CN210429450U - Conduction cooling closed loop saddle-shaped magnetic control single crystal pulling superconducting magnet device - Google Patents
Conduction cooling closed loop saddle-shaped magnetic control single crystal pulling superconducting magnet device Download PDFInfo
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- CN210429450U CN210429450U CN201922295047.6U CN201922295047U CN210429450U CN 210429450 U CN210429450 U CN 210429450U CN 201922295047 U CN201922295047 U CN 201922295047U CN 210429450 U CN210429450 U CN 210429450U
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- 239000013078 crystal Substances 0.000 title claims abstract description 35
- 238000001816 cooling Methods 0.000 title claims abstract description 12
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
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Abstract
A conduction cooling closed loop saddle-shaped magnetic control single crystal pulling superconducting magnet device comprises an iron yoke outer cylinder; a vacuum outer Dewar is arranged in the iron yoke outer cylinder; a cold shield is arranged in the vacuum outer Dewar; a coil framework is arranged in the cold shield; the coil framework is provided with a superconducting coil; the left superconducting coil and the right superconducting coil are connected through a left coil connecting device and a right coil connecting device; the left and right coil connecting devices are provided with superconducting closed-loop switches; the superconducting closed-loop switch is connected with a power supply through a current lead, and is connected with the superconducting coil through a superconducting current lead; a cold conducting plate is arranged on the front side of the superconducting closed-loop switch; the cold guide plate is provided with a coil cold body support rod and a G-M refrigerator; turning on a heater in the superconducting closed-loop switch to change the superconducting closed-loop switch into a normal conducting state; starting an excitation power supply, electrifying and exciting the superconducting coil, and when the current reaches a required value; the heater in the superconducting closed-loop switch is closed, and the superconducting closed-loop switch restores the superconducting state to realize closed-loop operation; has the characteristics of low magnet cost and good single crystal growth quality.
Description
Technical Field
The utility model belongs to the technical field of superconducting magnet for single crystal is drawn to magnetic control, concretely relates to single crystal superconducting magnet device is drawn to conduction cooling closed loop shape of a saddle magnetic control.
Background
The high-purity monocrystalline silicon is widely applied to industries such as solar cells, integrated circuits, semiconductors and the like, is one of key materials of high and new technology industries such as photovoltaic power generation, electronic information and the like, and has an important strategic position in terms of energy, information and national safety. However, due to the high design technical difficulty, the high processing and manufacturing difficulty, the high cost and the high risk of the large-scale superconducting strong magnet device, which is the core component of the magnetic pulling single crystal technology, the related basic research and the technology accumulation in China are caused, and the technology is completely monopolized by the countries of the day, the U.S. and the Germany.
According to the research and study of the existing documents, the regional and monopolized property of the processing and preparation of the single crystal silicon in the field of the superconducting magnet for magnetically controlled pulling of the single crystal leads to that the current foreign research and development units are mainly enterprises such as Sumitomo, Toshiba and Mitsubishi in Japan, and meanwhile, the magnet preparation technology in the field is almost completely in a confidential and blocked state. Although the related research of domestic monocrystalline silicon starts with japan, the production technology level is still relatively low in the present general, and most of the domestic integrated circuits and silicon wafers thereof still depend on importation. However, the accumulation and development of the superconducting magnet are catching up with each other for many years, and related patents are also applied for protection in recent years, such as 'an MgB2 superconducting magnet for magnetically controlled czochralski single crystal' published by 2013, li super, yan fruit, etc.: (CN 103106994A), 2019, Tanghouming, Frielingjian et al, put forward a disclosure number of superconducting magnet and magnetic control straight-pull single crystal equipment: (CN 110136915A), however, most of the previous magnets have the following problems, such as the magnet coil has 4 more circular coil structures or even more, the structure is complex, the magnetic field utilization rate is not high, especially the problem that the magnetic fields between the coils of the 4 coils and above structures are mutually offset, which results in low magnetic field utilization rate, therefore, the usage amount of the superconducting wire is large and the cost is high under the same magnetic field requirement, which results in large inductance of the magnet itself, thus the stored energy is high, the temperature rise of the magnet after quenching is more, and it is difficult to recover the magnetic field of the magnet in a short time. Meanwhile, most of the existing magnetic control single crystal pulling magnets run in an open loop mode, so that the magnets can face the danger of quenching in case of emergency such as power failure, after quenching occurs in the magnets, the coils heat the energy stored in the magnets, the temperature rises, and the temperature reduction and excitation needs to be carried out for several hours, so that the problem of magnet quenching caused by sudden situation is solved, the quality of single crystal materials being produced is influenced greatly, and the problems of burning of superconducting magnets and the like can also be directly caused.
