CN114771111B

CN114771111B - Vacuum drying device, substrate vacuum drying method and vacuum drying equipment

Info

Publication number: CN114771111B
Application number: CN202210185783.XA
Authority: CN
Inventors: 江兵
Original assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Current assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority date: 2022-02-28
Filing date: 2022-02-28
Publication date: 2024-03-22
Anticipated expiration: 2042-02-28
Also published as: CN114771111A

Abstract

The application discloses a vacuum drying device, a substrate vacuum drying method and vacuum drying equipment. The vacuum drying device comprises: the drying chamber comprises a cavity and a cavity door, wherein the cavity is arranged on the base, the cavity door is movably connected with the cavity, the cavity is provided with a containing cavity, and the cavity door is used for allowing a substrate to be dried to enter the containing cavity; the local drying structure comprises a driving mechanism arranged on the base and a drying mechanism connected with the driving mechanism, and the driving mechanism drives the drying mechanism to enter the accommodating cavity to locally dry the substrate; the drying mechanism comprises a bottom plate, a positioner and a dryer, wherein the bottom plate is connected with the driving mechanism, the positioner is arranged on the bottom plate, the dryer is driven by the driving mechanism to dry a target area, and the target area is an area, positioned by the positioner, of the substrate, on which the solution is not dried. In the embodiment of the application, the target area which is not dried by the solution is positioned through the local drying structure for local drying, so that VCD mura caused by the fact that the solution is not dried is reduced or even stopped, and the product yield can be greatly improved.

Description

Vacuum drying device, substrate vacuum drying method and vacuum drying equipment

Technical Field

The application relates to the technical field of ink-jet printing, in particular to a vacuum drying device, a substrate vacuum drying method and vacuum drying equipment.

Background

In the conventional preparation of the IJP (Ink Jet Printing) OLED (Organic Light Emitting Diode, OLED, organic light emitting diode) device, after the printer performs HI, HT, EML Printing, the VCD (vacuum dry) process needs to be performed in the next step because the device is in a liquid state, so that the solvent in the solution is quickly volatilized, and a dry HI, HT, EML film layer is obtained. However, in the conventional VCD process, problems such as non-drying of the solution occur, and there is no corresponding monitoring measure in the process, so that the problems such as non-drying cannot be fed back and solved in time, and the subsequent problems such as uneven film thickness and chromaticity deviation occur, especially the problem that the solution is not dried, and the VCD mura is caused, and these problems seriously affect the product yield.

Disclosure of Invention

The embodiment of the application provides a vacuum drying device, a substrate vacuum drying method and vacuum drying equipment, which are used for locally drying a target area of which the solution is not dried through a local drying structure, so that VCD mura caused by the fact that the solution is not dried is reduced or even stopped, and the product yield can be greatly improved.

In a first aspect, embodiments of the present application provide a vacuum drying apparatus, including:

a base, a base seat and a base seat,

the drying chamber comprises a chamber arranged on the base and a chamber door movably connected with the chamber, the chamber is provided with a containing chamber, and the chamber door is used for allowing a substrate to be dried to enter the containing chamber;

the local drying structure comprises a driving mechanism arranged on the base and a drying mechanism connected with the driving mechanism, wherein the driving mechanism drives the drying mechanism to enter the accommodating cavity to locally dry the substrate; the drying mechanism comprises a bottom plate connected with the driving mechanism, a positioner arranged on the bottom plate and a dryer, wherein the driving mechanism drives the dryer to dry a target area, and the target area is an area, positioned by the positioner, of the substrate, where the solution is not dried.

In some embodiments, the dryer includes at least one vacuum tube open at one end, and the vacuum tube is provided with an extraction port.

In some embodiments, the vacuum tube is movably connected to the base plate.

In some embodiments, the locator includes at least one camera.

In a second aspect, the present application provides a method for vacuum drying a substrate, including:

opening a cavity door of the vacuum drying device after the vacuum drying process is finished;

controlling a driving mechanism to move a drying mechanism of the vacuum drying device into a cavity;

positioning a target area of the substrate to be dried, which is not dried by the solution, through a positioner of the drying mechanism;

and controlling a dryer of the drying mechanism to dry the target area.

In some embodiments, after the vacuum drying process is finished, before opening the cavity door of the vacuum drying apparatus, the method comprises:

placing the substrate to be dried into a cavity in the vacuum drying device;

and closing the cavity door, and executing a vacuum drying process.

