CN207587749U - For material web to be printed in the equipment and manufacture of solar cells equipment on the substrate in being manufactured for solar cell - Google Patents

Abstract

It provides for material web to be printed in the equipment (100) and manufacture of solar cells equipment (700) on the substrate (10) in manufacturing for solar cell.The equipment (100) includes technique head assembly (110) and driving device (140).The technique head assembly includes：One or more precipitation equipments (120), one or more precipitation equipment are configurable for the material being transmitted to the substrate (10) from silk screen (154)；With one or more material handling devices (130), one or more material handling device is used to handle the material on the silk screen (154).The driving device is configurable for along the technique head assembly (110) mobile on substrate support (20) in a first direction (1), so that the material is transmitted and handled in deposition process.

Description

For material web to be printed in setting on the substrate in being manufactured for solar cell Standby and manufacture of solar cells equipment

Technical field

The embodiment of the utility model is related to for material web being printed in the base in manufacturing for solar cell Equipment and manufacture of solar cells equipment on plate.

Background technology

Solar cell is the photovoltaic device that sunlight is directly changed into electric power.In this field, it is known to use deposition Technology, specifically printing technology produces solar cell in crystalline silicon substrates, so as in the front surface of solar cell Realize selective emitter structures.Process cycle may include at least one printing operation and optional another material processing operation, In the printing operation, material is deposited on substrate by precipitation equipment.The productivity and/or output of equipment can It can be limited by the cycle time of the process cycle.

In view of the foregoing, being used for too for material web to be printed at least some of this field problem is overcome New equipment and manufacture of solar cells equipment on positive substrate that can be in battery manufacture are beneficial.The mesh of the utility model Mark is in particular, in that the cycle time of process cycle can be reduced to increase setting at least one of productivity and output by providing It is standby.

Utility model content

In view of the foregoing, it provides for material web to be printed in setting on the substrate in manufacturing for solar cell Standby and manufacture of solar cells equipment.The other aspect, benefit and feature of the utility model from claims, from the perspective of It is apparent in bright book and attached drawing.

One side according to the present utility model provides material web being printed in solar cell manufacture Substrate on equipment.The equipment includes technique head assembly and driving device.The technique head assembly includes：One or More precipitation equipments, one or more precipitation equipment are configurable for the material being transmitted to from silk screen described Substrate；With one or more material handling devices, one or more material handling device is for handling the silk screen On the material.The driving device is configurable for moving the technique head in a first direction along substrate support Parts, so that the material is transmitted and handled in deposition process.

In some embodiments, the silk screen is arranged between the substrate support and the technique head assembly, Wherein one or more precipitation equipment includes scraper plate, and wherein described scraper plate be configured as with the mesh contacts with It is printed.

In some embodiments, one or more material handling device includes at least the first material handling device With the second material handling device, wherein at least one of one or more precipitation equipment precipitation equipment be located in it is described Between first material handling device and second material handling device.

In some embodiments, the equipment further comprises one or more first actuators, it is one or More first actuators are configured as adjusting at least one of one or more material handling device material processing The distance between device and the silk screen, wherein one or more the first actuator includes the first actuating unit and the Two actuating units, first actuating unit are configured as adjusting between first material handling device and the silk screen The first distance, second actuating unit is configured as adjusting between second material handling device and the silk screen Second distance.

In some embodiments, wherein the technique head parts include the first technique head and the second technique head, At least one of wherein one or more a precipitation equipment precipitation equipment is attached to the first technique head, and institute State at least one of one or more material handling devices material handling device be attached to the second technique head or Wherein described technique head parts include technique head, wherein at least one of one or more a precipitation equipment deposition At least one of device and one or more material handling device material handling device are attached to the technique head.

In some embodiments, the equipment is configured as：Along the substrate support in said first direction The technique head assembly is at least moved to the second position from first position, to use one or more deposition dress It at least one of puts precipitation equipment and the material is transmitted to the substrate and using one or more from the silk screen At least one of multiple material handling devices material handling device performs the processing to the material on the silk screen, wherein Transmission and processing perform during the technique head assembly is moved to the second position from the first position.

In some embodiments, the equipment is configured as during at least part of the duration of depositing operation It is performed simultaneously the transmission and processing of the material.

In some embodiments, one or more material handling device is configured on the silk screen The uniform films of the material are provided.

In some embodiments, the equipment is configured to：In second party opposite to the first direction Move up the technique head assembly, so as to performed in the moving process along the second direction transmission of the material and Processing.

In some embodiments, the equipment is configured as moving technique head group along the first direction Using the first material handling device in one or more material handling device during part, and wherein described equipment by with It is set to when moving the technique head assembly along the second direction using one or more material handling device In the second material handling device.

In some embodiments, when the technique head assembly moves in said first direction, first material Material processing device is positioned in one or more precipitation equipment rear, and wherein when the technique head assembly is in institute When stating second party and moving up, second material handling device is positioned in one or more precipitation equipment rear.

In some embodiments, it is described in technique head assembly moving process in said first direction The distance between silk screen and first material handling device are less than between the silk screen and second material handling device Distance, and wherein in technique head assembly moving process in this second direction, the silk screen and described the The distance between two material handling devices are less than the distance between the silk screen and first material handling device.

In some embodiments, the equipment is configured to：Adjust one or more material processing One or more processing parameters of at least one of device material handling device, wherein one or more processing ginseng Number is selected from the group being made of following item：In at least one material handling device and the silk screen and the substrate support It is the distance between at least one；With at least one material handling device relative in the silk screen and the substrate support At least one angle.

In some embodiments, the equipment is configured to：Adjust one or more precipitation equipment At least one of precipitation equipment one or more deposition parameters, wherein one or more deposition parameter be selected from by The group of following item composition：The distance between at least one precipitation equipment and the substrate support；It is described at least one heavy Accumulate angle of the device relative to the substrate support；The technique head assembly relative to the substrate support mobile speed Degree；The pressure on the silk screen is acted on at least one precipitation equipment.

