CN109692639B - Nano-material production facility based on LICVD method - Google Patents
Nano-material production facility based on LICVD method Download PDFInfo
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- CN109692639B CN109692639B CN201910054033.7A CN201910054033A CN109692639B CN 109692639 B CN109692639 B CN 109692639B CN 201910054033 A CN201910054033 A CN 201910054033A CN 109692639 B CN109692639 B CN 109692639B
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- 238000000034 method Methods 0.000 title claims abstract description 29
- 239000002086 nanomaterial Substances 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 238000006243 chemical reaction Methods 0.000 claims abstract description 105
- 230000007246 mechanism Effects 0.000 claims abstract description 51
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 30
- 238000002156 mixing Methods 0.000 claims abstract description 28
- 238000004140 cleaning Methods 0.000 claims abstract description 18
- 238000010438 heat treatment Methods 0.000 claims abstract description 16
- 238000002347 injection Methods 0.000 claims abstract description 14
- 239000007924 injection Substances 0.000 claims abstract description 14
- 238000003756 stirring Methods 0.000 claims description 28
- 230000005540 biological transmission Effects 0.000 claims description 14
- 238000005485 electric heating Methods 0.000 claims description 8
- 230000005611 electricity Effects 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 abstract description 48
- 239000011261 inert gas Substances 0.000 abstract description 19
- 239000002699 waste material Substances 0.000 abstract description 3
- 239000012495 reaction gas Substances 0.000 description 13
- 230000008093 supporting effect Effects 0.000 description 7
- 239000000243 solution Substances 0.000 description 4
- 108010085603 SFLLRNPND Proteins 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 241000883990 Flabellum Species 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011858 nanopowder Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 239000010795 gaseous waste Substances 0.000 description 1
- 238000001725 laser pyrolysis Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000006303 photolysis reaction Methods 0.000 description 1
- 208000017983 photosensitivity disease Diseases 0.000 description 1
- 231100000434 photosensitization Toxicity 0.000 description 1
- 230000015843 photosynthesis, light reaction Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
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- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
- B01J19/121—Coherent waves, e.g. laser beams
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
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Abstract
The invention relates to a nano-material production device based on an LICVD method, which comprises a reaction chamber, a controller, a gas supply mechanism, a cleaning mechanism, a catcher and an irradiation mechanism, wherein the cleaning mechanism comprises an inert gas chamber, a heating box, a water injection pipe, a water discharge pipe and an exhaust pipe, the gas supply mechanism comprises a mixing pipe, a mixing chamber and a plurality of gas supply components, the gas supply components comprise a gas supply chamber and a gas supply pipe, a first motor and a first gear are arranged in the mixing chamber, an adjusting component is arranged in the gas supply pipe and comprises a second gear, a rotating shaft, a rotating disc and a gas supply unit, the nano-material production device based on the LICVD method cleans the interior of the reaction chamber through the cleaning mechanism, so that the reaction chamber is filled with inert gas, the cleanness of a reaction environment is ensured, the nano-material production is facilitated, and moreover, a plurality of gases with specific proportions are provided for the reaction chamber through the gas supply mechanism, the full reaction of various reaction gases is facilitated, prevent the waste of gas, reduce manufacturing cost, improved the practicality of equipment.
Description
Technical Field
The invention relates to the field of new material equipment, in particular to nano material production equipment based on an LICVD method.
Background
The LICVD method is a synthesis nano powder technology which takes laser as a heating source and induces gas phase reaction and appears in the later stage of the 70 th century, and the method is mainly characterized in that the absorption of laser beams with specific wavelengths by reaction gas molecules is utilized to cause the laser photolysis, the laser pyrolysis, the laser photosensitization and the laser-induced chemical synthesis reaction of the reaction gas molecules, and under certain process conditions, superfine particle space growth nuclei and growth are obtained.
When the existing production equipment utilizes the LICVD method to prepare the nano material, the purification treatment of a reaction chamber is needed, namely, the vacuum pumping preparation is carried out, and high-purity inert protective gas is filled simultaneously, so that the reaction can be ensured to be carried out in a clean environment, in the actual operation process, however, incomplete vacuum pumping of the reaction chamber often occurs, and the reaction chamber contains other gases besides the inert gas, so that the reaction environment is not clean enough, the reaction is affected, and in addition, when preparing nano powder, there are many kinds of reaction gases, each gas molecule takes part in the reaction absorbs laser energy before the gas molecules collide with each other, thereby causing decomposition, the equipment is difficult to adjust the dosage proportion of various gases, the gases are too little, the reaction is easy to be insufficient, the gases are too much, the waste of generated materials is easy to cause, and the reduction of the practicability of the conventional LICVD reaction device is further reduced.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to overcome the defects of the prior art, a nano-material production device based on an LICVD method is provided.
