CN209513138U - A kind of miniature digital pressure sensor - Google Patents
A kind of miniature digital pressure sensor Download PDFInfo
- Publication number
- CN209513138U CN209513138U CN201920417444.3U CN201920417444U CN209513138U CN 209513138 U CN209513138 U CN 209513138U CN 201920417444 U CN201920417444 U CN 201920417444U CN 209513138 U CN209513138 U CN 209513138U
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- Prior art keywords
- chamber
- pressure sensor
- connector
- digital pressure
- shell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000919 ceramic Substances 0.000 claims abstract description 29
- 239000000084 colloidal system Substances 0.000 claims abstract description 24
- 239000003292 glue Substances 0.000 claims description 7
- 238000005266 casting Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 12
- 238000000034 method Methods 0.000 description 6
- 238000003466 welding Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 230000003750 conditioning effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000010923 batch production Methods 0.000 description 2
- 230000015271 coagulation Effects 0.000 description 2
- 238000005345 coagulation Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 241000519996 Teucrium chamaedrys Species 0.000 description 1
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
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- 238000009826 distribution Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
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- 229910052573 porcelain Inorganic materials 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
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- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Measuring Fluid Pressure (AREA)
Abstract
The utility model discloses a kind of miniature digital pressure sensors, belong to sensor technical field.The miniature digital pressure sensor includes shell, and the inner space of the shell can be separated into interconnected first chamber and second chamber；Ceramic circuit board is set in the first chamber, and the first chamber and the second chamber can be isolated；Asic chip is set in the first chamber, and is formed and connected with the ceramic circuit board；Pressure chip is set in the second chamber, and is formed and connected with the ceramic circuit board；Filled with the first colloid for transmitting pressure in the second chamber；Signal output, one end are connect with the ceramic circuit board, and the other end stretches out the free end setting of the first chamber.The miniature digital pressure sensor of the utility model is filled using colloid, and the investment of simple production process, equipment is low, significantly reduces production cost.
Description
Technical field
The utility model relates to sensor technical field more particularly to a kind of miniature digital pressure sensors.
Background technique
MEMS (micro-electromechanical system, MEMS), substantially refers to size at several lis
Meter or less so that smaller midget plant, be an independent intelligence system.MEMS technology is because having micromation, intelligent, height
It spends integrated and the advantages of can be mass, is widely used to the neck such as electronics, medicine, industry, automobile and aerospace system
Domain.MEMS pressure sensor is exactly a kind of pressure sensor manufactured using MEMS technology.
Existing MEMS pressure sensor mostly uses the structure type of oil filling core body, this kind of structure generallys use metallic membrane
It is packaged with glass sintering pedestal, enclosed inside has the pressure transmission oil and pressure chip of transmitting pressure.Diaphragm is by ambient pressure
Deformation occurs, and then pressure signal is passed to pressure chip by pressure transmission oil, and pressure chip exports millivolt level signal, and needs
Transmitter conditioning could export the signal for instrument to collect.Based on the pressure sensor of oil filling core body encapsulation, needing will be oil-filled
Core is packaged by welding, and the output of signal then needs to draw using cable or the extraction side of aviation plug
Formula.
Cause the overall dimensions of sensor larger using the packaged type of oil filling core body, inadaptable entirety is embedded into fine
In instrument；And the Various Complexes technique such as welding, glass sintering, vacuum oil filling is needed in the manufacturing process of entire sensor, it is whole
Body is with high costs.
It solves the above problems it would therefore be highly desirable to provide a kind of miniature digital pressure sensor.
Utility model content
The purpose of this utility model is to provide a kind of miniature digital pressure sensors, can simplify production technology, subtract
Miscellaneous goods volume reduces production cost.
To achieve the above object, the following technical schemes are provided:
A kind of miniature digital pressure sensor, comprising:
Shell, the inner space of the shell can be separated into interconnected first chamber and second chamber；
Ceramic circuit board is set in the first chamber, and the first chamber and the second chamber can be isolated；
Asic chip is set in the first chamber, and is formed and connected with the ceramic circuit board；
Pressure chip is set in the second chamber, and is formed and connected with the ceramic circuit board；In the second chamber
Filled with the first colloid for transmitting pressure；
Signal output, one end are connect with the ceramic circuit board, and the other end stretches out the free end of the first chamber
Setting.
Further, erecting bed is provided on the inner wall of the shell；The first chamber and second chamber difference
It is set to the two sides of the erecting bed；
The ceramic circuit board is set on the erecting bed.
Further, T-type through-hole is equipped in the shell, the T-type through-hole forms the installation in the shell
Platform.
Further, the free end of the second chamber is equipped with opening.
Further, casting glue is filled in the first chamber.
Further, it is arranged fluted on the inner wall of the first chamber, the casting glue can be filled in the groove
It is interior.
Further, the signal output is conducting wire, and the number of the conducting wire is set as at least four.
Further, the shell includes sequentially connected first connector and the second connector；The first chamber is set
In in first connector, the second chamber is set in second connector；On the outer wall of second connector
Equipped with external screw thread.
Further, the section being parallel to each other there are two being set on the outer wall of first connector.
Further, the free end end of second connector is provided with chamfering.
Compared with prior art, the utility model has the beneficial effects that
1) miniature digital pressure sensor provided by the utility model is filled using colloid, and simple production process avoids
Using high costs, highly difficult process such as welding, oil-filled, the electric resistance welding sealing steel balls of core in traditional sensor production process,
The investment of equipment is low, significantly reduces production cost；
2) miniature digital pressure sensor structure provided by the utility model is simple, is easy to automatic batch production；Body
Small, the pressure acquisition suitable for microminiature interface of product；
3) miniature digital pressure sensor provided by the utility model carries out the processing of pressure signal using asic chip,
And transmitted using the direct sending out signals of conducting wire, it avoids using the conditioning devices such as transmitter progress signal condition, therefore into
One step reduces the volume of entire sensor, simplifies signal processing.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the utility model embodiment miniaturization digital pressure sensor under the first visual angle；
Fig. 2 is structural schematic diagram of the utility model embodiment miniaturization digital pressure sensor under the second visual angle；
Fig. 3 is the front view of the utility model embodiment miniaturization pressure sensor；
Fig. 4 is the cross-sectional view in the face A-A of Fig. 3.
Appended drawing reference:
1- shell；11- erecting bed；12- first chamber；13- second chamber；The first connector of 14-；The section 141-；15-
Two connectors；16- third connector；2- ceramic circuit board；3- pressure chip；4-ASIC chip；5- signal output；51- is led
Line.
Specific embodiment
The technical issues of to solve the utility model, the technical solution of use and the technical effect that reaches are clearer,
It is described in further detail below in conjunction with technical solution of the attached drawing to the utility model embodiment, it is clear that described reality
Applying example is only the utility model a part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention,
It is practical new to belong to this for those skilled in the art's every other embodiment obtained without making creative work
The range of type protection.
As shown in Figs 1-4, present embodiment discloses a kind of miniature digital pressure sensors, including shell 1, ceramic circuit
Plate 2, pressure chip 3, asic chip 4 and signal output 5.The inner hollow of shell 1.Installation is provided on the inner wall of shell 1
Platform 11, ceramic circuit board 2 are set on erecting bed 11, realize the fixation with shell 1.Optionally, ceramic circuit board 2 passes through bonded adhesives
It is adhered on erecting bed 11, it is not limited to the mode of gluing is fixed.Optionally, asic chip 4 and pressure chip 3 divide
Not Wei Yu ceramic circuit board 2 two sides, and connect with ceramic circuit board 2 by reflow soldering process.Signal can be in pressure chip 3
Between ceramic circuit board 2, transmitted between ceramic circuit board 2 and asic chip 4.One end of signal output 5 and ceramics
Circuit board 2 connects, and the other end stretches out the free end setting of shell 1, can export the signal of ceramic circuit board 2 to the external world and set
It is standby；Meanwhile signal output 5 can also play the role of as the power supply of entire digital pressure sensor.
