CN115323339B - Frock and physical vapor deposition equipment - Google Patents
Frock and physical vapor deposition equipment Download PDFInfo
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- CN115323339B CN115323339B CN202210916712.2A CN202210916712A CN115323339B CN 115323339 B CN115323339 B CN 115323339B CN 202210916712 A CN202210916712 A CN 202210916712A CN 115323339 B CN115323339 B CN 115323339B
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- 238000005240 physical vapour deposition Methods 0.000 title claims abstract description 33
- 230000005540 biological transmission Effects 0.000 claims abstract description 21
- 238000009434 installation Methods 0.000 claims abstract description 20
- 230000007246 mechanism Effects 0.000 claims abstract description 20
- 210000003813 thumb Anatomy 0.000 claims description 63
- 230000005291 magnetic effect Effects 0.000 claims description 45
- 238000000576 coating method Methods 0.000 abstract description 30
- 239000011248 coating agent Substances 0.000 abstract description 28
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000010586 diagram Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000000926 separation method Methods 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 238000009776 industrial production Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 210000001503 joint Anatomy 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The application discloses a tool, which comprises a tool unit and a chassis, wherein the tool unit comprises a poking wheel and a transmission mechanism, a plurality of installation pieces are arranged on the poking wheel, the transmission mechanism is rotationally connected with the poking wheel, and the transmission mechanism is used for driving the installation pieces to rotate; a plurality of tool units are arranged on the chassis. According to the application, the plurality of mounting pieces are arranged, so that the mounting of products can be realized, the number of the mounted products can be effectively increased, the number of single coated products is increased, and the production cost is reduced; through setting up drive mechanism, can drive the installed part rotation, the chassis can realize the revolution around physical vapor deposition equipment center after installing physical vapor deposition equipment, around the rotation of frock center, around driving wheel center fixed angle rotation and installed part rotation, can make the coating homogeneity of product show promotion.
Description
Technical Field
The application relates to the technical field of physical vapor deposition, in particular to a tool and physical vapor deposition equipment.
Background
The vapor deposition technique commonly known as coating technique refers to the deposition of one or more refractory metal or non-metal compound films with high hardness and good wear resistance on the target product, such as TiC, tiN, al 2 O 3 For example, it is desired to improve special properties such as wear resistance, electrical conductivity, thermal conductivity, oxidation resistance, etc. Physical vapor deposition (hereinafter referred to as PVD) refers to a thin film manufacturing technique that uses physical methods such as vacuum evaporation, sputter coating, ion plating, or the like to deposit a material on a workpiece to be plated. The method is characterized in that: firstly, the deposition temperature is low, coating can be carried out at the temperature below 500 ℃, and the coating can be carried out on a product sensitive to temperature, so that the strength of a hard alloy product is not influenced; secondly, compressive stress is generated in the PVD coating, so that the usability of the hard alloy is improved, and the PVD coating is more suitable for coating a hard alloy precise complex tool; thirdly, PVD coating technology can synthesize ternary, quaternary and even multi-element nitrides of high melting point metals that chemical vapor deposition technology cannot synthesize, with obvious advantages in depositing unstable and metastable multicomponent compounds.
The PVD process employs various forms of apparatus that generally require the product to reciprocate or rotate within the equipment chamber, thereby providing a more uniform film thickness than would be the case if the product were stationary. Because early physical vapor deposition equipment cannot control the angle of incident ions, a clamping device of a product generally adopts an inclined clamping rotation design so as to enable the surface of the product to be relatively perpendicular to the incident direction of the ions. However, such designs have low space utilization, which greatly limits the number of product loads within the coating apparatus. In recent years, PVD equipment is rapidly developed, and currently mainstream PVD coating equipment is provided with a deflection magnetic field, so that ion multi-angle incidence can be realized, and the coating can be ensured to cover all surfaces of a product. Therefore, the product holding device does not need to consider the tilting mechanism, and gradually develops into a trend of developing to a large loading capacity so as to improve the production efficiency; and the coating uniformity of the existing coating equipment products needs to be improved.
Disclosure of Invention
The application aims to provide a tool and physical vapor deposition equipment, which not only can ensure the uniformity and compactness of a product coating, but also can fully utilize the space of the physical vapor deposition equipment, realize the mass production of small and medium-sized products and improve the industrial production efficiency.
In order to achieve the above purpose, the present application provides the following technical solutions:
the application discloses a tool, which comprises:
the tool unit comprises a poking wheel and a transmission mechanism, wherein a plurality of installation pieces are arranged on the poking wheel, the transmission mechanism is rotationally connected with the poking wheel, and the transmission mechanism is used for driving the installation pieces to rotate;
the chassis is provided with a plurality of tool units, and the thumb wheel is rotationally connected with the chassis.
Further, the transmission mechanism comprises a magnetic part, the magnetic part is arranged at the center of the thumb wheel, the installation parts are circumferentially and uniformly distributed on the outer side of the magnetic part by taking the central axis of the thumb wheel as the center, and the part of the installation parts adjacent to the magnetic part can be attracted by the magnetic part.