The technical scheme adopted by the invention for solving the technical problems is as follows: a nanometer material production device based on an LICVD method comprises a reaction chamber, a controller, an air supply mechanism, a cleaning mechanism, a trap and an irradiation mechanism, wherein the controller is fixed on one side of the reaction chamber, the air supply mechanism is connected with the bottom of the reaction chamber, the irradiation mechanism is arranged above the reaction chamber, the trap is fixed above the reaction chamber, the cleaning mechanism is connected with the reaction chamber, a PLC is arranged in the controller, and the trap is electrically connected with the PLC;
the cleaning mechanism comprises an idle air chamber, a heating box, a water injection pipe, a drain pipe and an exhaust pipe, wherein the idle air chamber is communicated with one side of the heating box, the other side of the heating box is communicated with the upper part of the reaction chamber, an electric heating net is arranged in the heating box, the water injection pipe and the exhaust pipe are both fixed above the reaction chamber, the bottom end of the drain pipe is positioned at the bottom in the reaction chamber, a first valve and a second valve are respectively arranged in the water injection pipe and the exhaust pipe, a third valve is arranged in the drain pipe, and the electric heating net, the first valve, the second valve and the third valve are all electrically connected with the PLC;
air feed mechanism includes hybrid tube, mixing chamber and a plurality of air feed subassembly, the bottom intercommunication of hybrid tube and reacting chamber is passed through to one side of hybrid chamber, be equipped with the fourth valve in the hybrid tube, air feed subassembly circumference evenly distributed is at the opposite side of hybrid chamber, air feed subassembly includes air feed chamber and air supply pipe, air feed chamber passes through air supply pipe and hybrid chamber intercommunication, be equipped with first motor and first gear in the hybrid chamber, first motor is fixed in the hybrid chamber, first motor is connected with the PLC electricity, first motor is connected with first gear drive, be equipped with adjusting part in the air supply pipe, adjusting part includes second gear, pivot, carousel and air feed unit, the carousel passes through pivot and second gear fixed connection, second gear and first gear engagement, adjusting part is connected with the carousel.
Preferably, in order to irradiate laser to reaction gas and provide energy required by gas molecule collision, the irradiation mechanism comprises a fixed tube and an irradiation assembly arranged in the fixed tube, the fixed tube is fixed above the reaction chamber, the bottom end of the fixed tube is communicated with the reaction chamber, the irradiation assembly comprises a lifting unit, a top block, a support plate, a bottom block and a laser, the lifting unit is in transmission connection with the top block, the bottom block is fixed below the top block through the support plate, the laser is fixed on the support plate, the periphery of the bottom block and the periphery of the top block are both in sealing connection with the inner wall of the fixed tube, and the laser is electrically connected with the PLC.
Preferably, in order to realize the lifting of the ejector block, the lifting unit comprises a second motor, a first connecting rod and a second connecting rod, the second motor is fixed in the fixed pipe and electrically connected with the PLC, the second motor is in transmission connection with the first connecting rod, and the first connecting rod is hinged to the ejector block through the second connecting rod.
Preferably, in order to facilitate the bottom block to enter the fixing tube when moving upwards, the top of the bottom block is in the shape of a conical cylinder, and the outer diameter of the top of the bottom block is smaller than that of the lower part of the bottom block.
Preferably, in order to detect whether the reaction chamber is dry or not, a humidity sensor is arranged in the exhaust pipe, and the humidity sensor is electrically connected with the PLC.
As preferred, for the convenience of adjusting the power of air current, the air feed unit includes translation unit, frame, drive block, axis of rotation, two flabellums and two bearings, the translation unit is connected with the frame transmission, the shape of frame is the U-shaped, the both ends of frame respectively with two bearing fixed connection, the both ends of axis of rotation set up respectively in two bearings, and two flabellums are located the both sides of pivot respectively, the drive block cover is established in the axis of rotation, the shape of drive block is circular cone cylindricality, the drive block sets up with the axis of rotation is coaxial, the conical surface of drive block supports and leans on the side at the carousel.