Further, shell 1 can be boundary with erecting bed 11, by the inner space of shell 1 be separated into be interconnected
First chamber 12 and second chamber 13, i.e. first chamber 12 and second chamber 13 are located at the two sides setting of erecting bed 11.Pottery
Porcelain circuit board 2 and asic chip 4 are in first chamber 12, and pressure chip 3 is in second chamber 13, wherein ceramic circuit
Plate 2 also acts the effect of isolation first chamber 12 and second chamber 13.In order to realize the acquisition to pressure signal, in the second chamber
The first colloid is filled in room 13, the first colloid is the conductive medium of ambient pressure.Optionally, the first colloid uses Silica hydrogel.
Further, the first chamber 12 and second chamber 13 that shell 1 is arranged are by the T-type that is arranged through entire shell 1
Through-hole is formed, and T-type through-hole forms an erecting bed 11 just in shell 1, is easily installed ceramic circuit board 2.
The working principle of digital pressure sensor in the present embodiment: environmental pressure changes, and acts on the first glue
Body is deformed the first colloid；In turn by pressure signal transmission to pressure chip 3, pressure chip 3 will receive first colloid
To pressure signal be converted into electric signal and export to ceramic circuit board 2；Asic chip 4 above ceramic circuit board 2 will
Electric signal processing is IIC digital signal, then the digital signal is exported by signal output 5 to external device.The present embodiment mentions
The digital pressure sensor of confession avoids the conditioning that signal is carried out using conditioning devices such as transmitters, therefore further reduces whole
The volume of a digital pressure sensor, simplifies signal processing.
In order to realize the abundant transmission of pressure signal, optionally, the free end that the second chamber 13 of shell 1 is arranged is opening
Formula design, enables the first colloid in second chamber 13 sufficiently to receive the pressure change signal of environment.
Further, in order to protect be located at first chamber 12 in ceramic circuit board 2, asic chip 4 and signal output
Part 5 avoids interference caused by external environment, is filled with the second colloid in setting first chamber 12.Optionally, the second colloid is ring
Oxygen glue or other casting glues.Optionally, in order to mitigate the weight of digital pressure sensor, simplify production technology, setting shell 1
The free end of first chamber 12 is also designed for opened type, due to the second colloid be isolated the internal structure of second chamber 12 with
The external world, therefore the opened type design of shell 1 has no effect on the function of the inner components realization signal transmitting of digital pressure sensor
Energy.
Optionally, internal screw thread is set on the inner wall of the first chamber 12 of shell 1, and the second colloid can be filled in internal screw thread
Between groove in.Such setting can play the role of fixing the second colloid, prevent the second colloid entirety coagulation forming
Afterwards, as the inner wall of first chamber 12 it is excessively smooth caused by the second colloid deviate from from first chamber 12 the phenomenon that；Internal screw thread
Setting increase the second colloid abjection resistance.When it is implemented, can also using in addition to above-mentioned helicitic texture other are recessed
Slot class formation achievees the purpose that hinder the abjection of the second colloid, for example is arranged on the inner wall of first chamber 12 multiple along shell 1
The protrusion of axis direction setting, forms between multiple protrusions fluted, and the second colloid coagulation forming in a groove can also play resistance
The purpose for hindering the second colloid to be deviate from；Or the mode that groove is opened up on the inner wall of first chamber 12 is directly taken, it can also prevent
The abjection of second colloid.
