cold head 12 of the G-M refrigerator are connected by the heat pipe 9, as shown in fig. 3, by utilizing the characteristic that the refrigerating power of the primary cold head is high, when the temperature of the superconducting coil is higher, the gas in the heat pipe connects the primary cold head 11 and the secondary cold head 12, even when the temperature of the G-M refrigerator is lower than the liquefying temperature of the gas, the upper end condensing structure 14 of the heat pipe can liquefy the gas, and the liquefied gas directly drops into the low-temperature end 17 of the heat pipe due to gravity, so that the temperature of the coil can be reduced by the aid of the cold quantity of the primary cold head of the G-M refrigerator which is far greater than that of the secondary cold head, the cooling speed of the coil is increased, and the cooling efficiency is improved. When the temperature of the coil is lower than the liquefaction temperature of the filled gas, the low-temperature end 17 of the heat pipe can solidify the gas liquid helium even, so that a vacuum-like form is formed in the heat pipe, and the primary cold head is disconnected with the secondary cold head, so that the problem that the primary cold head influences the cooling of the secondary cold head when the temperature is low is avoided.
And (3) test operation: when the magnetic control single crystal pulling magnet has the operation condition, gas such as but not limited to nitrogen, argon, neon and the like is filled into the heat pipe through the heat pipe condenser gas inlet pipe 18, and the specific pressure value needs to be obtained through calculation according to specific parameters of the heat pipe. Then a vacuum machine set is used for vacuumizing the vacuum Dewar 2, and when the vacuum degree reaches 10-2And when the Pa magnitude is higher, opening a G-M refrigerator to cool the test sample. When the temperature of the superconducting coil is higher in the early stage of cooling, the gas in the heat pipe connects the primary cold head 11 with the secondary cold head 12, even when the temperature of the G-M refrigerator is lower than the liquefaction temperature of the gas, the upper end condensation structure 14 of the heat pipe can liquefy the gas, the liquefied gas directly drips into the lower end of the heat pipe due to gravity to be connected with the cold conducting piece 17 (the thermoacoustic oscillation phenomenon is generated, and the corresponding heat exchange coefficient is greatly increased), as shown in figure 4, the cooling of the superconducting coil can be greatly higher than the cold quantity of the secondary cold head by means of the primary cold head of the G-M refrigerator, so that the cooling speed of the superconducting coil is accelerated, and the cooling efficiency is improved. When the temperature of the superconducting coil is lower than the liquefaction temperature of the charged gas, the lower end of the heat pipe is connected with the cold-conducting piece 17 to solidify the gas liquid helium even, so that a vacuum form is formed in the heat pipe, and the primary cold head of the G-M refrigerator is disconnected with the secondary cold head of the G-M refrigerator, thereby avoiding the problem that the cooling of the secondary cold head of the G-M refrigerator is influenced by the high temperature of the primary cold head of the G-M refrigerator at low temperature, and finally realizing the rapid cooling of the superconducting coil. And finally, monitoring the temperature of the important temperature detection point by using a temperature sensor. When the temperature of the saddle-shaped superconducting coil inside reaches a design value and is stable, an excitation power supply is started, the magnitude of current is adjusted, the superconducting coil is electrified and excited through a binary current lead, and finally, when the current reaches a required value, single crystal pulling production is realized by combining a single crystal furnace.
Claims (8)
1. A magnetic control single crystal pulling superconducting magnet for conduction cooling comprises a coil framework (4), and is characterized in that the arc section of the coil framework (4) is connected with a left coil and a right coil cold conduction connecting device (10); the upper side of the left and right coil cold conduction connecting devices (10) is provided with a cold shield cold conduction device (8), and the lower side of the left and right coil cold conduction connecting devices (10) is provided with a coil cold conduction device (6); a primary cold head (11) of the G-M refrigerator is connected with a secondary cold head (12) of the G-M refrigerator by a heat pipe (9); the upper side of the cold screen cold guide device (8) is connected with the G-M refrigerator (7).
2. A superconducting magnet for conduction cooling of magnetron pulled single crystal according to claim 1, wherein the upper end of the heat pipe (9) is provided with a heat pipe upper end connecting cooling conducting piece (13), and the lower end is provided with a heat pipe lower end connecting cooling conducting piece (17); the upper end of the heat pipe is connected with the lower part of the cold conducting piece (13) and is connected with a heat pipe high-temperature end condenser (14), and the heat pipe high-temperature end condenser (14) is positioned in the heat pipe cavity (15); the upper part of the heat pipe lower end connecting and cold conducting piece (17) is connected with a heat pipe lower end heat exchanger (16), and the heat pipe lower end heat exchanger (16) is positioned in the heat pipe cavity (15); the upper end of the heat pipe cavity (15) is communicated with a gas inlet pipe (18) of the heat pipe condenser.
3. A superconducting magnet for conduction cooling of a magnetron pulled single crystal according to claim 2, wherein the heat conduction coefficient of the heat pipe upper end connecting cooling piece (13) and the heat pipe lower end connecting cooling piece (17) is 200-700W/m K.
4. A superconducting magnet for conduction cooling of magnetron pulled single crystal according to claim 2, wherein the material of the heat pipe upper end connecting cooling piece (13) and the heat pipe high temperature end condenser (14) is high purity oxygen-free copper or high purity aluminum.
5. A superconducting magnet for conduction cooling of a magnetron pulled single crystal according to claim 2, wherein the material of the upper and lower ends of the heat pipe cavity (15) has a thermal conductivity of 0.1-1W/m K.
6. A superconducting magnet for conduction cooling of a magnetron pulled single crystal according to claim 2, wherein the material of the upper and lower ends of the heat pipe cavity (15) is stainless steel, brass, beryllium copper or titanium alloy.
7. A superconducting magnet for conduction cooling of magnetron pulled single crystal according to claim 2, wherein the structure of the upper end of the heat pipe connected with the cooling conducting piece (13) and the lower end of the heat pipe connected with the cooling conducting piece (17) adopts a multi-layer nested structure.
8. A superconducting magnet for conduction cooling of a magnetron pulled single crystal according to claim 2, wherein the gas inlet tube (18) of the heat pipe condenser passes through the upper end of the heat pipe and is connected with the cooling conducting member (13) and the condenser (14) of the high temperature end of the heat pipe in sequence.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116031040A (en) * | 2023-02-24 | 2023-04-28 | 安徽联效科技有限公司 | Superconducting magnet for magnetic control Czochralski single crystal and refrigerating method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116031040A (en) * | 2023-02-24 | 2023-04-28 | 安徽联效科技有限公司 | Superconducting magnet for magnetic control Czochralski single crystal and refrigerating method |
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