CN206415988U - A kind of disk sanding apparatus for being used to repair target material surface defect - Google Patents
A kind of disk sanding apparatus for being used to repair target material surface defect Download PDFInfo
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- CN206415988U CN206415988U CN201621454404.9U CN201621454404U CN206415988U CN 206415988 U CN206415988 U CN 206415988U CN 201621454404 U CN201621454404 U CN 201621454404U CN 206415988 U CN206415988 U CN 206415988U
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- polishing
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- material surface
- surface defect
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Abstract
The utility model belongs to metal processing sectors, more particularly to a kind of disk sanding apparatus for being used to repair target material surface defect.To solve traditional target surface defect repair mode rough surface lustre lacking uniformity after polishing, it is impossible to meet the problem of risk that there is secondary scuffing and oxidation is reprocessed after use requirement and again clamping.The utility model proposes a kind of disk sanding apparatus for being used to repair target material surface defect, including table top 1, circular chuck 2, track 3, polishing bar 4, sliding block 5 and track cover plate 10, wherein, polishing bar 4 includes handle 6, spring 7, grinding head 8 and clip 9.Compared with the restorative procedure that traditional manual grinding or again clamping are done over again, the utility model realizes detail sanding, polishing vestige is consistent with preprosthetic lathe tool line, grinding head can select the polishing medium of unlike material as needed simultaneously, ensure that vestige coincide with machining vestige before repairing after polishing, it is ensured that the target material surface quality after polishing.
Description
Technical field
The utility model belongs to metal processing sectors, more particularly to a kind of disk polishing for being used to repair target material surface defect
Device.
Background technology
Sputtering target material is used as the related industries such as the extensive Ying Yu electronic information of film source material, stored record and display
In, target material surface quality directly affects film performance.Target material surface is (such as roughness is excessive, scratch, projection) of poor quality, splashes
Particle increases in " sparking ", film when penetrating, chip short circuit；Target material surface is off quality, sputtered film lack of homogeneity, thin
Film fails.Target processing method directly determines surface quality, and conventional processing method includes at present：Lathe, planer, milling machine, grinding machine,
Buffing etc..Generally, target processing mode is turnery processing, and surface smoothness meets sputtering target material product requirement after turning,
But in the oxidizable soft alloy and alloy such as worked copper, aluminium, silver, after accurate machining is completed, in purged and packed mistake
Cheng Zhong, easily occurs the tiny flaw such as aoxidizing, collide with, scratching.Traditional repair mode typically uses manual grinding, or to target weight
New clamping is done over again, and surface roughness is bigger than normal after manual grinding, and lack of homogeneity, lustrous surface is inconsistent, it is impossible to which satisfaction is used
It is required that, and reprocessed again after clamping, there is the risk of secondary scuffing and oxidation.
Utility model content
In view of the above-mentioned problems, the utility model proposes a kind of disk sanding apparatus for being used to repair target material surface defect.Bag
Table top 1, circular chuck 2, track 3, polishing bar 4, sliding block 5 and track cover plate 10 are included, the polishing bar 4 includes handle 6, spring
7th, grinding head 8 and clip 9, the circular chuck 2 are fixed on the playing surface 1 with track 3, and track 3, which is projected through circular chuck 2, to be justified
The heart, polishing bar 4, which is passed through, to be embedded in sliding block 5 in track 3 after the center hole of sliding block 5 and is fixed by track cover plate 10, and grinding head 8 is adopted
The polishing head end of bar 4 is fixed on clip 9, handle 6 is fixed on the end of polishing bar 4, and spring 7 is located between sliding block 5 and handle 6,
Polishing bar 4 is moved back and forth by track 3.
The circular chuck 2 is scroll chuck, can carry out axial-rotation, can realize the concentric clamping of target.
The sliding block 5 is square, and centre is provided with circular hole.
The grinding head 8 is replaceable, can use as sand paper, wire drawing cloth, hair, made by cotton, silk any material
Polishing medium.
The beneficial effects of the utility model are：
(1) the utility model can make polishing bar radially fixed by Track desigh, target realized after being fixed through chuck from
Dynamic centering, can carry out Concentric rotation with chuck, and by fighting each other, mill bar applies pressure, grinding head is transported in target material surface along circular arc
It is dynamic, detail sanding is realized, polishing vestige is consistent with preprosthetic lathe tool line；
(2) grinding head can fix the unlike materials such as sand paper, wire drawing cloth, silk and the polishing medium of roughness as needed,
Ensure that vestige coincide with machining vestige before repairing after polishing, it is ensured that the target material surface quality after polishing.
Brief description of the drawings
Accompanying drawing 1 is the structure chart of disk sanding apparatus；
Accompanying drawing 2 is the structure chart of polishing bar；
Reference：1- table tops；2- circle chucks；3- tracks；4- polishing bars；5- sliding blocks；6- handles；7- springs；8- is beaten
Bistrique；9- clips；10- track cover plates；
Embodiment
The utility model is described in detail below in conjunction with the accompanying drawings.
