US11227904B2 - Method for manufacturing light-emitting layer, electroluminescent device and display device - Google Patents

Method for manufacturing light-emitting layer, electroluminescent device and display device Download PDF

Info

Publication number
US11227904B2
US11227904B2 US16/303,482 US201816303482A US11227904B2 US 11227904 B2 US11227904 B2 US 11227904B2 US 201816303482 A US201816303482 A US 201816303482A US 11227904 B2 US11227904 B2 US 11227904B2
Authority
US
United States
Prior art keywords
solution
barrier wall
wall structures
pixel regions
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active, expires
Application number
US16/303,482
Other versions
US20210225966A1 (en
Inventor
Qing Dai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd filed Critical BOE Technology Group Co Ltd
Assigned to BOE TECHNOLOGY GROUP CO., LTD. reassignment BOE TECHNOLOGY GROUP CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: DAI, QING
Publication of US20210225966A1 publication Critical patent/US20210225966A1/en
Application granted granted Critical
Publication of US11227904B2 publication Critical patent/US11227904B2/en
Active legal-status Critical Current
Adjusted expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/122Pixel-defining structures or layers, e.g. banks
    • H01L27/3246
    • H01L27/326
    • H01L51/56
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/121Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/12Deposition of organic active material using liquid deposition, e.g. spin coating
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/12Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10Substrates, e.g. flexible substrates
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present disclosure relates to a method for manufacturing a light-emitting layer, an electroluminescent device and a display device.
  • OLED display devices have the advantages of being thin and light, and having a low power consumption, a high contrast and a high color gamut as well as being capable of realizing flexible display, and thus are widely used in the display industry.
  • OLED display devices mainly rely on the OLEDs, which are electroluminescent elements, for image display.
  • Embodiments of the present disclosure provide a method for manufacturing a light-emitting layer, and the method includes: providing a base substrate formed with a pixel definition layer, so that the pixel definition layer includes a plurality of barrier wall structures, the plurality of barrier wall structures include a plurality of first barrier wall structures, the plurality of barrier wall structures define a plurality of pixel regions arranged in an array on the base substrate, the plurality of pixel regions include a plurality of pixel regions arranged along a first direction and a plurality of pixel regions arranged along a second direction, and a distance between any adjacent two of the pixel regions arranged along the first direction is greater than a distance between any adjacent two of the pixel regions arranged along the second direction; by a solution-applying process, forming a solution layer on the base substrate formed with the pixel definition layer, so that the solution layer includes a solution formed in the plurality of pixel regions and a solution formed on the plurality of first barrier wall structures, the plurality of first barrier wall structures are
  • the plurality of barrier wall structures further include a plurality of second barrier wall structures
  • the solution layer further includes a solution formed on the plurality of second barrier wall structures
  • the plurality of second barrier wall structures are between the pixel regions arranged along the second direction
  • the solution in the any one of the plurality of pixel regions does not blend with the solution on the plurality of second barrier wall structures defining the any one of the plurality of pixel regions
  • a volume of the solution on a single one of the plurality of second barrier wall structures is smaller than a volume of the solution on a single one of the plurality of first barrier wall structures.
  • the plurality of first barrier wall structures are formed with at least one first groove, and the solution on the plurality of first barrier wall structures is in the at least one first groove; before forming the solution layer on the base substrate formed with the pixel definition layer by the solution-applying process, the method further includes: forming the at least one first groove in the plurality of first barrier wall structures by performing a patterning process on the pixel definition layer.
  • a shape of the first groove on an opening side of the first groove is circular or tetragonal.
  • first grooves of the at least one first groove in the plurality of first barrier wall structures which are on a same side of any adjacent two of the plurality of pixel regions arranged along the second direction communicate with each other.
  • a second groove is formed between the first grooves being in two first barrier wall structures which are on the same side of any adjacent two of the plurality of pixel regions arranged along the second direction, any adjacent two of the first grooves communicate with each other through the second groove that is between the any adjacent two of the first grooves
  • forming the at least one first groove in the plurality of first barrier wall structures by performing the patterning process on the pixel definition layer includes: forming at least one first groove in the plurality of first barrier wall structures by performing the patterning process on the pixel definition layer; and forming the second groove between the first grooves being in the two first barrier wall structures which are on the same side of any adjacent two of the plurality of pixel regions arranged along the second direction, so that any adjacent two of the first grooves communicate with each other through the second groove that is between the any adjacent two of the first grooves.
  • a depth of the first groove is greater than or equal to a depth of the second groove, and an area of the first groove on the opening side of the first groove is greater than an area of the second groove on an opening side of the second groove.
  • the pixel regions, the first groove and the second groove are formed by a same patterning process.
  • the forming the solution layer on the base substrate formed with the pixel definition layer by the solution-applying process so that the solution layer includes the solution formed in the plurality of pixel regions and the solution formed on the plurality of first barrier wall structures includes: forming the solution in the plurality of pixel regions by a first solution-applying process; and forming the solution on the plurality of first barrier wall structures by a second solution-applying process to obtain the solution layer.
  • the first solution-applying process includes an inkjet printing process
  • the second solution-applying process includes any one of the inkjet printing process and a spray process.
  • a volume of the solution on any one of the first barrier wall structures ranges from 1 picoliter to 200 picoliters.
  • the volume of the solution on any one of the first barrier wall structures ranges from 10 picoliters to 100 picoliters.
  • the embodiments of the present disclosure further provide an electroluminescent device which includes the light-emitting layer manufactured by using the method described in any one of the above embodiments.
  • the embodiments of the present disclosure further provide a display device which includes the electroluminescent device described above.
  • FIG. 1 is a comparison chart of curves between a theoretical size and an actual size of a light-emitting structure
  • FIG. 2 is a flowchart of a method for manufacturing a light-emitting layer according to embodiments of the present disclosure
  • FIG. 3 is a schematic view of a base substrate formed with a pixel definition layer according to the embodiments of the present disclosure
  • FIG. 4 is a schematic view illustrating that a solution layer is formed on the base substrate formed with the pixel definition layer according to the embodiments of the present disclosure
  • FIG. 5 is another flowchart of the method for manufacturing the light-emitting layer according to the embodiments of the present disclosure
  • FIG. 6 is another schematic view illustrating that the solution layer is formed on the base substrate formed with the pixel definition layer according to the embodiments of the present disclosure
  • FIG. 7 is still another flowchart of the method for manufacturing the light-emitting layer according to the embodiments of the present disclosure.
  • FIG. 8 is a schematic view illustrating that a first groove is formed on a first barrier wall structure according to the embodiments of the present disclosure
  • FIG. 9 is another schematic view illustrating that the first groove is formed on the first barrier wall structure according to the embodiments of the present disclosure.
  • FIG. 10 is a schematic view illustrating that a solution is formed on the first barrier wall structure according to the embodiments of the present disclosure
  • FIG. 11 is still another flowchart of the method for manufacturing the light-emitting layer according to the embodiments of the present disclosure.
  • FIG. 12 is a schematic view illustrating that the first grooves communicates with each other through a second groove according to the embodiments of the disclosure.
  • the electroluminescent device generally includes a base substrate, and a thin film transistor (TFT for short) layer, an anode layer, a pixel definition layer (PDL for short), a light-emitting layer and a cathode layer which are sequentially disposed on the base substrate;
  • the TFT layer includes a plurality of TFTs;
  • the anode layer includes a plurality of anode structures;
  • the light-emitting layer includes a plurality of light-emitting structures; and the TFTs, the anode structures and the light-emitting structures correspond to each other in a one-to-one manner.
  • the pixel definition layer includes a plurality of barrier wall structures, the plurality of barrier wall structures define a plurality of pixel regions arranged in an array, the plurality of pixel regions include pixel regions arranged along a first direction and pixel regions arranged along a second direction, a distance between any adjacent two pixel regions among the pixel regions arranged along the first direction is not equal to a distance between any adjacent two pixel regions among the pixel regions arranged along the second direction, and each pixel region is provided with one light-emitting structure therein.
  • a wet film forming process is generally used to form the light-emitting layer.
  • a solution is filled in the pixel regions by a solution-applying process, and then a solvent in the pixel regions is removed by a depressurization drying process, so that a solute in the pixel regions forms the light-emitting structures, and thus the light-emitting layer is formed.
  • the distance between any adjacent two pixel regions among the pixel regions arranged along the first direction is not equal to the distance between any adjacent two pixel regions among the pixel regions arranged along the second direction
  • a micro-force that the solution in the pixel regions is subjected to in the first direction is different from another micro-force that the solution is subjected to in the second direction during the drying of the solution in the pixel regions, which results in the distribution of the solute in the first direction is different from the distribution of the solute in the second direction;
  • the light-emitting structures formed are also of the rectangular-like shape, so that the thickness uniformity of the light-emitting structure in a long-axis direction (a direction parallel to a long side of the light-emitting structure) and the thickness uniformity of the light-emitting structure in a short-axis direction (a direction parallel to a short side of the light-emitting structure) are difficult to achieve an optimum state simultaneously, and the
  • the electroluminescent device generally includes the base substrate, and the thin film transistor (TFT) layer, the anode layer, the pixel definition layer (PDL), the light-emitting layer and the cathode layer which are sequentially disposed on the base substrate.
  • the TFT layer includes the plurality of TFTs
  • the anode layer includes the plurality of anode structures
  • the light-emitting layer includes the plurality of light-emitting structures
  • the TFTs, the anode structures and the light-emitting structures correspond to each other in a one-to-one manner.
  • the pixel definition layer includes the plurality of barrier wall structures, the plurality of barrier wall structures define the plurality of pixel regions arranged in an array, the plurality of pixel regions includes the pixel regions arranged along the first direction and the pixel regions arranged along the second direction, the distance between any adjacent two pixel regions among the pixel regions arranged along the first direction is not equal to the distance between any adjacent two adjacent pixel regions among the pixel regions arranged in the second direction, and one light-emitting structure is disposed in each pixel region.
  • the light-emitting layer is generally formed by using the wet film forming process.
  • the solution is also called ink, and generally a mixture which includes a solute and a solvent and is used in the solution-applying process is referred to as the ink
  • the solution in the pixel regions is subjected to a drying process by using the depressurization drying process, so that the solvent in the solution is removed, and the solute is dried to form the light-emitting structures, thereby forming the light-emitting layer.
  • the shape of the light-emitting structure is generally rectangular-like, and the light-emitting structure includes the long-axis and the short-axis which are perpendicular to each other, for example; the dimension of the light-emitting structure along the long-axis direction is the length of the light-emitting structure, and the dimension of the light-emitting structure along the short-axis direction is the width of the light-emitting structure.
  • the depressurization drying process easily affects the solute distribution in the solution, resulting in poor uniformity of the formed light-emitting structure, and ultimately affecting the display effect and service life of the electroluminescent device.
  • the volume of the solution reduces as the solvent evaporates, but the interface position at which the solution initially contacts the PDL remains unchanged; therefore, the PDL produces a pinning effect which causes a climbing phenomenon at the edge of the formed light-emitting structure. For example, as shown in FIG.
  • the light-emitting structure has a theoretical width a 0 and a theoretical length b 0 ; and for the actually formed light-emitting structure, an actual width of a relatively flat region is a 1 , and an actual length of the relatively flat region is b 1 . It is desirable that the actual width a 1 of the relatively flat region of the light-emitting structure is equal to the theoretical width a 0 as much as possible and the actual length b 1 of the relatively flat region of the light-emitting structure is equal to the theoretical length b 0 as much as possible, that is, it is desirable that the film thicknesses of the light-emitting structures in respective regions are equal.
  • the light-emitting structure often has an appearance in the long-axis direction different from an appearance in the short-axis direction.
  • the surface of the light-emitting structure is convex (in the “W” shape), concave (in the “U” or “V” shape), in the “M” shape, or the like.
  • the ratio of the flat portion in the long-axis direction of the light-emitting structure and the ratio of the flat portion in the short-axis direction are not the same. That is, under the same decompression drying condition, the value of a 1 /a 0 differs greatly from the value of b 1 /b 0 . It is often possible to achieve a good flatness in the short-axis direction of the light-emitting structure under a certain decompression drying condition, but the flatness in the long-axis direction is often poor.
  • the main reason of causing this problem is that: during the depressurization drying process, the micro-force suffered by the solvent and/or solute in the long-axis direction of the pixel region is different from the micro-force suffered by the solvent and/or solute in the short-axis direction of the pixel region, causing the solute distribution to be nonuniform.
  • a solution is formed on the barrier wall structures which are between the pixel regions; during a drying process of a solution in the pixel regions, the presence of the solution on the barrier wall structures makes a micro-force in the first direction and another micro-force in the second direction that the solution in the pixel regions is subjected to tend to be the same, so that the distribution of the solute in the first direction and the distribution of the solute in the second direction tend to be the same, thus eliminating the phenomenon of poor thickness uniformity of the light-emitting structure caused by the nonuniform distribution of the solute, and finally improving the uniformity of the light-emitting layer.
