CN206849850U - Equipment in being manufactured for solar cell and the system for being deposited on material on the substrate in being manufactured for solar cell - Google Patents
Equipment in being manufactured for solar cell and the system for being deposited on material on the substrate in being manufactured for solar cell Download PDFInfo
- Publication number
- CN206849850U CN206849850U CN201720463781.7U CN201720463781U CN206849850U CN 206849850 U CN206849850 U CN 206849850U CN 201720463781 U CN201720463781 U CN 201720463781U CN 206849850 U CN206849850 U CN 206849850U
- Authority
- CN
- China
- Prior art keywords
- actuator
- handling device
- material handling
- equipment
- silk screen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Screen Printers (AREA)
Abstract
Equipment (100) in being manufactured for solar cell and the system (400) for being deposited on material on the substrate in being manufactured for solar cell are provided.The equipment (100) includes the first actuator (110) and the second actuator (120), wherein the first material handling device (112) may be connected to first actuator (110).Second material handling device (122) may be connected to second actuator (120).Second actuator (120) is connected to first actuator (110).First actuator (110) is configured as moving second actuator (120).
Description
Technical field
Embodiment of the present utility model is related to for the equipment in solar cell manufacture and for material to be deposited
System on the substrate in being manufactured for solar cell.Embodiment of the present utility model is particularly used for material silk
Net is printed in equipment and system on substrate.
Background technology
Solar cell is the photovoltaic device that sunlight is directly changed into electric power.In this field, it is known that pass through deposition
Technology, specifically printing technology solar cell is produced in crystalline silicon substrates, so as on the preceding surface of solar cell
Realize selective emitter structures.Process cycle may include at least one printing operation and optional another material processing operation,
In at least one printing operation, material is deposited on substrate using printing equipment.The productivity ratio of equipment and/or production
Amount can be subject to processing the limitation of the cycle time in cycle.
In view of the foregoing, overcome at least some problems in this area is used for newly setting in solar cell manufacture
The standby and system for material to be deposited on the substrate in being manufactured for solar cell is beneficial.The utility model
Target in particular, in that provide can reduce process cycle cycle time it is at least one in productivity ratio and output to increase
Equipment.
Utility model content
In view of the foregoing, there is provided be used for for the equipment in solar cell manufacture and for material to be deposited on
The system on substrate in solar cell manufacture.Other aspects of the present utility model, benefit and features from claims,
It is apparent in specification and accompanying drawing.
According to one side of the present utility model, there is provided the equipment in being manufactured for solar cell.The equipment includes：
First actuator, wherein the first material handling device may be connected to first actuator；With the second actuator, wherein the second material
Material processing device may be connected to second actuator, wherein second actuator is connected to first actuator, and
Wherein described first actuator is configured as moving second actuator.
In some embodiments, first actuator is configured such that second actuator together with described first
Material handling device moves together.
In some embodiments, first actuator is configurable at least one below progress：It is linear mobile
First material handling device and the angle orientation for changing first material handling device.
In some embodiments, second actuator is configurable at least one below progress：It is linear mobile
Second material handling device and the angle orientation for changing second material handling device.
In some embodiments, first actuator is configurable at least one below progress：It is linear mobile
Second actuator and the angle orientation for changing second actuator.
In some embodiments, it is at least one selected from by following in first actuator and second actuator
The group of item composition：Linear electric machine, stepper motor, pneumatic actuator, motor and any combination of them.
In some embodiments, the equipment is configured as：First actuator is operated so as to be connected to described
First material handling device of one actuator and second actuator movement, wherein when first actuator moves institute
When stating the second actuator, second material handling device of second actuator is connected to together with second actuator one
Play movement；At using at least one execution material in first material handling device and second material handling device
Reason.
In some embodiments, first material handling device is printing equipment, and second material process
Device is the material dispensing apparatus for providing uniform material membrane on silk screen, and vice versa, wherein the equipment is configured
For：First material handling device and second material handling device are moved along substrate support, described in using
The material is sent to the substrate by the first material handling device from the silk screen, and is filled using second material process
Put the processing performed to the material on the silk screen.
According to another aspect of the present utility model, there is provided for the base being deposited on material in being manufactured for solar cell
System on plate.The system includes technique head, and the technique head can be at least along substrate support in the first technique
Side moves up.The technique head includes：According to the equipment in the manufacture of the present utility model for solar cell；Described
One material handling device；With second material handling device.
In some embodiments, first actuator is configurable at least one below change：Described first
Material handling device is orientated relative to the substrate support away from walk-off angle.
In some embodiments, second actuator is configurable at least one below change：Described second
Material handling device is orientated relative to the substrate support away from walk-off angle.
In some embodiments, at least one in first material handling device and second material handling device
It is individual selected from the group being made up of following item：Printing equipment and the material for providing substantially uniform material membrane on silk screen distribute
Device.
In some embodiments, first material handling device is printing equipment, and second material process
Device is the material dispensing apparatus for providing uniform material membrane on silk screen.
In some embodiments, the system further comprises drive device, and the drive device is configurable for
The technique head is moved on first process orientation along the substrate support, to carry out printing and material distribution
In it is at least one.
In some embodiments, the system is configured to adjust the technique head relative to the substrate
Support member away from walk-off angle be orientated in it is at least one.
Brief description of the drawings
Therefore, in order to which features described above of the present utility model is understood in detail, the utility model summarized above
More specifically description be referred to embodiment progress.Accompanying drawing is related to the various embodiments of the utility model, and describes
It is as follows：
Figure 1A and Figure 1B shows the showing for the equipment in solar cell manufacture according to embodiment described herein
It is intended to；
Fig. 2A shows the signal of the equipment being used in solar cell manufacture according to other embodiment described herein
Figure；
Fig. 2 B show the signal of the equipment being used in solar cell manufacture according to other embodiment described herein
Figure；
Fig. 3 shows the signal of the equipment being used in solar cell manufacture according to other embodiment described herein
Figure；
Fig. 4 is shown to be used to material web being printed in for solar cell manufacture according to embodiment described herein
In substrate on system schematic diagram；
Fig. 5 and Fig. 6 shows the schematic diagram of the system with technique head according to embodiment described herein；
Fig. 7, Fig. 8 A and Fig. 8 B show the equipment being used in solar cell manufacture according to embodiment described herein
Programme of work schematic diagram；With
Fig. 9, Figure 10 A and Figure 10 B are shown to be used in solar cell manufacture according to other embodiment described herein
Equipment programme of work schematic diagram.