Optionally, the signal output 5 in the present embodiment is conducting wire 51, metal can also be selected to lead in other embodiments
The structures such as needle, as long as the transmission for completing signal can be connect with external device.Number pressure can be improved using conducting wire 51
The interface adaptability of force snesor electric signal, staff can patching according to the different selection crimp type terminals of application scenarios
Part, or the plug connector of selection solder terminal；Further, it is also possible to select conducting wire 51 being directly connected to external electricity by soldering
On the plate of road, or conducting wire 51 is directly connected to corresponding electrical connector；Compared to traditional sensor using fixed connector
Or air plug, the applicability of the digital pressure sensor can be significantly improved.Optionally, the number of conducting wire 51 is specific as needed
The external device of connection is selected, and can be four or five；The number of conducting wire 51 is set as four in the present embodiment.
Optionally, the material of the shell 1 in the present embodiment is stainless steel, can be improved the whole strong of digital pressure sensor
Degree, adequately protects to the structure in shell 1, convenient for using under a variety of different working environments.
Optionally, the generally T-type structure of shell 1, including sequentially connected first connector 14 and the second connector 15, and
The outer diameter of first connector 14 is greater than the outer diameter of the second connector 15.First chamber 12 is set in the first connector 14, the second chamber
Room 13 is set in the second connector 15.Second connector 15 is connect with instrument, and signal output 5 is then stretched out by the first connector 14
It is connected with external device.Optionally, the first connector 14 and the second connector 15 are hollow for cylindrical structure, and second
The outer wall of connector 15 is equipped with external screw thread, convenient for digital pressure sensor and instrument to be connected through a screw thread.Work as digital pressure
When sensor is connect by the way of being threadedly coupled with instrument, setting two on the outer wall of the first connector 14 is set and is parallel to each other
Section 141, the section 141 be plane.The presence of section 141 can be easy to use the tools such as spanner and the first connector 14 to block
It connects, completes to install time saving and energy savingly；Meanwhile for the digital pressure sensor of small size, what setting two was parallel to each other
Section 141 of the section 141 relative to traditional six hexagonal distributions of setting, can significantly increase the strong of the first connector 14
Degree avoids the first connector 14 that the deformation of digital pressure sensor occurs since side wall is excessively thin.Further, for the ease of number
Second connector 15 of pressure sensor is embedded in instrument, and the free end end of the second connector 15 of setting is provided with chamfering.
Optionally, it is connected between the first connector 14 and the second connector 15 by third connector 16, third connector
16 be also hollow cylindrical structure.Optionally, the first connector 14, the second connector 15 and third connector 16 are integral type
Structure.Further, the junction of third connector 16 and the first connector 14 passes through rounded corner rounding off, third connector
16 and second connector 15 junction also by rounded corner rounding off, concentrated with buffering the stress of junction.
Digital pressure sensor disclosed in the present embodiment is filled using colloid, and structure and simple production process avoid biography
Using the high costs, highly difficult process such as welding, oil-filled, the electric resistance welding sealing steel ball of core, equipment in the sensor production process of system
Investment it is low, be easy to automatic batch production, significantly reduce production cost.In addition, the simplification of process and structure is also convenient for
Realize the miniaturization of sensor.Specifically, the maximum outside diameter of digital pressure sensor provided by the present embodiment, shell 1 is
11mm, the height of shell 1 is 13mm, and the thread size being located on 15 outer wall of the second connector of shell 1 is only M6*0.75,
Therefore the volume of entire digital pressure sensor is very small, can be realized and entire digital pressure sensor is embedded in fine instrument
In table.
Note that above are only the preferred embodiment and institute's application technology principle of the utility model.Those skilled in the art's meeting
Understand, the utility model is not limited to specific embodiment described here, is able to carry out for a person skilled in the art various bright
Aobvious variation, readjustment and substitution is without departing from the protection scope of the utility model.Therefore, although passing through above embodiments
The utility model is described in further detail, but the utility model is not limited only to above embodiments, is not departing from
It can also include more other equivalent embodiments in the case that the utility model is conceived, and the scope of the utility model is by appended
Scope of the claims determine.
Claims (10)
1. a kind of miniature digital pressure sensor characterized by comprising
The inner space of shell (1), the shell (1) can be separated into interconnected first chamber (12) and second chamber
(13)；
Ceramic circuit board (2) is set in the first chamber (12), and the first chamber (12) and described second can be isolated
Chamber (13)；
Asic chip (4) is set in the first chamber (12), and is formed and connected with the ceramic circuit board (2)；
Pressure chip (3) is set in the second chamber (13), and is formed and connected with the ceramic circuit board (2)；Described second
Filled with the first colloid for transmitting pressure in chamber (13)；
Signal output (5), one end are connect with the ceramic circuit board (2), and the other end stretches out the first chamber (12)
Free end setting.
2. a kind of miniature digital pressure sensor according to claim 1, which is characterized in that the shell (1) it is interior
Erecting bed (11) are provided on wall；The first chamber (12) and the second chamber (13) are respectively arranged at the erecting bed
(11) two sides；
The ceramic circuit board (2) is set on the erecting bed (11).
3. a kind of miniature digital pressure sensor according to claim 2, which is characterized in that set in the shell (1)
There is T-type through-hole, the T-type through-hole forms the erecting bed (11) in the shell (1).
4. a kind of miniature digital pressure sensor according to claim 1, which is characterized in that the second chamber (13)
Free end be equipped with opening.
5. a kind of miniature digital pressure sensor according to claim 1, which is characterized in that the first chamber (12)
It is interior to be filled with casting glue.
6. a kind of miniature digital pressure sensor according to claim 5, which is characterized in that the first chamber (12)
Inner wall on be arranged fluted, the casting glue can be filled in the groove.
7. a kind of miniature digital pressure sensor according to claim 1, which is characterized in that the signal output
It (5) is conducting wire (51) that the number of the conducting wire (51) is set as at least four.
8. a kind of miniature digital pressure sensor according to claim 1, which is characterized in that the shell (1) includes
Sequentially connected first connector (14) and the second connector (15)；The first chamber (12) is set to first connector
(14) in, the second chamber (13) is set in second connector (15)；On the outer wall of second connector (15)
Equipped with external screw thread.
9. a kind of miniature digital pressure sensor according to claim 8, which is characterized in that first connector
(14) section (141) being parallel to each other there are two being set on outer wall.
10. a kind of miniature digital pressure sensor according to claim 8, which is characterized in that second connector
(15) free end end is provided with chamfering.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920417444.3U CN209513138U (en) | 2019-03-29 | 2019-03-29 | A kind of miniature digital pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920417444.3U CN209513138U (en) | 2019-03-29 | 2019-03-29 | A kind of miniature digital pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209513138U true CN209513138U (en) | 2019-10-18 |
Family
ID=68187930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920417444.3U Withdrawn - After Issue CN209513138U (en) | 2019-03-29 | 2019-03-29 | A kind of miniature digital pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209513138U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109946014A (en) * | 2019-03-29 | 2019-06-28 | 江西新力传感科技有限公司 | A kind of miniature digital pressure sensor |
| WO2023104491A1 (en) * | 2021-12-08 | 2023-06-15 | Endress+Hauser SE+Co. KG | Process and automation field device |
-
2019
- 2019-03-29 CN CN201920417444.3U patent/CN209513138U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109946014A (en) * | 2019-03-29 | 2019-06-28 | 江西新力传感科技有限公司 | A kind of miniature digital pressure sensor |
| CN109946014B (en) * | 2019-03-29 | 2024-05-07 | 江西新力传感科技有限公司 | Miniaturized digital pressure sensor |
| WO2023104491A1 (en) * | 2021-12-08 | 2023-06-15 | Endress+Hauser SE+Co. KG | Process and automation field device |
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|---|---|---|---|
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| AV01 | Patent right actively abandoned |
Granted publication date: 20191018 Effective date of abandoning: 20240507 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20191018 Effective date of abandoning: 20240507 |
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| AV01 | Patent right actively abandoned |