CN109195801A - For material web is printed in be used for solar battery manufacture in substrate on equipment, manufacture of solar cells equipment and be used to for material web being printed in be used for solar battery manufacture in substrate on method - Google Patents
For material web is printed in be used for solar battery manufacture in substrate on equipment, manufacture of solar cells equipment and be used to for material web being printed in be used for solar battery manufacture in substrate on method Download PDFInfo
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- CN109195801A CN109195801A CN201780004974.9A CN201780004974A CN109195801A CN 109195801 A CN109195801 A CN 109195801A CN 201780004974 A CN201780004974 A CN 201780004974A CN 109195801 A CN109195801 A CN 109195801A
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- China
- Prior art keywords
- material handling
- equipment
- silk screen
- technique head
- substrate
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F15/00—Screen printers
- B41F15/08—Machines
- B41F15/0881—Machines for printing on polyhedral articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F15/00—Screen printers
- B41F15/14—Details
- B41F15/40—Inking units
- B41F15/42—Inking units comprising squeegees or doctors
- B41F15/423—Driving means for reciprocating squeegees
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F15/00—Screen printers
- B41F15/14—Details
- B41F15/44—Squeegees or doctors
- B41F15/46—Squeegees or doctors with two or more operative parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41P—INDEXING SCHEME RELATING TO PRINTING, LINING MACHINES, TYPEWRITERS, AND TO STAMPS
- B41P2200/00—Printing processes
- B41P2200/40—Screen printing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41P—INDEXING SCHEME RELATING TO PRINTING, LINING MACHINES, TYPEWRITERS, AND TO STAMPS
- B41P2215/00—Screen printing machines
- B41P2215/50—Screen printing machines for particular purposes
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1216—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing
- H05K3/1233—Methods or means for supplying the conductive material and for forcing it through the screen or stencil
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Photovoltaic Devices (AREA)
- Screen Printers (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
It provides for material web to be printed in the equipment (100) being used on the substrate (10) in solar battery manufacture.Equipment (100) includes technique head assembly (110) and driving device (140).Technique head assembly (100) includes: one or more precipitation equipments (120), and one or more precipitation equipments (120) are configurable for material being transmitted to substrate (10) from silk screen (154)；With one or more material handling devices (130), one or more of material handling devices (130) are used to handle the material on silk screen (154).The driving device (140) is configurable for along moving process head assembly (110) on substrate support (20) in a first direction (1), so that material is transmitted and handled in deposition process.
Description
Technical field
The embodiment of present disclosure is related to for material web to be printed in the base being used in solar battery manufacture
It equipment, manufacture of solar cells equipment on plate and is used in solar battery manufacture for material web to be printed in
Method on substrate.
Background technique
Solar battery is the photovoltaic device that sunlight is directly changed into electric power.In this field, it is known to use deposition
Technology, specifically printing technology produces solar battery in crystalline silicon substrates, thus in the front surface of solar battery
Realize selective emitter structures.Process cycle may include at least one printing operation and optional another material processing operation,
In the printing operation, material is deposited on substrate by precipitation equipment.The productivity and/or output of equipment can
It can be limited by the cycle time of the process cycle.
In view of the foregoing, being used for too for material web to be printed at least some of this field problem is overcome
It is positive can new equipment on the substrate in battery manufacture, manufacture of solar cells equipment and for material web to be printed in use
The method on substrate in solar battery manufacture is beneficial.The target of present disclosure is in particular, in that providing can be reduced
The cycle time of process cycle is to increase the device and method of at least one of productivity and output.
Summary of the invention
In view of the foregoing, it provides for material web to be printed in setting on the substrate being used in solar battery manufacture
Standby, manufacture of solar cells equipment and for material web is printed in be used for solar battery manufacture in substrate on
Method.Other aspect, benefit and the feature of present disclosure are aobvious and easy from claims, specification and attached drawing
See.
According to one aspect of the present disclosure, it provides and is used in solar battery manufacture for material web to be printed in
Substrate on equipment.The equipment includes technique head assembly and driving device.The technique head assembly include: one or
Multiple precipitation equipments, one or more of precipitation equipments are configurable for the material being transmitted to the base from silk screen
Plate；With one or more material handling devices, one or more of material handling devices are used to handle the institute on the silk screen
State material.The driving device is configurable for moving technique head group in a first direction along substrate support
Part, so that the material is transmitted and handled in deposition process.
According to another aspect of the present disclosure, a kind of manufacture of solar cells equipment is provided.The solar battery is raw
Producing equipment includes one or more deposition stations, and is used for too according to embodiment described herein for material web to be printed in
The equipment on substrate in positive energy battery manufacture.
According to another aspect of the present disclosure, it provides and is used in solar battery manufacture for material web to be printed in
Substrate on method.The method includes having one or more precipitation equipments and one or more material handling devices
Technique head assembly is at least moved to the second position from first position in a first direction along substrate support, to use one
The material is sent to the substrate from silk screen by least one precipitation equipment in a or multiple precipitation equipments, and uses one
Or at least one material handling device in multiple material handling devices executes the processing of the material on the silk screen,
In executed during the technique head assembly is moved to the second position from the first position it is described transmission and it is described
Processing.
Embodiment is also related to the equipment for carrying out disclosed method, and including for executing each described method
The part of appliance of aspect.In terms of these methods can with hardware element, by the computer of suitable software programming, by both above-mentioned
Any combination of mode and be performed, or be performed in any other way.In addition, according to the embodiment of disclosure
Further relate to the method for operating described equipment.The method for operating described equipment includes for carrying out institute
The method aspect stating each function of equipment and crossing.
Detailed description of the invention
Therefore, in order to the features described above of present disclosure, the present disclosure summarized above is understood in detail
It is more specific description be referred to embodiment progress.Attached drawing is related to each embodiment of present disclosure, and describes
It is as follows:
Fig. 1, which is shown, is used for solar battery manufacture for material web to be printed according to embodiment described herein
In substrate on equipment schematic diagram；
Fig. 2A and Fig. 2 B is shown according to embodiment described herein for carrying out the technique head of printing and material processing
The schematic diagram of parts, the technique head assembly move in a first direction and in a second direction respectively；
Fig. 3, which is shown, is used for solar-electricity for material web to be printed according to further embodiments as described herein
The schematic diagram of the equipment on substrate in the manufacture of pond；
Fig. 4 A and Fig. 4 B, which are shown, to be used for according to further embodiments as described herein for material web to be printed in
The schematic diagram of the technique head assembly of the equipment on substrate in solar battery manufacture；
Fig. 5, which is shown, is used for solar-electricity for material web to be printed according to further embodiments as described herein
The schematic diagram of the technique head assembly of the equipment on substrate in the manufacture of pond；
Fig. 6, which is shown, is used for solar-electricity for material web to be printed according to further embodiments as described herein
The schematic diagram of the equipment on substrate in the manufacture of pond；With
Fig. 7 shows the schematic diagram of the manufacture of solar cells equipment according to embodiment described herein.