Embodiment
Various embodiments of the present utility model are reference will now be made in detail, one or more examples of the embodiment exist
Shown in accompanying drawing.In the description to accompanying drawing, identical reference refers to identical part below.In general, only describe
At difference between each embodiment.Each example is provided in a manner of explaining utility model content, and is not intended to conduct
Limitation of the present utility model.In addition, the feature of part for illustrating or being described as an embodiment can be used for other embodiment party
Formula is combined with other embodiment to produce another embodiment.It is contemplated that specification includes such modifications and variations.
Process cycle for forming conducting wire pattern on substrate may include multiple material process tasks.As one
Example, it can perform using the first material handling device at least one depositing operation of depositing materials on substrates and using second
At least one another technique that material handling device is carried out.In order to realize the material process of high quality, should accurately control multiple
The positioning of material process task, specifically the first material handling device and the second material handling device.
The utility model has used integration actuator, wherein the first actuator with the first material handling device
(such as linear electric machine) is configured such that the first material handling device together with the second actuating with the second material handling device
Device (such as pneumatic actuator) moves together.In other words, the second actuator is arranged on the first actuator, i.e. the first actuating
Device and the second actuator are connected in series.For example, when the first actuator moves the first material handling device to adjust the first material
When the distance between processing unit and substrate support, the second actuator and the second material handling device are simultaneously and optionally synchronous
It is mobile.The positioning of the first material handling device and the second material handling device can accurately be controlled.In addition, arranged in series allows to make
With the actuator of different technologies so that the combination of actuator is compared to can be beneficial for parallel configuration situation.For example,
The arranged in series of the actuator of linear electric machine control and the actuator of air actuation switch can provide improved property at lower cost
Energy.
Figure 1A and Figure 1B shows the equipment 100 being used in solar cell manufacture according to embodiment described herein
Schematic diagram.
Equipment 100 includes the first actuator 110 and the second actuator 120.First material handling device 112 may be connected to or
The first actuator 110 is already connected to, and the second material handling device 122 may be connected to or be already connected to the second actuator 120.
Second actuator 120 is connected to the first actuator 110, or on the first actuator 110, wherein the first actuator 110
It is configured as mobile second actuator 120.First actuator 110 and the second actuator 120 can operate independently of the other.Passing through will
Second actuator 120 is attached to the first actuator 110, can accurately control and adjust the first material handling device 112 and
The relative positioning of two material handling devices 122.
According to some embodiments that can be combined with other embodiment as described herein, the first actuator 110 by with
It is set to so that the second actuator 120 moves together with the first material handling device 112.For example, the first actuator 110 can be same
When and/or synchronizing moving the second actuator 120 and the first material handling device 112.Second material handling device 122 is attached to
Two actuators 120, and can be moved together with the second actuator 120.
In some embodiments, the first actuator 110 is configured as linearly moving the first material handling device 112 and appointed
Selection of land changes the angle orientation of the first material handling device 112.Equally, the first actuator 110 can be configurable for linear movement
Second actuator 120 and the angle orientation for optionally changing the second actuator 120.Second actuator 120 can be configured as linearly moving
Dynamic second material handling device 122 and the angle orientation for optionally changing the second material handling device 122.
First actuator 110, which can be configured on first direction 1, moves (such as linear mobile) second actuator
120, first direction can be substantially perpendicular directions.For example, 1 movement may include to move up and to moving down in the first direction
It is dynamic.The second actuator 120 can be moved away from such as substrate and/or silk screen by moving up.Moving down can be towards such as base
Plate and/or silk screen move the second actuator 120.
First actuator 110, which can be configured in second direction 2, to be moved at (such as linear mobile) first material
Device 112 is managed, second direction can be substantially perpendicular directions.For example, in a second direction 2 movement may include to move up and
Move down.The first material handling device 112 can be moved away from such as substrate and/or silk screen by moving up.Moving down can
To move the first material handling device 112 towards such as substrate and/or silk screen.
First direction 1 and second direction 2 can be substantially parallel to mutual, or can overlap.Show as one
Example, first direction 1 and second direction 2 can be substantially perpendicular directions.Term " vertical direction " or " vertical orientated " are understood
To be different from " horizontal direction " or " horizontal alignment ".Vertical direction can be substantially parallel to gravity.
Second actuator 120, which can be configured on first direction 1, to be moved at (such as linear mobile) second material
Device 122 is managed, first direction can be substantially perpendicular directions.For example, in the first direction 1 movement may include to move up and
Move down.The second material handling device 122 can be moved away from such as substrate and/or silk screen by moving up.Moving down can
To move the second material handling device 122 towards such as substrate and/or silk screen.In view of the foregoing, by by the first actuator
The movement that 110 the second actuators 120 provided are moved and provided by the second actuator 120, it can move such as (linear mobile)
Second material handling device 122.
According to some embodiments that can be combined with other embodiment as described herein, the first actuator 110 can quilt
It is configured to adjust the first material handling device 112 and the second material handling device 122 for example relative to the phase of substrate and/or silk screen
To position and/or distance.Second actuator 120 can be configured as adjusting the first material handling device 112 and the second material process
The relative position of device 122 relative to each other.For example, it can couple or couple first material caused by the first actuator 110
Manage the movement of device 112 and the movement of the second actuator 120.Second material handling device 122 as caused by the second actuator 120
Movement can be independently of the movement of second actuator 120 as caused by the first actuator 110.
In some implementations, the first actuator 110 can be configurable for changing the first material handling device 112
Such as it is orientated relative to the angle of the plane (such as vertical plane) limited by first direction 1 and/or second direction 2, such as angle [alpha] 1.
