CN105870359A - Preparation method of thin film, temperature control device and system for preparing thin film - Google Patents
Preparation method of thin film, temperature control device and system for preparing thin film Download PDFInfo
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- CN105870359A CN105870359A CN201610223735.XA CN201610223735A CN105870359A CN 105870359 A CN105870359 A CN 105870359A CN 201610223735 A CN201610223735 A CN 201610223735A CN 105870359 A CN105870359 A CN 105870359A
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- temperature
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- ink droplet
- underlay substrate
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
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- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The embodiment of the invention provides a preparation method of a thin film, a temperature control device and a system for preparing the thin film, and relates to the technical field of display. The problem that ink-jet printing film formation is not even caused by ink droplet drying time difference and ink droplet atmosphere difference in different areas can be solved. The thin film is formed after evaporation of a solvent in ink droplets. The preparation method comprises the following step: enabling the temperature of the ink droplets in the area that the ink droplets are printed early to be lower than the temperature of the ink droplets in the area that the ink droplets are printed later on a substrate. The system is used for preparation of the thin film.
Description
Technical field
The present invention relates to Display Technique field, particularly relate to the preparation method of a kind of thin film, temperature
Control device and for preparing the system of thin film.
Background technology
Owing to inkjet printing (ink jet print is called for short IJP) is that one can directly carry out pattern
Change the Novel processing technology of thin film deposition, therefore current OLED (Organic Light-Emitting
Display, ORGANIC ELECTROLUMINESCENCE DISPLAYS) each functional layer in device, such as hole transmission layer, have
Machine luminescent layer and electron transfer layer etc. are typically with inkjet technology and form specific figure
Case.
The concrete technology of inkjet printing is as solute using each functional layer material of OLED
It is dissolved in corresponding solvent that (this solvent can be such as ethylene glycol, glycerol, toluene, all
At least one solvent in the organic solvents such as trimethylbenzene, methyl phenyl ethers anisole or cyclohexyl benzene) and then preparation
Go out the ink droplet for inkjet printing.Afterwards as it is shown in figure 1, use ink-jet printer 01 by ink
Drip 02 to be printed upon on underlay substrate 03, and the underlay substrate 03 after printing is dried baking
The techniques such as roasting, so that the solvent in ink droplet volatilizees completely, finally give and are deposited on underlay substrate
On the OLED thin film being made up of each functional layer material of OLED.
But, in above-mentioned ink jet printing process, due to the jet size of current ink-jet printer
Much smaller than the size of underlay substrate, ink-jet printer needs could be complete by ink droplet by repeatedly printing
All standing is on whole underlay substrate.So, as in figure 2 it is shown, work as ink-jet printer and press
When sequentially forming ink droplet according to the zones of different on underlay substrate of the order from the bottom to top in figure,
(figure is partitioned into each print area with dotted line) at adjacent print position, due to ink droplet
Time difference before and after volatilization existence and the ink droplet atmosphere difference (ink formerly sprayed of ejection every time
Drip the driest atmosphere atmosphere dry from around the ink droplet of rear ejection different) so that whole lining
Ink droplet uneven drying on substrate, and then obvious limit occurs between adjacent print region
Boundary's vestige, and there is thin film in the region finally printed in the region that ink droplet prints at first and ink droplet
Degree of drying difference is the most obvious, ultimately results in the OLED thin film being deposited on underlay substrate and becomes
Film is uneven, affects the Luminescence Uniformity of OLED.
Summary of the invention
In consideration of it, for solving problem of the prior art, embodiments of the invention provide a kind of thin film
Preparation method, temperature control equipment and for preparing the system of thin film, can reduce due to difference
In region ink droplet drying time difference and ink droplet atmosphere difference and the inkjet printing film forming that causes not
Uniformity problem.
For reaching above-mentioned purpose, embodiments of the invention adopt the following technical scheme that
First aspect, embodiments provide the preparation method of a kind of thin film, described thin film
Formed after being evaporated by the solvent in ink droplet；Described method includes: make first to print on underlay substrate institute
State in the region of ink droplet the temperature of ink droplet less than the temperature of ink droplet in the region of the described ink droplet of rear printing
Degree.
Optionally, make first to print on underlay substrate the temperature of ink droplet in the region of described ink droplet described in
Less than the temperature of ink droplet in the region of the described ink droplet of rear printing, including: on underlay substrate not
With printed dot successively in region；Zones of different on described underlay substrate is carried out compartmentalization temperature
Degree controls, and according to the page order of described ink droplet so that the temperature of substrate in regional, presses
Sequencing according to printed dot raises successively.
Optionally, make first to print on underlay substrate the temperature of ink droplet in the region of described ink droplet described in
Less than the temperature of ink droplet in the region of the described ink droplet of rear printing, including: on underlay substrate not
Carry out compartmentalization temperature control with region so that the temperature of substrate in regional, according to wait beat
The sequencing that ink is dripped raises successively；According to base in regional described on described underlay substrate
The order that the temperature of plate raises, printed dot in corresponding region successively.
Preferably, described zones of different is by the central area of described underlay substrate, successively around institute
The 1st region to the n-quadrant stating central area is constituted；N is the positive integer more than 1；Institute
State and the zones of different on underlay substrate is carried out compartmentalization temperature control, including: make substrate temperature
By described central area to described n-quadrant distribution gradient；Two regions of arbitrary neighborhood
Substrate temperature difference Δ T meet formula:
Wherein, T0Substrate temperature for described central area；TNBase for described n-quadrant
Plate temperature.
Preferably, described zones of different by the central area of described underlay substrate, be positioned at described in
Both sides, heart region and successively away from described central area the 1st region to n-quadrant constitute；N
For the positive integer more than 1；Described zones of different on underlay substrate is carried out compartmentalization temperature control
System, including: make substrate temperature by described central area to the described n-quadrant gradient of both sides
Distribution；The substrate temperature difference Δ T in two regions of arbitrary neighborhood meets formula:
Wherein, T0Substrate temperature for described central area；TNBase for described n-quadrant
Plate temperature.
Second aspect, the embodiment of the present invention additionally provide a kind of temperature control equipment, described temperature
After controlling device the temperature of ink droplet being less than in the region making on underlay substrate first printed dot
The temperature of ink droplet in the region of printed dot.
Optionally, described temperature control equipment is specifically for the not same district on described underlay substrate
Territory carries out compartmentalization temperature control so that first print the region of described ink droplet on described underlay substrate
The temperature of interior substrate is less than the temperature of substrate in the region of the described ink droplet of rear printing.
Preferably, described temperature control equipment includes: for the heat conduction of underlay substrate described in bearing
Gripper shoe；It is positioned at the described heat transfer support plate multiple heat-conducting pieces away from described underlay substrate side；
Described heat-conducting piece contacts with described heat transfer support plate, and with the regional of described underlay substrate
One_to_one corresponding.
It is further preferred that described heat-conducting piece includes: one group of heat pipe；Wherein, heat conduction is often organized
Fluid it is filled with, corresponding to the fluid in the heat pipe of the zones of different of described underlay substrate in pipe
Temperature is different.
The third aspect, the embodiment of the present invention additionally provide a kind of system for preparing thin film, institute
The system of stating includes: printing equipment, for printed dot on underlay substrate；Described thin film is by ink
Formed after solvent evaporation in Diing；Described system also includes that the temperature described in any of the above-described item controls
Device.
Optionally, described system also includes: sealable chamber, vacuum extractor；Wherein, shape
The described underlay substrate after ink droplet, described temperature control equipment and described vacuum means is become to put
Put inside described sealable chamber.
Based on this, above-mentioned make on underlay substrate first printed dot by what the embodiment of the present invention provided
Region ink droplet temperature to be dried formation less than the ink droplet of region ink droplet temperature of rear printed dot thin
The preparation method of film, makes the ink droplet formerly printed and has temperature ladder between the ink droplet of rear printing
Degree, i.e. makes the ink droplet being able to catch up with formerly printing at the rate of drying of the ink droplet of rear printing be dried speed
Degree, thus improve the inkjet printing caused due to ink droplet difference drying time and ink droplet atmosphere difference
Film forming problem of non-uniform.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below by right
In embodiment or description of the prior art, the required accompanying drawing used is briefly described, it should be apparent that,
Accompanying drawing in describing below is only some embodiments of the present invention, for those of ordinary skill in the art
From the point of view of, on the premise of not paying creative work, it is also possible to obtain the attached of other according to these accompanying drawings
Figure.
Fig. 1 is that in prior art, ink-jet printer carries out the schematic diagram printed on underlay substrate；
Fig. 2 is to use the printing type shown in Fig. 1 to be formed on underlay substrate after thin film due to ink
The dry time difference of drip-dry and ink droplet atmosphere difference and cause the uneven pictorial diagram of forming thin film；
Showing of a kind of underlay substrate zones of different that Fig. 3 provides for the specific embodiment of the invention one
It is intended to；
Showing of a kind of underlay substrate zones of different that Fig. 4 provides for the specific embodiment of the invention two
It is intended to；
Fig. 5 is to use the mode shown in Fig. 4 to carry out inkjet printing, the dried thin film formed in fact
Thing figure；
A kind of temperature control equipment that Fig. 6 provides for the embodiment of the present invention is right with underlay substrate
Answer position view；
The structural representation of a kind of temperature control equipment that Fig. 7 provides for the embodiment of the present invention；
The arrangement of heat pipe in a kind of temperature control equipment that Fig. 8 provides for the embodiment of the present invention
Mode schematic diagram；
A kind of system structure signal for preparing thin film that Fig. 9 provides for the embodiment of the present invention
Figure.
Reference:
01-ink-jet printer；02-ink droplet；03-underlay substrate；04-temperature control equipment；041-
Heat-conducting piece；0411-bar shaped straight tube；0412-coiled pipe；05-sealable chamber；06-vacuum means
Put.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is entered
Row clearly and completely describes, it is clear that described embodiment is only a part of embodiment of the present invention,
Rather than whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art are not having
Have and make the every other embodiment obtained under creative work premise, broadly fall into present invention protection
Scope.
It is pointed out that unless otherwise defined, all arts used in the embodiment of the present invention
Language (including technology and scientific terminology) has with those skilled in the art altogether
With the identical meanings understood.It is also understood that those terms such as defined in usual dictionary
Should be interpreted as having and they consistent containing of the implication in the context of correlation technique
Justice, and do not apply idealization or extremely formal meaning to explain, unless the most clearly this
Sample defines.
Embodiments provide the preparation method of a kind of thin film, molten by ink droplet of this thin film
Formed after agent evaporation；The method includes:
Make on underlay substrate in the region of first printed dot the temperature of ink droplet less than rear printed dot
Region in the temperature of ink droplet.
It should be noted that realize above-mentioned making on underlay substrate ink in the region of first printed dot
The temperature dripped, can be by changing substrate base less than the temperature of ink droplet in the region of rear printed dot
Atmosphere temperature around after the substrate temperature of plate or ink droplet printing realizes.For example, it may be
The substrate temperature of zones of different on underlay substrate is changed before ink droplet prints or after printing；Can also be
After ink droplet prints, above the ink droplet of zones of different, it is passed through corresponding hot-air or cold air.
The ink droplet that aforesaid way all can reach to shorten zones of different is poor for drying time, reduces not same district simultaneously
Ink droplet between territory is dried the purpose of atmosphere difference.
Here, it is contemplated that underlay substrate zones of different is carried out compartmentalization temperature and controls to be easier to reality
Existing, and owing to ink droplet is printed upon underlay substrate surface, by changing the temperature of underlay substrate
Relatively accurately change the ink droplet temperature in zones of different such that it is able to the most accurately change not
With the drying time of ink droplet in region.Therefore, the embodiment of the present invention preferably, is served as a contrast by change
The substrate temperature of substrate zones of different reaches above-mentioned makes first printed dot on underlay substrate
Region ink droplet temperature is less than the purpose of the region ink droplet temperature of rear printed dot.
Concrete, can carry out to use following two mode:
Mode one
Printed dot successively in zones of different on underlay substrate；
Zones of different on underlay substrate is carried out compartmentalization temperature control, according to the printing of ink droplet
Sequentially so that the temperature of the substrate in the regional of underlay substrate, according to the elder generation of printed dot
Rear order raises successively.
Compartmentalization temperature controls can be specifically to improve the region substrate temperature in rear printed dot
And/or reduce the region substrate temperature in first printed dot, so that the substrate temperature of zones of different
There is between degree thermograde difference.
Mode two
Zones of different on underlay substrate is carried out compartmentalization temperature control so that underlay substrate
The temperature of the substrate in regional, raises successively according to the sequencing of ink droplet to be printed；
The order raised according to the temperature of substrate in regional on underlay substrate, successively accordingly
Region in printed dot.
Here, compartmentalization temperature controls can also be specifically to improve the region base in rear printed dot
Plate temperature and/or reduce the region substrate temperature in first printed dot, so that zones of different
There is thermograde difference, i.e. in the temperature of region substrate of first printed dot between substrate temperature
Less than the region substrate temperature in rear printed dot.
Based on this, above-mentioned make on underlay substrate first printed dot by what the embodiment of the present invention provided
Region ink droplet temperature to be dried formation less than the ink droplet of region ink droplet temperature of rear printed dot thin
The preparation method of film, makes the ink droplet formerly printed and has temperature ladder between the ink droplet of rear printing
Degree, i.e. makes the ink droplet being able to catch up with formerly printing at the rate of drying of the ink droplet of rear printing be dried speed
Degree, thus improve the inkjet printing caused due to ink droplet difference drying time and ink droplet atmosphere difference
Film forming problem of non-uniform.
On the basis of the above, the embodiment of the present invention specifically provides two embodiments with in detailed description
The preparation method stated, it should be noted that following two embodiment is only to change after first printed dot
Illustrating as a example by becoming substrate temperature, the embodiment of the present invention is not limited to this, and following example are same
Go for first changing substrate temperature and carry out the mode of ink droplet inkjet printing again.
Specific embodiment one
As it is shown on figure 3, the zones of different in above-mentioned underlay substrate 03 is by being positioned at underlay substrate
The central area in portion (is labeled as S in figure0), successively around this central area the 1st region (figure
In be labeled as S1) (figure is labeled as S to n-quadrantN) constitute；N more than 1 is just
Integer.
Above-mentioned preparation method specifically includes:
According to by outermost n-quadrant S on underlay substrate 03NCenter to inner side
Region S0Order inkjet printing ink droplet successively；
To the zones of different (S on underlay substrate 030～SN) carry out compartmentalization temperature control, bag
Include: make substrate temperature by central area S0N-quadrant S laterallyNGradient distribution；Arbitrarily
The substrate temperature difference Δ T in two adjacent regions meets below equation:
Wherein, T0Centered by the substrate temperature in region；TNIt it is the substrate temperature of n-quadrant；
Absolute value | T0-TN| represent T0With TNBetween temperature gap.
With reference to shown in Fig. 3, for the underlay substrate 03 that planar dimension is 470mm*370mm
For, make the n-quadrant S of printed dot at firstNSubstrate temperature TNWith last printed dot
Central area S0Substrate temperature T0Differ less than 2 DEG C and can effectively improve due to difference
Region ink droplet drying time difference and ink droplet atmosphere difference and the inkjet printing film forming that causes is uneven
Even problem.
Wherein, the substrate temperature difference Δ T in two regions of arbitrary neighborhood isThen outermost
The n-quadrant S of sideNCentral area S with inner side0Between any region TxSubstrate
Temperature is:
In above formula, the span of x is 1 ＜ x ＜ N.
Specific embodiment two
As shown in Figure 4, zones of different is by the central area (figure being positioned within underlay substrate 03
In be labeled as S0), be positioned at this central area S0Both sides and successively away from the 1st of central area
Region (is labeled as S in figure1) (figure is labeled as S to n-quadrantN) constitute；N is big
In the positive integer of 1.
Above-mentioned preparation method specifically includes:
According to by the n-quadrant S of both sides on underlay substrate 03NCenter to inner side
Territory S0Order inkjet printing ink droplet successively；
To the zones of different (S on underlay substrate 030～SN) carry out compartmentalization temperature control, bag
Include: make substrate temperature by central area S0To the n-quadrant S of both sidesNGradient distribution；Arbitrarily
The substrate temperature difference Δ T in two adjacent regions meets formula:
Wherein, T0Centered by the substrate temperature in region；TNIt it is the substrate temperature of n-quadrant；
Absolute value | T0-TN| represent T0With TNBetween temperature gap.
With reference to shown in Fig. 4, for the underlay substrate 03 that planar dimension is 470mm*370mm
For, make the n-quadrant S of the both sides of printed dot at firstNSubstrate temperature TNWith finally beat
The central area S that ink is dripped0Substrate temperature T0Differ less than 2 DEG C can effectively improve by
In zones of different ink droplet drying time difference with ink droplet atmosphere difference and the inkjet printing that causes becomes
Film problem of non-uniform.
Wherein, the substrate temperature difference Δ T in two regions of arbitrary neighborhood isThen outermost
The n-quadrant S of sideNCentral area S with inner side0Between any region TxSubstrate
Temperature is:
In above formula, the span of x is 1 ＜ x ＜ N.
As a example by the printing type of above-mentioned specific embodiment two, with the thin film pictorial diagram shown in Fig. 2
Compare, use above-mentioned printing-compartmentalization temperature to control each region of thin film that drying mode is formed
Film forming is uniform, obvious border vestige does not occur.
On the basis of the above, the embodiment of the present invention additionally provides a kind of temperature control equipment, this temperature
Degree controls device temperature of ink droplet in the region making on underlay substrate first printed dot and is less than
The temperature of ink droplet in the region of rear printed dot.
Higher in view of the temperature operability changing substrate, and can be by being accurately controlled difference
The temperature of the substrate in region reaches the change of printed dot temperature, the present invention in regional
Embodiment it is further preferred that as shown in Figure 6, said temperature control device 04 specifically for
Zones of different on underlay substrate 03 is carried out compartmentalization temperature control so that on underlay substrate
In the region of first printed dot, the temperature of substrate is less than the temperature of substrate in the region of rear printed dot
Degree.
Wherein, the concrete structure of temperature control equipment 04 is further as it is shown in fig. 7, be used for holding
Put the heat transfer support plate (not illustrating in figure) of underlay substrate；It is positioned at heat transfer support plate away from lining
Multiple heat-conducting pieces 041 of substrate side；Heat-conducting piece 041 contacts with heat transfer support plate, and
Regional one_to_one corresponding with underlay substrate.
It should be noted that first, to arrange above-mentioned heat transfer support plate be to make heat-conducting piece 041
Temperature can more uniformly conduct to underlay substrate, can be by being prone to the material of heat conduction (if not
Rust steel plate) make.
The second, the arrangement mode of heat-conducting piece 041 is corresponding to the zones of different tool of underlay substrate 03
Body arrangement mode, when the zones of different arrangement mode of underlay substrate 03 is with reference to shown in Fig. 3
By central area S0To the n-quadrant S of surroundingNDuring arrangement, the arrangement mode of heat-conducting piece 041
I.e. as shown in (a) part in Fig. 8, corresponding to the temperature of heat-conducting piece 041 of zones of different by center
It is followed successively by T to surrounding0～TN；When the zones of different arrangement mode of underlay substrate 03 is with reference to Fig. 4
Shown by central area S0To the n-quadrant S of both sidesNDuring arrangement, the row of heat-conducting piece 041
Row mode is i.e. as shown in (b) part in Fig. 8, corresponding to the temperature of the heat-conducting piece 041 of zones of different
Du You center is followed successively by T to both sides0～TN。
3rd, heat-conducting piece 041 specifically comprises the steps that one group of heat pipe；Wherein, heat pipe is often organized
Inside it is filled with fluid, corresponding to the fluid temperature (F.T.) in the heat pipe of the zones of different of underlay substrate not
With.
This group of heat pipe at least should comprise a heat pipe, and corresponding to the heat conduction of zones of different
The particular number of pipe can be the same or different, and the embodiment of the present invention is specifically not construed as limiting, with
It is capable of underlay substrate 03 zones of different there is this effect of thermograde to be as the criterion.
Wherein, the material of heat pipe is specifically as follows glass tubing, steel pipe etc.；The shape of heat pipe
It is specifically as follows bar shaped straight tube or coiled pipe；The fluid filled in it can be water etc., with water is i.e.
Medium carries out compartmentalization temperature control to underlay substrate zones of different.
As a example by corresponding to one group of heat pipe in a region, as shown in (a) part in Fig. 8,
This group heat pipe can be by one or more (only illustrating as a example by 5 in figure) parallel
The bar shaped straight tube 0411 of row is constituted, and is filled with heating or the water of condensation, each bar shaped in it
The intake-outlet figure of straight tube 0411 does not illustrates.
As shown in (b) part in Fig. 8, this group heat pipe can be by one or more (in figure
Only illustrate as a example by one) coiled pipe 0412 that circles round constituted, be filled with in it heating or
The water of condensation, does not illustrates in the intake-outlet figure of every coiled pipe 0412.
Using above-mentioned heat pipe that underlay substrate 03 zones of different carries out the control of compartmentalization temperature can
To use various ways to arrange flexibly, the such as heat conduction below the region corresponding to formerly printing
Fill cold water in pipe, in corresponding to the heat pipe below the region of rear printing, fill room temperature shape
The water of state or hot water, as long as the fluid filled in making the heat pipe below zones of different has one
Fixed thermograde.
Certainly, above-mentioned heat-conducting piece can also be specifically resistance wire, utilizes the mode of Resistant heating
Control underlay substrate zones of different feasible region temperature, i.e. the heat conduction in zones of different supports
Separate resistance wire is set below plate, is realized substrate by the temperature controlling resistance wire
Substrate zones of different carries out heating to reach the region ink droplet temperature of first printed dot on underlay substrate
Degree is less than the purpose of the region ink droplet temperature of rear printed dot.
Further, the embodiment of the present invention additionally provides a kind of system for preparing thin film, on
The system of stating includes: printing equipment, for printed dot on underlay substrate；Thin film is by ink droplet
Solvent evaporation after formed；This system also includes: above-mentioned temperature control equipment.
As it is shown in figure 9, wave in order to avoid the moisture in environment affects the dry of solvent in ink droplet
Sending out, said system also includes a sealable chamber 05, is placed with in sealable chamber 05
The underlay substrate (not illustrating in figure) of printed dot, take out in sealable chamber 05
The vacuum extractor 06 of vacuum and above-mentioned temperature control equipment 04.
The above, the only detailed description of the invention of the present invention, but protection scope of the present invention is also
Being not limited to this, any those familiar with the art is at the technology model that the invention discloses
In enclosing, change can be readily occurred in or replace, all should contain within protection scope of the present invention.
Therefore, protection scope of the present invention should be as the criterion with described scope of the claims.
Claims (11)
1. a preparation method for thin film, described thin film is formed after being evaporated by the solvent in ink droplet；
It is characterized in that, described method includes:
Make first to print on underlay substrate in the region of described ink droplet the temperature of ink droplet less than rear printing institute
State the temperature of ink droplet in the region of ink droplet.
Method the most according to claim 1, it is characterised in that described in make on underlay substrate
First print in the region of described ink droplet the temperature of ink droplet less than ink in the region of the described ink droplet of rear printing
The temperature dripped, including:
Printed dot successively in zones of different on underlay substrate；
Zones of different on described underlay substrate is carried out compartmentalization temperature control, according to described ink
The page order dripped so that the temperature of substrate in regional, suitable according to the priority of printed dot
Sequence raises successively.
Method the most according to claim 1, it is characterised in that described in make on underlay substrate
First print in the region of described ink droplet the temperature of ink droplet less than ink in the region of the described ink droplet of rear printing
The temperature dripped, including:
Zones of different on underlay substrate is carried out compartmentalization temperature control so that in regional
The temperature of substrate, raises successively according to the sequencing of ink droplet to be printed；
The order raised according to the temperature of substrate in regional described on described underlay substrate, depends on
Secondary printed dot in corresponding region.
The most according to the method in claim 2 or 3, it is characterised in that described zones of different
By the central area of described underlay substrate, successively around the 1st region of described central area to N
Region is constituted；N is the positive integer more than 1；
Described zones of different on underlay substrate is carried out compartmentalization temperature control, including:
Make substrate temperature by described central area to described n-quadrant distribution gradient；Arbitrarily phase
The substrate temperature difference Δ T in two adjacent regions meets formula:
Wherein, T0Substrate temperature for described central area；TNSubstrate for described n-quadrant
Temperature.
The most according to the method in claim 2 or 3, it is characterised in that described zones of different
By the central area of described underlay substrate, it is positioned at both sides, described central area and successively away from described
1st region to n-quadrant of central area is constituted；N is the positive integer more than 1；
Described zones of different on underlay substrate is carried out compartmentalization temperature control, including:
Make substrate temperature by described central area to the described n-quadrant Gradient distribution of both sides；Appoint
The substrate temperature difference Δ T in two adjacent regions of anticipating meets formula:
Wherein, T0Substrate temperature for described central area；TNSubstrate for described n-quadrant
Temperature.
6. a temperature control equipment, it is characterised in that described temperature control equipment is used for making lining
On substrate, in the region of first printed dot, the temperature of ink droplet is black less than in the region of rear printed dot
The temperature dripped.
Temperature control equipment the most according to claim 6, it is characterised in that described temperature
Control device specifically for the zones of different on described underlay substrate being carried out compartmentalization temperature control
System so that first print after the temperature of substrate is less than in the region of described ink droplet on described underlay substrate
Print the temperature of substrate in the region of described ink droplet.
Temperature control equipment the most according to claim 7, it is characterised in that described temperature
Control device to include:
Heat transfer support plate for underlay substrate described in bearing；
It is positioned at the described heat transfer support plate multiple heat-conducting pieces away from described underlay substrate side；Described
Heat-conducting piece contacts with described heat transfer support plate, and with the regional of described underlay substrate one by one
Corresponding.
Temperature control equipment the most according to claim 8, it is characterised in that described heat conduction
Part includes: one group of heat pipe；Wherein, it is filled with fluid, corresponding to described in often organizing heat pipe
Fluid temperature (F.T.) in the heat pipe of the zones of different of underlay substrate is different.
10., for preparing a system for thin film, described system includes: printing equipment, is used for
Printed dot on underlay substrate；Described thin film is formed after being evaporated by the solvent in ink droplet；It is special
Levying and be, described system also includes that the temperature as described in any one of claim 6 to 9 controls dress
Put.
11. systems according to claim 10, it is characterised in that described system also includes:
Sealable chamber, vacuum extractor；
Wherein, the described underlay substrate after ink droplet, described temperature control equipment and described are formed
Vacuum extractor is placed on inside described sealable chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610223735.XA CN105870359B (en) | 2016-04-12 | 2016-04-12 | Preparation method, temperature control equipment and the system for preparing film of film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610223735.XA CN105870359B (en) | 2016-04-12 | 2016-04-12 | Preparation method, temperature control equipment and the system for preparing film of film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105870359A true CN105870359A (en) | 2016-08-17 |
| CN105870359B CN105870359B (en) | 2017-08-11 |
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| CN201610223735.XA Active CN105870359B (en) | 2016-04-12 | 2016-04-12 | Preparation method, temperature control equipment and the system for preparing film of film |
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| CN108091778A (en) * | 2017-12-27 | 2018-05-29 | 深圳市华星光电技术有限公司 | Drying means, heating unit and its manufacturing method of inkjet printing film layer |
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| CN110549747A (en) * | 2019-09-09 | 2019-12-10 | 昆山国显光电有限公司 | Ink-jet printing device and method for preparing film |
| CN111086339A (en) * | 2019-12-17 | 2020-05-01 | 合肥师范学院 | Method for improving film thickness uniformity of different areas of ink-jet printing substrate |
| CN111086330A (en) * | 2018-10-23 | 2020-05-01 | 广东聚华印刷显示技术有限公司 | Drying device and drying process |
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| CN111086339A (en) * | 2019-12-17 | 2020-05-01 | 合肥师范学院 | Method for improving film thickness uniformity of different areas of ink-jet printing substrate |
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