CN208359724U - Vacuum dryer - Google Patents
Vacuum dryer Download PDFInfo
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- CN208359724U CN208359724U CN201820955912.8U CN201820955912U CN208359724U CN 208359724 U CN208359724 U CN 208359724U CN 201820955912 U CN201820955912 U CN 201820955912U CN 208359724 U CN208359724 U CN 208359724U
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Abstract
The utility model relates to a kind of vacuum dryers, including vacuum chamber, microscope carrier, at least two deflectors and vacuum evacuation device.The top of vacuum chamber is equipped with vacuum orifice, and microscope carrier and at least two deflectors are located in vacuum chamber, and each deflector is correspondingly arranged with microscope carrier and is successively spaced set on the side of microscope carrier, and each deflector is equipped with corresponding aperture area, and each aperture area is equipped with deflector hole；On microscope carrier to the direction of each deflector, the area of the aperture area of latter deflector is less than the area of the aperture area of previous deflector in two deflectors of arbitrary neighborhood, and at least partly deflector hole of two neighboring aperture area mutually staggers.Vacuum evacuation device is connected to vacuum orifice, and vacuum orifice is located at the top of each deflector.When above-mentioned vacuum dryer is dry, between workpiece to be processed and first deflector, the solvent vapo(u)r that workpiece to be processed generates when volatilizing is moved upwards with air-flow perpendicular to liquid level side, the problem for causing film forming uneven so as to improve uneven drying in process of vacuum drying.
Description
Technical field
The utility model relates to mechanical equipment technical fields, more particularly to a kind of vacuum dryer.
Background technique
Vacuum dryer is common mechanical equipment, in Organic Light Emitting Diode (Oganic Light-Emitting
Diode, OLED) production in using also very extensively.
Organic Light Emitting Diode because its total colouring, in terms of have broad application prospects due to by people
Extensive concern.Solution processing type Organic Light Emitting Diode based on inkjet printing technology has big face at low cost, easy to accomplish
The advantages such as product production.Current OLED inkjet printing is usually to use inkjet printing in pixel hole on patterned substrate
Technology forms each organic function layer, and the organic function layer after inkjet printing need to be carried out at vacuum drying using vacuum dryer
Reason.The ink as used in inkjet printing technology contains solvent, substrate edges in the drying process in vacuum dryer
Pixel and substrate among pixel solvent atmosphere it is inconsistent, the rate of drying of the pixel of substrate edges is more dry than intermediate pixel
Dry speed is fast, leads to the organic function layer uneven film thickness in the pixel at substrate edges and middle part hole, so that manufactured
It is bad that the edge of display panel leads to the problem of the display such as brightness disproportionation, spot.
Existing solution is that the surrounding in substrate viewing area makes Dummy pixel (i.e. virtual pixel) or changes pixel
The structure of confining layers.However Dummy pixel is made in the surrounding of substrate viewing area, so that the area of viewing area reduces, it is not suitable for
In the narrow frame and the trend shielded comprehensively of current display panel；And the structure for changing pixel confining layer increases technique hardly possible
Degree, so that complex process, is unfavorable for controlling cost.
Utility model content
Based on this, it is necessary to provide a kind of vacuum dryer that can be effectively improved uneven drying problem.
A kind of vacuum dryer, comprising:
The top of vacuum chamber, the vacuum chamber is equipped with vacuum orifice；
Microscope carrier, for carrying workpiece to be processed in the vacuum chamber；
At least two deflectors are located in the vacuum chamber, and each deflector is successively spaced set on the microscope carrier
Top, each deflector are equipped with corresponding aperture area, and each aperture area is equipped with deflector hole；In the microscope carrier to each institute
It states on the direction of deflector, the area of the aperture area of latter deflector is less than previous deflector in two deflectors of arbitrary neighborhood
The area of aperture area, at least partly deflector hole of aperture area mutually staggers on two neighboring deflector；And
Vacuum evacuation device is connected to the vacuum orifice of the vacuum chamber, and the vacuum orifice is located at each water conservancy diversion
The top of plate.
