CN208150972U - A kind of chemical gas phase reaction precipitation equipment suitable for preparing graphene in batches - Google Patents
A kind of chemical gas phase reaction precipitation equipment suitable for preparing graphene in batches Download PDFInfo
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- CN208150972U CN208150972U CN201820042318.XU CN201820042318U CN208150972U CN 208150972 U CN208150972 U CN 208150972U CN 201820042318 U CN201820042318 U CN 201820042318U CN 208150972 U CN208150972 U CN 208150972U
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Abstract
The chemical gas phase reaction precipitation equipment that the utility model relates to a kind of suitable for preparing graphene in batches,Including furnace body,Feeding machanism is equipped in furnace body,Switching mechanism,Pushing mechanism and heating mechanism,Feeding machanism includes lifting assembly,Plate,Supply assembly and collection assembly,Supply assembly includes two support units and several feed units,Collection assembly includes two struts and several inclined plates,Switching mechanism includes first motor,Turntable and storage box,The chemical gas phase reaction precipitation equipment for being suitable for preparing graphene in batches provides multiple substrates by feeding machanism in furnace body,Change the height and position of substrate by lifting assembly,Substrate is inserted into the storage box in switching mechanism by pushing mechanism,Change the position of substrate by switching mechanism,Substrate is heated by heating mechanism,Substrate surface is deposited on convenient for gas reaction,Prepare graphene,Then substrate is collected by collection assembly,So circulation,Realize the graphene preparation of batch.
Description
Technical field
The utility model relates to new material production equipment field, in particular to a kind of change suitable for preparing graphene in batches
Learn gas phase reaction precipitation equipment.
Background technique
Graphene is a kind of honeycomb flat film formed in a specific way by carbon atom, is only one a kind of atomic layer
The quasi- two-dimensional material of thickness does monoatomic layer graphite so being called.The common power production method of graphene is mechanical glass at present
Glass method, oxidation-reduction method, silicon carbide epitaxial growth method etc., film production method are chemical vapour deposition technique (CVD), wherein CVD
Method can prepare the graphene of high quality large area, meet the requirement of prepare with scale high-quality graphene.
CVD method is when preparing graphene, usually using nickel as substrate, carbonaceous gas is passed through in cvd furnace, such as：Nytron
Object, carbon resolve into the surface that carbon atom is deposited on nickel at high temperature, and forming graphene by slight chemical etching makes graphite
Alkene film and the isolated graphene film of nickel sheet.It can be obtained by the preparation method of graphene, graphene is mainly deposited on substrate
Surface, and since batch substrate can not be heated lead to that one can only be accommodated in device in existing vapor deposition reaction furnace
Piece substrate reduces the yield of graphene to reduce the depositional area of graphene, while during the preparation process, working as substrate
On graphene deposition completely after, it is also necessary to close power supply, after waiting cooling, take out graphene and carry out strip operation, lead to stone
The preparation work of black alkene is very complicated.
Utility model content
The technical problems to be solved in the utility model is：For overcome the deficiencies in the prior art, it provides a kind of suitable for criticizing
Amount prepares the chemical gas phase reaction precipitation equipment of graphene.