Disclosure of Invention
For overcoming the not enough of above-mentioned prior art, the utility model aims at providing a single crystal superconducting magnet device is drawn to conduction cooling closed loop saddle shape magnetic control has the simplified magnet device, introduces superconductive closed loop switch (PCS) and normal atmospheric temperature and unloads ability resistance, reduces magnet manufacturing cost and reduces the unexpected condition and leads to the magnet to quench the characteristics to the quality problems that the single crystal growth caused.
In order to achieve the above object, the utility model adopts the following technical scheme: a conduction cooling closed loop saddle-shaped magnetic control single crystal pulling superconducting magnet device comprises an iron yoke outer cylinder; a vacuum outer Dewar is arranged in the iron yoke outer cylinder; a cold shield is arranged in the vacuum outer Dewar; a coil framework is arranged in the cold shield; the coil framework is provided with a superconducting coil 5; it is characterized in that the left and right superconducting coils 5 are connected by a left and right coil connecting device; the left and right coil connecting devices are provided with superconducting closed-loop switches 11; the superconducting closed-loop switch 11 is connected with a power supply through a current lead, and is connected with the superconducting coil through a superconducting current lead; the front side of the superconducting closed-loop switch is also provided with a cold conducting plate; the bottom of the cold guide plate is provided with a coil cold body supporting rod; the upper part of the cold guide plate is provided with a G-M refrigerator.
And a magnetic field intensity monitoring sensor is arranged on the coil framework.
The superconducting coil adopts a saddle-shaped superconducting coil.
The number of the superconducting coils is 2, and the 2 superconducting coils are connected in series and then connected in parallel with a diode D1, a diode D2, a superconducting closed-loop switch and an energy-discharging resistor at normal temperature; the power supply is connected in series with the superconducting coil through the breaker; the diode D1 is positively and negatively connected with the diode D2; the circuit breaker and the power supply of the normal temperature part are connected by a normal conductor oxygen-free copper wire, the superconducting coil, the superconducting closed-loop switch and the high-temperature superconducting current lead in the low temperature part are electrically connected by a superconducting wire, and the diode D1 and the diode D2 are connected with the superconducting coil by a normal conductor oxygen-free copper wire.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses can provide higher magnetic field intensity for traditional conventional electro-magnet to through the proposition of new concept, this magnet is higher to the utilization ratio in magnetic field, therefore under the same magnetic field intensity requirement condition, traditional magnetic control draws single crystal magnet manufacturing cost lower relatively. Meanwhile, the design concept of closed-loop operation and external energy discharge provided by the magnet can better solve the important problem that the magnet is quenched and the growth quality of the single crystal is influenced due to the unavoidable emergency in the actual production process of the magnetic control pulling of the single crystal, and has important practical requirements on better promotion of localization, mass production and stability of the magnet prepared from the monocrystalline silicon.
On the basis of the novel superconducting coil structure of saddle shape, utilize the advantage that saddle shape coil is higher to magnetic field utilization ratio, thereby make under the same magnetic field intensity demand condition, this czochralski single crystal superconducting wire use amount still less, the coil quality is lighter, under the prerequisite that inductance and energy storage are littleer, introduce superconductive closed loop switch (PCS) and outside and unload the ability resistance design notion, avoid because unexpected circumstances leads to the magnet to quench the problem, and can not the quick recovery magnet magnetic field after quenching, the single crystal growth quality problem that arouses. In conclusion, the invention can better solve the important realization problem that the magnet quench and then the single crystal growth quality are influenced due to the unavoidable emergency in the actual production process of the magnetic control pulling of the single crystal. The utility model has the advantages that specifically as follows:
1) the saddle-shaped coil structure is adopted, so that the usage amount of the superconducting wire is less under the condition of unit magnetic field intensity, and the inductance and the energy storage of the magnet are smaller than those of the traditional magnetic control single crystal pulling magnet, thereby facilitating the quench protection. Meanwhile, an external energy discharging resistor R1 is added, and after the magnet is quenched, partial energy stored in the magnet is discharged at the room temperature end, so that the temperature rise is much lower than that of the traditional magnet, the temperature of the coil is conveniently reduced by adopting a G-M refrigerator in a short time, the magnetic field of the magnet is recovered, and the influence on the quality of the pulled single crystal is avoided.
2) On the basis of the advantages of the saddle-shaped coil, a superconducting closed-loop switch (PCS) is introduced, so that the phenomenon that the magnet is quenched under the condition of unexpected power failure is avoided, meanwhile, the problem of electric energy consumption caused by the fact that a long-time power supply is needed for maintaining a magnetic place of a traditional magnet is solved due to the introduction of the PCS, and the use cost is reduced.
