JP2007012387A - Manufacturing method of organic electroluminescent display device - Google Patents

Manufacturing method of organic electroluminescent display device Download PDF

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JP2007012387A
JP2007012387A JP2005190477A JP2005190477A JP2007012387A JP 2007012387 A JP2007012387 A JP 2007012387A JP 2005190477 A JP2005190477 A JP 2005190477A JP 2005190477 A JP2005190477 A JP 2005190477A JP 2007012387 A JP2007012387 A JP 2007012387A
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pixel
pixel formation
formation region
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Takumi Sawatani
巧 澤谷
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Japan Display Central Inc
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Toshiba Matsushita Display Technology Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic electroluminescent display device excelling in luminance uniformity in an entire pixel formation area. <P>SOLUTION: In this manufacturing method of an organic electroluminescent display device composed by forming the pixel formation area by arranging a plurality of pixels in a matrix-like shape on a substrate, when an organic material layer for each pixel is formed by applying a solution to the pixel formation area by an ink jet method, the solution is sequentially applied from a generally central part to a peripheral part of the image formation area. For instance, the application is carried out such that a line formed by connecting the respective pixels in an order of the application draws a nearly spiral shape or nearly concentric circles starting from a generally central part of the pixel formation area. Alternatively, when the organic material layer for each pixel is formed by applying the solution to the pixel formation area by an ink jet method, temperature control for the substrate is executed such that the generally central part of the pixel formation area is set at a temperature higher than that of the peripheral part. The temperature control for the substrate is executed by heating the generally central part of the pixel formation area 1 of the substrate. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、基板上に複数の画素をマトリクス状に配置し画素形成領域を構成してなる有機エレクトロルミネッセンス表示装置の製造方法に関する。   The present invention relates to a method for manufacturing an organic electroluminescence display device in which a plurality of pixels are arranged in a matrix on a substrate to form a pixel formation region.

有機エレクトロルミネッセンス(以下、ELと称する。)素子は、自発光型素子であるため視野角が広く、バックライトが不要で薄型化及び消費電力の節減が容易であり、しかも応答速度が速い等の利点を持つことから、液晶表示装置に替わる次世代表示装置として注目を集めている。有機EL素子は、発光層の材料により高分子型と低分子型とに大きく分けることができる。このうち高分子型の有機EL素子は、大面積化が容易であることから高精細、大画面の表示装置に適するものである。高分子型の有機EL素子の発光層は、基板に高分子有機材料と溶剤を含む溶液を塗布することにより形成され、例えばインクジェット法により形成されることが多い。   An organic electroluminescence (hereinafter referred to as EL) element is a self-luminous element, has a wide viewing angle, does not require a backlight, is easy to reduce thickness and power consumption, and has a high response speed. Because of its advantages, it has attracted attention as a next-generation display device that replaces liquid crystal display devices. Organic EL elements can be broadly classified into high molecular types and low molecular types depending on the material of the light emitting layer. Among these, the polymer type organic EL element is suitable for a high-definition, large-screen display device because the area can be easily increased. A light emitting layer of a polymer type organic EL element is formed by applying a solution containing a polymer organic material and a solvent to a substrate, and is often formed by, for example, an ink jet method.

インクジェット法で発光層を含む有機材料層を形成する場合、複数の画素が所定間隔をもって連続形成される画素形成領域を備える基板上の当該画素形成領域に所定の液状物(溶液)を吐出し、吐出した液状物を乾燥させる(例えば特許文献1参照。)。通常、画素形成領域において溶液を塗布するに際しては、図3中矢印Bで示すように、画素形成領域11の一方の端縁から他方の端縁へ画素形成領域11を平行に走査することにより、画素形成領域11の塗布を行っている。その後、塗布された溶液を乾燥させて溶剤を除去することにより、有機材料層等が形成されることになる。
特開2001−291584号公報
When an organic material layer including a light emitting layer is formed by an inkjet method, a predetermined liquid material (solution) is discharged to the pixel formation region on a substrate including a pixel formation region in which a plurality of pixels are continuously formed at a predetermined interval. The discharged liquid material is dried (for example, refer to Patent Document 1). Normally, when applying the solution in the pixel formation region, as indicated by an arrow B in FIG. 3, by scanning the pixel formation region 11 in parallel from one edge of the pixel formation region 11 to the other edge, Application of the pixel formation region 11 is performed. Thereafter, the applied solution is dried to remove the solvent, whereby an organic material layer or the like is formed.
JP 2001-291484 A

