CN215680369U - Shielding structure of magnetic control single crystal pulling superconducting magnet - Google Patents
Shielding structure of magnetic control single crystal pulling superconducting magnet Download PDFInfo
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- CN215680369U CN215680369U CN202122291103.6U CN202122291103U CN215680369U CN 215680369 U CN215680369 U CN 215680369U CN 202122291103 U CN202122291103 U CN 202122291103U CN 215680369 U CN215680369 U CN 215680369U
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Abstract
The utility model discloses a shielding structure of a magnetic control single crystal pulling superconducting magnet, which comprises a magnetic shielding iron yoke upper plate, a magnetic shielding iron yoke lower plate and a magnetic shielding iron yoke barrel. The magnetic shielding iron yoke upper plate and the magnetic shielding iron yoke lower plate are respectively connected to two ends of the magnetic shielding iron yoke barrel, and the magnetic shielding iron yoke barrel is of a multilayer structure. The utility model optimizes the traditional magnetic control pulling single crystal silicon magnet without electrician pure iron or a single-layer magnetic shielding structure in a multilayer way, and further reduces the magnetic leakage of the magnet on the basis of saving electrician pure iron, thereby meeting the requirement of safe and stable operation of electric equipment around the superconducting magnet for magnetic control pulling single crystal. Meanwhile, the multilayer magnetic shielding structure can also reduce the risk of the problem of the stability of the operation of the induced magnet due to overlarge electromagnetic acting force between the magnetic shielding and the superconducting coil caused by the single-layer thick electrician pure iron magnetic shielding structure, improve the stability of the superconducting magnet for magnetic control crystal pulling, and ensure the production efficiency and the stability.
Description
Technical Field
The utility model relates to the technical field of semiconductor production equipment, in particular to a shielding structure of a magnetic control single crystal pulling superconducting magnet.
Background
The high-purity monocrystalline silicon is widely applied to industries such as solar cells, integrated circuits, semiconductors and the like, is one of key materials of high and new technology industries such as photovoltaic power generation, electronic information and the like, and has an important strategic position in terms of energy, information and national safety. However, due to the high design technical difficulty, the high processing and manufacturing difficulty, the high cost and risk and other reasons of the large superconducting magnet device, which is the core component of the magnetic control single crystal pulling technology, the related basic research and technical accumulation in China is caused, and the technology is completely monopolized by the countries of the day, the U.S. and the Germany.
According to the existing literature research, until now, due to the regionality and monopolistism of the processing and preparation of the single crystal silicon, the field of the superconducting magnet for magnetically controlled pulling of the single crystal is mainly enterprises such as Sumitomo, Toshiba and JASTEC of the Japan superconducting technology company, which are the main research units abroad at present, and meanwhile, the magnet preparation technology in the field is almost completely in a confidential and blocked state. Although the related research of domestic monocrystalline silicon starts with japan, the production technology level is still relatively low in the present general, and most of the domestic integrated circuits and silicon wafers thereof still depend on importation. However, the accumulation and development of the new technology are coming to the fore over the years, and related patents such as CN103106994A, CN110136915A and ZL201922296007.3 have been applied for protection in recent years. However, most of the previous magnets have two problems as follows: (1) the relevant magnets are not magnetically shielded with electrician pure iron, (2) or are magnetically shielded with thicker electrician pure iron. The magnetic shielding magnet is not adopted, so that magnetic leakage is overlarge due to the strong magnetic field of the magnetic control pulling single crystal superconducting magnet, electric equipment around the magnet is influenced, even the magnetic field distribution of adjacent magnets is influenced, and the high-quality growth of the single crystal silicon is influenced. And the magnetic control that adopts the individual layer thick electrician's pure iron to carry out the magnetic screen draws single crystal magnet, needs thick electrician's pure iron just can reduce the leakage field to reasonable level, so not only extravagant electrician's pure iron's quantity, also can produce too big electromagnetic force between the electrician's pure iron of excessive thickness and the superconducting magnet coil simultaneously, can make superconducting magnet operating stability receive certain influence again.
SUMMERY OF THE UTILITY MODEL
The embodiment of the utility model provides a shielding structure of a magnetic control single crystal pulling superconducting magnet, which is used for solving the problems that in the prior art, a single-layer thicker electrician pure iron is used for magnetic shielding, the electrician pure iron is wasted, and the operation stability of the superconducting magnet is influenced.
