CN111452517A - Reduced pressure drying device and reduced pressure drying method - Google Patents
Reduced pressure drying device and reduced pressure drying method Download PDFInfo
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- CN111452517A CN111452517A CN202010296984.8A CN202010296984A CN111452517A CN 111452517 A CN111452517 A CN 111452517A CN 202010296984 A CN202010296984 A CN 202010296984A CN 111452517 A CN111452517 A CN 111452517A
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- cavity
- pressure drying
- hole
- glass substrate
- reduced
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0015—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
- B41J11/002—Curing or drying the ink on the copy materials, e.g. by heating or irradiating
Abstract
The invention discloses a decompression drying device and a decompression drying method, wherein the decompression drying device comprises: a cavity having an accommodating space; the condensation plate is provided with a through hole, is accommodated in the accommodating space and is arranged corresponding to the glass substrate; and the air pumping port is arranged on the side surface of the cavity and is positioned above the condensing plate. According to the invention, the condensing plate is arranged in the decompression drying device, the condensing plate is provided with the through hole, at least part of the solvent is concentrated on the upper surface of the condensing plate through the through hole, and the condensation liquid drops of the solvent are prevented from dropping to pollute the glass substrate to a certain extent; meanwhile, the condensation plate divides the cavity into a first cavity and a second cavity, wherein an air suction opening is arranged in the first cavity, so that residual condensation liquid drops can be quickly removed from the cavity, the glass substrate is prevented from being polluted, and the solvent in drying can be uniformly volatilized.
Description
Technical Field
The invention relates to the technical field of display, in particular to a decompression drying device and a decompression drying method.
Background
At present, the development trend of O L ED is toward inkjet printing, but in the inkjet printing process, there are drying, baking, printing and other processes, and the printed film has at least three layers (a hole injection layer, a transport layer and a light emitting layer), and after each printing, the film needs to be dried and baked, and during the drying process of glass, because the film needs to be quickly and uniformly volatilized, the film reaches high uniformity, therefore, a condensing plate is arranged above the substrate to perform low temperature treatment, so as to control uniform volatilization of liquid droplets.
In summary, the present decompression drying device has a technical problem that the condensed liquid drops on the condensing plate easily drop to contaminate the glass substrate.
Disclosure of Invention
The embodiment of the invention provides a reduced-pressure drying device and a reduced-pressure drying method, which are used for solving the technical problem that liquid drops condensed above a condensation plate are easy to drop to pollute a glass substrate in the conventional reduced-pressure drying device.
In order to solve the above problem, the present invention provides, in a first aspect, a reduced-pressure drying apparatus for reduced-pressure drying of a glass substrate, comprising:
a cavity having an accommodating space;
the condensation plate is provided with a through hole, is accommodated in the accommodating space and is arranged corresponding to the glass substrate; and
and the air pumping port is arranged on the side surface of the cavity.
In some embodiments of the present invention, there are a plurality of the through holes, and the plurality of the through holes are arranged in an array.
In some embodiments of the invention, the through-hole is a circular hole having a diameter within 5mm to 30 mm.
In some embodiments of the present invention, the condensation plate includes a plurality of blocking pieces arranged in an array, the blocking pieces are connected with switches, and the blocking pieces correspond to the through holes one to one.
In some embodiments of the invention, the flap is a rotary blade or a scissor blade.
In some embodiments of the present invention, the cavity is further divided into a first chamber and a second chamber by the condensation plate, and the pumping opening is opened in the first chamber to eliminate condensed liquid droplets on the condensation plate.
In some embodiments of the present invention, the pumping holes include a first pumping hole and a second pumping hole symmetrically opened at two sides of the cavity.
In some embodiments of the present invention, the air pumping port is connected to an air pumping pipeline, and an air pumping valve is disposed between the air pumping pipeline and the air pumping port.
In a second aspect, the present invention provides a reduced pressure drying method applied to the above reduced pressure drying apparatus, including the steps of:
placing a glass substrate to be dried in a cavity with an accommodating space;
the extraction opening arranged on the side surface of the cavity is kept closed, coating and drying processes are carried out on the glass substrate, and condensed liquid drops are gathered on a condensing plate arranged corresponding to the glass substrate;
after the drying process is finished, pumping away the condensed liquid drops through the air pumping hole; and
and after air exhaust is finished, the air exhaust port is closed.
