CN111516399A - Mask plate and manufacturing method thereof, composite mask plate and vacuum drying device - Google Patents
Mask plate and manufacturing method thereof, composite mask plate and vacuum drying device Download PDFInfo
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- CN111516399A CN111516399A CN202010353955.0A CN202010353955A CN111516399A CN 111516399 A CN111516399 A CN 111516399A CN 202010353955 A CN202010353955 A CN 202010353955A CN 111516399 A CN111516399 A CN 111516399A
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- mask
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0015—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
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Abstract
The invention provides a mask, which comprises a first surface and a second surface which are oppositely arranged, wherein the mask is provided with a plurality of through holes, each through hole penetrates through the first surface and the second surface, and the first surface and the second surface are coated with super-hydrophobic materials. The mask provided by the invention is applied to the vacuum drying device, and in the process of carrying out vacuum drying on the panel printed with ink by the vacuum drying device, the solvent droplets adhered to the top of the chamber of the vacuum drying device can be prevented from dripping to the panel, so that the condition that a film formed on the panel is not uniform is avoided, and the display effect of the display panel is improved. The invention also provides a manufacturing method of the mask, a composite mask with the mask and a vacuum drying device with the mask or the composite mask.
Description
Technical Field
The invention relates to the technical field of display, in particular to a mask and a manufacturing method thereof, a composite mask and a vacuum drying device.
Background
In the production process of the display panel, Ink containing organic functional materials is generally printed at a predetermined position on the panel by using an Ink Jet Print (IJP), and then the panel printed with the Ink is Vacuum-dried by using a Vacuum Dry (VCD) device to volatilize a solvent in the Ink, so that a thin film containing only a solute (i.e., organic functional materials) is formed on the panel.
In the process of vacuum drying, gas generated when a solvent is volatilized is easily converted into liquid drops to be adhered to the cavity wall of the vacuum drying device, and the liquid drops adhered to the cavity wall can drop onto the panel under a certain condition, so that the film formed on the panel is uneven, and the display effect of the display panel is further influenced.
Disclosure of Invention
Therefore, it is necessary to provide a mask plate applied to a vacuum drying device, a method for manufacturing the mask plate, a composite mask plate, and a vacuum drying device, so as to solve the problem that the display effect of a display panel is affected due to non-uniformity of a thin film formed on the panel in the process of performing vacuum drying on the panel printed with ink in the conventional vacuum drying device.
In a first aspect, an embodiment of the present invention provides a mask, where the mask includes a first surface and a second surface that are disposed opposite to each other, a plurality of through holes are formed in the mask, each through hole penetrates through the first surface and the second surface, and a superhydrophobic material is coated on the first surface and the second surface.
In some embodiments, the aperture of the through hole gradually increases along a direction from the first surface to the second surface.
In some embodiments, the aperture of the through hole at the first surface ranges from 50 μm to 200 μm, the acute angle between the side surface of the through hole and the second surface is less than 80 °, and the thickness of the mask ranges from 100 μm to 600 μm.
In some embodiments, the through holes are uniformly distributed on the mask.
In some embodiments, the through-hole is circular, oval or elongated.
In a second aspect, an embodiment of the present invention provides a method for manufacturing a mask, including:
providing a substrate comprising a first surface and a second surface arranged oppositely;
preparing a plurality of through holes on the substrate, wherein each through hole penetrates through the first surface and the second surface;
coating a superhydrophobic material on the first surface and the second surface.
In a third aspect, an embodiment of the present invention provides a composite mask, where the composite mask includes at least two stacked masks, each of the masks is the mask described in the first aspect, and in any two adjacent masks, a plurality of through holes on one mask are staggered with a plurality of through holes on another mask.
In some embodiments, the distance between any two adjacent layers of the reticle is greater than 1 mm.
In a fourth aspect, an embodiment of the present invention provides a vacuum drying apparatus, where the vacuum drying apparatus includes a chamber, a bearing platform is disposed at a bottom of the chamber, the bearing platform is used to bear a panel printed with ink, a plurality of layers of masks as described in the first aspect or composite masks as described in the third aspect are further disposed between a top of the chamber and the bearing platform, a first surface of the masks faces the top of the chamber, and a second surface of the masks faces the bearing platform.
