CN207294190U

CN207294190U - The high polycrystalline silicon rod of cutting accuracy

Info

Publication number: CN207294190U
Application number: CN201721304619.7U
Authority: CN
Inventors: 薛荣国; 袁郑堂; 陈春雷
Original assignee: Jiangyin Dongsheng New Energy Ltd By Share Ltd
Current assignee: Jiangyin Dongsheng New Energy Ltd By Share Ltd
Priority date: 2017-10-11
Filing date: 2017-10-11
Publication date: 2018-05-01
Anticipated expiration: 2027-10-11

Abstract

A kind of high polycrystalline silicon rod of cutting accuracy is the utility model is related to, it includes columned silicon rod body（1）, the silicon rod body（1）Including two sections, its epimere is polysilicon section（1.2）, hypomere is monocrystalline silicon section（1.1）, the monocrystalline silicon section（1.1）Periphery wall on be evenly arranged with four crest lines along its length（1.3）, the monocrystalline silicon section（1.1）End face on be provided with four guiding resin streaks（2）, four guiding resin streaks（2）One square of end to end formation, the position at square four angles and monocrystalline silicon section（1.1）Four crest lines on periphery wall（1.3）Position it is corresponding.A kind of high polycrystalline silicon rod of cutting accuracy of the utility model, it increases in silicon rod monocrystalline section is oriented to resin streak, diamond wire cuts to guiding resin streak first during cutting, verticality can be cut to silicon rod and be adjusted positioning, diamond wire produces deviation with silicon rod during so as to prevent cutting, and final product quality and lumber recovery has been effectively ensured.

Description

The high polycrystalline silicon rod of cutting accuracy

Technical field

A kind of high polycrystalline silicon rod of cutting accuracy is the utility model is related to, belongs to technical field of polysilicon production.

Background technology

At present, it is all the conventional hydrogen reduction of trichlorosilane that the technique of domestic production polysilicon is most of at present, i.e. improvement west The capital equipment of Men Zifa, improved Siemens or other similar approach production major diameter polysilicon is polycrystalline silicon reducing furnace, more Crystal silicon reduction furnace is electrified on elongated silicon core, is made the heating of silicon core rubescent, until surface temperature reaches 1100 degrees Celsius, is led to Enter high-purity trichlorosilane and hydrogen, make it that hydrogen reduction reaction occur at high temperature, the silicon packing of molecules in trichlorosilane is existed On silicon core, its diameter is set constantly to increase, in general, it can also be square that the diameter of silicon core, which at 7-10 millimeters, can be circle, Or other shapes, diameter is constantly increased to 120-200 millimeters eventually through hydrogen reduction reaction, produce high-purity solar energy The polysilicon device of level 6N or electron level 11N can not be suitable for the test of square silicon core in factory.

The preparation method of silicon core has two kinds at present, and traditional method is to use CZ methods（Melt czochralski method in area）, i.e., diameter in 20- 50 millimeters of silicon rod uses high-frequency induction heating in the vacuum hearth full of inert gas, makes its top local melting, from top Seed crystal of 1 diameter at 5-10 millimeters is put into, then slowly lifting upwards, becomes diameter at 7-10 millimeters, length exists Elongated silicon core between 1900-3000 millimeters, the drawback is that pull rate is slow, is generally 8-12 mm/mins, draws 12 meters Silicon core need 4 it is small when, low production efficiency, power consumption is big, and equipment investment is big.

Another kind is to use diamond tool patterning method, and Diamond Wire Technology companies of the U.S. develop use The elongated silicon multiline cutting machine of numerical-control polysilicon of diamond wire, the preparation for silicon core.By using the upper diamond of plating The finer wire line of particulate is moved back and forth at high speed on workpiece to be machined or unidirectional movement, and silicon rod is pressed in the lathe diamond Line intersects on the square gauze of composition, so that the silicon rod to be cut into elongated silicon core.Its advantage is fairly obvious, when 10-12 is small 200 or so 2 meters long 7X7 or 8X8 millimeters of square silicon core can be cut out, power consumption is small, high in machining efficiency.

The masterbatch of silicon core cutting at present directly uses obtained silicon rod in reduction furnace, and silicon core needs to hang silicon rod when cutting To cutting machine, its verticality adjusts to get up to be inconvenient when silicon rod is cut, and diamond wire easily produces inclined with silicon rod during cutting From so as to influence final product quality and lumber recovery.