Angle [alpha] 1 can be limited between the longitudinal axis of the plane and the first material handling device 112.Angle orientation can be carried out
Change, be orientated to change the first material handling device 112 relative to the angle of substrate and/or silk screen.
First actuator 110 can be configurable for change the second actuator 120 for example relative to by first direction 1 and/
Or the angle orientation of the plane (such as vertical plane) of the restriction of second direction 2.It is orientated by the angle for changing the second actuator 120,
The angle orientation for the second material handling device 122 for being attached to the second actuator 120 can be changed.The angle orientation of second actuator 120
Or the change of angle may correspond to angle orientation or the change of angle of the first material handling device 112.
According to some embodiments, the second actuator 120 can be configurable for changing the second material handling device 122
Such as it is orientated relative to the angle of the plane (such as vertical plane) limited by first direction 1 and/or second direction 2, such as angle [alpha] 2.
Angle [alpha] 2 can be limited between the longitudinal axis of the plane and the second material handling device 122.Angle orientation can be carried out
Change, so as to change the second material handling device 122 relative in the first material handling device 112, substrate and silk screen at least
The angle orientation of one.
In some implementations, the first actuator 110 can be configured as adjusting the first material handling device 112 and second
Both material handling devices 122 are for example orientated relative to the angle of substrate and/or silk screen.Second actuator 120 can be configured as adjusting
The angle orientation of the whole material handling device 122 of first material handling device 112 and second relative to each other.For example, it can couple or join
Connect the angle movement of first material handling device 112 as caused by the first actuator 110 and the angle of the second actuator 120 is moved.By
The angle movement of second material handling device 122 caused by second actuator 120 can be independently of as caused by the first actuator 110 the
The angle movement of two actuators 120.
In some implementations, equipment 100 includes one or more revolving actuators, one or more rotation
Linear actuator is configured as rotary unit, such as technique head, including the first actuator, the first material handling device 112, second
The material handling device 122 of actuator 120 and second.One or more revolving actuators can be configured as adjusting the unit or
Technique head relative to silk screen and/or substrate support angle.
According to can with other some embodiments applied mode and combined as described herein, equipment 100 may include one or
More other materials processing units, such as the 3rd material handling device and optionally the 4th material handling device.As one
Example, the second material handling device 122 and the 3rd material handling device can configure similarly or in the same manner.Specifically, the 3rd material
Material processing device could attach to the second actuator 120, so as to mobile.In other embodiments, as shown in Figure 5 and Figure 6,
3rd material handling device could attach to the 3rd actuator for attaching to the first actuator 110, so as to mobile.First material
Processing unit 112 can be arranged between the second material handling device 122 and the 3rd material handling device.
According to can with other some embodiments applied mode and combined as described herein, the first material handling device 112,
Second material handling device 122, the 3rd material handling device and/or the 4th material handling device may be selected from by printing equipment and material
The group of distributor composition is expected, for providing substantially uniform material membrane on silk screen.For example, the first material handling device
112 (and optionally the 4th material handling devices) can be printing equipment, and the second material handling device 122 (and optionally
Three material handling devices) can be material dispensing apparatus, for providing substantially uniform material membrane on silk screen.
Printing equipment may be selected from the group being made up of following item：Diamond scraper plate, there is the sophisticated scraper plate of rectangle, be angled
Scraper plate and any combination of them.Material dispensing apparatus can be flood bar (floodbar).Enter one on Fig. 4, Fig. 5 and Fig. 6
The explanation printing of step ground and material process (material distribution).
According to can may be selected from other some embodiments applied mode and combined as described herein, the first actuator 110
The group being made up of following item：Linear electric machine, stepper motor, pneumatic actuator, motor and any combination of them.Optionally
Or alternatively, the second actuator 120 may be selected from the group being made up of following item：Linear electric machine, stepper motor, pneumatic actuator, electricity
Motivation and any combination of them.Specifically, the first actuator 110 can be linear electric machine, and the second actuator can be
Pneumatic motor.Linear electric machine can apply print force and/or keep ad-hoc location.There can be the pneumatic cause of intrinsic ON/OFF pattern
Dynamic device can be provided for changing the relative position between the first material handling device and the second material handling device.
Fig. 2A shows the showing for the equipment 200 in solar cell manufacture according to other embodiment described herein
It is intended to.
Equipment 200 includes the first actuator 210 and the second actuator 220.First material handling device 212 is used for material
Expect silk-screen printing in the angled scraper plate on substrate.Angled scraper plate can be configurable for only in one direction (such as
First process orientation) on printed.Second material handling device 222 is flood bar, and it can provide substantially equal on silk screen
Even material layer, the substantially uniform material layer are sent to the subsequent substrate for for example following the substrate through processing.
Fig. 2 B show the equipment 200 ' being used in solar cell manufacture according to other embodiment described herein
Schematic diagram.
Equipment 200 ' includes the first actuator 210 and the second actuator 220.First material handling device 212 ' is to be used to incite somebody to action
Material web is printed in the scraper plate on substrate, and the scraper plate has the tip of substantial rectangular.Tip can be substantial symmetry
, to allow on the first process orientation and to be printed on second process orientation opposite with first direction.Second material
Material processing device 222 ' is flood bar, and it can provide substantially uniform material layer, the substantially uniform material on silk screen
The bed of material is sent to the subsequent substrate for for example following the substrate through processing.
Fig. 3 shows the signal of the equipment 300 being used in solar cell manufacture according to embodiment as described herein
Figure.
Equipment 300 includes the first actuator 310 and the second actuator 320.First actuator 310 includes or is linear electric machine
314.Linear electric machine may include stator (stator) 316.First material handling device 312 may be connected to or be already connected to the first cause
Dynamic device 310 (such as linear electric machine 314), and the second material handling device 322 may be connected to or be already connected to the second actuator
320.Second actuator 320 is connected to the first actuator 310 (such as linear electric machine 314), or installed in the first actuator 310
On (such as linear electric machine 314), wherein the first actuator 310 is configured as mobile second actuator 320.
