CN111009375A - Conduction cooling magnetic control single crystal pulling superconducting magnet device - Google Patents
Conduction cooling magnetic control single crystal pulling superconducting magnet device Download PDFInfo
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- CN111009375A CN111009375A CN201911317570.2A CN201911317570A CN111009375A CN 111009375 A CN111009375 A CN 111009375A CN 201911317570 A CN201911317570 A CN 201911317570A CN 111009375 A CN111009375 A CN 111009375A
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- 239000013078 crystal Substances 0.000 title claims abstract description 24
- 238000001816 cooling Methods 0.000 title claims abstract description 19
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 36
- 229910052742 iron Inorganic materials 0.000 claims abstract description 18
- 239000007769 metal material Substances 0.000 claims description 3
- 241000764238 Isis Species 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000012360 testing method Methods 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 5
- 238000010923 batch production Methods 0.000 description 4
- 230000005284 excitation Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910020073 MgB2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F6/00—Superconducting magnets; Superconducting coils
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F6/00—Superconducting magnets; Superconducting coils
- H01F6/04—Cooling
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F6/00—Superconducting magnets; Superconducting coils
- H01F6/06—Coils, e.g. winding, insulating, terminating or casing arrangements therefor
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Abstract
A conduction cooling magnetic control single crystal pulling superconducting magnet device belongs to the technical field of superconducting magnets, and a vacuum outer Dewar is arranged in an iron yoke outer cylinder; a cold shield is arranged in the vacuum outer Dewar; two coil frameworks are arranged in the cold shield; each coil framework is provided with a saddle-shaped superconducting coil; the two saddle-shaped superconducting coils are connected through a left coil connecting device and a right coil connecting device; the outer sides of the left and right coil connecting devices are provided with cold conducting plates; the bottom of the cold guide plate is provided with a coil cold body supporting rod; the upper part of the cold guide plate is provided with a G-M refrigerator; the G-M refrigerator is also provided with a current lead; vacuumizing by a vacuum unit, and cooling a test sample by a GM refrigerator; compared with the traditional conventional electromagnet, the magnet device can provide higher magnetic field intensity, and the utilization rate of the magnet to the magnetic field is higher, so that the production cost is lower compared with the traditional magnetic control single crystal pulling magnet under the condition of the same magnetic field intensity requirement; has the characteristics of simple structure, high magnetic field utilization rate and low use cost.
Description
Technical Field
The invention belongs to the technical field of superconducting magnets, and particularly relates to a conduction cooling magnetic control single crystal pulling superconducting magnet device.
Background
The high-purity monocrystalline silicon is widely applied to industries such as solar cells, integrated circuits, semiconductors and the like, is one of key materials of high and new technology industries such as photovoltaic power generation, electronic information and the like, and has an important strategic position in terms of energy, information and national safety. However, due to the high design technical difficulty, the high processing and manufacturing difficulty, the high cost and the high risk of the large-scale superconducting strong magnet device, which is the core component of the magnetic pulling single crystal technology, the related basic research and the technology accumulation in China are caused, and the technology is completely monopolized by the countries of the day, the U.S. and the Germany.
According to the research and study of the existing documents, the regional and monopolized property of the processing and preparation of the single crystal silicon in the field of the superconducting magnet for magnetically controlled pulling of the single crystal leads to that the prior foreign development units are mainly enterprises such as Sumitomo, Toshiba and Japan superconducting technology company (Jastec), and the magnet preparation technology in the field is almost completely in a confidential and blocked state. Although the related research of domestic monocrystalline silicon starts with japan, the production technology level is still relatively low in the present general, and most of the domestic integrated circuits and silicon wafers thereof still depend on importation. However, the accumulation and development of the superconducting magnet are catching up with each other for many years, and related patents are also applied for protection in recent years, such as 'an MgB2 superconducting magnet for magnetically controlled czochralski single crystal' published by 2013, li super, yan fruit, etc.: (CN 103106994A), 2019, Tanghouming, Frielingjian et al, put forward a disclosure number of superconducting magnet and magnetic control straight-pull single crystal equipment: (CN 110136915A), however, most of the prior magnets have the following problems, for example, the magnet coils are 2 circular coils, 4 circular coil structures or even more, the structure is complex, the magnetic field utilization rate is not high, especially, the magnetic field utilization rate is low due to the mutual cancellation of the magnetic fields between the coils in the 4 coils and above structures, so the usage amount of the superconducting wire is large and the cost is high under the same magnetic field requirement, and the leakage field is large, so that a thicker iron yoke is required as a shielding material to reduce the influence on electromagnetic equipment and personnel near the magnet.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a conduction cooling magnetic control single crystal pulling superconducting magnet device, which can provide higher magnetic field intensity compared with the traditional conventional electromagnet, and through the proposal of a new concept, the magnet has higher utilization rate of the magnetic field, so that the production cost is lower compared with the traditional magnetic control single crystal pulling magnet under the condition of the same magnetic field intensity requirement, and the device has the characteristics of simple structure, high utilization rate of the magnetic field and low use cost.
