CN110843354A - Vacuum drying device - Google Patents
Vacuum drying device Download PDFInfo
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- CN110843354A CN110843354A CN201911002435.9A CN201911002435A CN110843354A CN 110843354 A CN110843354 A CN 110843354A CN 201911002435 A CN201911002435 A CN 201911002435A CN 110843354 A CN110843354 A CN 110843354A
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- chamber
- vacuum drying
- condensation
- solvent
- gas
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
Abstract
The invention discloses a vacuum drying device which comprises a cavity, an air inlet and at least one condensation recovery chamber, wherein the cavity is used for placing a substrate, the air inlet is arranged on one side of the cavity and used for introducing air into the cavity so as to take away a solvent volatilized by the substrate, and the at least one condensation recovery chamber is communicated with the cavity and used for receiving the air and recovering the solvent volatilized by the substrate. According to the invention, the air inlet and the condensation recovery chamber communicated with the cavity are arranged in the cavity of the vacuum drying device, so that the solvent volatilized in the cavity can be taken away and recovered in time, the solvent is effectively prevented from being condensed and dropping on the substrate, the substrate is prevented from being polluted, the maintenance and scrubbing processes are reduced, and the solvent can be recovered for reuse.
Description
Technical Field
The invention relates to the field of panel manufacturing processes, in particular to a vacuum drying device.
Background
At present, the development trend of the OLED is towards the direction of inkjet printing, but in the process of inkjet printing, there are processes of drying, baking, printing, etc. respectively, and the printed film layer has at least three layers (a hole injection layer, a transport layer and a light emitting layer), and after each printing, operations such as drying, baking, etc. are required.
At present, drying is mainly carried out in a vacuum mode, and in order to improve drying efficiency and form better film morphology, the drying is generally carried out in a mode that an upper cooling source and a lower cooling source are arranged.
Although the method can well help the film morphology, the amount of the solvent taken away in a vacuumizing mode is limited, the solvent cannot be completely pumped away, the solvent is often condensed at the upper end of a vacuum drying device, and the solvent drips on the surface of the substrate after long-term accumulation to pollute devices, so that the manufacturing process is influenced.
Disclosure of Invention
The invention provides a vacuum drying device which can timely recover a solvent volatilized in a cavity so as to solve the technical problem that in the prior art, the solvent is condensed in the cavity, so that liquid drops to a substrate and pollutes the substrate, and further the manufacturing process is influenced.
In order to solve the above problems, the technical scheme provided by the invention is as follows:
the present invention provides a vacuum drying apparatus, comprising:
a chamber for placing a substrate;
the gas inlet is arranged on one side of the chamber and used for introducing gas into the chamber so as to take away the solvent volatilized by the substrate;
at least one condensation recovery chamber in communication with the chamber for receiving the gas and recovering the solvent volatilized by the substrate.
According to a preferred embodiment of the present invention, the vacuum drying apparatus further comprises a circulation duct, and the at least one condensation recovery chamber is communicated with the gas inlet through the circulation duct to return the gas to the gas inlet.
According to a preferred embodiment of the present invention, a filter screen is disposed at a position where the circulation duct communicates with the at least one condensing and recovering chamber.
According to a preferred embodiment of the invention, the diameter of the holes of the sieve is between 0.2mm and 1 mm.
According to a preferred embodiment of the invention, the circulation duct is provided with heating means to heat the gas in the circulation duct.
According to a preferred embodiment of the present invention, the outlet of the chamber to the at least one condensation recovery chamber is located at the same level as the inlet and on opposite sides of the chamber.
According to a preferred embodiment of the present invention, valve means are provided at each of the at least one condensate recovery chamber in communication with the chamber.
According to a preferred embodiment of the present invention, each of the at least one condensing recovery chamber recovers a solvent.
According to a preferred embodiment of the invention, the temperature of the gas is 40 to 80 ℃.
According to a preferred embodiment of the present invention, the condensing manner of each of the at least one condensing recovery chamber includes at least one of cooling water condensation, dry cold air condensation, normal temperature condensation, and coolant condensation.