  • the method for manufacturing the light-emitting layer provided by the embodiments of the present disclosure, please refer to the following descriptions.
  • FIG. 2 is a flowchart showing the method for manufacturing the light-emitting layer according to the embodiments of the present disclosure.
  • the method for manufacturing the light-emitting layer is used to manufacture the light-emitting layer in the electroluminescent device, for example. Referring to FIG. 2 , the method includes the following steps.
  • Step 201 providing a base substrate formed with a pixel definition layer, so that the pixel definition layer includes a plurality of barrier wall structures, the plurality of barrier wall structures define a plurality of pixel regions arranged in an array on the base substrate, the plurality of pixel regions include a plurality of pixel regions arranged along a first direction and a plurality of pixel regions arranged along a second direction, and a distance between any adjacent two of the pixel regions arranged along the first direction is greater than a distance between any adjacent two of the pixel regions arranged along the second direction.
  • FIG. 3 is a schematic view of the base substrate provided with the pixel definition layer 011 according to the embodiments of the present disclosure.
  • the pixel definition layer 011 includes the plurality of barrier wall structures (three first barrier wall structures 0111 adjacent to each other and two second barrier wall structures 0112 adjacent to each other are shown in FIG.
  • the plurality of barrier wall structures define the plurality of pixel regions P arranged in the array on the base substrate, the plurality of pixel regions P include the plurality of pixel regions P arranged along the first direction x and the plurality of pixel regions P arranged along the second direction y, and the distance x 1 between any adjacent two of the pixel regions P arranged along the first direction x is greater than the distance y 1 between any adjacent two of the pixel regions arranged along the second direction y. As shown in FIG.
  • the plurality of barrier wall structures include a plurality of first barrier wall structures 0111 and a plurality of second barrier wall structures 0112
  • the first barrier wall structures 0111 are ones of the plurality of barrier wall structures between the pixel regions P arranged along the first direction x
  • the second barrier wall structures 0112 are ones of the plurality of barrier wall structures between the pixel regions P arranged along the second direction y. Therefore, the distance x 1 between any adjacent two of the pixel regions P arranged along the first direction x is a width of the first barrier wall structure 0111
  • the distance y 1 between any adjacent two of the pixel regions P arranged along the second direction y is a width of the second barrier wall structure 0112 .
  • the base substrate is a transparent base substrate.
  • the base substrate is a base substrate formed of a light-transmitting and non-metallic material having a certain strength such as glass, quartz or a transparent resin.
  • the base substrate is a flexible base substrate formed of a material such as polyimide (abbreviation: PI).
  • PI polyimide
  • the pixel definition layer 011 is formed, for example, by a patterning process and using a hydrophobic transparent resin material.
  • a layer of hydrophobic transparent resin material is formed on the base substrate by coating, magnetron sputtering, thermal evaporation or plasma enhanced chemical vapor deposition (PECVD) or the like, to obtain a resin material layer; then the resin material layer is patterned by a patterning process to obtain the pixel definition layer 011 .
  • the patterning process for example includes photoresist coating, exposure, development, etching, and photoresist stripping.
  • Performing the patterning process on the resin material layer to obtain the pixel definition layer 011 includes: forming a photoresist layer by coating a layer of a photoresist with a certain thickness on the resin material layer; exposing the photoresist layer with a mask so that the photoresist layer forms a fully exposed region and a non-exposed region; then performing a developing process on the photoresist layer so that the photoresist in the fully exposed region is removed and the photoresist in the non-exposed region is retained; then etching a region of the resin material layer corresponding to the fully exposed region by using an etching process to form the pixel regions in the resin material layer; and finally stripping off the photoresist in the non-exposed region to obtain the pixel definition layer 011 as shown in FIG. 3 .
  • Step 202 by a solution-applying process, forming a solution layer on the base substrate formed with the pixel definition layer, so that the solution layer includes a solution formed in the plurality of pixel regions and a solution formed on the first barrier wall structures, and the solution in any one of the plurality of pixel regions does not blend with the solution on the first barrier wall structures defining the any one of the plurality of pixel regions.
  • the solution-applying process includes, but is not limited to, an inkjet printing process, a spin coating process, a screen printing process, or a transfer process, or the like.
  • FIG. 4 is a schematic view showing that the solution layer 012 is formed on the base substrate provided with the pixel definition layer 011 according to the embodiments of the present disclosure.
  • the solution layer 012 includes the solution 0021 formed in the plurality of pixel regions P and the solution 0122 formed on the first barrier wall structures 0111 , and the solution 0121 in any one of the plurality of pixel regions P does not blend with the solution 0122 on the first barrier wall structures 0111 defining the any one of the plurality of pixel regions P.
  • a volume of the solution on any one of the first barrier wall structures 0111 of the pixel definition layer 011 ranges from 1 picoliter to 200 picoliters.
  • the volume of the solution on any one of the first barrier wall structures 0111 of the pixel definition layer 011 ranges from 10 picoliters to 100 picoliters.
  • the material for forming the pixel definition layer 011 is the hydrophobic transparent resin material, which makes the solution have poor fluidity on the surface of the pixel definition layer 011 .
  • the solution 0121 in the pixel regions P is well defined in the pixel regions P
  • the solution 0122 on the first barrier wall structures 0111 is well defined on the first barrier wall structures 0111 , so that the solution 0121 in the pixel regions P is spaced from the solution 0122 on the first barrier wall structures 0111 .
  • the solution 0122 on the first barrier wall structures 0111 is in a hemispherical shape on the first barrier wall structures 0111 , for example.
  • the solution layer 012 is formed by one solution-applying process or is formed by two solution-applying processes.
  • the solution in the pixel regions P and the solution on the first barrier wall structures 0111 are simultaneously formed by the one solution-applying process, for example; in a situation where the solution layer 012 is formed by the two solution-applying processes, first the solution 0121 in the plurality of pixel regions P is formed by a first solution-applying process, and then the solution 0122 on the first barrier wall structures 0111 is formed by a second solution-applying process, to obtain the solution layer 012 .
  • firstly the solution 0122 on the first barrier wall structures 0111 is formed by the second solution-applying process, and then the solution 0121 in the plurality of pixel regions P is formed by the first solution-applying process, which is not limited in the embodiments of the present disclosure.
  • the first solution-applying process and the second solution-applying process are the same or different.
  • the first solution-applying process includes the inkjet printing process
  • the second solution-applying process includes any one of the inkjet printing process and a spray process.
  • the solution in the pixel regions P and the solution on the first barrier wall structures 0111 are formed by the one solution-applying process or by the two solution-applying processes, the solution in the pixel regions P and the solution on the first barrier wall structures 0111 are the same solution, for example.
  • Step 203 drying the solution layer so that the solution in each of the plurality of pixel regions forms a light-emitting structure to obtain the light-emitting layer.
  • the solution layer is dried by using the depressurization drying process.
  • the solvent in the pixel regions volatilizes, and the solute dries to form the light-emitting structure, thereby obtaining the light-emitting layer.
  • the process of drying the solution layer by using the depressurization drying process includes: placing the base substrate formed with the solution layer in a closed cavity, and then drawing off gas in the closed cavity so that a gas pressure in the closed cavity is reduced to dry the solution layer. It should be noted that during drying the solution layer by the depressurization drying process, the solvent on the first barrier wall structures 0111 also volatilizes, and the solute on the first barrier wall structures 0111 dries and remains on the first barrier wall structures 0111 .
  • the presence of the barrier wall structures does not affect the display, so the solute remaining on the first barrier wall structures 0111 does not affect the display.
  • the specific process of the depressurization drying process provided by the embodiments of the present disclosure is merely exemplary, the implementation process of the depressurization drying process may refer to related technologies, and repeated descriptions are omitted in the embodiments of the present disclosure.
  • the amount of the solution on the first barrier wall structure 0111 is adjusted according to actual conditions, so that the solvent in the pixel region volatilizes relatively evenly in both the long-axis direction and the short-axis direction.
  • the volatilization in the long-axis direction and the volatilization in the short-axis direction are relatively even, so that the solute is relatively uniformly distributed in the long-axis direction and the short-axis direction, and the thickness uniformity of the formed light-emitting structure is ensured.
  • the method for manufacturing the light-emitting layer provided by the embodiments of the disclosure has a simple process and optimizes the performance of the light-emitting layer.
  • the solution on the first barrier wall structures ensures that the micro-force in the first direction and another micro-force in the second direction that the solution in the pixel regions is subjected to tend to be the same in the process of drying the solution layer, so that the distribution of the solute in the first direction and the distribution of the solute in the second direction tend to be the same, thus eliminating the phenomenon of poor thickness uniformity of the light-emitting structure caused by the nonuniform distribution of the solute, and finally improving the uniformity of the light-emitting layer.
  • FIG. 5 is another flowchart of the method for manufacturing the light-emitting layer according to the embodiments of the present disclosure, and the method for manufacturing the light-emitting layer for example is used to manufacture the light-emitting layer in the electroluminescent device.
  • the method includes the following steps.
  • Step 501 providing the base substrate formed with the pixel definition layer, so that the pixel definition layer includes the plurality of barrier wall structures, the plurality of barrier wall structures define the plurality of pixel regions arranged in the array on the base substrate, the plurality of pixel regions includes the plurality of pixel regions arranged along the first direction and the plurality of pixel regions arranged along the second direction, and the distance between any adjacent two of the pixel regions arranged along the first direction is greater than the distance between any adjacent two of the pixel regions arranged along the second direction.
  • step 501 for example, reference may be made to the step 201 in the embodiments shown in FIG. 2 , which is not described herein again.
  • Step 502 forming the solution layer on the base substrate formed with the pixel definition layer by the solution-applying process, so that the solution layer includes the solution formed in the plurality of pixel regions, the solution formed on the first barrier wall structures and a solution formed on second barrier wall structures, the solution in any one of the plurality of pixel regions does not blend with the solution on the first barrier wall structures defining the any one of the plurality of pixel regions, and does not blend with the solution on the second barrier wall structures defining the any one of the plurality of pixel regions, and a volume of the solution on the second barrier wall structures is smaller than the volume of the solution on the first barrier wall structures.
  • the solution-applying process includes, but is not limited to, the inkjet printing process, the spin coating process, the screen printing process, or the transfer process, or the like.
  • FIG. 6 is another schematic view illustrating that the solution layer 012 is formed on the base substrate provided with the pixel definition layer 011 according to the embodiments of the present disclosure.
  • the solution layer 012 includes the solution 0121 formed in the plurality of pixel regions P 1 , the solution 0122 formed on the first barrier wall structures 0111 and the solution 0123 formed on the second barrier wall structures 0112 .
  • the solution 0121 in any one of the plurality of pixel regions P does not blend with the solution 0122 on the first barrier wall structures 0111 defining the any one of the plurality of pixel regions P; and the solution 0121 in any one of the plurality of pixel regions P does not blend with the solution 0123 on the second barrier wall structures 0112 defining the any one of the plurality of pixel regions P.
  • the material for forming the pixel definition layer 011 is the hydrophobic transparent resin material, which makes the solution have the poor fluidity on the surface of the pixel definition layer 011 .
  • the solution 0121 in the pixel regions P is well defined in the pixel regions P
  • the solution 0122 on the first barrier wall structures 0111 is well defined on the first barrier wall structures 0111
  • the solution 0123 on the second barrier wall structures 01121 is well defined on the second barrier wall structures 0112 .
  • the solution 0122 on the first barrier wall structures 0111 is in the hemispherical shape on the first barrier wall structures 0111 , for example;
  • the solution 0123 on the second barrier wall structures 0112 is in the hemispherical shape on the second barrier wall structures 0112 , for example.
  • the solution layer 012 is formed by the one solution-applying process, or is formed by the two solution-applying processes, or is formed by three solution-applying processes, for example.
  • the solution in the pixel regions P, the solution on the first barrier wall structures 0111 and the solution on the second barrier wall structures 0112 are simultaneously formed by the one solution-applying process;
  • the solution layer 012 is formed by the two solution-applying processes for example, firstly the solution 0121 is formed in the plurality of pixel regions P by the first solution-applying process, and then the solution 0122 on the first barrier wall structures 0111 and the solution 0123 on the second barrier wall structures 0112 are formed by the second solution-applying process, to obtain the solution layer 012 ;
  • the solution layer 012 is formed by the three solution-applying processes, for example, firstly the solution 0121 is formed in the plurality of
  • the process of forming the solution 0121 in the pixel regions P, the process of forming the solution 0122 on the first barrier wall structures 0111 and the process of forming the solution 0123 on the second barrier wall structures 0112 are not limited, and the embodiments of the present disclosure do not limit the forming order of the solution 0121 , the solution 0122 and the solution 0123 .
  • the solution in the pixel regions P, the solution on the first barrier wall structures 0111 and the solution on the second barrier wall structures 0112 are formed by the one solution-applying process or by the two solution-applying processes or by the three solution-applying processes, the solution in the pixel regions P, the solution on the first barrier wall structures 0111 and the solution on the second barrier wall structures 0112 are the same solution, for example.
  • Step 503 drying the solution layer so that the solution in each of the plurality of pixel regions forms the light-emitting structure to obtain the light-emitting layer.
  • step 503 for example, reference may be made to the step 203 in the embodiments shown in FIG. 2 , which is not described herein again.
  • the solvent on the second barrier wall structures 0112 volatilizes, and the solute on the second barrier wall structures 0112 dries and remains on the second barrier wall structures 0112 .
