CN204620350U - Dry drying device is carried out to substrate - Google Patents
Dry drying device is carried out to substrate Download PDFInfo
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- CN204620350U CN204620350U CN201520122819.5U CN201520122819U CN204620350U CN 204620350 U CN204620350 U CN 204620350U CN 201520122819 U CN201520122819 U CN 201520122819U CN 204620350 U CN204620350 U CN 204620350U
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- valve
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- drying device
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- dry pump
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Abstract
The utility model provides a kind of and carries out dry drying device to substrate, this drying device comprises hothouse, dry pump and valve, valve is connected between hothouse and dry pump, and valve is provided with heater, and heater promotes the temperature of aqueous vapor in described valve.The utility model, by arranging heater on the valve of drying device, poppet internal temperature, prevents aqueous vapor from forming liquid at valve internal, reduces the clearing times of valve, increases work efficiency.Simultaneously because decrease the clearing times of valve, extend the life-span of dry pump.
Description
Technical field
The utility model relates to Display Technique field, especially a kind of drying device substrate being carried out to drying.
Background technology
In the manufacturing process of liquid crystal display device such as array base palte and colored filter substrate, need to be made on the glass substrate by multiple tracks lithographic process to form various film, per pass lithographic process generally includes the multiple tracks techniques such as coating photoresistance, exposure, development, etching, stripping photoresistance.Wherein, by after on light blockage coating to substrate, need to be extracted out by the volatile matter of drying device by the aqueous vapor on substrate and other solvents, and then toast to the next stop.Fig. 1 is the structural representation in prior art, substrate being carried out to dry drying device.As shown in Figure 1, in the prior art, be connected by a valve 13 between hothouse 11 with dry pump 12, after product introduction hothouse 11, the volatile matter of aqueous vapor and other solvents can be extracted out by the dried pump 12 of valve 13.Owing to being vacuum state in dry pump 12, and be atmospheric pressure state in hothouse 11, when aqueous vapor flow to the dry pump 12 of vacuum by the hothouse 11 of normal pressure, temperature can be caused to decline because of swelling heat absorption, aqueous vapor will reach capacity in aqueous vapor because temperature reduces, and then condenses into liquid and form hydrops in valve 13.The liquid meeting splash when vibrations occur valve 13 condensing in valve 13, on substrate, can make substrate produce photoresistance broken hole, impact the quality of product.
In order to prevent the liquid splash in valve from impacting product, need aborning regularly valve to be taken apart to clear up the liquid in valve.In scale removal process, first dry pump to be closed, then valve is taken apart, and clean out with the hydrops of air gun by valve internal, finally valve sets loaded again and be connected with dry pump, therefore the cleaning of valve needs manual work, take the more time, cleaning efficiency is low, can reduce production efficiency, also easily causes the damage of dry pump when clearing up valve simultaneously.
Utility model content
The purpose of this utility model is to provide a kind of drying device, and this drying device, when carrying out drying to substrate, can effectively prevent aqueous vapor from condensing in valve, thus reduces the clearing times of valve, enhances productivity.
The utility model provides a kind of drying device, described drying device comprises hothouse, dry pump and valve, described valve is connected between described hothouse and described dry pump, and described valve is provided with heater, and described heater promotes the temperature of aqueous vapor in described valve.
Further, described heater is also provided with heat-insulation layer.
Further, described heater be heater coil and winding on described valve.Further, described heater is cast aluminum heaters and is set on described valve.
Further, described valve is connected with described hothouse and described dry pump by pipeline, and described heater is located on described valve and described pipeline.
Further, described heater be heater coil and winding on described valve and described pipeline.
Further, described heater is cast aluminium electric heater and is set on described valve and described pipeline.
Further, the temperature of described heater is 23 DEG C-100 DEG C.
Further, the temperature of described heater is preferably 80 DEG C.
Further, the material of described valve is aluminium alloy.
In sum, the utility model, by arranging heater on the valve of drying device, prevents aqueous vapor from forming liquid at valve internal, reduces the clearing times of valve, increases work efficiency.Simultaneously because decrease the clearing times of valve, extend the life-span of dry pump.
Above-mentioned explanation is only the general introduction of technical solutions of the utility model, in order to technological means of the present utility model can be better understood, and can be implemented according to the content of description, and can become apparent to allow above and other object of the present utility model, feature and advantage, below especially exemplified by preferred embodiment, and coordinate accompanying drawing, be described in detail as follows.
