JP2008028097A - Superconducting electromagnet - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a superconducting electromagnet equipped with a superconducting coil which is capable of withstanding a large electromagnetic force. <P>SOLUTION: The superconducting electromagnet is equipped with a pair of superconducting coils 1, a helium vessel 3 which houses the superconducting electromagnet 1 together with its cooling medium, a cylindrical vacuum vessel 4 which contains the helium vessel 3, and a thermal shield 5 which surrounds the helium vessel 3. A flat board-shaped coil is formed, by winding a superconducting wire 14 into the shape of an ellipse, and fixing it with resin, as a unit coil 15; and the unit coils 15 are curved in the direction of the major or the minor axis, and are laminated therein by means of a coil-laminating jig 22; for instance, an insulating sheet 27 impregnated with resin is interposed between the layers of the unit coils 15, the laminated unit coils 15 are hardened and formed into an integral structure, the whole laminated unit coils 15 is formed into a saddle-shaped superconducting coil 1, and the saddle-shaped superconducting coil 1 is built in the superconducting electromagnet. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a superconducting electromagnet that is used in, for example, a single crystal pulling apparatus and generates a horizontal magnetic field.

For example, in a silicon single crystal pulling apparatus, in order to obtain a high-quality single crystal, a method is adopted in which a magnetic field is applied to the outer periphery of a vacuum chamber containing a cylindrical furnace to suppress silicon convection. Conventionally, as a method of applying a magnetic field, a normal conductive magnet having a pair of saddle-shaped coils is installed around a single crystal pulling furnace to generate a horizontal magnetic field of about 0.2 Tesla. ing. However, since a single crystal pulling apparatus using a normal conductive magnet uses a normal conductive coil, the power consumption is as large as several tens of kW, making it difficult to operate efficiently.
Therefore, as a technique of using a superconducting magnet instead of a normal conducting magnet, for example, the magnetic field generator has a main coil composed of a pair of superconducting coils provided on both sides of the crystal pulling upper part, and a diameter larger than these main coils. A magnetic field application type single crystal manufacturing apparatus is disclosed, which is composed of a pair of sub-coils that are small and coaxial and have opposite excitation directions, and in which the main coil and the sub-coil are saddle-shaped coils curved to the crucible side (see Patent Document 1). ).

Japanese Patent Laid-Open No. 10-7486 (second page, FIG. 3)

  In the case of a superconducting electromagnet using a superconducting coil, a magnetic field is generated when a current flows through the superconducting wire, and a large electromagnetic force acts on the superconducting wire itself due to the generated magnetic field. When the amount of deformation of the superconducting wire is increased by this electromagnetic force, the superconducting coil is easily quenched due to loosening between the superconducting wires, and a problem arises that a sufficient current cannot flow. In particular, in the case of a saddle-shaped superconducting coil, it is difficult to form a strong coil because of its structure. In the single crystal manufacturing apparatus shown in Patent Document 1 above, in order to improve the magnetic field uniformity in the crucible region, the main coil and the subcoil are composed of saddle-shaped superconducting coils. There is no mention of means for forming firmly, and how to form a strong coil that does not deform against electromagnetic force remains an important issue.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to obtain a superconducting electromagnet having a strong superconducting coil that can withstand a large electromagnetic force.

  The superconducting electromagnet of the present invention includes a pair of superconducting coils, a helium container that houses the superconducting coil together with the refrigerant, a cylindrical vacuum container that houses the helium container, and a helium container disposed in the vacuum container. In a superconducting electromagnet having a surrounding heat shield and generating a magnetic field in a direction perpendicular to the axis of the vacuum vessel, the superconducting coil is a flat coil formed by winding a superconducting wire in an oval shape. A plurality of unit coils are bent and laminated in the major axis or minor axis direction, and are integrally fixed with resin to form a coil.

  According to the superconducting electromagnet of the present invention, a plurality of flat unit coils formed by winding a superconducting wire in an oval shape are bent in the major axis or minor axis direction and laminated together, and then fixed integrally with a resin. Is formed into a saddle-shaped superconducting coil, a strong saddle-shaped superconducting coil that is not deformed even by a large electromagnetic force can be obtained, and a superconducting electromagnet that stably supplies a strong horizontal magnetic field can be provided.