Fig. 8, which is shown, is used for solar-electricity for material web to be printed according to further embodiments as described herein
The flow chart of the method on substrate in the manufacture of pond.
Specific embodiment
It reference will now be made in detail the various embodiments of present disclosure, one or more examples of the embodiment are attached
It is shown in figure.In the description below to attached drawing, identical appended drawing reference refers to identical component.In general, it only describes
At difference between each embodiment.Each example is provided in a manner of explaining present disclosure, and is not intended to conduct
The limitation of present disclosure.In addition, the feature of part for illustrating or being described as an embodiment can be used for other embodiment party
Formula generates another embodiment in conjunction with other embodiment.It is expected that specification includes such modifications and variations.
Process cycle for forming conducting wire pattern on substrate may include being deposited material using precipitation equipment
At least one depositing operation on substrate and at least another technique using material handling device.At least one depositing operation and
At least another technique can be sequentially performed, that is, by using with the precipitation equipment and material handling device being attached to thereon
Technique head execute two strokes (stroke).Depositing operation and the dual stroke of another technique increase the week of process cycle
Time phase.The productivity and/or output of equipment are reduced.
Moveable technique head is used for material web to be printed in the equipment on substrate according to present disclosure
Component, the moveable technique head assembly are configured with precipitation equipment and execute material deposition on substrate, and same
When using material handling device execute material processing.It as an example, can be in the same one stroke of technique head assembly or shifting
Deposition and material processing are carried out during dynamic.The cycle time of process cycle can be reduced, and the production of equipment can be increased
Rate and/or output.In particular, one layer of material can be provided on silk screen.It (can be scraper plate that precipitation equipment, which can be used,
(squeegee)) material is transmitted to substrate from silk screen.Material handling device can follow precipitation equipment, and above mention in silk screen
For another layer of material, for being deposited on (for example) subsequent substrate.
Fig. 1, which is shown, is used for solar battery manufacture for material web to be printed according to embodiment described herein
In substrate 10 on equipment 100 schematic diagram.Material, which can be, to be suitable for forming conducting wire figure on the surface of substrate 10 12
The material of case (such as finger-shaped material and/or busbar (busbar)).As an example, material can be paste (paste), such as
Silver paste.
Equipment 100 includes technique head assembly 110 and driving device.Technique head assembly 110 includes: one or more heavy
Product device 120, one or more of precipitation equipments 120 are configurable for material being transmitted to substrate 10 from silk screen 154；With
One or more material handling devices 130, one or more of material handling devices 130 are used to handle the material on silk screen 154
Material.Driving device is configurable for along moving process head assembly 110 or technique on substrate support 20 in a first direction 1
Material is transmitted to base from silk screen 154 by a part (the technique head of such as described technique head assembly) of head assembly 110
Plate 10 and the material in deposition process on processing silk screen 154.In some implementations, one or more deposition dresses
Setting 120 can be one or more printing equipments, such as scraper plate.Material processing (can be described as " cover ink stage (flood phase) ")
Substantially uniform material layer can be provided on silk screen, the substantially uniform material layer, which is sent to, (for example) to be followed through locating
The subsequent substrate of the substrate of reason.
Deposition (such as printing) and material processing are executed in a stroke or in the period.In other words, it may be performed simultaneously
Deposition and material processing.Combination cover ink movement during depositing operation can reduce the process time, such as critical path time.
As an example, critical path time can reduce about one third.
In the example of fig. 1, technique head assembly 110 includes technique head 140, such as a single technique head,
In at least one precipitation equipment and one or more material handling devices 130 in middle one or more precipitation equipment 120 extremely
A few material handling device is attached to technique head 140.However, present disclosure is not limited to this, and technique head
Component may include two or more technique heads, and there is be attached to thereon corresponding to sink on the two or more technique heads
Product device and/or material handling device.There are two the examples of the technique head assembly on technique head to show in Fig. 4 A and Fig. 4 B for tool
Out.
In some implementations, in the duration of the depositing operation executed using one or more precipitation equipments
Deposition and material processing are performed simultaneously during at least part.It as an example, can be in the duration of depositing operation
50% or more, specifically material processing is executed during 70% or more, and more specifically 90% or more.According to some realities
Apply mode, deposition and material processing depositing operation the basic entire duration (duration of such as depositing operation
100%) it is performed simultaneously during.Depositing operation can correspond to the stroke or movement executed by technique head, such as
Between one position A and second position B.The distance between first position A and second position B can be equal to or are greater than substrate 10 or conduction
The expanded range (extension) of line pattern, so that one layer of conducting wire pattern or conducting wire pattern can be at one
It is deposited on the substrate 10 in stroke.
Equipment 100 may include screen apparatus 150, and the screen apparatus 150 is arranged in substrate support 20 and technique head
Between component 110.Screen apparatus 150 may include frame 152 and the silk screen 154 for being attached to frame 152.According to can be with this paper institute
The some embodiments for the other embodiment combination stated, one or more precipitation equipments 120 can be one or more printing dresses
It sets.One or more printing equipments can respectively include scraper plate.Scraper plate can be configured as contact silk screen 154 to be printed.
In some embodiments, the nib contacts silk screen 154 of the scraper plate and (urge) material to be printed brushed on substrate 10 is pushed
Material is across silk screen 154.Scraper plate can be diamond scraper plate or angled scraper plate.
Silk screen 154 may include net, mask to print, sheet material, metal sheet, plastic sheet, plate, sheet metal and plastic plate
At least one of material.In some embodiments, silk screen 154 limits the pattern for corresponding to the structure to be printed on substrate,
Wherein pattern may include at least one of hole, slit, notch or other holes.Pattern can correspond to be printed in substrate 10
On conducting wire pattern, the finger-shaped material and/or busbar of such as solar battery.As an example, silk screen 154 can have
The wire mesh (wire mesh) for limiting the opening of conducting wire pattern and being arranged in opening.By using one or more
Material handling device 130 can be provided using material on the substrate 10 to be deposited as substantially uniform layer in silk screen 154
On.Since there are wire mesh, material does not flow through opening.In deposition process, precipitation equipment (such as scraper plate) meeting pair
Material applied force or pressure and push material pass through opening so that material is sent to substrate 10 (that is, being deposited on substrate 10
On).
According to some embodiments that can be combined with other embodiment as described herein, one or more material processing
Device 130, which is configured on silk screen 154, provides substantially uniform material membrane.In some implementations, at material
Reason can be such that material is transmitted on substrate 10 in optimal manner.Optionally or alternatively, one or more material handling devices 130
The excess stock being configurable on recycling substrate 10 and/or silk screen 154.In some implementations, one or more materials
Material processing device 130 can be flood bar (flood bar).Material processing is referred to alternatively as " cover ink (flooding) ".
According to some embodiments that can be combined with other embodiment as described herein, driving device is configured as using
By technique head assembly 110, at least from first position, A is moved to second position B in a first direction 1, so as at least from
One position A executes the material on silk screen 154 deposition/transmission and processing during being moved to second position B is (for example, divide
Cloth).It can correspond respectively to from first position A to the movement of second position B or vice versa by technique head assembly 110 or its work
The stroke (such as first stroke and second stroke) that skill head executes.First direction 1 can be the water perpendicular to vertical direction 4
Square to 3.
First position A and second position B can be defined as technique head assembly 110 (for example, technique head 140) relative to
The corresponding position of at least one of substrate 10, substrate support 20 and/or silk screen 154.The position of technique head assembly 110 can
Then to limit one or more precipitation equipments 120 and one or more material handling devices 130 relative to substrate 10, substrate branch
The corresponding position of at least one of support member 20 and/or silk screen 154.
As an example, when technique head assembly 110 or technique head 140 are in first position A and along first
When direction 1 (" moving direction ") is mobile, a material handling device in one or more material handling devices 130 can be in place
The precipitation equipment set in the place (a) and one or more precipitation equipments 120 can be at position (b).Equally, work as technique head
When parts 110 or technique head 140 are in second position B and move along second direction 2 (" moving direction "), at material
Reason device can be at position (c) and precipitation equipment can be at position (d).When technique head assembly 110 is from first position A
When reaching second position B, material handling device is moved to position (c) from position (a), and precipitation equipment is mobile from position (b)
To position (d).In some implementations, if deposition comparably operates in two directions, precipitation equipment will not change
Displacement is set.As an example, in the case where asymmetrical precipitation equipment (such as angled scraper plate), a precipitation equipment
It increases, and another precipitation equipment declines.
According to some embodiments that can be combined with other embodiment as described herein, driving device is configured as using
In the moving process head assembly 110 in the second direction opposite with first direction 1, so as in moving process in a second direction
Middle execution deposition and material processing.The movement of technique head assembly 110 in a second direction can correspond to technique head assembly 110 from
Movement of the second position B to first position A.Second direction can be the horizontal direction 3 perpendicular to vertical direction 4.
In some implementations, movement of the technique head assembly 110 between first position A and second position B, such as
First stroke and/or second stroke can correspond to 400mm or smaller, specifically 300mm or smaller and more specifically 200mm or
Smaller stroke distances.As an example, stroke distances can be between 150mm to 300mm, and can have
It is to body about 220mm.Stroke distances can be equal to or greater than substrate 10 or the expanded range of conducting wire pattern.First position A and
Second position B can relative between first position A and second position B central point (and specifically as work as technique head
The position (b) of precipitation equipment is deposited with when technique head assembly 110 is in the second position B when component 110 is in first position A
Central point between the position (d) of device) and be defined.As an example, when between first position A and second position B
When stroke distances are 220mm, when technique head assembly 110 be in first position A, the position (b) of precipitation equipment can be-
110mm, and when technique head assembly 110 is in second position B, the position (d) of precipitation equipment can be+110mm.One
In a little embodiments, one or more reference positions are provided.One or more of reference positions may be, for example, substrate center (zero
Point position), the position (for example, -110mm) of precipitation equipment when stroke starts and the precipitation equipment when stroke is completed
Final position (for example,+110mm).Cream volume (roll of paste) can be moved back from the position -110mm to the position+110mm
It is dynamic.Since processing unit can be equipped with offset (for example, 30mm) with precipitation equipment, technique head assembly 110 can execute volume
It is outer to operate so that cream volume returns to accurate location.
It, can be between one or more precipitation equipments and one or more material handling devices according to some embodiments
Equipped with distance or spacing.In particular, distance can be equipped between adjacent or neighbouring precipitation equipment and material handling device
Or spacing.As an example, in a first direction on 1, at a distance from precipitation equipment is between adjacent material handling device or
Spacing can be 50mm or smaller, specifically 40mm or smaller, and can be more specifically about 30mm.Distance or spacing can be
Material gathers (" cream volume ") and provides space.
In some embodiments, equipment 100 is configured as at least carrying out dual printing.As an example, conductor wire
Road pattern (finger-shaped material and/or busbar of such as solar battery) may include two or more material layers.First material layer
It can print on the substrate 10, and second material layer can be at least partly printed on the top of first material layer, so as to shape
At conducting wire pattern.In some implementations, equipment 100 can print the first material in the first deposition process
Layer, the first depositing operation includes from first position A to the movement of second position B or first stroke.In some embodiments, if
Standby 100 can print second material layer in the second deposition process, and the second depositing operation includes from second position B to first
The movement or second stroke of position A.However, present disclosure is not limited to this, and can use in same direction (for example,
First direction 1 or second direction) mobile technique head assembly 110 executes depositing operation.In some embodiments, substrate quilt
It alternately prints, for example, a substrate uses first direction 1, another substrate is using second direction 2 etc. (for example, for each
Processing or printing station).
In some implementations, first direction 1 and second direction 2 can be substantially horizontal direction.Term " level side
To " be understood to be different from " vertical direction ".That is, " horizontal direction " is related to the essence of such as technique head assembly 110
The movement of upper level, wherein being still considered as with the several years deviation (for example, reaching 5 ° or even up to 10 °) in exact level direction
It is " substantially horizontal direction ".Vertical direction 4 can be substantially parallel to gravity.
According to some embodiments that can be combined with other embodiment as described herein, equipment 100, and specifically
It is technique head assembly 110, further includes actuator, the actuator is configurable for mobile one or more heavy
Product device 120 and/or one or more material handling devices 130.As an example, actuator includes one or more
First actuator, one or more of first actuators are configured as adjusting at least one of following item: one or more
At least one material handling device and the distance between silk screen 154 and/or substrate support 20 in material handling device 130,
Angle at least one material handling device relative to silk screen 154 and/or substrate support 20.Additionally or alternatively, institute
Stating actuator includes one or more second actuators, and it is following that one or more of second actuators are configured as adjustment
At least one of: at least one precipitation equipment and silk screen 154 and/or substrate branch in one or more precipitation equipments 120
The angle of the distance between support member 20 and at least one precipitation equipment relative to silk screen 154 and/or substrate support 20.
In some implementations, it is for example moved between first position A and second position B in technique head assembly 110
During, it can adjust or control at least one material handling device and silk screen in one or more material handling devices 130
The distance between 154 and/or substrate support 20 (for example, distance in vertical direction).As an example, can pass through
The upright position of at least one material handling device is adjusted to adjust distance.Adjustment upright position may insure at least one in real time
Material handling device will not interfere silk screen 154, especially in silk screen 154 because silk screen 154 and one or more precipitation equipments 120 connect
When touching and deforming.At least one material handling device according to some embodiments, in one or more material handling devices 130
It is adjustable to the distance between silk screen 154 and/or substrate support 20 and follows silk screen profile (screen profile).Tool
Body, the upright position of at least one material handling device can be controlled or be adjusted to follow the silk screen profile.As one
Example can adjust or control at least one material handling device and silk screen 154 in the moving process of technique head assembly 110
And/or the distance between substrate support 20, to keep its substantial constant.
Fig. 2A and Fig. 2 B is shown according to embodiment described herein for being deposited at (such as printing) and material
The schematic diagram of the technique head assembly 220 of reason, the technique head assembly 220 move up on 1 and in second direction 2 in a first direction
It is dynamic.
According to some embodiments that can be combined with other embodiment as described herein, one or more material processing
Device includes at least the first material handling device 230 and the second material handling device 232.When technique head assembly 110 (for example,
Technique head 140) be in first position A when, the first material handling device 230 is in position (a), and precipitation equipment is in position
(b), and the second material handling device 232 is in position (a').When technique head assembly 110 is in second position B, first
Material handling device 230 is in position (c), and precipitation equipment is in position (d), and the second material handling device 232 is in position
Set (c').
In some implementations, at least one precipitation equipment in one or more precipitation equipments 120 is located in first
Between material handling device 230 and the second material handling device 232.Although Fig. 2A and Fig. 2 B is in the first material handling device 230
A precipitation equipment is exemplarily illustrated between the second material handling device 232, but present disclosure is without being limited thereto.Specifically
Ground can be equipped with more than one precipitation equipment between the first material handling device 230 and the second material handling device 232, all
Such as two precipitation equipments.
In further embodiments, one or more precipitation equipments 120 include at least the first precipitation equipment and the second deposition
Device.At least one material handling device in one or more material handling devices can be positioned at the first precipitation equipment and
Between two precipitation equipments.As an example, two material handling devices can be positioned at the first precipitation equipment and the second deposition
Between device.
According to some embodiments that can be combined with other embodiment as described herein, when technique head assembly 220
When moving on 1 in a first direction, the first material handling device 230 is positioned in one or more 120 rears of precipitation equipment.Work as work
For skill head assembly 220 when moving in second direction 2, the second material handling device 232 can be positioned at one or more depositions
120 rear of device.In other words, respective material processing unit follows on moving direction (such as first direction or second direction)
One or more precipitation equipments 120.
As shown in Figure 2 A, during mobile on technique head assembly 110 in a first direction 1, technique head assembly 110
Material processing is carried out using the first material handling device 230 in one or more material handling devices.In addition, such as Fig. 2 B institute
Show, in technique head assembly 110 during mobile in second direction 2, technique head assembly 110 uses the second material processing
Device 232 carries out material processing.Material handling device in 110 moving process of technique head assembly for material processing can be with
It is oriented to sufficiently close to silk screen 154, to allow material processing, substantially uniform material is such as provided on silk screen 154
Layer.As an example, the distance between material handling device and silk screen 154 for carrying out material processing is (for example, with lower section
First distance d1 or second distance d2 described in falling) it can be according to thickness degree, the material for the material being deposited on silk screen 154
At least one of the rheological characteristic of (for example, paste) and the composition of material are selected.
According to some embodiments, during mobile on technique head assembly 220 in a first direction 1, silk screen 154 with
First distance d1 between first material handling device 230 is less than second between silk screen 154 and the second material handling device 232
Distance d2.In technique head assembly 220 during mobile in second direction 2, silk screen 154 and the second material handling device
Second distance d2 between 232 can be less than the first distance d1 between silk screen 154 and the first material handling device 230.First
Distance d1 and second distance d2 can be limited in vertical direction.
In some implementations, the relatively large distance in first distance d1 and second distance d2 (that is, in Fig. 2A second away from
From the first distance d1 in d2 and Fig. 2 B) it can be between 5mm and 25mm, specifically between 10mm and 20mm
In the range of, and more specifically can be about 15mm.Small distance in first distance d1 and second distance d2 is (that is, Fig. 2A
In first distance d1 and Fig. 2 B in second distance d2) can specifically exist between 0.01mm and 2mm
Between 0.05mm and 1.5mm, and more specifically can be between 0.1mm and 1mm.
In some implementations, it between first position A and second position B in moving process, can adjust or control the
One distance d1 and/or second distance d2.The real-time adjustment of first distance d1 and/or second distance d2 may insure at least one material
Material processing device will not interfere silk screen 154.According to some embodiments, first distance d1 and/or second distance d2 can be adjusted
To follow silk screen profile.According to some embodiments, the distance for the material handling device being currently being used only is adjusted.It can make not
The distance of the material handling device used is kept constant.It as an example, can be to the material processing in being currently being used
The distance of device adjusts, so as to by the distance between the material handling device and silk screen 154 (such as first distance d1 or
Second distance d2) remain substantially constant.