As preferred, in order to drive the frame and remove, the translation unit includes third motor, buffer block, lead screw and translation piece, third motor and buffer block are all fixed on the inner wall of air supply pipe, the third motor is connected with the PLC electricity, the third motor is connected with the one end transmission of lead screw, the other end setting of lead screw is in the buffer block, the translation piece cover is established on the lead screw, the one end of translation piece is supported and is leaned on the air supply pipe inner wall, the other end and the frame fixed connection of translation piece.
Preferably, in order to determine the position of the translation block, a distance sensor is arranged on the translation block, and the distance sensor is electrically connected with the PLC.
As preferred, in order to realize the stable rotation of pivot, the air feed unit still includes spacing ring and two splint, the spacing ring is fixed in the air feed pipe, the spacing ring cover is established in the pivot, and two splint are located the both sides of spacing ring respectively, splint are fixed in the pivot.
Preferably, in order to uniformly mix various introduced reaction gases, a stirring shaft, a supporting pipe and two stirring plates are arranged on one side, away from the gas supply unit, of the second gear, the supporting pipe is fixed in the mixing pipe, one end of the stirring shaft is fixedly connected with the second gear, the other end of the stirring shaft is arranged in the supporting pipe, the two stirring plates are respectively located on two sides of the stirring shaft, and a plurality of through holes are formed in the stirring plates.
The invention has the advantages that the interior of the reaction chamber is cleaned by the cleaning mechanism, so that the reaction chamber is filled with inert gas, the cleanness of the reaction environment is ensured, the production of the nano material is convenient, compared with the existing cleaning mechanism, the cleaning mechanism is convenient to operate, the purity of the inert gas in the reaction chamber is ensured, and moreover, various gases with specific proportions are provided for the reaction chamber by the gas supply mechanism, so that the full reaction of various reaction gases is facilitated, the gas waste is prevented, the production cost is reduced, the practicability of the equipment is improved.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic structural diagram of a nanomaterial fabrication apparatus based on the LICVD method of the present invention;
FIG. 2 is a schematic view showing a connection structure of a cleaning mechanism and an irradiation mechanism of a nanomaterial fabrication apparatus based on a LICVD method of the present invention with a reaction chamber;
FIG. 3 is a schematic structural diagram of a gas supply mechanism of the apparatus for producing nanomaterial on the basis of the LICVD method of the present invention;
FIG. 4 is an enlarged view of portion A of FIG. 3;
in the figure: 1. the device comprises a reaction chamber, 2, a controller, 3, an idle air chamber, 4, a heating box, 5, a water injection pipe, 6, a water discharge pipe, 7, an exhaust pipe, 8, an electric heating net, 9, a trap, 10, a mixing chamber, 11, a mixing pipe, 12, an air supply chamber, 13, an air supply pipe, 14, a first motor, 15, a first gear, 16, a second gear, 17, a rotating shaft, 18, a rotating disc, 19, a fixed pipe, 20, a top block, 21, a support plate, 22, a bottom block, 23, a laser, 24, a second motor, 25, a first connecting rod, 26, a second connecting rod, 27, a humidity sensor, 28, a frame, 29, a driving block, 30, a rotating shaft, 31, fan blades, 32, a bearing, 33, a third motor, 34, a buffer block, 35, a screw rod, 36, a translation block, 37, a distance sensor, 38, a limiting ring, 39, a stirring shaft clamp plate, 40, 41, 42 and a stirring plate.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.
As shown in fig. 1, a nanomaterial production apparatus based on the LICVD method comprises a reaction chamber 1, a controller 2, a gas supply mechanism, a cleaning mechanism, a trap 9 and an irradiation mechanism, wherein the controller 2 is fixed at one side of the reaction chamber 1, the gas supply mechanism is connected with the bottom of the reaction chamber 1, the irradiation mechanism is arranged above the reaction chamber 1, the trap 9 is fixed above the reaction chamber 1, the cleaning mechanism is connected with the reaction chamber 1, a PLC is arranged in the controller 2, and the trap 9 is electrically connected with the PLC;
when the production equipment is used for preparing the nano material by the LICVD method, production personnel operate the equipment through the controller 2, the inside of the reaction chamber 1 is cleaned by the cleaning mechanism, so that the reaction chamber 1 is filled with inert gas, the cleanness of a reaction environment is ensured, then gas used for reaction is provided for the reaction chamber 1 by the gas supply mechanism, and meanwhile, the irradiation mechanism irradiates laser into the reaction chamber 1, so that reaction gas molecules absorb the energy of the laser, the collision is generated inside the gas molecules, the gas-phase chemical reaction is induced, the ultrafine powder is produced, and the catcher 9 is used for collecting, so that the nano material powder is prepared.
