CN117822126A - Magnetic crystal pulling permanent magnet device - Google Patents
Magnetic crystal pulling permanent magnet device Download PDFInfo
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- CN117822126A CN117822126A CN202410238052.6A CN202410238052A CN117822126A CN 117822126 A CN117822126 A CN 117822126A CN 202410238052 A CN202410238052 A CN 202410238052A CN 117822126 A CN117822126 A CN 117822126A
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- yoke
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- 239000013078 crystal Substances 0.000 title abstract description 32
- 239000004020 conductor Substances 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 238000009826 distribution Methods 0.000 abstract description 18
- 238000009827 uniform distribution Methods 0.000 abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 21
- 229910052710 silicon Inorganic materials 0.000 description 21
- 239000010703 silicon Substances 0.000 description 21
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000155 melt Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
Abstract
The invention discloses a magnetic crystal pulling permanent magnet device, which belongs to the technical field of accessories of single crystal furnaces and comprises a furnace body; a magnetic yoke which is of a closed structure arranged around the outer wall of the furnace body; two sets of permanent magnets are fixed on the magnetic yoke; the furnace body is positioned between the two sets of permanent magnets; the end face of one set of permanent magnets facing the furnace body is set as an N pole, and the end face of the other set of permanent magnets facing the furnace body is set as an S pole; each set of permanent magnets comprises at least two magnetic groups; the magnetic groups are distributed at intervals around the furnace body, and the end faces of adjacent magnetic groups facing the furnace body are not located in the same plane; each set of permanent magnet consists of at least two magnetic groups, and the end faces of the adjacent magnetic groups facing the furnace body are not located in the same plane, so that magnetic force lines generated by the adjacent magnetic groups can interact, a magnetic field with more uniform distribution is generated at the side wall of the crucible, and the closed magnetic yoke effectively avoids leakage of the magnetic force lines, so that the magnetic field gradient distribution of the crucible area is more reasonable.
Description
Technical Field
The invention relates to the technical field of accessories of single crystal furnaces, in particular to a magnetic crystal pulling permanent magnet device.
Background
The single crystal furnace is manufacturing equipment for producing single crystal silicon by a Czochralski method; when silicon crystals in the single crystal furnace grow on the side wall of the crucible, because the melt silicon has conductivity, under the condition of an externally-applied magnetic field, the flow of the melt silicon can cause induced current, the induced current and the externally-applied magnetic field act together to generate Lorentz force opposite to the flow direction of the melt silicon, the Lorentz force can inhibit the flow of the melt silicon, thereby reducing the precipitation of oxygen in the crucible, reducing the oxygen content of a silicon rod and improving the crystal pulling quality of the silicon crystals.
At present, the externally applied magnetic field of the single crystal furnace is usually realized through a superconducting magnet, an electromagnetic coil magnet or a permanent magnet arranged at the periphery of the furnace body, wherein the manufacturing, using and maintaining costs of the superconducting magnet and the power consumption and the using costs of the electromagnetic coil magnet are relatively high, and the production cost is greatly increased; the existing permanent magnet structure is usually two permanent magnets arranged in parallel on a magnet yoke with a C-shaped opening, magnetic lines of force generated by the two permanent magnets are unevenly distributed when penetrating through a crucible, the magnetic field intensity at the side wall of the crucible close to the central area of the magnet is higher, the magnetic field intensity at the side wall of the crucible deviated from the central area of the magnet is greatly reduced, so that the uneven magnetic field intensity at the side wall of the crucible is too large, and the crystal pulling quality of silicon crystals is affected; meanwhile, the magnetic force lines can be leaked outside at the opening of the magnet yoke with the C-shaped opening, and the magnetic field intensity and the magnetic field distribution uniformity of the crucible area can be obviously reduced; in addition, the magnetic leakage at the opening of the magnetic yoke is more, so that the magnetic interference is easy to occur in the peripheral area.
Therefore, the research and development design of the magnetic crystal pulling permanent magnet device capable of effectively improving the magnetic field distribution uniformity at the side wall of the crucible and improving the crystal pulling quality of silicon crystals is a problem to be solved in the current stage.
Disclosure of Invention
For the problems existing in the prior art, the two sets of permanent magnets are symmetrically distributed on two sides of the furnace body, each set of permanent magnets consists of at least two magnetic groups, the end faces of the adjacent magnetic groups facing the furnace body are not located in the same plane, so that magnetic force lines generated by the magnetic groups of the two sets of permanent magnets can interact, a magnetic field with more uniform distribution can be generated at the side wall of the crucible, meanwhile, the magnetic yoke with a closed structure can effectively avoid leakage of the magnetic force lines, so that the magnetic field gradient distribution of the crucible area is more reasonable, the magnetic force line distribution is more stable, and the crystal pulling quality of silicon crystals is effectively improved.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
the invention provides a magnetic crystal pulling permanent magnet device, which comprises:
a furnace body;
the magnetic yoke is of a closed structure arranged around the outer wall of the furnace body;
two sets of permanent magnets, wherein the two sets of permanent magnets are fixed on the magnetic yoke; the furnace body is positioned between the two sets of permanent magnets; one set of the permanent magnets is set to be N pole towards the end face of the furnace body, and the other set of the permanent magnets is set to be S pole towards the end face of the furnace body; each set of permanent magnets comprises at least two magnetic groups; the magnetic groups belonging to the same set of permanent magnets are distributed at intervals around the furnace body, the end faces of the adjacent magnetic groups facing the furnace body are not located in the same plane, the minimum distance between the end faces of the magnetic groups facing the furnace body and the center of the furnace body is not greater than the maximum distance between the end faces of the other magnetic groups facing the furnace body and the center of the furnace body, and the maximum distance between the end faces of the magnetic groups facing the furnace body and the center of the furnace body is not less than the minimum distance between the end faces of the other magnetic groups facing the furnace body and the center of the furnace body.
As a preferable technical scheme, the furnace also comprises a frame, and the furnace body is arranged on the frame; the axis of the furnace body is vertically arranged.
As a preferable technical scheme, the magnetic yoke is connected with a lifting assembly, and the lifting assembly can drive the magnetic yoke to move in the vertical direction relative to the furnace body.
As a preferable technical scheme, the lifting assembly comprises a motor and a plurality of lead screws; the screw rod of the screw rod is vertically arranged and fixedly connected with the bottom of the magnetic yoke, and the nut of the screw rod is in transmission connection with the output shaft of the motor; the motor is fixed on the frame, and the nut of the screw rod is rotatably arranged on the frame.
As a preferable technical scheme, the two sets of permanent magnets are symmetrically arranged based on the center of the furnace body;
and/or a crucible is arranged in the furnace body, and the axis of the furnace body is collinear with the axis of the crucible.
As a preferable technical scheme, the end faces of the magnetic groups facing the furnace body are plane, and the included angle between the adjacent end faces of the magnetic groups facing the furnace body is larger than 90 degrees and smaller than 180 degrees.
As a preferable technical scheme, the connecting surface of the magnetic yoke corresponding to each magnetic group is parallel to the end surface of the magnetic group facing the furnace body.
As a preferable technical scheme, the end face of the magnetic group, which faces the furnace body, is a cambered surface.
As a preferable technical scheme, the magnetic yoke is made of magnetic conductive materials.
As a preferable technical scheme, the magnetic groups are coated with non-magnetic conductive materials except the end face facing the furnace body and the end face connected with the magnetic yoke;
and/or, the upper and lower parts of the magnet yoke, which correspond to the permanent magnets, are respectively provided with a peripheral plate, and the peripheral plates are made of magnetic conductive materials.
The beneficial effects of the invention are as follows:
1. according to the invention, the two sets of permanent magnets are symmetrically distributed on two sides of the furnace body of the built-in crucible, each set of permanent magnets consists of at least two magnetic groups, and the end faces of the adjacent magnetic groups facing the furnace body are not located in the same plane, so that magnetic force lines generated by the magnetic groups of the two sets of magnets on the two sides of the furnace body can interact, a magnetic field with more uniform distribution can be generated on the side wall of the crucible, meanwhile, the magnetic yoke with the closed structure can effectively avoid leakage of magnetic force lines, so that the magnetic force lines in the crucible area are distributed more stably, the crystal pulling quality of silicon crystals is effectively improved, and magnetic leakage is less, and magnetic interference is avoided.
2. The distance between the opposite ends of the two sets of permanent magnets is smaller than the distance between the middle parts of the two sets of permanent magnets, so that the magnetic field strength between the opposite ends of the two sets of permanent magnets can be effectively ensured not to be weakened, the magnetic field gradient distribution at any position of the side wall of the crucible is more reasonable, and the crystal pulling quality of silicon crystals is ensured.
3. The lifting assembly can effectively drive the magnetic yoke to move in the vertical direction relative to the furnace body, the position of the magnetic yoke can be conveniently adjusted, the magnetic field generated by the permanent magnet accurately penetrates through the surface of the silicon solution in the crucible, the flow of the silicon solution is effectively inhibited, the precipitation of oxygen in the crucible is reduced, and the quality of crystal bar products is improved.