Further, the upper surface of thumb wheel is equipped with second through-hole and second mounting hole, the second through-hole is located the center department of thumb wheel, the second mounting hole uses the axis of thumb wheel is the even distribution of central circumference, the installed part lower extreme stretches into in the second mounting hole.
Further, the tooling unit further comprises:
the lower end of the shaft seat is connected with the chassis, the upper end of the shaft seat is rotationally connected with the second through hole, and the upper end of the shaft seat is provided with a third mounting hole for mounting the magnetic piece.
Further, the outer peripheral surface of the thumb wheel is uniformly provided with a plurality of gear teeth.
Further, the second mounting hole communicates with the second through hole.
Further, the mounting piece comprises a plurality of assembly core bars and sleeves, the sleeves are arranged above the assembly core bars, the assembly core bars are connected with the sleeves in one-to-one correspondence, and the lower ends of the assembly core bars are connected with the shifting wheels in a rotating mode.
Further, the assembly core bar comprises a first top, a first middle part and a first bottom which are sequentially connected from top to bottom, the diameter of the first middle part is larger than that of the first top and the first bottom, the first top is connected with the lower end of the sleeve, the upper surface of the first middle part is in butt joint with the lower end face of the sleeve, the first bottom is in rotary connection with the thumb wheel, and the lower surface of the first middle part is in butt joint with the upper surface of the thumb wheel.
Further, the tooling unit further comprises:
the support disc is arranged above the poking wheel, and is provided with a first through hole for the upper end of the sleeve to penetrate out;
the upper end of the supporting rod is connected with the supporting disc, and the lower end of the supporting rod is connected with the shifting wheel.
Further, the mounting piece comprises a plurality of mounting core rods, each mounting core rod comprises a rod body and a limiting ring, each limiting ring is sleeved on each rod body, the lower end of each rod body is rotationally connected with the corresponding shifting wheel, the lower surface of each limiting ring is abutted to the upper surface of each shifting wheel, and the upper end of each rod body is used for sleeving a product to be coated.
Further, the rod body comprises a first rod body, a second rod body and a third rod body, the diameter of the first rod body is smaller than that of the third rod body, the second rod body is conical, the lower end of the first rod body is connected with the small end of the second rod body, the large end of the second rod body is connected with the upper end of the third rod body, and the limiting ring is sleeved on the third rod body.
Further, the chassis includes:
the outer ring is provided with a plurality of first mounting holes which are uniformly distributed in the circumferential direction, and the lower end of the shaft seat is connected with the first mounting holes;
the inner ring is arranged on the inner side of the outer ring, and a connecting part is arranged on the inner ring;
and one end of the cross beam is connected with the inner ring, and the other end of the cross beam is connected with the outer ring.
The application discloses physical vapor deposition equipment, which comprises a cavity and a tool, wherein the tool is arranged in the cavity, and the tool is any one of the tools.
In summary, the application has the technical effects and advantages that:
1. according to the application, the plurality of mounting pieces are arranged, so that the products to be coated can be mounted, the product mounting quantity can be effectively increased, the loading capacity of the coating product quantity is increased, and the production cost is reduced; the transmission mechanism is arranged, so that the mounting piece can be driven to rotate, a product on the mounting piece is driven to rotate, and the coating uniformity of the product is improved;
2. in the application, the magnetic piece is arranged at the center of the thumb wheel, the mounting pieces are circumferentially and uniformly distributed on the outer side of the magnetic piece by taking the central axis of the thumb wheel as the center, the part of the mounting piece adjacent to the magnetic piece can be attracted by the magnetic piece, and when the thumb wheel rotates to drive the mounting piece to rotate relative to the magnetic piece, the magnetic attraction of the magnetic piece can drive the mounting piece to rotate, thereby driving the product to rotate, and driving the products of a plurality of mounting pieces to rotate in a small space of the thumb wheel, so that the structure is compact and the space is saved;
3. in the application, the second mounting holes are arranged, so that the mounting of the mounting piece can be facilitated; the application is provided with the axle seat, so that the rotating connection of the thumb wheel and the chassis can be realized, and the axle seat has the function of realizing the rotating connection of the thumb wheel and the function of installing the magnetic piece by arranging the third installation hole at the upper end of the axle seat;
4. in the application, the outer ring and the inner ring are connected by the cross beam, so that the weight of the chassis can be effectively reduced;
5. according to the application, the support disc and the support rod are arranged, so that the sleeve and the installed product can be effectively supported, and the stability of the sleeve installed product is effectively improved;
6. according to the application, more products can be accommodated under the size of the effective space of the physical vapor deposition equipment, after the chassis is installed on the physical vapor deposition equipment, revolution around the center of the coating equipment, rotation around the center of the tooling, rotation around the center of the thumb wheel by a fixed angle and rotation of the installation piece can be realized, so that the uniformity of the coating of the products can be obviously improved, and the device is particularly suitable for large-scale industrial production of the physical vapor deposition coating products.
Drawings
In order to more clearly illustrate the embodiments of the application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic structural diagram of a tooling according to a first embodiment of the present application;
FIG. 2 is a schematic diagram of a tooling unit according to an embodiment of the present application;
FIG. 3 is a schematic diagram of an exploded construction of a tooling unit according to a first embodiment of the present application;
fig. 4 is a schematic structural diagram of a tooling unit with the thumb wheel and the support rod omitted in the first embodiment of the application;
FIG. 5 is a schematic view of the chassis of the first embodiment of the present application;
FIG. 6 is a schematic diagram of a wheel according to a first embodiment of the present application;
FIG. 7 is a schematic view of a shaft seat according to an embodiment of the present application;
FIG. 8 is a schematic view of a magnetic member according to a first embodiment of the present application;
FIG. 9 is a schematic diagram of an assembled core rod according to an embodiment of the present application;
FIG. 10 is a schematic view of a sleeve according to a first embodiment of the present application;
FIG. 11 is a schematic view showing the structure of a supporting plate according to the first embodiment of the present application;
FIG. 12 is a schematic view showing the structure of a supporting rod according to the first embodiment of the present application;
FIG. 13 is a schematic view of a physical vapor deposition apparatus according to a first embodiment of the present application;
FIG. 14 is a front view of a portion of a physical vapor deposition apparatus according to a first embodiment of the present application;
FIG. 15 is a bottom view of a portion of a physical vapor deposition apparatus according to a first embodiment of the present application;
FIG. 16 is a schematic structural diagram of a tooling in a second embodiment of the present application;
FIG. 17 is a schematic diagram of an exploded construction of a tooling unit in accordance with a second embodiment of the present application;
fig. 18 is a schematic view of a core bar mounting structure according to a second embodiment of the present application.
In the figure: 1. a tooling unit; 2. a chassis; 3. a support chassis; 4. a pulling piece; 5. a sun gear; 6. a planet wheel; 7. a bracket top cover; 11. a thumb wheel; 12. a sleeve; 13. a magnetic member; 14. assembling a core bar; 14', mounting a core bar; 15. a shaft seat; 16. a support plate; 17. a support rod; 111. a second through hole; 112. a second mounting hole; 113. a fifth mounting hole; 121. an inner wall; 122. an outer wall; 141. a first top; 142. a first middle portion; 143. a first bottom; 144. a first rod body; 145. a second rod body; 146. a third rod body; 147. a limiting ring; 151. a second top; 152. a second middle portion; 153. a second bottom; 1511. a third mounting hole; 161. a first through hole; 162. a sixth mounting hole; 171. a third top portion; 172. a third bottom; 21. an outer ring; 22. an inner ring; 23. a cross beam; 211. a first mounting hole; 221. a first groove; 222. a second groove; 223. a protrusion; 31. rotating the upright post; 311. a separation sleeve; 32. limiting a sun gear; 33. a connecting column; 34. a bracket; 51. and a limiting hole.
Detailed Description
The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
In the description of the present application, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present application described below may be combined with each other as long as they do not collide with each other.
Example 1
The embodiment provides a tool, as shown in fig. 1-15, which comprises a tool unit 1 and a chassis 2. Wherein the tool unit 1 is used for installing a product to be coated. The chassis 2 provides support for the tool unit 1 on one hand, and is matched with internal parts of the physical vapor deposition equipment on the other hand, so that the center positioning is realized. Specifically, the tool unit 1 comprises a thumb wheel 11 and a transmission mechanism, wherein a plurality of installation pieces are arranged on the thumb wheel 11, the transmission mechanism is rotationally connected with the thumb wheel 11, and the transmission mechanism is used for driving the installation pieces to rotate. The chassis 2 is provided with a plurality of tool units 1, and the thumb wheel 11 is rotationally connected with the chassis 2.
In the embodiment, the plurality of mounting pieces are arranged, so that the products to be coated can be mounted, the mounting quantity of the products to be coated can be effectively increased, the loading quantity of the products to be coated is increased, and the production cost is reduced; through setting up drive mechanism, can drive the installed part rotation to drive the product rotation on the installed part, improve the coating homogeneity of product.
Further, the transmission mechanism includes a magnetic member 13. Preferably, the magnetic member 13 is provided at the center of the thumbwheel 11; the mounting pieces are circumferentially and uniformly distributed on the outer side of the magnetic piece 13 by taking the central axis of the thumb wheel 11 as the center, and the parts of the mounting pieces adjacent to the magnetic piece 13 can be attracted by the magnetic piece 13. Preferably, the mounting stem 14 is made of ferromagnetic material. When the thumb wheel 11 does not rotate, the mounting piece and the magnetic piece 13 are attracted by magnetic force, the thumb wheel 11 is rotationally connected with the magnetic piece 13, when the thumb wheel 11 rotates, the magnetic piece 13 is arranged at the center of the thumb wheel 11, the thumb wheel 11 rotates to drive the mounting piece to revolve around the magnetic piece 13, and the magnetic force of the magnetic piece 13 attracts the mounting piece to generate friction to enable the mounting piece to rotate, so that the product is driven to rotate. In addition, the transmission mechanism can also adopt a gear transmission structure to realize the autorotation of each mounting piece. The magnetic member 13 is preferable in this embodiment due to the space of the thumb wheel 11. In the embodiment, the magnetic piece 13 can drive the products of the plurality of installation pieces to rotate in a small space of the thumb wheel, so that the structure is compact, and the space is saved.
Further, the upper surface of the thumb wheel 11 is provided with a second through hole 111 and a second mounting hole 112, and the second through hole 111 is formed in the center of the thumb wheel 11 from the top surface to the bottom surface or from the bottom surface to the top surface; the second mounting holes 112 are uniformly distributed circumferentially around the central axis of the dial 11. The second mounting hole 112 may be a through hole or a blind hole; the second mounting hole 112 is a through hole in this embodiment. The lower end of the mounting member extends into the second mounting hole 112.
Further, the tooling unit 1 further comprises an axle seat 15. The lower end of the shaft seat 15 is connected with the chassis 2, the upper end of the shaft seat is rotatably connected with the second through hole 111, and a third mounting hole 1511 for mounting the magnetic element 13 is arranged at the upper end of the shaft seat 15. Optionally, axle seat 15 includes a second top 151, a second middle 152, and a second bottom 153. The second top 151, the second middle 152 and the second bottom 153 are all cylinders; the outer diameter of the second middle portion 152 is greater than the outer diameter of the second top portion 151 and also greater than the outer diameter of the second bottom portion 153. The upper surface of the second top 151 is provided with a third mounting hole 1511 for mounting the magnetic member 13; the third mounting hole 1511 is a blind hole. In this embodiment, a cylindrical magnet is used as the magnetic member 13. Other shapes of the magnet can be selected, such as cuboid, triangular prism, sphere or other irregular shapes; the magnet is placed in the third mounting hole 1511. Optionally, the third mounting hole 1511 is in transition fit with the magnet, which is fixed relative to the shaft seat. The second top 151 is adapted to mate with the second through hole 111 of the thumbwheel 11. The second middle portion 152 is used for limiting the shaft seat 15. The second bottom 153 is adapted to mate with a first mounting hole 211 on the outer ring 21 of the chassis 2. The second bottom 153 is in interference fit with the first mounting hole 211 of the chassis 2, so that the axle seat 15 and the thumb wheel 11 can rotate relatively. Alternatively, the second bottom 153 may be a cylinder of equal diameter as the second top 151. Alternatively, the second through hole 111 and the second mounting hole 112 communicate such that the mounting member is closer to the magnetic member 13.
In the embodiment, the second mounting holes 112 are formed, so that the mounting of the mounting piece can be facilitated; the axle seat 15 is arranged in the embodiment, so that the rotating connection of the thumb wheel 11 and the chassis 2 can be realized, and the axle seat 15 has the function of realizing the rotating connection of the thumb wheel and the function of installing the magnetic piece 13 by arranging the third installation hole 1511 at the upper end of the axle seat 15.
Further, the number of the gear teeth is not particularly limited by the present application, and the plurality of gear teeth are uniformly distributed on the outer circumferential surface of the dial 11. The number of teeth on the thumb wheel 11 in this embodiment is 6.
Optionally, the mounting member includes a plurality of assembling core rods 14 and a sleeve 12, the sleeve 12 is arranged above the assembling core rods 14, the assembling core rods 14 are connected with the sleeve 12 in a one-to-one correspondence manner, and the lower ends of the assembling core rods 14 are rotatably connected with the thumb wheel 11.
Optionally, the assembly stem 14 includes a first top portion 141, a first middle portion 142, and a first bottom portion 143 that are sequentially connected from top to bottom. The first top portion 141, the first middle portion 142, and the first bottom portion 143 are all cylinders; the outer diameter of the first middle portion 142 is greater than the outer diameter of the first top portion 141 and also greater than the outer diameter of the first bottom portion 143. Wherein the first top 141 is connected to the lower end of the sleeve 12; the first middle part 142 is the part with the largest outer diameter on the assembly core bar 14, the first middle part 142 is used for limiting the assembly core bar 14, and the lower surface of the first middle part 142 is abutted with the upper surface of the thumb wheel 11. The first bottom 143 is disposed in the second mounting hole 112 of the thumbwheel 11, and the first bottom 143 is rotatably connected to the second mounting hole 112. Optionally, an outer diameter of the first top portion 141 is greater than an outer diameter of the first bottom portion 143; the outer diameter of the first middle portion 142 is greater than the outer diameter of the first top portion 141.
Further, the lower end of the sleeve 12 is provided with a fourth mounting hole connected to the first top 141. The upper surface of the first intermediate portion 142 abuts the lower end surface of the sleeve 12. The fourth mounting hole may be a through hole or a blind hole. The upper end of the sleeve 12 is provided with a fifth mounting hole for mounting a product to be coated, and the fifth mounting hole can be a through hole or a blind hole. In this embodiment, the fourth mounting hole and the fifth mounting hole are communicated as an axial through hole. Optionally, the sleeve 12 includes an inner wall 121 and an outer wall 122. The inner wall 121 is adapted to matingly engage the first top portion 141 of the mounting stem 14.
Further, the tooling unit 1 further comprises a support disc 16 and a support rod 17. The support disc 16 is arranged above the thumb wheel 11, and a first through hole 161 for the upper end of the sleeve 12 to penetrate out is arranged on the support disc 16; the upper end of the supporting rod 17 is connected with the supporting disc 16, and the lower end of the supporting rod 17 is connected with the thumb wheel 11. According to the embodiment, the support disc 16 and the support rod 17 are arranged, so that the sleeve 12 and the installed product can be effectively supported, and the stability of the sleeve 12 for installing the product is effectively improved; the supporting disc 16 and the supporting rod 17 can ensure that the assembling core rod 14 and the connecting sleeve 12 are vertical to the chassis 2, and the service life of the tool is prolonged.
Optionally, the upper surface of the thumb wheel 11 is further provided with fifth mounting holes 113, and the fifth mounting holes 113 are uniformly distributed circumferentially around the central axis of the thumb wheel 11. The fifth mounting hole 113 may be a through hole or a blind hole; the fifth mounting hole 113 in this embodiment is a blind hole. The fifth mounting hole 113 is used for mounting the support bar 17.
Alternatively, the lower surface of the support plate 16 is provided with first through holes 161 and sixth mounting holes 162 uniformly distributed in the circumferential direction. The sixth mounting hole 162 may be a through hole or a blind hole, and in this embodiment, the sixth mounting hole 162 is a through hole. The first through hole 161 is for mating with the outer wall 122 of the sleeve 12. The sixth mounting hole 162 is for mounting the support bar 17.
Optionally, the support bar 17 includes a third top portion 171 and a third bottom portion 172. The third top 171 and the third bottom 172 are each cylindrical; the outer diameter of the third top portion 171 is smaller than the outer diameter of the third bottom portion 172. The third top 171 is adapted to be coupled to the sixth mounting hole 162 of the support plate 16. The third bottom 172 is adapted to be cooperatively coupled with the fifth mounting hole 113 of the thumbwheel 11.
Further, the chassis 2 comprises an outer ring 21, an inner ring 22 and a cross beam 23. Wherein, a plurality of first mounting holes 211 are uniformly distributed in the circumferential direction of the outer ring 21, and the lower end of the shaft seat 15 is connected with the first mounting holes 211. Wherein the first mounting hole 211 may be a through hole or a blind hole. The first mounting hole 211 in this embodiment is a through hole. The inner ring 22 is arranged on the inner side of the outer ring 21, and a connecting part is arranged on the inner ring 22 and is used for being matched with internal parts of the physical vapor deposition equipment to realize center positioning. One end of the cross beam 23 is connected to the inner ring 22, and the other end of the cross beam 23 is connected to the outer ring 21. The cross members 23 are used to connect the outer ring 21 and the inner ring 22, and the cross members 23 may be any number. The cross members 23 are preferably evenly distributed in the circumferential direction in this embodiment; the number of the cross beams 23 is 4. In this embodiment, the outer ring 21 and the inner ring 22 are connected by the cross beam 23, so that the weight of the chassis 2 can be effectively reduced.
Further, the shape of the connection on the inner ring 22 matches the shape of the internal mating parts in the physical vapor deposition apparatus. Optionally, the connection portion includes a first groove 221, a second groove 222, and a protrusion 223. The first groove 221 is vertically penetrated and arranged on the inner side wall of the inner ring 22; the second groove 222 is vertically penetrating through the inner sidewall of the inner ring 22, and the protrusion 223 is disposed between the first groove 221 and the second groove 222. The first groove 221, the second groove 222, and the protrusion 223 form a wave groove shape.
Optionally, in this embodiment, the chassis 2, the thumb wheel 11, the axle seat 15, the assembly core 14, the support rod 17, the support disc 16 and/or the sleeve 12 are made of stainless steel. The first top 141 of the mounting stem 14 and the fourth mounting hole of the sleeve 12 may be welded, threaded, or snapped, etc. The third top 171 of the support bar 17 and the sixth mounting hole 162 of the support plate 16 may be welded, screwed or snapped, etc. The third bottom 172 of the support bar 17 and the fifth mounting hole 113 of the thumbwheel 11 may be welded, screwed, or snapped, etc.
The embodiment also provides a physical vapor deposition device for placing a product to be coated, depositing TiC, tiN, tiAlN and other superhard coatings on the surface of the product, wherein the device comprises a chamber and a tool, and the tool is arranged in the chamber and is the tool. The chamber in this embodiment is a coating oven chamber.