As shown in fig. 2, the cleaning mechanism includes an idle air chamber 3, a heating box 4, a water injection pipe 5, a water discharge pipe 6 and an air discharge pipe 7, the idle air chamber 3 is communicated with one side of the heating box 4, the other side of the heating box 4 is communicated with the upper side of the reaction chamber 1, an electric heating net 8 is arranged in the heating box 4, the water injection pipe 5 and the air discharge pipe 7 are both fixed above the reaction chamber 1, the bottom end of the water discharge pipe 6 is positioned at the bottom of the reaction chamber 1, a first valve and a second valve are respectively arranged in the water injection pipe 5 and the air discharge pipe 7, a third valve is arranged in the water discharge pipe 6, and the electric heating net 8, the first valve, the second valve and the third valve are all electrically connected with the PLC;
when the interior of the reaction chamber 1 is cleaned and redundant complex gas in the reaction chamber is removed, the PLC controls a first valve in a water injection pipe 5 to be opened, water is injected into the reaction chamber 1 through the water injection pipe 5, after the reaction chamber 1 is filled with water, the PLC controls the first valve to be closed, then controls a third valve in a water discharge pipe 6 and a second valve in an exhaust pipe 7 to be opened, then inert gas is introduced into a heating box 4 through an inert gas chamber 3, an electric heating network 8 is controlled by the PLC to be electrified, after the inert gas is heated, high-temperature inert gas enters the reaction chamber 1, water solution in the reaction chamber 1 is discharged from the exhaust pipe 6, when the water solution is almost exhausted, the PLC controls the third valve in the exhaust pipe 6 to be closed, the high-temperature inert gas is continuously introduced, the interior of the reaction chamber 1 is preheated, meanwhile, residual moisture in the reaction chamber 1 can be heated and evaporated, and is discharged through the exhaust pipe 7, when the moisture is exhausted, the PLC controls the second valve in the exhaust pipe 7 to be closed, so that the reaction chamber 1 is filled with inert gas, the purity of the reaction environment is ensured, and the preparation of high-quality nano materials is facilitated.
As shown in fig. 3, the air supply mechanism includes a mixing pipe 11, a mixing chamber 10 and a plurality of air supply components, one side of the mixing chamber 10 is communicated with the bottom of the reaction chamber 1 through the mixing pipe 11, a fourth valve is arranged in the mixing pipe 11, the air supply components are circumferentially and uniformly distributed on the other side of the mixing chamber 10, the air supply components include an air supply chamber 12 and an air supply pipe 13, the air supply chamber 12 is communicated with the mixing chamber 10 through the air supply pipe 13, a first motor 14 and a first gear 15 are arranged in the mixing chamber 10, the first motor 14 is fixed in the mixing chamber 10, the first motor 14 is electrically connected with the PLC, the first motor 14 is in transmission connection with the first gear 15, an adjusting component is arranged in the air supply pipe 13, the adjusting component includes a second gear 16, a rotating shaft 17, a rotating disc 18 and an air supply unit, the rotating disc 18 is fixedly connected with the second gear 16 through the rotating shaft 17, the second gear 16 meshes with the first gear 15 and the adjustment assembly is connected to the turntable 18.
After the reaction chamber 1 is filled with inert gas, the PLC controls a fourth valve in the mixing pipe 11 to be opened, so that the mixing chamber 10 is communicated with the reaction chamber 1 through the mixing pipe 11 conveniently, then the PLC controls a first motor 14 to be started to drive a first gear 15 to rotate, the first gear 15 acts on a second gear 16 meshed with the first gear, so that the second gear 16 keeps rotating, the second gear 16 drives a rotary table 18 to synchronously rotate through a rotating shaft 17, then the rotary table 18 acts on an air supply unit, so that the air supply unit generates air flow, the reaction gas in the air supply chamber 12 is input into the mixing chamber 10 through an air supply pipe 13, the mixed gas is conveyed into the reaction chamber 1 through the mixing pipe 11, the air supply unit operates to adjust the size of the air flow, the dosage proportion of various reaction gases is accurately controlled, the raw material cost is reduced, and the reaction gases are fully reacted.
