CN213295492U - Adjustable construction pipe target subassembly - Google Patents
Adjustable construction pipe target subassembly Download PDFInfo
- Publication number
- CN213295492U CN213295492U CN202021610332.9U CN202021610332U CN213295492U CN 213295492 U CN213295492 U CN 213295492U CN 202021610332 U CN202021610332 U CN 202021610332U CN 213295492 U CN213295492 U CN 213295492U
- Authority
- CN
- China
- Prior art keywords
- target
- main body
- target main
- slewing mechanism
- rotating mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000010276 construction Methods 0.000 title claims abstract description 15
- 230000007246 mechanism Effects 0.000 claims abstract description 42
- 238000003466 welding Methods 0.000 claims abstract description 4
- 239000013077 target material Substances 0.000 claims description 15
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 5
- 230000009471 action Effects 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- -1 argon ions Chemical class 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model discloses an adjustable construction tube target component, which comprises a target main body and a rotating mechanism, wherein the rotating mechanism is arranged at the axle center of the upper end of the target main body, the target main body is fixedly sleeved with the rotating mechanism, a connecting column is arranged at the upper end of the rotating mechanism, and the connecting column is fixed with the rotating mechanism by spot welding, the utility model changes the traditional integrated structure, so that when the connecting column is connected with the external connecting piece, the connecting piece and the connecting column are connected to the bottom end, thereby better achieving the rotating effect, the utility model can fixedly connect the rotating mechanism through the axle hole by arranging the axle hole at the axle center of the upper end of the target main body, and the rotating mechanism can rotate left and right in the target main body, thereby leading the connecting piece to rotate when being connected, the mutual contact between the connecting piece and the target main body is avoided, and the problem that scratches appear on the surface end of the target main body is avoided.
Description
Technical Field
The utility model belongs to the technical field of the target is relevant, concretely relates to adjustable construction pipe target subassembly.
Background
The target material for coating is a sputtering source which forms various functional films on a substrate by sputtering through a magnetron sputtering system, a multi-arc ion plating system or other types of coating systems under proper process conditions, and is simply called as a target material bombarded by high-speed charged particles, and is used in a high-energy laser weapon, and different killing and destruction effects can be generated when lasers with different power densities, different output waveforms and different wavelengths interact with different target materials.
The existing target material component has the following problems: the existing target assembly is rotated by adopting a thread groove when being connected, but when the connecting piece and the connecting end are connected to the bottommost end, the connecting piece can be rubbed with the target main body, so that scratches can be caused to the target main body for a long time.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an adjustable construction pipe target subassembly to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides an adjustable construction pipe target subassembly, includes target main part and slewing mechanism, target main part upper end axle center department is provided with slewing mechanism, target main part cup joints fixedly with slewing mechanism, the slewing mechanism upper end is provided with the spliced pole, the spliced pole is fixed with slewing mechanism spot welding, slewing mechanism's constitution is including cup jointing ring, pillar and rotor plate, the lower extreme axle center department of cup jointing ring is provided with the pillar, the lower extreme axle center department of pillar is provided with the rotor plate, slewing mechanism cup joints the inside axle center department at target main part through cup jointing the ring.
Preferably, the target main body is of a circular truncated cone structure, and the surface end of the target main body is of a smooth structure.
Preferably, the connecting column is of a flat round table structure, and an external thread groove is formed in the periphery of the outer side of the connecting column.
Preferably, the rotating mechanism is sleeved at the upper end axis of the target material main body, and the rotating mechanism can rotate in the target material main body when being subjected to external force.
Preferably, the size of the coupling ring is smaller than that of the rotating plate, and the coupling ring and the rotating plate are both of a plate-shaped structure.
Preferably, the target main body is divided into three types, namely a metal target, a ceramic target and an alloy target.
Compared with the prior art, the utility model provides an adjustable construction pipe target subassembly possesses following beneficial effect:
(1) the utility model changes the traditional integrated structure into a rotating mechanism arranged at the intersection of the connecting column and the target main body, so that when the connecting column is connected with an external connecting piece and the connecting column is connected to the bottom end, the rotating mechanism can rotate when acting force is applied to the rotating mechanism, thereby achieving a better rotating effect;
(2) the utility model discloses in be provided with the shaft hole through the upper end axle center department at the target main part, can be through the shaft hole with slewing mechanism fixed connection like this to slewing mechanism can carry out the rotation about in the inside of target main part, can so can be so that when the connecting piece is connected, through rotatory, has avoided connecting piece and target main part to contact each other, avoids appearing target main part table end the problem of mar.