Accompanying drawing explanation
Fig. 1 is the structural representation in prior art, substrate being carried out to dry drying device.
Structural representation substrate being carried out to dry drying device that Fig. 2 provides for the utility model embodiment.
Detailed description of the invention
For further setting forth the utility model for the technological means reaching predetermined goal of the invention and take and effect, below in conjunction with accompanying drawing and preferred embodiment, the utility model is described in detail as follows.
Structural representation substrate being carried out to dry drying device that Fig. 2 provides for the utility model embodiment.As shown in Figure 2, drying device comprises valve 20, hothouse 40 and dry pump 50, valve 20 is connected between hothouse 40 and dry pump 50, concrete, all be connected by pipeline 30 between valve 20 with hothouse 40 and between valve 20 with dry pump 50, when starting dry pump 50, the aqueous vapor in hothouse 40 will be extracted out by the dried pump 50 of valve 20.In the present embodiment, valve 20 and pipeline 30 are provided with heater 60, heater 60 can be heater coil and winding on valve 20 and pipeline 30.In other embodiments, heater 60 also can be cast aluminium electric heater and be set on valve 20 and pipeline 30.Heater 60 can be given by the aqueous vapor heating in valve 20, makes the aqueous vapor in valve 20 can not condense into liquid because of valve 20 internal temperature step-down.Also be provided with heat-insulation layer (scheming not shown) in the outside of heater 60, to stop scattering and disappearing of heat, improve heat conversion, when heater coil or cast aluminium electric heater electrified regulation, heat conversion can reach 95%.In the present embodiment, the setting of heater 60 is not limited to this, and heater 60 can only be arranged on valve 20, namely on pipeline 30, does not arrange heater 60, also can realize the purpose of this utility model.
Particularly, because water saturation vapour pressure is at different temperatures different, therefore, in order to ensure liquid in valve 20 can not Yin Wendu reduce after aqueous vapor reach capacity and condense into liquid, the temperature of heater 60 should control between 23 DEG C to 100 DEG C, is preferably 80 DEG C.In order to ensure the thermal conductivity of valve 20, valve 20 should be made up of material such as the materials such as aluminium alloy that thermal conductivity is higher.
In the manufacturing process of liquid crystal display device such as array base palte and colored filter substrate, when by after on light blockage coating to substrate, the substrate being coated with photoresistance is put into hothouse 40, utilizes the volatile matter of above-mentioned drying device to the aqueous vapor on substrate and other solvents to extract out.When dry pump 50 works, aqueous vapor in hothouse 40 on substrate can flow into dry pump 50 by valve 20, owing to being vacuum state in dry pump 50, and be atmospheric pressure state in hothouse 40, when aqueous vapor flow to the dry pump 50 of vacuum by the hothouse 40 of normal pressure, temperature can be caused to decline because of swelling heat absorption, aqueous vapor will reach capacity because temperature reduces, and then condenses into liquid and form hydrops in valve 20.In the present embodiment, because be provided with heater 60 on valve 20, when dry substrate, heater 60 can be utilized to heat the aqueous vapor flowed through in valve 20, although the aqueous vapor therefore flowed through in valve 20 can be absorbed heat because of expansion, but the temperature of aqueous vapor can not reduce, aqueous vapor also will become liquid then in valve 20, to form hydrops at valve 20 internal condensate because of the reduction of temperature, so just can prevent substrate from producing photoresistance broken hole, reduce the clearing times of valve, reduce the time of artificial clean valve, improve production efficiency.
In sum, the utility model by arranging heater, poppet internal temperature on the valve of drying device, prevent aqueous vapor from forming hydrops at valve internal, prevent substrate from producing photoresistance broken hole, reduce the clearing times of valve, reduce the time of artificial clean valve, enhance productivity.Simultaneously because decrease the clearing times of valve, can reduce because the reason of dismounting is to the damage of dry pump, extend the life-span of dry pump.
The above, it is only preferred embodiment of the present utility model, not any pro forma restriction is done to the utility model, although the utility model discloses as above with preferred embodiment, but and be not used to limit the utility model, any those skilled in the art, do not departing within the scope of technical solutions of the utility model, make a little change when the technology contents of above-mentioned announcement can be utilized or be modified to the Equivalent embodiments of equivalent variations, in every case be do not depart from technical solutions of the utility model content, according to any simple modification that technical spirit of the present utility model is done above embodiment, equivalent variations and modification, all still belong in the scope of technical solutions of the utility model.