ところで、インクジェット法により塗布された溶液の乾燥は、画素形成領域11の全域で均等に進むわけではない。例えば、画素形成領域11の周縁部12付近の画素に塗布された溶液の乾燥は速いが、画素形成領域11の外周端部から内周側に遠ざかるにつれて、すなわち画素形成領域11の中央に位置する画素に塗布された溶液ほど乾燥が遅くなる傾向にある。このような画素形成領域11内の各部での乾燥速度の差は、塗りむらとなり、得られる表示装置において輝度むらを発生させる原因となる。   By the way, the drying of the solution applied by the ink jet method does not proceed uniformly throughout the pixel formation region 11. For example, the solution applied to the pixels in the vicinity of the peripheral edge portion 12 of the pixel formation region 11 is dried quickly, but the solution is positioned away from the outer peripheral edge of the pixel formation region 11 toward the inner peripheral side, that is, at the center of the pixel formation region 11. The solution applied to the pixel tends to be slower to dry. Such a difference in drying speed at each part in the pixel formation region 11 causes uneven coating, which causes uneven luminance in the obtained display device.

そこで本発明はこのような従来の実情に鑑みて提案されたものであり、画素形成領域全体での輝度均一性に優れた有機エレクトロルミネッセンス表示装置の製造方法を提供することを目的とする。   Accordingly, the present invention has been proposed in view of such a conventional situation, and an object thereof is to provide a method of manufacturing an organic electroluminescence display device having excellent luminance uniformity in the entire pixel formation region.

前述の課題を解決するために、本発明に係る有機エレクトロルミネッセンス表示装置の製造方法は、基板上に複数の画素をマトリクス状に配置し画素形成領域を構成してなる有機エレクトロルミネッセンス表示装置の製造方法であって、前記画素形成領域においてインクジェット法により溶液を塗布して各画素の有機材料層を形成するに際し、前記画素形成領域の略中央部から周縁部へ前記溶液を順次塗布していくことを特徴とする。   In order to solve the above-described problems, a method for manufacturing an organic electroluminescence display device according to the present invention is a method for manufacturing an organic electroluminescence display device in which a plurality of pixels are arranged in a matrix on a substrate to form a pixel formation region. In the method, when the organic material layer of each pixel is formed by applying a solution in the pixel formation region by an inkjet method, the solution is sequentially applied from a substantially central portion to a peripheral portion of the pixel formation region. It is characterized by.

インクジェット法で溶液を塗布すると、塗布直後から溶液中の溶剤が徐々に蒸発し、周辺雰囲気に拡散していく。このとき、画素形成領域の略中央部の周辺の雰囲気においては、その周囲(周縁部)の画素から蒸発した溶剤の影響を受けるため、周縁部に比べ蒸気密度が高くなり易い。その結果、従来の方法では、略中央部に塗布された溶液の乾燥が妨げられて塗りむらとなり、前記乾燥速度の差が生じる。   When the solution is applied by the inkjet method, the solvent in the solution gradually evaporates immediately after the application and diffuses into the surrounding atmosphere. At this time, in the atmosphere around the substantially central portion of the pixel formation region, it is affected by the solvent evaporated from the surrounding (peripheral edge) pixels, so that the vapor density tends to be higher than that of the peripheral portion. As a result, in the conventional method, drying of the solution applied to the substantially central portion is hindered to cause uneven coating, resulting in a difference in the drying speed.

そこで、本発明では、画素形成領域の塗布順序を工夫することで、塗布された溶液から蒸発する溶剤の蒸気密度を画素形成領域の場所に応じて制御する。すなわち、蒸気密度の高くなり易い略中央部の塗布を行ってからその周囲(周縁部)の塗布を順次進めることで、周縁部の画素の蒸気に起因する略中央部周辺雰囲気の蒸気密度の著しい上昇が抑制される。その結果、画素形成領域の略中央部と周縁部とで蒸気密度の差が縮小し、画素形成領域の各部で乾燥が均一に進行する。   Accordingly, in the present invention, the vapor density of the solvent that evaporates from the applied solution is controlled according to the location of the pixel formation region by devising the application order of the pixel formation region. That is, by applying the substantially central portion where the vapor density tends to be high and then sequentially applying the periphery (peripheral portion), the vapor density of the atmosphere around the central portion due to the vapor of the pixels in the peripheral portion is remarkable. The rise is suppressed. As a result, the difference in vapor density is reduced between the substantially central portion and the peripheral portion of the pixel formation region, and drying proceeds uniformly in each portion of the pixel formation region.

