CN208240643U - 一种设备前端模块 - Google Patents
一种设备前端模块 Download PDFInfo
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- CN208240643U CN208240643U CN201820817206.7U CN201820817206U CN208240643U CN 208240643 U CN208240643 U CN 208240643U CN 201820817206 U CN201820817206 U CN 201820817206U CN 208240643 U CN208240643 U CN 208240643U
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- 230000007723 transport mechanism Effects 0.000 claims abstract description 21
- 230000007246 mechanism Effects 0.000 claims description 237
- 235000012431 wafers Nutrition 0.000 claims description 119
- 238000012546 transfer Methods 0.000 claims description 50
- 238000004140 cleaning Methods 0.000 claims description 26
- 238000000034 method Methods 0.000 abstract description 29
- 238000004519 manufacturing process Methods 0.000 abstract description 12
- 239000004065 semiconductor Substances 0.000 abstract description 5
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 230000008569 process Effects 0.000 description 26
- 238000012545 processing Methods 0.000 description 18
- 238000010586 diagram Methods 0.000 description 8
- 238000005406 washing Methods 0.000 description 8
- 230000032258 transport Effects 0.000 description 5
- 230000001154 acute effect Effects 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
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CN201820817206.7U CN208240643U (zh) | 2018-05-29 | 2018-05-29 | 一种设备前端模块 |
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CN201820817206.7U CN208240643U (zh) | 2018-05-29 | 2018-05-29 | 一种设备前端模块 |
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CN208240643U true CN208240643U (zh) | 2018-12-14 |
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CN110581084A (zh) * | 2018-05-29 | 2019-12-17 | 深圳市永盛隆科技有限公司 | 一种设备前端模块及其运行方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110581084A (zh) * | 2018-05-29 | 2019-12-17 | 深圳市永盛隆科技有限公司 | 一种设备前端模块及其运行方法 |
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GR01 | Patent grant | ||
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CP03 | Change of name, title or address |
Address after: 102299 room A129-1, No. 10, Zhongxing Road, Changping District science and Technology Park, Beijing Patentee after: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. Address before: 102209 Beijing city Changping District town Beiqijia Hongfu Pioneer Park No. 15 hospital Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY (BEIJING) Co.,Ltd. |
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CP03 | Change of name, title or address | ||
TR01 | Transfer of patent right |
Effective date of registration: 20191127 Address after: 518112 Room 403, unit 2, building C, Dongfang Shengshi, Jinpai community, Buji street, Longgang District, Shenzhen City, Guangdong Province Patentee after: Shenzhen yongshenglong Technology Co.,Ltd. Address before: 102299 room A129-1, No. 10, Zhongxing Road, Changping District science and Technology Park, Beijing Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210302 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Patentee after: Zishi Energy Co.,Ltd. Address before: Room 403, unit 2, building C, Dongfang Shengshi, Jinpai community, Buji street, Longgang District, Shenzhen, Guangdong 518112 Patentee before: Shenzhen yongshenglong Technology Co.,Ltd. |
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