Claims (10)
1. a drying device, described drying device comprises hothouse, dry pump and valve, described valve is connected between described hothouse and described dry pump, it is characterized in that: described valve is provided with heater, and described heater heats described valve when dry substrate.
2. drying device according to claim 1, is characterized in that: the outside of described heater is also provided with heat-insulation layer.
3. drying device according to claim 1, is characterized in that: described heater be heater coil and winding on described valve.
4. drying device according to claim 1, is characterized in that: described heater is cast aluminium electric heater and is set on described valve.
5. drying device according to claim 1, is characterized in that: described valve is connected with described hothouse and described dry pump by pipeline, and described heater is also located on described pipeline.
6. drying device according to claim 5, is characterized in that: described heater be heater coil and winding on described valve and described pipeline.
7. drying device according to claim 5, is characterized in that: described heater is cast aluminium electric heater and is set on described valve and described pipeline.
8. drying device according to claim 1, is characterized in that: the heating-up temperature of described heater is 23 DEG C-100 DEG C.
9. drying device according to claim 8, is characterized in that: the heating-up temperature of described heater is preferably 80 DEG C.
10. drying device according to claim 1, is characterized in that: the material of described valve is aluminium alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520122819.5U CN204620350U (en) | 2015-03-03 | 2015-03-03 | Dry drying device is carried out to substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520122819.5U CN204620350U (en) | 2015-03-03 | 2015-03-03 | Dry drying device is carried out to substrate |
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| Publication Number | Publication Date |
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| CN204620350U true CN204620350U (en) | 2015-09-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520122819.5U Active CN204620350U (en) | 2015-03-03 | 2015-03-03 | Dry drying device is carried out to substrate |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105413986A (en) * | 2015-11-13 | 2016-03-23 | 信利（惠州）智能显示有限公司 | Thermal vacuum drying device provided with pressure balancer and pressure balancer |
| CN106526915A (en) * | 2016-11-28 | 2017-03-22 | 武汉华星光电技术有限公司 | Substrate cleaning and drying device and maintenance method thereof |
| CN106513273A (en) * | 2015-09-11 | 2017-03-22 | 株式会社思可林集团 | Reduced pressure drying device and reduced pressure drying method |
| CN107831617A (en) * | 2017-11-03 | 2018-03-23 | 合肥京东方光电科技有限公司 | The cutter device and system of display panel |
| CN111578680A (en) * | 2019-02-15 | 2020-08-25 | 北京北方华创微电子装备有限公司 | Wafer drying method |
-
2015
- 2015-03-03 CN CN201520122819.5U patent/CN204620350U/en active Active
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106513273A (en) * | 2015-09-11 | 2017-03-22 | 株式会社思可林集团 | Reduced pressure drying device and reduced pressure drying method |
| CN106513273B (en) * | 2015-09-11 | 2020-03-13 | 株式会社思可林集团 | Reduced pressure drying device and reduced pressure drying method |
| CN105413986A (en) * | 2015-11-13 | 2016-03-23 | 信利（惠州）智能显示有限公司 | Thermal vacuum drying device provided with pressure balancer and pressure balancer |
| CN105413986B (en) * | 2015-11-13 | 2018-03-27 | 信利（惠州）智能显示有限公司 | A kind of thermal vacuum drying device and pressure equilibrium device provided with pressure equilibrium device |
| CN106526915A (en) * | 2016-11-28 | 2017-03-22 | 武汉华星光电技术有限公司 | Substrate cleaning and drying device and maintenance method thereof |
| CN106526915B (en) * | 2016-11-28 | 2019-04-30 | 武汉华星光电技术有限公司 | Board cleaning drying device and its maintaining method |
| CN107831617A (en) * | 2017-11-03 | 2018-03-23 | 合肥京东方光电科技有限公司 | The cutter device and system of display panel |
| CN111578680A (en) * | 2019-02-15 | 2020-08-25 | 北京北方华创微电子装备有限公司 | Wafer drying method |
| CN111578680B (en) * | 2019-02-15 | 2022-01-11 | 北京北方华创微电子装备有限公司 | Wafer drying method |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 215301, 1, Longteng Road, Kunshan, Jiangsu, Suzhou Patentee after: Kunshan Longteng Au Optronics Co Address before: 215301, 1, Longteng Road, Kunshan, Jiangsu, Suzhou Patentee before: Kunshan Longteng Optronics Co., Ltd. |
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| CP01 | Change in the name or title of a patent holder |