The invention has the beneficial effects that: according to the invention, the air inlet and the condensation recovery chamber communicated with the cavity are arranged in the cavity of the vacuum drying device, so that the solvent volatilized in the cavity can be taken away and recovered in time, the solvent is effectively prevented from being condensed and dropping on the substrate, the substrate is prevented from being polluted, the maintenance and scrubbing processes are reduced, and the solvent can be recovered for reuse.
Drawings
In order to illustrate the embodiments or the technical solutions in the prior art more clearly, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the invention, and it is obvious for a person skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a vacuum drying apparatus according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of another vacuum drying apparatus according to an embodiment of the present invention.
Detailed Description
The following description of the various embodiments refers to the accompanying drawings that illustrate specific embodiments in which the invention may be practiced. The directional terms mentioned in the present invention, such as [ upper ], [ lower ], [ front ], [ rear ], [ left ], [ right ], [ inner ], [ outer ], [ side ], are only referring to the directions of the attached drawings. Accordingly, the directional terms used are used for explanation and understanding of the present invention, and are not used for limiting the present invention. In the drawings, elements having similar structures are denoted by the same reference numerals.
The invention aims at the technical problems that the solvent is condensed and drips on the substrate to pollute the substrate and further influence the manufacturing process because the solvent volatilized in the cavity can not be eliminated in time in the conventional vacuum drying device, and the embodiment can solve the defect.
The embodiment of the invention provides a vacuum drying device, and the vacuum drying device comprises:
a chamber for placing a substrate;
the gas inlet is arranged on one side of the chamber and used for introducing gas into the chamber so as to take away the solvent volatilized by the substrate;
at least one condensation recovery chamber in communication with the chamber for receiving the gas and recovering the solvent volatilized by the substrate.
As shown in fig. 1, a schematic structural diagram of a vacuum drying apparatus according to an embodiment of the present invention includes a chamber 103, an air inlet 101, and a condensation recycling chamber 102.
The chamber 103 is used for placing a substrate 109, the gas inlet 101 is arranged on one side of the chamber 103, the condensation recovery chamber 102 is communicated with the chamber 103, the gas inlet 101 introduces gas into the chamber 103, and the solvent volatilized from the substrate 109 is brought into the condensation recovery chamber 102 for condensation recovery.
In the implementation and application process, because the amount of the solvent brought away by the vacuumizing mode is limited, the solvent cannot be thoroughly pumped away, the solvent is often condensed at the upper end of the vacuum drying device, and the solvent can drip on the surface of the substrate after long-term accumulation to pollute devices, so that the manufacturing process is influenced.
In addition, the vacuum drying device provided by the embodiment of the invention is also provided with a conventional air pump device to perform normal vacuum drying operation, and is not shown in the figure.
Specifically, as shown in fig. 1, a susceptor 108 is disposed in the chamber 103, and the susceptor 108 is used for placing the substrate 109.
Further, the vacuum drying apparatus further includes a circulation pipe 104, and the at least one condensation recovery chamber 102 is communicated with the gas inlet 101 through the circulation pipe 104.
Then after the gas brings the solvent into the condensation recovery chamber 102, the gas can be returned to the gas inlet 101 through the circulation pipeline 104, so as to achieve the purpose of recycling and saving resources.
Furthermore, a regulating device is arranged at the connection between the gas inlet 101 and the chamber 103, and comprises an adjustable valve, so that the flow rate of the gas introduced into the chamber 103 from the gas inlet 101 can be regulated according to actual requirements.
It should be noted that the gas introduced into the chamber 103 from the gas inlet 101 has a certain temperature, which is higher than room temperature, specifically, the temperature of the gas may be 40 to 80 ℃, so that the solvent volatilized from the substrate 109 is not easily condensed, and the gas is convenient to carry away the solvent volatilized from the substrate 109.
Further, a heating device 105 is provided in the circulation duct 104 to heat the gas in the circulation duct 105 so that the temperature of the gas returning to the gas inlet 101 becomes equal to or higher than room temperature.
A filter screen 107 is disposed at a position where the circulation pipeline 104 is communicated with the at least one condensation recovery chamber 102, so as to completely isolate dust, impurities or residual solvent molecules in the chamber 103, thereby ensuring purity of the gas and increasing drying efficiency of the vacuum drying device.
And the diameter of the meshes of the sieve 107 is 0.2mm to 1 mm.
The vacuum drying device comprises at least one condensation recovery chamber 102, i.e. the vacuum drying device comprises one or more condensation recovery chambers 102, wherein each condensation recovery chamber 102 is provided with a valve device 106 in communication with the chamber 103.
Wherein, a condensation recovery device 111 is arranged in each condensation recovery chamber 102, and the condensation mode of the condensation recovery device 111 comprises at least one of cooling water condensation, dry cold air condensation, normal temperature condensation and coolant condensation.
And the vacuum drying device comprises one or more condensing and recycling chambers 102, wherein each condensing and recycling chamber 102 correspondingly recycles one solvent.
Specifically, when the vacuum drying device includes a condensation recycling chamber 102, the vacuum drying device corresponds to a solvent, and the condensation recycling chamber 102 also corresponds to a solvent recycling.
When the vacuum drying apparatus includes a plurality of condensing and recycling chambers 102, the vacuum drying apparatus may correspond to a plurality of solvents, and the plurality of solvents and the plurality of condensing and recycling chambers 102 are arranged in a one-to-one correspondence manner, and when one of the solvents needs to be dried, the valve device 106 of the corresponding condensing and recycling chamber 102 is opened, and the valve devices 106 of the remaining condensing and recycling chambers 102 are in a closed state.
Furthermore, the outlet of the chamber 103 to the at least one condensation recovery chamber 102 is located at the same level as the gas inlet 101 and at two opposite sides of the chamber 103, i.e. the vacuum drying apparatus includes one or more condensation recovery chambers 102, wherein each condensation recovery chamber 102 is connected to the chamber 103, and the gas inlet 101 and the substrate 109 are located at the same level.
And each condensation recovery chamber 102 is communicated with the chamber 103, and is respectively positioned at two opposite sides of the chamber with the gas inlet 101.
Thereby, the drying effect of the vacuum drying device can be optimized.
In one embodiment of the present invention, as shown in fig. 1, the vacuum drying apparatus includes a chamber 103, an air inlet 101 disposed at one side of the chamber 103, a condensation recovery chamber 102 communicating with the chamber 103, and a circulation pipe 104 communicating the condensation recovery chamber 102 with the air inlet 101.
A carrying table 108 is disposed in the chamber 103, and the carrying table 108 is used for placing a substrate 109.
The connecting part of the gas inlet 101 and the chamber 103 is provided with an adjusting device 110 to adjust the flow rate of the gas introduced into the chamber 103 from the gas inlet 101.
A valve device 106 is arranged at the position where the condensation recovery chamber 102 is communicated with the chamber 103, so as to realize the controllable operation of the communication between the chamber 103 and the condensation recovery chamber 111.
A condensation recycling device 111 is disposed in the condensation recycling chamber 102 for recycling the solvent volatilized from the substrate 109.
A filter screen 107 is arranged between the condensation recovery chamber 102 and the circulating pipeline 104 to completely isolate dust, impurities or residual solvent molecules brought out from the gas, thereby improving the drying efficiency of the vacuum drying device.
The circulation duct 104 is provided with a heating device 105 to heat the gas in the circulation duct 104 and return to the gas inlet 101.
To sum up, the vacuum drying system that provides in this embodiment, when accomplishing the processing procedure, the external hot air supply of air inlet, let in the gas that has the uniform temperature in order to take away the solvent in the cavity fast in the cavity, and be provided with the condensation recovery room, keep the lower temperature in the condensation recovery room, the purpose is the gas that the hot-blast flows of collection, and cool off rapidly, the condensation collects the solvent, also can avoid the liquid drop phenomenon that the solvent can't be eliminated in the cavity and form simultaneously, and the gas that gets into in the condensation recovery room returns to the air inlet through the circulating line, obtain reuse, and heat to the uniform temperature through the heating device on the circulating line, improve vacuum drying device's drying effect.
In another embodiment of the present invention, as shown in fig. 2, the vacuum drying apparatus includes a chamber 103, an air inlet 101 disposed at one side of the chamber 103, two condensation recovery chambers 1021 and 1022 communicating with the chamber 103, and a circulation duct 104 communicating the condensation recovery chambers 1021 and 1022 with the air inlet 101.
A carrying table 108 is disposed in the chamber 103, and the carrying table 108 is used for placing a substrate 109.
The connecting part of the gas inlet 101 and the chamber 103 is provided with an adjusting device 110 to adjust the flow rate of the gas introduced into the chamber 103 from the gas inlet 101.
A valve device 1061 is disposed at a communication position between the condensation and recovery chamber 1021 and the chamber 103, so as to realize controllable operation of communication between the chamber 103 and the condensation and recovery chamber 1021.
A condensation recycling device 1111 is disposed in the condensation recycling chamber 1021 for recycling the solvent volatilized from the substrate 109.
A valve device 1062 is disposed at a position where the condensation recovery chamber 1022 communicates with the chamber 103, so as to realize controllable operation of communication between the chamber 103 and the condensation recovery chamber 1022.
A condensation recycling device 1112 is disposed in the condensation recycling chamber 1022 and is used for recycling the solvent volatilized from the substrate 109.
When the vacuum drying device is used for drying a first solvent, the corresponding condensation recovery chamber is 1021, the valve device 1061 is opened, and the valve device 1062 is closed, so that the first solvent can smoothly enter the condensation recovery chamber 1021, and then the condensation recovery device 1111 is used for condensation recovery of the first solvent.
When the vacuum drying device is used for drying the second solvent correspondingly, and the corresponding condensation recovery chamber is 1022, the valve device 1062 is opened, and the valve 1061 is closed, so that the second solvent can smoothly enter the condensation recovery chamber 1022, and then the second solvent is condensed and recovered by the condensation recovery device 1112.
A filter screen 1071 is arranged between the condensation recovery chamber 1021 and the circulating pipeline 104 to completely isolate dust, impurities or residual solvent molecules brought out of the gas, thereby improving the drying efficiency of the vacuum drying device.
A filter screen 1072 is disposed between the condensation recycling chamber 1022 and the circulation pipeline 104 to completely isolate dust, impurities or residual solvent molecules carried out from the gas, thereby improving the drying efficiency of the vacuum drying apparatus.
The circulation duct 104 is provided with a heating device 105 to heat the gas in the circulation duct 104 and return to the gas inlet 101.
To sum up, the vacuum drying system that provides in this embodiment, when accomplishing the processing procedure, the external hot air supply of air inlet, let in the gas that has the uniform temperature in order to take away the solvent in the cavity fast in the cavity, and be provided with the condensation recovery room, every condensation recovery room can correspond retrieves a solvent, keep the lower temperature in the condensation recovery room, the purpose is the gas that the hot-blast flows of collection, and cool off rapidly, the condensation collects the solvent, also can avoid the unable elimination of solvent in the cavity and the liquid drop phenomenon that forms simultaneously, and the gas that gets into in the condensation recovery room returns to the air inlet through the circulating line, obtain reuse, and heat to the uniform temperature through the heating device on the circulating line, improve vacuum drying device's drying effect.
The invention can take away and recover the solvent volatilized in the cavity in time by arranging the air inlet and the condensation recovery chamber, effectively prevents the solvent from condensing and dripping on the substrate, thereby preventing the substrate from being polluted, reducing the working procedures of maintenance and scrubbing, and recovering the solvent for reuse.
In summary, although the present invention has been described with reference to the preferred embodiments, the above-described preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, therefore, the scope of the present invention shall be determined by the appended claims.
Claims (10)
1. A vacuum drying apparatus, comprising:
a chamber for placing a substrate;
the gas inlet is arranged on one side of the chamber and used for introducing gas into the chamber so as to take away the solvent volatilized by the substrate;
at least one condensation recovery chamber in communication with the chamber for receiving the gas and recovering the solvent volatilized by the substrate.
2. The vacuum drying apparatus of claim 1, further comprising a circulation conduit, and wherein the at least one condensate recovery chamber is in communication with the gas inlet via the circulation conduit to return the gas to the gas inlet.
3. The vacuum drying apparatus according to claim 2, wherein a strainer is disposed at a position where the circulation duct communicates with the at least one condensation recovery chamber.
4. Vacuum drying apparatus according to claim 3, wherein the mesh of the sieve has a diameter of 0.2mm to 1 mm.
5. Vacuum drying apparatus according to claim 2, wherein the circulation duct is provided with heating means to heat the gas within the circulation duct.
6. The vacuum drying apparatus of claim 1, wherein the outlet of the chamber to the at least one condensate recovery chamber is at the same level as the inlet and is on opposite sides of the chamber.
7. The vacuum drying apparatus of claim 1, wherein each of said at least one condensate recovery chamber is provided with a valve arrangement in communication with said chamber.
8. The vacuum drying apparatus of claim 1, wherein each of the at least one condensing recovery chamber recovers a solvent.
9. The vacuum drying apparatus according to claim 1, wherein the temperature of the gas is 40 to 80 ℃.
10. The vacuum drying apparatus according to claim 1, wherein the condensing manner of each of the at least one condensing recovery chamber includes at least one of cooling water condensation, dry cool air condensation, normal temperature condensation, and coolant condensation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911002435.9A CN110843354A (en) | 2019-10-21 | 2019-10-21 | Vacuum drying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911002435.9A CN110843354A (en) | 2019-10-21 | 2019-10-21 | Vacuum drying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110843354A true CN110843354A (en) | 2020-02-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911002435.9A Pending CN110843354A (en) | 2019-10-21 | 2019-10-21 | Vacuum drying device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112838180A (en) * | 2021-01-07 | 2021-05-25 | 深圳市华星光电半导体显示技术有限公司 | Vacuum drying device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4901200B2 (en) * | 2005-11-30 | 2012-03-21 | 東京応化工業株式会社 | Solvent recovery system |
| CN203203343U (en) * | 2013-01-27 | 2013-09-18 | 河南中科干细胞基因工程有限公司 | Novel recyclable drying box |
| CN207815866U (en) * | 2018-01-31 | 2018-09-04 | 厦门竞高电镀有限公司 | A kind of plated item drying device |
| CN108692526A (en) * | 2018-05-22 | 2018-10-23 | 深圳市华星光电半导体显示技术有限公司 | Vacuum drying and solvent recovery unit |
| CN108955097A (en) * | 2017-11-28 | 2018-12-07 | 广东聚华印刷显示技术有限公司 | Minton dryer |
| CN110260609A (en) * | 2019-06-30 | 2019-09-20 | 南京市月华路小学 | A kind of industrial chemicals intelligent vacuum drying case |
-
2019
- 2019-10-21 CN CN201911002435.9A patent/CN110843354A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4901200B2 (en) * | 2005-11-30 | 2012-03-21 | 東京応化工業株式会社 | Solvent recovery system |
| CN203203343U (en) * | 2013-01-27 | 2013-09-18 | 河南中科干细胞基因工程有限公司 | Novel recyclable drying box |
| CN108955097A (en) * | 2017-11-28 | 2018-12-07 | 广东聚华印刷显示技术有限公司 | Minton dryer |
| CN207815866U (en) * | 2018-01-31 | 2018-09-04 | 厦门竞高电镀有限公司 | A kind of plated item drying device |
| CN108692526A (en) * | 2018-05-22 | 2018-10-23 | 深圳市华星光电半导体显示技术有限公司 | Vacuum drying and solvent recovery unit |
| CN110260609A (en) * | 2019-06-30 | 2019-09-20 | 南京市月华路小学 | A kind of industrial chemicals intelligent vacuum drying case |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112838180A (en) * | 2021-01-07 | 2021-05-25 | 深圳市华星光电半导体显示技术有限公司 | Vacuum drying device |
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| CB02 | Change of applicant information |
Address after: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant after: TCL Huaxing Photoelectric Technology Co.,Ltd. Address before: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant before: Shenzhen China Star Optoelectronics Technology Co.,Ltd. |
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Application publication date: 20200228 |
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