In order to achieve the purpose, the invention adopts the technical scheme that: a conduction cooling magnetic control single crystal pulling superconducting magnet device comprises an iron yoke outer cylinder; a vacuum outer Dewar is arranged in the iron yoke outer cylinder; a cold shield is arranged in the vacuum outer Dewar; two coil frameworks are arranged in the cold shield; each coil framework is provided with a saddle-shaped superconducting coil, and the two saddle-shaped superconducting coils are arranged in a left-right symmetrical manner; the two saddle-shaped superconducting coils are connected through a left coil connecting plate and a right coil connecting plate; the outer sides of the left and right coil connecting devices are provided with cold conducting plates; a coil cold body supporting rod is arranged at the bottom of the cold conducting plate; the upper part of the cold guide plate is provided with a G-M refrigerator; and a current lead is arranged at the cold guide plate between the G-M refrigerator and the left and right coil connecting devices.
The circumferential angle between two ends of the saddle-shaped superconducting coil
Is less than 180 deg..
The coil cold body supporting rod is made of a non-metal material with a heat conduction coefficient smaller than 1W/m-K.
The invention has the beneficial effects that:
compared with the traditional 2-coil or 4-coil magnet, the saddle-shaped coil structure can improve the utilization rate of a magnetic field, and uses less superconducting wires under the condition of generating the same strength of a central magnetic field B, so that the saddle-shaped coil structure is low in production cost and convenient for large-scale batch production; meanwhile, because the amount of the superconducting coils is less, the quality of the coils is less, and therefore, when the same number of refrigerators are adopted to cool the magnet, the cooling time is shorter, and the use efficiency of the magnet is improved; the superconducting wire is less in consumption, so that the overall inductance of the magnet is smaller, and the highest voltage of a power supply required by electrification and excitation is lower than that of a common single crystal pulling magnet under the condition of the same electrification rate, so that the cost of the electrification power supply is saved.
The saddle-shaped coil structure improves the utilization rate of a magnetic field, has smaller magnetic leakage of a magnet under the condition of generating the same strength of a central magnetic field B, has smaller influence on surrounding electromagnetic equipment and people, and greatly reduces the iron yoke material required by magnetic leakage protection if magnetic shielding is needed;
the left saddle-shaped superconducting coil and the right saddle-shaped superconducting coil are connected by adopting an annular supporting plate, and the superconducting coils and an external Dewar heat source are connected by adopting a coil cold body supporting structure, so that heat leakage of a smaller system is isolated;
because the saddle-shaped coil has small magnetic flux leakage at the joint of the left coil and the right coil, the G-M refrigerator can be arranged at the middle height of the whole magnet, thereby reducing the length of a cold conduction path, saving the time for cooling the magnet from normal temperature to the critical temperature of the superconducting wire and improving the operating efficiency of the magnet;
because the G-M refrigerator is adopted for direct cooling, the dependence on liquid helium scarce resources is avoided;
because of the circumferential angle of the saddle-shaped coil
The magnetic field adjusting device has the advantages that the magnetic field adjusting device can be adjusted according to the requirement of a magnetic field, the flexibility is high, the coil is integrally arc-shaped, the occupied space size is smaller than that of a traditional solenoid coil, and finally the occupied space position of a magnet is smaller.
Compared with the prior art, the invention adopts the saddle-shaped novel superconducting coil structure, so that the magnetic field utilization rate is higher, and under the condition of the same magnetic field intensity requirement, the usage amount of the straight-pull single crystal superconducting wire is less, the coil weight is lighter, the G-M conduction cooling time is shorter, and the operation does not depend on the scarce resource of liquid helium; magnet the device is simpler; the leakage field of the magnet is low, the needed magnetic shielding materials of the iron yoke are less, and the influence on nearby electromagnetic equipment and personnel is less; therefore, the superconducting cost for producing the magnetic control pulling single crystal is lower, and the large-scale batch production is convenient.