In some embodiments, the vacuum drying apparatus further comprises a vacuum pump and a gas filling pump, the vacuum pump and the gas filling pump are arranged outside the chamber, the top of the chamber is provided with a gas port, the vacuum pump is used for pumping gas of the chamber through the gas port, and the gas filling pump is used for filling the chamber with gas through the gas port.
The mask provided by the invention is applied to a vacuum drying device, and the first surface of the mask is coated with the super-hydrophobic material, so that the first surface of the mask has better liquid bearing capacity, and when liquid drops adhered to the top of the cavity drop onto the first surface of the mask, the first surface of the mask can bear the dropped liquid drops and prevent the liquid drops from dropping onto the panel; because the second surface of the mask plate is coated with the super-hydrophobic material, liquid drops converted from gas generated when the solvent in the ink is volatilized are difficult to adhere to the second surface of the mask plate, and therefore the liquid drops are prevented from dropping to the panel from the second surface of the mask plate. Because the first surface of the mask can prevent the liquid drops adhered to the top of the cavity from dropping on the panel, and the liquid drops can not drop on the panel from the second surface of the mask, the uniformity of the thin film formed on the panel can be improved, and the display effect of the display panel is improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a side view of a reticle provided by an embodiment of the invention.
Fig. 2 is a schematic structural diagram of a first vacuum drying apparatus according to an embodiment of the present invention.
Fig. 3 is a top view of a reticle according to an embodiment of the present invention.
Fig. 4 is a side view of a composite reticle according to an embodiment of the present invention.
Fig. 5 is a schematic structural diagram of a second vacuum drying apparatus according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, an embodiment of the present invention provides a reticle 10, the reticle 10 includes a first surface 101 and a second surface 102 disposed opposite to each other, a plurality of through holes 103 are formed in the reticle 10, each through hole 103 penetrates through the first surface 101 and the second surface 102, and a superhydrophobic material (not shown in fig. 1) is coated on the first surface 101 and the second surface 102.
Specifically, the through hole 103 may be obtained by processing the mask 10 through an etching process, the superhydrophobic material refers to a material having water repellency, and the superhydrophobic material may be coated on the first surface 101 and the second surface 102 of the mask 10 through a fluorine (F) diffusion process.
The mask 10 is described in detail with reference to the application environment of the mask 10, and as shown in fig. 2, the mask 10 is applied to a vacuum drying apparatus. The vacuum drying device comprises a chamber 100, and a carrying platform 20 is arranged at the bottom of the chamber 100, and the carrying platform 20 is used for carrying a panel 30 printed with ink 40.
The ink 40 is printed on the panel 30 by using an inkjet printing method, and then the panel 30 printed with the ink 40 is placed on the supporting platform 20. The ink 40 contains a solute (organic functional material) and a solvent. The panel 30 printed with the ink 40 is vacuum-dried by a vacuum drying apparatus to volatilize the solvent in the ink 40, and a thin film containing only the solute (i.e., the organic functional material) is formed on the panel 30. It should be noted that in some cases, the ink 40 is printed on the entire surface of the panel 30, while in other cases, such as luminescent films, the ink 40 is printed on a portion of the discrete area of the panel 30. The ink 40 shown in fig. 2 is printed on the entire surface of the panel 30.
In the process of vacuum drying the panel 30 printed with the ink 40 by the vacuum drying device, the gas generated when the solvent in the ink 40 volatilizes is easily converted into liquid drops to adhere to the cavity wall of the vacuum drying device, particularly the top of the cavity 100, and the liquid drops adhering to the top of the cavity 100 can drop onto the panel 30 under certain conditions, so that the thin film formed on the panel 30 is not uniform, and the display effect of the display panel is affected.
To solve the above problem, several layers of reticles 10 are disposed between the top of the chamber 100 and the carrier platform 20. The number of layers of the reticle 10 shown in fig. 2 is 1. It should be noted that the reticle 10 is close to the top of the chamber 100, the first surface 101 of the reticle 10 faces the top of the chamber 100, and the second surface 102 of the reticle 10 faces the carrying platform 20.
It can be understood that, since the mask 10 is provided with the plurality of through holes 103 penetrating through the first surface 101 and the second surface 102, the evaporation of the solvent in the ink 40 is facilitated, and the film forming rate of the ink 40 on the panel 30 is increased. Since the first surface 101 of the reticle 10 is coated with the super-hydrophobic material, the first surface 101 of the reticle 10 has a good liquid carrying capacity, and when the liquid drops adhered to the top of the chamber 100 drop onto the first surface 101 of the reticle 10, the first surface 101 of the reticle 10 can carry the dropped liquid drops to prevent the liquid drops from dropping onto the panel 30. Since the second surface 102 of the reticle 10 is coated with the super-hydrophobic material, droplets converted from gas generated when the solvent in the ink 40 is volatilized are difficult to adhere to the second surface 102 of the reticle 10, thereby preventing the droplets from dripping from the second surface 102 of the reticle 10 onto the panel 30. Since the first surface 101 of the mask 10 can prevent the liquid drops adhered to the top of the chamber 100 from dropping onto the panel 30, and no liquid drops drop onto the panel 30 from the second surface 102 of the mask 10, the uniformity of the thin film formed on the panel 30 can be improved, thereby improving the display effect of the display panel.
Further, as shown in fig. 1, the aperture of the through hole 103 gradually increases along the direction from the first surface 101 to the second surface 102 of the reticle 10, and the aperture of the through hole 103 at the first surface 101 ranges from 50 μm to 200 μm.
It can be understood that, since the first surface 101 of the mask 10 is coated with the super-hydrophobic material, the wetting angle of the liquid drops carried thereon can be increased, and the aperture of the through hole 103 at the first surface 101 of the mask 10 is set to a range of 50-200 μm, so that the liquid drops carried on the first surface 101 of the mask 10 are difficult to drop onto the panel 30 through the through hole 103, thereby increasing the uniformity of the thin film formed on the panel 30 and improving the display effect of the display panel. Since the aperture of the through hole 103 at the second surface 102 of the mask 10 is larger than that at the first surface 101 of the mask 10, the solvent in the ink 40 is more rapidly volatilized during the vacuum drying of the panel 30 printed with the ink 40, thereby increasing the film forming rate of the ink 40 on the panel 30.
An acute angle (α shown in fig. 1) sandwiched between the side surface of the through hole 103 and the second surface 102 is less than 80 °.
It can be understood that, when the acute angle between the through hole 103 and the second surface 102 of the mask 10 is smaller, the difference between the aperture of the through hole 103 at the first surface 101 of the mask 10 and the aperture of the through hole 103 at the second surface 102 of the mask 10 is larger, and if the aperture of the through hole 103 at the first surface 101 of the mask 10 is a fixed value, the larger the aperture of the through hole 103 at the second surface 102 of the mask 10 is, which is more beneficial for the solvent in the ink 40 to volatilize more quickly, thereby increasing the film forming rate of the ink 40 on the panel 30.
The thickness of the mask 10 ranges from 100 μm to 600 μm, wherein the thickness of the mask 10 is the distance between the first surface 101 and the second surface 102 of the mask 10.
Further, as shown in fig. 3, a plurality of through holes 103 are uniformly arranged on the mask 10.
It can be understood that, since the plurality of through holes 103 are uniformly arranged on the mask 10, the solvent in the ink 40 can be promoted to be uniformly volatilized, so that the uniformity of the thin film formed on the panel 30 is improved, and the display effect of the display panel is improved.
Further, the through hole 103 is circular, oval or elongated. Wherein the through hole 103 shown in fig. 3 is circular.
The shape of the through hole 103 is matched with the shape of the ink 40 applied to the panel 30, thereby improving the uniformity of the thin film formed on the panel 30 and improving the display effect of the display panel.
The embodiment of the invention also provides a manufacturing method of the mask 10, and the manufacturing method of the mask 10 comprises the following steps:
firstly, providing a substrate, wherein the substrate comprises a first surface and a second surface which are oppositely arranged; then, preparing a plurality of through holes on the substrate, wherein each through hole penetrates through the first surface and the second surface; finally, a super-hydrophobic material is coated on the first surface and the second surface, so that the mask 10 shown in fig. 1 is obtained. The first surface of the substrate is the first surface 101 of the mask 10, the second surface of the substrate is the second surface 102 of the mask 10, and the through holes on the substrate are the through holes 103 on the mask 10.
Specifically, the through hole can be obtained by processing the substrate through an etching process, the super-hydrophobic material refers to a material having water repellency, and the super-hydrophobic material can be coated on the first surface and the second surface of the substrate through a fluorine (F) permeation process.
The mask 10 manufactured by the method can be applied to a vacuum drying device as shown in fig. 2, and the vacuum drying device and the application of the mask 10 to the vacuum drying device are described in detail in the above embodiments, so that detailed descriptions thereof are omitted.
Furthermore, the through holes gradually increase along the direction from the first surface to the second surface of the substrate, the aperture of the through holes at the first surface ranges from 50 μm to 200 μm, the acute angle between the side surface of the through holes and the second surface is less than 80 °, the thickness of the substrate ranges from 100 μm to 600 μm, the through holes are uniformly distributed on the substrate, and the through holes are circular, elliptical or elongated.
Since the through holes 103 (i.e., the through holes on the substrate) on the mask 10 and their functions have been described in detail in the above embodiments, they are not described in detail here.
As shown in fig. 4, an embodiment of the present invention further provides a composite mask 50, where the composite mask 50 includes at least two masks arranged in a stacked manner, each mask adopts the above-mentioned mask 10, and in any two adjacent masks 10, a plurality of through holes 103 on one mask 10 are staggered with a plurality of through holes 103 on the other mask 10.
It should be noted that, since the structure of the mask 10 has been described in detail in the above embodiments, it is not described herein again. The composite mask 50 is specifically described in conjunction with an application environment of the composite mask 50, and as shown in fig. 5, the composite mask 50 is applied to a vacuum drying apparatus. It should be noted that the composite reticles 50 are close to the top of the chamber 100, and the first surface 101 of each reticle 10 of the composite reticles 50 faces the top of the chamber 100, and the second surface 102 of each reticle 10 faces the carrying platform 20.
It can be understood that, the plurality of through holes 103 in one layer of any two adjacent layers of masks 10 of the composite mask 50 are staggered with the plurality of through holes 103 in the other layer, so that the liquid drops dropping from the previous layer of masks 10 are borne by the first surface 101 of the next layer of masks 10, and the liquid drops are prevented from dropping on the panel 30, thereby improving the uniformity of the film formed on the panel 30 and further improving the display effect of the display panel.
Further, the distance between any two adjacent layers of masks 10 is greater than 1 mm.
It can be understood that, because the diameter of the liquid drop carried on the superhydrophobic material is generally less than 1mm, when the distance between any two adjacent layers of masks 10 is greater than 1mm, the liquid drop between the two layers of masks 10 and the liquid drop between the top of the chamber 100 and the adjacent mask 10 can be prevented from being damaged, so as to ensure the effectiveness of the performance of the superhydrophobic material, and prevent the liquid drop from being damaged and dispersed into a plurality of liquid drops with smaller diameters and dropping from the through hole 103 to the panel 30, so that the uniformity of the thin film formed on the panel 30 can be improved, and further the display effect of the display panel is improved.
As shown in fig. 2 and fig. 5, an embodiment of the present invention further provides a vacuum drying apparatus, which includes a chamber 100, a carrying platform 20 is disposed at a bottom of the chamber 100, the carrying platform 20 is used for carrying a panel 30 printed with ink 40, and a plurality of layers of the above-mentioned masks 10 or the above-mentioned composite masks 50 are disposed between a top of the chamber 100 and the carrying platform 20. For example, in fig. 2, 1 layer of the above-mentioned mask 10 is disposed between the top of the chamber 100 and the stage 20, and in fig. 5, the above-mentioned composite mask 50 is disposed between the top of the chamber 100 and the stage 20.
It should be noted that, since the structures of the reticle 10 and the composite reticle 50 have been described in detail in the above embodiments, they are not described herein again. In the vacuum drying apparatus, the first surface 101 of each reticle 10 faces the top of the chamber 100, and the second surface 102 of each reticle 10 faces the carrying platform 20.
Since the above embodiments have described the vacuum drying apparatus with several layers of masks 10 or composite masks 50 in detail, the details are not repeated here.
Further, as shown in fig. 2 and 5, the vacuum drying apparatus further includes a vacuum pump (not shown in fig. 2 and 5) and a gas filling pump (not shown in fig. 2 and 5) which are provided outside the chamber 100, the top of the chamber 100 is provided with a gas outlet 60, the vacuum pump is used for pumping gas of the chamber 100 through the gas outlet 60, and the gas filling pump is used for filling the chamber 100 with gas through the gas outlet 60.
Specifically, the gas port 60 communicates the chamber 100 with the outside of the chamber 100, the vacuum pump is disposed outside the chamber 100 and communicates with the gas port 60, the vacuum pump is used for pumping the gas in the chamber 100 to reduce the pressure in the chamber 100 to a desired value, the gas filling pump is disposed outside the chamber 100 and communicates with the gas port 60, and the gas filling pump is used for filling the gas in the chamber 100 to increase the pressure in the chamber 100 to a desired value, such as a standard atmospheric pressure value. Wherein the gas is nitrogen or dry air.
In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. The utility model provides a mask, mask includes relative first surface and the second surface that sets up, its characterized in that, be equipped with a plurality of through-holes on the mask, each the through-hole runs through the first surface with the second surface, the first surface with the super hydrophobic material of coating on the second surface.
2. The reticle of claim 1, wherein the aperture of the through-hole gradually increases along a direction from the first surface to the second surface.
3. The mask of claim 2, wherein the aperture of the through hole at the first surface ranges from 50 μm to 200 μm, the acute angle between the side surface of the through hole and the second surface is less than 80 °, and the thickness of the mask ranges from 100 μm to 600 μm.
4. The reticle of claim 1, wherein the plurality of through holes are evenly arranged on the reticle.
5. The reticle of claim 1, wherein the through-holes are circular, oval, or elongated.
6. The manufacturing method of the mask is characterized by comprising the following steps of:
providing a substrate comprising a first surface and a second surface arranged oppositely;
preparing a plurality of through holes on the substrate, wherein each through hole penetrates through the first surface and the second surface;
coating a superhydrophobic material on the first surface and the second surface.
7. A composite mask, which comprises at least two masks arranged in a stacked manner, and is characterized in that the mask of claim 1 is adopted in each layer of the mask, and in any two adjacent layers of the masks, a plurality of through holes in one layer of the mask are staggered with a plurality of through holes in the other layer of the mask.
8. The composite reticle of claim 7, wherein the distance between any two adjacent reticles is greater than 1 mm.
9. A vacuum drying device, comprising a chamber, wherein a carrying platform is arranged at the bottom of the chamber, and the carrying platform is used for carrying a panel printed with ink, wherein a plurality of layers of masks according to any one of claims 1 to 5 or composite masks according to any one of claims 7 to 8 are arranged between the top of the chamber and the carrying platform, the first surface of the mask faces the top of the chamber, and the second surface of the mask faces the carrying platform.
10. The vacuum drying apparatus as claimed in claim 9, further comprising a vacuum pump and a gas filling pump provided outside the chamber, wherein a gas port is provided at a top of the chamber, the vacuum pump is used for pumping gas of the chamber through the gas port, and the gas filling pump is used for filling the chamber with gas through the gas port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010353955.0A CN111516399B (en) | 2020-04-29 | 2020-04-29 | Mask plate and manufacturing method thereof, composite mask plate and vacuum drying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010353955.0A CN111516399B (en) | 2020-04-29 | 2020-04-29 | Mask plate and manufacturing method thereof, composite mask plate and vacuum drying device |
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| Publication Number | Publication Date |
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| CN111516399A true CN111516399A (en) | 2020-08-11 |
| CN111516399B CN111516399B (en) | 2022-05-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010353955.0A Active CN111516399B (en) | 2020-04-29 | 2020-04-29 | Mask plate and manufacturing method thereof, composite mask plate and vacuum drying device |
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| CN210101013U (en) * | 2019-04-24 | 2020-02-21 | 深圳市凯银纸业有限公司 | Drying device for corrugated board printing machine |
| CN109200736B (en) * | 2017-06-30 | 2021-01-08 | 京东方科技集团股份有限公司 | Condensing plate, vacuum drying equipment and vacuum drying method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104859291B (en) * | 2015-04-13 | 2017-12-29 | 京东方科技集团股份有限公司 | A kind of drying device and its drying means |
| CN105091506A (en) * | 2015-08-31 | 2015-11-25 | 武汉华星光电技术有限公司 | Vacuum drying device |
| CN106016998A (en) * | 2016-07-07 | 2016-10-12 | 无锡市昂益达机械有限公司 | Box type drying device |
| CN109200736B (en) * | 2017-06-30 | 2021-01-08 | 京东方科技集团股份有限公司 | Condensing plate, vacuum drying equipment and vacuum drying method |
| CN207257129U (en) * | 2017-10-17 | 2018-04-20 | 广东聚华印刷显示技术有限公司 | Condensation structure and decompression dry device |
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| CN111516399B (en) | 2022-05-31 |
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