Second actuator 320 can be the pneumatic actuator with cylinder 326 and piston 327, and wherein piston 327 can be in gas
Moved in cylinder 326.Cylinder 326 can be arranged on support member 328.Support member 328 may be connected to linear electric machine 314, or by linear
Motor provides.Piston 327 may be connected to the second material handling device 322, to move the second material handling device 322.One
In a little implementations, the second actuator 320 includes guidance set, such as linear steering component, and the guidance set is configured as
For guiding the second material handling device 322 for example to move in a first direction on 1.For example, guidance set may include guide rail
324 and director element 325, guide rail 324 can be linear guide, director element 325 is movably disposed at guided way
At road 324 so that director element 325 is guided by guide rail 324 or is guided in guide rail.Director element 325 can
The second material handling device 322 is connected to, for being moved on the second material handling device 322 of guiding in a first direction 1.
According to some embodiments, equipment 300 includes stop part component (stopper assembly), the stop part group
Part is configurable for limiting such as movement in 1 (such as upward direction) in a first direction of the second material handling device 322.Only
Block piece component may include the first stop element 330 and the second stopping element 332, and the first stop element 330 is arranged on the first actuating
Device 310 (such as linear electric machine 314) place, the second stop element 332 are arranged at the second actuator 320.Second stop element 332
It may be provided at the second material handling device 322 and/or piston 327.
According to one side of the present utility model, there is provided for the base being deposited on material in being manufactured for solar cell
System on plate 10.Fig. 4 shows the schematic diagram of this system 400, and the system can be configurable for silk-screen printing.Material
It can be adapted for forming conducting wire pattern (such as finger piece and/or busbar (busbar)) on the surface 12 of substrate 10
Material.For example, material can be paste, such as silver paste.
System 400 includes technique head 410, and the technique head 410 can be at least along substrate support 20 first
Moved on process orientation 5.Technique head 410 includes or setting in the manufacture of the present utility model for solar cell
It is standby.System 400, and specifically technique head 410, including the first material handling device 112 and the second material handling device
122。
System 400 may include drive device, and the drive device is configurable for along substrate support 20 first
Moving process head 410 on process orientation 5, to be printed (for example, using first material handling device 112) and material point
With at least one in (for example, using the second material handling device 122).
According to some embodiments, technique head 410 can be along substrate support 20 opposite with the first process orientation 5
The second process orientation on move.Drive device can be configurable for moving up in the second process orientation along substrate support 20
Skill of starting building head 410, to be printed (for example, using first material handling device 112) and material process (for example, using
Second material handling device 122) in it is at least one.
According to some embodiments, system 400 is configured to adjusting process head 410 relative to substrate support
20 and/or silk screen 154 distance and angle in it is at least one.For example, system 400 is including one or more rotary-actuated
Device, one or more revolving actuator are configured such that technique head 410 can be around rotary shaft rotation, rotary shaft
Substantially horizontal axle.One or more revolving actuators can be configured as adjusting process head 410 relative to silk screen 154
And/or the angle of substrate support 20.Angle between silk screen 154 and/or substrate support 20 and technique head 410 can be relative
Limited in vertical plane.When being moved on the first process orientation 5, technique head 410 can have angle+α, and this angle can
Corresponding to the inclination of technique head 410 along clockwise direction.Equally, when being moved on the second process orientation, technique head 410
There can be angle-α, this angle may correspond to the inclination of technique head 410 in the counterclockwise direction.
For example, angle+α and-α can be relative to vertical plane or vertical direction into 70 ° or smaller, specifically 60 ° or more
It is small, more specifically 40 ° or smaller, and even more specifically 20 ° or smaller.For example, angle+α and-α can be in 20 ° and 70 °
Between, and specifically in 40 ° with 70 ° between.
System 400 includes the first material handling device 112 and the second material handling device 122, first material process
Device 112 is configurable for material being sent to substrate 10 from silk screen 154, and second material handling device 122 is used to locate
Material on filament carding net 154.Drive device be configurable at least along substrate support 20 on the first process orientation 5 simultaneously
The moving process head 410 optionally on the second process orientation, is sent to substrate 10 from silk screen 154 by material and is depositing
The material on silk screen 154 is handled in technical process.In some implementations, the first material handling device 112 can be printing dress
Put, such as scraper plate.Second material handling device 122 can be material dispensing apparatus, such as flood bar, and it can above be carried in silk screen 154
For substantially uniform material layer, the substantially uniform material layer, which is sent to, for example to be followed after the substrate of processing
Continuous substrate.
System 400 may include screen apparatus 150, and the screen apparatus 150 is arranged on substrate support 20 and technique head
Between 410.Screen apparatus 150 may include framework 152 and silk screen 154, and silk screen 154 is attached to framework 152.According to can with herein
Some embodiments of described other embodiment combination, the first material handling device 112 can be one or more printings
Device, such as scraper plate.Scraper plate can be configured as contacting silk screen 154 to be printed.In some embodiments, the point of scraper plate
End in contact silk screen 154 and compel to pass the material through silk screen 154 and be printed onto on substrate 10.Scraper plate can be diamond scraper plate or angled
Scraper plate.
Silk screen 154 may include net, mask to print, sheet material, metal sheet, plastic sheet, sheet material, sheet metal and plastic plate
It is at least one in material.In some embodiments, silk screen 154 limits the figure corresponding to structure on the substrate 10 to be printed
Case, wherein pattern may include at least one in hole, slit, otch or other holes.Pattern may correspond to be printed in base
Conducting wire pattern on plate 10, the finger piece and/or busbar of such as solar cell.As an example, silk screen 154 can
With the opening for limiting conducting wire pattern and the woven wire (wire mesh) being arranged in opening.By using the second material
Material processing device 122 (it can be flood bar), can be provided material on the substrate 10 to be deposited as substantially uniform layer
On silk screen 154.Due to woven wire be present, material does not flow through opening.In deposition process, the first material process dress
112, such as scraper plate are put, to the material applying power on silk screen 154 or pressure and can compel to pass the material through opening so that material quilt
It is sent to substrate 10 (that is, depositing on the substrate 10).
