CN114927305A - Magnetic control single crystal pulling superconducting magnet and equipment - Google Patents
Magnetic control single crystal pulling superconducting magnet and equipment Download PDFInfo
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- CN114927305A CN114927305A CN202210554833.7A CN202210554833A CN114927305A CN 114927305 A CN114927305 A CN 114927305A CN 202210554833 A CN202210554833 A CN 202210554833A CN 114927305 A CN114927305 A CN 114927305A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F6/00—Superconducting magnets; Superconducting coils
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
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Abstract
The invention discloses a magnetic control single crystal pulling superconducting magnet and equipment, wherein the superconducting magnet comprises: a superconducting coil; the superconducting switch is connected in parallel at two ends of the superconducting coil, the superconducting switch comprises a switch coil and a heater, the heater is used for heating the switch coil, the switch coil is made of superconducting materials, the switch coil is separated from a superconducting state when being heated to a temperature above a critical temperature, short circuit to the superconducting coil is removed, after a superconducting power supply inputs required current to the superconducting coil, the heater stops heating the switch coil, the switch coil is enabled to enter the superconducting state, and the switch coil and the superconducting coil enter a closed-loop working state. The invention introduces the superconducting switch technology, thereby avoiding the situation that the magnet is quenched and loses the magnetic field due to the unstable and sudden power failure of a power supply system, and the problem of the vibration of the single crystal furnace caused by the variable electromagnetic force generated by the magnetic field fluctuation and the heating body of the single crystal furnace due to the ripple of the superconducting power supply.
Description
Technical Field
The invention relates to the technical field of semiconductor production equipment, in particular to a magnetic control single crystal pulling superconducting magnet and equipment.
Background
The high-purity monocrystalline silicon is widely applied to industries such as solar cells, integrated circuits and semiconductors, is one of key materials of high and new technology industries such as photovoltaic power generation, electronic information and the like, and has an important strategic position in terms of energy, information and national safety. However, due to the high design technical difficulty, the high processing and manufacturing difficulty, the high cost and risk and the like of a large-scale superconducting strong magnet device, which is a core component of the magnetic pulling single crystal technology, the related basic research and the technology accumulation are lacked in China, and the technology is completely monopolized by the countries of the day, the America, the Germany and the like.
According to the research and study of the existing documents, the regional and monopolistic property of the processing and preparation of the monocrystalline silicon in the field of the superconducting magnet for magnetically controlling and pulling the monocrystalline silicon at present leads the overseas research and development unit to be mainly Japanese enterprises. The related research of domestic monocrystalline silicon is coming up after years of accumulation and development. In recent years, there have been protection applications in related patents, such as 2013, li super, yan fruit, etc., and publication No. 'a MgB2 superconducting magnet for magnetically controlled czochralski single crystal': CN103106994A, 2019, Tanghouming, Frielingjian et al, propose "a superconducting magnet and magnetic control Czochralski single crystal equipment" publication number: CN110136915A, however, the above invention is only a simple description of the superconducting magnet itself, and does not consider the integration problem in the use process from the perspective of combining the single crystal furnace and the superconducting magnet.
At present, the magnetic control single crystal pulling superconducting magnet in the invention is an open-loop operation mode, wherein a power supply is loaded at two ends of a superconducting coil all the time, when the operation mode is in an emergency power-off situation, the magnet can be quenched due to the emergency power-off, when the magnet is quenched, the coil is heated by energy stored in the magnet, the temperature is increased, cooling and excitation are carried out again for dozens of hours or even longer, the quality of a single crystal material which is produced is influenced greatly, and the problem that the superconducting magnet is burnt down and the like can be directly caused.
Meanwhile, most of the inventions only relate to the superconducting magnet, the superconducting magnet and the single crystal furnace are not combined and integrated, after the superconducting magnet is integrated, the operating current I of the superconducting magnet generates the change of I +/-Delta I due to the ripple wave of a superconducting power supply, the Delta B fluctuation can occur in the magnetic field of the magnet through the amplification of a superconducting coil with a large number of turns (more than 1 ten thousand turns), the changed magnetic field acts on a heating body of the single crystal furnace, and the changed electromagnetic Lorentz force is generated, so that the integral vibration of the single crystal furnace is caused, and the growth quality of the single crystal is finally influenced.
Disclosure of Invention
The embodiment of the invention provides a magnetic control single crystal pulling superconducting magnet and equipment, which are used for solving the problems that the superconducting magnet is powered off and quenched or a single crystal furnace vibrates due to unstable power supply in the prior art.