The superconducting coil structure of the invention ensures that the Czochralski single crystal magnet has simple device and lower superconducting wire usage amount under the condition of higher magnetic field utilization rate and higher unit magnetic field intensity, thereby having low production cost and being convenient for large-scale batch production.
Meanwhile, the conduction cooling magnetic control monocrystal pulling superconducting magnet has important practical requirements and scientific significance for promoting the localization of the magnet prepared from the monocrystalline silicon and realizing the rapid development of the national monocrystalline silicon preparation technology.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2(a) is a distribution diagram of the superconducting coil structure and the magnetic field in the magnet on the midplane.
FIG. 2(b) is a top view of the superconducting coil structure inside the magnet and the distribution of the magnetic field in the midplane.
In the figure: 1. an iron yoke outer cylinder; 2. a vacuum outer Dewar; 3. cooling the screen; 4. a coil bobbin; 5. a superconducting coil; 6. a left coil connecting plate and a right coil connecting plate; 7. a G-M refrigerator; 8. a cold conducting plate; 9. a coil cold body support rod; 10. and a current lead.
Detailed Description
The structural and operational principles of the present invention are explained in further detail below with reference to the accompanying drawings and examples.
Referring to fig. 1 and 2(a) - (b), a conduction cooling magnetic control single crystal pulling superconducting magnet device comprises an iron yoke outer cylinder 1; a vacuum outer Dewar 2 is arranged in the iron yoke outer cylinder 1; a cold shield 3 is arranged in the vacuum outer Dewar 2; two coil frameworks 4 are arranged in the cold shield 3; each coil framework 4 is provided with a saddle-shaped superconducting coil 5, and the two saddle-shaped superconducting coils 5 are arranged in a left-right symmetrical manner; the two saddle-shaped superconducting coils 5 are connected through a left coil connecting plate 6 and a right coil connecting plate 6; the outer sides of the left and right coil connecting plates 6 are provided with cold conducting plates 8; a coil cold body supporting rod 9 is arranged at the bottom of the cold conducting plate 8; the upper part of the cold guide plate 8 is provided with a G-M refrigerator 7; and a current lead wire 10 is arranged at the cold guide plate 8 between the G-M refrigerator 7 and the left and right coil connecting plates 6. The cold guide plate 8 is used for transmitting the cold energy of the G-M refrigerator to the superconducting coil for cooling; the current lead 10 is a high-temperature superconducting current lead, and can reduce heat conduction and leakage of the system and reduce joule heat during power-on excitation.
The circumferential angle of the saddle-shaped superconducting coil 5
The amount of the magnetic field is variable according to the requirement of the magnetic field.
The saddle-shaped novel superconducting coil structure is not only limited to the NbTi wire superconducting wire rod, but also is applicable to other superconducting materials;
the saddle-shaped coil structure can improve the utilization rate of a magnetic field compared with the traditional 2-coil or 4-coil magnet, and the superconducting wire is used in a smaller amount under the condition of generating the same central magnetic field B strength, so that the production cost is low, and the large-scale batch production is facilitated; meanwhile, because the amount of the superconducting coils is less, the quality of the coils is less, and therefore, when the same number of refrigerators are adopted to cool the magnet, the cooling time is shorter, and the use efficiency of the magnet is improved; the superconducting wire is less in consumption, so that the overall inductance of the magnet is smaller, and the highest voltage of a power supply required by electrification and excitation is lower than that of a common single crystal pulling magnet under the condition of the same electrification rate, so that the cost of the electrification power supply is saved.