In some embodiments, wherein at least one of one or more a processing parameter processing parameter is in institute It states in Material handling processes and is adjusted, and at least one of wherein one or more a deposition parameter deposition parameter It is adjusted in the transmit process.

Another aspect according to the present utility model provides a kind of manufacture of solar cells equipment.The solar cell life Production equipment includes one or more deposition stations and is used for according to embodiment described herein for material web to be printed in The equipment on substrate in solar cell manufacture.

Description of the drawings

Therefore, in order to which the features described above of the utility model is understood in detail, the utility model summarized above More specific description be referred to embodiment progress.Attached drawing is related to the various embodiments of the utility model, and describes It is as follows：

Fig. 1 is shown to be used to material web being printed in for solar cell manufacture according to embodiment described herein In substrate on equipment schematic diagram；

Fig. 2A and Fig. 2 B show the technique head for being used to carry out printing and material processing according to embodiment described herein The schematic diagram of parts, the technique head assembly move in a first direction and in a second direction respectively；

Fig. 3 is shown to be used to material web being printed in for solar-electricity according to further embodiments as described herein The schematic diagram of the equipment on substrate in the manufacture of pond；

Fig. 4 A and Fig. 4 B are shown to be used for according to further embodiments as described herein for material web to be printed in The schematic diagram of the technique head assembly of the equipment on substrate in solar cell manufacture；

Fig. 5 is shown to be used to material web being printed in for solar-electricity according to further embodiments as described herein The schematic diagram of the technique head assembly of the equipment on substrate in the manufacture of pond；

Fig. 6 is shown to be used to material web being printed in for solar-electricity according to further embodiments as described herein The schematic diagram of the equipment on substrate in the manufacture of pond；With

Fig. 7 shows the schematic diagram of the manufacture of solar cells equipment according to embodiment described herein.

Specific embodiment

The various embodiments of the utility model are reference will now be made in detail, one or more examples of the embodiment exist It is shown in attached drawing.In the description below to attached drawing, identical reference numeral refers to identical component.In general, it only describes At difference between each embodiment.Each example is provided in a manner of explaining utility model content, and is not intended to conduct The limitation of the utility model.In addition, the feature of part for illustrating or being described as an embodiment can be used for other embodiment party Formula is combined to generate another embodiment with other embodiment.It is expected that specification includes such modifications and variations.

Process cycle for forming conducting wire pattern on substrate may include depositing material using precipitation equipment At least one depositing operation on substrate and at least another technique using material handling device.At least one depositing operation and At least another technique can be sequentially performed, that is, by using with precipitation equipment and being attached to material handling device thereon Technique head perform two strokes and carry out.When depositing operation and the dual stroke of another technique increase the period of process cycle Between.The productivity and/or output of equipment are reduced.

The equipment according to the present utility model for being used to material web being printed on substrate uses moveable technique head Component, the moveable technique head assembly are configured with precipitation equipment and material deposition are performed on substrate, and is same When using material handling device perform material processing.It as an example, can be in the same one stroke of technique head assembly or shifting It is deposited during dynamic and material processing.The cycle time of process cycle can be reduced, and the production of equipment can be increased Rate and/or output.In particular, layer of material can be provided on silk screen.It (can be scraper plate that precipitation equipment, which can be used, (squeegee)) material is transmitted to substrate from silk screen.Material handling device can follow precipitation equipment, and above be carried in silk screen For another layer of material, for being deposited in such as subsequent substrate.

Fig. 1 is shown to be used to material web being printed in for solar cell manufacture according to embodiment described herein In substrate 10 on equipment 100 schematic diagram.Material can be adapted for forming conducting wire figure on the surface of substrate 10 12 The material of case (such as finger-shaped material and/or busbar (busbar)).As an example, material can be paste, such as silver paste.

Equipment 100 includes technique head assembly 110 and driving device.Technique head assembly 110 includes：It is one or more Precipitation equipment 120, one or more precipitation equipment 120 are configurable for material being transmitted to substrate from silk screen 154 10；With one or more material handling devices 130, one or more material handling device 130 is used to handle silk screen Material on 154.Driving device is configurable for along moving process head assembly on substrate support 20 in a first direction 1 110 or the part (the technique head of such as described technique head assembly) of technique head assembly 110 material is passed from silk screen 154 It is sent to substrate 10 and the material on silk screen 154 is handled in deposition process.In some implementations, it is one or more A precipitation equipment 120 can be one or more printing equipments, such as scraper plate.Material processing is alternatively referred to as " the cover ink stage (flood phase) ", can provide substantially uniform material layer on silk screen, and the substantially uniform material layer is passed It is sent to the subsequent substrate for for example following processed substrate.

Deposition (such as printing) and material processing are performed in a stroke or in the period.In other words, it may be performed simultaneously Deposition and material processing.Combination cover ink movement during depositing operation can reduce the process time, such as critical path time. As an example, critical path time can reduce about 1/3rd.

In the example of fig. 1, technique head assembly 110 includes technique head 140, such as a single technique head, In at least one of one or more precipitation equipments 120 precipitation equipment and one or more material handling devices 130 At least one material handling device be attached to technique head 140.However, the utility model is not limited to this, and technique head Parts may include two or more technique heads, and the two or more technique heads, which have, is attached to thereon corresponding Precipitation equipment and/or material handling device.Has the example of the technique head assembly there are two technique head in Fig. 4 A and Fig. 4 B It shows.

In some implementations, in the duration of depositing operation for using one or more precipitation equipments and performing At least part during be performed simultaneously deposition and material processing.It as an example, can be in the duration of depositing operation 50% or more, material processing is specifically performed during 70% or more and more specifically 90% or more.According to some realities Apply mode, deposition and material processing depositing operation the basic entire duration (duration of such as depositing operation 100%) it is performed simultaneously during.Depositing operation may correspond to the stroke performed by technique head or movement, such as first Between position A and second position B.The distance between first position A and second position B can be equal to or more than substrate 10 or conductor wire The ductility (extension) of road figure so that conducting wire pattern or one layer can be deposited in a stroke On substrate 10.