4. The magnetic yoke and the permanent magnet are both positioned outside the furnace body, so that the installation and the maintenance are convenient; the permanent magnet is made of permanent magnet materials, is used as a magnetic source, has stable magnetic performance, does not demagnetize after long-term use, has no energy consumption in the use process, and has low use and maintenance cost.
Drawings
FIG. 1 is a schematic diagram of the overall structure of an embodiment of a magnetic pull permanent magnet apparatus of the present invention;
FIG. 2 is a side view of FIG. 1;
FIG. 3 is a schematic diagram of the distribution of permanent magnets on a yoke;
FIG. 4 is an enlarged view of area A of FIG. 3;
FIG. 5 is a schematic view of the yoke and lift assembly of FIG. 2;
FIG. 6 is a schematic diagram showing the distribution of permanent magnets in a second embodiment of the present invention;
fig. 7 is a schematic distribution diagram of a permanent magnet in a third embodiment of the present invention.
In the figure: 1-furnace body, 2-magnet yoke, 21-peripheral board, 3-permanent magnet, 31-magnetic group, 4-frame, 5-lifting component, 51-motor, 52-screw.
Detailed Description
The present invention is further described below with reference to the accompanying drawings for the convenience of understanding by those skilled in the art.
Example 1
Referring to fig. 1-5, an embodiment of a magnetic pull permanent magnet device provided by the invention includes a furnace body 1, wherein a closed magnetic yoke 2 is arranged outside the furnace body 1 and surrounds the furnace body 1; two sets of permanent magnets 3 are arranged on the magnetic yoke 2, the furnace body 1 is positioned between the two sets of permanent magnets 3, the end face of one set of permanent magnets 3 facing the center of the furnace body 1 is set as an N pole, the end face of the other set of permanent magnets 3 facing the center of the furnace body 1 is set as an S pole, and an external magnetic field generated by the two sets of permanent magnets 3 passes through the furnace body 1; each set of permanent magnets 3 comprises three magnetic groups 31; the three magnetic groups 31 belonging to the same set of permanent magnets 3 are distributed at intervals around the furnace body 1, each magnetic group 31 is provided with an end face facing the center of the furnace body 1, the end faces of the three magnetic groups 31 facing the furnace body 1 are located in different planes, the minimum distance between the end face of any magnetic group 31 facing the furnace body 1 and the center of the furnace body 1 is not greater than the maximum distance between the end face of other magnetic groups 31 facing the furnace body 1 and the center of the furnace body 1, the maximum distance between the end face of any magnetic group 31 facing the furnace body 1 and the center of the furnace body 1 is not less than the minimum distance between the end faces of other magnetic groups 31 facing the furnace body 1 and the center of the furnace body 1, magnetic lines of force generated by adjacent magnetic groups 31 can interact, a magnetic field with more uniform distribution can be generated in the furnace body 1, meanwhile, the magnetic yoke 2 with a closed structure can effectively avoid magnetic line leakage, so that the magnetic field gradient distribution in a crucible area is more reasonable, the magnetic line of force distribution is more stable, and the quality of silicon crystal pulling is effectively improved.
It should be noted that, referring to fig. 3, the two sets of permanent magnets 3 should be symmetrically arranged based on the center of the furnace body 1, specifically, the two sets of permanent magnets 3 should be symmetrically arranged in the center as well as in the axis, so as to ensure that the magnetic field gradient distribution of the generated external magnetic field is more reasonable and the magnetic line distribution is more stable.
In this embodiment, referring to fig. 1 and 2, the present invention further includes a frame 4, the furnace body 1 is disposed on the frame 4, and a crucible (not shown in the drawings) is disposed in the furnace body 1; the axis of the furnace body 1 is vertically arranged, and the axis of the furnace body 1 is collinear with the axis of the crucible, so that the growth of silicon crystals is conveniently realized.
Further, referring to fig. 1, 2 and 5, the yoke 2 is connected with a lifting assembly 5, the lifting assembly 5 can drive the yoke 2 to move in a vertical direction relative to the furnace body 1, so that the relative position of the yoke 2 and the furnace body 1 can be conveniently adjusted, the magnetic field generated by the permanent magnet 3 accurately penetrates through the surface of the silicon solution in the crucible, the flow of the silicon solution is effectively inhibited, the precipitation of oxygen in the crucible is reduced, and the quality of crystal bar products is improved; in other embodiments, the lifting component 5 is not required, but the magnetic yoke 2 is directly fixed on the outer wall of the furnace body 1, so that the magnetic field generated by the two sets of permanent magnets 3 can penetrate through the surface of the silicon solution in the crucible, and the crystal pulling quality of the silicon crystal is ensured.