In one aspect, an embodiment of the present invention provides a magnetic control single crystal pulling superconducting magnet, including:
a superconducting coil;
the superconducting switch is connected in parallel at two ends of the superconducting coil, and the superconducting switch and the superconducting coil are connected in parallel and then are used for being connected with a superconducting power supply;
the superconducting switch comprises a switch coil and a heater, the heater is used for heating the switch coil, the switch coil is made of superconducting materials, the switch coil is separated from a superconducting state when being heated to be above a critical temperature, short circuit to the superconducting coil is removed, after a superconducting power supply inputs required current to the superconducting coil, the heater stops heating the switch coil, the switch coil is enabled to be in the superconducting state, and the switch coil and the superconducting coil are enabled to be in a closed-loop working state.
On the other hand, the embodiment of the invention provides magnetic control single crystal pulling equipment, which comprises a single crystal furnace and the magnetic control single crystal pulling superconducting magnet, wherein the superconducting magnet is in a circular cylindrical structure, and the single crystal furnace is arranged at the axis position of the superconducting magnet.
The magnetic control single crystal pulling superconducting magnet and the equipment have the following advantages:
under the special conditions required by the growth of the superconducting magnet and the single crystal, a superconducting switch (PCS) technology is introduced, so that the problems of magnet quenching and magnetic field loss caused by unstable power supply system and sudden power failure and single crystal furnace vibration caused by the fact that the magnetic field fluctuation and a heating body of the single crystal furnace generate variable electromagnetic force due to superconducting power supply ripple are solved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of an overall structure of a magnetron single crystal pulling apparatus according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of a magnetron single crystal pulling apparatus according to an embodiment of the present invention;
fig. 3 is a half sectional view of a magnetron-pulled single crystal superconducting magnet according to an embodiment of the present invention;
FIG. 4 is a structural view of a heating body in a single crystal furnace employed in the prior art;
FIG. 5 is a force diagram of a heating body of the single crystal furnace of FIG. 4;
FIG. 6 is a diagram showing the structure and force of a heating body in a single crystal furnace according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a superconducting magnet using saddle-shaped superconducting coils according to an embodiment of the present invention;
fig. 8 is a schematic diagram illustrating an operation of a superconducting coil inside a superconducting magnet according to an embodiment of the present invention;
fig. 9 is a schematic diagram illustrating an operation flow of a superconducting switch of the superconducting magnet according to the embodiment of the present invention;
fig. 10 is a schematic diagram illustrating current situations of a superconducting magnet provided by an embodiment of the present invention in different operation modes.
The reference numbers illustrate: 1. a superconducting magnet; 101. a refrigerator; 102. a superconducting coil; 103. cooling the screen; 104. a magnetic shield iron yoke; 105. a vacuum dewar inner cylinder; 2. a single crystal furnace; 201. a cavity; 202. a heating body; 202-1, 202-2 heating electrodes; 203. a crucible; 204. a rotating shaft; 3. single crystal silicon rods and accessories; 301. a single crystal silicon rod; 302. carrying out crystal seeding; 303. pulling the wire; 304. a polycrystalline silicon solution; 4. a superconducting switch; 401. a switching coil; 402. a heater; 5. a superconducting power supply; 6. supply circuit breaker.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
Fig. 1-10 are schematic structural diagrams of a magnetron-pulled single crystal superconducting magnet and apparatus according to an embodiment of the present invention. The embodiment of the invention provides a magnetic control single crystal pulling superconducting magnet, which comprises:
a superconducting coil 102;
the superconducting switch 4 is connected in parallel at two ends of the superconducting coil 102, and the superconducting switch 4 is connected in parallel with the superconducting coil 102 and then is used for being connected with the superconducting power supply 5;
the superconducting switch 4 includes a switch coil 401 and a heater 402, the heater 402 is used for heating the switch coil 401, the switch coil 401 is made of superconducting materials, the switch coil 401 is separated from a superconducting state when being heated to a temperature above a critical temperature, short circuit to the superconducting coil 102 is removed, after the superconducting power supply 5 inputs required current to the superconducting coil 102, the heater 402 stops heating the switch coil 4, the switch coil 401 is enabled to enter a superconducting state, and the switch coil 401 and the superconducting coil 102 enter a closed-loop working state.
Illustratively, the superconducting magnet 1 further includes: the cold screen 103, the superconducting coil 102 and the superconducting switch 4 are all arranged inside the cold screen 103; a refrigerator 101 for cooling the inside of the cold screen 103.
In an embodiment of the present invention, the refrigerator 101 may be a G-M refrigerator, which cools a cooling medium, such as liquid helium, and then feeds the cooled medium into the cold shield 103 to keep the superconducting coil 102 below its critical temperature Tc, so as to maintain a superconducting state.