Accompanying drawing 1 is the structure chart of disk sanding apparatus, as shown in figure 1, the device by table top 1, circular chuck 2, track 3,
Polishing bar 4, sliding block 5 and track cover plate 10 are constituted.Circular chuck 2 is fixed on the playing surface 1 with track 3, and circular chuck 2 can be carried out
Axial-rotation, track 3 is projected through the circular center of circle of chuck 2, and sliding block 5 is square, and centre is provided with circular hole, and polishing bar 4, which is passed through, to be slided
Sliding block 5 is embedded in track 3 after the center hole of block 5 and fixed by track cover plate 10.Accompanying drawing 2 is the structure chart of polishing bar, such as
Shown in Fig. 2, the polishing bar 4 is made up of handle 6, spring 7, grinding head 8 and clip 9.Grinding head 8 is fixed on using clip 9
The polishing head end of bar 4, handle 6 is fixed on the end of polishing bar 4, and spring 7 is located between sliding block 5 and handle 6, and polishing bar 4 passes through rail
Road 3 is moved back and forth.
Concrete operation step of the present utility model is as described below：It is suitable according to target material surface to be processed and machining state selection
Polishing medium, in the present embodiment from wire drawing cloth, using clip 9 by wire drawing cloth be fixed on polishing the head end of bar 4, then will treat
Processing target is arranged on circular chuck 2, and target can the progress axial-rotation of oblong chuck 2, mobile polishing bar after stable installation
4, grinding head 8 is located at directly over defect, while hold handle 6, and press to grinding head 8 and contacted with target 12 to be processed,
Defective locations reciprocating rotation circle chuck 2, while applying pressure to handle 6, until surface defect polishing is repaired and completed, unclamps hand
Handle 6, the release of spring 7 drives polishing bar 4 and grinding head 8 to leave target material surface, unclamps circular chuck 2, removes workpiece, completes surface
Repair, in the state of without external force, handle 6 is lifted, grinding head 8 is raised, away from table top 1.
This embodiment is only the utility model preferably embodiment, but protection domain of the present utility model not office
It is limited to this, any one skilled in the art can readily occur in the technical scope that the utility model is disclosed
Change or replacement, should all cover within protection domain of the present utility model.Therefore, protection domain of the present utility model should be with
Scope of the claims is defined.
Claims (4)
1. a kind of disk sanding apparatus for being used to repair target material surface defect, it is characterised in that including table top (1), circular chuck
(2), track (3), polishing bar (4), sliding block (5) and track cover plate (10)；The polishing bar (4) includes handle (6), spring
(7), grinding head (8) and clip (9)；The circular chuck (2) is fixed on table top (1) with track (3), track (3) projection
By circular chuck (2) center of circle, polishing bar (4) is passed through in the embedded track (3) of sliding block (5) and will lead to after sliding block (5) center hole
Cross track cover plate (10) fixed, grinding head (8) is fixed on polishing bar (4) head end using clip (9), handle (6) is fixed on polishing
The end of bar (4), spring (7) is located between sliding block (5) and handle (6), and polishing bar (4) is moved back and forth by track (3).
2. a kind of according to claim 1 be used to repair the disk sanding apparatus of target material surface defect, it is characterised in that described
Circular chuck (2) is scroll chuck, can carry out axial-rotation, can realize the concentric clamping of target.
3. a kind of according to claim 1 be used to repair the disk sanding apparatus of target material surface defect, it is characterised in that described
Sliding block (5) is square, and centre is provided with circular hole.
4. a kind of according to claim 1 be used to repair the disk sanding apparatus of target material surface defect, it is characterised in that described
Grinding head (8) is replaceable, can use as sand paper, wire drawing cloth, hair, the polishing medium made by cotton, silk any material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621454404.9U CN206415988U (en) | 2016-12-27 | 2016-12-27 | A kind of disk sanding apparatus for being used to repair target material surface defect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621454404.9U CN206415988U (en) | 2016-12-27 | 2016-12-27 | A kind of disk sanding apparatus for being used to repair target material surface defect |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206415988U true CN206415988U (en) | 2017-08-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201621454404.9U Active CN206415988U (en) | 2016-12-27 | 2016-12-27 | A kind of disk sanding apparatus for being used to repair target material surface defect |
Country Status (1)
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| CN (1) | CN206415988U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108406506A (en) * | 2018-02-12 | 2018-08-17 | 广西农垦糖业集团星星制糖有限公司 | A kind of shut-off valve bat repair machine |
| CN109465742A (en) * | 2018-11-28 | 2019-03-15 | 徐州丰诚新材料科技有限公司 | A kind of fixture for grinder |
| CN110757295A (en) * | 2018-07-28 | 2020-02-07 | 宁国市金优机械配件有限公司 | Polishing device for machining |
| CN112951348A (en) * | 2020-11-05 | 2021-06-11 | 苏州精美科光电材料有限公司 | Manufacturing method of AlSc target for improving chip manufacturing yield |
-
2016
- 2016-12-27 CN CN201621454404.9U patent/CN206415988U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108406506A (en) * | 2018-02-12 | 2018-08-17 | 广西农垦糖业集团星星制糖有限公司 | A kind of shut-off valve bat repair machine |
| CN110757295A (en) * | 2018-07-28 | 2020-02-07 | 宁国市金优机械配件有限公司 | Polishing device for machining |
| CN109465742A (en) * | 2018-11-28 | 2019-03-15 | 徐州丰诚新材料科技有限公司 | A kind of fixture for grinder |
| CN112951348A (en) * | 2020-11-05 | 2021-06-11 | 苏州精美科光电材料有限公司 | Manufacturing method of AlSc target for improving chip manufacturing yield |
| CN112951348B (en) * | 2020-11-05 | 2023-11-03 | 苏州精美科光电材料有限公司 | Manufacturing method of AlSc target for improving chip manufacturing yield |
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