Specifically, referring to fig. 1, 2 and 5, the lifting assembly 5 includes a motor 51 and a plurality of screws 52; the screw rods of the screw rods 52 are vertically arranged and fixedly connected with the bottom of the magnetic yoke 2, a plurality of screw rods 52 are uniformly distributed around the circumference of the furnace body, nuts of the screw rods 52 are in transmission connection with an output shaft of the motor 51 through a transmission shaft, and the output shaft of the motor 51 rotates to drive the magnetic yoke 2 to lift; the motor 51 is fixed on the frame 4, and a nut of the screw 52 is rotatably arranged on the frame 4; in other embodiments, the lifting assembly 5 may be directly configured as an electric or manual lifter, so as to stably lift the magnetic yoke 2.
In this embodiment, referring to fig. 3 and 4, the end face of the magnetic group 31 facing the furnace body 1 is set to be a plane, and the three magnetic groups 31 are set in a C shape, so that the distance between the opposite ends of the two sets of permanent magnets 3 is smaller than the distance between the middle parts of the two sets of permanent magnets 3, so that the magnetic field strength between the opposite ends of the two sets of permanent magnets 3 can be effectively ensured not to be obviously weakened, the magnetic field strength at any position of the side wall of the crucible is more similar, the magnetic field gradient distribution at the side wall of the crucible is more reasonable, and the crystal pulling quality of silicon crystal is ensured; further, the included angle α between the end faces of two adjacent magnetic groups 31 facing the furnace body 1 is greater than 90 ° and less than 180 °, and magnetic lines of force generated by the three magnetic groups 31 interact in the central region of the furnace body 1, so that the distribution of the magnetic lines of force is more uniform; in other embodiments, the end surface of the magnetic group 31 facing the furnace body 1 may be an arc surface, and the arc surface on each magnetic group 31 may or may not be located on the same circumferential surface, so as to ensure that the distribution of magnetic lines of force at the side wall of the crucible is uniform.
In this embodiment, referring to fig. 3 and 4, the connection surface of each magnetic group 31 on the magnetic yoke 2 is parallel to the end surface of the magnetic group 31 facing the furnace body 1, and the connection surface of the magnetic yoke 2 is the contact surface with the magnetic group 31 when the magnetic group 31 is fixed on the magnetic yoke 2, so that the magnetic group 31 can be conveniently installed, and meanwhile, the accuracy of the angle of each magnetic group 31 facing the end surface of the furnace body 1 can be ensured; furthermore, the magnetic yoke 2 may be polygonal or formed by sequentially connecting a plurality of straight sections and a plurality of curved sections, so as to be sleeved outside the furnace body 1 in a closed manner.
The magnetic yoke 2 is made of magnetic conductive materials, so that leakage of magnetic lines can be effectively avoided; furthermore, the magnetic group 31 is coated with non-magnetic conductive materials except the end face facing the furnace body 1 and the end face connected with the magnetic yoke 2, so that the magnetic force line can be further prevented from leaking.
On the basis of the foregoing embodiment, referring to fig. 3 and 4, the yoke 2 is provided with peripheral plates 21 above and below the permanent magnets 3, the peripheral plates 21 are made of magnetic conductive materials, and the peripheral plates 21 are used for avoiding leakage of magnetic lines.
Example two
Referring to fig. 6, the difference between the present embodiment and the first embodiment is that: each set of permanent magnets 3 comprises two magnetic groups 31, two magnetic groups 31 belonging to the same set of permanent magnets 3 are symmetrically arranged, a symmetrical line of the two magnetic groups 31 belonging to the same set of permanent magnets 3 passes through the center of the furnace body 1, the two magnetic groups 31 are arranged in a V shape, an included angle between the end faces of the two magnetic groups 31 facing the furnace body 1 is larger than 90 degrees and smaller than 180 degrees, and the distribution mode of the magnetic groups 31 can also generate uniform magnetic fields in the center area of the furnace body 1.
Example III
Referring to fig. 7, the difference between the present embodiment and the first embodiment is that: each set of permanent magnets 3 comprises four magnetic groups 31, the four magnetic groups 31 belonging to the same set of permanent magnets 3 are symmetrically arranged, the symmetry lines of the four magnetic groups 31 belonging to the same set of permanent magnets 3 pass through the center of the furnace body 1, and the end faces of any two adjacent magnetic groups 31 facing the furnace body 1 form included angles, so that the distribution mode of the magnetic groups 31 can also generate uniform magnetic fields in the center area of the furnace body 1; in other embodiments, the two magnetic groups 31 located at one side of the permanent magnet 3 may be disposed in parallel towards the end face of the furnace body 1, and at the same time, the end face of the magnetic group 31 located at the end of the permanent magnet 3 towards the furnace body 1 should be closer to the other set of permanent magnets 3, so that a uniform magnetic field can be generated in the central area of the furnace body 1.
In other embodiments, the number of magnetic groups 31 included in each set of permanent magnets 3 may be five or more, as long as a uniform magnetic field can be generated in the central region of the furnace body 1.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A magnetic pull permanent magnet assembly comprising:
a furnace body (1);
a magnetic yoke (2), wherein the magnetic yoke (2) is of a closed structure arranged around the outer wall of the furnace body (1);
two sets of permanent magnets (3), wherein the two sets of permanent magnets (3) are fixed on the magnetic yoke (2); the furnace body (1) is positioned between the two sets of permanent magnets (3); the end face of one set of permanent magnets (3) facing the furnace body (1) is set as an N pole, and the end face of the other set of permanent magnets (3) facing the furnace body (1) is set as an S pole; each set of permanent magnets (3) comprises at least two magnetic groups (31); the magnetic groups (31) belonging to the same set of permanent magnets (3) are distributed at intervals around the furnace body (1), the adjacent end faces of the magnetic groups (31) facing the furnace body (1) are not located in the same plane, the minimum distance between the end faces of any magnetic groups (31) facing the furnace body (1) and the center of the furnace body (1) is not greater than the maximum distance between the end faces of other magnetic groups (31) facing the furnace body (1) and the center of the furnace body (1), and the maximum distances between the end faces of any magnetic groups (31) facing the furnace body (1) and the center of the furnace body (1) are not less than the minimum distances between the end faces of other magnetic groups (31) facing the furnace body (1) and the center of the furnace body (1).
2. A magnetic pulling permanent magnet device according to claim 1, further comprising a frame (4), wherein the furnace body (1) is arranged on the frame (4); the axis of the furnace body (1) is vertically arranged.
3. A magnetic pulling permanent magnet device according to claim 2, wherein the yoke (2) is connected with a lifting assembly (5), and the lifting assembly (5) can drive the yoke (2) to move in a vertical direction relative to the furnace body (1).
4. A magnetic pull permanent magnet assembly according to claim 3, wherein the lifting assembly (5) comprises a motor (51) and a plurality of lead screws (52); the screw rod of the screw rod (52) is vertically arranged and fixedly connected with the bottom of the magnetic yoke (2), and the nut of the screw rod (52) is in transmission connection with the output shaft of the motor (51); the motor (51) is fixed on the frame (4), and a nut of the screw rod (52) is rotatably arranged on the frame (4).
5. A magnetic pull permanent magnet device according to claim 1 or 2, characterized in that two sets of permanent magnets (3) are symmetrically arranged based on the center of the furnace body (1);
and/or a crucible is arranged in the furnace body (1), and the axis of the furnace body (1) is collinear with the axis of the crucible.
6. A magnetic pulling permanent magnet device according to claim 1, characterized in that the end faces of the magnetic groups (31) facing the furnace body (1) are plane, and the included angle between the adjacent end faces of the magnetic groups (31) facing the furnace body (1) is larger than 90 ° and smaller than 180 °.
7. A magnetic pull permanent magnet assembly according to claim 6, wherein the connection surface of the yoke (2) corresponding to each magnet group (31) is parallel to the end surface of the magnet group (31) facing the furnace body (1).
8. A magnetic pull permanent magnet device according to claim 1, wherein the end face of the magnet assembly (31) facing the furnace body (1) is provided with a cambered surface.
9. A magnetic pull permanent magnet assembly according to claim 1, wherein the yoke (2) is made of magnetically permeable material.
10. A magnetic pulling permanent magnet device according to claim 1, characterized in that the magnetic group (31) is coated with a non-magnetic conductive material except for the end face facing the furnace body (1) and the end face connected with the magnetic yoke (2);
and/or, the upper part and the lower part of the magnetic yoke (2) corresponding to the permanent magnet (3) are respectively provided with a peripheral plate (21), and the peripheral plates (21) are made of magnetic conductive materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202410238052.6A CN117822126A (en) | 2024-03-02 | 2024-03-02 | Magnetic crystal pulling permanent magnet device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410238052.6A CN117822126A (en) | 2024-03-02 | 2024-03-02 | Magnetic crystal pulling permanent magnet device |
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