CN206834210U - Minton dryer for inkjet printing OLED luminous zones - Google Patents
Minton dryer for inkjet printing OLED luminous zones Download PDFInfo
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- CN206834210U CN206834210U CN201720804287.2U CN201720804287U CN206834210U CN 206834210 U CN206834210 U CN 206834210U CN 201720804287 U CN201720804287 U CN 201720804287U CN 206834210 U CN206834210 U CN 206834210U
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Abstract
The utility model proposes the Minton dryer for inkjet printing OLED luminous zones, the device includes：For placing and heating the hot plate of substrate；Cold drawing, it is oppositely disposed with hot plate, and multiple through holes is provided with cold drawing；And support seal member, it is arranged between cold drawing and hot plate, and saturated pressure chamber is limited out with cold drawing, hot plate.The Minton dryer that the utility model is proposed, it increases support seal member newly between cold drawing and hot plate, can limit out saturated pressure chamber, and multiple through holes are additionally provided with cold drawing；When carrying out vacuumize process, the saturated air nip of the surface on hot plate can be made will not be joined directly together with high vacuum region, it can then make the volatilization of solvent in ink droplet directionally controlled and rate of volatilization is evenly everywhere, so as to obtain the more preferable product of pixel uniformity, the quantity of Dummy pixel needed for luminous area edge is efficiently reduced, and then realizes the narrow frame effect of OLED.
Description
Technical field
Display Technique and manufacturing field are the utility model is related to, specifically, the utility model is related to for inkjet printing
The Minton dryer of OLED luminous zones.
Background technology
Now, organic electroluminescence device (OLED) has self-luminous, reaction is fast, regards relative to liquid crystal display (LCD)
The advantages that angle is wide, brightness is high, color is gorgeous, frivolous, it is considered to be Display Technique of future generation.And OLED thin film-forming method mainly has steaming
Plate two kinds of processing procedure and solution process.Wherein, evaporation processing procedure is more ripe in small size application, and the technology is applied to volume production
In；And solution process mainly includes the OLED thin film-forming methods such as inkjet printing, nozzle application, spin coating, silk-screen printing, spray therein
Black printing technique is because its stock utilization is higher, it is in large size to realize, it is considered to be large scale OLED realizes volume production
Important way.
At this stage, in the method for the OLED of inkjet printing, thickness evenness of the OLED films in pixel is very heavy
Will, it is to influence the life-span of OLED and an important factor for efficiency, therefore obtain pattern flat in pixel need to specifically press
It is dried under strong.And InkJet printing processes generally comprise：Inkjet printing (IJP) technique, vacuum drying (VCD) technique and drying
(Bake) technique.Wherein, it is most important with influence of the vacuum drying process to the last pattern of film, so, how in control base board
Ink droplet rate of drying is uniformly very crucial.
At present, with reference to figure 1, during vacuum drying by way of a cold drawing 200 is put in side over substrate 400, for capturing ink
Drip and condensed on cold drawing 200, drying for ink droplet (ink) is evaporated on whole substrate 400 so as to realize.But close to substrate side
Edge region ink pattern uniformity is simultaneously bad, so in order to ensure pixel pattern uniformity, further on luminous zone (AA areas) side
Edge sets virtual pixel (Dummy pixel).Because the ink of Dummy pixel printings is no current by so not lighting.
Although Dummy pixel design different, ink drying characteristic difference according to VCD, and number is also different, general Dummy
Pixel is required for more than mm.Therefore, Dummy Pixel designs are caused and narrow frame design theory is disagreed, additionally, due to outer
The design of the drive circuits such as fan-out area (Fan out), Electro-static Driven Comb (ESD) is enclosed, it is difficult to increase a lot.
Therefore, the vacuum drying means of inkjet printing OLED luminous zones at this stage have much room for improvement.
The content of the invention
The utility model is intended to one of technical problem at least solving in correlation technique to a certain extent.
The utility model is the following discovery based on inventor and completed：
Inventor of the present utility model has found in research process, with reference to figure 1, because the substrate 400 for being printed with ink droplet is set
Put between cold drawing 200 and hot plate 300, solvent atmosphere of the central area of the top of substrate 400 all in saturation when ink droplet is dried
In, so as to ensure the pixel pattern uniformity in AA areas.But after the Minton dryer forms vacuum state, close to substrate
The air pressure transition region that fringe region ink is between saturated vapor pressure and high vacuum, due to the drying vacuum of air pressure transition region
It is inconsistent with center, cause its pattern uniformity can not just ensure.