In some embodiments, the positioning, by the positioner of the drying mechanism, a target area of the substrate to be dried that is not dried with the solution includes:

acquiring target substrate information of a substrate to be dried;

determining a target motion track according to the corresponding relation between the preset motion track and the substrate information and the target substrate information;

controlling a camera of the positioner to move according to the target motion trail, and simultaneously acquiring image information of the substrate to be dried through the camera;

and positioning the target area according to the image information.

In some embodiments, the controlling the dryer of the drying mechanism to dry the target area includes:

controlling the drying mechanism to move to the position that one end of a vacuum tube opening of the dryer is abutted against the target area;

and controlling the vacuum tube to carry out a vacuum drying process on the target area.

In some embodiments, the controlling the drying mechanism to move to an end of the vacuum tube opening of the dryer to abut the target area comprises:

controlling the bottom plate of the drying mechanism to move until the vacuum tube reaches the preset range of the target area;

and controlling the vacuum tube to move until one end of the opening of the vacuum tube is abutted with the target area.

In a third aspect, the present application provides a vacuum drying apparatus, comprising a vacuum extraction device and a vacuum drying device as described in any one of the above, wherein the extraction opening of the vacuum extraction device is in communication with the chamber of the vacuum drying device.

According to the vacuum drying device, the substrate vacuum drying method and the vacuum drying equipment, the local drying structure is arranged, after the vacuum drying process is carried out on the whole substrate to be dried through the drying chamber, the target area which is not dried by the solution is positioned through the local drying structure to carry out local drying, so that VCD mura caused by the fact that the solution is not dried is reduced or even stopped, and the product yield can be greatly improved.

Drawings

Technical solutions and other advantageous effects of the present application will be made apparent from the following detailed description of specific embodiments of the present application with reference to the accompanying drawings.

Fig. 1 is a schematic structural view of a vacuum drying apparatus in an embodiment of the present application;

FIG. 2 is a schematic flow chart of a method for vacuum drying a substrate according to an embodiment of the present application;

fig. 3 is a flow chart of a method for vacuum drying a substrate according to another embodiment of the present application.

Reference numerals:

1. a base; 2. a drying chamber; 21. a chamber; 22. a cavity door; 3. a local drying structure; 31. a driving mechanism; 32. a drying mechanism; 321. a bottom plate; 322. a dryer; 323. a positioner.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It will be apparent that the described embodiments are only some, but not all, of the embodiments of the present application. All other embodiments, which can be made by those skilled in the art based on the embodiments herein without making any inventive effort, are intended to be within the scope of the present application.

In the description of the present application, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," etc. indicate or are based on the orientation or positional relationship shown in the drawings, merely for convenience of description and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more of the described features. In the description of the present application, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically connected, electrically connected or can be communicated with each other; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.

In this application, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, and may also include the first and second features not being in direct contact but being in contact with each other by way of additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

The following disclosure provides many different embodiments or examples for implementing different structures of the present application. In order to simplify the disclosure of the present application, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present application. Furthermore, the present application may repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, and which do not in themselves indicate the relationship between the various embodiments and/or arrangements discussed. In addition, the present application provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize the application of other processes and/or the use of other materials.

Referring to fig. 1, the embodiment of the application provides a vacuum drying device, which includes a base 1, a drying chamber 2 and a local drying structure 3, wherein the drying chamber 2 and the local drying structure 3 are both disposed on the base 1, the base 1 provides a fixed support for other components, a substrate to be dried is firstly subjected to a vacuum drying process through the drying chamber 2, is subjected to overall vacuum drying, and then is subjected to targeted local drying through the local drying structure 3 in an area of the substrate to be dried, which is not dried by a solution.

The drying chamber 2 includes a chamber 21 and a chamber door 22, the chamber 21 is provided on the base 1, and the chamber 21 is provided with a receiving chamber in which a substrate to be dried is placed to perform a vacuum drying process. The cavity door 22 is movably connected with the cavity 21, and the cavity door 22 is used for allowing the substrate to be dried and the local drying structure 3 to enter and exit the accommodating cavity.

