CN207257129U - Condensation structure and decompression dry device - Google Patents
Condensation structure and decompression dry device Download PDFInfo
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- CN207257129U CN207257129U CN201721334499.5U CN201721334499U CN207257129U CN 207257129 U CN207257129 U CN 207257129U CN 201721334499 U CN201721334499 U CN 201721334499U CN 207257129 U CN207257129 U CN 207257129U
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- cold plate
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- condenser pipe
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Abstract
It the utility model is related to a kind of condensation structure and the decompression dry device comprising the condensation structure.The condensation structure includes cold plate and condenser pipe, and the region in the middle part of cold plate is located at least on cold plate and is equipped with venthole, a side surface of cold plate is cryosurface, and cryosurface is used to set towards to the sample stage in decompression dry device；Condenser pipe is arranged on cold plate.Above-mentioned condensation structure is located in decompression dry device, it can not only realize the cooling to sample, simultaneously because the setting of cold plate upper vent hole, above-mentioned condensation structure can also enable the solvent in sample integrally volatilize upward, and the situation fast compared to the solvent volatilization on substrate central areas of the solvent on substrate edges position is avoided the occurrence of as far as possible, the uniformity that solvent volatilizees in sample is effectively improved, improves drying and forming-film uniformity, and then improve the performance of product.
Description
Technical field
Field of display devices is the utility model is related to, more particularly to a kind of condensation structure and decompression dry device.
Background technology
In production, OLED can use InkJet printing processes make, its process flow steps mainly include base-plate cleaning,
Substrate drying, substrate pre-treatment, inkjet printing functional material ink, be dried under reduced pressure, toast, be deposited and encapsulate.Wherein, subtract
Press dry dry principle be solvent under conditions of low pressure, boiling point reduce, solvent be easier volatilize.OLED uses this technique in making
Purpose be exactly to evaporate the solvent composition in the samples such as functional material ink, the solid-state in reserved functional material ink into
Divide, i.e. reserved functional material composition.
In process of production, when the component of functional material ink is different, the required temperature being dried under reduced pressure is not yet
Together, some samples need to carry out under conditions of less than room temperature.Need what is be dried under reduced pressure at room temperature for sample
Situation, can set cold plate 10 as shown in Figure 1 in decompression dry device near counter sample platform position, to reach drop
The effect of the temperature of sample such as low-function material ink.
However, since cold plate 10 is solid construction, in decompression process, cold plate has and makes solvent in sample to cold
The guide functions of the peripheral direction flowing of solidifying plate, and then the solvent in the sample on substrate edges position is compared area of substrate center
The evaporation of the solvent in sample on domain is fast, so that the film quality to form a film on substrate is uneven, then influences the property such as shine of product
Energy.
Utility model content
Based on this, it is necessary to provide it is a kind of can improve be dried under reduced pressure during condensation structure into film uniformity and decompression
Drying device.
A kind of condensation structure, it is described for being cooled down to the sample being placed on the sample stage in decompression dry device
Condensation structure includes：
Cold plate, the region being located at least in the middle part of the cold plate on the cold plate are equipped with venthole, the cold plate
A side surface be cryosurface, the cryosurface is used to set towards the sample stage；
Condenser pipe, the condenser pipe are arranged on the cold plate.
In one of the embodiments, the venthole has multiple, and multiple venthole array distributions are in the condensation
On plate.
In one of the embodiments, the cold plate is in latticed engraved structure.
In one of the embodiments, the condenser pipe is set on the cold plate in bending ring-type, and described cold
Solidifying pipeline avoids the corresponding region of the venthole.
In one of the embodiments, the condenser pipe is located on another side surface of the cold plate；Or
The cold plate is equipped with screens groove, and the condenser pipe is in the screens groove.
A kind of decompression dry device, including drying box and the condensation structure described in any of the above-described embodiment；
The drying box has drying chamber, and the drying box can be connected with air extractor so that can in the drying chamber
Negative pressure is formed, sample stage is equipped with the drying chamber；
The cold plate is arranged in the drying chamber, and the cryosurface of the cold plate is set towards the sample stage
Put；
The liquid feeding end and outlet end of the condenser pipe extend the outside of the drying box respectively.
In one of the embodiments, the sample stage is liftable sample stage.
In one of the embodiments, the sample stage is heated baking platform.
In one of the embodiments, the inflating port being connected with the drying box is additionally provided with the drying box.
In one of the embodiments, the size of the cold plate is not less than the size of the sample stage.
Above-mentioned condensation structure includes cold plate and condenser pipe, the region being wherein located at least on cold plate in the middle part of cold plate
Equipped with venthole so that the solvent on substrate in sample can integrally volatilize upward, a side surface of cold plate is cryosurface,
Cryosurface is used to set towards to the sample stage in decompression dry device；Condenser pipe is located on cold plate to promote on sample stage
Sample cooling.Above-mentioned condensation structure is located in decompression dry device, condenser pipe inner recirculation flow can be made to lead to coolant, and will
Sample on sample stage is placed close to cold plate, you can realizes the cooling to sample；Simultaneously because cold plate upper vent hole is set
Put, above-mentioned condensation structure can also make the overall volatilization upwards of the solvent in sample, and avoid the occurrence of as far as possible on substrate edges position
Solvent volatilize compared to the solvent on substrate central areas fast situation, effectively improve solvent in the systems such as functional material ink
The uniformity of volatilization, improves drying and forming-film uniformity, and then improves the luminescent properties of luminescent device, improves the performance of product.
Further, the cold plate of above-mentioned condensation structure uses latticed engraved structure, can further improve solvent and wave
The uniformity of hair, further improves the uniformity of drying and forming-film.
Brief description of the drawings
Fig. 1 is the schematic diagram of conventional condensation plate；
Fig. 2 is the structure diagram of the decompression dry device of an embodiment；
Fig. 3 is the structure diagram of the condensation structure in decompression dry device in Fig. 2.
Embodiment
For the ease of understanding the utility model, the utility model is more fully retouched below with reference to relevant drawings
State.The preferred embodiment of the utility model is given in attached drawing.But the utility model can come in fact in many different forms
It is existing, however it is not limited to embodiment described herein.On the contrary, the purpose for providing these embodiments is the public affairs made to the utility model
Open the understanding more thorough and comprehensive of content.
It should be noted that when element is referred to as " being located at " another element, it can directly on another element or
There may also be element placed in the middle by person.
Unless otherwise defined, all of technologies and scientific terms used here by the article is led with belonging to the technology of the utility model
The normally understood implication of technical staff in domain is identical.It is simply in the term used in the description of the utility model herein
The purpose of description specific embodiment, it is not intended that in limitation the utility model.Term as used herein " and/or " include
The arbitrary and all combination of one or more relevant Listed Items.
Incorporated by reference to Fig. 2 and Fig. 3, the decompression dry device of an embodiment, including drying box 100, sample stage 110 and condensation
Structure.
In the present embodiment, drying box 100 has drying chamber 101.Drying box 100 can be with air extractor (in figure not
Draw) connect so as to which negative pressure can be formed in drying chamber 101 to reduce the solvent boiling point in sample 2 to be dried, and raising sample is done
Dry speed.
Specifically, drying box 100 can be made of stainless steel, durable.Drying box 100 is equipped with and drying chamber
101 bleeding points being connected.Preferably, bleeding point is arranged on the medium position on the roof of drying box 100, so that pumping airflow is whole
Body upwards with improve functional material ink on substrate 1 wait drying sample 2 into film uniformity.Wherein, substrate 1 can be glass
Substrate etc..When sample 2 to be dried is other compositions, substrate 1 may be replaced by vessel and be produced with carrying other kinds of material
Product.In addition, the shape of drying box 100 can be the shapes such as cylindrical, cuboid, as long as easy to the cloth in drying chamber 101
If condensation structure 200 simultaneously makes extraction flow uniformly flow upwards out as far as possible.
In other embodiments, the inflating port being connected with drying chamber 101 can also be set on drying box 100.It is preferred that
Ground, inflating port are arranged on the bottom of drying chamber 101 for making to recover atmospheric pressure in drying chamber 101 after the completion of sample drying.
In addition, when drying box 100 is used for fired sample, inflating port can also be inert gas entrance, be used for and inertia
Gas source generating means is connected to provide atmosphere of inert gases to drying chamber 101, then with inert gas storage device
Protect sample.Inert gas can be common nitrogen, argon gas etc..
In the present embodiment, sample stage 110 is arranged in drying chamber 101.Preferably, sample stage 110 is liftable sample
Platform, easy to be risen to 2~5mm of cryosurface apart from cold plate 200 after placing sample 2 to be dried, to improve cooling effect.
Further, sample stage 110 can also be heated baking platform, have heating and refrigerating function.For boiling point it is higher,
The relatively low solvent of viscosity, which in advance can preheat functional material ink wait drying sample 2, then control pumping
Gas velocity rate, can avoid the rate of drying of film layer edge in film forming procedure from being more than the situation of the rate of drying in the middle part of film layer,
The uniform fast filming of sample can further be promoted.
In addition, when sample stage 110 is heated baking platform, sample of the decompression dry device to substrate 1 can be further used
Product film layer carries out follow-up roasting procedure, can reduce the number of sample transfer, effectively avoid sample transfer process from causing sample
Influence simplify step, and efficiency can be improved, improve product quality.
Please further combined with Fig. 2, in the present embodiment, condensation structure includes cold plate 200 and condenser pipe 210.
In the present embodiment, cold plate 200 is arranged in drying chamber 101.One side surface of cold plate 200 is cryosurface,
Cryosurface is used to set towards sample stage 110.
Preferably, cold plate 200 is in latticed engraved structure.Treated using the cold plate 200 of the latticed engraved structure
When drying sample 2 is cooled down, in pumping process is depressurized, pumping airflow in sample 2 to be dried can as in Fig. 2 dotted line refer to
The direction shown flows up and is flowed out by venthole, and then makes sample entirety evenly drying, and the thickness for effectively improving film forming is equal
Even property, and then improve the performance of product.
It is appreciated that in other embodiments, when the sample area on substrate 1 is smaller, positioned at cold on cold plate 200
The region at the solidifying middle part of plate 200 is equipped with a venthole.In addition, when the sample area on substrate 1 is larger, cold plate 200
Upper vent hole can also have multiple, such as two, ten, 25 etc., multiple ventholes can be with array distribution in cold plate
On 200, as long as can enable pumping airflow in sample 2 to be dried upwards uniformly through venthole and make sample 2 to be dried
Homogeneous film formation.
In other embodiments, the aperture of venthole can also be adjusted according to actual conditions, further to adjust air-flow
Path, makes the pumping airflow even variation for treating drying sample 2, further avoid in the middle part of sample dry relatively slow, edge drying compared with
Fast phenomenon, further improves the uniformity of the drying and forming-film of sample.
In the present embodiment, further, the size of cold plate 200 is not less than the size of sample stage 110, size master
Refer to 200 orthographic projection of cold plate when on sample stage 110, projection can cover the surface of sample stage, to ensure to sample stage
The cooling effect and water conservancy diversion effect of sample on 110.
In the present embodiment, condenser pipe 210 is located on another side surface of cold plate 200, and condenser pipe 210
Liquid feeding end and outlet end extend the outside of drying box 100 to connect liquid coolant sources respectively.Liquid coolant sources can be condensed water etc..
Specifically, condenser pipe 210 can be fixed by snap on cold plate 200, can also be consolidated by welding manner
Determine onto cold plate 200.In other embodiments, screens groove is also provided with cold plate 200, condenser pipe 210 is embedded in
In screens groove, the flexible convenience of replacement is improved.
Preferably, condenser pipe 210 is set on cold plate 200 in bending ring-type, and condenser pipe 210 avoids venthole
Corresponding region, prevents condenser pipe 210 from influencing pumping airflow flow direction.Set along the grid framework of cold plate 200 in bending ring-type
The condenser pipe 210 put can cover the body region of cold plate 200 as far as possible, improve cooling effect.
Used for OLED in inkjet printing manufacturing process, it is dry to carry out decompression using the decompression dry device of present embodiment
When dry, the substrate 1 for being printed with functional material ink can be placed on the sample stage 110 in drying box 100, and by sample stage
110 rise to cryosurface 2~5mm of the functional material ink apart from cold plate 200, start condensation process, then fill by being evacuated
The gas in lasting extraction drying chamber 101 is put, and the solvent in functional material ink is volatilized, functional material ink is existed
Evenly drying forms a film on substrate 1, and realizing the film-forming region of whole substrate 1 has uniform film forming thickness.
Compared with conventional condensation harden structure, due to the setting of 200 upper vent hole of cold plate in condensation structure, that is, it is in
Latticed cold plate 200, can effectively avoid the occurrence of the solvent volatilization of 1 edge of substrate soon and the solvent of central region is waved
The situation for sending out slow, improves the uniformity of sample film forming, and then improves the performance of product.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, the scope that this specification is recorded all is considered to be.
Embodiment described above only expresses the several embodiments of the utility model, its description is more specific and detailed,
But therefore it can not be interpreted as the limitation to utility model patent scope.It should be pointed out that the common skill for this area
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (10)
1. a kind of condensation structure, for being cooled down to the sample being placed on the sample stage in decompression dry device, its feature
It is, the condensation structure includes：
Cold plate, the region being located at least in the middle part of the cold plate on the cold plate are equipped with venthole, and the one of the cold plate
Side surface is cryosurface, and the cryosurface is used to set towards the sample stage；
Condenser pipe, the condenser pipe are arranged on the cold plate.
2. condensation structure according to claim 1, it is characterised in that the venthole has multiple, multiple ventholes
Array distribution is on the cold plate.
3. condensation structure according to claim 2, it is characterised in that the cold plate is in latticed engraved structure.
4. the condensation structure according to Claims 2 or 3, it is characterised in that the condenser pipe is on the cold plate
Bend ring-type to set, and the condenser pipe avoids the corresponding region of the venthole.
5. condensation structure according to claim 4, it is characterised in that the condenser pipe is located at the another of the cold plate
On side surface；Or
The cold plate is equipped with screens groove, and the condenser pipe is in the screens groove.
6. a kind of decompression dry device, it is characterised in that including drying box and claim 1 to 5 any one of them condensation knot
Structure；
The drying box has drying chamber, and the drying box can be connected with air extractor so as to can be formed in the drying chamber
Negative pressure, the drying chamber is interior to be equipped with sample stage；
The cold plate is arranged in the drying chamber, and the cryosurface of the cold plate is set towards the sample stage；
The liquid feeding end and outlet end of the condenser pipe extend the outside of the drying box respectively.
7. decompression dry device according to claim 6, it is characterised in that the sample stage is liftable sample stage.
8. decompression dry device according to claim 6, it is characterised in that the sample stage is heated baking platform.
9. decompression dry device according to claim 6, it is characterised in that be additionally provided with the drying box and the drying
The inflating port that case is connected.
10. decompression dry device according to claim 6, it is characterised in that the size of the cold plate is not less than described
The size of sample stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721334499.5U CN207257129U (en) | 2017-10-17 | 2017-10-17 | Condensation structure and decompression dry device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721334499.5U CN207257129U (en) | 2017-10-17 | 2017-10-17 | Condensation structure and decompression dry device |
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| CN207257129U true CN207257129U (en) | 2018-04-20 |
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ID=61917868
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| CN201721334499.5U Active CN207257129U (en) | 2017-10-17 | 2017-10-17 | Condensation structure and decompression dry device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110098219A (en) * | 2018-04-24 | 2019-08-06 | 广东聚华印刷显示技术有限公司 | Dot structure and preparation method thereof |
| CN110421977A (en) * | 2018-07-11 | 2019-11-08 | 广东聚华印刷显示技术有限公司 | Condensing mechanism and decompression dry device |
| CN111452517A (en) * | 2020-04-15 | 2020-07-28 | Tcl华星光电技术有限公司 | Reduced pressure drying device and reduced pressure drying method |
| CN111516399A (en) * | 2020-04-29 | 2020-08-11 | Tcl华星光电技术有限公司 | Mask plate and manufacturing method thereof, composite mask plate and vacuum drying device |
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2017
- 2017-10-17 CN CN201721334499.5U patent/CN207257129U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110098219A (en) * | 2018-04-24 | 2019-08-06 | 广东聚华印刷显示技术有限公司 | Dot structure and preparation method thereof |
| CN110421977A (en) * | 2018-07-11 | 2019-11-08 | 广东聚华印刷显示技术有限公司 | Condensing mechanism and decompression dry device |
| CN110421977B (en) * | 2018-07-11 | 2020-12-29 | 广东聚华印刷显示技术有限公司 | Condensation mechanism and decompression drying device |
| CN111452517A (en) * | 2020-04-15 | 2020-07-28 | Tcl华星光电技术有限公司 | Reduced pressure drying device and reduced pressure drying method |
| CN111516399A (en) * | 2020-04-29 | 2020-08-11 | Tcl华星光电技术有限公司 | Mask plate and manufacturing method thereof, composite mask plate and vacuum drying device |
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