Technical solution adopted by the utility model to solve its technical problems is：It is a kind of suitable for preparing graphene in batches
Furnace body is arranged in chemical gas phase reaction precipitation equipment, including furnace body, bell, air inlet pipe, escape pipe and controller, the bell
The side of furnace body is arranged in top, the air inlet pipe, and the escape pipe and controller are arranged at the other side of furnace body, the control
Device processed is located at the top of escape pipe, and the controller is equipped with display screen and several control buttons, is equipped with feed in the furnace body
Mechanism, switching mechanism, pushing mechanism and heating mechanism, the heating mechanism and pushing mechanism are arranged at the close air inlet of furnace body
On the inner wall of the side of pipe, the heating mechanism is located at the top of pushing mechanism, and the feeding machanism is arranged at the intracorporal bottom of furnace
The top of feeding machanism is arranged in portion, the switching mechanism；
The feeding machanism includes lifting assembly, plate, supply assembly and collection assembly, and the lifting assembly setting is flat
The side of the close air inlet pipe of the top of plate is arranged in the lower section of plate, the supply assembly, and the collection assembly setting is flat
The top other side of plate, the supply assembly include two support units and several feed units, the feed unit from upper and
Under be evenly distributed between two support units, the support unit include two vertical bars, the bottom end of the vertical bar is fixed on flat
On plate, the feed unit includes substrate and two pressure pins, and the pressure pin and support unit correspond, the both ends of the pressure pin
It is fixedly connected respectively with two vertical bars, the substrate is erected on two pressure pins；
The collection assembly includes two struts and several inclined plates, and the bottom end of the strut is fixed on plate, described oblique
Plate is evenly distributed on from top to down between two struts, and the both ends of the inclined plate are fixedly connected with two struts respectively, described oblique
One end of the separate switching mechanism of plate is equipped with limit plate；
The switching mechanism is arranged between supply assembly and collection assembly, and the switching mechanism includes first motor, turns
Disk and storage box, the first motor are fixed on the inner wall of furnace body, and the first motor and turntable are sequentially connected, the storage
Box is fixed on turntable, and the first motor is stepper motor, and the step angle of the first motor is 90 °.
Preferably, the lifting assembly includes driving unit, fixed block, movable block, stretches in order to drive plate to go up and down
Frame, hinged block, slip ring and sliding rail, the fixed block are fixed on the intracorporal bottom of furnace, and the driving unit and movable block transmission connect
It connects, the shape of the sliding rail is U-shaped, and the both ends of the sliding rail and hinged block are each attached to the lower section of plate, and the slip ring is arranged
On the slide rail, the two sides of the bottom end of the expansion bracket are hinged with fixed block and movable block respectively, and the two of the top of the expansion bracket
Side is hinged with hinged block and slip ring respectively.
Preferably, the driving unit includes the second motor and the second drive shaft, described in order to drive movable block mobile
Second motor is located at the side of the separate fixed block of movable block, and second motor is fixed on the intracorporal bottom of furnace, and described second
Drive shaft is arranged between the second motor and fixed block, and second motor and the second drive shaft are sequentially connected, and described second drives
The periphery of moving axis is equipped with external screw thread, and the movable block is set in the second drive shaft, and internal screw thread is equipped in the movable block, described
Internal screw thread in movable block matches with the external screw thread in the second drive shaft.
Preferably, the lower section of the plate is equipped with distance for the ease of detection plate at a distance from the intracorporal bottom of furnace
Sensor.
Preferably, the feeding machanism further includes locating rod in order to go up and down flatbed horizontal, the bottom end of the locating rod
It is fixed on the intracorporal bottom of furnace, the plate is arranged on the securing lever.
Preferably, in order to by supply assembly substrate push-in storage box in, the pushing mechanism include third motor,
First connecting rod, second connecting rod, third connecting rod and pushing block, the third motor are fixed on the inner wall of furnace body, the third motor
It is sequentially connected with one end of first connecting rod, the other end of the first connecting rod is cut with scissors by one end of second connecting rod and third connecting rod
It connects, the other end of the third connecting rod is fixedly connected with pushing block.
Preferably, the pushing mechanism includes fixed ring, the fixed ring in order to fix the moving direction of third connecting rod
It is fixed on the inner wall of furnace body, the Fixing shrink ring is located on third connecting rod.
Preferably, in order to realize the heating to substrate, the heating mechanism include the 4th motor, driving wheel, fixing axle,
Frame and infrared lamp, the 4th motor are fixed on the inner wall of furnace body, and the 4th motor and driving wheel are sequentially connected, institute
It states fixing axle to fix on the drive wheel, the fixing axle is arranged in frame, and the infrared lamp is fixed on the close of frame and cuts
It changes planes the side of structure.
Preferably, in order to go up and down infrared lamp smoothly, the heating mechanism further includes stop collar and bracket, described
The shape of bracket is U-shaped, and the both ends of the bracket are fixed on the inner wall of furnace body, and the stop collar is set on bracket, described
Stop collar is fixed on the side of the separate infrared lamp of frame.
Preferably, frame is detached from fixing axle in order to prevent, one end of the separate driving wheel of the fixing axle is equipped with protrusive board.
The utility model has the beneficial effects that the chemical gas phase reaction precipitation equipment that should be suitable for preparing graphene in batches is logical
It crosses feeding machanism and multiple substrates is provided in furnace body, change the height and position of substrate by lifting assembly, by pushing mechanism by base
Piece is inserted into the storage box in switching mechanism, changes the position of substrate by switching mechanism, is heated by heating mechanism to substrate, just
It is deposited on substrate surface in gas reaction, prepares graphene, then substrate is collected by collection assembly, is so recycled,
The graphene preparation for realizing batch, compared with existing feeding machanism, which is improving multiple substrate reactive depositions
While, it is also convenient for being collected the substrate that deposition is completed, to improve the practicability of equipment.
Detailed description of the invention
The present invention will be further described with reference to the accompanying drawings and examples.
Fig. 1 is the structural representation for being suitable for batch and preparing the chemical gas phase reaction precipitation equipment of graphene of the utility model
Figure；
Fig. 2 is the feeding machanism for being suitable for batch and preparing the chemical gas phase reaction precipitation equipment of graphene of the utility model
Structural schematic diagram；
Fig. 3 is the pushing mechanism for being suitable for batch and preparing the chemical gas phase reaction precipitation equipment of graphene of the utility model
Structural schematic diagram；
Fig. 4 is the heating mechanism for being suitable for batch and preparing the chemical gas phase reaction precipitation equipment of graphene of the utility model
Structural schematic diagram；
In figure：1. furnace body, 2. bells, 3. air inlet pipe, 4. escape pipes, 5. controllers, 6. display screens, 7. control buttons, 8.
Plate, 9. vertical bars, 10. substrates, 11. pressure pins, 12. struts, 13. inclined plates, 14. limit plates, 15. first motors, 16. turntables, 17.
Storage box, 18. fixed blocks, 19. movable blocks, 20. expansion brackets, 21. hinged blocks, 22. slip rings, 23. sliding rails, 24. second motors,
25. the second drive shaft, 26. range sensors, 27. locating rods, 28. third motors, 29. first connecting rods, 30. second connecting rods, 31.
Third connecting rod, 32. pushing blocks, 33. fixed rings, 34. the 4th motors, 35. driving wheels, 36. fixing axles, 37. frames, 38. infrared lamps
Pipe, 39. stop collars, 40. brackets, 41. protrusive boards.
Specific embodiment
The utility model is described in further detail presently in connection with attached drawing.These attached drawings are simplified schematic diagram,
Only illustrate the basic structure of the utility model in a schematic way, therefore it only shows composition related with the utility model.
As shown in Figure 1, a kind of chemical gas phase reaction precipitation equipment suitable for preparing graphene in batches, including furnace body 1, furnace
The top of furnace body 1 is arranged in lid 2, air inlet pipe 3, escape pipe 4 and controller 5, the bell 2, and the air inlet pipe 3 is arranged in furnace body
1 side, the escape pipe 4 and controller 5 are arranged at the other side of furnace body 1, and the controller 5 is located at the upper of escape pipe 4
Side, the controller 5 are equipped with display screen 6 and several control buttons 7, be equipped in the furnace body 1 feeding machanism, switching mechanism,
Pushing mechanism and heating mechanism, the heating mechanism and pushing mechanism are arranged at the interior of the side of the close air inlet pipe 3 of furnace body 1
On wall, the heating mechanism is located at the top of pushing mechanism, and the bottom in furnace body 1, the switching is arranged in the feeding machanism
The top of feeding machanism is arranged in mechanism；
Reaction gas is passed through in furnace body 1 by the reactive deposition device when preparing graphene, passes through the control on controller 5
Key 7 processed operates equipment and runs, and inside furnace body 1, provides reaction material by feeding machanism and the graphene for generating reaction carries out
It collects, pushes the reaction material in feeding machanism to switching mechanism by pushing mechanism, switching mechanism adjusts the position of reaction material,
Facilitate heating mechanism to heat reaction material, makes gas and reflection material that gas phase reaction deposition occur, then switching mechanism
Position is adjusted, is collected the graphene of reaction preparation by feeding machanism, the remaining gas of simultaneous reactions is from 4 row of escape pipe
Out.
As shown in Fig. 2, the feeding machanism includes lifting assembly, plate 8, supply assembly and collection assembly, the lifting
The lower section of plate 8 is arranged in component, and the side of the close air inlet pipe 3 of the top of plate 8, the receipts are arranged in the supply assembly
The top other side of plate 8 is arranged in collection component, and the supply assembly includes two support units and several feed units, described
Feed unit is evenly distributed on from top to down between two support units, and the support unit includes two vertical bars 9, the vertical bar
9 bottom end is fixed on plate 8, and the feed unit includes substrate 10 and two pressure pins 11, the pressure pin 11 and support unit
It corresponds, the both ends of the pressure pin 11 are fixedly connected with two vertical bars 9 respectively, and the substrate 10 is erected at two pressure pins 11
On；
The collection assembly includes two struts 12 and several inclined plates 13, and the bottom end of the strut 12 is fixed on plate 8,
The inclined plate 13 is evenly distributed on from top to down between two struts 12, and the both ends of the inclined plate 13 are solid with two struts 12 respectively
One end of fixed connection, the separate switching mechanism of the inclined plate 13 is equipped with limit plate 13；
In feeding machanism, substrate 10 is placed on two pressure pins 11 so that reaction when supply assembly be capable of providing it is more
The substrate 10 of a deposition changes the height and position of plate 8 by lifting assembly, makes one of substrate 10 of 8 top of plate
Sustained height is kept with pushing mechanism, the substrate 10 is pushed into switching mechanism by pushing mechanism, base is driven by switching mechanism
Piece 10 rotates, and rotates counterclockwise substrate 10, when substrate 10 turns to vertical position by horizontal position, heating mechanism is to base
Piece 10 is heated, and gas is made to carry out deposition reaction, and the reaction time is arranged by the control button 7 on controller 5, anti-when reaching
After between seasonable, switching mechanism continues the substrate 10 for driving deposition to complete and rotates, and tilts down substrate 10, substrate 10 is fallen at this time
On inclined plate 13 in collection assembly, substrate 10 is stopped to continue to glide using limit plate 13, so that the position of fixed substrate 10, is realized
The function that feeding machanism provides reaction raw materials and is collected the graphene of generation.
The switching mechanism is arranged between supply assembly and collection assembly, the switching mechanism include first motor 15,
Turntable 16 and storage box 17, the first motor 15 are fixed on the inner wall of furnace body 1, and the first motor 15 is driven with turntable 16
Connection, the storage box 17 are fixed on turntable 16, and the first motor 15 is stepper motor, the step pitch of the first motor 15
Angle is 90 °.
In switching mechanism, turntable 16 is driven to rotate by first motor 15, so that outer planet of the storage box 17 along turntable 16
It is dynamic, when storage box 17 is horizontal and the opening of storage box 17 is directed at collection assembly, by pushing mechanism by supply assembly wherein
One substrate 10 is pushed into storage box 17, and then first motor 15 drives turntable 16 to be rotated by 90 ° counterclockwise, makes horizontal substrate 10
Angle change be it is vertical, heated convenient for heating mechanism, after reacting a period of time, first motor 15 is continued to rotate, until
Substrate 10 in storage box 17 is influenced to slide downwards by gravity, until fall on the inclined plate 13 in collection assembly, and it is subsequent
Continuous rotation makes next base in the opening alignment supply assembly of storage box 17 until storage box 17 completes a circular motion
So that equipment be facilitated to be heated by a pair of substrate 10 deposition reaction occurs for piece 10, and then realizes that batch prepares graphene.
As shown in Fig. 2, the lifting assembly includes driving unit, fixed block 18, movable block 19, expansion bracket 20, hinged block
21, slip ring 22 and sliding rail 23, the fixed block 18 are fixed on the bottom in furnace body 1, and the driving unit and movable block 19 are driven
Connection, the shape of the sliding rail 23 are U-shaped, and the both ends of the sliding rail 23 and hinged block 21 are each attached to the lower section of plate 8, described
Slip ring 22 is set on sliding rail 23, and the two sides of the bottom end of the expansion bracket 20 are hinged with fixed block 18 and movable block 19 respectively, institute
The two sides for stating the top of expansion bracket 20 are hinged with hinged block 21 and slip ring 22 respectively.
In lifting assembly, drives movable block 19 mobile by driving unit, change between movable block 19 and fixed block 18
Distance elongates or shortens expansion bracket 20, slides slip ring 22 on sliding rail 23, to be driven by hinged block 21 and sliding rail 23
Plate 8 is gone up and down, and the height and position of inclined plate 13 and substrate 10 is changed, convenient for unreacted substrate 10 to be pushed into storage box 17
And the substrate 10 that deposition is completed is put on inclined plate 13.
Preferably, the driving unit includes the second motor 24 and the second drive shaft in order to drive movable block 19 mobile
25, second motor 24 is located at the side of the separate fixed block 18 of movable block 19, and second motor 24 is fixed in furnace body 1
Bottom, second drive shaft 25 is arranged between the second motor 24 and fixed block 18, second motor 24 and the second drive
Moving axis 25 is sequentially connected, and the periphery of second drive shaft 25 is equipped with external screw thread, and the movable block 19 is set in the second drive shaft
On 25, internal screw thread, the external screw thread on internal screw thread and the second drive shaft 25 in the movable block 19 are equipped in the movable block 19
Match.The operation of second motor 24 drives the rotation of the second drive shaft 25, makes the threaded function in the second drive shaft 25 in movable block
Internal screw thread in 19, driving movable block 19 are moved along the axial direction of the second drive shaft 25, change movable block 19 and fixed block
The distance between 18.
Preferably, for the ease of detection plate 8 with the bottom in furnace body 1 at a distance from, the lower section of the plate 8 equipped with away from
From sensor 26.
Preferably, the feeding machanism further includes locating rod 27, the locating rod 27 in order to make 8 horizontal lifting of plate
Bottom end be fixed on the bottom in furnace body 1, the plate 8 is set in locating rod 27.Pass through the liter of the fixed plate 8 of locating rod 27
Direction is dropped, goes up and down plate 8 according to fixed track.
As shown in figure 3, the pushing mechanism includes third motor 28, first connecting rod 29, second connecting rod 30, third connecting rod 31
With pushing block 32, the third motor 28 is fixed on the inner wall of furnace body 1, and one end of the third motor 28 and first connecting rod 29 passes
The other end of dynamic connection, the first connecting rod 29 is hinged by second connecting rod 30 and one end of third connecting rod 31, and the third connects
The other end of bar 31 is fixedly connected with pushing block 32.
Third motor 28 is run, and drives 29 circular motion of first connecting rod, to drive third connecting rod by second connecting rod 30
31 move back and forth, and while third connecting rod 31 is mobile to supply assembly, are pushed into the substrate 10 on pressure pin 11 by pushing block 32
In storage box 17.
Preferably, the pushing mechanism includes fixed ring 33, described solid in order to fix the moving direction of third connecting rod 31
Determine ring 33 to be fixed on the inner wall of furnace body 1, the fixed ring 33 is set on third connecting rod 31.Is secured using fixed ring 33
The moving direction of three-link 31 enables third connecting rod 31 to move back and forth along horizontal direction.
As shown in figure 4, the heating mechanism includes the 4th motor 34, driving wheel 35, fixing axle 36, frame 37 and infrared
Fluorescent tube 38, the 4th motor 34 are fixed on the inner wall of furnace body 1, and the 4th motor 34 is sequentially connected with driving wheel 35, institute
It states fixing axle 36 to be fixed on driving wheel 35, the fixing axle 36 is arranged in frame 37, and the infrared lamp 38 is fixed on frame
The side of the close switching mechanism of frame 37.
In heating mechanism, drives driving wheel 35 to move in a circle by the 4th motor 34, make fixing axle 36 along driving wheel 35
Axis rotation, change fixing axle 36 height and position, thus driver framework 37 go up and down, frame 37 drive infrared lamp 38 carry out
Lifting, infrared lamp 38 emit infrared ray, irradiate the different location of substrate 10, and substrate 10 absorbs infrared ray, and temperature increases, is convenient for
The gas for being passed through furnace body 1 reacts, and graphene is made to be deposited on gas surface.
Preferably, the heating mechanism further includes stop collar 39 and bracket in order to go up and down infrared lamp 38 smoothly
40, the shape of the bracket 40 is U-shaped, and the both ends of the bracket 40 are fixed on the inner wall of furnace body 1, and the stop collar 39 is arranged
On bracket 40, the stop collar 39 is fixed on the side of the separate infrared lamp 38 of frame 37.
The glide direction that stop collar 39 is secured using bracket 40 makes frame 37 drive infrared lamp 38 along fixed side
To being gone up and down, to ensure that the steady movement of infrared lamp 38.
Preferably, frame 37 is detached from fixing axle 36, one end of the separate driving wheel 35 of the fixing axle 36 in order to prevent
Equipped with protrusive board 41.The scope of activities of frame 37 is limited using protrusive board 41, so that frame 37 be prevented to be detached from fixing axle 36.
The chemical gas phase reaction precipitation equipment provides multiple substrates 10 by supply assembly, using pushing mechanism by substrate 10
It is inserted into the storage box 17 in switching mechanism, drives substrate 10 to rotate by switching mechanism, substrate 10 is heated by heating mechanism,
Gas phase reaction occurs convenient for gas, graphene is made to be deposited on 10 surface of substrate, after the completion of preparation, switching mechanism continues to drive base
Piece 10 rotates, and is collected the substrate 10 that deposition is completed by collection assembly, so recycles, carry out equipment by a pair of substrate 10
Reactive deposition, to realize the graphene preparation of batch.
Compared with prior art, the chemical gas phase reaction precipitation equipment that should be suitable for preparing graphene in batches passes through feeding machine
Structure provides multiple substrates 10 in furnace body 1, changes the height and position of substrate 10 by lifting assembly, by pushing mechanism by substrate 10
It is inserted into the storage box 17 in switching mechanism, changes the position of substrate 10 by switching mechanism, substrate 10 is added by heating mechanism
Heat is deposited on 10 surface of substrate convenient for gas reaction, prepares graphene, is then collected by collection assembly to substrate 10,
So circulation realizes the graphene preparation of batch, and compared with existing feeding machanism, which is providing multiple substrates
While 10 reactive deposition, it is also convenient for being collected the substrate 10 that deposition is completed, to improve the practicability of equipment.
It is enlightenment, through the above description, related work people with the above-mentioned desirable embodiment according to the utility model
Member can carry out various changes and amendments in the range of without departing from this item utility model technical idea completely.This item is real
It is not limited to the contents of the specification with novel technical scope, it is necessary to its technology is determined according to scope of the claims
Property range.
Claims (10)
1. a kind of chemical gas phase reaction precipitation equipment suitable for preparing graphene in batches, including furnace body (1), bell (2), air inlet
(3), escape pipe (4) and controller (5) are managed, bell (2) setting exists in the top of furnace body (1), air inlet pipe (3) setting
The side of furnace body (1), the escape pipe (4) and controller (5) are arranged at the other side of furnace body (1), controller (5) position
In the top of escape pipe (4), the controller (5) is equipped with display screen (6) and several control buttons (7), which is characterized in that institute
It states and is equipped with feeding machanism, switching mechanism, pushing mechanism and heating mechanism in furnace body (1), the heating mechanism and pushing mechanism are equal
It is arranged on the inner wall of the side of the close air inlet pipe (3) of furnace body (1), the heating mechanism is located at the top of pushing mechanism, institute
The bottom that feeding machanism is arranged in furnace body (1) is stated, the top of feeding machanism is arranged in the switching mechanism；
The feeding machanism includes lifting assembly, plate (8), supply assembly and collection assembly, and the lifting assembly setting is flat
The lower section of plate (8), the supply assembly are arranged in the side of the close air inlet pipe (3) of the top of plate (8), the collection assembly
It is arranged in the top other side of plate (8), the supply assembly includes two support units and several feed units, the feed
Unit is evenly distributed on from top to down between two support units, and the support unit includes two vertical bars (9), the vertical bar
(9) bottom end is fixed on plate (8), and the feed unit includes substrate (10) and two pressure pins (11), the pressure pin (11)
It is corresponded with support unit, the both ends of the pressure pin (11) are fixedly connected with two vertical bars (9) respectively, substrate (10) frame
It is located on two pressure pins (11)；
The collection assembly includes two struts (12) and several inclined plates (13), and the bottom end of the strut (12) is fixed on plate
(8) on, the inclined plate (13) is evenly distributed on from top to down between two struts (12), the both ends of the inclined plate (13) respectively with
Two struts (12) are fixedly connected, and one end of the separate switching mechanism of the inclined plate (13) is equipped with limit plate (14)；
The switching mechanism is arranged between supply assembly and collection assembly, and the switching mechanism includes first motor (15), turns
Disk (16) and storage box (17), the first motor (15) are fixed on the inner wall of furnace body (1), the first motor (15) with turn
Disk (16) transmission connection, the storage box (17) are fixed on turntable (16), and the first motor (15) is stepper motor, described
The step angle of first motor (15) is 90 °.
2. the chemical gas phase reaction precipitation equipment as described in claim 1 for being suitable for batch and preparing graphene, which is characterized in that
The lifting assembly includes driving unit, fixed block (18), movable block (19), expansion bracket (20), hinged block (21), slip ring (22)
With sliding rail (23), the fixed block (18) is fixed on the bottom in furnace body (1), and the driving unit and movable block (19) transmission connect
It connects, the shape of the sliding rail (23) is U-shaped, and the both ends of the sliding rail (23) and hinged block (21) are each attached under plate (8)
Side, the slip ring (22) is set on sliding rail (23), the two sides of the bottom end of the expansion bracket (20) respectively with fixed block (18) and
Hingedly, the two sides on the top of the expansion bracket (20) are hinged with hinged block (21) and slip ring (22) respectively for movable block (19).
3. the chemical gas phase reaction precipitation equipment as claimed in claim 2 for being suitable for batch and preparing graphene, which is characterized in that
The driving unit includes the second motor (24) and the second drive shaft (25), and second motor (24) is located at movable block (19)
Side far from fixed block (18), second motor (24) are fixed on the bottom in furnace body (1), second drive shaft (25)
It is arranged between the second motor (24) and fixed block (18), second motor (24) and the second drive shaft (25) are sequentially connected,
The periphery of second drive shaft (25) is equipped with external screw thread, and the movable block (19) is set on the second drive shaft (25), described
Internal screw thread, the internal screw thread in the movable block (19) and the external screw thread phase on the second drive shaft (25) are equipped in movable block (19)
Match.