Equipment 100 may include screen apparatus 150, and the screen apparatus 150 is arranged on substrate support 20 and technique head Between component 110.Screen apparatus 150 may include frame 152 and silk screen 154, and silk screen 154 is attached to frame 152.According to can be with Some embodiments of other embodiment as described herein combination, one or more precipitation equipments 120 can be one or more Multiple printing equipments.One or more printing equipments can respectively include scraper plate.Scraper plate can be configured as contact silk screen 154 with Just it is printed.In some embodiments, the nib contacts silk screen 154 of the scraper plate and push material pass through silk screen 154 It is printed onto on substrate 10.Scraper plate can be diamond scraper plate or angled scraper plate.

Silk screen 154 may include net, mask to print, sheet material, metal sheet, plastic sheet, plank, sheet metal and plastic plate At least one of material.In some embodiments, silk screen 154 limits the pattern corresponding to the structure to be printed on substrate, Wherein pattern may include at least one of hole, slit, notch or other holes.Pattern may correspond to be printed in substrate 10 On conducting wire pattern, the finger-shaped material and/or busbar of such as solar cell.As an example, silk screen 154 can have Limit the opening of conducting wire pattern and the woven wire (wire mesh) being arranged in opening.By using one or more A material handling device 130 can be provided material on the substrate 10 to be deposited as substantially uniform layer in silk screen 154 On.Since there are woven wire, material does not flow through opening.In deposition process, precipitation equipment, such as scraper plate, it can be right Material applied force or pressure and push material pass through opening so that material is sent to substrate 10 (that is, being deposited on substrate 10 On).

According to some embodiments that can be combined with other embodiment as described herein, at one or more materials Reason device 130, which is configured on silk screen 154, provides substantially uniform material membrane.In some implementations, material Processing can be such that material is transmitted in optimal manner on substrate 10.Optionally or alternatively, one or more material processing dresses Put 130 excess stocks being configurable on recycling substrate 10 and/or silk screen 154.In some implementations, one or more Multiple material handling devices 130 can be flood bar (flood bar).Material processing is referred to alternatively as " cover ink (flooding) ".

According to some embodiments that can be combined with other embodiment as described herein, driving device is configured as using By technique head assembly 110, at least from first position, A is moved to second position B in a first direction 1, so as at least from One position A performs deposition/transmission and processing of the material on silk screen 154 (for example, dividing during being moved to second position B Cloth).It can be corresponded respectively to by technique head assembly 110 or its work from first position A to the movement of second position B or vice versa The stroke (such as the first stroke and the second stroke) that skill head performs.First direction 1 can be the water perpendicular to vertical direction 4 Square to 3.

First position A and second position B can be defined as technique head assembly 110 (for example, technique head 140) relative to The corresponding position of at least one of substrate 10, substrate support 20 and/or silk screen 154.The position of technique head assembly 110 can Then to limit one or more precipitation equipments 120 and one or more material handling devices 130 relative to substrate 10, base The corresponding position of at least one of plate support 20 and/or silk screen 154.

As an example, when technique head assembly 110 or technique head 140 are in first position A and along first When direction 1 (" moving direction ") is mobile, a material handling device in one or more material handling devices 130 can be A precipitation equipment in position (a) place and one or more precipitation equipments 120 can be at position (b).Equally, work as work When skill head assembly 110 or technique head 140 are in second position B and are moved along second direction 2 (" moving direction "), material Material processing device can be at position (c) and precipitation equipment can be at position (d).When technique head assembly 110 from first When position A reaches second position B, material handling device is moved to position (c) from position (a), and precipitation equipment is from position (b) It is moved to position (d).In some implementations, it is comparably operated if deposited in both direction, then precipitation equipment is not Position can be changed.As an example, in the case of asymmetrical precipitation equipment (such as angled scraper plate), a deposition Device increases, and another precipitation equipment declines.

According to some embodiments that can be combined with other embodiment as described herein, driving device is configured as using In the moving process head assembly 110 in the second direction opposite with first direction 1, so as in moving process in a second direction It is middle to perform deposition and material processing.The movement of technique head assembly 110 in a second direction may correspond to technique head assembly 110 from Second position B is to the movement of first position A.Second direction can be the horizontal direction 3 perpendicular to vertical direction 4.

In some implementations, movement of the technique head assembly 110 between first position A and second position B, such as First stroke and/or the second stroke may correspond to 400mm or smaller, specifically 300mm or smaller and more specifically 200mm or Smaller stroke distances.As an example, stroke distances can be between 150mm to 300mm, and can have It is body about 220mm.Stroke distances can be equal to or more than the ductility of substrate 10 or conducting wire pattern.First position A and Two position B can be relative to the central point between first position A and second position B (and specifically as when technique head group The position (b) of precipitation equipment is filled with being deposited when technique head assembly 110 is in the second position B when part 110 is in first position A Central point between the position (d) put) it is defined.As an example, when the row between first position A and second position B When journey distance is 220mm, when technique head assembly 110 be in first position A, the position (b) of precipitation equipment can for- 110mm, and when technique head assembly 110 is in second position B, the position (d) of precipitation equipment can be+110mm.One In a little embodiments, one or more reference positions are provided.One or more reference position may be, for example, in substrate The heart (dead-center position), the position (for example, -110mm) of precipitation equipment when stroke starts and the deposition when stroke is completed The final position (for example,+110mm) of device.Cream volume can move back and forth from -110mm positions to+110mm positions.Due to processing Device can be equipped with offset (for example, 30mm) with precipitation equipment, therefore technique head assembly 110 can perform additional running so that cream Volume returns to accurate location.

According to some embodiments, between one or more precipitation equipments and one or more material handling devices Distance or spacing can be equipped with.In particular, it can be equipped between adjacent or neighbouring precipitation equipment and material handling device Distance or spacing.As an example, in a first direction on 1, between precipitation equipment and adjacent material handling device away from From or spacing can be 50mm or smaller, specifically 40mm or smaller, and 30mm can be more specifically about.Distance or spacing Can be that material gathers (" cream volume ") offer space.

In some embodiments, equipment 100 is configured as at least carrying out dual printing.As an example, conductor wire Road pattern (finger-shaped material and/or busbar of such as solar cell) may include two or more material layers.First material layer It can print on the substrate 10, and second material layer can be printed on the top of first material layer at least partly, so as to shape Into conducting wire pattern.In some implementations, equipment 100 can print the first material in the first deposition process Layer, the first depositing operation are included from first position A to the movement of second position B or the first stroke.In some embodiments, if Standby 100 can print second material layer in the second deposition process, and the second depositing operation is included from second position B to first The movement of position A or the second stroke.However, the utility model is not limited to this, and can utilize in same direction (for example, First direction 1 or second direction) mobile technique head assembly 110 performs depositing operation.In some embodiments, substrate quilt It alternately prints, for example, a substrate, using first direction 1, another substrate is using second direction 2 etc. (for example, for each Processing or printing station).

In some implementations, first direction 1 and second direction 2 can be substantially horizontal direction.Term " level side To " be understood to be different from " vertical direction ".That is, " horizontal direction " is related to the essence of such as technique head assembly 110 The movement of upper level, wherein being still considered as with the several years deviation (for example, reaching 5 ° or even up to 10 °) in exact level direction It is " substantially horizontal direction ".Vertical direction 4 can be substantially parallel to gravity.

According to some embodiments that can be combined with other embodiment as described herein, equipment 100, and specifically It is technique head assembly 110, further includes actuator, the actuator is configurable for mobile one or more Precipitation equipment 120 and/or one or more material handling devices 130.As an example, actuator include one or More first actuators, one or more first actuator are configured as adjusting one or more material processing dresses Put at least one of 130 material handling devices and the distance between silk screen 154 and/or substrate support 20 and at least one material Material processing device is relative at least one of angle of silk screen 154 and/or substrate support 20.Additionally or alternatively, institute It states actuator and includes one or more second actuators, one or more second actuator is configured as adjusting At least one of one or more precipitation equipments 120 between precipitation equipment and silk screen 154 and/or substrate support 20 away from From at least one precipitation equipment relative at least one of angle of silk screen 154 and/or substrate support 20.

In some implementations, it is for example moved between first position A and second position B in technique head assembly 110 During, it can adjust or control at least one of one or more material handling devices 130 material handling device and silk The distance between net 154 and/or substrate support 20 (for example, in vertical direction).It as an example, can be by adjusting The upright position of at least one material handling device adjusts distance.Adjustment upright position may insure at least one material in real time Processing unit will not interfere silk screen 154, particularly in silk screen 154 because silk screen 154 is contacted with one or more precipitation equipments 120 And when deforming.It, can will be at least one of one or more material handling devices 130 material according to some embodiments Reason device is adjusted to follow silk screen profile (screen profile) with the distance between silk screen 154 and/or substrate support 20. Specifically, the upright position of at least one material handling device can be controlled or is adjusted to follow the silk screen profile.As one A example in the moving process of technique head assembly 110, can adjust or control at least one material handling device and silk screen The distance between 154 and/or substrate support 20, to make it that will be substantial constant.

Fig. 2A and Fig. 2 B are shown to be used to be deposited at (such as printing) and material according to embodiment described herein The schematic diagram of the technique head assembly 220 of reason, the technique head assembly 220 move up on 1 and in second direction 2 in a first direction It is dynamic.

According to some embodiments that can be combined with other embodiment as described herein, at one or more materials It manages device and includes at least the first material handling device 230 and the second material handling device 232.When 110 (example of technique head assembly Such as, technique head 140) in first position A when, the first material handling device 230 is in position (a), and precipitation equipment is in position It puts (b), and the second material handling device 232 is in position (a').When technique head assembly 110 is in second position B, the One material handling device 230 is in position (c), and precipitation equipment is in position (d), and the second material handling device 232 is in Position (c').

In some implementations, at least one of one or more precipitation equipments 120 precipitation equipment is located in Between one material handling device 230 and the second material handling device 232.Although Fig. 2A and Fig. 2 B are exemplarily illustrated the first material A precipitation equipment between 230 and second material handling device 232 of processing unit, but the utility model is without being limited thereto.Tool Body, more than one precipitation equipment can be equipped between the first material handling device 230 and the second material handling device 232, Such as two precipitation equipments.

In further embodiments, one or more precipitation equipments 120 include at least the first precipitation equipment and second and sink Product device.At least one of one or more material handling devices material handling device can be positioned at the first precipitation equipment Between the second precipitation equipment.As an example, two material handling devices can be positioned at the first precipitation equipment and second Between precipitation equipment.

According to some embodiments that can be combined with other embodiment as described herein, when technique head assembly 220 When moving on 1 in a first direction, the first material handling device 230 is positioned in one or more 120 rears of precipitation equipment.When When being moved in second direction 2, the second material handling device 232 can be positioned at one or more technique head assembly 220 120 rear of precipitation equipment.In other words, respective material processing unit is on moving direction (such as first direction or second direction) Follow one or more precipitation equipments 120.

As shown in Figure 2 A, during mobile on technique head assembly 110 in a first direction 1, technique head assembly 110 Material processing is carried out using the first material handling device 230 in one or more material handling devices.In addition, such as Fig. 2 B institutes Show, during technique head assembly 110 is mobile in second direction 2, technique head assembly 110 uses the second material processing Device 232 carries out material processing.It can be with for the material handling device of material processing in 110 moving process of technique head assembly It is oriented to sufficiently close to silk screen 154, to allow material processing, substantially uniform material is such as provided on silk screen 154 Layer.As an example, for carrying out the distance between the material handling device of material processing and silk screen 154 (for example, with hypomere The first distance d1 or second distance d2 described in falling) can be according to the material being deposited on silk screen 154 layer thickness, material At least one of the rheological characteristic of (for example, paste) and the composition of material are selected.