Inventor of the present utility model has found by further investigation, in the periphery of substrate 400 and cold drawing 200 and hot plate 100
Between increase support seal member 300 newly, the saturated pressure chamber 310 of the top of substrate 400 can be limited out, and on cold drawing 200 also
It is provided with multiple through holes 210.Then when carrying out vacuumize process, the saturated air nip of the top of substrate 400 will not be with high vacuum region
It is joined directly together, then the volatilization of solvent in ink droplet can be made directionally controlled and rate of volatilization is evenly, equal so as to obtain pixel everywhere
The even more preferable product of property.
In view of this, a purpose of the present utility model is to propose that one kind can make OLED luminous zones pixel uniformity more
Good, achievable product narrow frame design, Minton dryer easy to operate or low improvement cost.
Of the present utility model in a first aspect, the utility model proposes a kind of for the true of inkjet printing OLED luminous zones
Empty drying device.
According to embodiment of the present utility model, the Minton dryer includes：For placing and heating the hot plate of substrate；
Cold drawing, the cold drawing are oppositely disposed with the hot plate, and multiple through holes are provided with the cold drawing；And support sealing
Part, the support seal member is arranged between the cold drawing and the hot plate, and is limited out with the cold drawing, the hot plate full
With air pressure chamber.
For inventor it was unexpectedly observed that the Minton dryer of the utility model embodiment, it is new between cold drawing and hot plate
Increase expenditure and support seal member, saturated pressure chamber can be limited out, and multiple through holes are additionally provided with cold drawing；Carrying out vacuumizing place
During reason, the saturated air nip of the surface on hot plate can be made will not be joined directly together with high vacuum region, then can make solvent in ink droplet
Volatilization it is directionally controlled and rate of volatilization evenly, so as to obtain the more preferable product of pixel uniformity, efficiently reduces everywhere
Dummy pixel quantity needed for luminous area edge, and then realize the narrow frame effect of OLED.
In addition, according to the Minton dryer of the utility model above-described embodiment, there can also be technology additional as follows
Feature：
According to embodiment of the present utility model, the support seal member is formed by elastomeric material.
According to embodiment of the present utility model, the elastomeric material is selected from organosilicon, polytetrafluoroethylene (PTFE) or polyether-ether-ketone.
According to embodiment of the present utility model, the width of the support seal member is 0.5~10mm.
According to embodiment of the present utility model, the height of the support seal member is 1~20mm.
According to embodiment of the present utility model, the aperture of the through hole is 0.1~5mm.
According to embodiment of the present utility model, the side of the close hot plate of the cold drawing is provided with the first groove, and
One end of the close cold drawing of the support seal member is entrenched in first groove.
According to embodiment of the present utility model, the side of the close cold drawing of the hot plate is provided with the second groove, and
One end of the close hot plate of the support seal member is entrenched in second groove.
According to embodiment of the present utility model, one end of the close hot plate of the support seal member, institute is arranged on
State surface of the substrate away from the hot plate.
According to embodiment of the present utility model, the Minton dryer further comprises：Vacuum drying cabinet, the heat
It is indoor that plate, the cold drawing and the support seal member are arranged on the vacuum drying；Vacuumizing part, the vacuumizing part
It is connected with the vacuum drying cabinet.
Additional aspect and advantage of the present utility model will be set forth in part in the description, partly by from following description
In become obvious, or by it is of the present utility model practice recognize.
Brief description of the drawings
Of the present utility model above-mentioned and/or additional aspect and advantage will in the description from combination accompanying drawings below to embodiment
Become obvious and be readily appreciated that, wherein：
Fig. 1 is a kind of existing structure and working principle signal for being used to make the Minton dryer of OLED luminous zones
Figure；
Fig. 2 is the cross section structure for being used to make the Minton dryer of OLED luminous zones of the utility model one embodiment
Schematic diagram；
Fig. 3 is the section knot for being used to make the Minton dryer of OLED luminous zones of another embodiment of the utility model
Structure schematic diagram；
Fig. 4 is the section knot for being used to make the Minton dryer of OLED luminous zones of another embodiment of the utility model
Structure schematic diagram；
Fig. 5 is the section knot for being used to make the Minton dryer of OLED luminous zones of another embodiment of the utility model
Structure schematic diagram；
Fig. 6 is the work original for being used to make the Minton dryer of OLED luminous zones of another embodiment of the utility model
Manage schematic diagram；
Fig. 7 is the section knot for being used to make the Minton dryer of OLED luminous zones of another embodiment of the utility model
Structure schematic diagram；
Fig. 8 is the support seal member of the utility model one embodiment and the present invention looks up structural representation of cold drawing.