The saddle-shaped coil structure improves the utilization rate of a magnetic field, the magnetic leakage of the magnet is smaller under the condition of generating the same central magnetic field B strength, the influence on surrounding electromagnetic equipment and people is smaller, and meanwhile, the iron yoke material required by magnetic leakage protection by adopting magnetic shielding is greatly reduced;
the left saddle-shaped superconducting coil and the right saddle-shaped superconducting coil are connected by adopting an annular supporting plate 6, and the superconducting coil is thermally isolated from an external Dewar heat source by adopting a coil cold body supporting rod 9, so that the heat leakage of the system is reduced;
because the saddle-shaped coil has small magnetic flux leakage at the joint of the left coil and the right coil, the G-M refrigerator can be arranged at the middle height of the whole magnet, thereby reducing the length of a cold conduction path, saving the time for cooling the magnet from normal temperature to the critical temperature of the superconducting wire and improving the operating efficiency of the magnet;
the G-M refrigerator is adopted for direct cooling, so that the dependence on liquid helium scarce resources is avoided;
saddle coils in fig. 2
The angle can be adjusted according to the magnetic field requirement, great flexibility is achieved, the coil is arc-shaped, the occupied space is smaller than that of a traditional solenoid coil, and finally the occupied space of the magnet is smaller.
Firstly, the magnet is composed of saddle-shaped superconducting coils 5 which form a left and right symmetrical structure as shown in figure 2, the superconducting coils are in a series connection structure on a circuit, the superconducting coils are wound on a framework 4, the coil framework 4 provides structural support for the saddle-shaped superconducting coils to resist the deformation of the superconducting coils caused by electromagnetic force during operation, the same coil framework 4 also serves as a cold guide structure of the superconducting coils, and is connected with a G-M refrigerator 7 through a cold guide plate 8, so that the possibility of temperature reduction is realized, but because the cold quantity of the G-M refrigerator is low at low temperature, in order to ensure that the coils can be cooled below the critical temperature of the superconducting wires, the magnet in the patent firstly needs to isolate the superconducting coils from a vacuum outer Dewar 2 through a coil cold body supporting rod 9 (the coil cold body supporting rod adopts a non-metal material with the heat conduction coefficient less than 1W/M-K), meanwhile, the cold shield 3 is adopted to reduce the heat radiation, and the coil is isolated from the vacuum outer Dewar.
During operation, according to the use requirement, an iron yoke outer cylinder 1 can be additionally arranged outside a superconducting magnet vacuum outer Dewar to carry out magnetic field shielding so as to further reduce the influence of magnetic leakage on nearby electromagnetic equipment, and certainly, the iron yoke 1 is not necessary, because the magnetic leakage of the magnet per se is relatively low for a saddle-shaped superconducting coil structure.
In operation, if an outer iron yoke cylinder 1 is added outside a vacuum outer Dewar of the superconducting magnet for magnetic field shielding in order to further reduce the influence of leakage flux on nearby electromagnetic equipment, larger electromagnetic force exists between the left and right superconducting coils and the iron yoke, and in order to prevent the superconducting coils from being attracted to the iron yoke, a left saddle-shaped superconducting coil connecting structure 6 and a right saddle-shaped superconducting coil connecting structure 6 are needed to be added between the left and right superconducting coils, so that the superconducting coils are not damaged when interacting with an external iron yoke.
And (3) test operation: after the production of the magnetic control pulling single crystal magnet is finished, firstly, a vacuum unit is used for vacuumizing, and when the vacuum degree reaches 10-2And when the Pa magnitude is larger than the standard, opening the GM refrigerator to cool the test sample, and monitoring the temperature of the important temperature detection point by adopting the temperature sensor. When the temperature of the saddle-shaped coil inside reaches the design value and is stable, an excitation power supply is started, the magnitude of current is adjusted, the superconducting coil is electrified and excited through a binary current lead 10, and finally, when the current reaches the required value, the single crystal growing furnace can be prepared for carrying out magnetic control crystal pulling production.
Claims (3)
1. A conduction cooling magnetic control single crystal pulling superconducting magnet device comprises an iron yoke outer cylinder (1); a vacuum outer Dewar (2) is arranged in the iron yoke outer cylinder (1); a cold shield (3) is arranged in the vacuum outer Dewar (2); two coil frameworks (4) are arranged in the cold shield (3); the superconducting coil is characterized in that each coil framework (4) is provided with a saddle-shaped superconducting coil (5), and the two saddle-shaped superconducting coils (5) are arranged in a left-right symmetrical manner; the two saddle-shaped superconducting coils (5) are connected through a left coil connecting plate and a right coil connecting plate (6); the outer sides of the left and right coil connecting devices (6) are provided with cold conducting plates (8); a coil cold body supporting rod (9) is arranged at the bottom of the cold conducting plate (8); a G-M refrigerator (7) is arranged at the upper part of the cold guide plate (8); a current lead (10) is arranged at the cold guide plate (8) between the G-M refrigerator (7) and the left and right coil connecting devices (6).