According to some embodiments that can be combined with other embodiment as described herein, equipment 100, and specifically
It is technique head assembly 220 (for example, technique head 140) further include actuator, the actuator is configured as using
In mobile one or more precipitation equipments 120 and/or one or more material handling devices.As an example, actuator group
Part includes one or more first actuators, and one or more of first actuators are configured as adjusting in following item at least
One: at least one material handling device and silk screen 154 and/or substrate support 20 in one or more material handling devices
The distance between (for example, first distance d1 and/or second distance d2) and at least one material handling device relative to silk screen
154 and/or substrate support 20 angle.As an example, one or more first actuators may include the first actuator
Unit and the second actuating unit, the first actuating unit are configured as the first material handling device of adjustment 230 and silk screen 154
And/or the first distance d1 between substrate support 20, the second actuating unit are configured as the second material handling device of adjustment
Second distance d2 between 232 and silk screen 154 and/or substrate support 20.
Actuator in actuator, such as one or more first actuators and/or one or more second activate
Device can be selected from the group being made of following item: stepper motor (stepper motor), linear electric machine, pneumatic motor and it
Any combination.
Fig. 3 is shown according to further embodiments as described herein for material to be deposited on the solar battery system of being used for
The schematic diagram for the equipment on substrate made.
According to some embodiments that can be combined with other embodiment as described herein, one or more precipitation equipments
120 are configured in contact silk screen 154 in deposition process.For carrying out material processing in deposition process
One or more material handling devices 130 can be configured as not to be contacted in the deposition process with silk screen 154.Specifically
Ground, one or more material handling devices 130 can be spaced apart with silk screen 154 for example about Fig. 2A and Fig. 2 B illustrate first away from
From and/or second distance.
In some implementations, the distance between one or more precipitation equipments 120 and substrate support 20 can be small
In the distance between one or more material handling devices 130 and substrate support 20.In the example of fig. 3, one or more
The distance between precipitation equipment 120 and substrate support 20 can correspond essentially to the combination thickness of silk screen 154 and substrate 10.
Precipitation equipment can be to silk screen applied force.Silk screen deforms, and is passed by the power less than silk screen resistance that precipitation equipment applies
It is delivered to substrate.
In figure 3 it is shown that at one or more the distance between precipitation equipments 120 and substrate 10 and one or more materials
Manage the difference d between the distance between device 130 and substrate 10.Difference d can be relative to substrate 10 or alternatively can be relative to base
(support surface of such as substrate support, the support surface are configured in deposition process plate support 20
Supporting substrate) and/or horizontal plane restriction.Horizontal plane can be limited by support surface.In some implementations, difference d can
Corresponding to the height between the tip of one or more precipitation equipments 120 and the tip of one or more material handling devices 130
Difference (for example, in vertical direction).Difference d can between 5mm and 25mm, specifically 10mm and 20mm it
Between in the range of, and more specifically can be about 15mm.It can be changed by linear movement one or more material handling device 130
Displacement is such as indicated with arrow 5 from d.
Fig. 4 A and Fig. 4 B, which are shown, is used for the sun for material to be deposited on according to further embodiments as described herein
The schematic diagram of the technique head assembly of the equipment on substrate in energy battery manufacture.
According to the other embodiment that can be combined with embodiment as described herein, equipment and specifically technique head
Parts, including two or more technique heads.The two or more technique heads can control independently of one another and/or
It is mobile.As an example, technique head assembly includes the first technique head and the second technique head.First driving device can be with
It is configurable for mobile first technique head, and the second driving device can be provided to mobile second technique head, example
As in a first direction and/or in second direction.At least one precipitation equipment in one or more precipitation equipments could attach to
One technique head, and at least one material handling device in one or more material handling devices is attached to the second technique head
Portion.
In the example of Fig. 4 A, technique head assembly 410 includes the first technique head 412 and the second technique head 414.One
At least one precipitation equipment in a or multiple precipitation equipments is attached to the first technique head 412.One or more material processing
At least one material handling device in device is attached to the second technique head 414.In present exemplary, (multiple) precipitation equipment
Or (multiple) material handling device is attached to corresponding technique head.In other words, each technique head has and is attached to thereon
(multiple) precipitation equipment or (multiple) material handling device.Although showing a precipitation equipment and a material handling device,
It is understood that present disclosure is without being limited thereto, and two or more precipitation equipments could attach to the first technique head
412.Equally, two or more material handling devices could attach to the second technique head 414.
About Fig. 4 B, technique head assembly 420 includes the first technique head 422 and the second technique head 424.One or more
At least one material processing dress at least one precipitation equipment and one or more material handling devices in a precipitation equipment
It sets and is attached to the first technique head 422.At least another precipitation equipment and one or more materials in one or more precipitation equipments
At least another material handling device in material processing device is attached to the second technique head 424.In present exemplary, precipitation equipment
Corresponding technique head is both attached to material handling device.
Although showing a precipitation equipment and a material handling device at each technique head, but it is to be understood that
Present disclosure is without being limited thereto, and two or more precipitation equipments and/or two or more material handling devices can be attached
It is connected to the first technique head 422.Equally, two or more precipitation equipments and/or two or more material handling devices can
It is attached to the second technique head 424.
Fig. 5 is shown according to further embodiments as described herein for material to be deposited on the solar battery system of being used for
The schematic diagram of the technique head assembly 510 for the equipment on substrate made.Technique head assembly 510 may include or can be technique
Head 540.
According to some embodiments that can be combined with other embodiment as described herein, equipment and specifically work
Skill head assembly 510 includes actuator, and the actuator is configurable for mobile one or more precipitation equipments
520 and/or one or more material handling device (such as the first material handling device 530 and the second material handling device 532).
One or more precipitation equipments 520 can be scraper plate, such as rectangle scraper plate.Scraper plate can have tip 522, such as rectangular-shaped point
End.According to some embodiments that can be combined with other embodiment as described herein, one or more precipitation equipments can be
Substantial symmetry.As an example, one or more precipitation equipments can have the tip of substantial symmetry, so that identical
(for example, single) precipitation equipment can be used for being printed in the first direction and a second direction.
In some embodiments, actuator includes one or more first actuators 562, one or more of
First actuator 562 be configured to adjust between one or more material handling devices and silk screen and/or substrate support away from
From, and optionally adjust angle of one or more processing units relative to silk screen and/or substrate support.Show as one
Example, one or more first actuators 562 may include the first actuating unit, and first actuating unit is configured as adjusting
At least one of following item: the distance between the first material handling device 530 and silk screen (such as first distance) and the first material
Angle (such as first angle) of the material processing device 530 relative to silk screen and/or substrate support.One or more first activates
Device 562 may include the second actuating unit, and second actuating unit is configured as adjusting at least one of following item:
The distance between two material handling devices 532 and silk screen (such as second distance) and the second material handling device 532 are relative to silk
The angle (such as third angle) of net and/or substrate support.In some implementations, one or more first actuators
562 can only linear movement processing unit.Another actuator can be provided, another actuator is configured as changing entire technique
The angle of head assembly.
In some implementations, one or more first actuators 562 are configured as adjusting at one or more materials
Manage the distance between device and silk screen.As an example, one or more first actuators 562 make one or more materials
Processing unit (such as the first material handling device 530 and the second material handling device 532) can be substantially parallel relative to each other
Ground is mobile.One or more first actuators 562 can be linear actuators, such as linear electric machine.
Additionally or alternatively, actuator includes one or more second actuators 564, and one or more of the
Two actuators 564 are configured as adjusting one or more precipitation equipments 520 and the distance between silk screen and/or substrate support,
And optionally adjust (such as second jiao of angle of one or more precipitation equipments 520 relative to silk screen and/or substrate support
Degree).As an example, one or more second actuators 564 can be configured as one or more 520 courts of precipitation equipment
Silk screen is mobile, to contact silk screen.It is one or more heavy that one or more second actuators 564 can be configured to adjustment
The pressure that product device 520 applies silk screen.One or more second actuators 564 can be configured as be arranged essentially parallel to by
Mobile one or more precipitation equipments 520 on the direction for the moving direction that one or more first actuators 562 provide.It can pass through
One or more first actuators 562 and one or more second actuators 564 are planted to control tip and the silk of processing unit
The distance between net (for example, " d1 " in Fig. 2 B).
One or more material handling devices and one or more precipitation equipments 520 are supported relative to silk screen and/or substrate
The distance between part can limit in vertical plane.Equally, corresponding material handling device can be limited relative to vertical plane
Angle with precipitation equipment relative to silk screen and/or substrate support, such as first angle are to third angle.
In some implementations, equipment includes one or more revolving actuators, one or more of rotary-actuated
Device is configured as rotating technics head assembly 510, specifically the technique head of rotating technics head assembly 510.One or more
A revolving actuator can be configured as adjusting process head assembly or technique head relative to silk screen and/or substrate support
Angle.In Fig. 5, the angle [alpha] between silk screen and/or substrate support and technique head can be limited relative to vertical plane.When
When moving in a first direction, technique head assembly 510 can have angle+α, this angle can correspond to technique head assembly
510 inclination along clockwise direction.
When moving in a second direction, technique head assembly 510 can have angle-α, this angle can correspond to work
The inclination of skill head assembly 510 in the counterclockwise direction.Angle+α and-α can relative to vertical plane or direction at 70 ° or smaller,
Specifically 60 ° or smaller, more specifically 40 ° or smaller, and even more specifically 20 ° or smaller.As an example, angle
Degree+α and-α can 20 ° with 70 ° between, and specifically in 40 ° with 70 ° between.
In some embodiments, a kind of configuration of technique head assembly 510 may include one or more first actuators
562 and one or more second actuators 564, linearly and with being substantially parallel to each other to drive one or more processing
Device and one or more precipitation equipments, and can further comprise one or more revolving actuators, it is one or more of
Revolving actuator is configured as rotating technics head assembly 510.Another configuration of technique head assembly 510 may include one or more
A first actuator 562 and one or more second actuators 564, one or more of first actuators 562 are for linear
Ground and drive one or more processing units with being substantially parallel to each other, one or more of second actuators 564 are used for
One or more precipitation equipments linearly (for example, vertically) are driven, and rotate one or more precipitation equipments.
According to some embodiments that can be combined with other embodiment as described herein, equipment is configured as example existing
At least one material handling device in one or more material handling devices is adjusted before, during and/or after depositing operation
One or more processing parameters.One or more processing parameters are selected from the group being made of following item: at least one material processing
Device and the distance between silk screen and/or substrate support (such as first distance and/or second distance) and at least one material
Angle of the processing unit relative to silk screen and/or substrate support.
According to some embodiments that can be combined with other embodiment as described herein, equipment is configured as example existing
One or more deposition parameters of one or more precipitation equipments 520 are adjusted before, during and/or after depositing operation.One
Or multiple deposition parameters can be selected from the group being made of following item: at least one of one or more precipitation equipments 520 deposition
At least one precipitation equipment in device and the distance between silk screen and/or substrate support, one or more precipitation equipments 520
Relative to the angle of silk screen and/or substrate support, technique head assembly (for example, technique head) relative to silk screen and/or
At least one precipitation equipment in the movement speed of substrate support, and one or more precipitation equipments for example acts on deposition
Pressure on silk screen used in technique.
In some implementations, in deposition process, especially in Material handling processes, adjustment is one or more
At least one processing parameter in processing parameter.Additionally or alternatively, in deposition process, it is one or more heavy to adjust
At least one deposition parameter in product parameter.It can be with to the real-time adjustment of (multiple) processing parameter and/or (multiple) deposition parameter
Improve the quality of conducting wire pattern.According to some embodiments, can be based on or according to one or more deposition parameters adjustment one
At least one processing parameter in a or multiple processing parameters.
Fig. 6, which is shown, is used for solar-electricity for material web to be printed according to further embodiments as described herein
The schematic diagram of the equipment 600 on substrate in the manufacture of pond.
According to some embodiments that can be combined with embodiment as described herein, equipment and specifically technique head
Parts include two or more technique heads (also referred to as " be grouped " or " technique grouping ").Described two or multiple technique heads
Portion can control and/or move independently of one another.As an example, technique head assembly includes the first technique head 610 and the
Two technique heads 620.The first precipitation equipment 612 in one or more precipitation equipments is attached to the first technique head 610, and
The second precipitation equipment 622 in one or more precipitation equipments is attached to the second technique head 620.Equally, one or more materials
The first material handling device 614 in material processing device is attached to the first technique head 610, and one or more material processing
The second material handling device 624 in device is attached to the second technique head 620.
One or more precipitation equipments can be angled precipitation equipment, such as angled scraper plate or accurate scraper plate.Often
A angled precipitation equipment can be configured as only printed in one direction (this be different from it is previously described
Diamond scraper plate, diamond scraper plate are virtual symmetries, and are configurable for carrying out along forwardly and rearwardly both direction
Printing).In order to execute printing in two directions, technique head assembly includes two angle deposition devices, such as in material
The first precipitation equipment between material processing device (for example, the first material handling device 614 and second material handling device 624)
612 and second precipitation equipment 622.