As shown in fig. 2, the irradiation mechanism includes a fixed tube 19 and an irradiation assembly disposed in the fixed tube 19, the fixed tube 19 is fixed above the reaction chamber 1, the bottom end of the fixed tube 19 is communicated with the reaction chamber 1, the irradiation assembly includes a lifting unit, a top block 20, a support plate 21, a bottom block 22 and a laser 23, the lifting unit is in transmission connection with the top block 20, the bottom block 22 is fixed below the top block 20 through the support plate 21, the laser 23 is fixed on the support plate 21, the outer peripheries of the bottom block 22 and the top block 20 are both in sealing connection with the inner wall of the fixed tube 19, and the laser 23 is electrically connected with the PLC.
In the fixed pipe 19, can drive kicking block 20 through the lift unit and carry out the lift removal, kicking block 20 drives bottom block 22 through extension board 21 and removes, and then change laser instrument 23's position, when cleaning reaction chamber 1, in order to prevent aqueous solution and the contact of laser instrument 23, drive kicking block 20 rebound by the lift unit, make bottom block 22 seal the fixed block, and after the clean completion of reaction chamber 1, the lift unit drives kicking block 20 rebound, make laser instrument 23 on the extension board 21 get into reaction chamber 1, then PLC control laser instrument 23 operation, the laser emission, the energy of reaction gas chemical reaction is provided.
Preferably, in order to realize the lifting of the top block 20, the lifting unit comprises a second motor 24, a first connecting rod 25 and a second connecting rod 26, the second motor 24 is fixed in the fixed pipe 19, the second motor 24 is electrically connected with the PLC, the second motor 24 is in transmission connection with the first connecting rod 25, and the first connecting rod 25 is hinged with the top block 20 through the second connecting rod 26. The PLC controls the second motor 24 to start, drives the first connecting rod 25 to rotate, and the first connecting rod 25 acts on the ejector block 20 through the second connecting rod 26, so that the ejector block 20 can move up and down in the fixed pipe 19 along the vertical direction.
Preferably, in order to facilitate the bottom block 22 to enter the fixing tube 19 when moving upward, the top of the bottom block 22 is in the shape of a conical cylinder, and the outer diameter of the top of the bottom block 22 is smaller than the outer diameter below the bottom block 22. When the bottom block 22 enters the reaction chamber 1, the bottom block 22 needs to move upwards to the fixed tube 19, and the size of the top of the bottom block 22 is smaller than that of the fixed tube 19, so that the top of the bottom block 22 can conveniently enter the fixed tube 19, and then the bottom block 22 is driven to completely enter the fixed tube 19 along with the upward movement of the top block 20.
Preferably, a humidity sensor 27 is provided in the exhaust pipe 7 in order to detect whether the interior of the reaction chamber 1 is dry, and the humidity sensor 27 is electrically connected to the PLC. After introducing high-temperature inert gas into the reaction chamber 1, the moisture in the reaction chamber 1 is evaporated through the exhaust pipe 7, the humidity of the exhausted air is detected by using the humidity sensor 27, the humidity data is transmitted to the PLC, when the PLC detects that the humidity data is zero, the fact that no moisture exists in the reaction chamber 1 at the moment is indicated, and the LICVD reaction can be started.
As shown in fig. 4, the air supply unit includes a translation unit, a frame 28, a driving block 29, a rotation shaft 30, two fan blades 31 and two bearings 32, the translation unit is connected with the frame 28 in a transmission manner, the frame 28 is U-shaped, two ends of the frame 28 are respectively fixedly connected with the two bearings 32, two ends of the rotation shaft 30 are respectively arranged in the two bearings 32, the two fan blades 31 are respectively located at two sides of the rotation shaft 17, the driving block 29 is sleeved on the rotation shaft 30, the driving block 29 is conical, the driving block 29 and the rotation shaft 30 are coaxially arranged, and the conical surface of the driving block 29 is abutted against the side surface of the turntable 18.