According to some embodiments, deposition (such as printing) and material distribution perform in a stroke or in the cycle.Change sentence
Talk about, deposition and material distribution can be performed simultaneously.Combination cover ink movement during depositing operation can reduce the process time,
Such as critical path time.For example, critical path time can reduce about 1/3rd.
In the example of fig. 4, technique head 410 is single technique head, wherein the first material handling device 112 and second
Material handling device 122 is attached to technique head 410.However, the utility model not limited to this, and technique head may include two
Individual or more technique head unit, described two or more a technique head unit may be configured as independently from each other.For example, two
The first technique head unit in individual or more technique head unit may include that first with the first material handling device causes
Dynamic device and the second actuator with the second material handling device.The second technique head in two or more technique head units
Portion's unit may include another first actuator with another first material handling device and be filled with another second material process
Another second actuator put.In other examples, the second technique head unit may include that there is another first material process to fill
Put or an actuator of another second material handling device.
In some implementations, in the duration of the depositing operation performed using the first material handling device 112
At least a portion during simultaneously perform deposition and material distribution.For example, can the duration of depositing operation 50% or more
More, specifically 70% or more and more specifically 90% or more period execution material distribution.According to some embodiments,
Performed simultaneously during the basic whole duration (100% of the duration of such as depositing operation) of depositing operation deposition and
Material distributes.Depositing operation may correspond to the stroke performed by technique head 410 or movement (such as first position A with
Between the B of the second place).The distance between first position A and second place B can be equal to or more than substrate 10 or conductive circuit pattern
Ductility so that conducting wire pattern or one layer can deposit on the substrate 10 in a stroke.
According to some embodiments that can be combined with other embodiment as described herein, drive device is configured as using
In by technique head 410, at least from first position, A is moved to second place B on the first process orientation 5, so as at least from
Deposition/transmission and processing of the execution to the material on silk screen 154 are (for example, divide during one position A is moved to second place B
With).One performed by technique head 410 can be corresponded respectively to from first position A to movement as the same second place B or vice versa
Stroke (such as the first stroke and the second stroke).First process orientation 5 can be the horizontal direction 3 perpendicular to vertical direction 4.Together
Sample, the second process orientation can be horizontal direction 3.
First position A and second place B can be defined as technique head 410 relative to substrate 10, substrate support 20 and/
Or at least one relevant position in silk screen 154.The position on technique head 410 can then limit the first material handling device
112 and second material handling device 122 relative at least one phase in substrate 10, substrate support 20 and/or silk screen 154
Answer position.
As an example, when technique head 410 is in first position A and is moved along the first process orientation 5,
Two material handling devices 122 can be at position (a) place, and the first material handling device 112 can be at position (b) place.Equally,
When technique head 410 is in second place B and is moved along second process orientation opposite with the first process orientation 5, the
Two material handling devices 122 can be at position (c) place, and the first material handling device 112 can be at position (d) place.
According to some embodiments, can be carried between the first material handling device 112 and the second material handling device 122
For distance or spacing.Specifically, distance or spacing can be provided between adjacent or neighbouring material handling device.For example,
Distance or spacing on the first process orientation 5 can be 50mm or smaller, specifically 40mm or smaller, and more specifically may be used
It is about 30mm.Distance or spacing can be that material accumulation (" cream rolls up (paste roll) ") provides space.
In some embodiments, system 400 is configured as at least carrying out dual printing.For example, conducting wire pattern is (all
Such as the finger piece and/or busbar of solar cell) it may include two or more material layers.First material layer can be printed on
On substrate 10, and second material layer can be printed on the top of first material layer at least in part, to form conducting wire
Pattern.In some implementations, system 400 can be in the first deposition process (including from first position A to the second place
B movement or the first stroke) in printing first material layer.In some embodiments, system 400 can be in the second depositing operation
Printing second material layer in process (including from second place B to first position A movement or the second stroke).However, this practicality
New not limited to this, and the technique head that (for example, the process orientation of first direction 5 or second) is mobile in same direction can be utilized
Portion 410 performs dual printing.In some embodiments, substrate is alternately printed, for example, a substrate uses the first technique
Direction 5, another substrate use the second process orientation etc. (for example, for each processing or printing station).
In some implementations, the first process orientation 5 and the second process orientation can be substantially horizontal direction.Term
" horizontal direction " is understood to be different from " vertical direction ".That is, " horizontal direction " is related to the reality on such as technique head 410
Horizontal movement in matter, wherein still being recognized with the several years deviation (for example, reaching 5 ° or even up to 10 °) in exact level direction
To be " substantially horizontal direction ".Vertical direction 4 can be substantially parallel to gravity.
As described on Fig. 1 to Fig. 3, equipment, and specifically technique head 410, including the first actuator 110 and
Two actuators 120.In some implementations, for example moved on technique head 410 between first position A and second place B
During, it can adjust or control the second material handling device 122 and the distance between silk screen 154 and/or substrate support 20
(for example, in vertical direction).For example, hanging down for the second material handling device 122 can be adjusted by using the second actuator 120
Straight position adjusts distance.Adjustment upright position may insure the second material handling device without interference with silk screen 154 in real time, especially
It is when the contact because between silk screen 154 and the first material handling device 112 of silk screen 154 deforms.According to some embodiments,
Can be for example using the second actuator 120 by between the second material handling device 122 and silk screen 154 and/or substrate support 20
Distance be adjusted to follow silk screen profile (screen profile).For example, in the moving process on technique head 410, it is adjustable
Whole or the second material handling device of control 122 and the distance between silk screen 154 and/or substrate support 20, to be basic
It is upper constant.
Fig. 5 and Fig. 6 is shown is used to be deposited (such as printing) and material distribution according to embodiment described herein
Technique head 510 schematic diagram, the technique head 510 is moved on the first process orientation 5 and on the second process orientation 6.