Along the deposition process that first direction 1 executes, can be promoted with the second precipitation equipment 622 and the second material
Second technique head 620 of material processing device 624.In other words, along the deposition process that first direction 1 executes, and
Without using the second technique head 620.First technique head 610 decline, so that the first precipitation equipment 612 contacts silk screen 154 to incite somebody to action
Material 30 is transmitted on substrate (not shown).It is equipped with certain distance between the first material handling device 614 and silk screen 154, makes
The first material handling device 614 that the first precipitation equipment 612 must be followed provides substantially uniform material 30 on silk screen 154
Film or layer.
During the subsequent deposition process executed along the second direction opposite with first direction 1, the first technique head 610
It increases, and the second technique head 620 declines.Second precipitation equipment 622 contact silk screen 154 with by silk screen material (that is, first
The preceding film or layer provided by the first material handling device 614 to substrate) it is transmitted on substrate, the substrate can be with previous substrate
Same substrate (for example, if executing dual printing) or another/subsequent substrate.
Although showing a precipitation equipment and a material handling device at each technique head, but it is to be understood that
Present disclosure is without being limited thereto, and two or more precipitation equipments and/or two or more material handling devices are attachable
To the first technique head 610.Equally, two or more precipitation equipments and/or two or more material handling devices could attach to
Second technique head 620.
According to some embodiments, two or more technique heads (such as the first technique head 610 and the second technique head
Portion 620) it can move or go up and down in vertical direction.Additionally or alternatively, two or more technique heads can be configured
For one or more precipitation equipments of movement and/or one or more material handling devices, as previously described herein.
Fig. 7 shows the schematic diagram of the manufacture of solar cells equipment 700 according to embodiment described herein.
Manufacture of solar cells equipment 700 includes one or more deposition stations 720, and according to embodiment described herein
For material web is printed in be used for solar battery manufacture in substrate on equipment 725.Equipment 725 can be arranged
In at least one deposition station in one or more deposition stations 720.
Manufacture of solar cells equipment 700 may include one in one or more 720 upstreams of deposition station and/or downstream or
A number of other stations.As an example, manufacture of solar cells equipment 700 may include the first inspection station (first
Inspection station) 710, the first inspection station 710 is for checking the base that be input in one or more deposition stations 720
Plate.Manufacture of solar cells equipment 700 may include dry station 730, and dry station 730 is for dry in one or more deposition stations
The material being deposited in 720 on substrate.In some embodiments, manufacture of solar cells equipment 700 may include the second inspection
Stand 740, the second inspection station 740 is for checking the conducting wire pattern being deposited on substrate in one or more deposition stations 720.
Manufacture of solar cells equipment 700, it is heavy according to the one or more of the equipment of present disclosure specifically to have
Product station 720 can be the portion of the larger production system (such as series connection (in-line) production system) for producing solar battery
Point.
Fig. 8 is shown according to embodiment as described herein for material web to be printed in the solar battery system of being used for
The flow chart of method 800 on the substrate made.Method 800 can be used according to the equipment of embodiment described herein and execute
Material web is printed in the substrate being used in solar battery manufacture.
Method 800 includes: will have one or more depositions in a first direction along substrate support in square 810
The technique head assembly of device and one or more material handling devices is at least moved to the second position from first position, to make
Material is transmitted to substrate from silk screen at least one precipitation equipment in one or more precipitation equipments, and using one or
At least one material handling device in multiple material handling devices executes the processing to the material on silk screen, wherein at least in work
Skill head assembly executes the transmission and processing of material during being moved to the second position from first position.In some implementations
In, method 800 includes: moving process head assembly in a second direction that is opposite the first direction in square 820, so as to
The transmission (such as printing) and processing of material are executed in moving process in a second direction.
The transmission and processing of material can exist during at least part of the duration of depositing operation, and specifically
It is performed simultaneously during the basic entire duration of depositing operation.One or more material handling devices can be for example on silk screen
Substantially uniform material membrane or layer are provided.Optionally, one or more material handling devices can recycle excessive material from silk screen
Material.
According to embodiment as described herein, for material web to be printed in the substrate being used in solar battery manufacture
On method can be used following manner carry out: computer program, software, computer software product and the controller that is mutually related,
The controller that is mutually related can have CPU, memory, user interface and output and input device, described to output and input
It is communicated with the respective element for depositing material to equipment on the substrate being used in solar battery manufacture.
Present disclosure uses moveable technique head assembly, and the moveable technique head assembly is configured as together
Shi Zhihang or less is operated: carrying out material processing in depositing materials on substrates and using material handling device using precipitation equipment.Make
For an example, deposition and material processing can be carried out during the same one stroke of technique head assembly.Processing week can be reduced
The cycle time of phase, and the productivity and/or output of equipment can be increased.In particular, one can be provided on silk screen
Layer material.Precipitation equipment (can be scraper plate) can be used that material is transmitted to substrate from silk screen.It is heavy that material handling device can follow
Device is accumulated, and another layer of material is provided on silk screen, to be deposited in subsequent substrate.
Although above content is directed to the embodiment of present disclosure, the basic of present disclosure can also not departed from
Design other and further embodiment of present disclosure in the case where range, and scope of the present disclosure by with
Attached claims determine.
Claims (16)
1. a kind of for material web to be printed in the equipment being used on the substrate in solar battery manufacture, the equipment packet
It includes:
Technique head assembly, the technique head assembly include:
One or more precipitation equipments, one or more of precipitation equipments are configurable for transmitting the material from silk screen
To the substrate；With
One or more material handling devices, one or more of material handling devices are configurable for handling the silk screen
On the material；
Driving device, the driving device are configurable for moving the technique head in a first direction along substrate support
Parts, so that the material is transmitted and handled in deposition process.
2. equipment as described in claim 1, wherein the silk screen is arranged in the substrate support and technique head group
Between part, wherein one or more of precipitation equipments include scraper plate, and wherein the scraper plate is configured as and the silk screen
Contact is to be printed.
3. equipment as claimed in claim 1 or 2, wherein one or more of material handling devices include at least the first material
Processing unit and the second material handling device, wherein at least one precipitation equipment in one or more of precipitation equipments positions
Between first material handling device and second material handling device.
Further comprise one or more first actuators 4. equipment as described in any one of claims 1-3, it is one or
Multiple first actuators are configured as adjusting at least one material handling device in one or more of material handling devices
The distance between described silk screen, in particular, wherein one or more of first actuators include the first actuating unit and
Second actuating unit, first actuating unit be configured as adjusting first material handling device and the silk screen it
Between first distance, second actuating unit is configured as adjusting between second material handling device and the silk screen
Second distance.
5. equipment according to any one of claims 1-4,
Wherein the technique head parts include the first technique head and the second technique head, wherein one or more of depositions
At least one precipitation equipment in device is attached to first technique head, and one or more of material handling devices
In at least one material handling device be attached to second technique head, or
Wherein the technique head parts include technique head, wherein at least one of one or more of precipitation equipments are heavy
At least one material handling device in product device and one or more of material handling devices is attached to the technique head.
6. a kind of manufacture of solar cells equipment, the manufacture of solar cells equipment include:
One or more deposition stations,
Equipment according to any one of claim 1 to 5, the equipment are located in one or more of deposition stations extremely
In a few deposition station.
7. a kind of for material web to be printed in the method being used on the substrate in solar battery manufacture, the method packet
It includes:
There to be the technique head assembly of one or more precipitation equipments and one or more material handling devices along substrate branch
Support member is at least moved to the second position from first position in a first direction, to use in one or more precipitation equipments extremely
The material is sent to the substrate from silk screen by a few precipitation equipment, and using in one or more material handling devices
At least one material handling device executes the processing of the material on the silk screen, wherein the technique head assembly from
The first position executes the transmission and the processing during being moved to the second position.
8. the method for claim 7, wherein the transmission of the material and the processing continue in depositing operation
It is performed simultaneously during at least part of time, and the quilt especially during the substrate entire duration of the depositing operation
It is performed simultaneously.
9. method as claimed in claim 7 or 8, wherein one or more of material handling devices are configured for providing
The uniform film of essence of the material on the silk screen.
10. further comprising such as the described in any item methods of claim 7-9:
The technique head assembly is that the opposite second direction of the first direction is mobile, along the second direction
The transmission and processing of the material are executed during movement.
11. such as the described in any item methods of claim 7-10, wherein the technique head parts are in said first direction
Mobile first material handling device using in one or more of material handling devices, and in particular, it is wherein described
Mobile second using in one or more of material handling devices of technique head assembly in this second direction
Material handling device.
12. method as claimed in claim 11, wherein when the technique head assembly moves in said first direction, institute
The rear that the first material handling device is positioned in one or more of precipitation equipments is stated, and in particular, wherein when the work
When skill head assembly moves in this second direction, second material handling device is positioned in one or more of heavy
The rear of product device.
13. the method as described in claim 11 or 12, wherein in the technique head assembly described in the first direction
During movement, the distance between the silk screen and first material handling device are less than at the silk screen and second material
The distance between device is managed, and during the movement of the technique head assembly in the second direction, the silk screen
The distance between described second material handling device is less than the distance between the silk screen and first material handling device.
14. further comprising such as the described in any item methods of claim 7-13:
Adjust one or more techniques ginseng of at least one material handling device in one or more of material handling devices
Number, wherein one or more of technological parameters are selected from the group being made of following item:
The distance between at least one of at least one described material handling device and the silk screen and the substrate support；
With
At least one described material handling device is relative to the angle of at least one for stating silk screen and the substrate support.
15. further comprising such as the described in any item methods of claim 7-14:
One or more deposition parameters of at least one precipitation equipment in one or more of precipitation equipments are adjusted, wherein institute
One or more deposition parameters are stated to select from the group being made of following item:
The distance between at least one described precipitation equipment and the substrate support；
At least one angle of the precipitation equipment relative to the substrate support；
Movement speed of the technique head assembly relative to the substrate support；With
At least one described precipitation equipment acts on the pressure on the silk screen.
16. the method as described in claims 14 or 15, wherein at least one technique in one or more of technological parameters
Parameter is adjusted during the material processing, and/or wherein at least one deposition of one or more of deposition parameters
Parameter is adjusted during the movement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210191115.8A CN114701244A (en) | 2017-04-28 | 2017-04-28 | Apparatus and method for screen printing substrate, and solar cell production apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2017/060236 WO2018197005A1 (en) | 2017-04-28 | 2017-04-28 | Apparatus for screen printing of a material on a substrate used in the manufacture of a solar cell, solar cell production apparatus, and method for screen printing of a material on a substrate used in the manufacture of a solar cell |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210191115.8A Division CN114701244A (en) | 2017-04-28 | 2017-04-28 | Apparatus and method for screen printing substrate, and solar cell production apparatus |
Publications (2)
| Publication Number | Publication Date |
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| CN109195801A true CN109195801A (en) | 2019-01-11 |
| CN109195801B CN109195801B (en) | 2022-03-01 |
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| CN201780004974.9A Active CN109195801B (en) | 2017-04-28 | 2017-04-28 | Apparatus and method for screen printing substrate, and solar cell production apparatus |
| CN202210191115.8A Pending CN114701244A (en) | 2017-04-28 | 2017-04-28 | Apparatus and method for screen printing substrate, and solar cell production apparatus |
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| CN202210191115.8A Pending CN114701244A (en) | 2017-04-28 | 2017-04-28 | Apparatus and method for screen printing substrate, and solar cell production apparatus |
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| CN (2) | CN109195801B (en) |
| WO (1) | WO2018197005A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110202918A (en) * | 2019-05-07 | 2019-09-06 | 常州捷佳创智能装备有限公司 | Cell piece printing equipment |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4175830B1 (en) * | 2021-08-25 | 2023-11-08 | Applied Materials Italia S.R.L. | Method of performing screen printing on a substrate used for the manufacture of a solar cell, controller and apparatus for performing same |
| CN117901539B (en) * | 2024-03-20 | 2024-05-28 | 苏州群鑫纸制品科技有限公司 | Printing equipment and printing method thereof |
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| CN102026810A (en) * | 2008-03-13 | 2011-04-20 | Dtg国际有限公司 | Print head assembly, screen printing system and method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110202918A (en) * | 2019-05-07 | 2019-09-06 | 常州捷佳创智能装备有限公司 | Cell piece printing equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109195801B (en) | 2022-03-01 |
| WO2018197005A1 (en) | 2018-11-01 |
| CN114701244A (en) | 2022-07-05 |
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