CN210101058U

CN210101058U - Vacuum drying device

Info

Publication number: CN210101058U
Application number: CN201920302302.2U
Authority: CN
Inventors: 史横舟; 孙雅娟; 王允军
Original assignee: Suzhou Xingshuo Nanotech Co Ltd
Current assignee: Suzhou Xingshuo Nanotech Co Ltd
Priority date: 2019-03-11
Filing date: 2019-03-11
Publication date: 2020-02-21
Anticipated expiration: 2029-03-11

Abstract

The application provides a vacuum drying device, which comprises a vacuum chamber and a support piece positioned in the vacuum chamber, wherein the vacuum chamber comprises an air extraction opening, the air extraction opening is communicated with the vacuum chamber, and the air extraction opening is respectively positioned at the side part and the bottom part of the vacuum chamber and is used for extracting gas in the vacuum chamber or filling gas into the vacuum chamber; the support is positioned below the vacuum chamber and used for bearing the substrate coated with the functional ink on the surface. The vacuum drying device is provided with a plurality of extraction openings which are respectively positioned at the side part and the bottom part of the vacuum chamber, thereby being beneficial to balancing the air flow of the middle area and the edge area of the substrate in the air extraction and drying process, promoting the stable volatilization speed of the solvent at each part of the substrate and improving the film forming uniformity.

Description

Vacuum drying device

Technical Field

The application belongs to the technical field of show, especially relates to a vacuum drying device.

Background

In the field of display technology, quantum dots have excellent optical properties and electrical properties, such as wide color gamut, high color purity, adjustable light-emitting wavelength, and easy synthesis and processing, and are widely applied to photoelectric devices, such as quantum dot light-emitting diodes (QLEDs).

Inkjet printing technology is considered as an effective way to reduce the cost of large-size QLED displays. In the QLED printing process, after ink droplets of the device functional material are printed in designated pixel pits of the pixel definition layer, the printed wet film needs to be vacuum-dried to remove the solvent in the film layer. The structural design of the vacuum drying device directly influences the thickness uniformity of the film layer. If the thickness uniformity is poor, the device is prone to emitting light unevenly, or leakage current exists, which affects the device performance. Therefore, it is necessary to provide a novel vacuum drying apparatus to meet the drying requirements of large-sized substrates.

SUMMERY OF THE UTILITY MODEL

To the above technical problem, the present application provides a vacuum drying device.

The vacuum drying device comprises a vacuum chamber and a support piece positioned in the vacuum chamber, wherein the vacuum chamber comprises an air suction opening, the air suction opening is communicated with the vacuum chamber, and the air suction opening is respectively positioned at the side part and the bottom part of the vacuum chamber and is used for extracting gas in the vacuum chamber or filling gas into the vacuum chamber; the support is positioned below the vacuum chamber and used for bearing the substrate coated with the functional ink on the surface.

Further, the side of vacuum chamber is equipped with a set of extraction opening, a set of be two or more, the bottom of vacuum chamber is equipped with single extraction opening.

Further, the pumping ports of the side portions are equal in height and symmetrically distributed about a vertical central axis of the vacuum chamber.

Further, the height of the side suction opening is lower than that of the support.

Further, the horizontal distance between the side air pumping hole and the substrate is not less than the inner diameter of the air pumping hole.

Further, a single air exhaust opening in the bottom is arranged in the center of the bottom.

Furthermore, the air pumping ports are provided with corresponding control valves.

Further, the support member comprises a support plate and a plurality of support columns, one end of each support column is installed at the bottom of the vacuum chamber, the other end of each support column is connected to the support plate, and the support plate bears the substrate coated with the functional ink on the surface.

Further, the supports are adjustable in height, the supports having a height 1/5-4/5 of the vacuum chamber height.

Further, the vacuum drying device also comprises a vacuum degree detection element.

Has the advantages that: the application provides a novel vacuum drying device, satisfies the drying requirement of the jumbo size base plate based on ink jet printing. The vacuum drying device is provided with a plurality of extraction openings which are respectively positioned at the side part and the bottom part of the vacuum chamber, thereby being beneficial to balancing the air flow of the middle area and the edge area of the substrate in the air extraction and drying process, promoting the stable volatilization speed of the solvent at each part of the substrate and improving the film forming uniformity.

Drawings

Fig. 1 is one of schematic structural views of a vacuum drying apparatus according to an embodiment of the present application;

FIG. 2 is a schematic structural view of a side suction port according to an embodiment of the present application;

FIG. 3 is a second schematic view of the structure of the side suction port according to one embodiment of the present application;

FIG. 4 is a third schematic view illustrating a structure of a side suction port according to an embodiment of the present application;

fig. 5 is a second schematic structural view of a vacuum drying apparatus according to an embodiment of the present application;

fig. 6 is a third schematic structural view of a vacuum drying apparatus according to an embodiment of the present application.

In the drawings like parts are provided with the same reference numerals. The figures show embodiments of the application only schematically.

Detailed Description

The technical solutions in the examples of the present application will be described in detail below with reference to the embodiments of the present application. It should be noted that the described embodiments are only some embodiments of the present application, and not all embodiments.

In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, are not to be construed as limiting the present invention.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; the specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the description of the present invention, "a plurality" means two or more unless otherwise specified.

Referring to fig. 1, the present invention provides a vacuum drying device, including a vacuum chamber 100 and a support member 200 located inside the vacuum chamber, wherein the vacuum chamber 100 includes an air pumping port, the air pumping port is communicated with the vacuum chamber 100, the air pumping port is located at the side and the bottom of the vacuum chamber 100, respectively, and is used for pumping gas inside the vacuum chamber 100 or filling gas into the vacuum chamber 100; the support 200 is located below the vacuum chamber 100, and is used for carrying the substrate 400 coated with the functional ink.

In the vacuum drying device in the prior art, holes are formed above the cavity, the air flow of the air exhaust can change rapidly during working, the drying rate of the edge area of the film layer on the substrate is greater than that of the middle area in the drying film forming process, so that turbulence is easily formed in the film layer, and the film forming is uneven. The utility model discloses be equipped with a set of extraction opening 311 and 312 (see fig. 1 and fig. 2) about the perpendicular central axis symmetric distribution of cavity at the vacuum chamber lateral part, bottom central point puts and is equipped with single extraction opening 320. The extraction openings at the side part and the bottom part of the cavity are mutually independently arranged, so that a single or a plurality of extraction openings needing to work can be selected at will, and the phenomena that the extraction airflow is large and the airflow of each region on the surface of the substrate is unstable when the upper part of the cavity is opened are effectively avoided.

The too fast or too slow pumping speed of the gas in the vacuum chamber 100 may cause uneven film formation due to different evaporation and separation speeds of the solvent during the drying film formation process of the substrates, thereby affecting the subsequent processes. The air extraction opening of the utility model is communicated with the vacuum chamber 100 through the control valve and is used for controlling the air flow flux when air is extracted or enters.

The

side pumping holes

311 and 312 are lower than the support member 200. Meanwhile, the horizontal distance between the side pumping hole and the substrate 400 is not less than the inner diameter of the pumping hole. Through the arrangement, each air suction opening can keep a certain distance in the horizontal direction and the vertical direction relative to the substrate 400 to be dried, so that smooth and stable air flow in the vacuum chamber is facilitated, and the phenomenon that the film forming is uneven due to large difference of surface air flow in different areas of the substrate is avoided.

The support 200 includes a support plate 211 and a plurality of support columns 212, the support columns 212 being installed at one end at the bottom of the vacuum chamber 100 and connected at the other end to the support plate 211. The support plate 211 of the support 200 serves to carry a substrate to be dried. The heights of all the support columns 212 can be automatically adjusted, so that the position of the substrate 400 in the vacuum chamber 100 can be regulated, and correspondingly suitable drying environments can be provided for functional inks with different components.

The utility model discloses in functional ink indicates to contain functional material, can form the ink of the corresponding functional layer of luminescent device after printing. The functional layer comprises at least one of a hole injection layer, a hole transport layer, a quantum dot light emitting layer, an electron injection layer or an electron transport layer. When the vacuum chamber 100 is in a negative pressure state, the boiling point of the solvent in the functional ink decreases with the increase of the environmental vacuum degree, and the substrate 400 coated with the functional ink evaporates and separates.

In one specific embodiment, the gas within the vacuum chamber 100 is pumped through the

side pumping ports

311, 312 and the bottom pumping port 320. The pumping hole is located below the substrate 400 and has a proper distance from the edge of the substrate, so that a stable gas flow field is formed in the vacuum chamber, the solvent evaporation and separation speeds in the middle area and the edge area of the substrate are relatively balanced, and the uniform and rapid film formation of a sample is further promoted.

In one embodiment, the gas within the vacuum chamber 100 is pumped through the

side pumping ports

311 and 312 and the bottom pumping port 320 is closed. The flow of the exhaust air is adjusted by the control valve, so that the phenomenon that the drying speed of the edge area is too high in the process of drying and film forming the substrate 400 can be avoided, and a uniformly dried film layer is formed.

The utility model discloses a set of extraction opening of lateral part not only can set up two, also can set up a plurality of extraction openings that are the symmetric distribution. In a specific embodiment, three

pumping holes

313, 314 and 315 are arranged on the side part, each pumping hole has the same vertical height and is uniformly distributed about the central axis of the cavity, and fig. 3 is a schematic top view of the group of pumping holes.

In a specific embodiment, the side portion is provided with four

pumping ports

316, 317, 318, 319, each pumping port has the same vertical height and is uniformly distributed about the central axis of the chamber, and fig. 4 is a schematic top view of the set of pumping ports.

The utility model discloses all extraction openings not only can extract the inside gas of vacuum chamber, can be used to the inside gas filling of vacuum chamber simultaneously. Considering that the substrate may be adversely affected by the gas flow if the gas is introduced from the bottom or from below the substrate, an additional gas inlet 611 may be provided at the side of the vacuum chamber, the gas inlet 611 being located above the substrate, as shown in fig. 5.

In one embodiment, two inlets 611 and 612 are provided to the sides of the vacuum chamber, as shown in FIG. 6. The two air inlets are symmetrically distributed about the central axis of the vacuum chamber, so that the uniformity and stability of air flow in the inner chamber are ensured during air inlet.

The utility model discloses a vacuum drying device still includes vacuum detection element 500 for vacuum in the control vacuum chamber is convenient for in time adjust the speed of taking out or advance.

The utility model provides a vacuum drying device satisfies the drying requirement based on the jumbo size base plate that the inkjet printed. The vacuum drying device is provided with the plurality of extraction openings which are respectively positioned at the side part and the bottom part of the vacuum chamber, so that the air flow of the middle area and the edge area of the substrate can be balanced in the air extraction and drying process, the solvent volatilization speed of each part of the substrate is stable, a functional layer with uniform thickness is formed, the problems of leakage current, nonuniform light emission and the like of a large-size QLED device are effectively solved, and the light emitting performance of the device is further improved.

Although the present disclosure has been described and illustrated in greater detail by the inventors, it should be understood that modifications and/or alterations to the above-described embodiments, or equivalent substitutions, will be apparent to those skilled in the art without departing from the spirit of the disclosure, and that no limitations to the present disclosure are intended or should be inferred therefrom.

Claims

1. A vacuum drying device is characterized in that the device comprises a vacuum chamber and a support piece positioned in the vacuum chamber,

the vacuum chamber comprises an air pumping port, the air pumping port is communicated with the vacuum chamber, and the air pumping port is respectively positioned at the side part and the bottom part of the vacuum chamber and is used for pumping gas in the vacuum chamber or filling gas into the vacuum chamber;

the support is positioned below the vacuum chamber and used for bearing the substrate coated with the functional ink on the surface.

2. The vacuum drying apparatus according to claim 1, wherein the side of the vacuum chamber is provided with a set of two or more suction ports,

the bottom of the vacuum chamber is provided with a single pumping hole.

3. Vacuum drying apparatus according to claim 2, wherein the suction openings of the side portions are of equal height and are symmetrically distributed about the vertical central axis of the vacuum chamber.

4. The vacuum drying apparatus according to claim 3, wherein the suction ports of the side portion have a height lower than that of the support.

5. The vacuum drying apparatus according to claim 3, wherein a horizontal distance between the pumping port of the side portion and the substrate is not less than an inner diameter of the pumping port.

6. The vacuum drying apparatus of claim 2, wherein the single suction port of the bottom is provided at a central position of the bottom.

7. The vacuum drying device according to any one of claims 1 to 6, wherein the air pumping ports are provided with corresponding control valves.

8. The vacuum drying apparatus according to claim 1, wherein the support member comprises a support plate and a plurality of support columns, one end of the support columns being installed at the bottom of the vacuum chamber and the other end being connected to the support plate, the support plate carrying the substrate whose surface is coated with the functional ink.

9. The vacuum drying apparatus of claim 8, wherein the height of the support is adjustable, the height of the support being 1/5-4/5 of the height of the vacuum chamber.

10. The vacuum drying apparatus of claim 1, further comprising a vacuum degree detection element.