The superconducting magnet 1 further includes: the magnetic shielding iron yoke 104 and the cold shield 103 are in a hollow circular cylindrical structure, and the magnetic shielding iron yoke 104 is arranged on one side of the outside of the cold shield 103, which is far away from the axis.
In the present embodiment, the magnetic shielding yoke 104 is made of ferromagnetic metal, such as iron, cobalt, nickel, and alloys thereof, which can prevent the strong magnetic field generated by the superconducting coil 102 during operation from leaking outwards, and thus can pose a threat to personnel and other equipment.
The superconducting magnet 1 further includes: the vacuum Dewar inner cylinder 105 is arranged on one side of the outer portion of the cold shield 10 close to the axis, the vacuum Dewar inner cylinder 105 is connected with two ends of the magnetic shielding iron yoke 104, and the space between the vacuum Dewar inner cylinder 105 and the magnetic shielding iron yoke 104 is in a vacuum state.
In the embodiment of the invention, the vacuum Dewar inner cylinder 105 is connected with the magnetic shielding iron yoke 104, and the inner part is a sealed space, and the cold shield 103 is positioned in the sealed space. After the vacuum is evacuated from the sealed space by the vacuum device, the heat load in the cold shield 103 due to the heat convection can be reduced.
As shown in fig. 3 and 7, the superconducting coils 102 may have a circular or saddle-shaped structure, and when the circular structure is adopted, the number of the superconducting coils 102 is four, and the four circular superconducting coils 102 are symmetrically arranged with the axis of the superconducting magnet as a symmetry axis. When the saddle-shaped structure is adopted, the number of the superconducting coils 102 is two, and the two saddle-shaped superconducting coils 102 are symmetrically arranged by taking the axis of the superconducting magnet as a symmetry axis.
The working process of the magnetic control single crystal pulling superconducting magnet is as follows:
when the superconducting magnet 1 is installed, firstly, a vacuum unit is used for vacuumizing a sealed space between the superconducting magnet 1, specifically, the magnetic shielding iron yoke 104 and the vacuum Dewar inner cylinder 105, and when the vacuum degree reaches 10 -2 When the temperature of the superconducting coil 102 in the superconducting magnet 1 is lower than the critical temperature Tc of the superconducting wire, the superconducting coil 102 enters a superconducting state and has the power-on excitation capability.
Next, as shown in the superconducting switch operation mode of fig. 9, first, the heater 402 inside the switching coil 401 is energized so that the temperature of the switching coil 401 of the superconducting switch 4 becomes higher than the critical temperature Tc thereof, and at this time, the switching coil 401 enters a resistive state, and the state in which the superconducting coil 102 is short-circuited by the switching coil 401 is released, and the current input from the superconducting power supply 5 starts to flow through the superconducting coil 102. And then, according to the requirements of the monocrystalline silicon drawing process, setting a target current of a superconducting power supply 5, closing a power supply loop breaker 6, starting the superconducting power supply 5, electrifying the superconducting magnet 1, stopping electrifying the heater 402 after the target current is reached, waiting for the temperature of the switch coil 401 to be reduced to Tc, setting the current of the superconducting power supply 5 to be 0, and performing de-electrifying. At this time, since the superconducting coil 102 enters the superconducting state, during the process of powering down the superconducting power supply 5, the superconducting coil 102 is short-circuited by the switching coil 401, and the superconducting coil 102 and the switching coil 401 form a closed loop, so that the internal current of the superconducting magnet 1 will operate independently of the superconducting power supply 5.
Therefore, the operation mode of the superconducting magnet 1 in closed-loop operation is different from the operation mode of the magnet directly powered by the superconducting power supply, and has three main advantages: 1. the superconducting magnet can work independently of the superconducting power supply, so that the superconducting magnet is not influenced by the quality of the superconducting power supply, namely a high-cost power supply with ultrahigh precision and stability is not needed, and the cost of the superconducting magnet is reduced; 2. because the superconducting magnet can work independently of the superconducting power supply, the superconducting power supply has problems in power supply, and the superconducting magnet cannot be quenched; 3. compared with a superconducting magnet in which a superconducting power supply is connected in series in a power supply loop for direct power supply all the time, when the superconducting power supply generates ripple waves, the current of the whole superconducting coil of the superconducting magnet changes along with the current of the superconducting power supply to passively generate changes of +/-delta I, as shown in the stable situation of the current under different operation modes of the superconducting magnet in fig. 10, through the amplification of large turns (usually thousands of turns) of the superconducting coil, the magnetic field of the superconducting magnet can generate delta B fluctuation, and the changed magnetic field acts on a heating body of the single crystal furnace to generate a changed Lorentz force, so that the vibration of the whole single crystal furnace is caused, and the growth quality of single crystals is finally influenced. While the superconducting magnet in closed-loop operation, as shown in fig. 10, has very stable operation current, if necessary, the magnetic field can be changed according to the steps shown in fig. 9, so as to realize the magnetic field change of the magnet.