3) A magnetic field intensity monitoring sensor is introduced, and when the deviation between a monitoring value and a required value exceeds a set value, the saddle-shaped coil is electrified and magnetized through a control program, so that the influence of magnetic field attenuation on the quality of the single crystal during long-term operation is eliminated.
Drawings
Fig. 1 is a general diagram of a novel conduction cooling magnetron pulling single crystal superconducting magnet.
Fig. 2 shows a superconducting coil protection circuit inside the magnet device of the present invention.
In the figure: 1. an iron yoke outer cylinder; 2. a vacuum outer Dewar; 3. cooling the screen; 4. a coil bobbin; 5. a superconducting coil; 6. a left coil connecting plate and a right coil connecting plate; 7. a G-M refrigerator; 8. a cold conducting plate; 9. a coil cold body support rod; 10. a current lead; 11. a superconducting closed-loop switch; 12. a magnetic field intensity monitoring sensor; 13. energy-discharging resistor at normal temperature; 14. a circuit breaker; 15. A power source.
Detailed Description
The structure and operation of the present invention will be described in detail with reference to the accompanying drawings and embodiments.
Referring to fig. 1, a conduction cooling closed loop saddle-shaped magnetic control single crystal pulling superconducting magnet device comprises an iron yoke outer cylinder; a vacuum outer Dewar is arranged in the iron yoke outer cylinder; a cold shield is arranged in the vacuum outer Dewar; a coil framework is arranged in the cold shield; the coil framework is provided with a superconducting coil 5; the left and right superconducting coils 5 are connected through a left and right coil connecting device; the left and right coil connecting devices are provided with superconducting closed-loop switches 11; the superconducting closed-loop switch 11 is connected with a power supply through a current lead, and is connected with the superconducting coil through a superconducting current lead; the front side of the superconducting closed-loop switch is also provided with a cold conducting plate; the bottom of the cold guide plate is provided with a coil cold body supporting rod; the upper part of the cold guide plate is provided with a G-M refrigerator.
And a magnetic field intensity monitoring sensor is arranged on the coil framework.
The superconducting coil adopts a saddle-shaped superconducting coil.
Referring to fig. 2, 2 superconducting coils are provided, and are connected in series and then connected in parallel with a diode D1, a diode D2, a superconducting closed-loop switch and an energy-discharging resistor at normal temperature; the power supply is connected in series with the superconducting coil through the breaker; the diode D1 is positively and negatively connected with the diode D2; the circuit breaker and the power supply of the normal temperature part are connected by a normal conductor oxygen-free copper wire, the superconducting coil, the superconducting closed-loop switch and the high-temperature superconducting current lead in the low temperature part are electrically connected by a superconducting wire, and the diode D1 and the diode D2 are connected with the superconducting coil by a normal conductor oxygen-free copper wire.
Referring to fig. 1-2, a novel conduction cooling magnetic control single crystal pulling superconducting magnet device, firstly, the magnet is composed of saddle-shaped superconducting coils 5, which are in a symmetrical structure from left to right as shown in fig. 2, and are in a series structure on a circuit and are connected in parallel with a positive diode and a negative diode in fig. 2, the superconducting coils are wound on coil skeletons 4, the coil skeletons 4 provide structural support for the superconducting coils to resist coil deformation caused by electromagnetic force during operation, and meanwhile, the coil skeletons 4 also serve as cold guide plates 8 of the superconducting coils, and are connected with a G-M refrigerator through the cold guide plates 8, so as to realize cooling, but because the G-M refrigerator has low cold energy at low temperature, in order to ensure that the superconducting coils can be cooled below the critical temperature of superconducting wires, the magnet in the utility model firstly needs to support rods 9 (non-metal materials with small heat conduction coefficients) of the coil cold body, the superconducting coil is isolated from the outer dewar 2 in vacuum, and the superconducting coil is isolated from the outer dewar in vacuum by using a cold shield 3 for reducing heat radiation. During operation, according to the use requirement, an iron yoke outer cylinder 1 can be added outside the superconducting magnet vacuum outer Dewar to perform magnetic field shielding so as to further reduce the influence of leakage flux on nearby electromagnetic equipment. Meanwhile, in order to prevent the superconducting coils from being attracted to the outer yoke barrel 1, left and right coil connecting plates 6 need to be added between the left and right superconducting coils so that the superconducting coils are not damaged when interacting with the outer yoke barrel 1.
