CN207381421U - For material web to be printed in the equipment and manufacture of solar cells equipment on the substrate in being manufactured for solar cell - Google Patents

Abstract

It provides for material web to be printed in the equipment (100)/and manufacture of solar cells equipment (1000) on the substrate (10) for solar cell manufacture.The equipment (100) includes technique head assembly (110), and the technique head assembly can be moved at least in a first direction, and the technique head assembly includes：One or more precipitation equipments (120), one or more precipitation equipment are configurable for the material being transmitted to the substrate (10) from silk screen (154)；With two or more material handling devices (130), the two or more material handling devices are used to handle the material on the silk screen (154).

Description

For material web to be printed in setting on the substrate in being manufactured for solar cell Standby and manufacture of solar cells equipment

Technical field

The embodiment of the utility model is related to for material web to be printed in the base in manufacturing for solar cell Equipment and manufacture of solar cells equipment on plate.

Background technology

Solar cell is the photovoltaic device that sunlight is directly changed into electric power.In this field, it is known to use deposition Technology, specifically printing technology solar cell is produced in crystalline silicon substrates, so as in the front surface of solar cell Realize selective emitter structures.Process cycle may include at least one printing operation and optional another material processing operation, In the printing operation, material is deposited on substrate by precipitation equipment.The productivity and/or output of equipment can The limitation of the cycle time in cycle can be subject to processing.

In view of the foregoing, being used for too for material web to be printed at least some problems in this field is overcome New equipment and manufacture of solar cells equipment on positive substrate that can be in battery manufacture are beneficial.The mesh of the utility model Mark at least one is set in particular, in that providing and can reduce the cycle time of process cycle with increase in productivity and output It is standby.

Utility model content

In view of the foregoing, provide for material web to be printed in setting on the substrate in manufacturing for solar cell Standby and manufacture of solar cells equipment.The other aspect, benefit and feature of the utility model from claims, from the perspective of It is apparent in bright book and attached drawing.

One side according to the present utility model provides material web being printed in solar cell manufacture Substrate on equipment.The equipment includes technique head assembly, and the technique head assembly can at least in a first direction It is mobile.The technique head assembly includes：One or more precipitation equipments, one or more precipitation equipment are configured To be used to material being transmitted to substrate from silk screen；With two or more material handling devices, the two or more materials Processing unit is used to handle the material on silk screen.

In some embodiments, one or more precipitation equipment is disposed in the two or more materials Between material processing device.

In some embodiments, one or more precipitation equipment is two or more precipitation equipments, and Wherein the two or more material handling devices are disposed between the two or more precipitation equipments.

Another aspect according to the present utility model provides material web being printed in solar cell manufacture Substrate on equipment.The equipment includes technique head assembly, and the technique head assembly can at least in a first direction It is mobile.The technique head assembly includes：One or more precipitation equipments, one or more precipitation equipment are configured To be used to material being transmitted to substrate from silk screen；With one or more material handling devices, one or more material Processing unit is used to handle the material on silk screen.

Another aspect according to the present utility model provides material web being printed in solar cell manufacture Substrate on equipment.The equipment includes technique head assembly, and the technique head assembly can be at least on print direction It is mobile.The technique head assembly includes one or more material handling devices, wherein at one or more material Managing at least one material handling device in device has blade (blade), and the blade is configurable for processing material, and And wherein described blade is not straight on the direction substantially perpendicular to the print direction.

In some embodiments, the direction is perpendicular to the first direction.

In some embodiments, the blade has first edge part, second edge portion and described first Center section between marginal portion and the second edge portion, and wherein described first edge portion point and second side Edge split-phase is tilted for the center section.

In some embodiments, the equipment further comprises driving device, and the driving device is configurable for The technique is moved up along substrate support in said first direction and in second party opposite to the first direction Head assembly.

In some embodiments, the equipment is configured in the first party and moves up the technique head During component the silk screen is handled using the first material handling device in the two or more material handling devices On the material, and wherein described equipment is configured in the second party and moves up the technique head assembly During handled using the second material handling device in the two or more material handling devices on the silk screen The material.

In some embodiments, the equipment further comprises one or more first actuators, it is one or More first actuators are configured as adjusting at least one material processing in the two or more material handling devices The distance between device and the silk screen, wherein one or more the first actuator include the first actuating unit and Second actuating unit, first actuating unit be configured as adjusting first material handling device and the silk screen it Between the first distance, second actuating unit is configured as adjusting between second material handling device and the silk screen Second distance.

In some embodiments, the silk screen is arranged between the substrate support and the technique head assembly, Wherein one or more precipitation equipment includes scraper plate, and wherein described scraper plate be configured as with the mesh contacts with It is printed.

In some embodiments, wherein the technique head parts include the first technique head and the second technique head, At least one material handling device in wherein the two or more material handling devices is attached to first technique head Portion, and at least another material handling device in the two or more material handling devices is attached to second technique Head or wherein described technique head parts include technique head, wherein the two or more material handling devices are attached It is connected to the technique head.

In some embodiments, the equipment is configured as：It in said first direction will tool along substrate support There is the technique head assembly of one or more precipitation equipments and the two or more material handling devices extremely It is few to be moved to the second position from first position, to use at least one deposition dress in one or more precipitation equipment It puts and the material is transmitted to the substrate and using in the two or more material handling devices from the silk screen First material handling device performs the processing to the material on the silk screen.

In some embodiments, the equipment is configured to：In second party opposite to the first direction The technique head assembly is moved up, to use the second material processing in the two or more material handling devices Device performs the transmission and processing to the material on the silk screen.

In some embodiments, the material transmission and processing depositing operation duration at least a portion Period performs simultaneously.

Another aspect according to the present utility model provides a kind of manufacture of solar cells equipment.The solar cell life Production equipment includes one or more deposition stations and is used for according to embodiment described herein for material web to be printed in The equipment on substrate in solar cell manufacture.

Description of the drawings

Therefore, in order to which the features described above of the utility model is understood in detail, the utility model summarized above More specific description be referred to embodiment progress.Attached drawing is related to the various embodiments of the utility model, and describes It is as follows：

Fig. 1 is shown to be used to material web being printed in for solar cell manufacture according to embodiment described herein In substrate on equipment schematic diagram；

Fig. 2A and Fig. 2 B show the technique head for being used to carry out printing and material processing according to embodiment described herein The schematic diagram of parts, the technique head assembly move in a first direction and in a second direction respectively.