In one aspect, an embodiment of the present invention provides a shielding structure of a magnetic control single crystal pulling superconducting magnet, including: the magnetic shielding iron yoke comprises a magnetic shielding iron yoke upper plate, a magnetic shielding iron yoke lower plate and a magnetic shielding iron yoke barrel;
the magnetic shielding iron yoke upper plate and the magnetic shielding iron yoke lower plate are respectively connected to two ends of the magnetic shielding iron yoke barrel, and the magnetic shielding iron yoke barrel is of a multilayer structure.
In one possible implementation, the magnetic shield yoke upper plate and the magnetic shield yoke lower plate are parallel to each other, and both ends of the magnetic shield yoke cylinder are vertically connected to the magnetic shield yoke upper plate and the magnetic shield yoke lower plate, respectively.
In one possible implementation, there are gaps between the multi-layered structure of the magnetic shielding yoke cylinder.
In one possible implementation, the magnetic shield yoke upper plate, the magnetic shield yoke lower plate and the magnetic shield yoke cylinder are all made of electrical pure iron.
The shielding structure of the magnetic control single crystal pulling superconducting magnet has the following advantages:
the traditional magnetic control pulling single crystal silicon magnet without the electrician pure iron or a single-layer magnetic shielding structure is optimized in a multilayer mode, and magnetic leakage of the magnet is further reduced on the basis of saving the electrician pure iron, so that safe and stable operation of electrical equipment around the superconducting magnet for magnetic control pulling single crystal is met. Meanwhile, the multilayer magnetic shielding structure can also reduce the risk of the problem of the stability of the operation of the induced magnet due to overlarge electromagnetic acting force between the magnetic shielding and the superconducting coil caused by the single-layer thick electrician pure iron magnetic shielding structure, improve the stability of the superconducting magnet for magnetic control crystal pulling, and ensure the production efficiency and the stability.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic overall structure diagram of a shielding structure of a magnetron-pulled single crystal superconducting magnet according to an embodiment of the present invention;
fig. 2 is a schematic view of an installation structure of a shielding structure of a magnetic control single crystal pulling superconducting magnet on the superconducting magnet according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Fig. 1 and 2 are schematic structural diagrams of a shielding structure of a magnetron-pulled single crystal superconducting magnet according to an embodiment of the present invention. The embodiment of the utility model provides a shielding structure of a magnetic control pulling single crystal superconducting magnet, which comprises the following components: a magnetic shield yoke upper plate 100, a magnetic shield yoke lower plate 110, and a magnetic shield yoke cylinder 120;
the magnetic shield yoke upper plate 100 and the magnetic shield yoke lower plate 110 are respectively connected to both ends of the magnetic shield yoke cylinder 120, and the magnetic shield yoke cylinder 120 has a multi-layered structure.
Illustratively, the magnetic shield yoke upper plate 100 and the magnetic shield yoke lower plate 110 are both circular ring-shaped plates, and both are identical in size. The magnetic shield yoke upper plate 100 is disposed at a position right above the magnetic shield yoke lower plate 110, the magnetic shield yoke cylinder 120 is connected between the magnetic shield yoke upper plate 100 and the magnetic shield yoke lower plate 110, and the magnetic shield yoke cylinder 120 is located at outer edge positions of the magnetic shield yoke upper plate 100 and the magnetic shield yoke lower plate 110, so that the entire shield structure is formed in a cylindrical hollow cylindrical shape.
In the shielding structure of the cylindrical hollow cylinder structure, a dewar 200 and a cold shield 300 are provided, the dewar 200 is also a hollow structure and comprises an outer dewar and an inner dewar 130, the outer dewar is arranged at one side of the shielding structure close to the magnetic shielding iron yoke cylinder 120, the inner dewar 130 is arranged at a position close to the axis of the shielding structure, and the whole dewar 200 is a closed structure. The cold shield 300 is arranged inside the dewar 200, the cold shield 300 is also a hollow structure, a coil frame 400 is arranged inside the cold shield, and a superconducting coil 410 is wound on the coil frame 400. In the embodiment of the present invention, the number of the bobbin 400 is two, the two bobbins 400 have the same structure and are symmetrically disposed at two sides of the interior of the cold shield 300, the two bobbins 400 are connected together by the cold conducting connection structure 520, and the cold conducting connection structure 520 is installed on the inner side surface of the cold shield 300. The coil bobbin 400 not only provides structural support for the superconducting coil 410 and resists deformation of the superconducting coil 410 caused by electromagnetic force generated when the superconducting magnet operates, but also serves as a cold conduction structure of the superconducting coil 410, the coil bobbin 400 is in contact with the cold conduction structure on the inner bottom surface of the shielding structure, namely the top surface of the lower plate 110 of the magnetic shielding iron yoke, the cold conduction structure is connected with the secondary cold head, and the secondary cold head is connected with the primary cold head 510, so that low temperature can be transmitted to the superconducting coil 410.