When above-mentioned vacuum dryer works, workpiece to be processed is placed on microscope carrier, and is extracted very using vacuum evacuation device
It is empty.During extracting vacuum, due to the effect of each deflector, air-flow is from microscope carrier by the deflector hole of each deflector to vacuum
It flows outside chamber, therefore is formed between workpiece to be processed and first opposite deflector close to vertical and uniform and stable gas
Stream, the solvent vapo(u)r that workpiece to be processed generates when volatilizing is with air-flow upward vertical movement, so as to improve in process of vacuum drying
The problem that uneven drying causes film forming uneven, to improve drying effect.
Particularly, above-mentioned vacuum dryer is applicable to the ink dried of OLED device, and ink generates molten when volatilizing
Agent steam is with air-flow upward vertical movement, so that the solvent atmosphere of each pixel in the drying process is consistent, improves ink in pixel
Film-formation result, and then the edge for improving manufactured display panel leads to the problem of brightness disproportionation, spot etc. and shows bad, raising
The display yield of display panel.The vacuum dryer is for drying the good OLED device of inkjet printing, without in OLED device
The surrounding production Dummy pixel of the substrate viewing area of part or the structure for changing pixel confining layer, are applicable to narrow frame or comprehensive
The display panel of screen, and the complicated technology without changing pixel confining layer structure, advantageously reduce cost.
In implementing at wherein one, on the microscope carrier to the direction of each deflector, two deflectors of arbitrary neighborhood
In latter deflector deflector hole quantity be less than previous deflector deflector hole quantity.
In implementing at wherein one, on the microscope carrier to the direction of each deflector, two deflectors of arbitrary neighborhood
In latter deflector deflector hole aperture be greater than previous deflector deflector hole aperture.
In implementing at wherein one, on the microscope carrier to the direction of each deflector, the aperture of first deflector
Area with the workpiece to be processed on the microscope carrier for being correspondingly arranged, in addition to first deflector, the aperture of other each deflectors
Orthographic projection of the area on its previous deflector is respectively positioned in the aperture area of previous deflector.
In implementing at wherein one, between the two neighboring deflector hole on the deflector of the microscope carrier direct neighbor
It is 0.1cm~1cm away from distance.
Wherein one implement in, on the microscope carrier to the direction of each deflector, first deflector with it is described
The distance between microscope carrier is 0.1cm~50cm.
In implementing at wherein one, the distance between two neighboring described deflector is 0.1cm~10cm.
In implementing at wherein one, when the deflector is three and three or more, two water conservancy diversion of arbitrary neighborhood
The distance between plate is equal.
In implementing at wherein one, the quantity of the deflector is 2~150.
In implementing at wherein one, frontal projected area of each deflector on the microscope carrier is greater than the face of the microscope carrier
Product.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the vacuum dryer of an embodiment of the present invention；
Fig. 2 is the indoor structural schematic diagram of vacuum chamber of vacuum dryer shown in Fig. 1；
Fig. 3 is the overlooking structure figure with the deflector of microscope carrier direct neighbor of vacuum dryer shown in Fig. 1.
Specific embodiment
The utility model is more fully retouched below with reference to relevant drawings for the ease of understanding the utility model,
It states.The preferred embodiment of the utility model is given in attached drawing.But the utility model can come in many different forms in fact
It is existing, however it is not limited to embodiment described herein.On the contrary, purpose of providing these embodiments is makes public affairs to the utility model
The understanding for opening content is more thorough and comprehensive.
It should be noted that it can directly on the other element when element is referred to as " being fixed on " another element
Or there may also be elements placed in the middle.When an element is considered as " connection " another element, it, which can be, is directly connected to
To another element or it may be simultaneously present centering elements.
Unless otherwise defined, all technical and scientific terms used herein are led with the technology for belonging to the utility model
The normally understood meaning of the technical staff in domain is identical.Terminology used in the description of the utility model herein only be
The purpose of description specific embodiment, it is not intended that in limitation the utility model.Term as used herein "and/or" includes
Any and all combinations of one or more related listed items.
Referring to Fig. 1, an embodiment provides a kind of vacuum dryer 10, including vacuum chamber 11, microscope carrier 13, at least
Two deflectors 15 and vacuum evacuation device 17.
The top of vacuum chamber 11 is equipped with vacuum orifice (figure is not marked).