The embodiment of the invention also provides magnetic control single crystal pulling equipment, which comprises a single crystal furnace 2 and the magnetic control single crystal pulling superconducting magnet, wherein the superconducting magnet is of a circular cylindrical structure, and the single crystal furnace 2 is arranged at the axis position of the superconducting magnet.
Illustratively, the above-mentioned magnetron crystal pulling apparatus is used for holding and producing the polysilicon rod and the attachment 3. The single crystal furnace 2 includes: a cavity 201; the crucible 203 is arranged inside the cavity 201 and used for containing polycrystalline silicon; and a heating body 202 arranged inside the cavity 201, wherein the heating body 202 is arranged around the crucible 203, and the heating body 202 is used for heating the polycrystalline silicon in the crucible 203.
In an embodiment of the present invention, the crucible 203 may be a quartz crucible to withstand the high temperature of the melting of the polycrystalline silicon.
The heating body 202 includes a heating coil and heating electrodes 202-1 and 202-2, the heating electrodes are respectively connected to both ends of the heating coil, and the heating coil is of a square zigzag structure.
As shown in fig. 4 and 5, the conventional heating body 202 is of a spiral structure, and the current direction on a certain section of the heating body 202 is opposite, so that when the power supply is corrugated, the direction of the lorentz force induced by the heating body 202 is also opposite, and the heating body 202 is subjected to a large torque, so that the heating body 202 is easy to vibrate. The heating coil of the heating body 202 is improved to be square sawtooth, so that the current directions of two adjacent parts of the heating coil are opposite, and the electromagnetic forces of the two adjacent parts are mutually counteracted under the action of Lorentz force, so that the whole new heating body cannot form a larger torque by the geometric center of the heating body like a heating body adopting a spiral structure, and the stability of the heating body 202 is improved.
The single crystal furnace 2 further includes: the rotating shaft 204, the cavity 201 is rotatably disposed on the rotating shaft 204.
In the embodiment of the present invention, the height of the single crystal furnace 2 may be adjusted by a motor at the lower portion of the single crystal furnace 2.
The operation process of the magnetic control single crystal pulling equipment is as follows:
when the installation of the single crystal furnace 2 is completed, polycrystalline silicon is added into the crucible 203, and after other conditions are ready, the heating body 202 is turned on to heat the polycrystalline silicon to melt it. In the absence of a magnetic field, the level of the polycrystalline silicon solution 304 in the crucible 203 fluctuates, and single crystal pulling cannot be performed. When the magnetic field of the superconducting magnet 1 runs at a required value of single crystal pulling, the sub-crystal 302 is placed on the upper part of the liquid level of the molten polycrystalline silicon in the crucible 203 through the pulling wire 303 and is slowly pulled to realize seeding, the diameter of the single crystal silicon rod 301 is controlled through the rotating speed of the rotating shaft 204, and finally, the production and the manufacture of the single crystal silicon are completed according to the pulling process.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including the preferred embodiment and all changes and modifications that fall within the scope of the invention.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. A magnetically controlled single crystal pulling superconducting magnet, comprising:
a superconducting coil (102);
the superconducting switch (4) is connected in parallel at two ends of the superconducting coil (102), and the superconducting switch (4) and the superconducting coil (102) are connected in parallel and then are used for being connected with a superconducting power supply (5);
the superconducting switch (4) comprises a switch coil (401) and a heater (402), the heater (402) is used for heating the switch coil (401), the switch coil (401) is made of superconducting materials, the switch coil (401) is separated from a superconducting state when heated to a temperature higher than a critical temperature, short circuit of the superconducting coil (102) is removed, after a superconducting power supply (5) inputs required current to the superconducting coil (102), the heater (402) stops heating the switch coil (4), the switch coil (401) is enabled to enter the superconducting state, and the switch coil (401) and the superconducting coil (102) enter a closed-loop working state.
2. A magnetron pulled single crystal superconducting magnet as claimed in claim 1 further comprising:
the cold screen (103), the superconducting coil (102) and the superconducting switch (4) are both arranged inside the cold screen (103);
a refrigerator (101) for cooling the inside of the cold screen (103).