In the air supply unit, a driving block 29 is contacted with the rotary table 18, the rotary table 18 keeps rotating, so that the driving block 29 is driven to rotate, the driving block 29 drives the rotating shaft 30 to rotate under the supporting action of two bearings 32, thereby keeping the fan blades 31 in a rotating state, generating air flow when the fan blades 31 rotate, transmitting the reaction gas in the gas supply chamber 12 to the mixing chamber 10 through the gas supply pipe 13, the PLC controlling the translation unit to operate, changing the horizontal position of the frame 28, thereby driving the driving block 29 to move, changing the contact position of the driving block 29 and the turntable 18, since the contact position of the driving block 29 with the turntable 18 maintains a stable linear velocity, and then the angular velocity of the driving block 29 is different everywhere, the angular velocity of the driving block 29 is changed, and the rotating speed of the rotating shaft 30 and the fan blades 31 is changed through the rotating shaft 17, the strength of the air flow is adjusted, and the proportional amount of the reaction gas of each air supply assembly is convenient to control.
Preferably, in order to drive the frame 28 to move, the translation unit includes a third motor 33, a buffer block 34, a screw rod 35 and a translation block 36, the third motor 33 and the buffer block 34 are both fixed on the inner wall of the air supply pipe 13, the third motor 33 is electrically connected with the PLC, the third motor 33 is connected with one end of the screw rod 35 in a transmission manner, the other end of the screw rod 35 is arranged in the buffer block 34, the translation block 36 is sleeved on the screw rod 35, one end of the translation block 36 abuts against the inner wall of the air supply pipe 13, and the other end of the translation block 36 is fixedly connected with the frame 28. The PLC controls the third motor 33 to start, drives the screw rod 35 to rotate under the supporting action of the buffer block 34, and the screw rod 35 acts on the translation block 36 through threads, so that the translation block 36 moves along the axis of the screw rod 35, and further drives the frame 28 to move.
Preferably, in order to determine the position of the translation block 36, a distance sensor 37 is disposed on the translation block 36, and the distance sensor 37 is electrically connected to the PLC. The distance between the translation block 36 and the inner wall of the air supply pipe 13 is detected by the distance sensor 37, the distance data is fed back to the PLC, and the PLC determines the position of the translation block 36 according to the distance data, so that the strength of the air flow in the air supply pipe 13 can be determined.
Preferably, in order to realize the stable rotation of the rotating shaft 17, the air supply unit further comprises a limiting ring 38 and two clamping plates 39, the limiting ring 38 is fixed in the air supply pipe 13, the limiting ring 38 is sleeved on the rotating shaft 17, the two clamping plates 39 are respectively located at two sides of the limiting ring 38, and the clamping plates 39 are fixed on the rotating shaft 17. The rotation central axis of the rotating shaft 17 is fixed by the limiting ring 38 at a fixed position, and the two clamping plates 39 are used for preventing the rotating shaft 17 and the limiting ring 38 from sliding relatively, so that the stable rotation of the rotating shaft 17 is realized.
As shown in fig. 3, a stirring shaft 40, a support pipe 41 and two stirring plates 42 are arranged on one side of the second gear 16 away from the gas supply unit, the support pipe 41 is fixed in the mixing pipe 11, one end of the stirring shaft 40 is fixedly connected with the second gear 16, the other end of the stirring shaft 40 is arranged in the support pipe 41, the two stirring plates 42 are respectively located on two sides of the stirring shaft 40, and a plurality of through holes are arranged on the stirring plates 42. When the first gear 15 drives the second gear 16 to rotate, the second gear 16 drives the stirring shaft 40 to rotate under the supporting effect of the supporting tube 41, so as to drive the two stirring plates 42 to rotate, the through holes on the stirring plates 42 are beneficial to the gas convection on the two sides of the stirring plates 42, and the stirring plates 42 rotate, so that the reaction gases are uniformly mixed.
Before the nano material production equipment utilizes the LICVD method to carry out production work, water solution is injected into the reaction chamber 1 through the water injection pipe 5, inert gas is introduced afterwards, the water solution is extruded out, and the inert gas is heated, so that the temperature of the reaction chamber 1 is raised, residual water is evaporated conveniently, the reaction chamber 1 is filled with the inert gas, a back gas supply mechanism runs, the first gear 15 is driven to rotate through the first motor 14, the second gear 16 drives the rotating disc 18 to rotate through the rotating shaft 17, the contact position of the driving block 29 and the rotating disc 18 is adjusted through the gas supply unit, the strength of gas flow in the gas supply pipe 13 is changed, the dosage proportion of the introduced reaction gas in each gas supply chamber 12 is adjusted, the reaction gas fully reacts in the reaction chamber 1, the surplus of the reaction gas is avoided, and the practicability of the equipment is improved.