  • the presence of the barrier wall structures does not affect the display, so the solute on the second barrier wall structures 0112 does not affect the display.
  • the amount of the solution on the first barrier wall structure 0111 and the amount of the solution on the second barrier wall structure 0112 are adjusted according to actual conditions, so that the solvent in the pixel region volatilizes relatively evenly in both the long-axis direction and the short-axis direction.
  • the volatilization in the long-axis direction and the volatilization in the short-axis direction are relatively even, so that the solute is relatively uniformly distributed in the long-axis direction and the short-axis direction, and the thickness uniformity of the formed light-emitting structure is ensured.
  • the method for manufacturing the light-emitting layer provided by the embodiments of the disclosure has the simple process and optimizes the performance of the light-emitting layer.
  • the solution on the first barrier wall structures ensures that the micro-force in the first direction and another micro-force in the second direction that the solution in the pixel regions is subjected to tend to be the same in the process of drying the solution layer, so that the distribution of the solute in the first direction and the distribution of the solute in the second direction tend to be the same, thus eliminating the phenomenon of poor thickness uniformity of the light-emitting structure caused by the nonuniform distribution of the solute, and finally facilitating the improvement of the uniformity of the light-emitting layer.
  • FIG. 7 is another flowchart of the method for manufacturing the light-emitting layer according to the embodiments of the disclosure.
  • the method for manufacturing the light-emitting layer is used to manufacture the light-emitting layer in the electroluminescent device, for example. Referring to FIG. 7 , the method includes the following steps.
  • Step 701 providing the base substrate formed with the pixel definition layer, so that the pixel definition layer includes the plurality of barrier wall structures, the plurality of barrier wall structures define the plurality of pixel regions arranged in the array on the base substrate, the plurality of pixel regions include the plurality of pixel regions arranged along the first direction and the plurality of pixel regions arranged along the second direction, and the distance between any adjacent two of the pixel regions arranged along the first direction is greater than the distance between any adjacent two of the pixel regions arranged along the second direction.
  • step 701 for example, reference may be made to the step 201 in the embodiments shown in FIG. 2 , which is not described herein again.
  • Step 702 performing a patterning process on the pixel definition layer so that a first groove is formed in the first barrier wall structures.
  • FIG. 8 and FIG. 9 are schematic views showing two forms of the first groove G 1 formed in the first barrier wall structures (not labelled in FIG. 8 and FIG. 9 ) according to the embodiments of the present disclosure.
  • a shape of the first groove G 1 on an opening side of the first groove G 1 is circular; or, referring to FIG. 9 , the shape of the first groove G 1 on the opening side of the first groove G 1 is tetragonal. As shown in FIG.
  • the patterning process is performed on the pixel definition layer 011 so that the first groove G 1 is formed in the first barrier wall structures 0111 . There is a certain distance between the first groove G 1 and the pixel regions P, to avoid that the solution in the first groove G 1 blends with the solution in the pixel regions P after forming the solution layer in subsequent steps.
  • the patterning process includes photoresist coating, exposure, development, etching and photoresist stripping.
  • performing the patterning process on the pixel definition layer 011 so that the first groove G 1 is formed in the first barrier wall structures 0111 includes: coating a layer of photoresist having a certain thickness on the barrier wall structures of the pixel definition layer 011 ; exposing the photoresist layer by using a mask so that the photoresist layer forms a fully exposed region and a non-exposed region; then performing a developing process on the photoresist layer so that the photoresist in the fully exposed region is removed and the photoresist in the non-exposed region is retained; then etching a region of the pixel definition layer 011 (that is, a region of the first barrier wall structures 0111 ) corresponding to the fully exposed region by using an etching process, so that the first groove G 1 is formed in the pixel definition layer 011 ; and finally the photoresist in the non-exposed region is stripped off to obtain a structure as shown in FIG.
  • the region in which the first groove G 1 is formed is etched by a half etching process to avoid that the pixel definition layer 011 is etched through, thereby preventing the transistor circuit under the pixel definition layer 011 from being exposed.
  • the first groove G 1 and the pixel regions P are formed by the same patterning process.
  • the layer of hydrophobic transparent resin material is deposited on the base substrate by coating, magnetron sputtering, thermal evaporation or PECVD or the like to obtain the resin material layer; then the resin material layer is patterned by the patterning process to obtain the pixel definition layer 011 , so that the pixel definition layer 011 includes the plurality of pixel regions P arranged in the array and the first groove G 1 formed in the first barrier wall structures 0111 .
  • Step 703 by the solution-applying process, forming the solution layer on the base substrate formed with the pixel definition layer, so that the solution layer includes the solution formed in the plurality of pixel regions and the solution formed in the first groove.
  • step 703 for example, reference may be made to the step 202 in the embodiments shown in FIG. 2 , which is not described herein again.
  • a nozzle coating device 02 is used to coat the solution in the first groove G 1 along a length direction of the first groove G 1 , so that the solution in the first groove G 1 is formed; and then the solution in the pixel regions P is filled by the solution-applying process (for example, the inkjet printing process), to form the solution layer on the base substrate formed with the pixel definition layer.
  • the solution-applying process for example, the inkjet printing process
  • the first groove G 1 is formed in the first barrier wall structures, and the first groove G 1 defines the solution at a fixed position of the first barrier wall structures, so as to prevent the solution from flowing on the first barrier wall structures.
  • Step 704 drying the solution layer so that the solution in each of the plurality of pixel regions forms the light-emitting structure, to obtain the light-emitting layer.
  • step 704 for example, reference may be made to the step 503 in the embodiments shown in FIG. 5 , which is not described herein again.
  • the solvent in the first groove G 1 also volatilizes, and the solute in the first groove G 1 also dries and remains in the first groove G 1 ; because the first groove G 1 is in the first barrier wall structures 0111 , and for the electroluminescent device, the presence of the barrier wall structures does not affect the display, so the solute in the first groove G 1 does not affect the display.
  • the embodiments of the present disclosure are described by taking the groove being formed in the first barrier wall structures as an example.
  • the groove is further formed in the second barrier wall structures to facilitate forming the solution on the second barrier wall structures, which is not described herein again.
  • the solution on the first barrier wall structures ensures that the micro-force in the first direction and another micro-force in the second direction that the solution in the pixel regions is subjected to tend to be the same in the process of drying the solution layer, so that the distribution of the solute in the first direction and the distribution of the solute in the second direction tend to be the same, thus eliminating the phenomenon of poor thickness uniformity of the light-emitting structure caused by the nonuniform distribution of the solute, and facilitating the improvement of the uniformity of the light-emitting layer.
  • FIG. 11 is still another flowchart of the method for manufacturing the light-emitting layer according to the embodiments of the present disclosure.
  • the method for manufacturing the light-emitting layer is used to manufacture the light-emitting layer in the electroluminescent device, for example. Referring to FIG. 11 , the method includes the following steps.
  • Step 1101 providing the base substrate formed with the pixel definition layer, so that the pixel definition layer includes the plurality of barrier wall structures, the plurality of barrier wall structures define the plurality of pixel regions arranged in the array on the base substrate, the plurality of pixel regions include the plurality of pixel regions arranged along the first direction and the plurality of pixel regions arranged along the second direction, and the distance between any adjacent two of the pixel regions arranged along the first direction is greater than the distance between any adjacent two of the pixel regions arranged along the second direction.
  • Step 1102 performing the patterning process on the pixel definition layer so that the first groove is formed in the first barrier wall structures.
  • step 1101 and the step 1102 for example, reference may be made to the step 701 and the step 702 in the embodiments shown in FIG. 7 , which is not described herein again.
  • Step 1103 performing the patterning process on the pixel definition layer, so that a second groove is formed between first grooves being in two first barrier wall structures which are on the same side of any adjacent two of the plurality of pixel regions arranged along the second direction, and the first grooves being in the two first barrier wall structures which are on the same side of the any adjacent two of the plurality of pixel regions arranged along the second direction communicate with each other by the second groove.
  • FIG. 12 is a schematic view illustrating that the first grooves communicate with each other through the second groove according to the embodiments of the disclosure.
  • the shape of the first groove G 1 on the opening side of the first groove G 1 is circular
  • the second groove G 2 is formed between the first grooves G 1 being in the two first barrier wall structures (not labelled in FIG. 12 ) which are on the same side of any adjacent two of the plurality of pixel regions P arranged along the second direction y
  • the first grooves G 1 being in the two first barrier wall structures which are on the same side of any adjacent two of the plurality of pixel regions arranged along the second direction communicate with each other by the second groove G 2 .
  • a depth of the first groove G 1 is greater than or equal to a depth of the second groove G 2 , and an area of the first groove G 1 on the opening side of the first groove G 1 is greater than an area of the second groove G 2 on the opening side of the second groove G 2 , in this way, it is ensured that after the solution layer is formed, the amount of the solution in the first groove G 1 is greater than the amount of the solution in the second groove G 2 , and thus the solution in the grooves remains more in the first groove that just faces the pixel regions, so as to adjust the uniformity of the finally-formed light-emitting structure better.
  • the pixel definition layer 011 is patterned by the patterning process, so that the second groove G 2 is formed between the first grooves G 1 being in the two first barrier wall structures which are on the same side of any adjacent two of the plurality of pixel regions P arranged along the second direction y.
  • the process of performing the patterning process on the pixel definition layer 011 for example, reference is made to step 702 in the embodiments shown in FIG. 7 , which is not described herein again.
  • the first groove G 1 , the second groove G 2 and the pixel regions P are formed by the same patterning process.
  • the layer of hydrophobic transparent resin material is formed on the base substrate by coating, magnetron sputtering, thermal evaporation or PECVD or the like to obtain the resin material layer, and then the patterning process is performed on the resin material layer to obtain the pixel definition layer 011 , so that the pixel definition layer 011 includes the plurality of pixel regions P arranged in the array, the first groove G 1 is formed in the first barrier wall structures 0111 , and the second groove G 2 is formed between the first grooves G 1 being in the two first barrier wall structures which are on the same side of any adjacent two of the plurality of pixel regions P arranged along the second direction y.
  • Step 1104 by the solution-applying process, forming the solution layer on the base substrate formed with the pixel definition layer, so that the solution layer includes the solution formed in the plurality of pixel regions, the solution formed in the first groove and a solution formed in the second groove.
  • step 1104 for example, reference may be made to the step 202 in the embodiments shown in FIG. 2 , which is not described herein again.
  • a solution is coated in the first groove G 1 and the second groove G 2 by using the nozzle coating device, so that the solution in the first groove G 1 and the solution in the second groove G 2 are formed; and then the solution in the pixel regions P is filled by the solution-applying process (for example, the inkjet printing process) to form the solution layer on the base substrate formed with the pixel definition layer.
  • the solution-applying process for example, the inkjet printing process
  • Step 1105 drying the solution layer so that the solution in each of the plurality of pixel regions forms the light-emitting structure to obtain the light-emitting layer.
  • the solvent in the first groove G 1 and the second groove G 2 also volatilizes, and the solute in the first groove G 1 and the second groove G 2 also dries and remains in the first groove G 1 and the second groove G 2 .
  • the first groove G 1 and the second groove G 2 are both in the barrier wall structures, the presence of the barrier wall structures does not affect the display, and thus the solute in the first groove G 1 and the solute in the second groove G 2 do not affect the display.
  • the embodiments of the present disclosure are described by taking the grooves being in the first barrier wall structures as an example.
  • the grooves are formed in the second barrier wall structures; and for example, the grooves formed in the second barrier wall structures communicate with each other to facilitate forming of the solution on the second barrier wall structures. Repeated descriptions are omitted in the embodiments of the present application.
  • the solution on the first barrier wall structures ensures that the micro-force in the first direction and another micro-force in the second direction that the solution in the pixel regions is subjected to tend to be the same in the process of drying the solution layer, so that the distribution of the solute in the first direction and the distribution of the solute in the second direction tend to be the same, thus eliminating the phenomenon of poor thickness uniformity of the light-emitting structure caused by the nonuniform distribution of the solute, and facilitating the improvement of the uniformity of the light-emitting layer.
  • the embodiments of the present disclosure also provide the electroluminescent device which includes the light-emitting layer manufactured by the method shown in any one of FIGS. 2, 5, 7 and 11 .
  • the electroluminescent device further includes the TFT layer, the anode layer, the PDL and the cathode layer, and the TFT layer, the anode layer and the PDL are sequentially stacked; the TFT layer, the anode layer and the PDL are between the light-emitting layer and the base substrates, and the cathode layer is on the light-emitting layer; the TFT layer includes the plurality of TFTs, the anode layer includes the plurality of anode structures; and the TFTs, the anode structures and the light-emitting structures of the light-emitting layer correspond to each other in the one-to-one manner.
  • the structure of the electroluminescent device for example, refer to the related art.
  • the light-emitting layer of the electroluminescent device provided by the embodiments of the disclosure has good uniformity, and thus the electroluminescent device has better display effect and long service life.
  • the embodiments of the present disclosure further provide a display device including the above electroluminescent device.
  • the display device for example is any product or component having a display function such as an OLED display panel, a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, or a navigator.
  • a and/or B may indicate three cases that A exists independently, A and B exist simultaneously, and B exists independently.
  • the character “I” in the present disclosure generally indicates that the fore-and-aft associated objects have an “or” relationship.

Abstract

A method for manufacturing a light-emitting layer, an electroluminescent device and a display device are provided, and the method includes: providing a base substrate formed with a pixel definition layer, so that a plurality of barrier wall structures of the pixel definition layer define a plurality of pixel regions that include pixel regions arranged along a first direction and pixel regions arranged along a second direction; forming a solution layer on the base substrate formed with the pixel definition layer, so that the solution layer includes a solution formed in the plurality of pixel regions and a solution formed on first barrier wall structures and the solution in the pixel regions does not blend with the solution on the first barrier wall structures; performing a drying process on the solution layer so that the solution in each pixel region forms a light-emitting structure to obtain a light-emitting layer.

Description

CROSS REFERENCE TO RELATED APPLICATIONS
This application is the National Stage of PCT/CN2018/082521 filed on Apr. 10, 2018, which claims priority under 35 U.S.C. § 119 of Chinese Application No. 201710758714.2 filed on Aug. 29, 2017, the disclosure of which is incorporated by reference.
TECHNICAL FIELD
The present disclosure relates to a method for manufacturing a light-emitting layer, an electroluminescent device and a display device.
BACKGROUND
Organic light-emitting diode (OLED) display devices have the advantages of being thin and light, and having a low power consumption, a high contrast and a high color gamut as well as being capable of realizing flexible display, and thus are widely used in the display industry. OLED display devices mainly rely on the OLEDs, which are electroluminescent elements, for image display.
SUMMARY
Embodiments of the present disclosure provide a method for manufacturing a light-emitting layer, and the method includes: providing a base substrate formed with a pixel definition layer, so that the pixel definition layer includes a plurality of barrier wall structures, the plurality of barrier wall structures include a plurality of first barrier wall structures, the plurality of barrier wall structures define a plurality of pixel regions arranged in an array on the base substrate, the plurality of pixel regions include a plurality of pixel regions arranged along a first direction and a plurality of pixel regions arranged along a second direction, and a distance between any adjacent two of the pixel regions arranged along the first direction is greater than a distance between any adjacent two of the pixel regions arranged along the second direction; by a solution-applying process, forming a solution layer on the base substrate formed with the pixel definition layer, so that the solution layer includes a solution formed in the plurality of pixel regions and a solution formed on the plurality of first barrier wall structures, the plurality of first barrier wall structures are between the pixel regions arranged along the first direction, and the solution in any one of the plurality of pixel regions does not blend with the solution on the first barrier wall structures defining the any one of plurality of pixel regions; and performing a drying process on the solution layer so that the solution in each of the plurality of pixel regions forms the light-emitting layer.
According to the embodiments of the present disclosure, for example, in the above method, the plurality of barrier wall structures further include a plurality of second barrier wall structures, the solution layer further includes a solution formed on the plurality of second barrier wall structures, the plurality of second barrier wall structures are between the pixel regions arranged along the second direction, the solution in the any one of the plurality of pixel regions does not blend with the solution on the plurality of second barrier wall structures defining the any one of the plurality of pixel regions, and a volume of the solution on a single one of the plurality of second barrier wall structures is smaller than a volume of the solution on a single one of the plurality of first barrier wall structures.
According to the embodiments of the present disclosure, for example, in the above method, the plurality of first barrier wall structures are formed with at least one first groove, and the solution on the plurality of first barrier wall structures is in the at least one first groove; before forming the solution layer on the base substrate formed with the pixel definition layer by the solution-applying process, the method further includes: forming the at least one first groove in the plurality of first barrier wall structures by performing a patterning process on the pixel definition layer.
According to the embodiments of the present disclosure, for example, in the above method, a shape of the first groove on an opening side of the first groove is circular or tetragonal.
According to the embodiments of the present disclosure, for example, in the above method, first grooves of the at least one first groove in the plurality of first barrier wall structures which are on a same side of any adjacent two of the plurality of pixel regions arranged along the second direction communicate with each other.
According to the embodiments of the present disclosure, for example, in the above method, a second groove is formed between the first grooves being in two first barrier wall structures which are on the same side of any adjacent two of the plurality of pixel regions arranged along the second direction, any adjacent two of the first grooves communicate with each other through the second groove that is between the any adjacent two of the first grooves, forming the at least one first groove in the plurality of first barrier wall structures by performing the patterning process on the pixel definition layer includes: forming at least one first groove in the plurality of first barrier wall structures by performing the patterning process on the pixel definition layer; and forming the second groove between the first grooves being in the two first barrier wall structures which are on the same side of any adjacent two of the plurality of pixel regions arranged along the second direction, so that any adjacent two of the first grooves communicate with each other through the second groove that is between the any adjacent two of the first grooves.
According to the embodiments of the present disclosure, for example, in the above method, a depth of the first groove is greater than or equal to a depth of the second groove, and an area of the first groove on the opening side of the first groove is greater than an area of the second groove on an opening side of the second groove.
According to the embodiments of the present disclosure, for example, in the above method, the pixel regions, the first groove and the second groove are formed by a same patterning process.
According to the embodiments of the present disclosure, for example, in the above method, the forming the solution layer on the base substrate formed with the pixel definition layer by the solution-applying process so that the solution layer includes the solution formed in the plurality of pixel regions and the solution formed on the plurality of first barrier wall structures, includes: forming the solution in the plurality of pixel regions by a first solution-applying process; and forming the solution on the plurality of first barrier wall structures by a second solution-applying process to obtain the solution layer.
According to the embodiments of the present disclosure, for example, in the above method, the first solution-applying process includes an inkjet printing process, and the second solution-applying process includes any one of the inkjet printing process and a spray process.
According to the embodiments of the present disclosure, for example, in the above method, a volume of the solution on any one of the first barrier wall structures ranges from 1 picoliter to 200 picoliters.
According to the embodiments of the present disclosure, for example, in the above method, the volume of the solution on any one of the first barrier wall structures ranges from 10 picoliters to 100 picoliters.
The embodiments of the present disclosure further provide an electroluminescent device which includes the light-emitting layer manufactured by using the method described in any one of the above embodiments.
The embodiments of the present disclosure further provide a display device which includes the electroluminescent device described above.
BRIEF DESCRIPTION OF THE DRAWINGS
In order to clearly illustrate the technical solution of the embodiments of the disclosure, the drawings of the embodiments will be briefly described in the following; it is obvious that the described drawings are only related to some embodiments of the disclosure and thus are not limitative of the disclosure.
FIG. 1 is a comparison chart of curves between a theoretical size and an actual size of a light-emitting structure;
FIG. 2 is a flowchart of a method for manufacturing a light-emitting layer according to embodiments of the present disclosure;
FIG. 3 is a schematic view of a base substrate formed with a pixel definition layer according to the embodiments of the present disclosure;
FIG. 4 is a schematic view illustrating that a solution layer is formed on the base substrate formed with the pixel definition layer according to the embodiments of the present disclosure;
FIG. 5 is another flowchart of the method for manufacturing the light-emitting layer according to the embodiments of the present disclosure;
FIG. 6 is another schematic view illustrating that the solution layer is formed on the base substrate formed with the pixel definition layer according to the embodiments of the present disclosure;
FIG. 7 is still another flowchart of the method for manufacturing the light-emitting layer according to the embodiments of the present disclosure;
FIG. 8 is a schematic view illustrating that a first groove is formed on a first barrier wall structure according to the embodiments of the present disclosure;
FIG. 9 is another schematic view illustrating that the first groove is formed on the first barrier wall structure according to the embodiments of the present disclosure;
FIG. 10 is a schematic view illustrating that a solution is formed on the first barrier wall structure according to the embodiments of the present disclosure;
FIG. 11 is still another flowchart of the method for manufacturing the light-emitting layer according to the embodiments of the present disclosure;
FIG. 12 is a schematic view illustrating that the first grooves communicates with each other through a second groove according to the embodiments of the disclosure.
DETAILED DESCRIPTION
In order to make objects, technical details and advantages of the embodiments of the disclosure apparent, the technical solutions of the embodiments will be described in a clearly and fully understandable way in connection with the drawings related to the embodiments of the disclosure. Apparently, the described embodiments are just a part but not all of the embodiments of the disclosure. Based on the described embodiments herein, those skilled in the art can obtain other embodiment(s), without any inventive work, which should be within the scope of the disclosure.
The electroluminescent device generally includes a base substrate, and a thin film transistor (TFT for short) layer, an anode layer, a pixel definition layer (PDL for short), a light-emitting layer and a cathode layer which are sequentially disposed on the base substrate; the TFT layer includes a plurality of TFTs; the anode layer includes a plurality of anode structures; the light-emitting layer includes a plurality of light-emitting structures; and the TFTs, the anode structures and the light-emitting structures correspond to each other in a one-to-one manner. The pixel definition layer includes a plurality of barrier wall structures, the plurality of barrier wall structures define a plurality of pixel regions arranged in an array, the plurality of pixel regions include pixel regions arranged along a first direction and pixel regions arranged along a second direction, a distance between any adjacent two pixel regions among the pixel regions arranged along the first direction is not equal to a distance between any adjacent two pixel regions among the pixel regions arranged along the second direction, and each pixel region is provided with one light-emitting structure therein. At present, a wet film forming process is generally used to form the light-emitting layer. In the wet film forming process, a solution is filled in the pixel regions by a solution-applying process, and then a solvent in the pixel regions is removed by a depressurization drying process, so that a solute in the pixel regions forms the light-emitting structures, and thus the light-emitting layer is formed.
Because the distance between any adjacent two pixel regions among the pixel regions arranged along the first direction is not equal to the distance between any adjacent two pixel regions among the pixel regions arranged along the second direction, a micro-force that the solution in the pixel regions is subjected to in the first direction is different from another micro-force that the solution is subjected to in the second direction during the drying of the solution in the pixel regions, which results in the distribution of the solute in the first direction is different from the distribution of the solute in the second direction; on the other hand, because most of the pixel regions are of a rectangular-like shape, the light-emitting structures formed are also of the rectangular-like shape, so that the thickness uniformity of the light-emitting structure in a long-axis direction (a direction parallel to a long side of the light-emitting structure) and the thickness uniformity of the light-emitting structure in a short-axis direction (a direction parallel to a short side of the light-emitting structure) are difficult to achieve an optimum state simultaneously, and the appearance of the light-emitting structure is poor, resulting in poor uniformity of the light-emitting layer.
The electroluminescent device generally includes the base substrate, and the thin film transistor (TFT) layer, the anode layer, the pixel definition layer (PDL), the light-emitting layer and the cathode layer which are sequentially disposed on the base substrate. The TFT layer includes the plurality of TFTs, the anode layer includes the plurality of anode structures, the light-emitting layer includes the plurality of light-emitting structures, and the TFTs, the anode structures and the light-emitting structures correspond to each other in a one-to-one manner. The pixel definition layer includes the plurality of barrier wall structures, the plurality of barrier wall structures define the plurality of pixel regions arranged in an array, the plurality of pixel regions includes the pixel regions arranged along the first direction and the pixel regions arranged along the second direction, the distance between any adjacent two pixel regions among the pixel regions arranged along the first direction is not equal to the distance between any adjacent two adjacent pixel regions among the pixel regions arranged in the second direction, and one light-emitting structure is disposed in each pixel region.
In the process of manufacturing the electroluminescent device, the light-emitting layer is generally formed by using the wet film forming process. For example, firstly filling the solution (the solution is also called ink, and generally a mixture which includes a solute and a solvent and is used in the solution-applying process is referred to as the ink) into the pixel regions defined by the PDL; and then the solution in the pixel regions is subjected to a drying process by using the depressurization drying process, so that the solvent in the solution is removed, and the solute is dried to form the light-emitting structures, thereby forming the light-emitting layer. The shape of the light-emitting structure is generally rectangular-like, and the light-emitting structure includes the long-axis and the short-axis which are perpendicular to each other, for example; the dimension of the light-emitting structure along the long-axis direction is the length of the light-emitting structure, and the dimension of the light-emitting structure along the short-axis direction is the width of the light-emitting structure.
The depressurization drying process easily affects the solute distribution in the solution, resulting in poor uniformity of the formed light-emitting structure, and ultimately affecting the display effect and service life of the electroluminescent device. On one hand, in the depressurization drying process, the volume of the solution reduces as the solvent evaporates, but the interface position at which the solution initially contacts the PDL remains unchanged; therefore, the PDL produces a pinning effect which causes a climbing phenomenon at the edge of the formed light-emitting structure. For example, as shown in FIG. 1, the light-emitting structure has a theoretical width a0 and a theoretical length b0; and for the actually formed light-emitting structure, an actual width of a relatively flat region is a1, and an actual length of the relatively flat region is b1. It is desirable that the actual width a1 of the relatively flat region of the light-emitting structure is equal to the theoretical width a0 as much as possible and the actual length b1 of the relatively flat region of the light-emitting structure is equal to the theoretical length b0 as much as possible, that is, it is desirable that the film thicknesses of the light-emitting structures in respective regions are equal. On the other hand, the light-emitting structure often has an appearance in the long-axis direction different from an appearance in the short-axis direction. For example, the surface of the light-emitting structure is convex (in the “W” shape), concave (in the “U” or “V” shape), in the “M” shape, or the like.
In the solution-applying process, the ratio of the flat portion in the long-axis direction of the light-emitting structure and the ratio of the flat portion in the short-axis direction are not the same. That is, under the same decompression drying condition, the value of a1/a0 differs greatly from the value of b1/b0. It is often possible to achieve a good flatness in the short-axis direction of the light-emitting structure under a certain decompression drying condition, but the flatness in the long-axis direction is often poor. The main reason of causing this problem is that: during the depressurization drying process, the micro-force suffered by the solvent and/or solute in the long-axis direction of the pixel region is different from the micro-force suffered by the solvent and/or solute in the short-axis direction of the pixel region, causing the solute distribution to be nonuniform.
In the method for manufacturing the light-emitting layer provided by embodiments of the present disclosure, a solution is formed on the barrier wall structures which are between the pixel regions; during a drying process of a solution in the pixel regions, the presence of the solution on the barrier wall structures makes a micro-force in the first direction and another micro-force in the second direction that the solution in the pixel regions is subjected to tend to be the same, so that the distribution of the solute in the first direction and the distribution of the solute in the second direction tend to be the same, thus eliminating the phenomenon of poor thickness uniformity of the light-emitting structure caused by the nonuniform distribution of the solute, and finally improving the uniformity of the light-emitting layer. For the method for manufacturing the light-emitting layer provided by the embodiments of the present disclosure, please refer to the following descriptions.
FIG. 2 is a flowchart showing the method for manufacturing the light-emitting layer according to the embodiments of the present disclosure. The method for manufacturing the light-emitting layer is used to manufacture the light-emitting layer in the electroluminescent device, for example. Referring to FIG. 2, the method includes the following steps.
Step 201: providing a base substrate formed with a pixel definition layer, so that the pixel definition layer includes a plurality of barrier wall structures, the plurality of barrier wall structures define a plurality of pixel regions arranged in an array on the base substrate, the plurality of pixel regions include a plurality of pixel regions arranged along a first direction and a plurality of pixel regions arranged along a second direction, and a distance between any adjacent two of the pixel regions arranged along the first direction is greater than a distance between any adjacent two of the pixel regions arranged along the second direction.
FIG. 3 is a schematic view of the base substrate provided with the pixel definition layer 011 according to the embodiments of the present disclosure. Referring to FIG. 3, the pixel definition layer 011 includes the plurality of barrier wall structures (three first barrier wall structures 0111 adjacent to each other and two second barrier wall structures 0112 adjacent to each other are shown in FIG. 3 as an example), the plurality of barrier wall structures define the plurality of pixel regions P arranged in the array on the base substrate, the plurality of pixel regions P include the plurality of pixel regions P arranged along the first direction x and the plurality of pixel regions P arranged along the second direction y, and the distance x1 between any adjacent two of the pixel regions P arranged along the first direction x is greater than the distance y1 between any adjacent two of the pixel regions arranged along the second direction y. As shown in FIG. 3, in the embodiments of the present disclosure, the plurality of barrier wall structures include a plurality of first barrier wall structures 0111 and a plurality of second barrier wall structures 0112, the first barrier wall structures 0111 are ones of the plurality of barrier wall structures between the pixel regions P arranged along the first direction x, and the second barrier wall structures 0112 are ones of the plurality of barrier wall structures between the pixel regions P arranged along the second direction y. Therefore, the distance x1 between any adjacent two of the pixel regions P arranged along the first direction x is a width of the first barrier wall structure 0111, the distance y1 between any adjacent two of the pixel regions P arranged along the second direction y is a width of the second barrier wall structure 0112.
For example, the base substrate is a transparent base substrate. For example, the base substrate is a base substrate formed of a light-transmitting and non-metallic material having a certain strength such as glass, quartz or a transparent resin. Alternatively, for example, the base substrate is a flexible base substrate formed of a material such as polyimide (abbreviation: PI). The pixel definition layer 011 is formed, for example, by a patterning process and using a hydrophobic transparent resin material. For example, a layer of hydrophobic transparent resin material is formed on the base substrate by coating, magnetron sputtering, thermal evaporation or plasma enhanced chemical vapor deposition (PECVD) or the like, to obtain a resin material layer; then the resin material layer is patterned by a patterning process to obtain the pixel definition layer 011. The patterning process for example includes photoresist coating, exposure, development, etching, and photoresist stripping. Performing the patterning process on the resin material layer to obtain the pixel definition layer 011, for example, includes: forming a photoresist layer by coating a layer of a photoresist with a certain thickness on the resin material layer; exposing the photoresist layer with a mask so that the photoresist layer forms a fully exposed region and a non-exposed region; then performing a developing process on the photoresist layer so that the photoresist in the fully exposed region is removed and the photoresist in the non-exposed region is retained; then etching a region of the resin material layer corresponding to the fully exposed region by using an etching process to form the pixel regions in the resin material layer; and finally stripping off the photoresist in the non-exposed region to obtain the pixel definition layer 011 as shown in FIG. 3.
Step 202: by a solution-applying process, forming a solution layer on the base substrate formed with the pixel definition layer, so that the solution layer includes a solution formed in the plurality of pixel regions and a solution formed on the first barrier wall structures, and the solution in any one of the plurality of pixel regions does not blend with the solution on the first barrier wall structures defining the any one of the plurality of pixel regions.
For example, the solution-applying process includes, but is not limited to, an inkjet printing process, a spin coating process, a screen printing process, or a transfer process, or the like. FIG. 4 is a schematic view showing that the solution layer 012 is formed on the base substrate provided with the pixel definition layer 011 according to the embodiments of the present disclosure. Referring to FIG. 3 and FIG. 4, the solution layer 012 includes the solution 0021 formed in the plurality of pixel regions P and the solution 0122 formed on the first barrier wall structures 0111, and the solution 0121 in any one of the plurality of pixel regions P does not blend with the solution 0122 on the first barrier wall structures 0111 defining the any one of the plurality of pixel regions P. For example, a volume of the solution on any one of the first barrier wall structures 0111 of the pixel definition layer 011 ranges from 1 picoliter to 200 picoliters. For example, the volume of the solution on any one of the first barrier wall structures 0111 of the pixel definition layer 011 ranges from 10 picoliters to 100 picoliters. It should be noted that, in the embodiments of the present disclosure, for example, the material for forming the pixel definition layer 011 is the hydrophobic transparent resin material, which makes the solution have poor fluidity on the surface of the pixel definition layer 011. After the solution layer 012 is formed, as shown in FIG. 4, the solution 0121 in the pixel regions P is well defined in the pixel regions P, and the solution 0122 on the first barrier wall structures 0111 is well defined on the first barrier wall structures 0111, so that the solution 0121 in the pixel regions P is spaced from the solution 0122 on the first barrier wall structures 0111. Moreover, the solution 0122 on the first barrier wall structures 0111 is in a hemispherical shape on the first barrier wall structures 0111, for example.
In the embodiments of the present disclosure, the solution layer 012 is formed by one solution-applying process or is formed by two solution-applying processes. In a situation where the solution layer 012 is formed by the one solution-applying process, the solution in the pixel regions P and the solution on the first barrier wall structures 0111 are simultaneously formed by the one solution-applying process, for example; in a situation where the solution layer 012 is formed by the two solution-applying processes, first the solution 0121 in the plurality of pixel regions P is formed by a first solution-applying process, and then the solution 0122 on the first barrier wall structures 0111 is formed by a second solution-applying process, to obtain the solution layer 012. For example, firstly the solution 0122 on the first barrier wall structures 0111 is formed by the second solution-applying process, and then the solution 0121 in the plurality of pixel regions P is formed by the first solution-applying process, which is not limited in the embodiments of the present disclosure. In the embodiments of the present disclosure, the first solution-applying process and the second solution-applying process are the same or different. For example, the first solution-applying process includes the inkjet printing process, and the second solution-applying process includes any one of the inkjet printing process and a spray process. It should be noted that, whether the solution in the pixel regions P and the solution on the first barrier wall structures 0111 are formed by the one solution-applying process or by the two solution-applying processes, the solution in the pixel regions P and the solution on the first barrier wall structures 0111 are the same solution, for example.
Step 203: drying the solution layer so that the solution in each of the plurality of pixel regions forms a light-emitting structure to obtain the light-emitting layer.
For example, the solution layer is dried by using the depressurization drying process. In this process, the solvent in the pixel regions volatilizes, and the solute dries to form the light-emitting structure, thereby obtaining the light-emitting layer. The process of drying the solution layer by using the depressurization drying process, for example, includes: placing the base substrate formed with the solution layer in a closed cavity, and then drawing off gas in the closed cavity so that a gas pressure in the closed cavity is reduced to dry the solution layer. It should be noted that during drying the solution layer by the depressurization drying process, the solvent on the first barrier wall structures 0111 also volatilizes, and the solute on the first barrier wall structures 0111 dries and remains on the first barrier wall structures 0111. However, for the electroluminescent device, the presence of the barrier wall structures does not affect the display, so the solute remaining on the first barrier wall structures 0111 does not affect the display. It should be noted that the specific process of the depressurization drying process provided by the embodiments of the present disclosure is merely exemplary, the implementation process of the depressurization drying process may refer to related technologies, and repeated descriptions are omitted in the embodiments of the present disclosure.
It should be noted that, in practical applications, the amount of the solution on the first barrier wall structure 0111 is adjusted according to actual conditions, so that the solvent in the pixel region volatilizes relatively evenly in both the long-axis direction and the short-axis direction. The volatilization in the long-axis direction and the volatilization in the short-axis direction are relatively even, so that the solute is relatively uniformly distributed in the long-axis direction and the short-axis direction, and the thickness uniformity of the formed light-emitting structure is ensured. The method for manufacturing the light-emitting layer provided by the embodiments of the disclosure has a simple process and optimizes the performance of the light-emitting layer.
In summary, in the method for manufacturing the light-emitting layer provided by the embodiments of the present disclosure, because the solution is disposed on the first barrier wall structures, the solution on the first barrier wall structures ensures that the micro-force in the first direction and another micro-force in the second direction that the solution in the pixel regions is subjected to tend to be the same in the process of drying the solution layer, so that the distribution of the solute in the first direction and the distribution of the solute in the second direction tend to be the same, thus eliminating the phenomenon of poor thickness uniformity of the light-emitting structure caused by the nonuniform distribution of the solute, and finally improving the uniformity of the light-emitting layer.
FIG. 5 is another flowchart of the method for manufacturing the light-emitting layer according to the embodiments of the present disclosure, and the method for manufacturing the light-emitting layer for example is used to manufacture the light-emitting layer in the electroluminescent device. Referring to FIG. 5, the method includes the following steps.
Step 501: providing the base substrate formed with the pixel definition layer, so that the pixel definition layer includes the plurality of barrier wall structures, the plurality of barrier wall structures define the plurality of pixel regions arranged in the array on the base substrate, the plurality of pixel regions includes the plurality of pixel regions arranged along the first direction and the plurality of pixel regions arranged along the second direction, and the distance between any adjacent two of the pixel regions arranged along the first direction is greater than the distance between any adjacent two of the pixel regions arranged along the second direction.
For the implementation of the step 501, for example, reference may be made to the step 201 in the embodiments shown in FIG. 2, which is not described herein again.
Step 502: forming the solution layer on the base substrate formed with the pixel definition layer by the solution-applying process, so that the solution layer includes the solution formed in the plurality of pixel regions, the solution formed on the first barrier wall structures and a solution formed on second barrier wall structures, the solution in any one of the plurality of pixel regions does not blend with the solution on the first barrier wall structures defining the any one of the plurality of pixel regions, and does not blend with the solution on the second barrier wall structures defining the any one of the plurality of pixel regions, and a volume of the solution on the second barrier wall structures is smaller than the volume of the solution on the first barrier wall structures.
For example, the solution-applying process includes, but is not limited to, the inkjet printing process, the spin coating process, the screen printing process, or the transfer process, or the like. FIG. 6 is another schematic view illustrating that the solution layer 012 is formed on the base substrate provided with the pixel definition layer 011 according to the embodiments of the present disclosure. Referring to FIG. 3 and FIG. 6, the solution layer 012 includes the solution 0121 formed in the plurality of pixel regions P1, the solution 0122 formed on the first barrier wall structures 0111 and the solution 0123 formed on the second barrier wall structures 0112. The solution 0121 in any one of the plurality of pixel regions P does not blend with the solution 0122 on the first barrier wall structures 0111 defining the any one of the plurality of pixel regions P; and the solution 0121 in any one of the plurality of pixel regions P does not blend with the solution 0123 on the second barrier wall structures 0112 defining the any one of the plurality of pixel regions P. It should be noted that, in the embodiments of the present disclosure, for example, the material for forming the pixel definition layer 011 is the hydrophobic transparent resin material, which makes the solution have the poor fluidity on the surface of the pixel definition layer 011. After the solution layer 012 is formed, as shown in FIG. 3 and FIG. 6, the solution 0121 in the pixel regions P is well defined in the pixel regions P, the solution 0122 on the first barrier wall structures 0111 is well defined on the first barrier wall structures 0111, and the solution 0123 on the second barrier wall structures 01121 is well defined on the second barrier wall structures 0112. Moreover, the solution 0122 on the first barrier wall structures 0111 is in the hemispherical shape on the first barrier wall structures 0111, for example; the solution 0123 on the second barrier wall structures 0112 is in the hemispherical shape on the second barrier wall structures 0112, for example.
In the embodiments of the present disclosure, the solution layer 012 is formed by the one solution-applying process, or is formed by the two solution-applying processes, or is formed by three solution-applying processes, for example. In the situation where the solution layer 012 is formed by the one solution-applying process, the solution in the pixel regions P, the solution on the first barrier wall structures 0111 and the solution on the second barrier wall structures 0112 are simultaneously formed by the one solution-applying process; in the situation where the solution layer 012 is formed by the two solution-applying processes, for example, firstly the solution 0121 is formed in the plurality of pixel regions P by the first solution-applying process, and then the solution 0122 on the first barrier wall structures 0111 and the solution 0123 on the second barrier wall structures 0112 are formed by the second solution-applying process, to obtain the solution layer 012; in a situation where the solution layer 012 is formed by the three solution-applying processes, for example, firstly the solution 0121 is formed in the plurality of pixel regions P by the first solution-applying process, then the solution 0122 is formed on the first barrier wall structures 0111 by the second solution-applying process, and finally the solution 0123 is formed on the second barrier wall structures 0112 by a third solution-applying process, to obtain the solution layer 012. Of course, in practical applications, the process of forming the solution 0121 in the pixel regions P, the process of forming the solution 0122 on the first barrier wall structures 0111 and the process of forming the solution 0123 on the second barrier wall structures 0112 are not limited, and the embodiments of the present disclosure do not limit the forming order of the solution 0121, the solution 0122 and the solution 0123. It should be noted that, whether the solution in the pixel regions P, the solution on the first barrier wall structures 0111 and the solution on the second barrier wall structures 0112 are formed by the one solution-applying process or by the two solution-applying processes or by the three solution-applying processes, the solution in the pixel regions P, the solution on the first barrier wall structures 0111 and the solution on the second barrier wall structures 0112 are the same solution, for example.
Step 503: drying the solution layer so that the solution in each of the plurality of pixel regions forms the light-emitting structure to obtain the light-emitting layer.
For the implementation of the step 503, for example, reference may be made to the step 203 in the embodiments shown in FIG. 2, which is not described herein again. However, it should be noted that during drying the solution layer 012 by the depressurization drying process, the solvent on the second barrier wall structures 0112 volatilizes, and the solute on the second barrier wall structures 0112 dries and remains on the second barrier wall structures 0112. For the electroluminescent device, the presence of the barrier wall structures does not affect the display, so the solute on the second barrier wall structures 0112 does not affect the display.
It should be noted that the amount of the solution on the first barrier wall structure 0111 and the amount of the solution on the second barrier wall structure 0112 are adjusted according to actual conditions, so that the solvent in the pixel region volatilizes relatively evenly in both the long-axis direction and the short-axis direction. The volatilization in the long-axis direction and the volatilization in the short-axis direction are relatively even, so that the solute is relatively uniformly distributed in the long-axis direction and the short-axis direction, and the thickness uniformity of the formed light-emitting structure is ensured. The method for manufacturing the light-emitting layer provided by the embodiments of the disclosure has the simple process and optimizes the performance of the light-emitting layer.
In summary, in the method for manufacturing the light-emitting layer provided by the embodiments of the present disclosure, because the solution is disposed on the first barrier wall structures, the solution on the first barrier wall structures ensures that the micro-force in the first direction and another micro-force in the second direction that the solution in the pixel regions is subjected to tend to be the same in the process of drying the solution layer, so that the distribution of the solute in the first direction and the distribution of the solute in the second direction tend to be the same, thus eliminating the phenomenon of poor thickness uniformity of the light-emitting structure caused by the nonuniform distribution of the solute, and finally facilitating the improvement of the uniformity of the light-emitting layer.
FIG. 7 is another flowchart of the method for manufacturing the light-emitting layer according to the embodiments of the disclosure. The method for manufacturing the light-emitting layer is used to manufacture the light-emitting layer in the electroluminescent device, for example. Referring to FIG. 7, the method includes the following steps.
Step 701: providing the base substrate formed with the pixel definition layer, so that the pixel definition layer includes the plurality of barrier wall structures, the plurality of barrier wall structures define the plurality of pixel regions arranged in the array on the base substrate, the plurality of pixel regions include the plurality of pixel regions arranged along the first direction and the plurality of pixel regions arranged along the second direction, and the distance between any adjacent two of the pixel regions arranged along the first direction is greater than the distance between any adjacent two of the pixel regions arranged along the second direction.
For the implementation of the step 701, for example, reference may be made to the step 201 in the embodiments shown in FIG. 2, which is not described herein again.
Step 702: performing a patterning process on the pixel definition layer so that a first groove is formed in the first barrier wall structures.
FIG. 8 and FIG. 9 are schematic views showing two forms of the first groove G1 formed in the first barrier wall structures (not labelled in FIG. 8 and FIG. 9) according to the embodiments of the present disclosure. Referring to FIG. 8, a shape of the first groove G1 on an opening side of the first groove G1 is circular; or, referring to FIG. 9, the shape of the first groove G1 on the opening side of the first groove G1 is tetragonal. As shown in FIG. 9, in a situation where the shape of the first groove G1 on the opening side of the first groove G1 is tetragonal, a plurality of the first grooves G1 in the first barrier wall structures 011 which are on a same side of the pixel regions P arranged along the second direction y communicate with each other.
In the embodiments of the present disclosure, in conjunction with FIG. 3, FIG. 8, and FIG. 9, for example, the patterning process is performed on the pixel definition layer 011 so that the first groove G1 is formed in the first barrier wall structures 0111. There is a certain distance between the first groove G1 and the pixel regions P, to avoid that the solution in the first groove G1 blends with the solution in the pixel regions P after forming the solution layer in subsequent steps. The patterning process includes photoresist coating, exposure, development, etching and photoresist stripping. Therefore, for example, performing the patterning process on the pixel definition layer 011 so that the first groove G1 is formed in the first barrier wall structures 0111 includes: coating a layer of photoresist having a certain thickness on the barrier wall structures of the pixel definition layer 011; exposing the photoresist layer by using a mask so that the photoresist layer forms a fully exposed region and a non-exposed region; then performing a developing process on the photoresist layer so that the photoresist in the fully exposed region is removed and the photoresist in the non-exposed region is retained; then etching a region of the pixel definition layer 011 (that is, a region of the first barrier wall structures 0111) corresponding to the fully exposed region by using an etching process, so that the first groove G1 is formed in the pixel definition layer 011; and finally the photoresist in the non-exposed region is stripped off to obtain a structure as shown in FIG. 8 or FIG. 9. For example, the region in which the first groove G1 is formed is etched by a half etching process to avoid that the pixel definition layer 011 is etched through, thereby preventing the transistor circuit under the pixel definition layer 011 from being exposed.
It should be noted that, in the embodiments of the present disclosure, for example, the first groove G1 and the pixel regions P are formed by the same patterning process. In this case, for example, the layer of hydrophobic transparent resin material is deposited on the base substrate by coating, magnetron sputtering, thermal evaporation or PECVD or the like to obtain the resin material layer; then the resin material layer is patterned by the patterning process to obtain the pixel definition layer 011, so that the pixel definition layer 011 includes the plurality of pixel regions P arranged in the array and the first groove G1 formed in the first barrier wall structures 0111.
Step 703: by the solution-applying process, forming the solution layer on the base substrate formed with the pixel definition layer, so that the solution layer includes the solution formed in the plurality of pixel regions and the solution formed in the first groove.
For the implementation of the step 703, for example, reference may be made to the step 202 in the embodiments shown in FIG. 2, which is not described herein again. However, it should be noted that, for the pixel definition layer shown in FIG. 9, as shown in FIG. 10, for example, a nozzle coating device 02 is used to coat the solution in the first groove G1 along a length direction of the first groove G1, so that the solution in the first groove G1 is formed; and then the solution in the pixel regions P is filled by the solution-applying process (for example, the inkjet printing process), to form the solution layer on the base substrate formed with the pixel definition layer. It should be noted that, in the embodiments of the present disclosure, the first groove G1 is formed in the first barrier wall structures, and the first groove G1 defines the solution at a fixed position of the first barrier wall structures, so as to prevent the solution from flowing on the first barrier wall structures.
Step 704: drying the solution layer so that the solution in each of the plurality of pixel regions forms the light-emitting structure, to obtain the light-emitting layer.
For the implementation of the step 704, for example, reference may be made to the step 503 in the embodiments shown in FIG. 5, which is not described herein again. However, it should be noted that during drying the solution layer by the depressurization drying process, the solvent in the first groove G1 also volatilizes, and the solute in the first groove G1 also dries and remains in the first groove G1; because the first groove G1 is in the first barrier wall structures 0111, and for the electroluminescent device, the presence of the barrier wall structures does not affect the display, so the solute in the first groove G1 does not affect the display.
It should be noted that the embodiments of the present disclosure are described by taking the groove being formed in the first barrier wall structures as an example. In a practical application, according to the solution shown in FIG. 5, for example, the groove is further formed in the second barrier wall structures to facilitate forming the solution on the second barrier wall structures, which is not described herein again.
In summary, in the method for manufacturing the light-emitting layer provided by the embodiments of the present disclosure, because the solution is disposed on the first barrier wall structures, the solution on the first barrier wall structures ensures that the micro-force in the first direction and another micro-force in the second direction that the solution in the pixel regions is subjected to tend to be the same in the process of drying the solution layer, so that the distribution of the solute in the first direction and the distribution of the solute in the second direction tend to be the same, thus eliminating the phenomenon of poor thickness uniformity of the light-emitting structure caused by the nonuniform distribution of the solute, and facilitating the improvement of the uniformity of the light-emitting layer.
FIG. 11 is still another flowchart of the method for manufacturing the light-emitting layer according to the embodiments of the present disclosure. The method for manufacturing the light-emitting layer is used to manufacture the light-emitting layer in the electroluminescent device, for example. Referring to FIG. 11, the method includes the following steps.
Step 1101: providing the base substrate formed with the pixel definition layer, so that the pixel definition layer includes the plurality of barrier wall structures, the plurality of barrier wall structures define the plurality of pixel regions arranged in the array on the base substrate, the plurality of pixel regions include the plurality of pixel regions arranged along the first direction and the plurality of pixel regions arranged along the second direction, and the distance between any adjacent two of the pixel regions arranged along the first direction is greater than the distance between any adjacent two of the pixel regions arranged along the second direction.
Step 1102: performing the patterning process on the pixel definition layer so that the first groove is formed in the first barrier wall structures.
For the implementation of the step 1101 and the step 1102, for example, reference may be made to the step 701 and the step 702 in the embodiments shown in FIG. 7, which is not described herein again.
Step 1103, performing the patterning process on the pixel definition layer, so that a second groove is formed between first grooves being in two first barrier wall structures which are on the same side of any adjacent two of the plurality of pixel regions arranged along the second direction, and the first grooves being in the two first barrier wall structures which are on the same side of the any adjacent two of the plurality of pixel regions arranged along the second direction communicate with each other by the second groove.
FIG. 12 is a schematic view illustrating that the first grooves communicate with each other through the second groove according to the embodiments of the disclosure. Referring to FIG. 12, the shape of the first groove G1 on the opening side of the first groove G1 is circular, and the second groove G2 is formed between the first grooves G1 being in the two first barrier wall structures (not labelled in FIG. 12) which are on the same side of any adjacent two of the plurality of pixel regions P arranged along the second direction y, and the first grooves G1 being in the two first barrier wall structures which are on the same side of any adjacent two of the plurality of pixel regions arranged along the second direction communicate with each other by the second groove G2. In the embodiments of the present disclosure, for example, a depth of the first groove G1 is greater than or equal to a depth of the second groove G2, and an area of the first groove G1 on the opening side of the first groove G1 is greater than an area of the second groove G2 on the opening side of the second groove G2, in this way, it is ensured that after the solution layer is formed, the amount of the solution in the first groove G1 is greater than the amount of the solution in the second groove G2, and thus the solution in the grooves remains more in the first groove that just faces the pixel regions, so as to adjust the uniformity of the finally-formed light-emitting structure better.
In the embodiments of the present disclosure, in conjunction with FIG. 3, FIG. 8 and FIG. 12, for example, the pixel definition layer 011 is patterned by the patterning process, so that the second groove G2 is formed between the first grooves G1 being in the two first barrier wall structures which are on the same side of any adjacent two of the plurality of pixel regions P arranged along the second direction y. For the process of performing the patterning process on the pixel definition layer 011, for example, reference is made to step 702 in the embodiments shown in FIG. 7, which is not described herein again.
It should be noted that, in the embodiments of the present disclosure, for example, the first groove G1, the second groove G2 and the pixel regions P are formed by the same patterning process. In this case, for example, the layer of hydrophobic transparent resin material is formed on the base substrate by coating, magnetron sputtering, thermal evaporation or PECVD or the like to obtain the resin material layer, and then the patterning process is performed on the resin material layer to obtain the pixel definition layer 011, so that the pixel definition layer 011 includes the plurality of pixel regions P arranged in the array, the first groove G1 is formed in the first barrier wall structures 0111, and the second groove G2 is formed between the first grooves G1 being in the two first barrier wall structures which are on the same side of any adjacent two of the plurality of pixel regions P arranged along the second direction y.
Step 1104: by the solution-applying process, forming the solution layer on the base substrate formed with the pixel definition layer, so that the solution layer includes the solution formed in the plurality of pixel regions, the solution formed in the first groove and a solution formed in the second groove.
For the implementation of the step 1104, for example, reference may be made to the step 202 in the embodiments shown in FIG. 2, which is not described herein again. However, it should be noted that, for the pixel definition layer shown in FIG. 12, for example, a solution is coated in the first groove G1 and the second groove G2 by using the nozzle coating device, so that the solution in the first groove G1 and the solution in the second groove G2 are formed; and then the solution in the pixel regions P is filled by the solution-applying process (for example, the inkjet printing process) to form the solution layer on the base substrate formed with the pixel definition layer.
Step 1105: drying the solution layer so that the solution in each of the plurality of pixel regions forms the light-emitting structure to obtain the light-emitting layer.
For the implementation of the step 704, for example, reference may be made to the step 503 in the embodiments shown in FIG. 5, which is not described herein again. However, it should be noted that during drying the solution layer by the depressurization drying process, the solvent in the first groove G1 and the second groove G2 also volatilizes, and the solute in the first groove G1 and the second groove G2 also dries and remains in the first groove G1 and the second groove G2. The first groove G1 and the second groove G2 are both in the barrier wall structures, the presence of the barrier wall structures does not affect the display, and thus the solute in the first groove G1 and the solute in the second groove G2 do not affect the display.
It should be noted that the embodiments of the present disclosure are described by taking the grooves being in the first barrier wall structures as an example. In practical applications, as shown in FIG. 6, for example, the grooves are formed in the second barrier wall structures; and for example, the grooves formed in the second barrier wall structures communicate with each other to facilitate forming of the solution on the second barrier wall structures. Repeated descriptions are omitted in the embodiments of the present application.
In summary, in the method for manufacturing the light-emitting layer provided by the embodiments of the present disclosure, because the solution is disposed on the first barrier wall structures, the solution on the first barrier wall structures ensures that the micro-force in the first direction and another micro-force in the second direction that the solution in the pixel regions is subjected to tend to be the same in the process of drying the solution layer, so that the distribution of the solute in the first direction and the distribution of the solute in the second direction tend to be the same, thus eliminating the phenomenon of poor thickness uniformity of the light-emitting structure caused by the nonuniform distribution of the solute, and facilitating the improvement of the uniformity of the light-emitting layer.
The embodiments of the present disclosure also provide the electroluminescent device which includes the light-emitting layer manufactured by the method shown in any one of FIGS. 2, 5, 7 and 11.
For example, in practical applications, the electroluminescent device further includes the TFT layer, the anode layer, the PDL and the cathode layer, and the TFT layer, the anode layer and the PDL are sequentially stacked; the TFT layer, the anode layer and the PDL are between the light-emitting layer and the base substrates, and the cathode layer is on the light-emitting layer; the TFT layer includes the plurality of TFTs, the anode layer includes the plurality of anode structures; and the TFTs, the anode structures and the light-emitting structures of the light-emitting layer correspond to each other in the one-to-one manner. For the structure of the electroluminescent device, for example, refer to the related art. The light-emitting layer of the electroluminescent device provided by the embodiments of the disclosure has good uniformity, and thus the electroluminescent device has better display effect and long service life.
The embodiments of the present disclosure further provide a display device including the above electroluminescent device. The display device for example is any product or component having a display function such as an OLED display panel, a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, or a navigator.
The term “and/or” in the present disclosure is merely used for describing a relationship between associated objects, indicating that there may be three relationships. For example, A and/or B may indicate three cases that A exists independently, A and B exist simultaneously, and B exists independently. In addition, the character “I” in the present disclosure generally indicates that the fore-and-aft associated objects have an “or” relationship.
Those skilled in the art can understand that all or part of the steps of implementing the above embodiments may be completed by hardware or may be completed by using a program to execute related hardware, and the program may be stored in a computer readable storage medium. The storage medium mentioned above may be a read only memory, a magnetic disk or an optical disk or the like.
What are described above is related to the illustrative embodiments of the disclosure only and not limitative to the scope of the disclosure; the scopes of the disclosure are defined by the accompanying claims.
This application claims the benefit of Chinese patent application No. 201710758714.2 filed on Aug. 29, 2017, which is hereby entirely incorporated by reference as a part of the present application.

Claims (19)

What is claimed is:
1. A method for manufacturing a display substrate, comprising:
providing a base substrate formed with a pixel definition layer, wherein the pixel definition layer comprises a plurality of barrier wall structures, the plurality of barrier wall structures comprise a plurality of first barrier wall structures and a plurality of second barrier wall structures, the plurality of barrier wall structures define a plurality of pixel regions arranged in an array on the base substrate, the plurality of pixel regions comprise a plurality of pixel regions arranged along a first direction and a plurality of pixel regions arranged along a second direction;
by a solution-applying process, forming a solution layer on the base substrate formed with the pixel definition layer, so that the solution layer comprises a solution formed in the plurality of pixel regions, a solution formed on the plurality of first barrier wall structures, and a solution formed on the plurality of second barrier wall structures, wherein the solution formed in the plurality of pixel regions, the solution formed on the plurality of first barrier wall structures, and the solution formed on the plurality of second barrier wall structures are formed of a same material, and wherein a distance between any adjacent two of the pixel regions arranged along the first direction is greater than a distance between any adjacent two of the pixel regions arranged along the second direction, the plurality of first barrier wall structures are between the pixel regions arranged along the first direction, the plurality of second barrier wall structures are between the pixel regions arranged along the second direction, and a volume of the solution on a single one of the plurality of second barrier wall structures is smaller than a volume of the solution on a single one of the plurality of first barrier wall structures; and
performing a drying process simultaneously on the solution formed in the plurality of pixel regions, the solution formed on the plurality of first barrier wall structures and the solution formed on the plurality of second barrier wall structures, so that the solution in each of the plurality of pixel regions forms a light-emitting layer.
2. The method according to claim 1, wherein
the plurality of first barrier wall structures are formed with at least one first groove, and the solution on the plurality of first barrier wall structures is in the at least one first groove,
before forming the solution layer on the base substrate formed with the pixel definition layer by the solution-applying process, the method further comprises: forming the at least one first groove in the plurality of first barrier wall structures by performing a patterning process on the pixel definition layer.
3. The method according to claim 2, wherein a shape of the first groove on an opening side of the first groove is circular or rectangular.
4. The method according to claim 2, wherein the plurality of first barrier wall structures are formed with a plurality of the first grooves, the first grooves in the plurality of first barrier wall structures which are on a same side of any adjacent two of the plurality of pixel regions arranged along the second direction communicate with each other.
5. The method according to claim 4, wherein
the forming the at least one first groove in the plurality of first barrier wall structures by performing the patterning process on the pixel definition layer comprises:
forming the first grooves in the plurality of first barrier wall structures by performing the patterning process on the pixel definition layer; and forming a second groove between the first grooves being in the two first barrier wall structures which are on the same side of any adjacent two of the plurality of pixel regions arranged along the second direction, so that any adjacent two of the first grooves communicate with each other through the second groove that is between the any adjacent two of the first grooves.
6. The method according to claim 5, wherein a depth of the first groove is greater than or equal to a depth of the second groove, and an area of the first groove on an opening side of the first groove is greater than an area of the second groove on an opening side of the second groove.
7. The method according to claim 5, wherein the pixel regions, the first groove and the second groove are formed by a same patterning process.
8. The method according to claim 1, wherein
the forming the solution layer on the base substrate formed with the pixel definition layer by the solution-applying process so that the solution layer comprises the solution formed in the plurality of pixel regions and the solution formed on the plurality of first barrier wall structures, comprises:
forming the solution in the plurality of pixel regions by a first solution-applying process; and
forming the solution on the plurality of first barrier wall structures by a second solution-applying process to obtain the solution layer.
9. The method according to claim 8, wherein the first solution-applying process comprises an inkjet printing process, and the second solution-applying process comprises any one of the inkjet printing process and a spray process.
10. The method according to claim 1, wherein a volume of the solution on any one of the first barrier wall structures ranges from 1 picoliter to 200 picoliters.
11. The method according to claim 10, wherein the volume of the solution on any one of the first barrier wall structures ranges from 10 picoliters to 100 picoliters.
12. A method for manufacturing a display substrate, comprising:
providing a base substrate formed with a pixel definition layer, wherein the pixel definition layer defines a plurality of pixel regions on the base substrate;
forming a solution on the plurality of pixel regions and a solution on the pixel definition layer, wherein the solution formed in the plurality of pixel regions and the solution formed on the pixel definition layer are formed of a same material; and
simultaneously evaporating a solvent in the solution in the plurality of pixel regions and a solvent in the solution on the pixel definition layer;
wherein the forming the solution on the pixel definition layer comprises: forming the solution on the pixel definition layer between any adjacent two of the pixel regions, so that a volume of the solution on the pixel definition layer between the any adjacent two of the plurality of pixel regions is directly proportional to a distance between the any adjacent two of the plurality of pixel regions.
13. The method according to claim 12, wherein forming the solution on the pixel definition layer comprises: forming a groove in the pixel definition layer so that the solution is formed in the groove.
14. The method according to claim 13, wherein forming the groove in the pixel definition layer comprises: forming at least one groove in the pixel definition layer between the any adjacent two of the plurality of pixel regions.
15. The method according to claim 13, wherein forming the groove in the pixel definition layer comprises: forming at least one groove in the pixel definition layer, so that the groove extends along a direction to separate all the pixel regions into two parts.
16. The method according to claim 12, wherein the volume of the solution on the pixel definition layer between the any adjacent two of the plurality of pixel regions ranges from 1 picoliter to 200 picoliters.
17. The method according to claim 16, wherein the volume of the solution on the pixel definition layer between the any adjacent two of the plurality of pixel regions ranges from 10 picoliters to 100 picoliters.
18. The method according to claim 1, wherein
the solution formed in the plurality of pixel regions, the solution formed on the plurality of first barrier wall structures, and the solution formed on the plurality of second barrier wall structures are spaced from one another;
the plurality of first barrier wall structures are between shorter sides of the pixel regions arranged along the first direction, so that the solution formed on the plurality of first barrier wall structures is between the shorter sides of the pixel regions arranged along the first direction; and
the plurality of second barrier wall structures are between longer sides of the pixel regions arranged along the second direction, so that the solution formed on the plurality of second barrier wall structures is between the longer sides of the pixel regions arranged along the second direction.
19. The method according to claim 12, wherein the solution formed in the plurality of pixel regions is spaced apart from the solution formed on the pixel definition layer.
US16/303,482 2017-08-29 2018-04-10 Method for manufacturing light-emitting layer, electroluminescent device and display device Active 2039-08-04 US11227904B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201710758714.2 2017-08-29
CN201710758714.2A CN109427847B (en) 2017-08-29 2017-08-29 Method for manufacturing light emitting layer, electroluminescent device, and display device
PCT/CN2018/082521 WO2019041820A1 (en) 2017-08-29 2018-04-10 Manufacturing method for light-emitting layer, electroluminescent device and display device

Publications (2)

Publication Number Publication Date
US20210225966A1 US20210225966A1 (en) 2021-07-22
US11227904B2 true US11227904B2 (en) 2022-01-18

Family

ID=65503856

Family Applications (1)

Application Number Title Priority Date Filing Date
US16/303,482 Active 2039-08-04 US11227904B2 (en) 2017-08-29 2018-04-10 Method for manufacturing light-emitting layer, electroluminescent device and display device

Country Status (6)

Country Link
US (1) US11227904B2 (en)
EP (1) EP3678181B1 (en)
JP (1) JP7091257B2 (en)
KR (1) KR102223517B1 (en)
CN (1) CN109427847B (en)
WO (1) WO2019041820A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109887978B (en) * 2019-03-12 2021-01-12 京东方科技集团股份有限公司 Display substrate, manufacturing method thereof and display device
CN111883657B (en) * 2019-07-29 2023-09-05 广东聚华印刷显示技术有限公司 Display device and manufacturing method thereof
CN113540188A (en) * 2021-06-29 2021-10-22 上海天马微电子有限公司 Display substrate and display panel
KR20230050547A (en) * 2021-10-07 2023-04-17 삼성디스플레이 주식회사 Display device
CN113991031B (en) * 2021-10-27 2023-05-23 京东方科技集团股份有限公司 Display panel, preparation method thereof and display device
CN115449747B (en) * 2022-10-19 2024-02-13 云谷(固安)科技有限公司 Precise mask and manufacturing method thereof

Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004230209A (en) 2003-01-28 2004-08-19 Casio Comput Co Ltd Solution-jet device
JP2005276479A (en) 2004-03-23 2005-10-06 Seiko Epson Corp Electro-optic device, its manufacturing method, and electronic device
US20060188661A1 (en) * 2005-02-23 2006-08-24 Seiko Epson Corporation Method of forming film pattern, method of manufacturing device, electro-optical device, and electronic apparatus
US20060284957A1 (en) * 2005-06-17 2006-12-21 Icf Technology Co., Ltc. Color filter and manufacturing method therefor
US20070252518A1 (en) 2006-04-28 2007-11-01 Sung-Hun Lee Organic electroluminescent device and its method of manufacture
US20080252200A1 (en) 2005-08-11 2008-10-16 Samsung Electronics Co., Ltd. Display device and method of making display device
JP2010073700A (en) 2007-12-28 2010-04-02 Panasonic Corp Organic el device and organic el display panel
US20120040478A1 (en) 2010-06-30 2012-02-16 Panasonic Corporation Organic el display panel and method of manufacturing the same
WO2013080490A1 (en) 2011-12-02 2013-06-06 パナソニック株式会社 Organic electroluminescence display panel and method of manufacturing same
CN103165527A (en) 2011-12-19 2013-06-19 三星显示有限公司 Organic light-emitting display device and method of manufacturing the same
US20140061603A1 (en) * 2012-08-31 2014-03-06 Samsung Display Co., Ltd. Display panel and manufacturing method of the same
CN103715218A (en) 2012-10-08 2014-04-09 三星显示有限公司 Organic light emitting display device and method of manufacturing the same
US20140203303A1 (en) * 2012-03-16 2014-07-24 Boe Technology Group Co., Ltd. Light-Emitting Diode Display Substrate, Method For Manufacturing Same, And Display Device
CN104299968A (en) 2014-09-22 2015-01-21 京东方科技集团股份有限公司 Electroluminescent device, manufacturing method of electroluminescent device, display substrate and display device
CN104882468A (en) 2015-06-09 2015-09-02 京东方科技集团股份有限公司 Organic electroluminescence display base plate and manufacturing method thereof, and display apparatus
US20160043150A1 (en) * 2013-05-29 2016-02-11 Huifeng Wang Oled pixel defining structure, manufacturing method thereof and array substrate
JP2016126860A (en) 2014-12-26 2016-07-11 ソニー株式会社 Display device, method of manufacturing the same, and electronic equipment
US20170104173A1 (en) 2014-08-22 2017-04-13 Samsung Display Co., Ltd. Light-emitting display device
WO2017135227A1 (en) 2016-02-01 2017-08-10 シャープ株式会社 Organic el display device

Patent Citations (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004230209A (en) 2003-01-28 2004-08-19 Casio Comput Co Ltd Solution-jet device
JP2005276479A (en) 2004-03-23 2005-10-06 Seiko Epson Corp Electro-optic device, its manufacturing method, and electronic device
US20060188661A1 (en) * 2005-02-23 2006-08-24 Seiko Epson Corporation Method of forming film pattern, method of manufacturing device, electro-optical device, and electronic apparatus
US20060284957A1 (en) * 2005-06-17 2006-12-21 Icf Technology Co., Ltc. Color filter and manufacturing method therefor
US20080252200A1 (en) 2005-08-11 2008-10-16 Samsung Electronics Co., Ltd. Display device and method of making display device
US20070252518A1 (en) 2006-04-28 2007-11-01 Sung-Hun Lee Organic electroluminescent device and its method of manufacture
KR20070106240A (en) 2006-04-28 2007-11-01 삼성에스디아이 주식회사 Organic electro luminescence device and method of manufacturing the same
US7888867B2 (en) 2007-12-28 2011-02-15 Panasonic Corporation Organic el device having bank with groove, organic el display panel, and method for manufacturing the organic el device
JP2010073700A (en) 2007-12-28 2010-04-02 Panasonic Corp Organic el device and organic el display panel
US20120040478A1 (en) 2010-06-30 2012-02-16 Panasonic Corporation Organic el display panel and method of manufacturing the same
CN102388673A (en) 2010-06-30 2012-03-21 松下电器产业株式会社 Organic el display panel and method for manufacturing same
WO2013080490A1 (en) 2011-12-02 2013-06-06 パナソニック株式会社 Organic electroluminescence display panel and method of manufacturing same
US9111892B2 (en) 2011-12-02 2015-08-18 Joled Inc. Organic electroluminescence display panel and method of manufacturing same
CN103165527A (en) 2011-12-19 2013-06-19 三星显示有限公司 Organic light-emitting display device and method of manufacturing the same
US20130153937A1 (en) 2011-12-19 2013-06-20 Sung-Hwan Cho Organic light-emitting display device and method of manufacturing the same
US20140203303A1 (en) * 2012-03-16 2014-07-24 Boe Technology Group Co., Ltd. Light-Emitting Diode Display Substrate, Method For Manufacturing Same, And Display Device
US20140061603A1 (en) * 2012-08-31 2014-03-06 Samsung Display Co., Ltd. Display panel and manufacturing method of the same
US20140361278A1 (en) 2012-10-08 2014-12-11 Samsung Display Co., Ltd. Organic light emitting display device and method of manufacturing the same
CN103715218A (en) 2012-10-08 2014-04-09 三星显示有限公司 Organic light emitting display device and method of manufacturing the same
US20160043150A1 (en) * 2013-05-29 2016-02-11 Huifeng Wang Oled pixel defining structure, manufacturing method thereof and array substrate
US20170104173A1 (en) 2014-08-22 2017-04-13 Samsung Display Co., Ltd. Light-emitting display device
CN104299968A (en) 2014-09-22 2015-01-21 京东方科技集团股份有限公司 Electroluminescent device, manufacturing method of electroluminescent device, display substrate and display device
US20160351632A1 (en) 2014-09-22 2016-12-01 Boe Technology Group Co., Ltd. Electroluminescent device, its manufacturing method, display substrate and display device
US9818802B2 (en) 2014-09-22 2017-11-14 Boe Technology Group Co., Ltd. Electroluminescent device comprising channels, its manufacturing method, and display device
JP2016126860A (en) 2014-12-26 2016-07-11 ソニー株式会社 Display device, method of manufacturing the same, and electronic equipment
CN104882468A (en) 2015-06-09 2015-09-02 京东方科技集团股份有限公司 Organic electroluminescence display base plate and manufacturing method thereof, and display apparatus
US20160365396A1 (en) 2015-06-09 2016-12-15 Boe Technology Group Co., Ltd. Organic light-emitting display substrate, manufacturing method thereof and display device
WO2017135227A1 (en) 2016-02-01 2017-08-10 シャープ株式会社 Organic el display device

Non-Patent Citations (8)

* Cited by examiner, † Cited by third party
Title
Chinese Office Action in Chinese Application No. 201710758714.2, dated Mar. 4, 2020 with English translation.
Extended European Search Report in European Patent Application No. 18803306.2 dated Jun. 11, 2021.
Indian Office Action in Indian Application No. 201817044231, dated Jun. 25, 2020.
International Search Report of PCT/CN2018/082521 in Chinese, dated Jul. 13, 2018, with English translation.
Japanese Office Action in Japanese Application No. 2018-561620 dated Nov. 1, 2021 with English translation.
Korean Office Action in Korean Application No. 10-2018-7035925, dated Jan. 13, 2020 with English translation.
Notice of Transmittal of the International Search Report of PCT/CN2018/082521 in Chinese, dated Jul. 13, 2018.
Written Opinion of the International Searching Authority of PCT/CN2018/082521 in Chinese, dated Jul. 13, 2018 with English translation.

Also Published As

Publication number Publication date
EP3678181A1 (en) 2020-07-08
KR20190033476A (en) 2019-03-29
CN109427847A (en) 2019-03-05
CN109427847B (en) 2020-12-11
JP2020532041A (en) 2020-11-05
JP7091257B2 (en) 2022-06-27
US20210225966A1 (en) 2021-07-22
WO2019041820A1 (en) 2019-03-07
EP3678181A4 (en) 2021-07-14
EP3678181B1 (en) 2023-03-29
KR102223517B1 (en) 2021-03-05

Similar Documents

Publication Publication Date Title
US11227904B2 (en) Method for manufacturing light-emitting layer, electroluminescent device and display device
US11004917B2 (en) Pixel defining layer, display substrate and manufacturing method thereof, and display apparatus
US10886343B2 (en) Pixel defining layer and method for manufacturing the same, display panel and method for manufacturing the same, and display device
US10811476B2 (en) Pixel definition layer, manufacturing method thereof, display substrate and display device
CN106941112B (en) Pixel defining layer, manufacturing method thereof and display substrate
US10204968B2 (en) Organic light-emitting display substrate, method of fabricating the same, display panel, and display device
JP6910958B2 (en) Display board and manufacturing method of display board
US11127798B2 (en) Pixel definition layer and manufacturing method thereof, display substrate, and display panel
US9935287B2 (en) Array substrate and manufacturing method therefor, and display device
US10559635B2 (en) Pixel defining layer, production method thereof, and display substrate
CN109509782B (en) Pixel defining layer, manufacturing method thereof, self-luminous display panel and display device
US20230337472A1 (en) Pixel defining structure and manufacturing method thereof, display panel and display device
JP2014099402A (en) Light-emitting display backplane, display device and method for manufacturing pixel define layer
US10991775B2 (en) Display substrate, fabrication method thereof, and display panel
WO2020238410A1 (en) Pixel definition layer and manufacturing method, display panel and manufacturing method, and display apparatus
US20150040826A1 (en) Method for manufacturing metal mask
WO2020238397A1 (en) Display panel and preparation method therefor, and display device
US11239299B2 (en) Array substrate and method for manufacturing the same
US20200127240A1 (en) Oled device manufacturing method and oled device
US10141510B2 (en) OLED display panel, manufacturing method thereof and display device
CN108428723B (en) Pixel defining structure, preparation method thereof, display substrate and ink-jet printing method
WO2020233596A1 (en) Organic electroluminescent device, method for manufacture thereof, and display apparatus
CN109817692B (en) Pixel defining layer, color filter film and manufacturing method thereof, and self-luminous display panel
US20230189623A1 (en) Display panel and method of manufacturing same, and display device

Legal Events

Date Code Title Description
AS Assignment

Owner name: BOE TECHNOLOGY GROUP CO., LTD., CHINA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:DAI, QING;REEL/FRAME:047556/0483

Effective date: 20181105

FEPP Fee payment procedure

Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

STPP Information on status: patent application and granting procedure in general

Free format text: NOTICE OF ALLOWANCE MAILED -- APPLICATION RECEIVED IN OFFICE OF PUBLICATIONS

STPP Information on status: patent application and granting procedure in general

Free format text: AWAITING TC RESP., ISSUE FEE NOT PAID

STPP Information on status: patent application and granting procedure in general

Free format text: NOTICE OF ALLOWANCE MAILED -- APPLICATION RECEIVED IN OFFICE OF PUBLICATIONS

STPP Information on status: patent application and granting procedure in general

Free format text: PUBLICATIONS -- ISSUE FEE PAYMENT VERIFIED

STPP Information on status: patent application and granting procedure in general

Free format text: AWAITING TC RESP, ISSUE FEE PAYMENT VERIFIED

STPP Information on status: patent application and granting procedure in general

Free format text: PUBLICATIONS -- ISSUE FEE PAYMENT VERIFIED

STCF Information on status: patent grant

Free format text: PATENTED CASE