また、本発明に係る有機エレクトロルミネッセンス表示装置の製造方法は、基板上に複数の画素をマトリクス状に配置し画素形成領域を構成してなる有機エレクトロルミネッセンス表示装置の製造方法であって、前記画素形成領域においてインクジェット法により溶液を塗布して各画素の有機材料層を形成するに際し、前記画素形成領域の略中央部が周縁部より高温となるように前記基板の温度制御を行うことを特徴とする。   The method for manufacturing an organic electroluminescence display device according to the present invention is a method for manufacturing an organic electroluminescence display device in which a plurality of pixels are arranged in a matrix on a substrate to form a pixel formation region, and the pixel When the organic material layer of each pixel is formed by applying a solution by an inkjet method in the formation region, the temperature of the substrate is controlled so that the substantially central portion of the pixel formation region is hotter than the peripheral portion. To do.

以上のような有機エレクトロルミネッセンス表示装置の製造方法では、乾燥の遅い略中央部の基板温度を高温とし、乾燥の速い周縁部の基板温度を相対的に低温とすることにより、塗布された溶液の乾燥速度を略中央部と周縁部とでそれぞれ制御する。その結果、画素形成領域の略中央部と周縁部とで蒸気密度の差が縮小し、画素形成領域の各部で乾燥が均一に進行する。   In the method of manufacturing an organic electroluminescence display device as described above, the substrate temperature at the substantially central portion that is slow to dry is made high, and the substrate temperature at the peripheral portion that is fast to dry is made relatively low, so The drying speed is controlled at the substantially central portion and the peripheral portion, respectively. As a result, the difference in vapor density is reduced between the substantially central portion and the peripheral portion of the pixel formation region, and drying proceeds uniformly in each portion of the pixel formation region.

本発明によれば、画素形成領域内での塗りむらが解消されるので、輝度むらの発生が抑制され、画素形成領域の全域にわたって均一な表示を実現することが可能な有機エレクトロルミネッセンス表示装置を製造することができる。   According to the present invention, there is provided an organic electroluminescence display device capable of eliminating unevenness of brightness in a pixel formation region and suppressing occurrence of unevenness of brightness and realizing uniform display over the entire region of the pixel formation region. Can be manufactured.

以下、本発明を適用した有機エレクトロルミネッセンス表示装置の製造方法について、図面を参照しながら詳細に説明する。   Hereinafter, a method for producing an organic electroluminescence display device to which the present invention is applied will be described in detail with reference to the drawings.

(第1の実施形態)
先ず、製造対象となる有機エレクトロルミネッセンス(EL)表示装置について説明する。有機EL表示装置は、例えば、ガラス等からなる基板上に、複数の薄膜トランジスタ(TFT)と、TFTを覆うように基板の略全面に形成されたSiN等からなる保護膜とを備え、保護膜上に各TFTに対応して例えばマトリクス状に配置された複数の画素を備える構成とされる。ここで、基板上の複数の画素が配置される領域を画素形成領域と称する。隣り合う画素は、保護膜上に形成された例えば格子状の画素分離用バンクによって区画される。
(First embodiment)
First, an organic electroluminescence (EL) display device to be manufactured will be described. The organic EL display device includes, for example, a plurality of thin film transistors (TFTs) on a substrate made of glass or the like, and a protective film made of SiN x or the like formed on substantially the entire surface of the substrate so as to cover the TFTs. For example, a plurality of pixels arranged in a matrix, for example, corresponding to each TFT are provided. Here, a region where a plurality of pixels on the substrate are arranged is referred to as a pixel formation region. Adjacent pixels are partitioned by, for example, a grid-like pixel separation bank formed on the protective film.

画素の各々には、画素電極(陽極)、発光層を含む有機材料層及び陰極の積層体が形成されている。なお、積層体は、陰極、有機材料層及び陽極の順に積層した構造等でも構わない。   In each pixel, a stacked body of a pixel electrode (anode), an organic material layer including a light emitting layer, and a cathode is formed. Note that the stacked body may have a structure in which a cathode, an organic material layer, and an anode are stacked in this order.