In some embodiments of the present invention, the condensation plate further includes a through hole and a blocking piece, the blocking piece is connected with a switch, and the switch controls the blocking piece to open and close automatically.
Compared with the conventional decompression drying device, the decompression drying device is provided with the condensing plate, the condensing plate is provided with the through hole, at least part of solvent is concentrated and gathered on the upper surface of the condensing plate through the through hole, and condensed liquid drops of the solvent are prevented from dropping to pollute the glass substrate to a certain extent; meanwhile, the condensation plate divides the cavity into a first cavity and a second cavity, wherein an air suction opening is arranged in the first cavity, so that residual condensation liquid drops can be quickly removed from the cavity, the glass substrate is prevented from being polluted, and the solvent in drying can be uniformly volatilized.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic view of a vacuum drying apparatus according to an embodiment of the present invention;
FIG. 2 is a top view of a cold plate according to an embodiment of the present invention;
FIG. 3 is a schematic view of a via in one embodiment of the present invention;
FIG. 4 is a flow diagram of a reduced pressure drying process in one embodiment of the present invention; and
FIG. 5 is a schematic view of a reduced pressure drying apparatus according to an embodiment of the present invention.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
The prior decompression drying device has the technical problem that liquid drops condensed above a condensing plate are easy to drop to pollute a glass substrate.
Accordingly, the embodiment of the invention provides a reduced-pressure drying device and a reduced-pressure drying method. The details are described below.
First, a decompression drying device is provided in an embodiment of the present invention, as shown in fig. 1, which is a schematic structural diagram of the decompression drying device in an embodiment of the present invention. The reduced-pressure drying apparatus is used for drying a glass substrate 102 under reduced pressure, and includes: a cavity 101 having an accommodation space; a condensation plate 103 having a through hole 1031, accommodated in the accommodating space and disposed corresponding to the glass substrate 102; and the pumping hole 104 is arranged on the side surface of the cavity 101.
Compared with the conventional decompression drying device, the decompression drying device is provided with the condensation plate 103, the condensation plate 103 is provided with the through holes 1031, at least part of the solvent is concentrated on the upper surface of the condensation plate 103 through the through holes 1031, and the condensed liquid drops 107 of the solvent are prevented from dripping to pollute the glass substrate 102 to a certain extent.
On the basis of the above embodiment, as shown in fig. 2, it is a top view of the condensation plate in an embodiment of the present invention. The number of the through holes 1301 may be one or more. When the area of the glass substrate 102 is small, the condensation plate 103 has only one through hole 1301 in the center; when the glass substrate 102 has a large area, the condensation plate 103 has a plurality of through holes 1301. Preferably, the through holes 1301 are arranged in an array, so that the air flow generated by drying the glass substrate 102 can uniformly pass through the through holes 1301 upwards. Preferably, the through hole 1301 is a circular hole with the diameter within 5 mm-30 mm.
The cavity 101 is further divided into a first chamber and a second chamber by the condensing plate 103, and the pumping hole 104 is opened in the first chamber to eliminate condensed liquid droplets on the condensing plate 103. Preferably, the condensation plate 103 divides the chamber 101 into a first chamber and a second chamber, wherein the first chamber is located above the second chamber, and the second chamber is located below the first chamber, and the pumping hole 104 is disposed in the first chamber, so that residual condensed liquid droplets 107 can be rapidly removed from the chamber 101, thereby preventing the glass substrate 102 from being contaminated, and uniformly volatilizing a solvent during drying.
In another embodiment of the present invention, as shown in fig. 3, a schematic view of a through hole in one embodiment of the present invention is shown. The condensation plate 103 includes a plurality of blocking pieces 1032 arranged in an array, the blocking pieces 1032 are connected to switches (not shown in the figure), and the blocking pieces 1032 correspond to the through holes 1031 one to one. The switch can control the blocking plate 1032 to selectively close the through hole 1031 according to requirements, so as to meet the requirement of the first chamber of the cavity 101 for a specific vacuum degree. Preferably, the baffles 1032 are rotary blades or scissor blades.