Reference
100 hot plates
110 second grooves
200 cold drawings
210 through holes
220 first grooves
300 supporting sealing devices
400 substrates
500 vacuum drying cabinets
600 vacuumizing parts
Embodiment
Embodiment of the present utility model is described below in detail, those skilled in the art is it will be appreciated that example below is intended to use
In explanation the utility model, and it is not construed as to limitation of the present utility model.Unless stated otherwise, do not have in embodiment below
It is expressly recited particular technique or condition, those skilled in the art according to conventional technology in the art or condition or can press
Carried out according to product description.
In one side of the present utility model, it is used for the true of inkjet printing OLED luminous zones the utility model proposes a kind of
Empty drying device.Reference picture 2~7, device of the present utility model is described in detail.
According to embodiment of the present utility model, reference picture 2, the Minton dryer includes：Hot plate 100, cold drawing 200 and
Support seal member 300；Wherein, hot plate 100 is used to place and heat substrate；Cold drawing 200 is oppositely disposed with hot plate 100, and
Multiple through holes 210 are provided with cold drawing 200；And support seal member 300 to be arranged between cold drawing 200 and hot plate 100, and with it is cold
Plate 200, hot plate 100 limit out saturated pressure chamber 310.
The utility model people has found in research process, with reference to figure 1, substrate 400 of the prior art due to being printed with ink droplet
It is arranged between cold drawing 200 and hot plate 300, solvent atmosphere of the central area of the top of substrate 400 all in saturation when ink droplet is dried
In enclosing, so as to ensure the pixel pattern uniformity in AA areas；But close to substrate edge region ink be in saturated vapor pressure with
Air pressure transition region between high vacuum, because drying vacuum and the center of air pressure transition region are inconsistent, cause its pattern equal
Even property can not just ensure.Inventor of the present utility model has found by further investigation, the application can in the periphery of substrate 400 and
Support seal member 300 is increased between cold drawing 200 and hot plate 100 newly, so as to limit out the saturated pressure chamber of the top of substrate 400
310, and multiple through holes 210 are additionally provided with cold drawing 200；When carrying out vacuumize process, with reference to figure 6, the top of substrate 400
Saturated air nip will not be joined directly together with high vacuum region, then the volatilization of solvent in ink droplet can be made directionally controlled and rate of volatilization everywhere
Evenly, so as to obtaining the more preferable product of pixel uniformity.
According to embodiment of the present utility model, the specific material of support seal member 300 is not particularly limited, as long as should
The support seal member 300 of material can seal the saturated pressure chamber 310 between hot plate 100 and cold drawing 200, this area
Technical staff can be selected according to the particular type of the requirement of the temperature in use of the vacuum sealing device and solvent.It is new in this practicality
In some embodiments of type, support seal member 300 can be formed by elastomeric material.In this way, the branch using above-mentioned material
Seal member is supportted, it has certain elasticity, solvent resistant corrosion, and good airproof performance.In some specific examples of the present utility model,
Above-mentioned elastomeric material may be selected from organosilicon, polytetrafluoroethylene (PTFE) or polyether-ether-ketone.In this way, the support using above-mentioned elastomeric material
Seal member, corrosion resistance is higher and better tightness.
According to embodiment of the present utility model, the specific width of support seal member 300 is not also particularly limited, as long as
The support seal member 300 of the width can play a part of sealing and support, and those skilled in the art can be according to the vacuum
The specific vacuum of drying device and the specific weight of cold drawing are designed.In some embodiments of the utility model, support
The width of seal member 300 can be 0.5~10mm.In this way, using the support seal member of above-mentioned width, can function well as
Sealing function and supporting role.In some specific examples of the present utility model, the width for supporting seal member 300 can be 2
~5mm.In this way, using the support seal member of above-mentioned width, can have better seal effect and supporting role simultaneously.
According to embodiment of the present utility model, the specific height of support seal member 300 is not also particularly limited, as long as
The saturated pressure chamber 310 that the support seal member 300 of the height can be effectively sealed against out between hot plate 100 and cold drawing 200 is
Can, those skilled in the art can be designed according to the spacing between hot plate 100 and cold drawing 200.More of the present utility model
In embodiment, the width of support seal member 300 can be 1~20mm.In this way, using the support seal member of above-mentioned height,
The spacing between cold-hot plate can be better controled over, so as to make the more preferable product of pixel uniformity formed on substrate.
According to embodiment of the present utility model, the support specific shape and size in the cross section of seal member 300 are not by special
Limitation, as long as the support seal member 300 can surround the Shang AA areas of substrate 400, those skilled in the art can basis
The concrete shape in AA areas and size are designed on substrate, and specifically by taking 55 inches of panel (panel) as an example, the size in AA areas is about
For 700mm × 1200mm, then seal member 300 is supported to use interior cross section to be rectangular, the rectangular length need to be more than
1200mm, width need to be more than 700mm.
According to embodiment of the present utility model, 210 specific quantity of through hole and set location are not particularly limited, only
Will multiple through holes 210 of the distribution mode can efficiently control solvent evaporation rate, those skilled in the art can be according to molten
The specific species of agent and specific vacuum degree are designed.In some embodiments of the utility model, it can use shown in Fig. 8
This through hole 210 distribution mode, in this way, can not only keep the solvent saturated pressure of surface in process of vacuum drying
Area, it can also improve the efficiency of vacuum drying treatment.
According to embodiment of the present utility model, the specific aperture of through hole 210 is not also particularly limited, as long as the aperture
Through hole 210 can efficiently control the evaporation rate of solvent, and those skilled in the art can be according to the reality of the Minton dryer
Border use condition is selected.In some embodiments of the utility model, the aperture of through hole 210 can be 0.1~5mm.Such as
This, using the through hole in above-mentioned aperture, can better control over the evaporation rate of solvent, so that the pixel uniformity formed on substrate
More preferable product.
According to embodiment of the present utility model, the specific assembling of the support seal member 300 and hot plate 100, cold drawing 200 is closed
System is not particularly limited, as long as support seal member 300 plays sealing function i.e. between hot plate 100, cold drawing 200 respectively
Can, those skilled in the art can be designed according to the specific material of cold-hot plate and the specific vacuum of the Minton dryer.
In some embodiments of the utility model, with reference to figure 3, the side of the close hot plate 100 of cold drawing 200 is provided with
One groove 220, and support one end of the close cold drawing 200 of seal member 300 to be entrenched in the first groove 220.In this way, using upper
The assembly relation stated, the sealing between support seal member 300 and cold drawing 200 can be increased, be dried in vacuo so as to ensure that
The saturation degree of the solvent vapo(u)r of surface in journey.
In other embodiments of the present utility model, with reference to figure 4, the side of the close cold drawing 200 of hot plate 100 is provided with
Second groove 110, and support one end of the close hot plate 100 of seal member 300 to be entrenched in the second groove 110.In this way, using
Above-mentioned assembly relation, the sealing between support seal member 300 and hot plate 100 can be increased, so as to ensure that vacuum drying
During surface solvent vapo(u)r saturation degree.
In other embodiments of the present utility model, with reference to figure 5, except the side of the close hot plate 100 of cold drawing 200 is set
It is equipped with the first groove 220 and supports one end of the close cold drawing 200 of seal member 300 to be entrenched in the first groove 220, support is close
The one end for sealing the close hot plate 100 of part 300 can also be provided at surface of the substrate 400 away from hot plate 100.In this way, using above-mentioned
Assembly relation, can not only increase support seal member 300 and cold drawing 200 between sealing, can also be avoided by substrate 400
30~80 degrees Celsius of hot plate 100 may cause the influence of thermal deformation to support seal member 300.
According to embodiment of the present utility model, with reference to figure 7, the Minton dryer can also further comprise：Vacuum drying
Room 500 and vacuumizing part 600；Wherein, hot plate 100, cold drawing 200 and support seal member 300 are arranged on vacuum drying cabinet 500
It is interior；And vacuumizing part 600 is connected with vacuum drying cabinet 500, for providing condition of high vacuum degree environment to vacuum drying cabinet 500；Such as
This, can obtain the Minton dryer of perfect in shape and function.It should be noted that all " condition of high vacuum degree " specifically refer to vacuum herein
Degree is more than 1 × 10-3Pa。
In summary, according to embodiment of the present utility model, the utility model proposes a kind of Minton dryer, its
Increase support seal member between cold drawing and hot plate newly, saturated pressure chamber can be limited out, and be additionally provided with cold drawing multiple logical
Hole；When carrying out vacuumize process, the saturated air nip of the surface on hot plate can be made will not be joined directly together with high vacuum region,
It can then make that the volatilization of solvent in ink droplet is directionally controlled and rate of volatilization is evenly, more preferable so as to obtain pixel uniformity everywhere
Product, efficiently reduces the quantity of Dummy pixel needed for luminous area edge, and then realizes the narrow frame effect of OLED.
In description of the present utility model, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width
Degree ", " thickness ", " on ", " under ", "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom ", " interior ", " outer ",
The orientation or position relationship of the instruction such as " clockwise ", " counterclockwise ", " axial direction ", " radial direction ", " circumference " are based on shown in the drawings
Orientation or position relationship, it is for only for ease of description the utility model and simplifies description, rather than indicates or imply signified dress
Put or element there must be specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to the utility model
Limitation.
In description of the present utility model, unless otherwise clearly defined and limited, term " installation ", " connected ", " company
Connect ", the term such as " fixation " should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or integrally；
Can be mechanical connection or electrical connection；Can be joined directly together, can also be indirectly connected by intermediary, can be with
It is connection or the interaction relationship of two elements of two element internals.For the ordinary skill in the art, may be used
To understand concrete meaning of the above-mentioned term in the utility model as the case may be.
In addition, term " first ", " second " are only used for describing purpose, and it is not intended that instruction or hint relative importance
Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can be expressed or
Implicitly include at least one this feature.In description of the present utility model, " multiple " are meant that at least two, such as two
It is individual, three etc., unless otherwise specifically defined.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or the spy for combining the embodiment or example description
Point is contained at least one embodiment or example of the present utility model.In this manual, to the schematic table of above-mentioned term
State and be necessarily directed to identical embodiment or example.Moreover, specific features, structure, material or the feature of description can be with
Combined in an appropriate manner in any one or more embodiments or example.In addition, in the case of not conflicting, this area
Technical staff the different embodiments or example and the feature of different embodiments or example described in this specification can be entered
Row combines and combination.
Although embodiment of the present utility model has been shown and described above, it is to be understood that above-described embodiment is
Exemplary, it is impossible to it is interpreted as to limitation of the present utility model, one of ordinary skill in the art is in the scope of the utility model
It is interior above-described embodiment to be changed, changed, replaced and modification.
Claims (10)
- A kind of 1. Minton dryer for inkjet printing OLED luminous zones, it is characterised in that including：For placing and heating the hot plate of substrate；Cold drawing, the cold drawing are oppositely disposed with the hot plate, and multiple through holes are provided with the cold drawing；AndSupport seal member, it is described support seal member be arranged between the cold drawing and the hot plate, and with the cold drawing, institute State hot plate and limit out saturated pressure chamber.
- 2. the Minton dryer according to claim 1 for inkjet printing OLED luminous zones, it is characterised in that described Support seal member is formed by elastomeric material.
- 3. the Minton dryer according to claim 2 for inkjet printing OLED luminous zones, it is characterised in that described Elastomeric material is selected from organosilicon, polytetrafluoroethylene (PTFE) or polyether-ether-ketone.
- 4. the Minton dryer according to claim 1 for inkjet printing OLED luminous zones, it is characterised in that described The width for supporting seal member is 0.5~10mm.
- 5. the Minton dryer according to claim 1 for inkjet printing OLED luminous zones, it is characterised in that described The height for supporting seal member is 1~20mm.
- 6. the Minton dryer according to claim 1 for inkjet printing OLED luminous zones, it is characterised in that described The aperture of through hole is 0.1~5mm.
- 7. the Minton dryer according to claim 1 for inkjet printing OLED luminous zones, it is characterised in that described The side of the close hot plate of cold drawing is provided with the first groove, and one end of the close cold drawing of the support seal member It is entrenched in first groove.