And (3) test operation: after the production of the magnetic control pulling single crystal magnet is finished, firstly, a vacuum unit is used for vacuumizing, and when the vacuum degree reaches 10-2And when the Pa magnitude is larger than the standard, opening the GM refrigerator to cool the test sample, and monitoring the temperature of the important temperature detection point by adopting the temperature sensor. When the temperature of the saddle-shaped coil inside reaches a design value and is stable, firstly, a low-power heater inside the superconducting closed-loop switch is switched on, so that the superconducting closed-loop switch (PCS) is changed from a superconducting state to a normal conducting state; then, the finger circuit breaker 14 (main circuit switch S1) is turned on, the excitation power supply is turned on, the magnitude of the current is adjusted, the superconducting coil is energized and excited through the binary current lead 10, and finally, when the current reaches a required value; then, a low-power heater in the superconducting closed-loop switch (PCS) is closed, so that the superconducting closed-loop switch (PCS) is restored to a superconducting state, and the closed-loop operation of the magnet is realized; finally, the excitation supply current will be 0. At this time, the single crystal growth can be preparedThe furnace is used for carrying out magnetic control pulling single crystal production. Note that, because some non-superconducting joints exist in the coil and the magnetic field attenuation problem is caused by other reasons in the closed loop state, the magnetic field intensity monitoring sensor 12 monitors the magnetic field intensity in real time, and when the magnetic field intensity is found to be attenuated to the lower limit, a control program is started, the above excitation steps are repeated, the superconducting coil is electrified and magnetized, and the influence on the quality of the single crystal caused by the magnetic field attenuation is avoided.
Claims (4)
1. A conduction cooling closed loop saddle-shaped magnetic control single crystal pulling superconducting magnet device comprises an iron yoke outer cylinder (1); a vacuum outer Dewar (2) is arranged in the iron yoke outer cylinder (1); a cold shield (3) is arranged in the vacuum outer Dewar (2); a coil framework (4) is arranged in the cold shield (3); a superconducting coil (5) is arranged on the coil framework (4); it is characterized in that a left superconducting coil and a right superconducting coil (5) are connected through a left coil connecting device and a right coil connecting device (6); the left and right coil connecting devices (6) are provided with superconducting closed-loop switches (11); the superconducting closed-loop switch (11) is connected with a power supply (15) through a current lead (10), and the superconducting closed-loop switch is connected with the superconducting coil (5) through the superconducting current lead (10); a cold conducting plate (8) is also arranged on the front side of the superconducting closed-loop switch (11); a coil cold body supporting rod (9) is arranged at the bottom of the cold conducting plate (8); the upper part of the cold guide plate (8) is provided with a G-M refrigerator (7).
2. A conduction-cooled closed-loop saddle-shaped magnetically controlled single crystal pulling superconducting magnet device according to claim 1, wherein the coil former (4) is provided with a magnetic field strength monitoring sensor (12).
3. A conduction-cooled closed-loop saddle-shaped magnetically controlled single crystal pulling superconducting magnet apparatus as claimed in claim 1, wherein said superconducting coil (5) is a saddle-shaped superconducting coil.
4. The superconducting magnet device of claim 1, wherein 2 superconducting coils (5) are connected in series and then connected in parallel with a diode D1, a diode D2, a superconducting closed-loop switch (11) and an energy-discharging resistor (13) at normal temperature; the power supply (15) is connected in series with the superconducting coil through a breaker; the diode D1 is positively and negatively connected with the diode D2; a circuit breaker (14) and a power supply (15) of the normal-temperature part are connected by a normal-conductor oxygen-free copper wire, a superconducting coil (5) in the low-temperature part, a superconducting closed-loop switch (11) and a high-temperature superconducting current lead (10) are electrically connected by a superconducting wire, and a diode D1 and a diode D2 are connected with the superconducting coil by a normal-conductor oxygen-free copper wire.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922295047.6U CN210429450U (en) | 2019-12-19 | 2019-12-19 | Conduction cooling closed loop saddle-shaped magnetic control single crystal pulling superconducting magnet device |
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| CN201922295047.6U CN210429450U (en) | 2019-12-19 | 2019-12-19 | Conduction cooling closed loop saddle-shaped magnetic control single crystal pulling superconducting magnet device |
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| CN210429450U true CN210429450U (en) | 2020-04-28 |
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Effective date of registration: 20221207 Address after: 710000 No. 2000, North Section of Zhengyang Avenue, Jinghe New City, Xixian New District, Xi'an, Shaanxi Patentee after: XI'AN JUNENG SUPERCONDUCTING MAGNET TECHNOLOGY Co.,Ltd. Address before: No.12 Mingguang Road, Xi'an Economic and Technological Development Zone, Shaanxi 710016 Patentee before: WESTERN SUPERCONDUCTING TECHNOLOGIES Co.,Ltd. |
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