4. the chemical gas phase reaction precipitation equipment as described in claim 1 for being suitable for batch and preparing graphene, which is characterized in that
The lower section of the plate (8) is equipped with range sensor (26).
5. the chemical gas phase reaction precipitation equipment as described in claim 1 for being suitable for batch and preparing graphene, which is characterized in that
The feeding machanism further includes locating rod (27), and the bottom end of the locating rod (27) is fixed on the bottom in furnace body (1), described flat
Plate (8) is set on locating rod (27).
6. the chemical gas phase reaction precipitation equipment as described in claim 1 for being suitable for batch and preparing graphene, which is characterized in that
The pushing mechanism includes third motor (28), first connecting rod (29), second connecting rod (30), third connecting rod (31) and pushing block
(32), the third motor (28) is fixed on the inner wall of furnace body (1), and the one of the third motor (28) and first connecting rod (29)
The other end of end transmission connection, the first connecting rod (29) is hinged by second connecting rod (30) and one end of third connecting rod (31),
The other end of the third connecting rod (31) is fixedly connected with pushing block (32).
7. the chemical gas phase reaction precipitation equipment as claimed in claim 6 for being suitable for batch and preparing graphene, which is characterized in that
The pushing mechanism includes fixed ring (33), and the fixed ring (33) is fixed on the inner wall of furnace body (1), the fixed ring (33)
It is set on third connecting rod (31).
8. the chemical gas phase reaction precipitation equipment as described in claim 1 for being suitable for batch and preparing graphene, which is characterized in that
The heating mechanism includes the 4th motor (34), driving wheel (35), fixing axle (36), frame (37) and infrared lamp (38), institute
It states the 4th motor (34) to be fixed on the inner wall of furnace body (1), the 4th motor (34) and driving wheel (35) are sequentially connected, described
Fixing axle (36) is fixed on driving wheel (35), and fixing axle (36) setting is in frame (37), the infrared lamp (38)
It is fixed on the side of the close switching mechanism of frame (37).
9. the chemical gas phase reaction precipitation equipment as claimed in claim 8 for being suitable for batch and preparing graphene, which is characterized in that
The heating mechanism further includes stop collar (39) and bracket (40), and the shape of the bracket (40) is U-shaped, the bracket (40)
Both ends are fixed on the inner wall of furnace body (1), and the stop collar (39) is set on bracket (40), and the stop collar (39) is fixed on
The side of the separate infrared lamp (38) of frame (37).
10. the chemical gas phase reaction precipitation equipment as claimed in claim 8 for being suitable for batch and preparing graphene, feature exist
In one end of the separate driving wheel (35) of the fixing axle (36) is equipped with protrusive board (41).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820042318.XU CN208150972U (en) | 2018-01-10 | 2018-01-10 | A kind of chemical gas phase reaction precipitation equipment suitable for preparing graphene in batches |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820042318.XU CN208150972U (en) | 2018-01-10 | 2018-01-10 | A kind of chemical gas phase reaction precipitation equipment suitable for preparing graphene in batches |
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| Publication Number | Publication Date |
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| CN208150972U true CN208150972U (en) | 2018-11-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820042318.XU Expired - Fee Related CN208150972U (en) | 2018-01-10 | 2018-01-10 | A kind of chemical gas phase reaction precipitation equipment suitable for preparing graphene in batches |
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| CN (1) | CN208150972U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113862639A (en) * | 2021-09-15 | 2021-12-31 | 杭州中欣晶圆半导体股份有限公司 | Continuous preparation system and preparation method of CVD low-temperature oxide film |
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2018
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113862639A (en) * | 2021-09-15 | 2021-12-31 | 杭州中欣晶圆半导体股份有限公司 | Continuous preparation system and preparation method of CVD low-temperature oxide film |
| CN113862639B (en) * | 2021-09-15 | 2024-03-01 | 杭州中欣晶圆半导体股份有限公司 | Continuous preparation system and preparation method for CVD low-temperature oxide film |
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