- 8. the Minton dryer according to claim 1 for inkjet printing OLED luminous zones, it is characterised in that described The side of the close cold drawing of hot plate is provided with the second groove, and one end of the close hot plate of the support seal member It is entrenched in second groove.
- 9. the Minton dryer according to claim 7 for inkjet printing OLED luminous zones, it is characterised in that described One end of the close hot plate of seal member is supported, is arranged on surface of the substrate away from the hot plate.
- 10. the Minton dryer according to claim 1 for inkjet printing OLED luminous zones, it is characterised in that enter One step includes：Vacuum drying cabinet, it is indoor that the hot plate, the cold drawing and the support seal member are arranged on the vacuum drying；Vacuumizing part, the vacuumizing part are connected with the vacuum drying cabinet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720804287.2U CN206834210U (en) | 2017-07-04 | 2017-07-04 | Minton dryer for inkjet printing OLED luminous zones |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720804287.2U CN206834210U (en) | 2017-07-04 | 2017-07-04 | Minton dryer for inkjet printing OLED luminous zones |
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| Publication Number | Publication Date |
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| CN206834210U true CN206834210U (en) | 2018-01-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201720804287.2U Active CN206834210U (en) | 2017-07-04 | 2017-07-04 | Minton dryer for inkjet printing OLED luminous zones |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110632073A (en) * | 2019-09-25 | 2019-12-31 | 合肥京东方卓印科技有限公司 | Vacuum drying equipment and monitoring device |
| CN110867529A (en) * | 2019-10-22 | 2020-03-06 | 深圳市华星光电半导体显示技术有限公司 | Vacuum cooling drying apparatus and display functional layer drying method |
| CN111086330A (en) * | 2018-10-23 | 2020-05-01 | 广东聚华印刷显示技术有限公司 | Drying device and drying process |
| CN111129360A (en) * | 2019-12-25 | 2020-05-08 | Tcl华星光电技术有限公司 | Vacuum drying device and display substrate drying method |
| CN111169153A (en) * | 2020-03-06 | 2020-05-19 | 鄂尔多斯市源盛光电有限责任公司 | Printing equipment and frame sealing glue printing device |
| WO2020215512A1 (en) * | 2019-04-23 | 2020-10-29 | 深圳市华星光电半导体显示技术有限公司 | Vacuum drying device |
| CN117601417A (en) * | 2024-01-18 | 2024-02-27 | 杭州云栖交叉技术研究院 | Spray head spraying structure based on rotary printing platform |
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2017
- 2017-07-04 CN CN201720804287.2U patent/CN206834210U/en active Active
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111086330A (en) * | 2018-10-23 | 2020-05-01 | 广东聚华印刷显示技术有限公司 | Drying device and drying process |
| CN111086330B (en) * | 2018-10-23 | 2021-08-31 | 广东聚华印刷显示技术有限公司 | Drying device and drying process |
| WO2020215512A1 (en) * | 2019-04-23 | 2020-10-29 | 深圳市华星光电半导体显示技术有限公司 | Vacuum drying device |
| CN110632073A (en) * | 2019-09-25 | 2019-12-31 | 合肥京东方卓印科技有限公司 | Vacuum drying equipment and monitoring device |
| CN110867529A (en) * | 2019-10-22 | 2020-03-06 | 深圳市华星光电半导体显示技术有限公司 | Vacuum cooling drying apparatus and display functional layer drying method |
| CN111129360A (en) * | 2019-12-25 | 2020-05-08 | Tcl华星光电技术有限公司 | Vacuum drying device and display substrate drying method |
| CN111129360B (en) * | 2019-12-25 | 2023-02-07 | Tcl华星光电技术有限公司 | Vacuum drying device and display substrate drying method |
| CN111169153A (en) * | 2020-03-06 | 2020-05-19 | 鄂尔多斯市源盛光电有限责任公司 | Printing equipment and frame sealing glue printing device |
| CN117601417A (en) * | 2024-01-18 | 2024-02-27 | 杭州云栖交叉技术研究院 | Spray head spraying structure based on rotary printing platform |
| CN117601417B (en) * | 2024-01-18 | 2024-05-14 | 杭州云栖交叉技术研究院 | Spray head spraying structure based on rotary printing platform |
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