Compared with the prior art, this nano-material production facility based on LICVD method cleans reaction chamber 1 inside through clean mechanism, make to be full of inert gas in the reaction chamber 1, the cleanness of reaction environment has been guaranteed, the production of nano-material of being convenient for, compare with current clean mechanism, this clean mechanism convenient operation, and guarantee the purity of inert gas in the reaction chamber 1, moreover, provide the multiple gas of specific proportion to reaction chamber 1 through air feed mechanism, be convenient for various reaction gas fully react, prevent gaseous waste, reduce manufacturing cost, the practicality of equipment has been improved, compare with current air feed mechanism, this air feed mechanism structure is nimble, can control various reaction gas's quantity and proportion in a flexible way as required.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. The nano-material production equipment based on the LICVD method is characterized by comprising a reaction chamber (1), a controller (2), an air supply mechanism, a cleaning mechanism, a trap (9) and an irradiation mechanism, wherein the controller (2) is fixed on one side of the reaction chamber (1), the air supply mechanism is connected with the bottom of the reaction chamber (1), the irradiation mechanism is arranged above the reaction chamber (1), the trap (9) is fixed above the reaction chamber (1), the cleaning mechanism is connected with the reaction chamber (1), a PLC is arranged in the controller (2), and the trap (9) is electrically connected with the PLC;
the cleaning mechanism comprises an idle air chamber (3), a heating box (4), a water injection pipe (5), a water discharge pipe (6) and an exhaust pipe (7), wherein the idle air chamber (3) is communicated with one side of the heating box (4), the other side of the heating box (4) is communicated with the upper part of the reaction chamber (1), an electric heating net (8) is arranged in the heating box (4), the water injection pipe (5) and the exhaust pipe (7) are both fixed above the reaction chamber (1), the bottom end of the water discharge pipe (6) is positioned at the bottom in the reaction chamber (1), a first valve and a second valve are respectively arranged in the water injection pipe (5) and the exhaust pipe (7), a third valve is arranged in the water discharge pipe (6), and the electric heating net (8), the first valve, the second valve and the third valve are all electrically connected with a PLC;
air feed mechanism includes hybrid tube (11), mixing chamber (10) and a plurality of air feed subassembly, the bottom intercommunication of hybrid tube (11) and reacting chamber (1) is passed through to one side of hybrid chamber (10), be equipped with the fourth valve in hybrid tube (11), air feed subassembly circumference evenly distributed is at the opposite side of hybrid chamber (10), the air feed subassembly includes air feed chamber (12) and air supply pipe (13), air feed chamber (12) are through air supply pipe (13) and mixing chamber (10) intercommunication, be equipped with first motor (14) and first gear (15) in mixing chamber (10), first motor (14) are fixed in mixing chamber (10), first motor (14) are connected with the PLC electricity, first motor (14) are connected with first gear (15) transmission, be equipped with the adjusting part in air supply pipe (13), the adjusting part includes second gear (16), Pivot (17), carousel (18) and air feed unit, carousel (18) are through pivot (17) and second gear (16) fixed connection, second gear (16) and first gear (15) meshing, adjusting part is connected with carousel (18).
2. The apparatus for producing nanomaterials based on the LICVD method according to claim 1, wherein the irradiation mechanism comprises a fixed tube (19) and an irradiation assembly disposed in the fixed tube (19), the fixed tube (19) is fixed above the reaction chamber (1), the bottom end of the fixed tube (19) is communicated with the reaction chamber (1), the irradiation assembly comprises a lifting unit, a top block (20), a support plate (21), a bottom block (22) and a laser (23), the lifting unit is in transmission connection with the top block (20), the bottom block (22) is fixed below the top block (20) through the support plate (21), the laser (23) is fixed on the support plate (21), the periphery of the bottom block (22) and the periphery of the top block (20) are both in sealing connection with the inner wall of the fixed tube (19), and the laser (23) is electrically connected with the PLC.