When the substrate to be dried is placed in the accommodating cavity to perform a vacuum drying process, and the whole substrate to be dried is vacuum dried, the cabin door is closed, and a vacuum chamber is formed in the whole drying chamber 2. When the partial drying structure 3 is controlled to perform vacuum drying of the partial of the substrate to be dried in the chamber 21, the door is opened, and a vacuum chamber is formed for the partial area to be dried by the partial drying structure 3.

The local drying structure 3 comprises a driving mechanism 31 and a drying mechanism 32, wherein the driving mechanism 31 is arranged on the base 1, the drying mechanism 32 is connected with the driving mechanism 31, and the driving mechanism 31 drives the drying mechanism 32 to enter and exit the accommodating cavity so as to locally dry the substrate. The drying mechanism 32 comprises a base plate 321, a positioner 323 and a dryer 322, the base plate 321 is connected with the driving mechanism 31, the positioner 323 and the dryer 322 are both arranged on the base plate 321, the positioner 323 is used for collecting relevant information of the dried substrate to position a target area which is to be locally dried when the solution is not dried, and the dryer 322 is used for drying the area positioned by the positioner 323. When the driving mechanism 31 drives the bottom plate 321 to move, the positioner 323 and the dryer 322 are simultaneously driven to move, so as to realize the positioning process of the positioner 323 and the drying process of the dryer 322. The drive mechanism 31 includes, but is not limited to, a robotic arm, a slide rail, and the like.

In this embodiment, the positioner 323 of the local drying structure 3 can monitor the film formation condition, and perform the secondary film formation on the substrate which is not completely formed, thereby reducing VCD mura.

In some embodiments of the present application, the positioner 323 includes at least one camera for acquiring image information of the substrate to be dried, and the region of the solution that is not dried is greatly different from the region that is dried in image, so that the target region of the solution that is not dried is positioned by analyzing the image information. In order to reduce the probability of positioning errors and increase the image acquisition area to reduce the movement of the cameras, a plurality of cameras are arranged at intervals, and the arrangement mode of the plurality of cameras is determined based on factors such as the acquisition range and the precision of the cameras, and the embodiment is not particularly limited. In addition, the camera is fixed in a bracket mode in consideration of the fact that the vacuum environment has a great challenge on the fixation of the camera.

In some embodiments of the present application, the dryer 322 includes at least one vacuum tube with an opening at one end, and the vacuum tube is provided with an air extraction opening, when the positioner 323 positions the target area where the solution is not dried, the driving mechanism 31 drives the bottom plate 321 to move, and further drives the vacuum tube to reach the corresponding area, so that one end of the vacuum tube is abutted to the non-dried area of the substrate, and then air is extracted through the air extraction opening to form a vacuum cavity in the vacuum tube, so as to execute the vacuum drying process. In order to ensure the sealing property of the vacuum tube, one end of the vacuum tube, that is, the end abutting against the substrate, may be an elastic member or the whole vacuum tube may be an elastic member. When a plurality of vacuum tubes are arranged, a plurality of non-dried areas can be dried at the same time, so that the efficiency of local drying is improved. In addition, the sizes of one ends of the vacuum tube openings can be the same or different, when the sizes are the same, the corresponding substrate is divided into a plurality of local areas, one ends of the vacuum tube openings can cover the local areas, and when the sizes are different, the vacuum tube with the corresponding size can be selected according to the sizes of the non-dried areas to execute the vacuum drying process.

In some embodiments of the present application, the vacuum tube is movably connected with the bottom plate 321, when there are a plurality of non-dried areas that need to be locally dried, the vacuum tube can be adjusted according to the positions of the respective areas, so as to realize simultaneous drying of the plurality of non-dried areas, and improve drying efficiency. In addition, when the driving mechanism 31 moves, the whole drying mechanism 32 is driven to move, the overall target is larger, the accuracy of movement adjustment is lower, and the contact position of the vacuum tube and the substrate may not be accurately controlled, so that the drying mechanism 32 can be moved through the driving mechanism 31 first, then the vacuum tube is controlled to move on the bottom plate 321 to be abutted against the substrate, namely, rough adjustment is performed first, then fine adjustment is performed, and the vacuum tube is accurately abutted against the target area where the solution is not dried.

In some embodiments of the present application, the vacuum drying apparatus may further be provided with an integrated controller, where the integrated controller is connected to each movable member in the vacuum drying apparatus, and the movable member includes the cavity door 22, the driving mechanism 31, the positioner 323, and the dryer 322, and the integrated controller is configured to control the movement of each movable member and perform the respective procedures, such as programming the displacement of the camera and the vacuum tube. In the IJP OLED product development process, reduce even stop the VCD mura that causes because the solution is not dry, can greatly improve the product yield, highly automated equipment's introduction has greatly reduced the waste of manpower and materials simultaneously.