Further, the physical vapor deposition device also comprises a base, a motor, a bracket chassis 3, a transmission unit and a poking sheet 4. The bottom of cavity is all located to base and motor, and the motor shaft of motor stretches out the base, and the motor can drive support chassis 3 and rotate, and the base is used for supporting other parts. Further, a plurality of rotating columns 31 are circumferentially distributed on the bracket chassis 3, and a plurality of tools are arranged on the rotating columns 31. A plurality of tools are arranged on the same rotary upright 31 in a superposition manner, and a separation sleeve 311 is arranged between every two adjacent tools to prevent the chassis 2 on the same rotary upright 31 from collision with each other; the spacer 311 may be a steel sleeve. The transmission unit is arranged on the bracket chassis 3 and is used for driving the rotary upright 31 to rotate. The plectrum 4 locates the outside of frock, and when the frock autorotation, plectrum 4 and the teeth of a cogwheel 11 contact to stir the rotation of thumb wheel 11.
Further, the transmission unit comprises a sun gear 5 and a plurality of planet gears 6 in engagement with the sun gear 5. The sun gear 5 is arranged below the support chassis 3, the sun gear 5 is detachably connected with the base, and the support chassis 3 can rotate relative to the sun gear 5. The axis of the sun gear 5 is collinear with the centre of rotation of the carrier chassis 3. The planetary gears 6 are connected with the rotating upright posts 31 in one-to-one correspondence, and the planetary gears 6 and the rotating upright posts 31 can both rotate on the bracket chassis 3. The motor drives the bracket chassis 3 to rotate, the tool arranged on the bracket chassis 3 rotates along with the bracket chassis 3, the planet wheel 6 revolves around the sun wheel 5 along with the rotation of the bracket chassis 3, the sun wheel 5 is fixed and not rotated, the planet wheel 6 is meshed with the sun wheel 5, the planet wheel 6 is driven to rotate through the transition of the sun wheel 5, the planet wheel 6 drives the rotating upright post 31 to rotate, and the rotating upright post 31 drives the tool arranged on the rotating upright post to rotate. Optionally, the rotating upright 31 is provided with a connecting groove which is matched with the connecting part of the chassis 2. The connecting groove in this embodiment is in the shape of a wave groove which cooperates with the chassis 2. The shape of the connection part between the connection groove and the chassis 2 is not particularly limited, and the connection between the rotating upright 31 and the chassis 2 can be realized. Optionally, the lower surface of the carrier chassis 3 is provided with a sun gear limit 32, and the sun gear limit 32 can limit the circumferential and downward movement of the sun gear 5 without affecting the rotation of the carrier chassis 3 relative to the sun gear 5. Optionally, the lower surface of the sun gear 5 is provided with a plurality of limiting holes 51, and the base is provided with limiting columns matched with the limiting holes 51. The lower surface of the bracket chassis 3 is provided with a plurality of connecting columns 33, the connecting columns 33 are connected with positioning holes of a turntable support in the cavity in a positioning way, and the turntable support is driven by a motor.
Further, a bracket 34 is arranged on the bracket chassis 3 corresponding to the outer side of each rotary upright 31, and a plectrum 4 is respectively arranged on the bracket 34 corresponding to each tool. In a static state, one plectrum 4 is correspondingly attached to one plectrum 11 of one tool; when the rotating upright 31 drives the tool to rotate, the poking sheets 4 drive each poking wheel 11 to rotate by friction force, so that the poking wheels 11 can rotate.
Further, when the thumb wheel 11 rotates, the assembly core rod 14 and the magnet are attracted by magnetic force, and friction is generated due to the attraction of the magnetic force to generate rotation of the assembly core rod 14, so that the sleeve 12 connected with the assembly core rod 14 is driven to rotate. The product to be coated is placed on the sleeve 12, so that the product to be coated rotates automatically.
Further, the upper ends of the rotating upright 31 and the bracket 34 are connected with a bracket top cover 7, the bracket top cover 7 is matched with each rotating upright 31 and the bracket 34 through holes, and the holes on the bracket top cover 7 allow the rotating upright 31 to rotate.
The application method of the embodiment is as follows:
inserting the second bottom 153 of the axle seat 15 into the first mounting hole 211 of the chassis 2, sleeving the second through hole 111 of the thumb wheel 11 on the second top 151 of the axle seat 15, and rotationally connecting the second through hole with the second middle 152; inserting the magnet into the third mounting hole 1511 of the second top 151 of the shaft seat 15; sequentially inserting the first bottom 143 of the assembly core rod 14 into the second mounting hole 112 of the thumb wheel 11, and limiting the assembly core rod on the thumb wheel 11 through the first middle 142; inserting the third bottom 172 of the support bar 17 into the fifth mounting hole 113 of the dial 11 and fixing by welding; the support plate 16 is mounted on the third top 171 of the support rod 17 through the sixth mounting hole 162 of the support plate 16 and fixed by welding, the outer wall 122 of the sleeve 12 passes through the first through hole 161 of the support plate 16, the inner wall 121 of the sleeve 12 is inserted into the first top 141 of the assembling core rod 14 and fixed on the first middle 142 of the assembling core rod 14 and fixed by welding; the product to be coated is sequentially installed on the sleeve, the end to be coated or the surface to be coated of the product faces upwards, and the steps are repeated until the assembly of the tool unit 1 with the product is installed in the first installation hole 211 of the chassis 2.