Preferably, the material of the condensation plate 103 is stainless steel, so as to prevent the condensed solvent from corroding the condensation plate 103, and prevent the influence on the vacuum degree of the first chamber of the cavity 101 and the production quality of the glass substrate 102.
In the embodiment of the present invention, the pumping holes 104 include a first pumping hole and a second pumping hole symmetrically opened at two sides of the cavity. If only one-side pumping is performed, the air pressure in the first chamber of the chamber 101 is not uniform, and the cleaning effect of the side close to the pumping hole 104 and the cleaning effect of the side far from the pumping hole 104 on the residual condensed liquid drops 107 are different; if the first air exhaust port and the second air exhaust port are symmetrically arranged on two sides, the condensing plate 103 can be uniformly cleaned, and the cleaning effect is better.
The pumping hole 104 is connected to a pumping line 105, a pumping valve 106 is disposed between the pumping line 105 and the pumping hole 104, the pumping valve 106 can control the opening and closing of the pumping process, the air flow rate when the pumping process is opened, and the like, and a vacuum pump is connected to the other end of the pumping line 105 away from the pumping hole 104, so as to pump the cavity 101 into a low pressure or a negative pressure.
It should be noted that, in some embodiments of the present invention, the condensation plate 103 further includes a temperature reduction mechanism such as a condensation pipe, a condensation surface of the condensation plate 103 faces the glass substrate 102, and an area of the condensation plate 103 is larger than an area of the glass substrate 102. In the present description, the solvent is a material such as a hole injection layer, a transport layer, and a light-emitting layer that needs to be formed on the surface of the glass substrate 102, and is generally suitable for inkjet printing.
In order to better utilize the reduced pressure drying apparatus in the embodiment of the present invention, on the basis of the reduced pressure drying apparatus, a reduced pressure drying method is further provided in the embodiment of the present invention, as shown in fig. 4, which is a flow chart of the reduced pressure drying method in an embodiment of the present invention. The reduced pressure drying method comprises the following steps:
s1, placing the glass substrate 102 to be dried in a cavity 101 with a containing space;
s2, keeping the extraction opening 104 arranged on the side surface of the cavity 101 closed, coating and drying the glass substrate 102, and gathering the condensed liquid drops 107 on the condensing plate 103 arranged corresponding to the glass substrate 102;
s3, after the drying process is finished, pumping away the condensed liquid drops 107 through the pumping hole 104; and
and S4, after air extraction is finished, closing the air extraction opening 104.
Preferably, the condensation plate 103 further includes a through hole 1031 and a blocking piece 1032, the blocking piece 1032 is connected with a switch, and the switch controls the blocking piece 1032 to open and close automatically.
Specifically, as shown in fig. 5, a schematic view of a decompression drying apparatus according to an embodiment of the present invention is shown when performing the coating and drying processes. The pumping hole 104 is kept closed, the through hole 1031 is at least partially opened, and at least part of the solvent is condensed on the upper surface of the condensation plate 103 along with the ascending air flow to form the condensed liquid drops 107; after the drying process is completed, a cleaning process is performed, as shown in fig. 1, the through hole 1031 is closed to prevent the condensed liquid droplets 107 from dripping and contaminating the glass substrate 102, the condensed liquid droplets 107 are pumped out through the pumping hole 104, and after the cleaning process is completed, the pumping hole 104 is closed to prepare for the next process.
In the above embodiments, the descriptions of the respective embodiments have respective emphasis, and parts that are not described in detail in a certain embodiment may refer to the above detailed descriptions of other embodiments, and are not described herein again. In a specific implementation, each unit or structure may be implemented as an independent entity, or may be combined arbitrarily to be implemented as one or several entities, and the specific implementation of each unit or structure may refer to the foregoing method embodiment, which is not described herein again. The above operations can be implemented in the foregoing embodiments, and are not described in detail herein.
The above embodiments of the present invention are described in detail, and the principle and the implementation of the present invention are explained by applying specific embodiments, and the above description of the embodiments is only used to help understanding the method of the present invention and the core idea thereof; meanwhile, for those skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.
Claims (10)
1. A reduced-pressure drying apparatus for reduced-pressure drying of a glass substrate, comprising:
a cavity having an accommodating space;
the condensation plate is provided with a through hole, is accommodated in the accommodating space and is arranged corresponding to the glass substrate; and
and the air pumping port is arranged on the side surface of the cavity.
2. The reduced-pressure drying apparatus according to claim 1, wherein the through-hole is plural, and the plural through-holes are arranged in an array.
3. The reduced-pressure drying apparatus according to claim 1, wherein the through-hole is a circular hole having a diameter within 5mm to 30 mm.
4. The reduced-pressure drying device according to claim 2, wherein the condensation plate comprises a plurality of baffle plates arranged in an array, the baffle plates are connected with switches, and the baffle plates correspond to the through holes one by one.
5. The reduced pressure drying apparatus according to claim 4, wherein the baffle is a rotary blade or a scissor blade.
6. The decompression drying device according to claim 1, wherein the cavity is further partitioned into a first chamber and a second chamber by the condensation plate, and the suction opening is opened in the first chamber to remove the condensation droplets on the condensation plate.
7. The reduced-pressure drying device according to claim 1 or 6, wherein the air-extracting openings include a first air-extracting opening and a second air-extracting opening which are symmetrically formed on both sides of the chamber.
8. The decompression drying device according to claim 1, wherein the air suction port is connected with an air suction pipeline, and an air suction valve is arranged between the air suction pipeline and the air suction port.
9. A reduced pressure drying method is characterized by comprising the following steps:
placing a glass substrate to be dried in a cavity with an accommodating space;
the extraction opening arranged on the side surface of the cavity is kept closed, coating and drying processes are carried out on the glass substrate, and condensed liquid drops are gathered on a condensing plate arranged corresponding to the glass substrate;
after the drying process is finished, pumping away the condensed liquid drops through the air pumping hole; and
and after air exhaust is finished, the air exhaust port is closed.
10. The reduced-pressure drying method according to claim 9, wherein the condensation plate further comprises a through hole and a baffle, and a switch is connected to the baffle and controls the baffle to open and close automatically.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010296984.8A CN111452517A (en) | 2020-04-15 | 2020-04-15 | Reduced pressure drying device and reduced pressure drying method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010296984.8A CN111452517A (en) | 2020-04-15 | 2020-04-15 | Reduced pressure drying device and reduced pressure drying method |
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| CN111452517A true CN111452517A (en) | 2020-07-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010296984.8A Pending CN111452517A (en) | 2020-04-15 | 2020-04-15 | Reduced pressure drying device and reduced pressure drying method |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101946968A (en) * | 2010-08-26 | 2011-01-19 | 王宁州 | Multifunctional dryer |
| CN204011381U (en) * | 2014-08-19 | 2014-12-10 | 合肥鑫晟光电科技有限公司 | A kind of combination cold plate and etching apparatus |
| CN107315325A (en) * | 2017-07-18 | 2017-11-03 | 武汉华星光电半导体显示技术有限公司 | Decompression drying equipment and decompression drying method |
| CN207257129U (en) * | 2017-10-17 | 2018-04-20 | 广东聚华印刷显示技术有限公司 | Condensation structure and decompression dry device |
| CN110116559A (en) * | 2019-04-23 | 2019-08-13 | 深圳市华星光电半导体显示技术有限公司 | Vacuum dryer |
-
2020
- 2020-04-15 CN CN202010296984.8A patent/CN111452517A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101946968A (en) * | 2010-08-26 | 2011-01-19 | 王宁州 | Multifunctional dryer |
| CN204011381U (en) * | 2014-08-19 | 2014-12-10 | 合肥鑫晟光电科技有限公司 | A kind of combination cold plate and etching apparatus |
| CN107315325A (en) * | 2017-07-18 | 2017-11-03 | 武汉华星光电半导体显示技术有限公司 | Decompression drying equipment and decompression drying method |
| CN207257129U (en) * | 2017-10-17 | 2018-04-20 | 广东聚华印刷显示技术有限公司 | Condensation structure and decompression dry device |
| CN110116559A (en) * | 2019-04-23 | 2019-08-13 | 深圳市华星光电半导体显示技术有限公司 | Vacuum dryer |
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Application publication date: 20200728 |
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