The content of the invention

Technical problem to be solved in the utility model is to provide a kind of cutting accuracy high more for the above-mentioned prior art Crystalline silicon rod, its diamond wire in silicon rod monocrystalline section increase guiding resin streak, cutting cut to guiding resin streak first, can be right Silicon rod cutting verticality is adjusted positioning, so as to prevent that diamond wire produces deviation with silicon rod during cutting, has been effectively ensured most Whole product quality and lumber recovery.

The technical scheme in the invention for solving the above technical problem is：A kind of high polycrystalline silicon rod of cutting accuracy, it Including columned silicon rod body, the silicon rod body includes two sections, its epimere is polysilicon section, and hypomere is monocrystalline silicon Section, is evenly arranged with four crest lines on the periphery wall of the monocrystalline silicon section along its length, on the end face of the monocrystalline silicon section Four guiding resin streaks are provided with, the guiding resin streak and the end face of monocrystalline silicon section are arranged vertically, and four are oriented to resin streak head Tail connects to forming a square, and the position at square four angles is opposite with the position of four crest lines on monocrystalline silicon section periphery wall Should.

Compared with prior art, the utility model has the advantage of：

A kind of high polycrystalline silicon rod of cutting accuracy of the utility model, it is made using the crest line on silicon rod monocrystalline silicon section periphery wall For positioning datum, in silicon rod monocrystalline section end face increase guiding resin streak, cutting, diamond wire cuts to guiding resin streak first, Verticality can be cut to silicon rod and be adjusted positioning, so as to prevent that diamond wire produces deviation with silicon rod during cutting, effectively protects Final product quality and lumber recovery are demonstrate,proved.

Brief description of the drawings

Fig. 1 is a kind of structure diagram of the high polycrystalline silicon rod of cutting accuracy of the utility model.

Wherein：

Silicon rod body 1

Monocrystalline silicon section 1.1

Polysilicon section 1.2

Crest line 1.3

It is oriented to resin streak 2.

Embodiment

The utility model is described in further detail below in conjunction with attached drawing embodiment.

As shown in Figure 1, the polycrystalline silicon rod that a kind of cutting accuracy in the present embodiment is high, it includes columned silicon rod body 1, the silicon rod body 1 includes two sections, its epimere is polysilicon section 1.2, and hypomere is monocrystalline silicon section 1.1, the monocrystalline silicon Four crest lines 1.3 are evenly arranged with along its length on the periphery wall of section 1.1, are set on the end face of the monocrystalline silicon section 1.1 There are four guiding resin streaks 2, the guiding resin streak 2 and the end face of monocrystalline silicon section 1.1 are arranged vertically, four guiding resin streaks 2 One square of end to end formation, position and four crest lines 1.3 on 1.1 periphery wall of monocrystalline silicon section at square four angles Position is corresponding；

Silicon rod is hung to cutting machine during cutting, the square gauze of the diamond wire intersection composition of cutting machine is gradually upward Cutting, adjusts the angle position of silicon rod, makes the position phase of the guiding resin streak and square gauze of quadrangle on end surface of monocrystalline silicon Match somebody with somebody, even if the diamond wire perpendicular cuts of square gauze, so as to complete the cutting positioning of silicon rod, ensure follow-up into resin streak is oriented to Cutting accuracy and quality.

In addition to the implementation, the utility model has further included other embodiment, all to use equivalents or equivalent The technical solution that substitute mode is formed, should all fall within the protection domain of the utility model claims.

Claims

A kind of 1. high polycrystalline silicon rod of cutting accuracy, it is characterised in that：It includes columned silicon rod body（1）, the silicon rod Body（1）Including two sections, its epimere is polysilicon section（1.2）, hypomere is monocrystalline silicon section（1.1）, the monocrystalline silicon section （1.1）Periphery wall on be evenly arranged with four crest lines along its length（1.3）, the monocrystalline silicon section（1.1）End face on It is provided with four guiding resin streaks（2）, the guiding resin streak（2）With monocrystalline silicon section（1.1）End face be arranged vertically, four are led To resin streak（2）One square of end to end formation, the position at square four angles and monocrystalline silicon section（1.1）On periphery wall Four crest lines（1.3）Position it is corresponding.