Fig. 3 is shown to be used to material web being printed in for solar-electricity according to further embodiments as described herein The schematic diagram of the equipment on substrate in the manufacture of pond；

Fig. 4 A to Fig. 4 C are shown to be used for according to further embodiments as described herein for material web to be printed in The schematic diagram of the technique head assembly of the equipment on substrate in solar cell manufacture；

Fig. 5 shows the schematic diagram of the arrangement of the precipitation equipment and material handling device according to embodiment described herein；

Fig. 6 shows the precipitation equipment and material processing dress during typography according to embodiment described herein The schematic diagram for the arrangement put；

Fig. 7 shows the precipitation equipment and material during typography according to further embodiments as described herein The schematic diagram of the arrangement of processing unit；

Fig. 8 A and Fig. 8 B are shown to be used to material web being printed in for solar energy according to embodiment described herein The schematic diagram of the technique head assembly of the equipment on substrate in battery manufacture；

Fig. 9 shows the schematic diagram of the material handling device according to embodiment described herein, the material handling device With blade；With

Figure 10 shows the schematic diagram of the manufacture of solar cells equipment according to embodiment described herein.

Specific embodiment

The various embodiments of the utility model are reference will now be made in detail, one or more examples of the embodiment exist It is shown in attached drawing.In the description below to attached drawing, identical reference numeral refers to identical component.In general, only describe At difference between each embodiment.Each example is provided in a manner of explaining utility model content, and is not intended to conduct The limitation of the utility model.In addition, the feature of part for illustrating or being described as an embodiment can be used for other embodiment party Formula is combined to generate another embodiment with other embodiment.It is expected that specification includes such modifications and variations.

Process cycle for forming conducting wire pattern on substrate may include to deposit material using precipitation equipment At least one depositing operation on substrate and at least another technique using material handling device.At precipitation equipment and material Reason device is mounted to technique head so that when technique head is moved in a certain direction, carries out the material on substrate Material deposition and material processing.

The equipment according to the present utility model for being used to material web being printed on substrate uses moveable technique head Component carries out silk-screen printing.As an example, layer of material can be provided on silk screen.Can use to be the deposition of scraper plate Material is transmitted to substrate by device from silk screen.Material handling device can follow precipitation equipment, and provide on silk screen another The material of layer is for being deposited in such as subsequent substrate.The technique head assembly of the utility model has two or more materials Processing unit so that material processing can perform in two directions, i.e., two-way execution.Because at least material processing can be two A side upward rather than only performing in one direction, it is possible to increase the productivity and/or output of equipment.

Fig. 1 is shown to be used to material web being printed in for solar cell manufacture according to embodiment described herein In substrate 10 on equipment 100 schematic diagram.Material can be adapted for forming conducting wire figure on the surface of substrate 10 12 The material of case (such as finger-shaped material and/or busbar (busbar)).As an example, material can be paste, such as silver paste.

Equipment 100 includes technique head assembly 110, and the technique head assembly can be moved on 1 in a first direction, and first Direction can be print direction.Technique head assembly 110 includes：One or more precipitation equipments 120, one or more Precipitation equipment is configurable for material being transmitted to substrate 10 from silk screen 154；With it is one or more (or two or more It is a) material handling device, such as the first material handling device 130 and the second material handling device 132, for handling silk screen 154 On material.In some implementations, one or more precipitation equipments 120 can be one or more printing equipments, all Such as scraper plate.Material processing is alternatively referred to as " cover ink stage (flood phase) ", can be provided on silk screen 154 substantially uniformly Material layer, the substantially uniform material layer is sent to the subsequent substrate for for example following processed substrate.

In some implementations, equipment 100 further comprises driving device, and the driving device is configurable for edge The part of moving process head assembly 110 or technique head assembly 110 (such as institute on 1 in a first direction of substrate support 20 State the technique head of technique head assembly), for from silk screen 154 material to be transmitted to substrate 10 and/or for example in depositing operation The material on silk screen 154 is handled in the process.Deposition (such as printing) and material can be performed in a stroke or periodic process Processing.In other words, deposition and material processing be may be performed simultaneously.Combination cover ink movement during depositing operation can be reduced Process time, such as critical path time.As an example, critical path time can reduce about 1/3rd.

In the example of fig. 1, technique head assembly 110 includes technique head 140, such as one single technique head, At least one precipitation equipment in one of them or more precipitation equipment 120 and it is one or more (or two or more It is a) at least one material handling device in material handling device is attached to technique head 140.However, the utility model is unlimited In this, and technique head assembly may include two or more technique heads, and the two or more technique heads have It is attached to correspondingly deposited device and/or material handling device thereon.

In some implementations, the duration of depositing operation that one or more precipitation equipments perform is being used Deposition and material processing are performed during at least a portion simultaneously.It, can be in the duration of depositing operation as an example 50% or more, material processing is specifically performed during 70% or more and more specifically 90% or more.According to some realities Apply mode, deposition and material processing (duration of such as depositing operation during the basic entire duration of depositing operation 100%) perform simultaneously.Depositing operation may correspond to the stroke performed by technique head or movement, such as at first It puts between A and second position B.The distance between first position A and second position B can be equal to or more than substrate 10 or conducting wire The ductility (extension) of figure so that conducting wire pattern or one layer can be deposited on base in a stroke On plate 10.

Equipment 100 may include screen apparatus 150, and the screen apparatus 150 is arranged on substrate support 20 and technique head Between component 110.Screen apparatus 150 may include frame 152 and silk screen 154, and silk screen 154 is attached to frame 152.According to can be with Some embodiments of other embodiment as described herein combination, one or more precipitation equipments 120 can be one or more Multiple printing equipments.One or more printing equipments can each include scraper plate.Scraper plate can be configured to contact silk screen 154 so as into Row printing.In some embodiments, the nib contacts silk screen 154 of the scraper plate and material is promoted to be printed through silk screen 154 Onto substrate 10.Scraper plate can be diamond scraper plate or angled scraper plate.

Silk screen 154 may include net, mask to print, sheet material, metal sheet, plastic sheet, plate, sheet metal and plastic plate It is at least one in material.In some embodiments, silk screen 154 limits the pattern for corresponding to and being printed on the structure on substrate, Wherein pattern may include at least one in hole, slit, notch or other holes.Pattern may correspond to substrate 10 to be printed on On conducting wire pattern, the finger-shaped material and/or busbar of such as solar cell.As an example, silk screen 154 can have Limit the opening of conducting wire pattern and the woven wire (wire mesh) being arranged in opening.By using one or more A first material handling device 130, the material that can will be deposited on the substrate 10 are provided as substantially uniform layer in silk screen On 154.Since there are woven wire, material does not flow through opening.In deposition process, precipitation equipment, such as scraper plate meeting To material applied force or pressure, and material is promoted to pass through opening so that material is sent to substrate 10 and (that is, is deposited on substrate On 10).