The G-M refrigerator 500 is arranged outside the shielding structure, the refrigerating output end of the G-M refrigerator 500 is connected with a primary cold head 510, the primary cold head 510 is connected with the inner side surface of the cold screen 300, a low-temperature environment is manufactured for the superconducting coil 410, heat is transmitted between the G-M refrigerator 500 and the cold screen 300, and the superconducting coil 410 inside the cold screen 300 is always below the superconducting critical temperature.
It should be understood that the number of layers of the magnetic shielding yoke barrel 120 is determined according to actual needs, and specifically, may be determined according to the usage requirements of the related electrical equipment.
In a possible embodiment, the magnetic shield yoke upper plate 100 and the magnetic shield yoke lower plate 110 are parallel to each other, and both ends of the magnetic shield yoke cylinder 120 are perpendicularly attached to the magnetic shield yoke upper plate 100 and the magnetic shield yoke lower plate 110, respectively.
Illustratively, the magnetic shield yoke upper plate 100 and the magnetic shield yoke lower plate 110 are in a horizontal state, and thus the magnetic shield yoke barrel 120 is in a vertical state after the magnetic shield yoke barrel 120 is vertically connected between the magnetic shield yoke upper plate 100 and the magnetic shield yoke lower plate 110.
In one possible embodiment, the magnetic shield yoke barrel 120 has a gap between the multi-layered structure.
In one possible embodiment, the magnetic shield yoke upper plate 100, the magnetic shield yoke lower plate 110, and the magnetic shield yoke cylinder 120 are all made of electrical pure iron.
Illustratively, the magnetic shield yoke upper plate 100, the magnetic shield yoke lower plate 110 and the magnetic shield yoke barrel 120, which are made of an electrical pure iron material, can effectively block the leakage of the strong magnetic field generated by the superconducting coil 410. Since the equipment such as the single crystal furnace is arranged at the axis of the shielding structure, and the strong magnetic field generated by the superconducting coil 410 needs to act on the equipment such as the single crystal furnace, the inner dewar 130 near the axis of the shielding structure is made of non-magnetic material to avoid shielding the magnetic field, so that the magnetic field can smoothly penetrate through and act on the equipment at the axis of the shielding structure.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the utility model.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the utility model. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (4)
1. A shielding structure of a magnetic control single crystal pulling superconducting magnet is characterized by comprising: an upper magnetic shield yoke plate (100), a lower magnetic shield yoke plate (110) and a magnetic shield yoke barrel (120);
the magnetic shielding iron yoke upper plate (100) and the magnetic shielding iron yoke lower plate (110) are respectively connected to two ends of the magnetic shielding iron yoke cylinder body (120), and the magnetic shielding iron yoke cylinder body (120) is of a multilayer structure.
2. The shielding structure of the magnetron pulled single crystal superconducting magnet according to claim 1, wherein the magnetic shielding yoke upper plate (100) and the magnetic shielding yoke lower plate (110) are parallel to each other, and two ends of the magnetic shielding yoke cylinder (120) are vertically connected to the magnetic shielding yoke upper plate (100) and the magnetic shielding yoke lower plate (110), respectively.
3. The shielding structure of the magnetron pulled single crystal superconducting magnet according to claim 1, wherein gaps are formed between the multilayer structures of the magnetic shielding iron yoke barrel (120).
4. The shielding structure of a magnetron pulled single crystal superconducting magnet according to claim 1, wherein the magnetic shielding yoke upper plate (100), the magnetic shielding yoke lower plate (110) and the magnetic shielding yoke barrel (120) are all made of electrical pure iron.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202122291103.6U CN215680369U (en) | 2021-09-22 | 2021-09-22 | Shielding structure of magnetic control single crystal pulling superconducting magnet |
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| CN202122291103.6U CN215680369U (en) | 2021-09-22 | 2021-09-22 | Shielding structure of magnetic control single crystal pulling superconducting magnet |
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| CN215680369U true CN215680369U (en) | 2022-01-28 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117854877A (en) * | 2024-03-04 | 2024-04-09 | 安徽因速丹电气有限责任公司 | Superconducting magnet for magnetic control Czochralski single crystal and refrigerating method |
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2021
- 2021-09-22 CN CN202122291103.6U patent/CN215680369U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117854877A (en) * | 2024-03-04 | 2024-04-09 | 安徽因速丹电气有限责任公司 | Superconducting magnet for magnetic control Czochralski single crystal and refrigerating method |
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