Drawings
Fig. 1 is a schematic structural view of an adjustable construction tube target assembly of the present invention;
FIG. 2 is a schematic view of the bottom view of the rotating mechanism of the present invention;
in the figure: 1. connecting columns; 2. a rotating mechanism; 21. a sleeving connection ring; 22. a pillar; 23. a rotating plate; 3. the target material body.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element to which the reference is made must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Referring to fig. 1-2, the present invention provides a technical solution: an adjustable construction tube target component comprises a target main body 3 and a rotating mechanism 2, wherein the rotating mechanism 2 is arranged at the upper end axis of the target main body 3, the target main body 3 is of a circular truncated cone structure, the surface end of the target main body 3 is of a smooth structure, the target main body 3 is divided into three types which are respectively a metal target, a ceramic target and an alloy target, so that the production and processing of films can be better carried out through different types of target main bodies 3, the film can be more conveniently and quickly produced, the target main body 3 is fixedly sleeved with the rotating mechanism 2, a connecting column 1 is arranged at the upper end of the rotating mechanism 2, the connecting column 1 is of a flat circular truncated cone structure, an external thread groove is arranged on the periphery of the outer side of the connecting column 1, the connecting column 1 can be better connected through the arrangement of the external thread groove, the connecting column 1 is fixed with the rotating mechanism 2 in a spot welding manner, the rotating mechanism 2, thereby can avoid target main part 3 table end to avoid appearing the mar, slewing mechanism 2 can rotate in target main part 3 is inside when receiving external force, slewing mechanism 2's constitution is including cup jointing ring 21, pillar 22 and rotor plate 23, the lower extreme axle center department of cup jointing ring 21 is provided with pillar 22, the lower extreme axle center department of pillar 22 is provided with rotor plate 23, slewing mechanism 2 cup joints the inside axle center department at target main part 3 through cup jointing ring 21, the size of cup jointing ring 21 is less than the size of rotor plate 23, thereby can make better can appear rotatoryly when receiving the effort, cup jointing ring 21 is platelike structure with rotor plate 23.
The utility model discloses a theory of operation and use flow: when the target material body 3 is used, the target material body 3 is firstly taken out, then the target material body is mutually connected with an external connecting piece through a connecting column 1, when the connecting column 1 is connected, when the connecting piece and the connecting column 1 are connected to the bottom end, a rotating mechanism 2 rotates when being subjected to acting force, the problem that the target material body 3 is scratched is avoided, then an orthogonal magnetic field and an electric field are added between a sputtered target pole and an anode, required inert gas is filled in a high vacuum chamber, the gas is usually argon, a permanent magnet forms a magnetic field of two hundred five to three hundred five gausses on the surface of the target material body 3, the orthogonal electromagnetic field is formed by the high-voltage electric field, under the action of the electric field, the argon is ionized into positive ions and electrons, a certain negative high voltage is added on the target material body 3, the electrons emitted from the target pole are subjected to the action of the magnetic field and the ionization probability of working gas is increased, high-density plasma is formed near the cathode, argon ions accelerate to fly to the target surface under the action of Lorentz force and bombard the target surface at high speed, atoms sputtered from the target are separated from the target surface by high kinetic energy according to the momentum conversion principle and fly to a substrate for deposition and film formation, and thus the device is used.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides an adjustable construction pipe target subassembly, includes target main part (3) and slewing mechanism (2), its characterized in that: target main part (3) upper end axle center department is provided with slewing mechanism (2), target main part (3) cup joint fixedly with slewing mechanism (2), slewing mechanism (2) upper end is provided with spliced pole (1), spliced pole (1) is fixed with slewing mechanism (2) spot welding, the constitution of slewing mechanism (2) is including cup joint ring (21), pillar (22) and rotor plate (23), the lower extreme axle center department of cup joint ring (21) is provided with pillar (22), the lower extreme axle center department of pillar (22) is provided with rotor plate (23), slewing mechanism (2) cup joint the inside axle center department in target main part (3) through cup joint ring (21).
2. The adjustable construction tube target assembly of claim 1, wherein: the target main body (3) is of a circular truncated cone structure, and the surface end of the target main body (3) is of a smooth structure.
3. The adjustable construction tube target assembly of claim 1, wherein: the connecting column (1) is of a flat round table body structure, and an external thread groove is formed in the periphery of the outer side of the connecting column (1).
4. The adjustable construction tube target assembly of claim 1, wherein: the rotating mechanism (2) is sleeved at the upper end axis of the target material main body (3), and the rotating mechanism (2) can rotate inside the target material main body (3) when being subjected to external force.
5. The adjustable construction tube target assembly of claim 1, wherein: the size of the sleeving ring (21) is smaller than that of the rotating plate (23), and the sleeving ring (21) and the rotating plate (23) are both of a plate-shaped structure.
6. The adjustable construction tube target assembly of claim 1, wherein: the target main body (3) is divided into three types, namely a metal target, a ceramic target and an alloy target.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021610332.9U CN213295492U (en) | 2020-08-06 | 2020-08-06 | Adjustable construction pipe target subassembly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021610332.9U CN213295492U (en) | 2020-08-06 | 2020-08-06 | Adjustable construction pipe target subassembly |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213295492U true CN213295492U (en) | 2021-05-28 |
Family
ID=76023181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021610332.9U Expired - Fee Related CN213295492U (en) | 2020-08-06 | 2020-08-06 | Adjustable construction pipe target subassembly |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213295492U (en) |
-
2020
- 2020-08-06 CN CN202021610332.9U patent/CN213295492U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210528 |