Technique head 510 includes the first actuator 110 and the second actuator 120, and the first actuator 110, which has, is attached to it
On the first material handling device 112, the second actuator 120, which has, is attached to the second material handling device 122 thereon.According to
Some embodiments, according to the equipment of embodiment described herein, specifically technique head 510, including one or more
Other materials processing unit, such as the 3rd material handling device 532.Equipment, specifically technique head 510, it may include connection
To the 3rd actuator 530 of the first actuator 110.3rd actuator 530 can be with the first actuator 110 similarly or identicallyly
Configuration, and the description provided for the first actuator 110 is also applied for the 3rd actuator 530, therefore be not repeated.Specifically
Ground, the first actuator 110 can be configured as example synchronously moving the 3rd actuator 530 with the second actuator 120.
First actuator 110 can be configurable at least one below change：First material handling device 112 relative to
Silk screen 154 and/or substrate support 20 are orientated away from walk-off angle.It is following extremely that second actuator 120 can be configurable for change
Few one：Second material handling device 122 is orientated relative to silk screen 154 and/or substrate support 20 away from walk-off angle.3rd causes
Dynamic device 530 can be configurable at least one below change：3rd material handling device 532 is relative to silk screen 154 and/or base
Plate support 20 is orientated away from walk-off angle.
Turning now to Fig. 5, when technique head 510 is in first position A, the second material handling device 122 is in position
(a), the first material handling device 112 is in position (b), and the 3rd material handling device 532 is in position (a').Such as Fig. 6
Shown, when technique head 510 is in second place B, the second material handling device 122 is in position (c), the first material process
Device 112 is in position (d), and the 3rd material handling device 532 is in position (c').
According to some implementations, the first material handling device 112 can be printing equipment, such as scraper plate.At second material
It can be material dispensing apparatus to manage the material handling device 532 of device 122 and the 3rd, substantially equal for being provided on silk screen 154
Even material membrane.Although it is not shown, the 4th material handling device could attach to the first actuator 110.4th material handling device
Can be another printing equipment, such as scraper plate.
For example, a printing equipment can be provided only, such as the first material handling device 112, such as when printing equipment by with
It is set to for such when being printed in both direction (i.e. the first process orientation 5 and the second process orientation 6).It is configured as using
Can have the tip of substantial symmetry, such as rectangle tip in the printing equipment along two opposite direction printings.In another example
In, two printing equipments, such as the first material handling device 112 and the 4th material handling device, such as work as printing can be provided
Device is such when being configurable for being printed on (i.e. the first process orientation 5 or the second process orientation 6) only in one direction.
The printing equipment for being configurable for only being printed in one direction can be for example angled scraper plate, as shown in Figure 2.
According to some embodiments that can be combined with other embodiment as described herein, when technique head 510 is first
When being moved on process orientation 5, the second material handling device 122 is positioned in the rear of the first material handling device 112.Work as technique head
3rd material handling device 532 can be positioned at the first material handling device 112 by portion 510 when being moved on the second process orientation 6
Rear.
As shown in figure 5, during mobile on the first process orientation 5 on technique head 510, technique head 510 uses
Second material handling device 122 carries out material distribution.In addition, as shown in fig. 6, on technique head 510 on the second process orientation 6
In mobile process, technique head 510 carries out material distribution using the 3rd material handling device 532.For on technique head 510
Moving process in carry out the material handling device (for example, material dispensing apparatus) of material distribution and can be positioned so that and sufficiently close to
Silk screen 154, to allow material process, substantially uniform material layer is such as provided on silk screen 154.For example, for carrying out
Material distribution material handling device and the distance between silk screen 154 (for example, the first distance d1 for describing in the following paragraphs or
Second distance d2) can according to the thickness degree for the material being deposited on silk screen 154, the rheological characteristic of material (for example, paste) and
At least one in the composition of material is selected.
According to some embodiments, during mobile on the first process orientation 5 on technique head 510, silk screen 154 with
The first distance d1 between second material handling device 122 is less than second between the material handling device 532 of silk screen 154 and the 3rd
Distance d2.In other words, the second material handling device 122 declines, and the 3rd material handling device 532 raises.In technique head
During portion 510 is mobile on the second process orientation 6, the second distance between the material handling device 532 of silk screen 154 and the 3rd
D2 is smaller than the first distance d1 between the material handling device 122 of silk screen 154 and second.First distance d1 and second distance d2 can
To limit in vertical direction.
In some implementations, the relatively large distance in the first distance d1 and second distance d2 (that is, in Fig. 5 second away from
From the first distance d1 in d2 and Fig. 6) can be between 5mm and 25mm, specifically between 10mm and 20mm
In the range of, and more specifically can be about 15mm.Small distance in first distance d1 and second distance d2 is (that is, in Fig. 5
The first distance d1 and Fig. 6 in second distance d2) can specifically exist between 0.01mm and 2mm
Between 0.05mm and 1.5mm, and more specifically can be between 0.1mm and 1mm.
In some implementations, in the moving process between first position A and second place B, it can adjust or control
First distance d1 and/or second distance d2.For example, the first distance d1 can be adjusted using the second actuator 120, and the
Two distance d2 can be adjusted using the 3rd actuator 530.Real-time adjustment to the first distance d1 and/or second distance d2 can
To ensure material handling device without interference with silk screen 154.According to some embodiments, the first distance d1 and/or second can adjust
Distance d2 is to follow silk screen profile.According to some embodiments, the distance of the material handling device just used is only adjusted.It is not used
Material handling device (the second material handling device 122 in the 3rd material handling device 532 and Fig. 6 in Fig. 5) distance
It can keep constant.For example, the distance of the material handling device in positive use can be adjusted, so as to by the material handling device
The distance between silk screen 154 (such as the first distance d1 or second distance d2) remains substantial constant.
In technological process, operable the first material handling device with mobile link to the first actuator of the first actuator
With the second actuator.When the first actuator moves the second actuator, the second material handling device of the second actuator is connected to
Moved together with the second actuator.Material process can be used in the first material handling device and the second material handling device
At least one execution.
For example, the first material handling device is printing equipment, and the second material handling device is to be used to above carry in silk screen
For the material dispensing apparatus of substantially uniform material membrane.The first material handling device and can be moved along substrate support
Two material handling devices, so as to which material is sent into substrate from silk screen using the first material handling device, and use the second material
Material processing device performs the processing (such as distributing) to the material on silk screen.Second material handling device can follow the first material
Processing unit, to provide substantially uniform material layer on silk screen, so as to be printed onto in subsequent substrate.
Fig. 7, Fig. 8 A and Fig. 8 B show the equipment being used in solar cell manufacture according to embodiment described herein
Programme of work schematic diagram.
Equipment may include technique head 700, and the technique head 700 has the first actuator 710 (for example, linear electric machine)
With the second actuator 720 (for example, pneumatic actuator).First material handling device 712 (such as angled scraper plate) can connect
To or be already connected to the first actuator 710, and the second material handling device 722 (such as flood bar) may be connected to or connect
To the second actuator 720.In Fig. 7 of neutral (idle position) of equipment is shown, the first material handling device
712 are shown at height h (or distance) place of the top of silk screen 154.
Fig. 8 A show print stroke.Equipment, specifically technique head 700, is moved on print direction 701, with
In the substrate (not shown) being sent to paste from silk screen 154 below silk screen 154.The neutral shown from Fig. 7, the
One actuator 710 makes the first material handling device 712 and the second actuator 720 decline the first amount a, so that the first material process
The actuator 720 of device 712 and second is in Fig. 8 A the position shown.First amount a can be equal to or more than height h.Specifically,
First actuator 710 can be linear electric machine, and it can come for example by keeping ad-hoc location to apply suitable pressure to silk screen 154
Perform typography.
Fig. 8 B show the cover ink stroke that can be performed after print stroke.Equipment, specifically technique head 700, is covering
Moved on black direction 801, to provide paste on silk screen 154 for for follow-up typography.In the idle running position using Fig. 7
In the case of putting as reference, the first actuator 710 makes the second actuator 720 decline the second amount a ', and the second actuator 720
The second material handling device 722 is set to decline the 3rd amount b, so that the second material handling device 722 is in Fig. 8 B the position shown.
Second amount a ' and the 3rd amount b summation can be equal to or less than height h.For example, the second amount a ' can be about 0.25 times of height h, and
And the 3rd amount b can be about 0.75 times of height h.
First actuator 710 can be linear electric machine, and it can position the second material handling device 722 exactly, and (it can be to cover
Ink knife).Second actuator 720 can be pneumatic actuator, and it can change the first material handling device 712 and the second material process
Relative position between device 722.The positioning of the first material handling device and the second material handling device can be accurately controlled.
Fig. 9, Figure 10 A and Figure 10 B are shown to be manufactured according to the solar cell that is used for of other embodiment as described herein
In equipment programme of work schematic diagram.
Equipment may include technique head 900, and the technique head 900 has two the first actuators, and (such as first is linear
The linear electric machine 911 of motor 910 and second) and two the second actuators (be such as connected to the first linear electric machine 910 first is pneumatic
Actuator 920 and the second pneumatic actuator 921 for being connected to the second linear electric machine 911).First material handling device 912 is (such as
Angled scraper plate) the first linear electric machine 910 is may be connected to or is already connected to, and the second material handling device 922 (such as covers
Ink knife) it may be connected to or be already connected to the first pneumatic actuator 920.(such as angled scrapes 3rd material handling device 912 '
Plate) the second linear electric machine 911 is may be connected to or is already connected to, and the 4th material handling device 922 ' (such as flood bar) can connect
It is connected to or is already connected to the second pneumatic actuator 921.
First linear electric machine 910, the first pneumatic actuator 920, the first material handling device 912 and the second material process dress
The first group (being indicated with " 1 ") can be formed by putting 922.Equally, the second linear electric machine 911, the second pneumatic actuator the 921, the 3rd
Material handling device 912 ' and the 4th material handling device 922 ' can form the second group (being indicated with " 2 ").
Figure 10 A show printing and the cover ink stroke of combination.Equipment, specifically technique head 900, in the first technique side
Moved on to 901, so as to which paste is sent into substrate from silk screen 154 using the 3rd material handling device 912 ' in the second group
(not shown), while carry out cover ink using the second material handling device 922 in the first group.Figure 10 B show another combination
Printing and cover ink stroke.Equipment, specifically technique head 900, is moved on the second process orientation 902, to use
Paste is sent to substrate (not shown) by the first material handling device 912 in a small group from silk screen 154, while small using second
The 4th material handling device 922 ' in group carries out cover ink.The utility model has used integration actuator, wherein with
First actuator of one material handling device is configured such that the first material handling device fills together with the second material process
The second actuator put moves together.In other words, the second actuator is arranged on the first actuator.When the first actuator moves
First material handling device is for example to adjust the first material handling device and the distance between silk screen and/or substrate support
When, the second actuator and the second material handling device simultaneously and optionally synchronizing moving.It can accurately control at the first material
Manage the positioning of device and the second material handling device.
Although the above is directed to embodiment of the present utility model, also can not depart from it is of the present utility model basic
Design other and further embodiment of present disclosure in the case of scope, and the scope of the utility model by with
Attached claims determine.
Claims (15)
1. the equipment in a kind of manufacture for solar cell, the equipment include：
First actuator, wherein the first material handling device may be connected to first actuator；With
Second actuator, wherein the second material handling device may be connected to second actuator, wherein second actuator
First actuator is connected to, and wherein described first actuator is configured as moving second actuator.
2. equipment as claimed in claim 1, it is characterised in that first actuator is configured such that second actuating
Device moves together with first material handling device.
3. equipment as claimed in claim 1, it is characterised in that it is following at least that first actuator is configurable for progress
One：Linearly move first material handling device and change the angle orientation of first material handling device.
4. equipment as claimed in claim 1, it is characterised in that it is following at least that second actuator is configurable for progress
One：Linearly move second material handling device and change the angle orientation of second material handling device.
5. equipment as claimed in claim 1, it is characterised in that it is following at least that first actuator is configurable for progress
One：Linearly move second actuator and change the angle orientation of second actuator.
6. equipment as claimed in claim 1, it is characterised in that in first actuator and second actuator at least
One selected from the group being made up of following item：Linear electric machine, stepper motor, pneumatic actuator, motor and their any group
Close.