According to some embodiments that can be combined with other embodiment as described herein, one or more (or Two or more) material handling device (such as the first material handling device 130 and the second material handling device 132) is configured To be used on silk screen 154 provide substantially uniform material membrane.In some implementations, material processing can make material with most Good mode is transmitted on substrate 10.Optionally or alternatively, material handling device be configurable for recycling substrate 10 and/or Excess stock on silk screen 154.In some implementations, one or more (or two or more) material processing dress It can be flood bar (flood bar) to put.Material processing is properly termed as " cover ink (flooding) ".

According to some embodiments that can be combined with other embodiment as described herein, driving device is configured as using By technique head assembly 110, at least from first position, A is moved to second position B in a first direction 1, so as at least from One position A performs deposition/transmission and processing of the material on silk screen 154 (for example, dividing during being moved to second position B Cloth).It can be corresponded respectively to by technique head assembly 110 or its work from first position A to the movement of second position B or vice versa The stroke (such as the first stroke and the second stroke) that skill head performs.First direction 1 can be the water perpendicular to vertical direction 4 Square to 3.

First position A and second position B can be defined as technique head assembly 110 (for example, technique head 140) compared with At least one corresponding position in substrate 10, substrate support 20 and/or silk screen 154.The position of technique head assembly 110 can With then limit one or more precipitation equipments 120 and material handling device compared with substrate 10, substrate support 20 and/or At least one corresponding position in silk screen 154.

As an example, when technique head assembly 110 or technique head 140 are in first position A and along first When direction 1 (" moving direction ") is mobile, the first material handling device 130 can be at position (a) and one or more heavy A precipitation equipment in product device 120 can be at position (b).Equally, when technique head assembly 110 or technique head 140 In second position B and along during second direction 2 (" moving direction ") movement, the first material handling device 130 can be in place It puts (c) place and precipitation equipment can be at position (d).When technique head assembly 110 reaches second position B from first position A When, material handling device is moved to position (c) from position (a), and precipitation equipment is moved to position (d) from position (b).One In a little realization methods, comparably operated if deposited in both direction, then precipitation equipment will not change position.As one Example, in the case of asymmetrical precipitation equipment (such as angled scraper plate), a precipitation equipment rise, another deposition dress Put decline.

According to some embodiments that can be combined with other embodiment as described herein, driving device is configured as using In the moving process head assembly 110 in the second direction opposite with first direction 1, to be held during moving in a second direction Row deposition and/or material processing.The movement of technique head assembly 110 in a second direction may correspond to technique head assembly 110 From second position B to the movement of first position A.Second direction can be horizontal direction 3 and/or print direction.

In some implementations, movement of the technique head assembly 110 between first position A and second position B, such as First stroke and/or the second stroke, may correspond to 400mm or smaller, specifically 300mm or smaller and more specifically 200mm Or smaller stroke distances.As an example, stroke distances can be between 150mm to 300mm, and can be with In particular about 220mm.Stroke distances can be equal to or more than the ductility of substrate 10 or conducting wire pattern.First position A and Second position B can be compared with the central point between first position A and second position B (and specifically as when technique head Deposition fills when the position (b) of precipitation equipment is in second position B with technique head assembly 110 when component 110 is in first position A Central point between the position (d) put) it is defined.As an example, the row between first position A and second position B When journey distance is 220mm, when technique head assembly 110 be in first position A, the position (b) of precipitation equipment can for- 110mm, and when technique head assembly 110 is in second position B, the position (d) of precipitation equipment can be+110mm.One In a little embodiments, one or more reference positions are provided.One or more reference position may be, for example, in substrate The heart (dead-center position), the position (for example, -110mm) of precipitation equipment when stroke starts and the deposition when stroke is completed The final position (for example,+110mm) of device.Cream volume can move back and forth from -110mm positions to+110mm positions.Due to processing Device can be equipped with offset (for example, 30mm) with precipitation equipment, thus technique head assembly 110 can perform additional running with Cream volume is made to return to accurate location.

According to some embodiments, one or more precipitation equipments with it is one or more (or two or more It is a) distance or spacing can be equipped between material handling device.Specifically, at adjacent or neighbouring precipitation equipment and material Distance or spacing can be equipped between reason device.As an example, in a first direction on 1, in precipitation equipment and adjacent material The distance between material processing device or spacing can be in the range of 10mm to 50mm, and can be in particular about 30mm.Away from From or spacing can be material gather (" cream volume ") offer space.

In some embodiments, equipment 100 can be configured as at least carrying out dual printing.It is conductive as an example Line pattern (finger-shaped material and/or busbar of such as solar cell) may include two or more material layers.First material Layer can print on the substrate 10, and second material layer can be printed on the top of first material layer at least partly, so as to Form conducting wire pattern.In some implementations, equipment 100 can print the first material in the first deposition process Layer, the first depositing operation are included from first position A to the movement of second position B or the first stroke.In some embodiments, if Standby 100 can print second material layer in the second deposition process, and the second depositing operation is included from second position B to first The movement of position A or the second stroke.However, the utility model is not limited to this, and can utilize in same direction (for example, First direction 1 or second direction) mobile technique head assembly 110 performs depositing operation.In some embodiments, substrate quilt It alternately prints, for example, a substrate, using first direction 1, another substrate is using second direction 2 etc. (for example, for each Processing or printing station).

In some implementations, first direction 1 and second direction 2 can be substantially horizontal direction.Term " level side To " be understood to be different from " vertical direction ".That is, " horizontal direction " is related to the essence of such as technique head assembly 110 The movement of upper level, wherein being still considered as with the several years deviation (for example, reaching 5 ° or even up to 10 °) in exact level direction It is " substantially horizontal direction ".Vertical direction 4 can be substantially parallel to gravity.

According to some embodiments that can be combined with other embodiment as described herein, equipment 100, and specifically It is technique head assembly 110, further includes actuator, the actuator is configurable for mobile one or more Precipitation equipment 120 and/or one or more (or two or more) material handling devices.It is described as an example Actuator includes one or more first actuators, and one or more first actuator is configured as adjustment one At least one material handling device (such as the first material handling device 130 and/or the in a or more material handling device Two material handling devices 132) and the distance between silk screen 154 and/or substrate support 20 and at least one material handling device Compared at least one in the angle of silk screen 154 and/or substrate support 20.Additionally or alternatively, the actuator group Part includes one or more second actuators, and one or more second actuator is configured as adjusting one or more At least one precipitation equipment and the distance between silk screen 154 and/or substrate support 20 and at least one in a precipitation equipment 120 A precipitation equipment is compared at least one in the angle of silk screen 154 and/or substrate support 20.

In some implementations, for example moved in technique head assembly 110 between first position A and second position B During, it can adjust or control at least one material handling device and the silk screen in one or more material handling devices The distance between 154 and/or substrate support 20 (for example, in vertical direction).It, can be by adjusting extremely as an example Lack the upright position of a material handling device and adjust distance.Adjustment upright position may insure at least one material in real time Processing unit is without interference with silk screen 154, particularly in silk screen 154 because silk screen 154 is contacted with one or more precipitation equipments 120 It is and such when deforming.It, can be by least one material in one or more material handling devices according to some embodiments Processing unit is adjusted to follow silk screen profile (screen with the distance between silk screen 154 and/or substrate support 20 profile).Specifically, the upright position of at least one material handling device can be controlled or is adjusted to follow the silk screen wheel It is wide.As an example, in the moving process of technique head assembly 110, it can adjust or control at least one material processing to fill Put with the distance between silk screen 154 and/or substrate support 20, to make it that will be substantial constant.

Fig. 2A and Fig. 2 B are shown to be used to be deposited at (such as printing) and material according to embodiment described herein The schematic diagram of the technique head assembly 110 of reason, the technique head assembly 110 move up on 1 and in second direction 2 in a first direction It is dynamic.

According to some embodiments that can be combined with other embodiment as described herein, at two or more materials It manages device and includes at least the first material handling device 130 and the second material handling device 132.When technique head assembly 110 (such as Technique head 140) be in first position A when, the first material handling device 130 is in position (a), and precipitation equipment is in position (b), and the second material handling device 132 is in position (a').When technique head assembly 110 is in second position B, first Material handling device 130 is in position (c), and precipitation equipment is in position (d), and the second material handling device 132 is in position It puts (c').

In some implementations, at least one precipitation equipment in one or more precipitation equipments 120 is located in Between one material handling device 130 and the second material handling device 132.Although Fig. 2A and Fig. 2 B are exemplarily illustrated the first material A precipitation equipment between 130 and second material handling device 132 of processing unit, but the utility model is without being limited thereto.Tool Body, more than one precipitation equipment can be equipped between the first material handling device 130 and the second material handling device 132, Such as two precipitation equipments.

In further embodiments, one or more precipitation equipments 120 include at least the first precipitation equipment and second and sink Product device.At least one material handling device in one or more material handling devices can be positioned at the first precipitation equipment Between the second precipitation equipment.As an example, two material handling devices can be positioned at the first precipitation equipment and second Between precipitation equipment.

According to some embodiments that can be combined with other embodiment described herein, when technique head assembly 110 exists When being moved on first direction 1, the first material handling device 130 is positioned in one or more 120 rears of precipitation equipment.Work as work When being moved in second direction 2, the second material handling device 132 can be positioned at one or more heavy skill head assembly 110 120 rear of product device.In other words, respective material processing unit is on moving direction (such as first direction or second direction) Follow one or more precipitation equipments 120.

As shown in Figure 2 A, during mobile on technique head assembly 110 in a first direction 1, technique head assembly 110 makes Material processing is carried out with the first material handling device 130.In addition, as shown in Figure 2 B, in technique head assembly 110 in second direction On 2 during movement, technique head assembly 110 carries out material processing using the second material handling device 132.In technique head group Material handling device 110 in part moving process for material processing, which can be positioned so that, sufficiently closes to silk screen 154, to allow Material processing such as provides substantially uniform material layer on silk screen 154.As an example, for the material of material processing The distance between material processing device and silk screen 154 (for example, first distance d1 or second distance d2 described in paragraphs below) can With according in the forming of the layer thickness of material, the rheological characteristic of material (for example, paste) and the material that are deposited on silk screen 154 It is at least one to make choice.

According to some embodiments, during mobile on technique head assembly 110 in a first direction 1, silk screen 154 and the The first distance d1 between one material handling device 130 be less than between 154 and second material handling device 132 of silk screen second away from From d2.During technique head assembly 110 is mobile in second direction 2,154 and second material handling device 132 of silk screen it Between second distance d2 can be less than 154 and first material handling device 130 of silk screen between the first distance d1.First distance d1 It can be limited in vertical direction with second distance d2.

In some implementations, the relatively large distance in the first distance d1 and second distance d2 (that is, in Fig. 2A second away from The first distance d1 in d2 and Fig. 2 B) it can be between 0mm and 25mm, specifically between 1mm and 15mm In the range of, and more specifically can be about 10mm.Small distance (that is, Fig. 2A in first distance d1 and second distance d2 In the first distance d1 and Fig. 2 B in second distance d2) can specifically exist between 0.01mm and 2mm Between 0.05mm and 1.5mm, and more specifically can be between 0.1mm and 1mm.

In some implementations, during mobile between first position A and second position B, it can adjust or control first Distance d1 and/or second distance d2.Adjustment the first distance d1 and/or second distance d2 may insure at least one material in real time Device is managed without interference with silk screen 154.According to some embodiments, the first distance d1 and/or second distance d2 can be adjusted to Follow silk screen profile.According to some embodiments, the distance of the material handling device just used is only adjusted.It can make untapped The distance of material handling device is kept constant.As an example, the distance of the material handling device in using can be carried out Adjustment, so that the distance between the material handling device and silk screen 154 (such as the first distance d1 or second distance d2) are protected It holds as substantial constant.

According to some embodiments that can be combined with other embodiment as described herein, equipment 100, and specifically It is technique head assembly 110 (for example, technique head 140), further includes actuator, the actuator is configured as using In one or more precipitation equipments 120 of movement and/or two or more material handling devices.It is described as an example Actuator includes one or more first actuators, and one or more first actuator is configured as adjustment one Between at least one material handling device and silk screen 154 and/or substrate support 20 in a or more material handling device Distance (for example, first distance d1 and/or second distance d2) and at least one material handling device compared with silk screen 154 and/ It is or at least one in the angle of substrate support 20.As an example, one or more the first actuator can wrap The first actuating unit and the second actuating unit are included, the first actuating unit is configured as the first material handling device of adjustment The first distance d1 between 130 and silk screen 154 and/or substrate support 20, the second actuating unit are configured as adjustment second Second distance d2 between material handling device 132 and silk screen 154 and/or substrate support 20.

Actuator in actuator, such as one or more first actuators and/or one or more second Actuator, can be from the group selection being made of following item：Stepper motor (stepper motor), linear electric machine, pneumatic motor and Any combination of them.

Fig. 3 is shown to be used to material being deposited on for solar cell system according to further embodiments as described herein The schematic diagram for the equipment on substrate made.

According to some embodiments that can be combined with other embodiment described herein, one or more precipitation equipments 120 are configured in contact silk screen 154 in deposition process.For carrying out material processing in deposition process One or more (or two or more) material handling devices can be configured as in the deposition process not with Silk screen 154 contacts.Specifically, two or more material handling devices can be spaced apart with silk screen 154 for example on Fig. 2A and The first distance and/or second distance that Fig. 2 B illustrate.

In some implementations, the distance between one or more precipitation equipments 120 and substrate support 20 can be with Less than the distance between two or more material handling devices and substrate support 20.In the example of fig. 3, it is one or more The distance between a precipitation equipment 120 and substrate support 20 can correspond essentially to silk screen 154 and the combination of substrate 10 is thick Degree.Precipitation equipment can on silk screen applied force.Silk screen deforms, and is less than silk screen resistance by what precipitation equipment applied Power is passed to substrate.

In figure 3 it is shown that the distance between one or more precipitation equipments 120 and substrate 10 are filled with the first material processing Put the difference d between the distance between 130 and substrate 10.Can difference d be adjusted by mobile first material handling device 130, Such as indicated with arrow 5.Difference d can be compared with substrate 10 or alternatively can be compared with 20 (such as substrate support of substrate support The support surface for being configured for the supporting substrate in deposition process) and/or horizontal plane limit.Horizontal plane can It is limited by support surface.In some implementations, difference d may correspond to the tips of one or more precipitation equipments 120 with Height difference between the tip of first material handling device 130 (for example, in vertical direction).Difference d can 5mm with Between 25mm, specifically between 10mm and 20mm, and it more specifically can be about 15mm.This is similary Suitable for the distance between one or more precipitation equipments 120 and substrate 10 and the second material handling device (not shown) and base Difference between the distance between plate 10, and therefore repeat so.

Fig. 4 A to Fig. 4 C are shown to be used for according to further embodiments as described herein for material web to be printed in The schematic diagram of the technique head assembly of the equipment on substrate in solar cell manufacture.

According to some embodiments that can be combined with other embodiment as described herein, one or more deposition dresses It puts and is disposed between two or more material handling devices.As an example, as shown in the example of Fig. 4 A, one or more Multiple precipitation equipments include the be arranged between the first material handling device 130 and the second material handling device 132 first deposition 120 and second precipitation equipment 122 of device.In some implementations, when technique head assembly moves in a first direction, the One material handling device 130 and the first precipitation equipment 120 may be respectively used for material processing and deposition.Equally, when technique head When component moves in a second direction, the second material handling device 132 and the second precipitation equipment 122 may be respectively used at material Reason and deposition.

With reference to another example shown in figure 4B, one or more precipitation equipments are two or more precipitation equipments, And one or more material handling devices are disposed between two or more precipitation equipments.As an example, two A or more precipitation equipment includes the first precipitation equipment 120 and the second precipitation equipment 122.First material handling device, 130 He Second material handling device 132 can be arranged between the first precipitation equipment 120 and the second precipitation equipment 122.In some realizations In mode, when technique head assembly moves in a first direction, the first precipitation equipment 120 and the first material handling device 130 and/or second material handling device 132 may be respectively used for deposition and material processing.Equally, when technique head assembly is When being moved on two directions, the second precipitation equipment 122 and the first material handling device 130 and/or the second material handling device 132 It may be respectively used for deposition and material processing.

As shown in Figure 4 C, another aspect according to the present utility model provides material web being printed in for the sun The equipment on substrate in energy battery manufacture.The equipment includes technique head assembly, and the technique head assembly can be at least It moves in a first direction.Technique head assembly includes：One or more precipitation equipments, one or more deposition dress It puts and is configurable for material being transmitted to substrate from silk screen；It is one or more with one or more material handling devices Multiple material handling devices are used to handle the material on silk screen.

As an example, one or more precipitation equipments are two or more precipitation equipments, and one or more Multiple material handling devices are disposed between two or more precipitation equipments.As an example, two or more are heavy Product device includes the first precipitation equipment 120 and the second precipitation equipment 122.One or more material handling devices, such as first Material handling device 130 can be arranged between the first precipitation equipment 120 and the second precipitation equipment 122.

In some implementations, when technique head assembly moves in the first direction and a second direction, one or more Multiple material handling devices can be configurable for the material on processing silk screen.In other words, one or more material processing Device, which can be configured in both direction, carries out material processing.As an example, one or more material processing Device can be compared with first direction and second direction substantial symmetry, to allow to be handled in two directions. It can realize the compact design to technique head assembly.

Fig. 5 is shown to be used to material web being printed in for solar-electricity according to further embodiments as described herein The schematic diagram of the technique head assembly 520 of the equipment on substrate in the manufacture of pond.

Technique head assembly 520 includes the first technique head 522 and the second technique head 524.One or more depositions At least one material handling device at least one precipitation equipment and one or more material handling devices in device is attached It is connected to the first technique head 522.At least another precipitation equipment and one or more materials in one or more precipitation equipments At least another material handling device in material processing device is attached to the second technique head 524.In present exemplary, precipitation equipment Corresponding technique head is both attached to material handling device.

Although a precipitation equipment and a material handling device are shown at each technique head, but it is to be understood that The utility model is without being limited thereto, and two or more precipitation equipments and/or two or more material handling devices can be attached It is connected to the first technique head 522.It is also possible to by two or more precipitation equipments and/or two or more material processing Device could attach to the second technique head 524.

According to the other embodiment that can be combined with embodiment as described herein, equipment, and specifically technique Head assembly, including two or more technique heads.It the two or more technique heads can be controllable independently of one another It is and/or mobile.As an example, technique head assembly includes the first technique head and the second technique head.First driving dress It puts and can be configured as for example in a first direction and/or second party moves up the first technique head, and the second driving Device can be provided to for example in a first direction and/or second party moves up the second technique head.It is one or more heavy At least one precipitation equipment in product device could attach to the first technique head, and in one or more material handling devices At least one material handling device could attach to the second technique head.

As an example, technique head assembly includes the first technique head and the second technique head.It is one or more At least one precipitation equipment in precipitation equipment could attach to the first technique head.In one or more material handling devices At least one material handling device could attach to the second technique head.In present exemplary, precipitation equipment or material handling device In any one could attach to corresponding technique head.In other words, each technique head has the precipitation equipment being attached to thereon Or any one of material handling device.

Fig. 6 is shown to be used to material web being printed in for solar-electricity according to further embodiments as described herein The schematic diagram of the equipment 600 on substrate in the manufacture of pond.

According to the other embodiment that can be combined with embodiment as described herein, equipment, and specifically technique Head assembly, including two or more technique heads (also referred to as " be grouped " or " technique grouping ").It is described two or more It a technique head can be controllable and/or mobile independently of one another.As an example, technique head assembly includes the first technique head 610 and the second technique head 620.The first precipitation equipment 612 in one or more precipitation equipments is attached to the first technique head Portion 610, and the second precipitation equipment 622 in one or more precipitation equipments is attached to the second technique head 620.Equally, The first material handling device 614 in one or more material handling devices is attached to the first technique head 610, and one Or more the second material handling device 624 in material handling device be attached to the second technique head 620.

One or more precipitation equipments can be angled precipitation equipment, such as angled scraper plate or accurate scraper plate. Each angled precipitation equipment can be configurable for only being printed that (this is different from previously described in one direction Diamond scraper plate, diamond scraper plate is virtual symmetry, and is configurable for printing along forwardly and rearwardly both direction Brush).In order to perform printing in two directions, technique head assembly is included in material handling device (for example, the first material 614 and second material handling device 624 of processing unit) between two angle deposition devices (for example, the first precipitation equipment 612 With the second precipitation equipment 622).

In the deposition process that along the first direction 1 performs, it can be promoted with the second precipitation equipment 622 and second Second technique head 620 of material handling device 624.In other words, in the deposition process performed along the first direction 1, And without using the second technique head 620.First technique head 610 declines so that and the first precipitation equipment 612 contacts silk screen 154, with Material 30 is transmitted on substrate (not shown).Certain distance is equipped between the first material handling device 614 and silk screen 154, So that the first material handling device 614 for following the first precipitation equipment 612 provides substantially uniform material on silk screen 154 30 film or layer.

During the subsequent deposition process performed along the second direction opposite with first direction 1, the first technique head 610 Rise, and the second technique head 620 declines.Second precipitation equipment 622 contacts silk screen 154 so that the material on silk screen is (that is, first The preceding film or layer provided by the first material handling device 614) it is transmitted on substrate, the substrate can be same base with previous substrate Plate (for example, if performing dual printing) or another/subsequent substrate.

Although a precipitation equipment and a material handling device are shown at each technique head, but it is to be understood that The utility model is without being limited thereto, and two or more precipitation equipments and/or two or more material handling devices can be attached It is connected to the first technique head 610.It is also possible to by two or more precipitation equipments and/or two or more material processing Device is attached to the second technique head 620.

According to some embodiments, two or more technique heads (such as the first technique head 610 and the second technique head Portion 620) it can move or lift in vertical direction.Additionally or alternatively, two or more technique heads can by with Mobile one or more precipitation equipments and/or one or more material handling devices are set to, as previously described.

Fig. 7 shows the precipitation equipment and material during typography according to further embodiments as described herein The schematic diagram of the arrangement of processing unit.Precipitation equipment can be angled scraper plate.

Fig. 7 is shown with one or more material handling devices (such as the first material handling device 712) and one Or more precipitation equipment (such as the first precipitation equipment 720) illustrative processes head assembly.One or more deposition dresses It puts, specifically the tip 722 of one or more precipitation equipments, (can not show compared with substrate support and/or silk screen Go out) it is angled.Angle [alpha] can be limited compared with the surface of substrate support and/or the surface 12 of substrate.Show as one Example, angle [alpha] can be limited between the line of symmetry at tip 722 and the surface of substrate support and/or the surface of substrate 12.One In a little realization methods, angle [alpha] can be between 0 ° with 90 °, specifically between 10 ° with 80 °, tool Be body 50 ° with 80 ° between, and specifically in 60 ° with 70 ° between.As an example, Angle can be 60 ° or 70 °.

In some implementations, precipitation equipment (such as the first precipitation equipment 720) includes tip 722 and connecting element 724, tip 722 is connected to technique head assembly 710 (for example, the main body of technique head assembly 710 by the connecting element 724 714).Connecting element 724 can be curved so that tip 722 is angled compared with the surface 12 of such as substrate.Curved company Connect element also allow to make precipitation equipment for example in a first direction/second direction on ductility minimize so that can realize pair The compact design of technique head assembly 710.Specifically, according to some embodiments, the width w at tip 722 can be minimized, from And allow the compact design to technique head assembly.As an example, the first material handling device 712 and the first precipitation equipment The distance between 720 or spacing (for example, in the horizontal direction) can be 40mm or smaller, and specifically 30mm or smaller. Tip 722 in a first direction/second direction (for example, horizontal direction) on ductility can be 30mm or smaller, and specifically It is 20mm or smaller, such as 16mm.

Fig. 8 A and Fig. 8 B are shown to be used to material web being printed in for the sun according to embodiment as described herein The schematic diagram of the technique head assembly 800 of the equipment on substrate in energy battery manufacture.

Technique head assembly 800 includes technique head 810.Technique head 810 may be connected to head support 812.One In a little realization methods, technique head 810 can be rotationally connected to head support 812.Specifically, head support 812 Rotation axis 801 can be provided, technique head 810 can be rotated around rotation axis 801, such as so as to 810 phase of adjusting process head For the angle of substrate and/or substrate support.Rotation axis 801 can be substantially horizontal rotation axis.In some embodiments In, rotation axis 801 may be substantially perpendicular to first direction and second direction.

In some implementations, equipment includes one or more revolving actuators, one or more rotation Actuator is configured around 801 rotating technics head assembly 800 of rotation axis, specifically technique head 810.It is one or more Revolving actuator can be configured as adjusting process head assembly 800 and/or technique head 810 compared with silk screen 154 and/or substrate And/or the angle of substrate support.Angle [alpha] between silk screen and/or substrate and/or substrate support and technique head 810 ' it can To be limited compared with vertical plane.When moving in a first direction, technique head 810 can have angle+α ', this angle It may correspond to the inclination of technique head 810 in the clockwise direction.

When moving in a second direction, technique head 810 can have angle-α ', this angle may correspond to technique head The inclination of portion 810 in the counterclockwise direction.Angle+α ' and-α ' can be compared with vertical plane or vertical direction into 70 ° or more It is small, specifically 60 ° or smaller, more specifically 40 ° or smaller, and even more specifically 20 ° or smaller.Show as one Example, angle+α ' and-α ' can be between 20 ° and 70 °, and specifically in the scope between 40 ° and 70 ° It is interior.Fig. 8 A show about 0 ° of angle [alpha] ', and Fig. 8 B are exemplarily illustrated the angle of+α '.

Technique head assembly 800 includes one or more precipitation equipments (such as the first precipitation equipment 820 and the second deposition Device 822) and one or more (or two or more) material handling device (such as the first material handling device 830 With the second material handling device 832).One or more precipitation equipments and one or more material handling devices can bases Embodiment configuration as described herein.

According to some embodiments that can be combined with other embodiment as described herein, equipment, specifically technique Head assembly 800, including actuator, the actuator is configurable for moving one or more precipitation equipments And/or one or more material handling devices (such as the first material handling device 830 and the second material handling device 832). One or more precipitation equipments can be scraper plate, such as rectangle scraper plate.Scraper can have tip, such as rectangular-shaped tip. According to some embodiments that can be combined with other embodiment as described herein, one or more precipitation equipments can be base It is symmetrical in sheet.For example, one or more precipitation equipments can have the tip of substantial symmetry so that identical (for example, It is single) precipitation equipment can be used for being printed with second direction along the first direction.

In some embodiments, actuator includes one or more first actuators, one or more A first actuator is configured to adjust between two or more material handling devices and silk screen 154 and/or substrate support Distance, and optionally adjust angle of one or more processing units compared with silk screen and/or substrate support.For example, One or more first actuators may include the first actuating unit, and first actuating unit is configured to adjustment first The distance between material handling device 830 and silk screen (such as first distance) and the first material handling device 830 are compared with silk screen 154 and/or substrate support angle (such as first angle) in it is at least one.One or more first actuators can wrap Include the second actuating unit, second actuating unit be configured to the second material handling device of adjustment 832 and silk screen 154 it Between distance (such as second distance) and the second material handling device 832 compared with silk screen 154 and/or substrate support angle It is at least one in (such as third angle).In some implementations, one or more first actuators only can be moved linearly Dynamic processing unit.Another actuator can be provided, another actuator be configured as changing entire technique head assembly (such as Around rotation axis) angle.

In some implementations, one or more first actuators are configured as adjusting at two or more materials Manage the distance between device and silk screen.As an example, one or more first actuators can make one or more materials Material processing device (such as the first material handling device 830 and the second material handling device 832) is substantially parallel relative to each other It moves on ground.One or more first actuators can be linear actuators, such as linear electric machine.

Additionally or alternatively, actuator includes one or more second actuators, one or more Second actuator be configured to adjust one or more precipitation equipments and silk screen 154 and/or substrate and/or substrate support it Between distance, and optionally adjust one or more precipitation equipments compared with the angle of silk screen and/or substrate support (such as Second angle).For example, one or more second actuators can be configured as one or more precipitation equipments (such as One precipitation equipment 820 and/or the second precipitation equipment 822) it moves to be contacted with silk screen 154 towards silk screen 154.It is one or more A second actuator can be configured to adjust the pressure that one or more precipitation equipments are applied on silk screen.One or More second actuators can be configured as being arranged essentially parallel to by the mobile side of one or more first actuators offer To direction on mobile one or more precipitation equipments.It can be by planting one or more first actuators and one or more Multiple second actuators come the distance between tip and silk screen 154 of control process device (for example, " d1 " in Fig. 2 B).

One or more material handling devices and one or more precipitation equipments are compared with silk screen 154 and/or substrate And/or the distance between substrate support can limit in horizontal or vertical plane.It is also possible to compared with vertical plane or Horizontal plane limits the angle of corresponding material handling device and precipitation equipment compared with silk screen and/or substrate support.

According to some embodiments that can be combined with other embodiment as described herein, equipment is configured as example existing At least one material processing dress in one or more material handling devices is adjusted before, during and/or after depositing operation One or more processing parameters put.One or more processing parameters are selected from the group being made of following item：At least one material Material processing device and the distance between silk screen and/or substrate support (the such as first distance and/or second distance) and at least one A material handling device compared with silk screen and/or substrate support angle.

According to some embodiments that can be combined with other embodiment as described herein, equipment is configured as example existing One or more deposition parameters of one or more precipitation equipments are adjusted before, during and/or after depositing operation.One Or more deposition parameter can be selected from the group being made of following item：At least one deposition in one or more precipitation equipments Device and at least one precipitation equipment in the distance between silk screen and/or substrate support, one or more precipitation equipments Compared with the angle of silk screen and/or substrate support, technique head assembly (for example, technique head) compared with silk screen and/or It is heavy that at least one precipitation equipment in the translational speed of substrate support and one or more precipitation equipments for example acts on The pressure on silk screen used in product technique.

In some implementations, in deposition process, especially in Material handling processes, adjustment is one or more At least one processing parameter in a processing parameter.Additionally or alternatively, in deposition process, adjustment is one or more At least one deposition parameter in a deposition parameter.Conduction can be improved to the real-time adjustment of processing parameter and/or deposition parameter The quality of line pattern.According to some embodiments, can be based on or according to one or more deposition parameters adjustment one or more At least one processing parameter in multiple processing parameters.

Fig. 9 shows the schematic diagram of the material handling device 900 according to embodiment described herein, the material processing dress Putting 900 has blade.

In some implementations, the geometry of material handling device 900 is adaptable to silk screen profile.Show as one Example, material handling device 900 can in the geometry on the direction of print direction (first direction and/or second direction) It is adapted to the silk screen profile of deformation.Geometry can be designed for optimum value (for example, 2mm or 3mm), and be suitble to other Value.

According to some embodiments that can be combined with other embodiment as described herein, at two or more materials Managing at least one material handling device in device has blade either blade, and the blade is configurable for processing silk screen Material on 154.Blade can be on the direction different from first direction (for example, in the side substantially perpendicular to print direction It is upwards) not straight.As an example, blade can have contact portion, and the contact portion is configured as contact silk screen 154 material is transmitted on substrate.Contact portion can be not straight or non-linear on the direction different from first direction 's.Direction may be substantially perpendicular to first direction (such as horizontal direction).

In some implementations, blade 900 has in first edge part 910, second edge portion 912 and the Center section 920 between one marginal portion 910 and second edge portion 912.First edge part 910 and second edge portion 912 can tilt compared with center section 920.As an example, center section 920 can substantially linearly and/or substantially On parallel to substrate surface and/or substrate support surface extend.First edge part 910 and second edge portion 912 It can be inclined upwardly from center section 920.For example, first edge part 910 and second edge portion 912 can be away from substrates And/or it is tilted in the substantially perpendicular directions of substrate support.

According to some embodiments, first edge part 910 and second edge portion 912 compared with substrate surface and/ Or the angle of inclination on the surface (for example, horizontal plane) of substrate support is equal to or more than surface of the silk screen 154 compared with substrate And/or the angle of inclination (off-network angle (snap-off angle)) on the surface (for example, horizontal plane) of substrate support.If The angle of inclination of marginal portion is more than the angle of inclination of silk screen 154, then marginal portion will not contact the edge part of silk screen 154 Point and can be to avoid the damage to silk screen 154.

In some implementations, the off-network distance of silk screen 154 is defined as undeformed (flat) silk screen and and material Difference between the minimum point for the deformation silk screen that processing unit 900 contacts.According in some embodiments, the inclination of marginal portion Angle can be selected for predetermined off-network value (such as 2mm or 3mm).It specifically, can be to the angle of inclination of marginal portion It makes choice so that for off-network value (such as 10mm or smaller, the specifically 5mm, and specifically 3mm of preset range Or it is less, and more specifically 2mm or less), marginal portion will not contact silk screen 154.

Figure 10 shows the schematic diagram of the manufacture of solar cells equipment 1000 according to embodiment as described herein.

Manufacture of solar cells equipment 1000 includes one or more deposition stations 1200 and according to implementation described herein The equipment 1250 for being used to be printed in material web on the substrate in manufacturing for solar cell of mode.It can be by equipment 1250 It is arranged at least one deposition station in one or more deposition stations 1200.

Manufacture of solar cells equipment 1000 may include one in one or more 1200 upstreams of deposition station and/or downstream A or more other stations.As an example, manufacture of solar cells equipment 1000 may include the first inspection station (first Inspection station) 1100, the first inspection station 1100 will be input to one or more deposition stations 1200 for checking In substrate.Manufacture of solar cells equipment 1000 may include dry station 1300, dry station 1300 for it is dry at one or more The material being deposited in multiple deposition stations 1200 on substrate.In some embodiments, manufacture of solar cells equipment 1000 can Including the second inspection station 1400, the second inspection station 1400 is deposited on substrate for checking in one or more deposition stations 1200 On conducting wire pattern.

Manufacture of solar cells equipment 1000, specifically with the one or more of equipment according to the present utility model Deposition station 1200 can be for producing the larger production system of solar cell ((in-line) production system of such as connecting) Part.

In the technological process of the utility model, will have in a first direction along substrate support one or more The technique head assembly of precipitation equipment and one or more (or two or more) material handling devices is at least from first Position is moved to the second position, to use at least one precipitation equipment in one or more precipitation equipments by material from silk Net be transmitted to substrate and using the first material in one or more (or two or more) material handling devices at Manage processing of the device execution to the material on silk screen.

At least during technique head assembly is moved to the second position from first position, the transmission of material can be performed And processing.In some implementations, moving process head assembly in a second direction that is opposite the first direction, to use The second material handling device in one or more (or two or more) material handling devices is performed on silk screen The transmission (such as printing) and processing of material.

The transmission and processing of material can be during at least a portion of the duration of depositing operation, and specifically exist It is performed simultaneously during the basic entire duration of depositing operation.Two or more material handling devices can be for example in silk screen It is upper that substantially uniform material membrane or layer are provided.Optionally, one or more material handling devices can recycle excessive from silk screen Material.

The equipment according to the present utility model for being used to material web being printed on substrate uses moveable technique head Component carries out silk-screen printing.For example, layer of material can be provided on silk screen.Can use can be the precipitation equipment of scraper plate by material Material is transmitted to substrate from silk screen.Material handling device can follow precipitation equipment, and another layer of material is provided on silk screen, To be deposited in such as subsequent substrate.The technique head assembly of the utility model can have two or more materials Processing unit so that material processing can perform in two directions, i.e., two-way execution.Because at least material processing can be two A side upward rather than only performing in one direction, it is possible to increase the productivity and/or output of equipment.

Although the above is directed to the embodiment of the utility model, can the basic of the utility model be not being departed from yet Design other and further embodiment of the utility model in the case of scope, and the scope of the utility model by with Attached claims determine.

Claims (15)

1. a kind of equipment for being used to be printed in material web on the substrate in manufacturing for solar cell, the equipment bag It includes：

Technique head assembly, the technique head assembly can be moved at least in a first direction, the technique head assembly bag It includes：

One or more precipitation equipments, one or more precipitation equipment are configurable for the material from silk screen It is transmitted to the substrate；With

Two or more material handling devices, the two or more material handling devices are configurable for described in processing The material on silk screen.

2. equipment as described in claim 1, which is characterized in that one or more precipitation equipment is disposed in described two Between a or more material handling device.

3. equipment as described in claim 1, which is characterized in that one or more precipitation equipment is two or more Precipitation equipment, and wherein the two or more material handling devices are disposed in the two or more precipitation equipments Between.

4. equipment as described in claim 1, which is characterized in that at least one in the two or more material handling devices A material handling device has blade, and the blade is configurable for handling the material on the silk screen, and wherein The blade is not straight on the direction different from the first direction.

5. equipment as claimed in claim 4, which is characterized in that the direction is perpendicular to the first direction.

6. equipment as claimed in claim 4, which is characterized in that the blade has first edge part, second edge portion And the center section between the first edge part and the second edge portion, and wherein described first edge portion Divide and the second edge portion is tilted compared with the center section.

7. equipment as described in claim 1, further comprises driving device, the driving device is configurable for along base Plate support moves up technique head group in said first direction and in second party opposite to the first direction Part.

8. equipment as claimed in claim 7, which is characterized in that the equipment is configured in the first direction and moves up It is filled during moving the technique head assembly using the first material processing in the two or more material handling devices The material handled on the silk screen is put, and wherein described equipment is configured in the second party and moves up institute It is used during stating technique head assembly at the second material handling device in the two or more material handling devices Manage the material on the silk screen.

9. equipment as claimed in claim 8, further comprise one or more first actuators, one or more First actuator be configured as adjusting at least one material handling device in the two or more material handling devices with The distance between described silk screen, wherein one or more the first actuator includes the first actuating unit and the second actuating Device unit, first actuating unit are configured as adjusting first between first material handling device and the silk screen Distance, second actuating unit be configured as adjusting between second material handling device and the silk screen second away from From.

10. equipment as described in claim 1, which is characterized in that the silk screen is arranged on substrate support and the technique head Between parts, wherein one or more precipitation equipment includes scraper plate, and wherein described scraper plate is configured as and institute Mesh contacts are stated to be printed.

11. equipment as described in claim 1,

Wherein described technique head parts include the first technique head and the second technique head, wherein the two or more materials At least one material handling device in material processing device is attached to the first technique head, and the two or more At least another material handling device in material handling device be attached to the second technique head or

Wherein described technique head parts include technique head, wherein the two or more material handling devices are attached to institute State technique head.

12. equipment as described in claim 1, which is characterized in that the equipment is configured as：

To have in said first direction along substrate support one or more precipitation equipment and it is described two or The technique head assembly of more material handling devices is at least moved to the second position from first position, described to use The material is transmitted to the substrate simultaneously by least one precipitation equipment in one or more precipitation equipments from the silk screen And it is performed using the first material handling device in the two or more material handling devices to described on the silk screen The processing of material.

13. equipment as claimed in claim 12, which is characterized in that the equipment is configured to：

The technique head assembly is moved up in second party opposite to the first direction, it is described two or more to use The second material handling device in multiple material handling devices performs the transmission and processing to the material on the silk screen.

14. equipment as claimed in claim 12, which is characterized in that the transmission and processing of the material continue in depositing operation It is performed simultaneously during at least a portion of time.

15. a kind of manufacture of solar cells equipment, the manufacture of solar cells equipment includes：

One or more deposition stations,

Equipment according to any one of claim 1 to 14, the equipment is in one or more deposition station At least one deposition station in.