Embodiment 1 FIG.
1 is a cross-sectional view showing a superconducting electromagnet according to Embodiment 1. FIG. First, a schematic configuration of a superconducting electromagnet will be described with reference to the drawings. As shown in the figure, the superconducting electromagnet includes a pair of superconducting coils 1 that generate a horizontal magnetic field, a helium container 3 that accommodates the superconducting coil 1 together with liquid helium 2 that is the refrigerant, and the helium container 3 in the vacuum insulation space. And a heat shield 5 that surrounds the helium vessel 3 and is disposed in the vacuum vessel 4 to reduce radiant heat entering the helium vessel 3.

  The helium vessel 3 is formed by integrating a cylindrical coil support frame 6 and an outer cylinder 7 covering the outer peripheral side thereof. A pair of superconducting coils 1 having a bowl shape is formed on the coil support frame 6. Is supported by being opposed to the left and right. Furthermore, in order to fix the superconducting coil 1, a coil pressing member 8 is provided on the coil support frame 6, and this coil pressing member 8 is a surface direction with respect to the outer peripheral surface of the electromagnetic force generated in the superconducting coil 1. The side frame portion 8a that supports the electromagnetic force of the outer periphery and the presser plate portion 8b that supports the electromagnetic force in the normal direction to the outer peripheral surface. Details of the superconducting coil 1 will be described later.

A refrigerator 9 for cooling the helium container 3 and the heat shield 5 is attached to the outside of the vacuum container 4 via a refrigerator mounting jacket 10 provided in the vacuum container 4. The refrigerator 9 includes a 60K stage 11 cooled to a temperature of about 60K and a 4K stage 12 cooled to a temperature of about 4K. The 60K stage 11 cools the heat shield 5 to about 60K, and the 4K stage. 12 is connected to the helium vessel 3 and cooled to about 4K, and the liquid helium 3 filled therein is recondensed.
Further, the refrigerator 9 is connected to a separately installed compressor (not shown), is supplied with a high-pressure gas of about 2.3 MPa, and returns a low-pressure gas of about 1 MPa.

The superconducting electromagnet is configured as described above, and the superconducting coil 1 is cooled by the liquid helium 2 filled in the helium vessel 3 and maintained at a temperature at which it becomes superconducting. The vacuum container 4 that accommodates the helium container 3 is evacuated to cut off the air convection, and the heat shield 5 provided between the helium container 3 and the vacuum container 4 is cooled by the refrigerator 9. Therefore, the radiant heat from the vacuum container 4 side is shielded, and very good heat insulation is made.
For this reason, a strong horizontal magnetic field can be generated as a superconducting electromagnet. Therefore, for example, when used in a single crystal pulling apparatus, a horizontal magnetic field is provided to a furnace filled with a single crystal raw material to provide a high-quality single magnetic field. It can be used for pulling up crystals.

Since the invention of the present embodiment is characterized by the configuration of the superconducting coil 1 of the superconducting electromagnet configured as described above, the superconducting coil 1 will be described in more detail below.
The superconducting electromagnet has the bowl-shaped superconducting coil 1 as described above, and the superconducting coil 1 is manufactured in the following three steps.
1st stage: A coil is wound in the shape of a flat pancake.
Second stage: A pancake-shaped coil is bent into a bowl shape and laminated and integrated.
Third stage: The integrated saddle coil is attached to the coil support frame and the lead is connected.
Then, it demonstrates along said manufacture procedure next.

First, in the first stage, a superconducting wire is wound by a predetermined number of turns using a winding jig attached to a winding machine (not shown). FIG. 2 is a view showing an example of the winding jig. The winding jig 13 includes a winding core portion 13a and a winding frame flange portion 13b provided so as to sandwich the winding core portion 13a so as to be detachable. A superconducting wire 14 having a substantially rectangular cross section is set on the winding core portion 13a of the winding jig 13, and the winding jig 13 is rotated and wound from the inside to the outside. FIG. 3 shows the coil wound up. As shown in the figure, it is a flat pancake coil wound in an oval shape (race track shape) as viewed from above. Hereinafter, this state is referred to as a “unit coil”. In the unit coil 15, a winding start portion is drawn out by a predetermined length to be set as a winding start lead wire 15a, and similarly, a winding end portion is drawn out by a predetermined length to be a winding end lead wire 15b.
Only the same number of such unit coils 15 wound right-handed and those wound left-handed are prepared.

  The superconducting wire 14 that is a material of the unit coil 15 is softened when heated in advance, and after being cooled, it is applied with a resin that is bonded, and is heated and fused in a state wound around the winding jig 13 and cured. The reel flange portion 13b is removed from the core portion 13a, and the unit coil 15 is taken out. This prevents the resin from becoming an adhesive and the superconducting wire 14 from falling apart.