3. A magnetron pulled single crystal superconducting magnet as claimed in claim 2 further comprising:
the magnetic shielding iron yoke (104), the cold shield (103) is of a hollow circular column structure, and the magnetic shielding iron yoke (104) is arranged on one side, far away from the axis, of the outside of the cold shield (103).
4. A magnetron pulled single crystal superconducting magnet as claimed in claim 3 further comprising:
the vacuum Dewar inner barrel (105) is arranged on one side, close to the axis, of the outer portion of the cold shield (10), the vacuum Dewar inner barrel (105) is connected with the two ends of the magnetic shielding iron yoke (104), and the space between the vacuum Dewar inner barrel (105) and the magnetic shielding iron yoke (104) is in a vacuum state.
5. A magnetically controlled single crystal pulling superconducting magnet according to claim 1, wherein the number of the superconducting coils (102) is four, and the superconducting coils (102) are circular, and the four circular superconducting coils (102) are arranged symmetrically with respect to the axis of the superconducting magnet as a symmetry axis.
6. A magnetically controlled single crystal pulling superconducting magnet according to claim 1, wherein the number of the superconducting coils (102) is two, and the superconducting coils (102) are saddle-shaped, and the two saddle-shaped superconducting coils (102) are arranged symmetrically with respect to the axis of the superconducting magnet as the symmetry axis.
7. A magnetic control single crystal pulling device is characterized by comprising a single crystal furnace (2) and a magnetic control single crystal pulling superconducting magnet according to any one of claims 1 to 6, wherein the superconducting magnet is of a circular ring cylindrical structure, and the single crystal furnace (2) is arranged at the axis position of the superconducting magnet.
8. A magnetron pulling single crystal apparatus as claimed in claim 7, characterized in that the single crystal furnace (2) comprises:
a cavity (201);
the crucible (203) is arranged inside the cavity (201) and is used for containing polycrystalline silicon;
the heating body (202) is arranged inside the cavity (201), the heating body (202) is arranged around the crucible (203), and the heating body (202) is used for heating the polycrystalline silicon in the crucible (203).
9. The magnetron single crystal pulling apparatus as defined in claim 8, wherein the heating body (202) includes a heating coil and heating electrodes, the heating electrodes being connected to both ends of the heating coil, respectively, the heating coil having a zigzag structure.
10. A magnetron pulling apparatus as defined in claim 8, wherein the single crystal furnace (2) further comprises:
the rotating shaft (204), the cavity (201) is rotationally arranged on the rotating shaft (204).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210554833.7A CN114927305A (en) | 2022-05-19 | 2022-05-19 | Magnetic control single crystal pulling superconducting magnet and equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210554833.7A CN114927305A (en) | 2022-05-19 | 2022-05-19 | Magnetic control single crystal pulling superconducting magnet and equipment |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115527740A (en) * | 2022-11-24 | 2022-12-27 | 杭州慧翔电液技术开发有限公司 | Self-circulation superconducting magnet and semiconductor single crystal furnace |
| CN117822126A (en) * | 2024-03-02 | 2024-04-05 | 山东华特磁电科技股份有限公司 | Magnetic crystal pulling permanent magnet device |
| CN117995505A (en) * | 2024-04-02 | 2024-05-07 | 西安聚能超导磁体科技有限公司 | Switchable field-shaped magnetic control crystal pulling superconducting magnet |
-
2022
- 2022-05-19 CN CN202210554833.7A patent/CN114927305A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115527740A (en) * | 2022-11-24 | 2022-12-27 | 杭州慧翔电液技术开发有限公司 | Self-circulation superconducting magnet and semiconductor single crystal furnace |
| CN115527740B (en) * | 2022-11-24 | 2023-03-10 | 杭州慧翔电液技术开发有限公司 | Self-circulation superconducting magnet and semiconductor single crystal furnace |
| CN117822126A (en) * | 2024-03-02 | 2024-04-05 | 山东华特磁电科技股份有限公司 | Magnetic crystal pulling permanent magnet device |
| CN117822126B (en) * | 2024-03-02 | 2024-06-04 | 山东华特磁电科技股份有限公司 | Magnetic crystal pulling permanent magnet device |
| CN117995505A (en) * | 2024-04-02 | 2024-05-07 | 西安聚能超导磁体科技有限公司 | Switchable field-shaped magnetic control crystal pulling superconducting magnet |
| CN117995505B (en) * | 2024-04-02 | 2024-06-07 | 西安聚能超导磁体科技有限公司 | Switchable field-shaped magnetic control crystal pulling superconducting magnet |
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