In this embodiment, the substrate to be dried is placed in the chamber 21 in the vacuum drying apparatus, the chamber door 22 is closed, and the vacuum drying process is performed on the whole substrate to be dried. After the vacuum drying process is finished, the cavity door 22 is opened, the driving mechanism 31 moves the drying mechanism 32 into the cavity 21, then the driving mechanism 31 controls the bottom plate 321 to move, and then the positioner 323 is driven to move, and the positioner 323 acquires the image information of the substrate to be dried so as to position the target area of the substrate, which is not dried by the solution. The driving mechanism 31 controls the bottom plate 321 to move, and then drives the vacuum tube to move to abut against the target area, alternatively, the vacuum tube can move relative to the bottom plate 321, so that the abutment between the vacuum tube and the target area is more accurate. And then, pumping air through the pumping hole of the vacuum tube to form a vacuum cavity in the vacuum tube, and then executing a vacuum drying process to finish the local drying of the target area. It should be noted that, the movement, information collection and analysis of each component may be completed through an integrated controller, or may be completed through the control of the controller of each component, or may be controlled by both the above two methods, which is not limited in particular.

In this embodiment, after the end of the VCD process in the drying chamber 2, the drying mechanism 32 is controlled to enter the VCD chamber 21, and the substrate is scanned by the positioner 323 to position the non-dried area. After the scan is completed, the undried area is subjected to a directional VCD process by a dryer 322, and thus the VCD mura free ends.

Referring to fig. 2, an embodiment of the present application provides a method for vacuum drying a substrate, which is applied to the vacuum drying apparatus described in any one of the foregoing embodiments, and the method includes:

s101, after the vacuum drying process is finished, opening a cavity door of a vacuum drying device;

s102, controlling a driving mechanism to move a drying mechanism of the vacuum drying device into a cavity;

s103, positioning a target area of the substrate to be dried, which is not dried by the solution, through a positioner of the drying mechanism;

and S104, controlling a dryer of the drying mechanism to dry the target area.

Specifically, after the vacuum drying process of the whole substrate to be dried is finished, a cavity door of the vacuum drying device is opened, and the driving mechanism is controlled to move the drying mechanism of the vacuum drying device into the cavity to locally dry the substrate to be dried. And acquiring relevant information through a positioner of the drying mechanism, analyzing and positioning a target area of the substrate to be dried, which is not dried by the solution, and then controlling a dryer of the drying mechanism to dry the target area. The driving mechanism may be a mechanical arm, a sliding rail, etc., the positioner may be a camera, a sensor, etc., the dryer may be a vacuum tube, etc., and the embodiment is not particularly limited.

In this embodiment, the film forming condition is monitored by the positioner with a local drying structure, and the substrate which is not completely formed is formed with a film for the second time, so that the VCD mura is reduced. In the IJP OLED product development process, reduce even stop the VCD mura that causes because the solution is not dry, can greatly improve the product yield, highly automated equipment's introduction has greatly reduced the waste of manpower and materials simultaneously.

In some embodiments of the present application, after the step S101 and the vacuum drying process are finished, the opening of the cavity door of the vacuum drying apparatus includes: s201, placing the substrate to be dried into a cavity of the vacuum drying device; s202, closing the cavity door, and executing a vacuum drying process.

Specifically, the substrate to be dried is placed in a chamber in a vacuum drying device, a chamber door is closed, and a vacuum drying process is performed on the whole substrate to be dried, wherein the vacuum drying process is a corresponding process specified according to solution information on the substrate, and the embodiment is not limited specifically.

In some embodiments of the present application, as shown in fig. 3, step S103, positioning, by a positioner of the drying mechanism, a target area of the substrate to be dried, where the solution is not dried, includes: s301, acquiring target substrate information of a substrate to be dried; s302, determining a target motion track according to the corresponding relation between a preset motion track and substrate information and the target substrate information; s303, controlling a camera of the positioner to move according to the target motion trail, and simultaneously acquiring image information of the substrate to be dried through the camera; s304, positioning the target area according to the image information.