3. The apparatus for producing nanomaterials based on the LICVD method according to claim 2, wherein the lifting unit comprises a second motor (24), a first connecting rod (25) and a second connecting rod (26), the second motor (24) is fixed in the fixed tube (19), the second motor (24) is electrically connected with the PLC, the second motor (24) is in transmission connection with the first connecting rod (25), and the first connecting rod (25) is hinged with the top block (20) through the second connecting rod (26).
4. The apparatus for producing nanomaterials by the LICVD-based method according to claim 2, wherein the top of the bottom block (22) is shaped as a conical cylinder, and the top outer diameter of the bottom block (22) is smaller than the outer diameter of the bottom block (22) below.
5. The apparatus for producing nanomaterials by LICVD-based method according to claim 1, wherein a humidity sensor (27) is provided in the exhaust pipe (7), and the humidity sensor (27) is electrically connected to the PLC.
6. The apparatus for producing nanomaterials based on LICVD method according to claim 1, the air supply unit comprises a translation unit, a frame (28), a driving block (29), a rotating shaft (30), two fan blades (31) and two bearings (32), the translation unit is in transmission connection with a frame (28), the frame (28) is U-shaped, two ends of the frame (28) are respectively fixedly connected with two bearings (32), two ends of the rotating shaft (30) are respectively arranged in the two bearings (32), two fan blades (31) are respectively positioned at two sides of the rotating shaft (17), the driving block (29) is sleeved on the rotating shaft (30), the driving block (29) is in a conical cylinder shape, the driving block (29) and the rotating shaft (30) are coaxially arranged, and the conical surface of the driving block (29) abuts against the side surface of the rotating disc (18).
7. The apparatus for producing nanomaterials based on the LICVD method of claim 6, wherein the translation unit comprises a third motor (33), a buffer block (34), a screw rod (35) and a translation block (36), wherein the third motor (33) and the buffer block (34) are both fixed on the inner wall of the gas supply pipe (13), the third motor (33) is electrically connected with the PLC, the third motor (33) is in transmission connection with one end of the screw rod (35), the other end of the screw rod (35) is arranged in the buffer block (34), the translation block (36) is sleeved on the screw rod (35), one end of the translation block (36) abuts against the inner wall of the gas supply pipe (13), and the other end of the translation block (36) is fixedly connected with the frame (28).
8. The apparatus for producing nanomaterials by LICVD-based method according to claim 7, wherein a distance sensor (37) is provided on the translation block (36), and the distance sensor (37) is electrically connected to the PLC.
9. The apparatus for producing nanomaterials by LICVD method according to claim 1, wherein the gas supply unit further comprises a limiting ring (38) and two clamp plates (39), the limiting ring (38) is fixed in the gas supply pipe (13), the limiting ring (38) is sleeved on the rotation shaft (17), the two clamp plates (39) are respectively located at both sides of the limiting ring (38), and the clamp plates (39) are fixed on the rotation shaft (17).
10. The nano-material production equipment based on the LICVD method according to claim 1, wherein a stirring shaft (40), a support pipe (41) and two stirring plates (42) are arranged on one side of the second gear (16) far away from the gas supply unit, the support pipe (41) is fixed in the mixing pipe (11), one end of the stirring shaft (40) is fixedly connected with the second gear (16), the other end of the stirring shaft (40) is arranged in the support pipe (41), the two stirring plates (42) are respectively arranged on two sides of the stirring shaft (40), and a plurality of through holes are arranged on the stirring plates (42).
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| KR20050069674A (en) * | 2003-12-31 | 2005-07-05 | 동부아남반도체 주식회사 | Gas treatment apparatus of wet scrubber and gas treatment method |
| CN101255544B (en) * | 2008-03-21 | 2012-06-27 | 中国科学院上海硅酸盐研究所 | Method for preparing nano metal or metal oxide/carbon nano-tube composite material |
| CN202606148U (en) * | 2012-05-31 | 2012-12-19 | 辛华 | Device for preparing nanometer materials with radio frequency method |
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| CN206296267U (en) * | 2016-12-14 | 2017-07-04 | 福建紫金铜业有限公司 | A kind of copper pipe automatic flushing device |
| CN206624638U (en) * | 2017-01-23 | 2017-11-10 | 咸阳师范学院 | A kind of synthetically prepared device of nano material |
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