According to some embodiments, during mobile on technique head assembly 220 in a first direction 1, silk screen 154 with The first distance d1 between first material handling device 230 is less than second between 154 and second material handling device 232 of silk screen Distance d2.During technique head assembly 220 is mobile in second direction 2,154 and second material handling device of silk screen Second distance d2 between 232 can be less than the first distance d1 between 154 and first material handling device 230 of silk screen.First Distance d1 and second distance d2 can be limited in vertical direction.

In some implementations, the relatively large distance in the first distance d1 and second distance d2 (that is, in Fig. 2A second away from The first distance d1 in d2 and Fig. 2 B) it can be between 5mm and 25mm, specifically between 10mm and 20mm In the range of, and more specifically can be about 15mm.Small distance in first distance d1 and second distance d2 is (that is, Fig. 2A In the first distance d1 and Fig. 2 B in second distance d2) can specifically exist between 0.01mm and 2mm Between 0.05mm and 1.5mm, and more specifically can be between 0.1mm and 1mm.

In some implementations, it between first position A and second position B in moving process, can adjust or control the One distance d1 and/or second distance d2.Adjustment the first distance d1 and/or second distance d2 may insure at least one material in real time Processing unit will not interfere silk screen 154.According to some embodiments, the first distance d1 and/or second distance d2 can be adjusted to Follow silk screen profile.According to some embodiments, the distance of the material handling device just used is only adjusted.It can make not used The distance of material handling device is kept constant.As an example, the distance of the material handling device in positive use can be done Go out adjustment, so as to by the distance between the material handling device and silk screen 154 (such as the first distance d1 or second distance d2) Remain substantial constant.

According to some embodiments that can be combined with other embodiment as described herein, equipment 100, and specifically It is that technique head assembly 220 (for example, technique head 140) further includes actuator, the actuator is configured as using In one or more precipitation equipments 120 of movement and/or one or more material handling devices.As an example, it activates Device assembly includes one or more first actuators, one or more first actuator be configured as adjustment one or Between at least one of more material handling devices material handling device and silk screen 154 and/or substrate support 20 away from From (for example, first distance d1 and/or second distance d2) and at least one material handling device relative to silk screen 154 and/or base At least one of angle of plate support 20.As an example, one or more first actuators may include the first cause Dynamic device unit and the second actuating unit, the first actuating unit are configured as the first material handling device 230 of adjustment and silk screen The first distance d1 between 154 and/or substrate support 20, the second actuating unit are configured as adjustment the second material processing dress Put the second distance d2 between 232 and silk screen 154 and/or substrate support 20.

Actuator in actuator, such as one or more first actuators and/or one or more second Actuator, can be from the group selection being made of following item：Stepper motor (stepper motor), linear electric machine, pneumatic motor and Any combination of them.

Fig. 3 is shown to be used to material being deposited on for solar cell system according to further embodiments as described herein The schematic diagram of the equipment on substrate made.

According to some embodiments that can be combined with other embodiment as described herein, one or more deposition dresses It puts 120 and is configured in contact silk screen 154 in deposition process.For carrying out material processing in deposition process One or more material handling devices 130 can be configured as and do not contacted in the deposition process with silk screen 154. Specifically, one or more material handling devices 130 can be spaced apart what is for example illustrated about Fig. 2A and Fig. 2 B with silk screen 154 First distance and/or second distance.

In some implementations, the distance between one or more precipitation equipments 120 and substrate support 20 can be with Less than the distance between one or more material handling devices 130 and substrate support 20.In the example of fig. 3, one or The distance between more precipitation equipments 120 and substrate support 20 can correspond essentially to the group of silk screen 154 and substrate 10 Close thickness.Precipitation equipment can be to silk screen applied force.Silk screen deforms, and is less than silk screen resistance by what precipitation equipment applied Power is passed to substrate.

In figure 3 it is shown that the distance between one or more precipitation equipments 120 and substrate 10 and one or more materials Difference d between the distance between material processing device 130 and substrate 10.Difference d can be relative to substrate 10 or alternatively can be opposite In substrate support 20, (support surface of such as substrate support, the support surface are configured in depositing operation mistake Supporting substrate in journey) and/or horizontal plane restriction.Horizontal plane can be limited by support surface.In some implementations, difference D may correspond between the tip of one or more precipitation equipments 120 and the tip of one or more material handling devices 130 Height difference (for example, in vertical direction).Difference d can between 5mm and 25mm, specifically 10mm with Between 20mm, and it more specifically can be about 15mm.It can be filled by one or more material processing of linear movement 130 are put to change distance d, is such as indicated with arrow 5.

Fig. 4 A and Fig. 4 B are shown to be used to material being deposited on for the sun according to further embodiments as described herein The schematic diagram of the technique head assembly of the equipment on substrate in energy battery manufacture.

According to the other embodiment that can be combined with embodiment as described herein, specifically equipment and technique head Parts, including two or more technique heads.The two or more technique heads can control independently of one another and/or It is mobile.As an example, technique head assembly includes the first technique head and the second technique head.First driving means can be with It is configurable for for example in a first direction and/or second party moves up the first technique head, and the second driving device can To be provided to for example in a first direction and/or second party moves up the second technique head.One or more precipitation equipments At least one of precipitation equipment could attach to the first technique head, and in one or more material handling devices at least One material handling device is attached to the second technique head.

In the example of Fig. 4 A, technique head assembly 410 includes the first technique head 412 and the second technique head 414.One At least one of a or more a precipitation equipment precipitation equipment is attached to the first technique head 412.One or more materials At least one of processing unit material handling device is attached to the second technique head 414.In present exemplary, precipitation equipment or Material handling device is attached to corresponding technique head.In other words, each technique head has the deposition dress being attached to thereon It puts or material handling device.Although a precipitation equipment and a material handling device are shown, but it is to be understood that this practicality is new Type is without being limited thereto, and two or more precipitation equipments could attach to the first technique head 412.Equally, two or more Material handling device could attach to the second technique head 414.

About Fig. 4 B, technique head assembly 420 includes the first technique head 422 and the second technique head 424.One or more At at least one of at least one of multiple precipitation equipments precipitation equipment and one or more material handling devices material Reason device is attached to the first technique head 422.At least another precipitation equipment in one or more precipitation equipments and one or At least another material handling device in more material handling devices is attached to the second technique head 424.In present exemplary, Both precipitation equipment and material handling device are attached to corresponding technique head.

Although a precipitation equipment and a material handling device are shown at each technique head, but it is to be understood that The utility model is without being limited thereto, and two or more precipitation equipments and/or two or more material handling devices can be attached It is connected to the first technique head 422.Equally, two or more precipitation equipments and/or two or more material handling devices can It is attached to the second technique head 424.

Fig. 5 is shown to be used to material being deposited on for solar cell system according to further embodiments as described herein The schematic diagram of the technique head assembly 510 for the equipment on substrate made.Technique head assembly 510 may include or can be technique Head 540.

According to some embodiments that can be combined with other embodiment as described herein, specifically equipment and work Skill head assembly 510 includes actuator, and the actuator is configurable for mobile one or more deposition dresses Put 520 and/or one or more material handling devices (such as the first material handling device 530 and the second material handling device 532).One or more precipitation equipments 520 can be scraper plate, such as rectangle scraper plate.Scraper plate can have tip 522, such as square The tip of shape.It is one or more heavy according to some embodiments that can be combined with other embodiment as described herein Product device can be substantial symmetry.As an example, one or more precipitation equipments can have substantial symmetry Tip so that identical (for example, single) precipitation equipment can be used for being printed in the first direction and a second direction.

In some embodiments, actuator includes one or more first actuators 562, one or more Multiple first actuators 562 be configured to adjust one or more material handling devices and silk screen and/or substrate support it Between distance, and optionally adjust angle of one or more processing units relative to silk screen and/or substrate support.As One example, one or more first actuators 562 may include the first actuating unit, first actuating unit by with It is set to adjustment the distance between the first material handling device 530 and silk screen (such as first distance) and the first material handling device 530 relative at least one of angle of silk screen and/or substrate support (such as first angle).One or more first Actuator 562 may include the second actuating unit, and second actuating unit is configured as the second material handling device of adjustment The distance between 532 and silk screen (such as second distance) and the second material handling device 532 are supported relative to silk screen and/or substrate At least one of angle (such as third angle) of part.In some implementations, one or more first actuators 562 It can only linear movement processing unit.Another actuator can be provided, another actuator is configured as changing entire technique head The angle of parts.

In some implementations, one or more first actuators 562 are configured as adjusting one or more materials The distance between material processing device and silk screen.As an example, one or more first actuators 562 are so that one or more Multiple material handling devices (such as the first material handling device 530 and the second material handling device 532) can base relative to each other It is moved parallel on this.One or more first actuators 562 can be linear actuators, such as linear electric machine.

Additionally or alternatively, actuator includes one or more second actuators 564, one or more A second actuator 564 is configured as adjusting between one or more precipitation equipments 520 and silk screen and/or substrate support Distance, and optionally adjust one or more precipitation equipments 520 relative to the angle of silk screen and/or substrate support (such as Second angle).As an example, one or more second actuators 564, which can be configured as, one or more to sink Product device 520 is moved towards silk screen, to contact silk screen.One or more second actuators 564 can be configured to adjust The pressure that whole one or more precipitation equipments 520 apply silk screen.One or more second actuators 564 can be configured For mobile one on the direction of moving direction provided by one or more first actuators 562 is arranged essentially parallel to or more Multiple precipitation equipments 520.It can be by planting one or more first actuators 562 and one or more second actuators 564 come the distance between the tip of control process device and silk screen (for example, " d1 " in Fig. 2 B).

One or more material handling devices and one or more precipitation equipments 520 are relative to silk screen and/or substrate The distance between support element can limit in vertical plane.Equally, corresponding material processing can be limited relative to vertical plane Device and precipitation equipment are relative to the angle of silk screen and/or substrate support, such as first angle to third angle.

In some implementations, equipment includes one or more revolving actuators, one or more rotation Actuator is configured as rotating technics head assembly 510, will be specifically its technique head.One or more revolving actuators It can be configured as the angle of adjusting process head assembly or technique head relative to silk screen and/or substrate support.In Fig. 5 In, the angle [alpha] between silk screen and/or substrate support and technique head can be limited relative to vertical plane.When in a first direction When upper mobile, technique head assembly 510 can have angle+α, this angle may correspond to technique head assembly 510 along up time The inclination in needle direction.

When moving in a second direction, technique head assembly 510 can have angle-α, this angle may correspond to work The inclination of skill head assembly 510 in the counterclockwise direction.Angle+α and-α can relative to vertical plane or direction into 70 ° or smaller, Specifically 60 ° or smaller, more specifically 40 ° or smaller, and even more specifically 20 ° or smaller.As an example, angle Degree+α and-α can 20 ° with 70 ° between, and specifically in 40 ° with 70 ° between.

In some embodiments, a kind of configuration of technique head assembly 510 may include one or more first actuatings Device 562 and one or more second actuators 564, to drive linearly and with being substantially parallel to each other one or more A processing unit and one or more precipitation equipments, and can further comprise one or more revolving actuators, it is described One or more revolving actuators are configured as rotating technics head assembly 510.Another configuration of technique head assembly 510 can Including one or more first actuators 562 and one or more second actuators 564, one or more first Actuator 562 is one or more for driving linearly and with being substantially parallel to each other one or more processing units Multiple second actuators 564 rotate one for linearly driving one or more precipitation equipments (for example, vertically) Or more precipitation equipment.

According to some embodiments that can be combined with other embodiment as described herein, equipment is configured as example existing At least one of one or more material handling devices material processing dress is adjusted before, during and/or after depositing operation One or more processing parameters put.One or more processing parameters are selected from the group being made of following item：At least one material Material processing device and the distance between silk screen and/or substrate support (the such as first distance and/or second distance) and at least one A material handling device relative to silk screen and/or substrate support angle.

According to some embodiments that can be combined with other embodiment as described herein, equipment is configured as example existing One or more deposition parameters of one or more precipitation equipments 520 are adjusted before, during and/or after depositing operation. One or more deposition parameters can be selected from the group being made of following item：In one or more precipitation equipments 520 at least One precipitation equipment and at least one in the distance between silk screen and/or substrate support, one or more precipitation equipments 520 A precipitation equipment relative to the angle of silk screen and/or substrate support, technique head assembly (for example, technique head) relative to At least one of the movement speed and one or more precipitation equipments of silk screen and/or substrate support precipitation equipment example Such as act on the pressure on the silk screen used in depositing operation.

In some implementations, in deposition process, especially in Material handling processes, adjustment is one or more At least one of a processing parameter processing parameter.Additionally or alternatively, in deposition process, adjustment is one or more At least one of a deposition parameter deposition parameter.Conduction can be improved to the real-time adjustment of processing parameter and/or deposition parameter The quality of line pattern.According to some embodiments, can be based on or according to one or more deposition parameters adjustment one or more At least one of multiple processing parameters processing parameter.

Fig. 6 is shown to be used to material web being printed in for solar-electricity according to further embodiments as described herein The schematic diagram of the equipment 600 on substrate in the manufacture of pond.

According to some embodiments that can be combined with embodiment as described herein, specifically equipment and technique head Parts include two or more technique heads (also referred to as " be grouped " or " technique grouping ").The two or more works Skill head can control and/or move independently of one another.As an example, technique head assembly includes the first technique head 610 With the second technique head 620.The first precipitation equipment 612 in one or more precipitation equipments is attached to the first technique head 610, and the second precipitation equipment 622 in one or more precipitation equipments is attached to the second technique head 620.Equally, one The first material handling device 614 in a or more material handling device is attached to the first technique head 610, and one or The second material handling device 624 in more material handling devices is attached to the second technique head 620.

One or more precipitation equipments can be angled precipitation equipment, such as angled scraper plate or accurate scraper plate. Each angled precipitation equipment can be configured as that (this is different from previously described for only being printed in one direction Diamond scraper plate, diamond scraper plate is virtual symmetry, and be configurable for along forwardly and rearwardly both direction into Row printing).In order to perform printing in two directions, technique head assembly is included in material handling device (for example, first 614 and second material handling device 624 of material handling device) between two angle deposition devices (for example, the first precipitation equipment 612 and second precipitation equipment 622).

In the deposition process that along the first direction 1 performs, it can be promoted with the second precipitation equipment 622 and the second material Second technique head 620 of material processing device 624.In other words, in the deposition process performed along the first direction 1, and Without using the second technique head 620.First technique head 610 declines so that the first precipitation equipment 612 contacts silk screen 154 to incite somebody to action Material 30 is transmitted on substrate (not shown).Certain distance is equipped between the first material handling device 614 and silk screen 154, is made The first material handling device 614 that the first precipitation equipment 612 must be followed provides substantially uniform material 30 on silk screen 154 Film or layer.

During the subsequent deposition process performed along the second direction opposite with first direction 1, the first technique head 610 Raising, and the second technique head 620 declines.Second precipitation equipment 622 contact silk screen 154 with by silk screen material (that is, first The preceding film or layer that substrate is provided by the first material handling device 614) it is transmitted on substrate, the substrate can be with previous substrate Same substrate (if for example, performing dual printing) or another/subsequent substrate.

Although a precipitation equipment and a material handling device are shown at each technique head, but it is to be understood that The utility model is without being limited thereto, and two or more precipitation equipments and/or two or more material handling devices can be attached It is connected to the first technique head 610.Equally, two or more precipitation equipments and/or two or more material handling devices can It is attached to the second technique head 620.

According to some embodiments, two or more technique heads (such as the first technique head 610 and the second technique head Portion 620) it can move or lift in vertical direction.Additionally or alternatively, two or more technique heads can be configured For one or more precipitation equipments of movement and/or one or more material handling devices, as previously described herein.

Fig. 7 shows the schematic diagram of the manufacture of solar cells equipment 700 according to embodiment described herein.

Manufacture of solar cells equipment 700 includes one or more deposition stations 720 and according to embodiment party described herein The equipment 725 for being used to be printed in material web on the substrate in manufacturing for solar cell of formula.Equipment 725 can be set In at least one of one or more deposition stations 720 deposition station.

Manufacture of solar cells equipment 700 may include one in one or more 720 upstreams of deposition station and/or downstream Or more other stations.As an example, manufacture of solar cells equipment 700 may include the first inspection station (first Inspection station) 710, the first inspection station 710 will be input to for checking in one or more deposition stations 720 Substrate.Manufacture of solar cells equipment 700 may include dry station 730, and dry station 730 is for dry in one or more depositions It stands the material being deposited in 720 on substrate.In some embodiments, manufacture of solar cells equipment 700 may include the second inspection Station 740 is looked into, the second inspection station 740 is deposited on the conducting wire on substrate for inspection in one or more deposition stations 720 Pattern.

Manufacture of solar cells equipment 700, specifically with the one or more of equipment according to the present utility model Deposition station 720 can be for producing the larger production system of solar cell ((in-line) production system of such as connecting) Part.

It can use and material web is printed in for solar-electricity to perform according to the equipment of embodiment described herein On substrate in the manufacture of pond.Technological process is described below.

To have one or more precipitation equipments and one or more materials in a first direction along substrate support The technique head assembly of material processing device is at least moved to the second position from first position, to use one or more depositions Material is transmitted to substrate by least one of device precipitation equipment from silk screen, and is filled using one or more material processing It at least one of puts material handling device and performs processing to the material on silk screen, wherein at least in technique head assembly from the One position performs the transmission and processing of material during being moved to the second position.In some implementations, with first party The moving process head assembly in opposite second direction, to perform the transmission of material in moving process in a second direction (such as printing) and processing.

The transmission and processing of material can be during at least part of the duration of depositing operation, and specifically exist It is performed simultaneously during the basic entire duration of depositing operation.One or more material handling devices can be for example in silk screen It is upper that substantially uniform material membrane or layer are provided.Optionally, one or more material handling devices can recycle excessive from silk screen Material.

The utility model uses moveable technique head assembly, and the moveable technique head assembly is configured as together Below Shi Zhihang is operated：Using precipitation equipment material processing is carried out in depositing materials on substrates and using material handling device.Make For an example, can be deposited during the same one stroke of technique head assembly and material processing.Processing week can be reduced The cycle time of phase, and the productivity and/or output of equipment can be increased.In particular, one can be provided on silk screen Layer material.Precipitation equipment (can be scraper plate) can be used that material is transmitted to substrate from silk screen.It is heavy that material handling device can follow Device is accumulated, and another layer of material is provided on silk screen, to be deposited in subsequent substrate.

Although the above is directed to the embodiment of the utility model, can the basic of the utility model be not being departed from yet Design other and further embodiment in the present disclosure in the case of range, and the scope of the utility model by with Attached claims determine.

Claims (16)

1. a kind of equipment for being used to be printed in material web on the substrate in manufacturing for solar cell, the equipment packet It includes：

Technique head assembly, the technique head assembly include：

One or more precipitation equipments, one or more precipitation equipment are configurable for the material from silk screen It is transmitted to the substrate；With

One or more material handling devices, one or more material handling device are configurable for described in processing The material on silk screen；

Driving device, the driving device are configurable for moving the technique head in a first direction along substrate support Parts, so that the material is transmitted and handled in deposition process.

2. equipment as described in claim 1, which is characterized in that the silk screen is arranged on the substrate support and the technique Between head assembly, wherein one or more precipitation equipment includes scraper plate, and wherein described scraper plate be configured as with The mesh contacts are to be printed.

3. equipment as described in claim 1, which is characterized in that one or more material handling device includes at least the One material handling device and the second material handling device, wherein at least one of one or more a precipitation equipment deposition Device is located between first material handling device and second material handling device.

4. equipment as claimed in claim 3, further comprise one or more first actuators, one or more First actuator be configured as adjusting at least one of one or more material handling device material handling device with The distance between described silk screen, wherein one or more the first actuator includes the first actuating unit and the second actuating Device unit, first actuating unit are configured as adjusting first between first material handling device and the silk screen Distance, second actuating unit be configured as adjusting between second material handling device and the silk screen second away from From.

5. equipment as described in claim 1,

Wherein described technique head parts include the first technique head and the second technique head, wherein one or more heavy At least one of product device precipitation equipment is attached to the first technique head, and one or more material processing At least one of device material handling device be attached to the second technique head or

Wherein described technique head parts include technique head, wherein at least one of one or more a precipitation equipment At least one of precipitation equipment and one or more material handling device material handling device are attached to the technique Head.

6. equipment as described in claim 1, which is characterized in that the equipment is configured as：

The technique head assembly is at least moved to from first position in said first direction along the substrate support The second position, to use at least one of one or more precipitation equipment precipitation equipment by the material from described Silk screen is transmitted to the substrate and is filled using at least one of one or more material handling device material processing It puts and performs processing to the material on the silk screen, wherein transmission and handling in the technique head assembly from described first Position performs during being moved to the second position.

7. equipment as claimed in claim 6, which is characterized in that the equipment is configured as the duration in depositing operation The transmission and processing of the material are performed simultaneously during at least part.

8. equipment as claimed in claim 6, which is characterized in that one or more material handling device is configured as using In the uniform films that the material is provided on the silk screen.

9. equipment as claimed in claim 6, which is characterized in that the equipment is configured to：

The technique head assembly is moved up in second party opposite to the first direction, so as to along the second direction Moving process in perform the transmission and processing of the material.

10. equipment as claimed in claim 9, which is characterized in that the equipment is configured as moving along the first direction Using the first material handling device in one or more material handling device when moving the technique head assembly, and Wherein described equipment is configured as when moving the technique head assembly along the second direction using one or more The second material handling device in multiple material handling devices.

11. equipment as claimed in claim 10, which is characterized in that when the technique head assembly moves in said first direction When dynamic, first material handling device is positioned in one or more precipitation equipment rear, and wherein when described When technique head assembly moves in this second direction, second material handling device is positioned in one or more A precipitation equipment rear.

12. equipment as claimed in claim 10, which is characterized in that in the technique head assembly in said first direction In moving process, the distance between the silk screen and first material handling device are less than the silk screen and second material The distance between processing unit, and wherein in technique head assembly moving process in this second direction, institute The distance between silk screen and second material handling device is stated to be less than between the silk screen and first material handling device Distance.

13. equipment as claimed in claim 6, which is characterized in that the equipment is configured to：

Adjust one or more places of at least one of one or more material handling device material handling device Parameter is managed, wherein one or more processing parameter is selected from the group being made of following item：

The distance between at least one material handling device and at least one of the silk screen and the substrate support； With

At least one material handling device relative at least one of the silk screen and the substrate support angle.

14. equipment as claimed in claim 6, which is characterized in that the equipment is configured to：

One or more deposition parameters of at least one of one or more precipitation equipment precipitation equipment are adjusted, Described in one or more deposition parameters be selected from the group that is made of following item：

The distance between at least one precipitation equipment and the substrate support；

At least one precipitation equipment relative to the substrate support angle；

The technique head assembly relative to the substrate support movement speed；With

At least one precipitation equipment acts on the pressure on the silk screen.

15. equipment as claimed in claim 14, wherein at least one of one or more a processing parameter processing ginseng Number is adjusted in the Material handling processes, and at least one of wherein one or more a deposition parameter is heavy Product parameter is adjusted in the transmit process.

16. a kind of manufacture of solar cells equipment, the manufacture of solar cells equipment includes：

One or more deposition stations,

Equipment according to any one of claim 1 to 15, the equipment is in one or more deposition station At least one deposition station in.