Specifically, target substrate information of the substrate to be dried is obtained, the target substrate information includes, but is not limited to, substrate type, size, and the like, and for different target substrate information, the manner in which the positioner obtains relevant information for positioning is different, for example, when the substrate to be dried is large, the positioner needs to be moved to acquire information on the surface of the substrate one by one, so that the target movement track of the positioner is determined according to the corresponding relation between the preset movement track and the substrate information and the target substrate information. The corresponding relation between the motion trail and the substrate information is preset, and the purpose is to obtain clear and effective information for positioning under any condition through the motion trail suitable for different substrate information, so that the positioning result is accurate.

And controlling a camera of the positioner to move according to the target motion trail, and acquiring image information of the substrate to be dried while the camera moves. It should be noted that, the movement of the bottom plate of the drying mechanism may be controlled to drive the camera to move, or the movement of the camera relative to the bottom plate may be controlled, and the embodiment is not limited specifically.

In order to reduce the probability of positioning errors and increase the image acquisition area to reduce the movement of the cameras, a plurality of cameras are arranged at intervals, and the arrangement mode of the plurality of cameras is determined based on factors such as the acquisition range and the precision of the cameras, and the embodiment is not particularly limited. In addition, the camera is fixed in a bracket mode in consideration of the fact that the vacuum environment has a great challenge on the fixation of the camera.

After the vacuum drying process is carried out on the substrate to be dried, the color and the morphology of the dried area and the color and morphology of the solution non-dried area are obviously different, so that the image information of the substrate to be dried is acquired through a camera, and the target area of the solution non-dried can be positioned by analyzing the image information. The obtained image information of the substrate to be dried can be compared with each other, the dried area and the area not dried by the solution are distinguished, and then the obtained image information is compared with the stored template image of the dried area and the template image of the area not dried by the solution, so that the target area not dried by the solution is further determined. It should be noted that the foregoing is merely illustrative of one way of locating the target area through the image information of the substrate to be dried, and should not be construed as limiting the present embodiment, but the present embodiment is not limited to specific limitation, and may actually be identified and located through a neural network learning method or the like.

In some embodiments of the present application, S104, controlling the dryer of the drying mechanism to dry the target area includes: s401, controlling the drying mechanism to move until one end of a vacuum tube opening of the dryer is abutted against the target area; s402, controlling the vacuum tube to carry out a vacuum drying process on the target area.

Specifically, after a target area of the substrate to be dried, which is not dried by the solution, is determined, a bottom plate of the drying mechanism is controlled to move, so that the vacuum tube is driven to reach the corresponding area, one end of the vacuum tube is abutted against the non-dried area of the substrate, then the vacuum tube is pumped through a pumping hole to form a vacuum cavity, and a vacuum drying process is executed. In order to ensure the sealing property of the vacuum tube, one end of the vacuum tube, that is, the end abutting against the substrate, may be an elastic member or the whole vacuum tube may be an elastic member. When a plurality of vacuum tubes are arranged, a plurality of non-dried areas can be dried at the same time, so that the efficiency of local drying is improved. In addition, the sizes of one ends of the vacuum tube openings can be the same or different, when the sizes are the same, the corresponding substrate is divided into a plurality of local areas, one ends of the vacuum tube openings can cover the local areas, and when the sizes are different, the vacuum tube with the corresponding size can be selected according to the sizes of the non-dried areas to execute the vacuum drying process.

In some embodiments of the present application, S401, controlling the drying mechanism to move to an end of a vacuum tube opening of the dryer to abut against the target area includes: s501, controlling the bottom plate of the drying mechanism to move until the vacuum tube reaches the preset range of the target area; s502, controlling the vacuum tube to move until one end of the opening of the vacuum tube is abutted against the target area.

Specifically, when the driving mechanism moves, the whole drying mechanism is driven to move, the whole target is larger, the moving adjustment precision is lower, and the contact position of the vacuum tube and the substrate can not be accurately controlled, so that the vacuum tube and the bottom plate in the drying mechanism can be movably connected, the bottom plate is firstly controlled to drive the vacuum tube to move integrally, then the vacuum tube is controlled to move on the bottom plate to be abutted with the substrate, namely, the vacuum tube is firstly coarsely adjusted and then finely adjusted, so that the vacuum tube is accurately abutted with a target area with undried solution.

The embodiment of the application provides vacuum drying equipment, which comprises a vacuum extraction device and any one of the vacuum drying devices, wherein an extraction opening of the vacuum extraction device is communicated with a cavity of the vacuum drying device.

In some embodiments of the present application, as shown in fig. 1, the vacuum drying apparatus includes:

a base 1, a base plate and a base plate,

the drying chamber 2 comprises a chamber 21 arranged on the base 1 and a chamber door 22 movably connected with the chamber 21, wherein the chamber 21 is provided with a containing chamber, and the chamber door 22 is used for allowing a substrate to be dried to enter the containing chamber;

the local drying structure 3 comprises a driving mechanism 31 arranged on the base 1 and a drying mechanism 32 connected with the driving mechanism 31, wherein the driving mechanism 31 drives the drying mechanism 32 to enter the accommodating cavity to locally dry the substrate; the drying mechanism 32 includes a base plate 321 connected to the driving mechanism 31, a positioner 323 provided on the base plate 321, and a dryer 322, and the driving mechanism 31 drives the dryer 322 to dry the region of the substrate positioned by the positioner 323.

In some embodiments of the present application, the dryer 322 includes at least one vacuum tube with one end open, and the vacuum tube is provided with an extraction port.

In some embodiments of the present application, the vacuum tube is movably connected to the base plate 321.

In some embodiments of the present application, the locator 323 includes at least one camera.

In the foregoing embodiments, the descriptions of the embodiments are emphasized, and for parts of one embodiment that are not described in detail, reference may be made to related descriptions of other embodiments.

The technical features of the above embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The foregoing has described in detail an inkjet printing drying apparatus and device according to embodiments of the present application, and specific examples have been used herein to illustrate the principles and embodiments of the present application, where the foregoing examples are provided to assist in understanding the methods and core ideas of the present application; meanwhile, as those skilled in the art will vary in the specific embodiments and application scope according to the ideas of the present application, the contents of the present specification should not be construed as limiting the present application in summary.

Claims

1. A vacuum drying apparatus, comprising:

a base, a base seat and a base seat,

the local drying structure comprises a driving mechanism arranged on the base and a drying mechanism connected with the driving mechanism, wherein the driving mechanism drives the drying mechanism to enter the accommodating cavity to locally dry the substrate; the drying mechanism comprises a bottom plate connected with the driving mechanism, a positioner and a dryer, wherein the positioner and the dryer are arranged on the bottom plate, the driving mechanism drives the dryer to dry a target area, the target area is an area, positioned by the positioner, of the substrate, which is not dried by solution, the positioner comprises at least one camera, the target area is determined according to image information of the substrate to be dried, acquired by the camera, when the camera moves according to a target motion track, and the target motion track is determined according to a preset corresponding relation between the motion track and the substrate information and the target substrate information of the substrate to be dried.

2. Vacuum drying apparatus according to claim 1, wherein the dryer comprises at least one vacuum tube open at one end, and wherein the vacuum tube is provided with an extraction opening.

3. The vacuum drying apparatus of claim 2, wherein said vacuum tube is movably connected to said base plate.

4. A vacuum drying method for a substrate, characterized by being applied to the vacuum drying apparatus according to any one of claims 1 to 3, comprising:

positioning a target area of the substrate to be dried, which is not dried by the solution, through a positioner of the drying mechanism; the method specifically comprises the following steps: acquiring target substrate information of a substrate to be dried; determining a target motion track according to the corresponding relation between the preset motion track and the substrate information and the target substrate information; controlling a camera of the positioner to move according to the target motion trail, and simultaneously acquiring image information of the substrate to be dried through the camera; positioning the target area according to the image information;

and controlling a dryer of the drying mechanism to dry the target area.

5. The method of claim 4, wherein after the vacuum drying process is completed and before the chamber door of the vacuum drying apparatus is opened, comprising:

placing the substrate to be dried into a cavity in the vacuum drying device;

and closing the cavity door, and executing a vacuum drying process.

6. The method of claim 4, wherein controlling the dryer of the drying mechanism to dry the target area comprises:

7. The method of claim 6, wherein controlling the drying mechanism to move to an end of the vacuum tube opening of the dryer to abut the target area comprises:

8. A vacuum drying apparatus comprising a vacuum extraction device and a vacuum drying device according to any one of claims 1-3, wherein the extraction opening of the vacuum extraction device is in communication with the chamber of the vacuum drying device.