陽極としては、例えばインジウムスズ酸化物(ITO)等の透明電極を用いることができる。陰極としては例えばアルミニウム等の金属や合金等を用いることができる。   As the anode, for example, a transparent electrode such as indium tin oxide (ITO) can be used. As the cathode, for example, a metal such as aluminum or an alloy can be used.

有機材料層は、有機EL材料等の有機材料を含む層である。有機材料層の構造は、発光に寄与する発光層の単層構造でもよいし、多層構造でもよい。有機材料層が多層構造である場合、発光層の他に、正孔注入層、正孔輸送層、電子輸送層、電子注入層等を含むことができる。   The organic material layer is a layer containing an organic material such as an organic EL material. The structure of the organic material layer may be a single layer structure of a light emitting layer that contributes to light emission or a multilayer structure. When the organic material layer has a multilayer structure, a hole injection layer, a hole transport layer, an electron transport layer, an electron injection layer, and the like can be included in addition to the light emitting layer.

前述の構成の有機EL表示装置において、インクジェット法により塗料を塗布して各画素の有機材料層を形成する場合、前述の従来法では、塗りむらが問題になる。そこで、本実施形態では、塗布順序を工夫することによって、前記塗りむらを解消することとする。すなわち、本実施形態の有機EL表示装置の製造方法では、先ず、ガラス等の基板上に駆動回路やTFT等を形成し、これらを保護膜で被覆する。次に、保護膜上に画素電極を形成する。画素電極としてITOからなる陽極を形成する場合、保護膜等の略全面にITO膜を形成した後、例えばフォトグラフィ法で所望の形状にパターニングすればよい。   In the organic EL display device having the above-described configuration, when the organic material layer of each pixel is formed by applying a paint by an ink jet method, uneven coating is a problem in the above-described conventional method. Therefore, in this embodiment, the coating unevenness is eliminated by devising the application order. That is, in the manufacturing method of the organic EL display device of this embodiment, first, a drive circuit, a TFT, and the like are formed on a substrate such as glass, and these are covered with a protective film. Next, a pixel electrode is formed on the protective film. When forming an anode made of ITO as a pixel electrode, an ITO film is formed on substantially the entire surface of a protective film or the like and then patterned into a desired shape by, for example, a photolithography method.

次に、保護膜上に例えば格子状の画素分離用バンク等を形成し、各画素を区画する。このとき、画素分離用バンクを各画素電極の周囲を取り囲むように配置し、画素分離用バンクの開口部の底面に画素電極の表面を露出させる。   Next, for example, a lattice-like pixel separation bank is formed on the protective film to partition each pixel. At this time, the pixel separation bank is disposed so as to surround each pixel electrode, and the surface of the pixel electrode is exposed on the bottom surface of the opening of the pixel separation bank.

次に、各画素に配置された画素電極上に有機材料層を形成する。有機材料層を形成するには、有機材料層形成用の有機材料と溶剤とを含む溶液を溶液吐出用ノズルから画素電極上に吐出する、いわゆるインクジェット法により塗布する。   Next, an organic material layer is formed on the pixel electrode arranged in each pixel. In order to form an organic material layer, a solution containing an organic material for forming an organic material layer and a solvent is applied by a so-called inkjet method in which a solution discharge nozzle is discharged onto a pixel electrode.

第1の実施形態では、画素形成領域においてインクジェット法により溶液を塗布して各画素の有機材料層を形成するに際し、画素形成領域の略中央部から周縁部へ溶液を順次塗布していく。塗布パターンとしては、例えば、各画素を塗布した順につないだ線が画素形成領域の略中央部を始点とする略螺旋を描くようなパターンが挙げられる。具体的には、図1に示すように、画素形成領域1の略中央部に位置する画素を始点とし、そこから外周方向へ向かう略螺旋状の軌跡Aを描くように、各画素に対して溶液を塗布する。なお、図1では、画素形成領域1を実線で区画した1領域を1画素とみなし、1画素ずつ溶液を塗布する様子を図示したが、複数の画素を同時に塗布しても構わない。また、溶液の塗布パターンは、各画素を塗布した順につないだ線が画素形成領域1の略中央部を始点とし、且つ中心とする略同心円を描くようなパターンでも構わない。   In the first embodiment, when the organic material layer of each pixel is formed by applying a solution in the pixel formation region by an inkjet method, the solution is sequentially applied from the substantially central portion to the peripheral portion of the pixel formation region. Examples of the application pattern include a pattern in which a line connecting the pixels in the order in which the pixels are applied draws an approximate spiral starting from the approximate center of the pixel formation region. Specifically, as shown in FIG. 1, each pixel is drawn so as to draw a substantially spiral trajectory A starting from a pixel located substantially in the center of the pixel formation region 1 and extending outward from the pixel. Apply the solution. Although FIG. 1 illustrates a state in which one region obtained by dividing the pixel formation region 1 with a solid line is regarded as one pixel and a solution is applied pixel by pixel, a plurality of pixels may be applied simultaneously. Further, the solution application pattern may be a pattern in which a line connecting the pixels in the order in which the pixels are applied draws a substantially concentric circle starting from the substantially central portion of the pixel forming region 1 and having the center.

画素形成領域1の塗布を終了した後、塗布された溶液を乾燥させて溶剤を除去することにより、有機材料層が得られる。形成された有機材料層上に陰極を形成し、必要に応じて封止等を行うことにより、有機EL表示装置が得られる。   After the application of the pixel formation region 1 is completed, the applied solution is dried to remove the solvent, thereby obtaining an organic material layer. An organic EL display device is obtained by forming a cathode on the formed organic material layer and performing sealing or the like as necessary.

以上のように、第1の実施形態では、蒸気密度の高くなり易い画素形成領域1の略中央部を先に塗布し、その後、例えば画素を塗布した順につないだ線が画素形成領域の略中央部を始点とする略螺旋又は略同心円を描くように、外周方向へ順次塗布を進めるような塗布順序とすることで、画素形成領域1の略中央部での蒸気密度の大幅な上昇を抑制している。その結果、略中央部と後から塗布される周縁部とで、それぞれの周辺雰囲気の蒸気密度の差が縮小する。この結果、画素形成領域1の略中央部と周縁部との乾燥速度の差が縮小することとなる。したがって、得られる有機EL表示装置において、乾燥速度の差に起因する輝度むらの発生が抑制され、画素形成領域1の全域にわたって均一な画面表示を行うことができる。   As described above, in the first embodiment, the substantially central portion of the pixel formation region 1 that tends to have a high vapor density is applied first, and then, for example, the line connected in the order in which the pixels are applied is the approximate center of the pixel formation region. The coating sequence is such that the coating is sequentially applied in the outer circumferential direction so as to draw a substantially spiral or a substantially concentric circle starting from the portion, thereby suppressing a significant increase in vapor density at the substantially central portion of the pixel formation region 1. ing. As a result, the difference in vapor density between the surrounding atmosphere is reduced between the substantially central portion and the peripheral portion to be applied later. As a result, the difference in drying speed between the substantially central portion and the peripheral portion of the pixel formation region 1 is reduced. Therefore, in the obtained organic EL display device, the occurrence of uneven brightness due to the difference in drying speed is suppressed, and a uniform screen display can be performed over the entire pixel formation region 1.

なお、前述の第1の実施形態は、フルカラー表示可能な有機EL表示装置に適用することも可能である。フルカラー表示可能な有機EL表示装置として、画素形成領域において有機EL素子として赤色発光素子、青色発光素子及び緑色発光素子の3色の発光素子が例えばストライプ状又はデルタ状等に配列された有機EL表示装置に第1の実施形態に係る製造方法を適用する場合、発光素子の色毎に、インクジェットヘッドの溶液吐出用ノズルから溶液を吐出することにより対応する色の画素を選択的に塗布するとともに画素形成領域の略中央部から周縁部へ溶液を順次塗布すればよい。   The first embodiment described above can also be applied to an organic EL display device capable of full color display. As an organic EL display device capable of full-color display, an organic EL display in which light emitting elements of three colors, a red light emitting element, a blue light emitting element, and a green light emitting element, are arranged in, for example, a stripe shape or a delta shape as an organic EL element in a pixel formation region When the manufacturing method according to the first embodiment is applied to an apparatus, a pixel of a corresponding color is selectively applied for each color of a light-emitting element by discharging a solution from a solution discharge nozzle of an inkjet head. What is necessary is just to apply | coat a solution one by one from the approximate center part of a formation area to a peripheral part.

(第2の実施形態)
本実施形態の有機EL表示装置の製造方法では、基板に温度分布を持たせることで、前記塗りむらを解消する。製造対象となる有機EL表示装置は、先の第1の実施形態と同様である。
(Second Embodiment)
In the manufacturing method of the organic EL display device of the present embodiment, the uneven coating is eliminated by giving the substrate a temperature distribution. The organic EL display device to be manufactured is the same as that in the first embodiment.

有機EL表示装置の製造方法の第2の実施形態について図2を用いて説明すると、先ず、ガラス等の基板上に駆動回路やTFT等を形成し、これらを保護膜で被覆する。次に、保護膜上に画素電極と、各画素電極の周囲を取り囲むように配置した画素分離用バンク等を形成し、各画素を区画する。ここまでは、前述の第1の実施形態と同様である。   A second embodiment of the method for manufacturing an organic EL display device will be described with reference to FIG. 2. First, a drive circuit, a TFT, and the like are formed on a substrate such as glass, and these are covered with a protective film. Next, a pixel electrode and a pixel separation bank arranged so as to surround each pixel electrode are formed on the protective film, thereby partitioning each pixel. Up to this point, the process is the same as in the first embodiment.

次に、各画素に配置された画素電極上に有機材料層を形成する。有機材料層を形成するには、有機材料層形成用の有機材料と溶剤とを含む溶液を溶液吐出用ノズルから画素電極上に吐出する、いわゆるインクジェット法により塗布する。   Next, an organic material layer is formed on the pixel electrode arranged in each pixel. In order to form an organic material layer, a solution containing an organic material for forming an organic material layer and a solvent is applied by a so-called inkjet method in which a solution discharge nozzle is discharged onto a pixel electrode.

第2の実施形態では、画素形成領域においてインクジェット法により溶液を塗布して各画素の有機材料層を形成するに際し、画素形成領域の略中央部が周縁部より高温となるように基板の温度を制御する点に特徴がある。例えば図2に示すように、基板の画素形成領域1の略中央部を加熱することにより、画素形成領域1の略中央部が最も高温となり、周縁部に向かうに従って次第に低温となるように基板温度を制御する。このような温度分布を持つ基板の画素形成領域1に溶液を塗布すると、相対的に高温を示す領域、すなわち画素形成領域1の略中央部では塗布された溶液からの溶剤の蒸発が促進され、乾燥が速められる。   In the second embodiment, when the organic material layer of each pixel is formed by applying a solution by an inkjet method in the pixel formation region, the temperature of the substrate is set so that the substantially central portion of the pixel formation region is higher than the peripheral portion. There is a feature in the point to control. For example, as shown in FIG. 2, by heating the substantially central portion of the pixel formation region 1 of the substrate, the substrate temperature is such that the substantially central portion of the pixel formation region 1 becomes the highest temperature and gradually decreases toward the peripheral portion. To control. When the solution is applied to the pixel formation region 1 of the substrate having such a temperature distribution, evaporation of the solvent from the applied solution is promoted in a region showing a relatively high temperature, that is, in a substantially central portion of the pixel formation region 1, Drying is accelerated.

第2の実施形態では、画素形成領域1に溶液を塗布する順序や塗布パターンは特に問わない。第1の実施形態で説明したような、例えば画素形成領域1の略中央部を先に塗布し、その後、例えば画素を塗布した順につないだ線が画素形成領域の略中央部を始点とする略螺旋又は略同心円を描くように、外周方向へ順次塗布を進めるような塗布順序としてもよいし、あるいは、画素形成領域の一方の端縁から他方の端縁へ画素形成領域を順次走査するような順序としてもよい。   In the second embodiment, the order of applying the solution to the pixel formation region 1 and the application pattern are not particularly limited. As described in the first embodiment, for example, a substantially central portion of the pixel formation region 1 is applied first, and then, for example, a line connected in the order in which the pixels are applied is an abbreviation starting from the substantially central portion of the pixel formation region. The application sequence may be such that the application is sequentially performed in the outer circumferential direction so as to draw a spiral or a substantially concentric circle, or the pixel formation region is sequentially scanned from one edge of the pixel formation region to the other edge. It is good also as an order.

以上のように、第2の実施形態では、画素形成領域1の略中央部を例えば加熱して、略中央部に塗布された溶液からの溶剤の蒸発速度(乾燥)を速めることで、周縁部に塗布された溶液の乾燥速度との差を縮小する。したがって、得られる有機EL表示装置において、乾燥速度の差に起因する輝度むらの発生が抑制され、画素形成領域1の全域にわたって均一な画面表示を行うことができる。   As described above, in the second embodiment, the peripheral portion is obtained by, for example, heating the substantially central portion of the pixel forming region 1 to increase the evaporation rate (drying) of the solvent from the solution applied to the substantially central portion. The difference between the drying rate of the solution applied to the substrate is reduced. Therefore, in the obtained organic EL display device, the occurrence of uneven brightness due to the difference in drying speed is suppressed, and a uniform screen display can be performed over the entire pixel formation region 1.

なお、前述の第2の実施形態は、画素形成領域において有機EL素子として赤色発光素子、青色発光素子及び緑色発光素子の3色の発光素子が例えばストライプ状やデルタ状に配列されたフルカラー表示可能な有機EL表示装置に適用することも可能であることは言うまでもない。   In the second embodiment described above, full-color display is possible in which light emitting elements of three colors, a red light emitting element, a blue light emitting element, and a green light emitting element, are arranged in a stripe shape or a delta shape as organic EL elements in the pixel formation region. Needless to say, the present invention can be applied to other organic EL display devices.

第1の実施形態の有機EL表示装置の製造方法を示す概略平面図である。It is a schematic plan view which shows the manufacturing method of the organic electroluminescence display of 1st Embodiment. 第2の実施形態の有機EL表示装置の製造方法を示す概略平面図である。It is a schematic plan view which shows the manufacturing method of the organic electroluminescence display of 2nd Embodiment. 従来の有機EL表示装置の製造方法を示す概略平面図である。It is a schematic plan view which shows the manufacturing method of the conventional organic EL display apparatus.

符号の説明Explanation of symbols

1 画素形成領域   1 Pixel formation area

Claims (4)

基板上に複数の画素をマトリクス状に配置し画素形成領域を構成してなる有機エレクトロルミネッセンス表示装置の製造方法であって、
前記画素形成領域においてインクジェット法により溶液を塗布して各画素の有機材料層を形成するに際し、前記画素形成領域の略中央部から周縁部へ前記溶液を順次塗布していくことを特徴とする有機エレクトロルミネッセンス表示装置の製造方法。
A method of manufacturing an organic electroluminescence display device comprising a plurality of pixels arranged in a matrix on a substrate to form a pixel formation region,
When the organic material layer of each pixel is formed by applying a solution in the pixel formation region by an ink jet method, the solution is sequentially applied from a substantially central portion to a peripheral portion of the pixel formation region. A method for manufacturing an electroluminescence display device.
各画素を塗布した順につないだ線が前記画素形成領域の略中央部を始点とする略螺旋又は略同心円を描くように前記塗布を行うことを特徴とする請求項1記載の有機エレクトロルミネッセンス表示装置の製造方法。   2. The organic electroluminescence display device according to claim 1, wherein the application is performed such that a line connecting the pixels in the order of application draws a substantially spiral or a substantially concentric circle starting from a substantially central portion of the pixel formation region. Manufacturing method. 基板上に複数の画素をマトリクス状に配置し画素形成領域を構成してなる有機エレクトロルミネッセンス表示装置の製造方法であって、
前記画素形成領域においてインクジェット法により溶液を塗布して各画素の有機材料層を形成するに際し、前記画素形成領域の略中央部が周縁部より高温となるように前記基板の温度制御を行うことを特徴とする有機エレクトロルミネッセンス表示装置の製造方法。
A method of manufacturing an organic electroluminescence display device comprising a plurality of pixels arranged in a matrix on a substrate to form a pixel formation region,
When the organic material layer of each pixel is formed by applying a solution in the pixel formation region by an ink jet method, the temperature of the substrate is controlled so that the substantially central portion of the pixel formation region is hotter than the peripheral portion. A method for manufacturing an organic electroluminescence display device.
前記基板の前記画素形成領域の略中央部を加熱することにより前記基板の温度制御を行うことを特徴とする請求項3記載の有機エレクトロルミネッセンス表示装置の製造方法   4. The method of manufacturing an organic electroluminescence display device according to claim 3, wherein the temperature of the substrate is controlled by heating a substantially central portion of the pixel formation region of the substrate.
JP2005190477A 2005-06-29 2005-06-29 Manufacturing method of organic electroluminescent display device Pending JP2007012387A (en)

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JP2009277578A (en) * 2008-05-16 2009-11-26 Panasonic Corp Manufacturing method of light-emitting device
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