7. equipment as claimed in claim 1, it is characterised in that the equipment is configured as：
First actuator is operated so as to be connected to first material handling device and described of first actuator
Two actuators move, wherein when first actuator moves second actuator, are connected to second actuator
Second material handling device moves together with second actuator；With
Use at least one execution material process in first material handling device and second material handling device.
8. equipment as claimed in claim 7, it is characterised in that first material handling device is printing equipment, and institute
It is the material dispensing apparatus for providing uniform material membrane on silk screen to state the second material handling device, and vice versa, wherein
The equipment is configured as：
First material handling device and second material handling device are moved along substrate support, described in using
The material is sent to the substrate by the first material handling device from the silk screen, and is filled using second material process
Put the processing performed to the material on the silk screen.
9. a kind of system for being used to be deposited on material on the substrate in manufacturing for solar cell, the system include：
Technique head, the technique head can be moved at least along substrate support on the first process orientation, wherein described
Technique head includes：
Equipment as any one of claim 1 to 8；With
First material handling device and second material handling device.
10. system as claimed in claim 9, it is characterised in that it is following extremely that first actuator is configurable for change
Few one：First material handling device is orientated relative to the substrate support away from walk-off angle.
11. system as claimed in claim 9, it is characterised in that it is following extremely that second actuator is configurable for change
Few one：Second material handling device is orientated relative to the substrate support away from walk-off angle.
12. system as claimed in claim 9, it is characterised in that at first material handling device and second material
Manage at least one selected from the group being made up of following item in device：Printing equipment and substantially uniform for being provided on silk screen
The material dispensing apparatus of material membrane.
13. system as claimed in claim 12, it is characterised in that first material handling device is printing equipment, and
Second material handling device is the material dispensing apparatus for providing uniform material membrane on silk screen.
14. system as claimed in claim 9, further comprise drive device, the drive device be configurable for along
The substrate support mobile technique head on first process orientation, to carry out in printing and material distribution
It is at least one.
15. system as claimed in claim 9, it is characterised in that the system is configured to adjust the technique head
Portion is relative to the substrate support away from least one in walk-off angle orientation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720463781.7U CN206849850U (en) | 2017-04-28 | 2017-04-28 | Equipment in being manufactured for solar cell and the system for being deposited on material on the substrate in being manufactured for solar cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720463781.7U CN206849850U (en) | 2017-04-28 | 2017-04-28 | Equipment in being manufactured for solar cell and the system for being deposited on material on the substrate in being manufactured for solar cell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206849850U true CN206849850U (en) | 2018-01-05 |
Family
ID=60794378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720463781.7U Active CN206849850U (en) | 2017-04-28 | 2017-04-28 | Equipment in being manufactured for solar cell and the system for being deposited on material on the substrate in being manufactured for solar cell |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206849850U (en) |
-
2017
- 2017-04-28 CN CN201720463781.7U patent/CN206849850U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9991412B2 (en) | Systems for precision application of conductive adhesive paste on photovoltaic structures | |
| IL261863A (en) | Method of manufacturing software controlled antenna | |
| DE102012222672A1 (en) | Organic layer deposition apparatus and method for manufacturing organic light devices of the display using the same | |
| CN103270605A (en) | Solar cell collecting electrode formation device and method, and coating head | |
| KR101366359B1 (en) | Apparatus and method of manufacturing printed transparent conductive electrode film | |
| CN109195801A (en) | For material web is printed in be used for solar battery manufacture in substrate on equipment, manufacture of solar cells equipment and be used to for material web being printed in be used for solar battery manufacture in substrate on method | |
| CN108842487A (en) | A kind of Full automatic digital ink-jet printing method | |
| CN206849850U (en) | Equipment in being manufactured for solar cell and the system for being deposited on material on the substrate in being manufactured for solar cell | |
| CN208336250U (en) | For manufacturing the equipment of solar battery and for the deposition arrangement of the silk-screen printing on manufacturing substrate used in solar battery | |
| CN207381421U (en) | For material web to be printed in the equipment and manufacture of solar cells equipment on the substrate in being manufactured for solar cell | |
| EP1714309B1 (en) | Device for applying a liquid dopant solution on a wafer | |
| WO2018197007A1 (en) | Apparatus for use in the manufacture of a solar cell, system for deposition of a material on a substrate used in the manufacture of a solar cell, and method for processing of a deposition material used in the manufacture of a solar cell | |
| CN207587749U (en) | For material web to be printed in the equipment and manufacture of solar cells equipment on the substrate in being manufactured for solar cell | |
| CN207916263U (en) | Equipment for the silk-screen printing of the controller of the equipment of silk-screen printing and the material on substrate on substrate | |
| CN109196664A (en) | For material web is printed in be used for solar battery manufacture in substrate on equipment, manufacture of solar cells equipment and be used to for material web being printed in be used for solar battery manufacture in substrate on method | |
| KR100866323B1 (en) | Thin Film Coating Method and Apparatus for Large Area | |
| EP3732734B1 (en) | Method for screen printing of a material on a substrate, controller for an apparatus for screen printing on a substrate, and apparatus for screen printing of a material on a substrate | |
| WO2018077422A1 (en) | Apparatus for processing of a substrate used in the manufacture of a solar cell, and method for processing of a substrate used in the manufacture of a solar cell | |
| TW201840014A (en) | Apparatus for screen printing of a material on a substrate used in the manufacture of a solar cell, solar cell production apparatus, and method for screen printing of a material on a substrate used in the manufacture of a solar cell | |
| JP2023550700A (en) | Apparatus and method for segmented parallel dispensing | |
| TW201907579A (en) | Apparatus for screen printing materials on substrates for use in solar cell manufacturing, solar cell production equipment, and methods for screen printing materials onto substrates for use in solar cell fabrication | |
| CN110181931A (en) | Printing screen plate, printing equipment and printing process | |
| CN206471344U (en) | Device for handling the substrate used in solar cell manufacture | |
| CN107344151A (en) | A kind of ink-jet glue spreading method and equipment | |
| KR20120139431A (en) | Moving type multi-nozzle system and method for making transparent electrode using the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |