CN205774786U - The transmission of a kind of diamond-film-like deposition and clamping device - Google Patents
The transmission of a kind of diamond-film-like deposition and clamping device Download PDFInfo
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- CN205774786U CN205774786U CN201620508066.6U CN201620508066U CN205774786U CN 205774786 U CN205774786 U CN 205774786U CN 201620508066 U CN201620508066 U CN 201620508066U CN 205774786 U CN205774786 U CN 205774786U
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- planetary gear
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Abstract
This utility model provides the device of a kind of Magnetic filter vacuum cathode arc diamond-film-like deposition, and this device can make the workpiece of clamping the most uniformly revolve round the sun and spinning motion.Scheme of the present utility model is that a kind of carry out workpiece uses device during coating diamond-like film, there is Transmission Mechanism of Planetary Gear System, centre wheel, fixing axle, supporting tie-rod, gyroaxis, planetary gear, the motion making planetary gear is around the revolution of fixing axle and the compound motion around gyroaxis rotation.Planetary gear upper pright stanchion fixes workpiece.This utility model has the advantage that workpiece carries out the compound motion of revolution and rotation simultaneously, it is ensured that injecting surface of the work from the uniform ion of emission source sputtering, it is achieved the film plating layer thickness of workpiece is uniform, adhesive force is high, the advantage that film layer coefficient of friction is little.
Description
Technical field
This utility model relates to uniform transmission and the clamping device of a kind of actuating device, particularly diamond-film-like deposition.
Background technology
UseMagnetic filter vacuum cathode arc diamond-film-like deposition, can make workpiece have very high performance surface, such as: thicknesses of layers is uniform, coefficient of friction is little.Machinery, petrochemical industry, Aero-Space, military project, automobile and other industries application quite varied.
Cathodic arc deposition is to make target surface produce an electric arc in vacuum cavity.The trigger electrode that electric arc is mated by graphite cathode causes, owing to contact point electric current density is big, graphite cathode is made to melt, to emission electronics, simultaneously a large amount of cathode material ions are evaporated formation ionized gas, immediately by the electron collision ionization of electric field acceleration, form plasma, moved to a direction by curve bend introduction by magnetic field plasma, in motor process, bulky grain ion and neutral ion are splashed on tube wall, thus the little bead ion after filtering moves to workpiece position, it is splashed to surface of the work, form equally distributed atomic group, atomic group absorbs atom or ion is grown up and reached saturated, atomic group expands by merging, complete the generation of film.Current domestic general employing is circular vacuum cavity, is uniformly distributed such 3 same magnetic bend pipes along 120 ° of directions of vacuum cavity circumference difference simultaneously.
If cylindrical work in vacuum cavity in maintain static, the direction of plasma is also constant, workpiece is much larger than the most isoionic surface towards the plasma quantity of the surface deposition of plasma motion, and the thickness of film plating layer will be the most uneven, and the coefficient of friction of surface of the work will be bigger.Part higher for dimension precision requirement, surface to be controlled mechanical strength properties, surface to be controlled diamond-like carbon film layer thickness.It is necessary to design and develop and a set of makes plasma at the device of cylindrical surface uniform deposition.
Summary of the invention
This utility model provides a kind of device, and the diamond-film-like thicknesses of layers that can realize making workpiece deposit is uniform.
Scheme of the present utility model is: the uniform actuating device frock of a kind of diamond-film-like deposition, including centre wheel, fixing axle, supporting tie-rod, gyroaxis, planetary gear and vertical rod, centre wheel is fixed, there is fixing axle at the center of centre wheel, fixing axle is fixing with supporting tie-rod to be connected, and the gear that fixing axle lower end is installed can rotate under driven by motor, and drives supporting tie-rod around solid System of Rotating about Fixed Axis, gyroaxis is fixed together by steady pin with supporting tie-rod, and planetary gear is arranged on gyroaxis by bearing.
The gyration mechanism of frock have employed Transmission Mechanism of Planetary Gear System, and centre wheel is fixed, and fixing axle is solidly installed by steady pin with supporting tie-rod, and the gear of fixing axle lower end rotates under driven by motor.Supporting tie-rod rotates under fixing axle effect, and gyroaxis is fixed together by steady pin with supporting tie-rod, does rotating in same direction with supporting tie-rod.The planetary gear being arranged on gyroaxis also will rotate (referred to as revolution), due to the external tooth engaged transmission of planetary gear Yu centre wheel so that it is around gyroaxis, i.e. own axes with supporting tie-rod, rotates referred to as rotation.
For ease of clamping workpiece, planetary gear of the present utility model circumferentially has a number of thread circle hole, and the vertical rod of minor diameter is connected with planetary gear circular hole, and there is aperture vertical rod upper end.There is free workpiece can be directly sleeved in vertical rod and carry out relevant surfaces process, fixed by steel wire, vertical rod upper end aperture without hole workpiece.
For further for ensureing that diamond-film-like thicknesses of layers is uniform, using motor and fixing axle external tooth engaged transmission, it is ensured that supporting tie-rod uniform rotation, workpiece rotates uniformly.
This utility model has the advantage that
The diamond-film-like thicknesses of layers realizing workpiece is uniform, and surface reforming layer adhesive force is high, the advantage that film layer coefficient of friction is little.
Accompanying drawing explanation
Fig. 1 top view of the present utility model；
Fig. 2 front view of the present utility model；
Fig. 3 upward view of the present utility model；
Fig. 4 vertical rod of the present utility model schematic diagram.
Detailed description of the invention
See Fig. 1 to Fig. 3, the gyration mechanism of this frock have employed Transmission Mechanism of Planetary Gear System, centre wheel 3 is fixed, do not rotate, fixing axle 2 is installed together by steady pin 6 with supporting tie-rod l, the gear of fixing axle 2 lower end rotates under driven by motor, supporting tie-rod is under fixing axle 2 acts on, do when rotating counterclockwise around fixing axle 2 with shown position and direction, gyroaxis 4 is fixed together by steady pin 6 with supporting tie-rod 1, rotating in same direction is done with supporting tie-rod, the planetary gear 5 being arranged on gyroaxis 4 also will rotate counterclockwise (referred to as revolution) therewith.External tooth engaged transmission due to planetary gear 5 with centre wheel 3 so that it is rotate (referred to as rotation) counterclockwise around gyroaxis (own axes).Therefore.The motion of planetary gear 5 is to revolve round the sun around fixing axle 2 and around the compound motion of gyroaxis 4 rotation.Planetary gear 5 circumferentially has a number of thread circle hole.Being achieved in, clamping workpiece rotation on planetary gear 5 and rotation, make the uniform ion sputtered on electrode is deposited on surface of the work.
Seeing Fig. 4, the vertical rod 7(of minor diameter is connected with planetary gear thread circle hole), there is aperture vertical rod 7 upper end.Having hole workpiece can be directly sleeved in vertical rod to process, vertical rod 7 upper end aperture fixes steel wire, and wire binding fixes without hole workpiece, also can carry out the coating film treatment being correlated with without hole workpiece.
Claims (4)
1. the uniform actuating device of a diamond-film-like deposition, it is characterized in that: include centre wheel, fixing axle, supporting tie-rod, gyroaxis, planetary gear and vertical rod, centre wheel is fixed, there is fixing axle at the center of centre wheel, fixing axle is fixing with supporting tie-rod to be connected, and the gear that fixing axle lower end is installed can rotate under driven by motor, and drives supporting tie-rod around solid System of Rotating about Fixed Axis, gyroaxis is fixed together by steady pin with supporting tie-rod, and planetary gear is arranged on gyroaxis by bearing.
The uniform actuating device of diamond-film-like deposition the most according to claim 1, it is characterised in that described gyroaxis is fixed together by steady pin with supporting tie-rod, does rotating in same direction with supporting tie-rod.
The uniform actuating device of diamond-film-like deposition the most according to claim 2, it is characterised in that described gyroaxis is connected by bearing with planetary gear, the planetary gear being arranged on gyroaxis rotates with supporting tie-rod, and planetary gear rotates around gyroaxis.
The most according to claim 3, the uniform actuating device of diamond-film-like deposition, it is characterised in that planetary gear is additionally provided with vertical rod, there is screw thread vertical rod lower end, is connected with planetary gear circumferentially thread circle hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620508066.6U CN205774786U (en) | 2016-05-30 | 2016-05-30 | The transmission of a kind of diamond-film-like deposition and clamping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620508066.6U CN205774786U (en) | 2016-05-30 | 2016-05-30 | The transmission of a kind of diamond-film-like deposition and clamping device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205774786U true CN205774786U (en) | 2016-12-07 |
Family
ID=59980189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620508066.6U Active CN205774786U (en) | 2016-05-30 | 2016-05-30 | The transmission of a kind of diamond-film-like deposition and clamping device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205774786U (en) |
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2016
- 2016-05-30 CN CN201620508066.6U patent/CN205774786U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |