CN110957101A - Conduction cooling closed loop saddle-shaped magnetic control single crystal pulling superconducting magnet device - Google Patents
Conduction cooling closed loop saddle-shaped magnetic control single crystal pulling superconducting magnet device Download PDFInfo
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- CN110957101A CN110957101A CN201911316798.XA CN201911316798A CN110957101A CN 110957101 A CN110957101 A CN 110957101A CN 201911316798 A CN201911316798 A CN 201911316798A CN 110957101 A CN110957101 A CN 110957101A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F6/00—Superconducting magnets; Superconducting coils
- H01F6/06—Coils, e.g. winding, insulating, terminating or casing arrangements therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F6/00—Superconducting magnets; Superconducting coils
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F6/00—Superconducting magnets; Superconducting coils
- H01F6/006—Supplying energising or de-energising current; Flux pumps
- H01F6/008—Electric circuit arrangements for energising superconductive electromagnets
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F6/00—Superconducting magnets; Superconducting coils
- H01F6/04—Cooling
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Abstract
A conduction cooling closed loop saddle-shaped magnetic control single crystal pulling superconducting magnet device comprises an iron yoke outer cylinder; a vacuum outer Dewar is arranged in the iron yoke outer cylinder; a cold shield is arranged in the vacuum outer Dewar; a coil framework is arranged in the cold shield; the coil framework is provided with a superconducting coil; the left superconducting coil and the right superconducting coil are connected through a left coil connecting device and a right coil connecting device; the left and right coil connecting devices are provided with superconducting closed-loop switches; the superconducting closed-loop switch is connected with a power supply through a current lead, and is connected with the superconducting coil through a superconducting current lead; a cold conducting plate is arranged on the front side of the superconducting closed-loop switch; the cold guide plate is provided with a coil cold body support rod and a G-M refrigerator; turning on a heater in the superconducting closed-loop switch to change the superconducting closed-loop switch into a normal conducting state; starting an excitation power supply, electrifying and exciting the superconducting coil, and when the current reaches a required value; the heater in the superconducting closed-loop switch is closed, and the superconducting closed-loop switch restores the superconducting state to realize closed-loop operation; has the characteristics of low magnet cost and good single crystal growth quality.
Description
Technical Field
The invention belongs to the technical field of superconducting magnets for magnetic control single crystal pulling, and particularly relates to a conduction cooling closed-loop saddle-shaped magnetic control single crystal pulling superconducting magnet device.
Background
The high-purity monocrystalline silicon is widely applied to industries such as solar cells, integrated circuits, semiconductors and the like, is one of key materials of high and new technology industries such as photovoltaic power generation, electronic information and the like, and has an important strategic position in terms of energy, information and national safety. However, due to the high design technical difficulty, the high processing and manufacturing difficulty, the high cost and the high risk of the large-scale superconducting strong magnet device, which is the core component of the magnetic pulling single crystal technology, the related basic research and the technology accumulation in China are caused, and the technology is completely monopolized by the countries of the day, the U.S. and the Germany.