2. A conduction-cooled magnetron-controlled single crystal pulling superconducting magnet as claimed in claim 1, wherein the circumferential angle between the two ends of the saddle-shaped superconducting coil (5) is
Is less than 180 deg..
3. A conduction-cooled magnetron-pulled single crystal superconducting magnet as claimed in claim 1 wherein said coil cold body support rod (9) is of non-metallic material having a thermal conductivity of less than 1W/m-K.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911317570.2A CN111009375A (en) | 2019-12-19 | 2019-12-19 | Conduction cooling magnetic control single crystal pulling superconducting magnet device |
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| CN201911317570.2A CN111009375A (en) | 2019-12-19 | 2019-12-19 | Conduction cooling magnetic control single crystal pulling superconducting magnet device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113838626A (en) * | 2021-09-22 | 2021-12-24 | 西安聚能超导磁体科技有限公司 | Magnetic control single crystal pulling superconducting magnet and magnetic shielding method |
| CN113889314A (en) * | 2021-11-08 | 2022-01-04 | 西安聚能超导磁体科技有限公司 | Magnetic control single crystal pulling superconducting magnet coil and superconducting magnet device |
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| JPH11199367A (en) * | 1998-01-14 | 1999-07-27 | Sumitomo Heavy Ind Ltd | Refrigerator-cooling type superconductive magnet device for pulling-up device of single crystal |
| JP2003007526A (en) * | 2001-06-20 | 2003-01-10 | Sumitomo Heavy Ind Ltd | Refrigerator cooling type superconducting magnet device |
| JP2008028147A (en) * | 2006-07-21 | 2008-02-07 | Mitsubishi Electric Corp | Saddle-like coil exciting superconducting electromagnet apparatus and saddle-like coil winder |
| JP2008028097A (en) * | 2006-07-20 | 2008-02-07 | Mitsubishi Electric Corp | Superconducting electromagnet |
| US20110077161A1 (en) * | 2008-05-26 | 2011-03-31 | Kabushiki Kaisha Toshiba | Superconducting magnet device for single crystal pulling apparatus |
| CN102360692A (en) * | 2011-08-05 | 2012-02-22 | 白质明 | High temperature superconducting magnet for magnetic resonance imaging system |
| CN210535437U (en) * | 2019-12-19 | 2020-05-15 | 西部超导材料科技股份有限公司 | Conduction cooling magnetic control single crystal pulling superconducting magnet device |
-
2019
- 2019-12-19 CN CN201911317570.2A patent/CN111009375A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11199367A (en) * | 1998-01-14 | 1999-07-27 | Sumitomo Heavy Ind Ltd | Refrigerator-cooling type superconductive magnet device for pulling-up device of single crystal |
| JP2003007526A (en) * | 2001-06-20 | 2003-01-10 | Sumitomo Heavy Ind Ltd | Refrigerator cooling type superconducting magnet device |
| JP2008028097A (en) * | 2006-07-20 | 2008-02-07 | Mitsubishi Electric Corp | Superconducting electromagnet |
| JP2008028147A (en) * | 2006-07-21 | 2008-02-07 | Mitsubishi Electric Corp | Saddle-like coil exciting superconducting electromagnet apparatus and saddle-like coil winder |
| US20110077161A1 (en) * | 2008-05-26 | 2011-03-31 | Kabushiki Kaisha Toshiba | Superconducting magnet device for single crystal pulling apparatus |
| CN102360692A (en) * | 2011-08-05 | 2012-02-22 | 白质明 | High temperature superconducting magnet for magnetic resonance imaging system |
| CN210535437U (en) * | 2019-12-19 | 2020-05-15 | 西部超导材料科技股份有限公司 | Conduction cooling magnetic control single crystal pulling superconducting magnet device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113838626A (en) * | 2021-09-22 | 2021-12-24 | 西安聚能超导磁体科技有限公司 | Magnetic control single crystal pulling superconducting magnet and magnetic shielding method |
| CN113889314A (en) * | 2021-11-08 | 2022-01-04 | 西安聚能超导磁体科技有限公司 | Magnetic control single crystal pulling superconducting magnet coil and superconducting magnet device |
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