  In addition to applying the resin to the superconducting wire 14 in advance, for example, the resin may be applied using an applicator 16 as shown in FIG. That is, as shown in the figure, a resin container 17 storing resin is installed in the front stage of a winding machine (not shown), and the superconducting wire 14 is passed through the through holes 17a provided on the front and rear walls of the resin container 17. And run. The resin adheres while traveling in the resin container 17 and is applied to the surface of the superconducting wire 14 by squeezing through the through hole 17a on the outlet side. The resin leaking from the through hole 17a is collected by a tray 18 installed in the lower part. In addition, the resin at this time uses a heat-curing type resin, and is heat-cured after the completion of winding.

Next, the second stage will be described. In the second stage, coils are stacked using a coil stacking jig. Prior to this, the unit coil 15 is formed into a bowl shape in advance. FIG. 5 is a conceptual diagram showing the formation of the unit coil 15. As shown in FIG. 5, the unit coil 15 wound in a flat plate shape is inserted between the mold 20 and the roller 21 of the molding machine 19, and the roller 21 is rotated along the mold 20 to obtain a predetermined curvature. The unit coil 15 is formed.
In addition, the molding machine of FIG. 5 shows an example, and is not limited to this.

The curved unit coil 15 is formed using a coil stacking jig. FIG. 6 is a perspective view of the coil stacking jig, and a part thereof is shown in cross section. The coil stacking jig 22 includes a cylindrical coil receiving portion 23, a side plate portion 24 that regulates the width side of the unit coils 15 to be stacked, and a pressing plate portion 25 that presses from the outer peripheral direction.
A predetermined number of unit coils 15 are alternately inserted into the coil stacking jig 22 in a right-handed and left-handed manner and stacked. At this time, since the bending radius becomes larger as the stacked unit coils 15 become the upper layer, both ends in the bending direction are shifted. Therefore, the spacer 26 made of glass epoxy or the like having a size corresponding to the generated gap is changed to a width. Stuff on one or both sides of the direction.
The bending direction of the unit coil 15 may be a minor axis direction depending on the shape of the superconducting coil 1.

In order to prevent the laminated unit coils 15 from being separated, a resin is interposed between the laminated unit coils 15, and the unit coils 15 are bonded together by the resin to be integrated.
As this method, for example, a resin may be applied to the surface of the unit coil 15 for each layer at the stage of lamination. As another method, the insulating sheet 27 coated or impregnated with resin is laminated while being inserted between unit coils. As another method, the through hole 24a is provided in the side plate portion 24 of the coil stacking jig 22, and after stacking the unit coil 15, the internal space where the unit coil 15 is stacked is evacuated and resin is injected, You may make it heat-harden in a heating furnace. In this case, a seal structure is formed by sandwiching a seal 28 between the side plate portion 24 and the holding plate portion 25 and tightening with a bolt or the like so that vacuuming can be performed.
In these operations, for example, silicon resin is used to prevent the resin used for coil bonding from adhering to the coil contact portion of the coil receiving portion 23, the inner side of the side plate portion 24, and the inner side of the holding plate portion 25. Apply and release.

  After the resin is cured by heating, the coil stacking jig 22 is disassembled, and the stacked unit coil 15 is taken out. As a result, the superconducting coil 1 formed into a bowl shape as shown in FIG. 7 is completed. As shown in the figure, the superconducting coil 1 has a shape in which a winding start lead wire 15a and a winding end lead wire 15b are led out.

Next, in the third stage, as shown in FIG. 8, the bowl-shaped superconducting coil 1 in which the unit coils 15 are integrated is attached to the coil support frame 6 of the superconducting electromagnet. Since the side frame portion 8a of the coil holding member 8 matched to the shape of the superconducting coil 1 is fixed to the coil support frame 6 by welding or the like, the bowl-shaped superconducting coil 1 is inserted inside the side frame portion 8a. Then, the presser plate portion 8b of the coil presser member 8 is fastened and fixed from the outer peripheral side with a bolt or the like. As the material of the coil support frame 6, the side frame portion 8a, and the pressing plate portion 8b, for example, stainless steel is used which is excellent in strength and nonmagnetic.
In addition, for example, a silicone resin is coated on the inner side of the coil support frame 6, the side frame portion 8a, and the holding plate portion 8b so as to be bonded to the superconducting coil 1 to perform a mold release process.

After the superconducting coil 1 is attached to the coil support frame 6, the winding start lead wires 15 a and the winding end lead wires 15 b of the adjacent unit coils 15 are connected in order, for example, by soldering or the like, and a pair of superconducting coils 1. To complete.
Thereafter, the helium vessel 3 is formed by combining the outer cylinder 7 with the coil support frame 6, surrounded by the heat shield 5 and accommodated in the vacuum vessel 4, as shown in FIG. Assemble the parts to complete the superconducting electromagnet.

  As described above, according to the invention of the present embodiment, a plurality of flat unit coils formed by winding a superconducting wire in an oval shape are bent in the major axis or minor axis direction, and are laminated with resin. Since the whole is formed into a bowl-shaped superconducting coil that is fixed integrally, a strong bowl-shaped superconducting coil that does not deform even with large electromagnetic force can be obtained, and a superconducting electromagnet that stably supplies a strong horizontal magnetic field Can be provided.

  In addition, since a unit coil was formed by using a superconducting wire coated with a heat-fusible resin, and curing the resin by heating after winding, the unit coil firmly fixed integrally was formed. And a strong superconducting coil can be formed.

  In addition, since a heat-fusible resin is interposed between a plurality of unit coils to be laminated and heated and integrated after lamination, a strong superconducting coil can be easily obtained with a simple configuration.

  Furthermore, since the superconducting coil is formed by integrally forming a plurality of unit coils in a bowl shape with a coil stacking jig that has been subjected to release processing, it is incorporated into the coil support frame. Can be used to efficiently manufacture a strong superconducting coil, and the assembly work can be performed in parallel with other parts of the superconducting electromagnet, improving workability.

Embodiment 2. FIG.
A superconducting electromagnet according to Embodiment 2 of the present invention will be described below with reference to the drawings. Since the entire configuration of the superconducting electromagnet is the same as that of FIG. 1 of the first embodiment, description of the entire apparatus will be omitted, and the description will focus on differences from the first embodiment. The difference is a component part in which unit coils are stacked to form a superconducting coil.

  A plurality of unit coils are stacked and formed into one superconducting coil in which superconducting wires are continuously wound. In the first embodiment, right-handed coils and left-handed coils are alternately stacked, and adjacent upper and lower unit coils. The inner lead-out leads and the outer lead-out leads were connected to each other. In the superconducting coil of the present embodiment, the right-handed and left-handed two (two layers) unit coils are integrally formed. That is, two unit coils are formed as a continuous two-layer unit coil, starting from the middle point thereof, and wound in opposite directions in the terminal direction. Hereinafter, description will be given based on the drawings.

  FIG. 9 is a diagram showing a winding jig 29 for a unit coil according to the present embodiment. The winding jig 29 has two winding core portions 31a and 31b with the inner partition portion 30 in between, and outer winding flange portions 32a and 32b are provided so as to be detachable. A slit is formed in the upper winding flange portion 32b and the partition portion 30, and the slit portion of the partition portion 30 serves as an internal lead portion for two unit coils. Moreover, the temporary winding drum 33 is detachably fixed to the upper part of the winding frame flange portion 32b.

Next, the winding work using this winding jig 29 will be described.
First, the winding jig 29 is attached to a winding machine (not shown), and the superconducting wire 14 is wound around the temporary winding drum 33 in advance by the length of one unit coil. While the superconducting wire 14 is connected without being cut, the winding end portion of the temporary winding drum 33 is passed through the slit of the partition part 30 of the winding jig 29 to start winding from the center side of the lower core part 31a and to the outside. I will roll it up. When the lower unit coil is thus wound, the lead wire is left and the superconducting wire 14 is cut and fixed so as not to be separated.
Next, the temporary winding drum 33 is removed and set on the drum side of a winding machine (not shown), and the upper unit coil is wound up from the inner side to the outer side of the upper winding core portion 31b of the winding jig 29 to complete the winding end. Fix the lead.

FIG. 10 is a plan view of the pair coil 34 that has been rolled up to form a pair of two layers. FIG. 11 is a cross-sectional view taken along the line XI-XI in FIG. As shown in the drawing, the lower unit coil 34a and the upper unit coil 34b are connected by an inner connecting lead wire, and this portion serves as an inner connecting portion 34c. Accordingly, the lead wires 34d and 34e are drawn out only to the outer peripheral sides of the two layers of the unit coils 34a and 34b.
Since the wound pair coil 34 is integrally formed into the shape of the bowl-shaped superconducting coil 1 and incorporated into the coil support frame 6 to form a superconducting electromagnet, the subsequent operations are the same as in the first embodiment. Description is omitted.

  As described above, according to the present embodiment, the lower and upper intermediate points of the unit coils for two layers are used as the winding start of the superconducting wire, and each unit coil is wound in the reverse direction in the terminal direction. Since two layers are formed continuously, in addition to the effects of the first embodiment, unit coils for two layers can be wound at one time, so that the winding work time can be shortened and the number of lead leads is reduced. Therefore, the connection work time can be shortened, and the number of connection parts is reduced to improve the reliability.

Embodiment 3 FIG.
12 is a cross-sectional view showing a main part of a superconducting coil of a superconducting electromagnet according to Embodiment 3 of the present invention. Since the overall configuration of the superconducting electromagnet and the outer shape of the superconducting coil are the same as those in FIG. 1 of the first embodiment, the description thereof will be omitted, and differences from the first embodiment will be mainly described. In the first embodiment, when the unit coils are stacked, the unit coils are stacked using a coil stacking jig, integrated and formed into a superconducting coil, and then incorporated into the main body of the device. A unit coil is directly laminated on the coil support frame 6 constituting the helium vessel 3 and assembled.

When laminating the coil support frame 6, the unit coil 15 is previously formed into a bowl shape using, for example, the molding machine described in FIG. 5 of the first embodiment so that the unit coil 15 follows the curved surface of the coil support frame 6. Mold it. A predetermined number of unit coils 15 formed are laminated on the coil support frame 6 as shown in the coil cross-sectional view of FIG. At this time, an insulating sheet 35 impregnated with resin is inserted between the unit coils. Instead of the insulating sheet 35, a resin may be applied to the surface of the unit coil 15 in advance.
An insulating material 36 is also inserted between the outer periphery of the laminated unit coils 15 and the coil support frame 6 and the side frame portion 8a and the holding plate portion 8b of the coil holding member 8.

Further, the entire superconducting coil is covered with a sealing film 37 that does not allow resin to penetrate.
The operation of this seal film will be described. After the lamination as described above, the whole is heated and fused to finish the strong superconducting coil 1. At this time, when there is no seal film 37, the superconducting coil 1 is made of resin with the coil support frame 6 and the side frame portion. 8a is bonded to the holding plate 8b. If left in the bonded state, the resin may break due to the thermal stress when cooled to a low temperature and the electromagnetic force generated when the superconducting coil 1 is excited, leading to the cause of superconducting breakdown. The seal film 37 is for avoiding this.

In the above, the resin serving as an adhesive is an insulating sheet sandwiched between the layers of the unit coil 15, and further an insulating material is inserted on the outer periphery. The sealing film 37 is made into a bag shape, and the inside is evacuated to form a resin. May be vacuum impregnated.
Further, as a method for preventing the superconducting coil 1 from being bonded to the coil support frame 6 and the side frame portion 8a and the press plate portion 8b, the coil support frame 6, the side frame portion 8a, and the press plate are replaced with the seal film 37. You may perform a mold release process by apply | coating a silicon-type resin to the part 8b.
Further, the unit coil may be a pair coil as described in the second embodiment.

  As described above, according to the invention of the present embodiment, the superconducting coil is formed by laminating unit coils previously curved on the coil support frame, fixing with the coil pressing member, and curing and integrating the resin. There is no need to make a new jig when the coil shape changes, and the resin part of the superconducting coil is impregnated in a shape that conforms to the coil support frame, so when attaching the superconducting coil to the coil support frame However, there is little deformation due to manufacturing errors, and the stability of the superconducting state can be improved.

  Further, since the seal film is inserted between the outer peripheral surface of the laminated unit coils and the coil support frame and the coil pressing member, the resin applied to the unit coil side does not adhere to the coil support frame and the coil pressing member. The resin can be prevented from cracking due to the thermal stress when cooled to a low temperature and the electromagnetic force generated when the superconducting coil is excited, and a highly reliable superconducting magnet can be obtained.

  Furthermore, since the silicon-based resin is coated on the surface of the coil support frame and the coil pressing member that are in contact with the unit coil, the same effect as described above can be obtained with a simple configuration.

  In the first to third embodiments, the case where the superconducting coil 1 is attached to the outer peripheral side of the coil support frame 6 has been described, but it may be attached to the inner peripheral side of the outer cylinder 7 of the helium container 3. Then, since the electromagnetic force generated in the superconducting coil can be received by the outer cylinder, the coil pressing member may be thin, and the fastening can be simplified, so that the working time can be shortened and the cost can be reduced.

It is sectional drawing which shows the superconducting electromagnet by Embodiment 1 of this invention. It is a figure which shows the winding jig | tool of the superconducting electromagnet by Embodiment 1 of this invention. It is a top view of the unit coil of the superconducting electromagnet by Embodiment 1 of this invention. It is a conceptual diagram of the applicator which apply | coats resin to the superconducting wire of the superconducting electromagnet by Embodiment 1 of this invention. It is a conceptual diagram which shows shaping | molding of the unit coil of the superconducting electromagnet by Embodiment 1 of this invention. It is a perspective view which shows the coil lamination | stacking jig | tool of the unit coil of the superconducting electromagnet by Embodiment 1 of this invention. It is a perspective view which shows the superconducting coil of the superconducting electromagnet by Embodiment 1 of this invention. It is a perspective view which shows the attachment state of the superconducting coil of the superconducting electromagnet by Embodiment 1 of this invention. It is a winding jig of a superconducting electromagnet according to Embodiment 2 of the present invention. It is a perspective view of the unit coil of the superconducting electromagnet according to Embodiment 2 of the present invention. It is the fragmentary sectional view seen from XI-XI of FIG. It is principal part sectional drawing of the superconducting coil of the superconducting electromagnet by Embodiment 3 of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Superconducting coil 2 Liquid helium 3 Helium container 4 Vacuum container 5 Heat shield 6 Coil support frame 7 Outer cylinder 8 Coil pressing member 8a Side frame part 8b Holding plate part 9 Refrigerator 10 Refrigerator installation jacket 11 60K stage 124 4K stage 13 volumes Wire jig 13a Winding core portion 13b Winding flange portion 14 Superconducting wire 15 Unit coil 15a Winding start lead wire 15b Winding end lead wire 16 Applicator 17 Resin container 17a Through hole 18 Receptacle 19 Molding machine 20 Mold frame 21 Roller 22 Coil lamination Jig 23 Coil receiving part 24 Side plate part 24a Through hole 25 Presser plate part 26 Spacer 27 Insulating sheet 28 Seal 29 Winding jig 30 Partition part 31a, 31b Core part 32a, 32b Winding flange part 33 Temporary winding drum 34 Pair coil 34a, 34b Unit coil 3 c the connecting portions 34d, 34e lead-out lead wire 35 insulating sheet 36 insulating material 37 seals the film.

Claims (8)

A pair of superconducting coils, a helium container that houses the superconducting coil together with its refrigerant, a cylindrical vacuum container that houses the helium container, and heat that is disposed in the vacuum container and surrounds the helium container A superconducting magnet having a shield and generating a magnetic field in a direction perpendicular to the axis of the vacuum vessel,
The superconducting coil is a flat coil formed by winding a superconducting wire in an oval shape as a unit coil, and a plurality of the unit coils are bent in the major axis or minor axis direction and laminated. A superconducting electromagnet characterized by being integrally fixed and formed into a bowl shape.   2. The superconducting electromagnet according to claim 1, wherein the unit coil is wound by a superconducting wire coated with heat-fusible resin and integrated by heating after winding.   The superconducting electromagnet according to claim 1 or 2, wherein the plurality of unit coils are integrated by heating after lamination by interposing a heat-fusible resin between the unit coils. Superconducting magnet.   The superconducting electromagnet according to any one of claims 1 to 3, wherein the unit coil includes two unit coils, each of which is wound in the reverse direction in the terminal direction, starting from the middle point thereof. A superconducting electromagnet characterized by being formed as two continuous layers of unit coils.   The superconducting electromagnet according to any one of claims 1 to 4, wherein the superconducting coil is integrally heated in a bowl shape by laminating the plurality of unit coils by a coil laminating jig subjected to a release treatment. After being molded, the superconducting electromagnet is incorporated in the coil support frame of the helium container.   The superconducting electromagnet according to any one of claims 1 to 4, wherein the superconducting coil includes a plurality of unit coils that are curved in advance and are stacked on a coil support frame of the helium vessel and fixed by a coil holding member. Then, the superconducting electromagnet is integrally formed by heat fusion.   The superconducting electromagnet according to claim 6, wherein a seal film is inserted between the outer peripheral surface of the laminated unit coils, the coil support frame, and the coil pressing member.   7. The superconducting electromagnet according to claim 6, wherein a surface of the coil supporting frame and the coil pressing member facing the laminated unit coils is coated with a silicon-based resin.

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