CN105870359B - Preparation method, temperature control equipment and the system for preparing film of film - Google Patents
Preparation method, temperature control equipment and the system for preparing film of film Download PDFInfo
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- CN105870359B CN105870359B CN201610223735.XA CN201610223735A CN105870359B CN 105870359 B CN105870359 B CN 105870359B CN 201610223735 A CN201610223735 A CN 201610223735A CN 105870359 B CN105870359 B CN 105870359B
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
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- Application Of Or Painting With Fluid Materials (AREA)
Abstract
A kind of system the embodiments of the invention provide preparation method of film, temperature control equipment and for preparing film, it is related to display technology field, can reduces due to inkjet printing film forming problem of non-uniform caused by different zones ink droplet drying time difference and ink droplet atmosphere difference.The film is formed after the solvent evaporation in ink droplet；The preparation method includes：The temperature for first printing ink droplet in the region of the ink droplet on underlay substrate is set to print the temperature of ink droplet in the region of the ink droplet after being less than.Preparation for film.
Description
Technical field
The present invention relates to display technology field, more particularly to a kind of preparation method of film, temperature control equipment and it is used for
The system for preparing film.
Background technology
Because inkjet printing (ink jet print, abbreviation IJP) is a kind of can directly to carry out the new of patterned film deposition
Type process technique, therefore OLED (Organic Light-Emitting Display, ORGANIC ELECTROLUMINESCENCE DISPLAYS) device at present
In each functional layer, such as hole transmission layer, organic luminous layer and electron transfer layer be typically use inkjet technology shape
Into specific pattern.
The concrete technology of inkjet printing is that as solute each functional layer material of OLED is dissolved in into corresponding solvent
In (solvent is such as can be in the organic solvent for ethylene glycol, glycerine, toluene, mesitylene, methyl phenyl ethers anisole or cyclohexyl benzene
At least one solvent) and then prepare ink droplet for inkjet printing.Afterwards as shown in figure 1, using ink-jet printer 01 by ink
Drop 02 is printed upon on underlay substrate 03, and the underlay substrate 03 after printing is dried the techniques such as baking, to cause in ink droplet
Solvent volatilize completely, finally give the OLED films being made up of each functional layer materials of OLED being deposited on underlay substrate.
However, in above-mentioned ink jet printing process, because the jet size of current ink-jet printer is much smaller than underlay substrate
Size, ink-jet printer need by repeatedly printing ink droplet could be completely covered on whole underlay substrate.So,
As shown in Fig. 2 different zones of the order in ink-jet printer is according to figure from the bottom to top on underlay substrate sequentially form ink
During drop, (each print area is partitioned into figure with dotted line) at adjacent print position, before and after existing due to ink droplet volatilization
Time difference and the ink droplet atmosphere difference that sprays every time (atmosphere and the ink droplet in rear ejection are dried around the ink droplet formerly sprayed
It is different that surrounding dries atmosphere) so that the ink droplet uneven drying on whole underlay substrate, and then go out between adjacent print region
Now obvious border vestige, and film drying degree occurs in the region that the region and ink droplet printed at first in ink droplet is finally printed
Difference is the most obvious, ultimately results in that the OLED forming thin films being deposited on underlay substrate are uneven, influence OLED it is luminous
The uniformity.
The content of the invention
In consideration of it, to solve problem of the prior art, embodiments of the invention provide a kind of preparation method of film, temperature
Control device and the system for preparing film, can be reduced because the ink droplet drying time difference and ink droplet atmosphere in different zones are poor
Inkjet printing film forming problem of non-uniform caused by different.
To reach above-mentioned purpose, embodiments of the invention are adopted the following technical scheme that：
First aspect, the embodiments of the invention provide a kind of preparation method of film, the film is by the solvent in ink droplet
Formed after evaporation；Methods described includes：The temperature for first printing ink droplet in the region of the ink droplet on underlay substrate is set to be beaten after being less than
Print the temperature of ink droplet in the region of the ink droplet.
It is optionally, described that the temperature for first printing ink droplet in the region of the ink droplet on underlay substrate is printed after being less than described
The temperature of ink droplet in the region of ink droplet, including：Printed dot successively in different zones on underlay substrate；To the substrate base
Different zones on plate carry out compartmentalization temperature control, according to the page order of the ink droplet so that substrate in regional
Temperature, is raised successively according to the sequencing of printed dot.
It is optionally, described that the temperature for first printing ink droplet in the region of the ink droplet on underlay substrate is printed after being less than described
The temperature of ink droplet in the region of ink droplet, including：Compartmentalization temperature control is carried out to the different zones on underlay substrate so that each
The temperature of substrate in region, is raised successively according to the sequencing of ink droplet to be printed；According on the underlay substrate it is described each
The elevated order of the temperature of substrate in region, the successively printed dot in corresponding region.
It is preferred that, the different zones are by the central area of the underlay substrate, successively around the 1st of the central area
Region to n-quadrant is constituted；N is the positive integer more than 1；The different zones on underlay substrate carry out compartmentalization temperature control
System, including：Make substrate temperature from the central area to n-quadrant distribution gradient；Two regions of arbitrary neighborhood
Substrate temperature difference Δ T meets formula：
Wherein, T0For the substrate temperature of the central area；TNFor the substrate temperature of the n-quadrant.
It is preferred that, the different zones by the central area of the underlay substrate, positioned at the central area both sides and according to
Secondary the 1st region to the n-quadrant away from the central area is constituted；N is the positive integer more than 1；It is described on underlay substrate
Different zones carry out compartmentalization temperature control, including：Make n-quadrant ladder of the substrate temperature from the central area to both sides
Degree distribution；The substrate temperature difference Δ T in two regions of arbitrary neighborhood meets formula：
Wherein, T0For the substrate temperature of the central area；TNFor the substrate temperature of the n-quadrant.
Second aspect, the embodiment of the present invention additionally provide a kind of temperature control equipment, and the temperature control equipment is used to make
The temperature of ink droplet is less than the temperature of ink droplet in the region of rear printed dot in the region of first printed dot on underlay substrate.
Optionally, the temperature control equipment to the different zones on the underlay substrate specifically for carrying out compartmentalization temperature
Degree control so that first printed on the underlay substrate substrate in the region of the ink droplet temperature be less than after print the ink droplet
The temperature of substrate in region.
It is preferred that, the temperature control equipment includes：Heat transfer support plate for underlay substrate described in bearing；Positioned at described
Multiple heat-conducting pieces of the heat transfer support plate away from the underlay substrate side；The heat-conducting piece is in contact with the heat transfer support plate,
And corresponded with the regional of the underlay substrate.
It is further preferred that the heat-conducting piece includes：One group of heat conducting pipe；Wherein, fluid is filled with every group of heat conducting pipe, it is right
Fluid temperature (F.T.) in the heat conducting pipe of the different zones of underlay substrate described in Ying Yu is different.
The third aspect, the embodiment of the present invention additionally provide a kind of system for preparing film, and the system includes：Printing
Device, for the printed dot on underlay substrate；The film is formed after the solvent evaporation in ink droplet；The system also includes
Temperature control equipment described in any of the above-described.
Optionally, the system also includes：Sealable chamber, vacuum extractor；Wherein, the substrate formed after ink droplet
Substrate, the temperature control equipment and the vacuum extractor are placed on inside the sealable chamber.
Based on this, above-mentioned make on underlay substrate the region ink droplet temperature of first printed dot by provided in an embodiment of the present invention
Ink droplet less than the region ink droplet temperature of rear printed dot is dried to form the preparation method of film, make the ink droplet that formerly prints with
There is thermograde between the ink droplet printed afterwards, that is, make it that the rate of drying in the ink droplet of rear printing is able to catch up with the ink formerly printed
Rate of drying is dripped, so as to improve because inkjet printing film forming is uneven caused by ink droplet drying time difference and ink droplet atmosphere difference
Problem.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the accompanying drawing used required in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is the schematic diagram that ink-jet printer is printed on underlay substrate in the prior art；
Fig. 2 be using the printing type shown in Fig. 1 is formed on underlay substrate after film due to ink droplet drying time difference with
Ink droplet atmosphere difference and cause the uneven pictorial diagram of forming thin film；
Fig. 3 is a kind of schematic diagram for underlay substrate different zones that the specific embodiment of the invention one is provided；
Fig. 4 is a kind of schematic diagram for underlay substrate different zones that the specific embodiment of the invention two is provided；
Fig. 5 is the film pictorial diagram for carrying out being formed after inkjet printing, drying by the way of shown in Fig. 4；
Fig. 6 is a kind of correspondence position schematic diagram of temperature control equipment and underlay substrate provided in an embodiment of the present invention；
Fig. 7 is a kind of structural representation of temperature control equipment provided in an embodiment of the present invention；
Fig. 8 is the arrangement mode schematic diagram of heat conducting pipe in a kind of temperature control equipment provided in an embodiment of the present invention；
Fig. 9 is a kind of system structure diagram for being used to prepare film provided in an embodiment of the present invention.
Reference：
01- ink-jet printers；02- ink droplets；03- underlay substrates；04- temperature control equipments；041- heat-conducting pieces；0411- bars
Shape straight tube；0412- coiled pipes；05- sealable chambers；06- vacuum extractors.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
It is pointed out that unless otherwise defined, all terms used in the embodiment of the present invention (including technology and section
Technics) there are the identical meanings being commonly understood by with those skilled in the art.It is also understood that such as existing
Those terms defined in usual dictionary should be interpreted as having and their implication phases one in the context of correlation technique
The implication of cause, is explained without application idealization or the meaning extremely formalized, unless clearly so definition here.
The embodiments of the invention provide a kind of preparation method of film, the film is formed after the solvent evaporation in ink droplet；
This method includes：
The temperature of ink droplet in the region of first printed dot on underlay substrate is set to be less than ink droplet in the region of rear printed dot
Temperature.
It should be noted that after realizing that the above-mentioned temperature for making ink droplet in the region of first printed dot on underlay substrate is less than
The temperature of ink droplet in the region of printed dot, can by change underlay substrate substrate temperature or ink droplet printing after around gas
Atmosphere temperature is realized.For example, it may be changing the substrate temperature of different zones on underlay substrate before ink droplet is printed or after printing；
Can also be that after ink droplet printing, corresponding hot-air or cold air are passed through above the ink droplet of different zones.Aforesaid way is equal
It can reach that the ink droplet drying time for shortening different zones is poor, while the ink droplet reduced between different zones dries the mesh of atmosphere difference
's.
Here, it is contemplated that compartmentalization temperature control is carried out to underlay substrate different zones and is more easily implemented, and due to ink droplet
Underlay substrate surface is printed upon, the ink droplet temperature in different zones can relatively accurately be changed by the temperature for changing underlay substrate
Degree, so as to more accurately change the drying time of ink droplet in different zones.Therefore, the embodiment of the present invention preferably, is led to
Cross and change the substrate temperature of underlay substrate different zones and above-mentioned make on underlay substrate the region ink droplet temperature of first printed dot to reach
Purpose of the degree less than the region ink droplet temperature of rear printed dot.
Specifically, can be carried out using following two modes：
Mode one
Printed dot successively in different zones on underlay substrate；
Compartmentalization temperature control is carried out to the different zones on underlay substrate, according to the page order of ink droplet so that substrate
The temperature of substrate in the regional of substrate, is raised successively according to the sequencing of printed dot.
Compartmentalization temperature control can be specifically to improve formerly to beat in the region substrate temperature of rear printed dot and/or reduction
There is thermograde difference between the region substrate temperature of ink drop, the substrate temperature to cause different zones.
Mode two
Compartmentalization temperature control is carried out to the different zones on underlay substrate so that the base in the regional of underlay substrate
The temperature of plate, is raised successively according to the sequencing of ink droplet to be printed；
According to the elevated order of temperature of substrate in regional on underlay substrate, the stamping ink in corresponding region successively
Drop.
Here, compartmentalization temperature control can also be specifically to improve the region substrate temperature and/or drop in rear printed dot
There is thermograde difference, i.e., between the region substrate temperature of low first printed dot, the substrate temperature to cause different zones
The temperature of the region substrate of first printed dot is less than the region substrate temperature in rear printed dot.
Based on this, above-mentioned make on underlay substrate the region ink droplet temperature of first printed dot by provided in an embodiment of the present invention
Ink droplet less than the region ink droplet temperature of rear printed dot is dried to form the preparation method of film, make the ink droplet that formerly prints with
There is thermograde between the ink droplet printed afterwards, that is, make it that the rate of drying in the ink droplet of rear printing is able to catch up with the ink formerly printed
Rate of drying is dripped, so as to improve because inkjet printing film forming is uneven caused by ink droplet drying time difference and ink droplet atmosphere difference
Problem.
On the basis of the above, the embodiment of the present invention specifically provides two embodiments so that above-mentioned preparation method is described in detail,
It should be noted that following two embodiments are only illustrated exemplified by changing substrate temperature after first printed dot, the present invention is real
A not limited to this is applied, following examples may be equally applicable for first changing the mode that substrate temperature carries out ink droplet inkjet printing again.
Specific embodiment one
As shown in figure 3, the different zones in above-mentioned underlay substrate 03 are by the central area inside underlay substrate (in figure
Labeled as S0), successively around the central area the 1st region (in figure mark be1) to n-quadrant, (mark is in figureN) structure
Into；N is the positive integer more than 1.
Above-mentioned preparation method is specifically included：
According to by outermost n-quadrant S on underlay substrate 03NTo the central area S of most inner side0Order spray successively
Black printed dot；
To the different zones (S on underlay substrate 030~SN) compartmentalization temperature control is carried out, including：Make substrate temperature in
Heart district domain S0N-quadrant S laterallyNGradient is distributed；The poor Δ T of the substrate temperature in two regions of arbitrary neighborhood meets following public
Formula：
Wherein, T0Centered on region substrate temperature；TNFor the substrate temperature of n-quadrant；Absolute value | T0-TN| represent T0With
TNBetween temperature gap.
With reference to shown in Fig. 3, for planar dimension is 470mm*370mm underlay substrate 03, make printed dot at first
N-quadrant SNSubstrate temperature TNWith the central area S of last printed dot0Substrate temperature T0Less than 2 DEG C of difference can have
Inkjet printing film forming is uneven caused by effect ground improves ink droplet drying time difference and ink droplet atmosphere difference due to different zones
Problem.
Wherein, the substrate temperature difference Δ T in two regions of arbitrary neighborhood isThen outermost n-quadrant SNWith
The most central area S of inner side0Between any region TxSubstrate temperature be：
In above formula, x span is 1 ＜ x ＜ N.
Specific embodiment two
As shown in figure 4, different zones are by the central area inside underlay substrate 03, (mark is in figure0), positioned at this
Central area S0Both sides and successively away from central area the 1st region (in figure mark be1) to n-quadrant, (mark is in figureN)
Constitute；N is the positive integer more than 1.
Above-mentioned preparation method is specifically included：
According to the n-quadrant S by both sides on underlay substrate 03NTo the central area S of most inner side0Order ink-jet successively
Printed dot；
To the different zones (S on underlay substrate 030~SN) compartmentalization temperature control is carried out, including：Make substrate temperature in
Heart district domain S0To the n-quadrant S of both sidesNGradient is distributed；The substrate temperature difference Δ T in two regions of arbitrary neighborhood meets formula：
Wherein, T0Centered on region substrate temperature；TNFor the substrate temperature of n-quadrant；Absolute value | T0-TN| represent T0With
TNBetween temperature gap.
With reference to shown in Fig. 4, for planar dimension is 470mm*370mm underlay substrate 03, make printed dot at first
Both sides n-quadrant SNSubstrate temperature TNWith the central area S of last printed dot0Substrate temperature T0Less than 2 DEG C of difference
Inkjet printing film forming caused by ink droplet drying time difference and ink droplet atmosphere difference due to different zones can effectively be improved
Problem of non-uniform.
Wherein, the substrate temperature difference Δ T in two regions of arbitrary neighborhood isThen outermost n-quadrant SNWith
The most central area S of inner side0Between any region TxSubstrate temperature be：
In above formula, x span is 1 ＜ x ＜ N.
By taking the printing type of above-mentioned specific embodiment two as an example, compared with the film pictorial diagram shown in Fig. 2, using above-mentioned
Each region film forming of film of printing-compartmentalization temperature control drying mode formation is uniform, obvious border vestige does not occur.
On the basis of the above, the embodiment of the present invention additionally provides a kind of temperature control equipment, and the temperature control equipment is used for
The temperature of ink droplet in the region of first printed dot on underlay substrate is set to be less than the temperature of ink droplet in the region of rear printed dot.
It is stronger in view of the temperature operability that changes substrate, and can be by the temperature of the substrate for being accurately controlled different zones
Degree come reach the change to printed dot temperature in regional, the embodiment of the present invention it is further preferred that as shown in fig. 6, on
Temperature control equipment 04 is stated specifically for carrying out compartmentalization temperature control to the different zones on underlay substrate 03 so that substrate base
The temperature of substrate is less than the temperature of substrate in the region of rear printed dot in the region of first printed dot on plate.
Wherein, the concrete structure of temperature control equipment 04 is further as shown in fig. 7, heat conduction branch for bearing underlay substrate
Fagging (is not illustrated) in figure；Positioned at multiple heat-conducting pieces 041 of the heat transfer support plate away from underlay substrate side；Heat-conducting piece 041 with
Heat transfer support plate is in contact, and is corresponded with the regional of underlay substrate.
It should be noted that first, the above-mentioned heat transfer support plate of setting is in order that the temperature of heat-conducting piece 041 can be evenly
Ground is conducted to underlay substrate, can be made up of the material (such as stainless steel plate) for being easy to heat conduction.
Secondth, the arrangement mode of heat-conducting piece 041 corresponds to the specific arrangement mode of different zones of underlay substrate 03, works as substrate
The different zones arrangement mode of substrate 03 is by central area S with reference to shown in Fig. 30To the n-quadrant S of surroundingNDuring arrangement, lead
The arrangement mode of warmware 041 i.e. as shown in (a) part in Fig. 8, corresponding to different zones heat-conducting piece 041 temperature from center to
Surrounding is followed successively by T0~TN；When the different zones arrangement mode of underlay substrate 03 is by central area S with reference to shown in Fig. 40To two
The n-quadrant S of sideNDuring arrangement, the arrangement mode of heat-conducting piece 041 is i.e. as shown in (b) part in Fig. 8, corresponding to different zones
The temperature of heat-conducting piece 041 is followed successively by T from center to both sides0~TN。
3rd, heat-conducting piece 041 specifically may include：One group of heat conducting pipe；Wherein, fluid, correspondence are filled with every group of heat conducting pipe
It is different in the fluid temperature (F.T.) in the heat conducting pipe of the different zones of underlay substrate.
One group of heat conducting pipe should at least include a heat conducting pipe, and can corresponding to the particular number of the heat conducting pipe of different zones
With it is identical can also be different, the embodiment of the present invention is specifically not construed as limiting, can realize that the different zones of underlay substrate 03 have temperature
This effect of degree gradient is defined.
Wherein, the material of heat conducting pipe is specifically as follows glass tube, steel pipe etc.；It is straight that the shape of heat conducting pipe is specifically as follows bar shaped
Pipe or coiled pipe；Fluid of filling can be water etc. in it, i.e., carry out compartmentalization temperature to underlay substrate different zones by medium of water
Degree control.
Exemplified by corresponding to the one of a region group heat conducting pipe, as shown in (a) part in Fig. 8, this group of heat conducting pipe can be with
Bar shaped straight tube 0411 arranged in parallel (is only illustrated) in figure exemplified by 5 by one or more to be constituted, its interior is filled with adds
Do not illustrated in heat or the water of condensation, the intake-outlet figure of each bar shaped straight tube 0411.
As shown in (b) part in Fig. 8, this group of heat conducting pipe (can be carried out by one or more in figure only exemplified by one
Illustrating) coiled pipe 0412 of convolution constitutes, in it in water filled with heating or condensation, the intake-outlet figure of every coiled pipe 0412
Do not illustrate.
Various ways can be used by carrying out compartmentalization temperature control to the different zones of underlay substrate 03 using above-mentioned heat conducting pipe
Flexibly set, such as cold water is filled in the heat conducting pipe below corresponding to the region formerly printed, corresponding in rear printing
The water or hot water of filling normal temperature state in heat conducting pipe below region, as long as so that filling in heat conducting pipe below different zones
Fluid has certain thermograde.
Certainly, above-mentioned heat-conducting piece can also be specifically resistance wire, different to underlay substrate using the mode of Resistant heating
Compartmentalization temperature control is realized in region, i.e., separate resistance wire is set below the heat transfer support plate of different zones, is passed through
Control the temperature of resistance wire and underlay substrate different zones are heated to realize to reach first printed dot on underlay substrate
Region ink droplet temperature is less than the purpose of the region ink droplet temperature of rear printed dot.
Further, the embodiment of the present invention additionally provides a kind of system for preparing film, and said system includes：Printing
Device, for the printed dot on underlay substrate；Film is formed after the solvent evaporation in ink droplet；The system also includes：It is above-mentioned
Temperature control equipment.
As shown in figure 9, in order to avoid the drying and volatilizing of solvent in the moisture influence ink droplet in environment, said system also includes
Be placed with one sealable chamber 05, sealable chamber 05 printed dot underlay substrate (not illustrated in figure), pair can
The vacuum extractor 06 and above-mentioned temperature control equipment 04 vacuumized in sealed chamber 05.
The foregoing is only a specific embodiment of the invention, but protection scope of the present invention is not limited thereto, any
Those familiar with the art the invention discloses technical scope in, change or replacement can be readily occurred in, should all be contained
Cover within protection scope of the present invention.Therefore, protection scope of the present invention should be based on the protection scope of the described claims.
Claims (11)
1. a kind of preparation method of film, the film is formed after the solvent evaporation in ink droplet；Characterized in that, methods described
Including：
The temperature for first printing ink droplet in the region of the ink droplet on underlay substrate is set to be printed after being less than black in the region of the ink droplet
The temperature of drop, including, compartmentalization temperature control is carried out to the different zones on the underlay substrate, according to the printing of the ink droplet
Sequentially so that the temperature of substrate in regional, raised successively according to the sequencing of printed dot.
2. according to the method described in claim 1, it is characterised in that the region for making first to print the ink droplet on underlay substrate
The temperature of interior ink droplet prints the temperature of ink droplet in the region of the ink droplet after being less than, including：
Printed dot successively in different zones on underlay substrate；
Compartmentalization temperature control is carried out to the different zones on the underlay substrate, according to the page order of the ink droplet so that
The temperature of substrate in regional, is raised successively according to the sequencing of printed dot.
3. according to the method described in claim 1, it is characterised in that the region for making first to print the ink droplet on underlay substrate
The temperature of interior ink droplet prints the temperature of ink droplet in the region of the ink droplet after being less than, including：
Compartmentalization temperature control is carried out to the different zones on underlay substrate so that the temperature of substrate in regional, according to treating
The sequencing of printed dot is raised successively；
According to the elevated order of temperature of substrate in the regional on the underlay substrate, beaten successively in corresponding region
Ink is dripped.
4. according to the method in claim 2 or 3, it is characterised in that the different zones are by the center of the underlay substrate
Region, the 1st region to the n-quadrant successively around the central area are constituted；N is the positive integer more than 1；
The different zones on underlay substrate carry out compartmentalization temperature control, including：
Make substrate temperature from the central area to n-quadrant distribution gradient；The substrate in two regions of arbitrary neighborhood
Temperature difference Δ T meets formula：
Wherein, T0For the substrate temperature of the central area；TNFor the substrate temperature of the n-quadrant.
5. according to the method in claim 2 or 3, it is characterised in that the different zones are by the center of the underlay substrate
Region, positioned at the central area both sides and successively the 1st region to the n-quadrant away from the central area are constituted；N be more than
1 positive integer；
The different zones on underlay substrate carry out compartmentalization temperature control, including：
Make n-quadrant gradient distribution of the substrate temperature from the central area to both sides；Two regions of arbitrary neighborhood
Substrate temperature difference Δ T meets formula：
Wherein, T0For the substrate temperature of the central area；TNFor the substrate temperature of the n-quadrant.
6. a kind of temperature control equipment, it is characterised in that the temperature control equipment is used to make first printed dot on underlay substrate
Region in ink droplet temperature be less than rear printed dot region in ink droplet temperature, including, on the underlay substrate not
Compartmentalization temperature control is carried out with region, according to the page order of the ink droplet so that the temperature of substrate in regional, according to
The sequencing of printed dot is raised successively.
7. temperature control equipment according to claim 6, it is characterised in that the temperature control equipment is specifically for institute
The different zones stated on underlay substrate carry out compartmentalization temperature control so that the area of the ink droplet is first printed on the underlay substrate
The temperature of substrate prints the temperature of substrate in the region of the ink droplet in domain after being less than.
8. temperature control equipment according to claim 7, it is characterised in that the temperature control equipment includes：
Heat transfer support plate for underlay substrate described in bearing；
Positioned at multiple heat-conducting pieces of the heat transfer support plate away from the underlay substrate side；The heat-conducting piece and the heat conduction branch
Fagging is in contact, and is corresponded with the regional of the underlay substrate.
9. temperature control equipment according to claim 8, it is characterised in that the heat-conducting piece includes：One group of heat conducting pipe；Its
In, fluid is filled with every group of heat conducting pipe, corresponding to the fluid temperature (F.T.) in the heat conducting pipe of the different zones of the underlay substrate not
Together.
10. a kind of system for preparing film, the system includes：Printing equipment, for the printed dot on underlay substrate；
The film is formed after the solvent evaporation in ink droplet；Characterized in that, the system is also included as claim 6 to 9 is any
Temperature control equipment described in.
11. system according to claim 10, it is characterised in that the system also includes：Sealable chamber, vacuum means
Put；
Wherein, the underlay substrate, the temperature control equipment and the vacuum extractor formed after ink droplet is placed on institute
State inside sealable chamber.
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| CN201610223735.XA CN105870359B (en) | 2016-04-12 | 2016-04-12 | Preparation method, temperature control equipment and the system for preparing film of film |
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| CN201610223735.XA CN105870359B (en) | 2016-04-12 | 2016-04-12 | Preparation method, temperature control equipment and the system for preparing film of film |
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| CN108091778A (en) * | 2017-12-27 | 2018-05-29 | 深圳市华星光电技术有限公司 | Drying means, heating unit and its manufacturing method of inkjet printing film layer |
| CN109309159A (en) * | 2018-10-12 | 2019-02-05 | 合肥鑫晟光电科技有限公司 | A kind of method for manufacturing thin film, display panel and preparation method thereof, display device |
| CN111086330B (en) * | 2018-10-23 | 2021-08-31 | 广东聚华印刷显示技术有限公司 | Drying device and drying process |
| CN111361289B (en) * | 2018-12-26 | 2021-09-03 | Tcl科技集团股份有限公司 | Ink-jet printing base station and ink-jet printing method |
| CN110549747B (en) * | 2019-09-09 | 2020-10-27 | 昆山国显光电有限公司 | Ink-jet printing device and method for preparing film |
| CN111086339A (en) * | 2019-12-17 | 2020-05-01 | 合肥师范学院 | Method for improving film thickness uniformity of different areas of ink-jet printing substrate |
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| JP2007012387A (en) * | 2005-06-29 | 2007-01-18 | Toshiba Matsushita Display Technology Co Ltd | Manufacturing method of organic electroluminescent display device |
| JP4251329B2 (en) * | 2005-12-20 | 2009-04-08 | カシオ計算機株式会社 | Display device and manufacturing method thereof |
| CN100445874C (en) * | 2006-02-15 | 2008-12-24 | 虹创科技股份有限公司 | Thin film pattern layer producing method |
| US20130004656A1 (en) * | 2011-07-01 | 2013-01-03 | Kateeva, Inc. | Apparatus and method to separate carrier liquid vapor from ink |
| KR102163521B1 (en) * | 2013-05-15 | 2020-10-12 | 삼성디스플레이 주식회사 | Manufaturing device of organic light emitting diode display and method for manufacturing organic light emitting diode display using the same |
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