According to the research and study of the existing documents, the regional and monopolized property of the processing and preparation of the single crystal silicon in the field of the superconducting magnet for magnetically controlled pulling of the single crystal leads to that the current foreign research and development units are mainly enterprises such as Sumitomo, Toshiba and Mitsubishi in Japan, and meanwhile, the magnet preparation technology in the field is almost completely in a confidential and blocked state. Although the related research of domestic monocrystalline silicon starts with japan, the production technology level is still relatively low in the present general, and most of the domestic integrated circuits and silicon wafers thereof still depend on importation. However, the accumulation and development of the superconducting magnet are catching up with each other for many years, and related patents are also applied for protection in recent years, such as 'an MgB2 superconducting magnet for magnetically controlled czochralski single crystal' published by 2013, li super, yan fruit, etc.: (CN 103106994A), 2019, Tanghouming, Frielingjian et al, put forward a disclosure number of superconducting magnet and magnetic control straight-pull single crystal equipment: (CN 110136915A), however, most of the previous magnets have the following problems, such as the magnet coil has 4 more circular coil structures or even more, the structure is complex, the magnetic field utilization rate is not high, especially the problem that the magnetic fields between the coils of the 4 coils and above structures are mutually offset, which results in low magnetic field utilization rate, therefore, the usage amount of the superconducting wire is large and the cost is high under the same magnetic field requirement, which results in large inductance of the magnet itself, thus the stored energy is high, the temperature rise of the magnet after quenching is more, and it is difficult to recover the magnetic field of the magnet in a short time. Meanwhile, most of the existing magnetic control single crystal pulling magnets run in an open loop mode, so that the magnets can face the danger of quenching in case of emergency such as power failure, after quenching occurs in the magnets, the coils heat the energy stored in the magnets, the temperature rises, and the temperature reduction and excitation needs to be carried out for several hours, so that the problem of magnet quenching caused by sudden situation is solved, the quality of single crystal materials being produced is influenced greatly, and the problems of burning of superconducting magnets and the like can also be directly caused.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a conduction cooling closed-loop saddle-shaped magnetic control single crystal pulling superconducting magnet device which has the characteristics of simplifying a magnet device, introducing a superconducting closed-loop switch (PCS) and a normal-temperature energy-discharging resistor, reducing the production cost of the magnet and reducing the quality problem of single crystal growth caused by magnet quench under unexpected conditions.
In order to achieve the purpose, the invention adopts the technical scheme that: a conduction cooling closed loop saddle-shaped magnetic control single crystal pulling superconducting magnet device comprises an iron yoke outer cylinder; a vacuum outer Dewar is arranged in the iron yoke outer cylinder; a cold shield is arranged in the vacuum outer Dewar; a coil framework is arranged in the cold shield; the coil framework is provided with a superconducting coil 5; it is characterized in that the left and right superconducting coils 5 are connected by a left and right coil connecting device; the left and right coil connecting devices are provided with superconducting closed-loop switches 11; the superconducting closed-loop switch 11 is connected with a power supply through a current lead, and is connected with the superconducting coil through a superconducting current lead; the front side of the superconducting closed-loop switch is also provided with a cold conducting plate; the bottom of the cold guide plate is provided with a coil cold body supporting rod; the upper part of the cold guide plate is provided with a G-M refrigerator.
And a magnetic field intensity monitoring sensor is arranged on the coil framework.
The superconducting coil adopts a saddle-shaped superconducting coil.
The number of the superconducting coils is 2, and the 2 superconducting coils are connected in series and then connected in parallel with a diode D1, a diode D2, a superconducting closed-loop switch and an energy-discharging resistor at normal temperature; the power supply is connected in series with the superconducting coil through the breaker; the diode D1 is positively and negatively connected with the diode D2; the circuit breaker and the power supply of the normal temperature part are connected by a normal conductor oxygen-free copper wire, the superconducting coil, the superconducting closed-loop switch and the high-temperature superconducting current lead in the low temperature part are electrically connected by a superconducting wire, and the diode D1 and the diode D2 are connected with the superconducting coil by a normal conductor oxygen-free copper wire.
Compared with the prior art, the invention has the beneficial effects that:
compared with the traditional conventional electromagnet, the single crystal magnet can provide higher magnetic field intensity, and the utilization rate of the magnet to the magnetic field is higher through the proposal of a new concept, so that the production cost is lower compared with the traditional magnetic control single crystal pulling magnet under the condition of the same magnetic field intensity requirement. Meanwhile, the design concept of closed-loop operation and external energy discharge provided by the magnet can better solve the important problem that the magnet is quenched and the growth quality of the single crystal is influenced due to the unavoidable emergency in the actual production process of the magnetic control pulling of the single crystal, and has important practical requirements on better promotion of localization, mass production and stability of the magnet prepared from the monocrystalline silicon.
On the basis of the novel superconducting coil structure of saddle shape, utilize the advantage that saddle shape coil is higher to magnetic field utilization ratio, thereby make under the same magnetic field intensity demand condition, this czochralski single crystal superconducting wire use amount still less, the coil quality is lighter, under the prerequisite that inductance and energy storage are littleer, introduce superconductive closed loop switch (PCS) and outside and unload the ability resistance design notion, avoid because unexpected circumstances leads to the magnet to quench the problem, and can not the quick recovery magnet magnetic field after quenching, the single crystal growth quality problem that arouses. In conclusion, the invention can better solve the important realization problem that the magnet quench and then the single crystal growth quality are influenced due to the unavoidable emergency in the actual production process of the magnetic control pulling of the single crystal. The advantages of the invention are as follows:
1) the saddle-shaped coil structure is adopted, so that the usage amount of the superconducting wire is less under the condition of unit magnetic field intensity, and the inductance and the energy storage of the magnet are smaller than those of the traditional magnetic control single crystal pulling magnet, thereby facilitating the quench protection. Meanwhile, an external energy discharging resistor R1 is added, and after the magnet is quenched, partial energy stored in the magnet is discharged at the room temperature end, so that the temperature rise is much lower than that of the traditional magnet, the temperature of the coil is conveniently reduced by adopting a G-M refrigerator in a short time, the magnetic field of the magnet is recovered, and the influence on the quality of the pulled single crystal is avoided.
2) On the basis of the advantages of the saddle-shaped coil, a superconducting closed-loop switch (PCS) is introduced, so that the phenomenon that the magnet is quenched under the condition of unexpected power failure is avoided, meanwhile, the problem of electric energy consumption caused by the fact that a long-time power supply is needed for maintaining a magnetic place of a traditional magnet is solved due to the introduction of the PCS, and the use cost is reduced.
3) A magnetic field intensity monitoring sensor is introduced, and when the deviation between a monitoring value and a required value exceeds a set value, the saddle-shaped coil is electrified and magnetized through a control program, so that the influence of magnetic field attenuation on the quality of the single crystal during long-term operation is eliminated.
Drawings
Fig. 1 is a general diagram of a novel conduction cooling magnetron pulling single crystal superconducting magnet.
Fig. 2 is a superconducting coil protection circuit inside the magnet apparatus of the present invention.
In the figure: 1. an iron yoke outer cylinder; 2. a vacuum outer Dewar; 3. cooling the screen; 4. a coil bobbin; 5. a superconducting coil; 6. a left coil connecting plate and a right coil connecting plate; 7. a G-M refrigerator; 8. a cold conducting plate; 9. a coil cold body support rod; 10. a current lead; 11. a superconducting closed-loop switch; 12. a magnetic field intensity monitoring sensor; 13. energy-discharging resistor at normal temperature; 14. a circuit breaker; 15. A power source.
Detailed Description
The structural and operational principles of the present invention are explained in further detail below with reference to the accompanying drawings and examples.
Referring to fig. 1, a conduction cooling closed loop saddle-shaped magnetic control single crystal pulling superconducting magnet device comprises an iron yoke outer cylinder; a vacuum outer Dewar is arranged in the iron yoke outer cylinder; a cold shield is arranged in the vacuum outer Dewar; a coil framework is arranged in the cold shield; the coil framework is provided with a superconducting coil 5; the left and right superconducting coils 5 are connected through a left and right coil connecting device; the left and right coil connecting devices are provided with superconducting closed-loop switches 11; the superconducting closed-loop switch 11 is connected with a power supply through a current lead, and is connected with the superconducting coil through a superconducting current lead; the front side of the superconducting closed-loop switch is also provided with a cold conducting plate; the bottom of the cold guide plate is provided with a coil cold body supporting rod; the upper part of the cold guide plate is provided with a G-M refrigerator.
And a magnetic field intensity monitoring sensor is arranged on the coil framework.
The superconducting coil adopts a saddle-shaped superconducting coil.
Referring to fig. 2, 2 superconducting coils are provided, and are connected in series and then connected in parallel with a diode D1, a diode D2, a superconducting closed-loop switch and an energy-discharging resistor at normal temperature; the power supply is connected in series with the superconducting coil through the breaker; the diode D1 is positively and negatively connected with the diode D2; the circuit breaker and the power supply of the normal temperature part are connected by a normal conductor oxygen-free copper wire, the superconducting coil, the superconducting closed-loop switch and the high-temperature superconducting current lead in the low temperature part are electrically connected by a superconducting wire, and the diode D1 and the diode D2 are connected with the superconducting coil by a normal conductor oxygen-free copper wire.
Referring to fig. 1-2, a novel conduction cooling magnetic control single crystal pulling superconducting magnet device, firstly, the magnet is composed of saddle-shaped superconducting coils 5, which are in a symmetrical structure from left to right as shown in fig. 2, and are in a series structure on a circuit and are connected in parallel with a positive diode and a negative diode in fig. 2, the superconducting coils are wound on a coil framework 4, the coil framework 4 provides structural support for the superconducting coils to resist coil deformation caused by electromagnetic force during operation, meanwhile, the coil framework 4 also serves as a cold guide plate 8 of the superconducting coils, and is connected with a G-M refrigerator through the cold guide plate 8, so as to realize cooling, but as the G-M refrigerator has low cold energy at low temperature, in order to ensure that the superconducting coils can be cooled below the superconducting critical temperature of wires, the magnet of the invention firstly needs to pass through a coil cold body support rod 9 (non-metal material with low heat conduction coefficient), the superconducting coil is isolated from the outer dewar 2 in vacuum, and the superconducting coil is isolated from the outer dewar in vacuum by using a cold shield 3 for reducing heat radiation. During operation, according to the use requirement, an iron yoke outer cylinder 1 can be added outside the superconducting magnet vacuum outer Dewar to perform magnetic field shielding so as to further reduce the influence of leakage flux on nearby electromagnetic equipment. Meanwhile, in order to prevent the superconducting coils from being attracted to the outer yoke barrel 1, left and right coil connecting plates 6 need to be added between the left and right superconducting coils so that the superconducting coils are not damaged when interacting with the outer yoke barrel 1.
And (3) test operation: after the production of the magnetic control pulling single crystal magnet is finished, firstly, a vacuum unit is used for vacuumizing, and when the vacuum degree reaches 10-2And when the Pa magnitude is larger than the standard, opening the GM refrigerator to cool the test sample, and monitoring the temperature of the important temperature detection point by adopting the temperature sensor. When the temperature of the saddle-shaped coil inside reaches a design value and is stable, firstly, a low-power heater inside the superconducting closed-loop switch is switched on, so that the superconducting closed-loop switch (PCS) is changed from a superconducting state to a normal conducting state; then, the finger circuit breaker 14 (main circuit switch S1) is turned on, the excitation power supply is turned on, the magnitude of the current is adjusted, the superconducting coil is energized and excited through the binary current lead 10, and finally, when the current reaches a required value; then, a low-power heater in the superconducting closed-loop switch (PCS) is closed, so that the superconducting closed-loop switch (PCS) is restored to a superconducting state, and the closed-loop operation of the magnet is realized; finally, the excitation supply current will be 0. At the moment, the magnetic control pulling single crystal production can be carried out by preparing a single crystal growing furnace. Note that, because some non-superconducting joints exist in the coil and the magnetic field attenuation problem is caused by other reasons in the closed loop state, the magnetic field intensity monitoring sensor 12 monitors the magnetic field intensity in real time, when finding that the magnetic field intensity is attenuated to the lower limit, the control program is started, the excitation steps are repeated, the superconducting coil is electrified and magnetized, and the phenomenon that the magnetic field is attenuated due to the fact that the magnetic field intensity is increased to the lower limit is avoidedThe attenuation causes an influence on the quality of the single crystal.
Claims (4)
1. A conduction cooling closed loop saddle-shaped magnetic control single crystal pulling superconducting magnet device comprises an iron yoke outer cylinder (1); a vacuum outer Dewar (2) is arranged in the iron yoke outer cylinder (1); a cold shield (3) is arranged in the vacuum outer Dewar (2); a coil framework (4) is arranged in the cold shield (3); a superconducting coil (5) is arranged on the coil framework (4); it is characterized in that a left superconducting coil and a right superconducting coil (5) are connected through a left coil connecting device and a right coil connecting device (6); the left and right coil connecting devices (6) are provided with superconducting closed-loop switches (11); the superconducting closed-loop switch (11) is connected with a power supply (15) through a current lead (10), and the superconducting closed-loop switch is connected with the superconducting coil (5) through the superconducting current lead (10); a cold conducting plate (8) is also arranged on the front side of the superconducting closed-loop switch (11); a coil cold body supporting rod (9) is arranged at the bottom of the cold conducting plate (8); the upper part of the cold guide plate (8) is provided with a G-M refrigerator (7).
2. A conduction-cooled closed-loop saddle-shaped magnetically controlled single crystal pulling superconducting magnet device according to claim 1, wherein the coil former (4) is provided with a magnetic field strength monitoring sensor (12).
3. A conduction-cooled closed-loop saddle-shaped magnetically controlled single crystal pulling superconducting magnet apparatus as claimed in claim 1, wherein said superconducting coil (5) is a saddle-shaped superconducting coil.
4. The superconducting magnet device of claim 1, wherein 2 superconducting coils (5) are connected in series and then connected in parallel with a diode D1, a diode D2, a superconducting closed-loop switch (11) and an energy-discharging resistor (13) at normal temperature; the power supply (15) is connected in series with the superconducting coil through a breaker; the diode D1 is positively and negatively connected with the diode D2; a circuit breaker (14) and a power supply (15) of the normal-temperature part are connected by a normal-conductor oxygen-free copper wire, a superconducting coil (5) in the low-temperature part, a superconducting closed-loop switch (11) and a high-temperature superconducting current lead (10) are electrically connected by a superconducting wire, and a diode D1 and a diode D2 are connected with the superconducting coil by a normal-conductor oxygen-free copper wire.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112509778A (en) * | 2020-10-29 | 2021-03-16 | 中国科学院合肥物质科学研究院 | High-temperature superconducting magnet device for superconducting maglev train and use method |
| CN113949037A (en) * | 2020-07-15 | 2022-01-18 | 中国航天科工飞航技术研究院（中国航天海鹰机电技术研究院） | Quench protection circuit and electromagnetic ejection superconducting magnet |
| CN115662723A (en) * | 2022-10-31 | 2023-01-31 | 四川大学 | Superconducting closed-loop operation magnet based on excitation power supply, current transformation method and Dewar device |
| CN116031040A (en) * | 2023-02-24 | 2023-04-28 | 安徽联效科技有限公司 | Superconducting magnet for magnetic control Czochralski single crystal and refrigerating method |
| CN116206845A (en) * | 2023-02-16 | 2023-06-02 | 苏州八匹马超导科技有限公司 | Implementation method of superconducting switch system for conduction cooling superconducting magnet |
| CN117822126A (en) * | 2024-03-02 | 2024-04-05 | 山东华特磁电科技股份有限公司 | Magnetic crystal pulling permanent magnet device |
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2019
- 2019-12-19 CN CN201911316798.XA patent/CN110957101A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113949037A (en) * | 2020-07-15 | 2022-01-18 | 中国航天科工飞航技术研究院（中国航天海鹰机电技术研究院） | Quench protection circuit and electromagnetic ejection superconducting magnet |
| CN112509778A (en) * | 2020-10-29 | 2021-03-16 | 中国科学院合肥物质科学研究院 | High-temperature superconducting magnet device for superconducting maglev train and use method |
| CN112509778B (en) * | 2020-10-29 | 2021-07-20 | 中国科学院合肥物质科学研究院 | High-temperature superconducting magnet device for superconducting maglev train and use method |
| CN115662723A (en) * | 2022-10-31 | 2023-01-31 | 四川大学 | Superconducting closed-loop operation magnet based on excitation power supply, current transformation method and Dewar device |
| CN116206845A (en) * | 2023-02-16 | 2023-06-02 | 苏州八匹马超导科技有限公司 | Implementation method of superconducting switch system for conduction cooling superconducting magnet |
| CN116206845B (en) * | 2023-02-16 | 2023-09-26 | 苏州八匹马超导科技有限公司 | Implementation method of superconducting switch system for conduction cooling superconducting magnet |
| CN116031040A (en) * | 2023-02-24 | 2023-04-28 | 安徽联效科技有限公司 | Superconducting magnet for magnetic control Czochralski single crystal and refrigerating method |
| CN117822126A (en) * | 2024-03-02 | 2024-04-05 | 山东华特磁电科技股份有限公司 | Magnetic crystal pulling permanent magnet device |
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