Microscope carrier 13 is located in vacuum chamber 11 for carrying workpiece 20 to be processed.
Fig. 1 and Fig. 2 is please referred to, each deflector 15 is located in vacuum chamber 11, and each deflector 15, which is successively spaced, is set to microscope carrier
13 top.
Please refer to figs. 2 and 3, and each deflector 15 is equipped with corresponding aperture area 152, and each aperture area 152 is equipped with water conservancy diversion
Hole 151.On microscope carrier 13 to the direction of each deflector 15, the aperture area of latter deflector 15 in two deflectors 15 of arbitrary neighborhood
152 area is less than the area of the aperture area 152 of previous deflector 15, and aperture area 152 is at least on two neighboring deflector 15
Part deflector hole 151 is staggered.
Vacuum evacuation device 17 is connected to the vacuum orifice of vacuum chamber 11, and the vacuum orifice is located on each deflector 15
Side.
It should be noted that deflector 15 is equipped with aperture area 152 and non-aperture area 154, deflector hole 151 is set to aperture area
152.Specifically in an embodiment as illustrated in figure 2, aperture area 152 is located at the middle part of deflector 15, and non-aperture area 154 is set around out
The surrounding of porose area 152.
It finds in actual production, the solvent atmosphere of the pixel and the pixel in the middle part of substrate of substrate edges in process of vacuum drying
Enclose inconsistent, therefore the rate of drying of the pixel of substrate edges is faster than the rate of drying of intermediate pixel, causes substrate edges in
Organic function layer uneven film thickness in the pixel hole in portion, so that the edge of manufactured display panel generates brightness not
, spot etc. shows bad problem.
It is easily understood that two deflector holes 151 are staggered, the center line for referring to two deflector holes 151 is not in same straight line
On, it is appreciated that at least partly deflector hole 151 of aperture area 152 is staggered on two neighboring deflector 15, refers to when deflector hole 151
Quantity when having very much, as long as there is part deflector hole 151 to be staggered.It is understood that in other embodiments, two neighboring water conservancy diversion
Whole deflector holes 151 of aperture area 152 can also all be staggered on plate 15.
The area of each aperture area 152 is gradually reduced setting, and at least portion of deflector hole 151 of two neighboring aperture area 152
Misclassification is opened, if having fully considered that the area of aperture area 152 is too big or the deflector hole 151 of two neighboring aperture area 152 is good
It opens and is directly connected, will lead to and not can guarantee OLED device and first opposite deflector 15 when vacuum evacuation device 17 extracts
Between the problem of being formed close to vertical and uniform and stable air-flow.Therefore it is arranged by above structure, so that air-flow is adjacent two
It is flowed in the deflector hole 151 of a aperture area 152, vacuum evacuation device 17 is set in the cavity wall of each 15 side of deflector, and is led to
The guide functions of deflector 15 are crossed, to guarantee to be formed between OLED device and first opposite deflector 15 close to vertical and equal
Even stable air-flow.
When above-mentioned vacuum dryer 10 works, workpiece 20 to be processed is placed on microscope carrier 13, and uses vacuum evacuation device
17 extract vacuum.During extracting vacuum, due to the effect of each deflector 15, air-flow passes through each deflector 15 from microscope carrier 13
Deflector hole 151 flowed to outside vacuum chamber 11, therefore between workpiece to be processed 20 and first opposite deflector 15, wait locate
The solvent vapo(u)r that science and engineering part 20 generates when volatilizing is with air-flow upward vertical movement, not so as to improve drying in process of vacuum drying
The problem for causing film forming uneven, to improve drying effect.
Particularly, above-mentioned vacuum dryer 10 is applicable to the ink dried of OLED device, what ink generated when volatilizing
Solvent vapo(u)r is with air-flow upward vertical movement, so that the solvent atmosphere of each pixel in the drying process is consistent, improves ink in pixel
MJPZ effect, and then the edge of display panel made of improving leads to the problem of brightness disproportionation, spot etc. and shows bad, mentions
The high display yield of display panel.
The vacuum dryer 10 is shown for drying the good OLED device of inkjet printing without the substrate in OLED device
The surrounding production Dummy pixel in area or the structure for changing pixel confining layer, the display panel for being applicable to narrow frame or shielding comprehensively,
And the complicated technology without changing pixel confining layer structure, advantageously reduce cost.It is understood that the vacuum dryer 10 is answered
With without being limited thereto.
In addition, the air-flow formed between microscope carrier 13 and first opposite deflector 15 is close to vertical and uniform and stable, because
This vacuum dryer 10 is applicable to the production of large-sized OLED display panel.
It will be appreciated that the vacuum dryer 10 can not need heating function, and directly reduced using vacuum environment molten
The boiling point of agent promotes its volatilization, realizes dry purpose.It is understood that in other embodiments, which can also
With heating function, such as thermostat 19 can be increased and 20 heated to workpiece to be handled.Specifically, thermostat 19
It connect with microscope carrier 13, for being heated to microscope carrier 13,20 is heated to workpiece to be handled to realize.Heat treatment can be with
Vacuum is extracted to carry out simultaneously, it can also be after extracting vacuum.It is preferred that promoting the preliminary of solvent by extracting vacuum after extracting vacuum
Volatilization, realizes the primary solidification of the film of the organic function layer of OLED device, then accelerates the organic of OLED device by heating
The sizing of the film of functional layer.
It is understood that generally microscope carrier 13 is horizontally disposed, each deflector 15 is set to the top of microscope carrier 13, vacuum evacuation device 17
It is connected to the top of the cavity wall of vacuum chamber 11.Specifically in the embodiment shown in fig. 1, vacuum evacuation device 17 is vacuum pump.
In Fig. 1 and specific example shown in Fig. 2, on microscope carrier 13 to the direction of each deflector 15, each deflector 15 will
The inner cavity of vacuum chamber 11 is divided into multiple successively arrangement and relatively independent subspaces.Vacuum evacuation device 17 is connected to last
Sub-spaces.Such subspace is relatively independent, and air-flow can only pass through adjacent subspace from deflector hole.
Specifically, on microscope carrier 13 to the direction of each deflector 15, multiple subspaces are located at first deflector 15
Close to 13 side of microscope carrier, between two neighboring deflector 15 and side that the last one deflector 15 is separate.Vacuum evacuation device 17
It is connected to the last one subspace, air-flow can only be leaned on from first deflector 15 is located at when such vacuum evacuation device 17 extracts vacuum
Other subspaces are successively passed through by the deflector hole 151 of each deflector 15 in the subspace of nearly 13 side of microscope carrier, to further mention
The uniformity and stability of the high air-flow formed between microscope carrier 13 and first opposite deflector 15.
In Fig. 1 and specific example shown in Fig. 2, on microscope carrier 13 to the direction of each deflector 15, arbitrary neighborhood two
The quantity of the deflector hole 151 of latter deflector 15 is less than the quantity of the deflector hole 151 of previous deflector 15 in deflector 15, so
Be conducive to air-flow gradually to gather in this direction.Further, the deflector hole 151 on deflector 15 is distributed in matrix, and is being carried
On platform 13 to the direction of each deflector 15, adjacent the two of the corresponding previous deflector 15 of the deflector hole 151 of next deflector 15
Position between a deflector hole 151 is arranged in a staggered manner, so that air-flow be made gradually to gather.
In Fig. 1 and specific example shown in Fig. 2, on microscope carrier 13 to the direction of each deflector 15, arbitrary neighborhood two
The aperture of the deflector hole 151 of latter deflector 15 is greater than the aperture of the deflector hole 151 of previous deflector 15 in deflector 15, wherein
Aperture is the diameter dimension inside finger-hole.In embodiment as shown in Figure 1, deflector hole 151 is circular hole.Specifically in an embodiment
In, the pore-size distribution of deflector hole 151 is in 0.1cm~2cm.
It is understood that the aperture of deflector hole 151 can be distributed in other ranges in other embodiments, as long as it meets in microscope carrier
13 to the requirement that on the direction of each deflector 15, the aperture of the deflector hole 151 of each aperture area 152 is gradually increased.For example,
In another embodiment, the aperture of the deflector hole 151 of each deflector 15 can be arranged according to the number of plies of place deflector 15, such as carry
On platform 13 to the direction of each deflector 15, aperture D=(0.25N+0.25) cm of deflector hole 151 on n-th deflector 15.
Further, the distance with the two neighboring deflector hole 151 on the deflector 15 of 13 direct neighbor of microscope carrier is
0.1cm~1cm.
In Fig. 1 and specific example shown in Fig. 2, on microscope carrier 13 to the direction of each deflector 15, first deflector
15 aperture area 152 is for corresponding with the workpiece to be processed 20 on microscope carrier 13.
In Fig. 1 and specific example shown in Fig. 2, frontal projected area of each deflector 15 on microscope carrier 13 is greater than microscope carrier 13
Area.That is, deflector 15 is not only arranged with 13 face of microscope carrier, and the overall dimensions of deflector 15 are preferably greater than microscope carrier
13 and workpiece to be processed 20 overall dimensions, such that deflector 15 plays preferable guide functions.
It is easily understood that the shape of each aperture area 152 can be arranged according to the shape of workpiece 20 to be processed, such as.First
The aperture area 152 of a deflector 15 can be set to shape identical with workpiece 20 to be processed, other each deflectors 15 can be set to
The smaller but similar shape of size.
In some embodiments of the utility model, on microscope carrier 13 to the direction of each deflector 15, first water conservancy diversion is removed
Except plate 15, orthographic projection of the aperture area 152 of other each deflectors 15 on its previous deflector 15 is respectively positioned on previous lead
In the aperture area 152 of flowing plate 15.So be conducive to gathering for air-flow, and then be conducive to vacuum evacuation device 17 and preferably realize extraction
Vacuum.
In some embodiments of the utility model, on microscope carrier 13 to the direction of each deflector 15, first deflector
The distance between 15 and microscope carrier 13 are 0.1cm~50cm.Further, on microscope carrier 13 to the direction of each deflector 15, first
The distance between a deflector 15 and microscope carrier 13 are 3cm~10cm.
In some embodiments of the utility model, the distance between two neighboring deflector 15 is 0.1cm~10cm.Into
One step, the distance between two neighboring deflector 15 may be configured as 0.1cm~5cm.In some embodiments of the utility model
In, it deflector 15 position-movable and then adjusts between deflector 15 and microscope carrier 13, the distance between each deflector 15.Such as
It can cooperate by being arranged in the cavity wall of vacuum chamber 11 for the mobile sliding rail of deflector 15 or for deflector 15 multiple optional
The card slot selected, to realize the movement of deflector 15.
In some embodiments, when the quantity of deflector 15 is three or three or more, two deflectors of arbitrary neighborhood
The distance between 15 is equal.
In embodiment as shown in Figure 1, it is arranged in parallel between each deflector 15.And between microscope carrier 13 and each deflector 15
Also it is arranged in parallel.In embodiment as shown in Figure 1, the quantity of deflector 15 is 4.
It is understood that in other embodiments, the quantity of deflector 15 can be set as needed, generally, deflector 15
Quantity is 2~150.Further, the quantity of deflector 15 may be configured as 50~100.
In another embodiment, the quantity of deflector 15 is 25.And in microscope carrier 13 to the direction of each deflector 15
On, the distance between first deflector 15 and microscope carrier 13 are 1cm, between first deflector 15 to workpiece 20 to be processed away from
From for 0.5cm, the distance between two neighboring deflector 15 is 2.8cm.And on microscope carrier 13 to the direction of each deflector 15, the
Aperture D=(0.25N+0.25) cm of deflector hole 151 on N number of deflector 15.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed,
But it cannot be understood as the limitations to utility model patent range.It should be pointed out that for the common skill of this field
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.
Claims (10)
1. a kind of vacuum dryer characterized by comprising
The top of vacuum chamber, the vacuum chamber is equipped with vacuum orifice；
Microscope carrier, for carrying workpiece to be processed in the vacuum chamber；
At least two deflectors are located in the vacuum chamber, and each deflector is successively spaced set on the top of the microscope carrier,
Each deflector is equipped with corresponding aperture area, and each aperture area is equipped with deflector hole；It described is led in the microscope carrier to each
On the direction of flowing plate, the area of the aperture area of latter deflector is less than the aperture of previous deflector in two deflectors of arbitrary neighborhood
The area in area, at least partly deflector hole of aperture area mutually staggers on two neighboring deflector；And
Vacuum evacuation device is connected to the vacuum orifice of the vacuum chamber, and the vacuum orifice is located at each deflector
Top.
2. vacuum dryer as described in claim 1, which is characterized in that in the microscope carrier to the direction of each deflector
On, the quantity of the deflector hole of latter deflector is less than the quantity of the deflector hole of previous deflector in two deflectors of arbitrary neighborhood.
3. vacuum dryer as described in claim 1, which is characterized in that in the microscope carrier to the direction of each deflector
On, the aperture of the deflector hole of latter deflector is greater than the aperture of the deflector hole of previous deflector in two deflectors of arbitrary neighborhood.
4. vacuum dryer as described in claim 1, which is characterized in that in the microscope carrier to the direction of each deflector
On, the aperture area of first deflector for being correspondingly arranged with the workpiece to be processed on the microscope carrier, except first deflector it
Outside, orthographic projection of the aperture area of other each deflectors on its previous deflector is respectively positioned on the aperture area of previous deflector
It is interior.
5. such as the described in any item vacuum dryers of Claims 1 to 4, which is characterized in that with the microscope carrier direct neighbor
The distance of two neighboring deflector hole on the deflector is 0.1cm~1cm.
6. such as the described in any item vacuum dryers of Claims 1 to 4, which is characterized in that described led in the microscope carrier to each
On the direction of flowing plate, the distance between first deflector and the microscope carrier are 0.1cm~50cm.
7. such as the described in any item vacuum dryers of Claims 1 to 4, which is characterized in that the two neighboring deflector it
Between distance be 0.1cm~10cm.
8. such as the described in any item vacuum dryers of Claims 1 to 4, which is characterized in that when the deflector be three and
At three or more, the distance between two described deflectors of arbitrary neighborhood are equal.
9. such as the described in any item vacuum dryers of Claims 1 to 4, which is characterized in that the quantity of the deflector is 2~
150.
10. such as the described in any item vacuum dryers of Claims 1 to 4, which is characterized in that each deflector is in the load
Frontal projected area on platform is greater than the area of the microscope carrier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820955912.8U CN208359724U (en) | 2018-06-20 | 2018-06-20 | Vacuum dryer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820955912.8U CN208359724U (en) | 2018-06-20 | 2018-06-20 | Vacuum dryer |
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| Publication Number | Publication Date |
|---|---|
| CN208359724U true CN208359724U (en) | 2019-01-11 |
Family
ID=64929805
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820955912.8U Active CN208359724U (en) | 2018-06-20 | 2018-06-20 | Vacuum dryer |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110116559A (en) * | 2019-04-23 | 2019-08-13 | 深圳市华星光电半导体显示技术有限公司 | Vacuum dryer |
| CN111516399A (en) * | 2020-04-29 | 2020-08-11 | Tcl华星光电技术有限公司 | Mask plate and manufacturing method thereof, composite mask plate and vacuum drying device |
| CN111883688A (en) * | 2019-08-09 | 2020-11-03 | 广东聚华印刷显示技术有限公司 | Reduced pressure drying device and reduced pressure drying method |
| CN112838180A (en) * | 2021-01-07 | 2021-05-25 | 深圳市华星光电半导体显示技术有限公司 | Vacuum drying device |
-
2018
- 2018-06-20 CN CN201820955912.8U patent/CN208359724U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110116559A (en) * | 2019-04-23 | 2019-08-13 | 深圳市华星光电半导体显示技术有限公司 | Vacuum dryer |
| CN111883688A (en) * | 2019-08-09 | 2020-11-03 | 广东聚华印刷显示技术有限公司 | Reduced pressure drying device and reduced pressure drying method |
| CN111516399A (en) * | 2020-04-29 | 2020-08-11 | Tcl华星光电技术有限公司 | Mask plate and manufacturing method thereof, composite mask plate and vacuum drying device |
| CN112838180A (en) * | 2021-01-07 | 2021-05-25 | 深圳市华星光电半导体显示技术有限公司 | Vacuum drying device |
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