The bracket top cover 7 is disassembled, the tool is sleeved on the rotary upright post 31, a separation sleeve 311 with proper size is selected to be sleeved on the rotary upright post 31 according to the height of a product to be coated, a second tool is placed on the separation sleeve 311 in a superposition mode, and the separation sleeve 311 is used for separating the two tools to avoid product collision. This is repeated until one of the rotating columns 31 is fully charged, until all of the rotating columns 31 are fully charged. Assembled as shown in fig. 13.
The fixture is moved into the chamber, the limiting hole 51 of the sun gear 5 is adjusted and confirmed to be aligned with the limiting column on the bottom base of the chamber, the connecting column 33 of the bracket chassis 3 is aligned with the positioning hole of the turntable support in the chamber, the rotation frequency of the motor is set, process information is loaded, and the physical vapor deposition equipment is started to operate.
The tooling adopted by the embodiment is arranged in a cylindrical array, so that the chamber space of the physical vapor deposition equipment is utilized to the maximum extent; in the embodiment, each tool is provided with three mounting parts, compared with a common coating tool, the loading capacity of the tool is improved by 200%, the production efficiency is greatly improved, and the tool is particularly suitable for large-scale industrial production of medium-small-size products. The application has the four-fold rotation design, namely, the product to be coated rotates in the sleeve 12, revolves around the center of the thumb wheel 11 in a small range, rotates on the tool chassis 2 and revolves around the center of the bracket chassis 3, thereby fully ensuring the film thickness uniformity of the coating product. The application adopts a planetary design, only uses a gear structure at the bottom of the bracket chassis 3, uses the thumb wheel 11, the magnet and the assembly core bar 14 to replace the gear structure to realize the rotation of the assembly core bar 14, has strong mechanical reliability and greatly reduces rotation faults. The application adopts motor drive, realizes full-automatic operation in the coating process, does not need manual operation, and is suitable for physical vapor deposition methods such as vacuum evaporation, sputtering coating or ion plating.
The embodiment does not limit the structure and the type of the product to be coated; the product to be coated can be a rod-shaped product, such as an end mill or a drill, a part of the rod-shaped product which does not need coating can be inserted into a fifth mounting hole of the sleeve, and the hole depth of the fifth mounting hole of the sleeve can ensure that the part of the product which needs coating is completely exposed above the sleeve; the product to be coated can also be a sheet-like product with mounting holes, such as cemented carbide blades, which are sleeved on the outer wall of the sleeve. The outer wall of one sleeve can be provided with a sheet-shaped product with a mounting hole, and also can be provided with a plurality of sheet-shaped products with mounting holes, and adjacent products are separated by a spacing bead or a spacing sleeve.
Example 2
As shown in fig. 16 to 18, this embodiment differs from embodiment 1 in that: the tool of the embodiment is not provided with a sleeve, a supporting disc and a supporting rod; the fifth mounting hole for mounting the support bar is not formed on the dial wheel since the support bar is not formed. The mounting piece of this embodiment includes a plurality of installation core bars 14', and installation core bar 14' includes the body of rod and spacing ring 147, and the spacing ring 147 cover is located the body of rod, and the lower extreme and the thumb wheel 11 rotation of the body of rod are connected, and the lower surface of spacing ring 147 and the upper surface butt of thumb wheel 11, and the upper end of the body of rod is used for the cover to establish and waits for the coating film product. The limiting ring 147 is used for installing the connection limit of the core rod 14' and the thumb wheel 11. The other components are constructed and operate in the same manner as in embodiment 1.
The upper end of the mounting core rod 14 'of the present embodiment extends out of the thumb wheel 11, and the rod body of the mounting core rod 14' extending upward out of the thumb wheel 11 is used for mounting a product.
Further, the mounting core rod 14' includes a first rod 144, a second rod 145 and a third rod 146, the diameter of the first rod 144 is smaller than that of the third rod 146, the second rod 145 is tapered, the lower end of the first rod 144 is connected with the small end of the second rod 145, and the large end of the second rod 145 is connected with the upper end of the third rod 146. The stop collar 147 is sleeved on the third rod 146. The first rod 144 of the smallest diameter facilitates the installation of the product. Optionally, for products with mounting holes having smaller dimensions, the diameter of the large end of the second rod 145 is larger than the aperture of the mounting hole of the product to be coated, so that the product is conveniently sleeved on the second rod 145.
The embodiment is suitable for coating a product with a mounting hole, so long as the product is provided with the mounting hole, such as a hard alloy blade, and the mounting hole of the product is sleeved on a second rod body provided with the core rod.
Finally, it should be noted that: the foregoing description of the preferred embodiments of the present application is not intended to be limiting, but rather, it will be apparent to those skilled in the art that the foregoing description of the preferred embodiments of the present application can be modified or equivalents can be substituted for some of the features thereof, and any modification, equivalent substitution, improvement or the like that is within the spirit and principles of the present application should be included in the scope of the present application.
Claims (10)
1. A tooling, characterized by comprising:
the tool unit (1) comprises a poking wheel (11) and a transmission mechanism, wherein a plurality of installation pieces are arranged on the poking wheel (11), the transmission mechanism is rotationally connected with the poking wheel (11), and the transmission mechanism is used for driving the installation pieces to rotate; the upper surface of the poking wheel (11) is provided with a second through hole (111) and a second mounting hole (112), the second through hole (111) is arranged at the center of the poking wheel (11), the second mounting holes (112) are uniformly distributed circumferentially by taking the central axis of the poking wheel (11) as the center, and the lower end of the mounting piece extends into the second mounting hole (112); the transmission mechanism comprises a magnetic piece (13), the magnetic piece (13) is arranged at the center of the thumb wheel (11), the installation pieces are circumferentially and uniformly distributed on the outer side of the magnetic piece (13) by taking the central axis of the thumb wheel (11) as the center, and the part of each installation piece adjacent to the magnetic piece (13) can be attracted by the magnetic piece (13);
the base plate (2) is provided with a plurality of tool units (1), and the thumb wheel (11) is rotationally connected with the base plate (2); and
the magnetic component comprises a base (2), wherein the lower end of the base (15) is connected with the base (2), the upper end of the base (15) is rotationally connected with the second through hole (111), and a third mounting hole (1511) for mounting the magnetic component (13) is formed in the upper end of the base (15).
2. Tool according to claim 1, wherein the outer circumferential surface of the thumb wheel (11) is evenly distributed with a plurality of gear teeth.
3. Tooling according to claim 1, characterized in that the second mounting hole (112) communicates with the second through hole (111).
4. A tool according to any one of claims 1-3, wherein the mounting member comprises a plurality of assembling core rods (14) and sleeves (12), the sleeves (12) are arranged above the assembling core rods (14), the assembling core rods (14) are connected with the sleeves (12) in a one-to-one correspondence manner, and the lower ends of the assembling core rods (14) are rotatably connected with the shifting wheel (11).
5. The tooling according to claim 4, wherein the assembly core bar (14) comprises a first top (141), a first middle (142) and a first bottom (143) which are sequentially connected from top to bottom, the diameter of the first middle (142) is larger than that of the first top (141) and the first bottom (143), the first top (141) is connected with the lower end of the sleeve (12), the upper surface of the first middle (142) is abutted with the lower end surface of the sleeve (12), the first bottom (143) is rotationally connected with the thumb wheel (11), and the lower surface of the first middle (142) is abutted with the upper surface of the thumb wheel (11).
6. Tool according to claim 4, characterized in that the tool unit (1) further comprises:
the support disc (16) is arranged above the thumb wheel (11), and a first through hole (161) for the upper end of the sleeve (12) to penetrate out is formed in the support disc (16);
the upper end of the supporting rod (17) is connected with the supporting disc (16), and the lower end of the supporting rod (17) is connected with the thumb wheel (11).
7. A tool according to any one of claims 1-3, wherein the mounting member comprises a plurality of mounting core rods (14 '), the mounting core rods (14') comprise rod bodies and limiting rings (147), the rod bodies are sleeved with the limiting rings (147), the lower ends of the rod bodies are rotationally connected with the poking wheels (11), the lower surfaces of the limiting rings (147) are abutted with the upper surfaces of the poking wheels (11), and the upper ends of the rod bodies are used for sleeving products to be coated.
8. The tool according to claim 7, wherein the rod body comprises a first rod body (144), a second rod body (145) and a third rod body (146), the diameter of the first rod body (144) is smaller than that of the third rod body (146), the second rod body (145) is conical, the lower end of the first rod body (144) is connected with the small end of the second rod body (145), the large end of the second rod body (145) is connected with the upper end of the third rod body (146), and the limiting ring (147) is sleeved on the third rod body (146).
9. Tooling according to claim 1, characterized in that said chassis (2) comprises:
the outer ring (21), a plurality of first mounting holes (211) which are uniformly distributed are formed in the circumferential direction of the outer ring (21), and the lower end of the shaft seat (15) is connected with the first mounting holes (211);
an inner ring (22) arranged on the inner side of the outer ring (21), wherein a connecting part is arranged on the inner ring (22);
and one end of the cross beam (23) is connected with the inner ring (22), and the other end of the cross beam (23) is connected with the outer ring (21).
10. A physical vapor deposition apparatus comprising a chamber and a tool disposed within the chamber, wherein the tool is the tool of any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210916712.2A CN115323339B (en) | 2022-08-01 | 2022-08-01 | Frock and physical vapor deposition equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210916712.2A CN115323339B (en) | 2022-08-01 | 2022-08-01 | Frock and physical vapor deposition equipment |
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| CN115323339A CN115323339A (en) | 2022-11-11 |
| CN115323339B true CN115323339B (en) | 2023-12-05 |
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| CN115323339A (en) | 2022-11-11 |
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