CN212375373U - A spheroid part coating film anchor clamps for physical vapor deposition - Google Patents
A spheroid part coating film anchor clamps for physical vapor deposition Download PDFInfo
- Publication number
- CN212375373U CN212375373U CN202021458667.3U CN202021458667U CN212375373U CN 212375373 U CN212375373 U CN 212375373U CN 202021458667 U CN202021458667 U CN 202021458667U CN 212375373 U CN212375373 U CN 212375373U
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- Prior art keywords
- plate
- vapor deposition
- physical vapor
- base plate
- upper plate
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- 239000011248 coating agent Substances 0.000 title claims abstract description 34
- 238000000576 coating method Methods 0.000 title claims abstract description 34
- 238000005240 physical vapour deposition Methods 0.000 title claims abstract description 31
- 238000005507 spraying Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005289 physical deposition Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a ball part coating fixture for physical vapor deposition, which comprises an upper fixture and a lower fixture which are respectively fixed on a converter rod, wherein the upper fixture comprises a base plate sleeved on the converter rod, a plurality of turntable bearings are arranged on the base plate, and an upper bracket is arranged in each turntable bearing; the lower fixture comprises a base plate, a middle plate and an upper plate, wherein the base plate, the middle plate and the upper plate are sequentially sleeved on a converter rod, the upper plate is fixed on the converter rod, the upper plate is provided with a rotating column corresponding to a bearing position of the rotating plate, a lower support corresponding to a position of the upper support is arranged on the rotating column, the base plate is fixed on the upper plate, the middle plate is clamped between the base plate and the upper plate, the middle plate can rotate relative to the base plate and the upper plate, one side of the middle plate is provided with a protruding portion, a shifting sheet is arranged on the protruding portion, and the shifting sheet can shift the rotating column to rotate. The utility model discloses a spheroid part coating film anchor clamps realizes centre gripping and rotatory spraying to the spheroid part.
Description
Technical Field
The utility model relates to a physics vapor deposition technical part coating film field, concretely relates to spheroid part coating film anchor clamps for physics vapor deposition.
Background
Physical Vapor Deposition (PVD) is a process in which a metal, an alloy or a compound is evaporated (or sputtered) in a vacuum chamber, and the vapor atoms or molecules are deposited on the surface of a workpiece under certain conditions. Physical vapor deposition can be classified into vacuum evaporation, vacuum sputtering, and ion plating. Compared with CVD, PVD method has the main advantages of lower processing temperature, faster deposition rate, no pollution, etc., thus having high practical value.
With the development of the physical vapor deposition technology, a coating fixture is in a wide range, but no PVD coating fixture for spherical parts exists in the market at present, and the coating effect is poor because the spherical parts are not easy to clamp and fix and the spherical surfaces of the spherical parts are coated from fixed positions.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to provide a spheroid part coating anchor clamps for physical vapor deposition realizes centre gripping and rotatory spraying to the spheroid part.
In order to solve the technical problem, the utility model provides a ball part coating fixture for physical vapor deposition, which comprises an upper fixture and a lower fixture which are respectively fixed on a converter rod, wherein the upper fixture comprises a base plate sleeved on the converter rod, a plurality of turntable bearings are arranged on the base plate, and an upper bracket is arranged in each turntable bearing; the lower fixture comprises a base plate, a middle plate and an upper plate, wherein the base plate, the middle plate and the upper plate are sequentially sleeved on a converter rod, the upper plate is fixed on the converter rod, the upper plate is provided with a rotating column corresponding to a bearing position of the rotating plate, a lower support corresponding to a position of the upper support is arranged on the rotating column, the base plate is fixed on the upper plate, the middle plate is clamped between the base plate and the upper plate, the middle plate can rotate relative to the base plate and the upper plate, one side of the middle plate is provided with a protruding portion, a shifting sheet is arranged on the protruding portion, and the shifting sheet can shift the rotating column to rotate.
In a preferred embodiment of the present invention, the turntable bearing and the rotation column are circumferentially and uniformly distributed on the base plate and the upper plate, respectively, with the furnace rod as a center.
The utility model discloses a preferred embodiment, further include protruding on the hanging wall is provided with little cylinder, the column bottom of rotating is provided with the cylinder hole and cooperates with the little cylinder on the hanging wall, the column of rotating can rotate on little cylinder.
In a preferred embodiment of the present invention, the rotation post is provided with a rotation post groove at the periphery thereof, which is engaged with the pick.
In a preferred embodiment of the present invention, the upper frame is connected to the turntable bearing in a split manner, and the lower frame is connected to the rotation post in a split manner.
The utility model discloses a preferred embodiment, further include the upper bracket inserts in the slewing bearing, the upper bracket adopts interference fit's mode to be connected with slewing bearing.
In a preferred embodiment of the present invention, the lower frame is screwed to the rotary post.
In a preferred embodiment of the present invention, the upper frame and the lower frame are provided with a spherical groove matching with the ball part.
In a preferred embodiment of the present invention, the converter rod is provided with a plurality of fixing grooves, and the base plate and the upper plate are screwed into the fixing grooves through fastening screws to fix the positions of the base plate and the upper plate.
The utility model discloses a preferred embodiment, further include the plectrum passes through plectrum stand and plectrum screw fixation on the protruding portion of center, plectrum stand welding or through bolted connection be in on the center.
The utility model has the advantages that:
the utility model discloses an it is fixed that anchor clamps and lower anchor clamps carry out the centre gripping with spheroid part to going up anchor clamps and lower anchor clamps cover and establishing on the rotary furnace pole, rotate along with the rotary furnace pole together, it also uses the rotary furnace pole as the axle center rotation to go up the spheroid part between anchor clamps and the lower anchor clamps, at the pivoted in-process, be provided with on anchor clamps down and not rotate stove pivoted well dish and plectrum along with rotating, spheroid part self rotation can be stirred through the plectrum, thereby, revolution and the rotation of spheroid part in cladding material equipment have been realized through this anchor clamps, can realize carrying out the omnidirectional spraying to the sphere on spheroid surface.
Drawings
FIG. 1 is an assembly diagram of a coating fixture for a physical vapor deposition ball part of the present invention;
FIG. 2 is a drawing of an upper fixture of a coating fixture for a physical vapor deposition ball part of the present invention;
FIG. 3 is an exploded view of the lower clamp of the coating clamp for physical vapor deposition of spherical parts of the present invention;
FIG. 4 is a lower clamp diagram of a coating clamp for a physical vapor deposition ball part according to the present invention;
FIG. 5 is a top view of a lower fixture of a coating fixture for physical vapor deposition of a spherical part according to the present invention;
FIG. 6 is a view of a lower fixture rotating column of a coating fixture for a physical vapor deposition spherical part of the present invention;
FIG. 7 is a view of a lower holder of a coating fixture for a physical vapor deposition ball part according to the present invention;
FIG. 8 is a drawing of an upper bracket of a coating clamp for a physical vapor deposition ball part of the present invention;
FIG. 9 is a view of a furnace rod of a coating fixture for a physical vapor deposition sphere part of the present invention.
The reference numbers in the figures illustrate: 1. a converter rod; 11. fixing the groove; 2. an upper clamp; 21. a base plate; 22. a turntable bearing; 23. an upper bracket; 3. a lower clamp; 31. a chassis; 32. a middle disc; 33. hanging the plate; 331. a small cylinder; 34. rotating the column; 341. a rotating post groove; 35. a lower bracket; 36. a shifting sheet; 37. a plectrum column; 38. a plectrum screw; 4. a ball part; 5. a spherical recess; 6. and (5) fastening the screw.
Detailed Description
The present invention is further described with reference to the following drawings and specific embodiments so that those skilled in the art can better understand the present invention and can implement the present invention, but the embodiments are not to be construed as limiting the present invention.
Referring to fig. 1-4, an embodiment of a sphere part coating fixture for physical vapor deposition according to the present invention includes an upper fixture 2 and a lower fixture 3 respectively fixed on a converter rod 1, where the upper fixture 2 and the lower fixture 3 are used to clamp and fix a sphere part 4, the upper fixture 2 includes a base plate 21 sleeved on the converter rod 1, the base plate 21 is provided with a plurality of turntable bearings 22, and an upper support 23 is provided in the turntable bearings 22; the lower clamp 3 comprises a bottom plate 31, a middle plate 32 and an upper plate 33 which are sequentially sleeved on the converter rod 1, the upper plate 33 is fixed on the converter rod 1, the upper plate 33 is provided with a rotating column 34 corresponding to the position of the turntable bearing 22, the rotating column 34 is provided with a lower support 35 corresponding to the position of the upper support 23, the turntable bearing 22 and the rotating column 34 are respectively and circumferentially and uniformly distributed on the base plate 21 and the upper plate 33 by taking the converter rod 1 as the center, a sphere part 4 is clamped between each upper support 23 and each lower support 35, the bottom plate 31 is fixed on the upper plate 33 through a connecting screw, the middle plate 32 is clamped between the bottom plate 31 and the upper plate 33, the middle plate 32 can rotate relative to the bottom plate 31 and the upper plate 33, one side of the middle plate 32 is provided with a protruding part, the protruding part is provided with a shifting sheet 36, the shifting sheet 36 is fixed on the protruding part of the middle plate 32 through a shifting sheet upright 37 and a shifting sheet screw 38, the shifting piece upright column 37 is welded or connected to the middle disc 32 through a bolt, and the shifting piece 36 can shift the rotating column 34 to rotate.
Referring to fig. 5, a small cylinder 331 protrudes from the upper plate 33, a cylindrical hole is formed at the bottom end of the rotary column 34 to be matched with the small cylinder 331 on the upper plate 33, and the rotary column 34 can rotate on the small cylinder 331.
Referring to fig. 6, a plurality of rotating cylinder recesses 341 are formed in the outer circumference of the rotating cylinder 34 and are engaged with the dials 36, and the dials 36 are sequentially inserted into the rotating cylinder recesses 341, so that the rotating cylinder 34 is rotated.
Specifically, when the clamp of this embodiment is placed in a physical deposition spraying apparatus, because the upper clamp 2 and the lower clamp 3 are both sleeved on the converter rod 1, the upper clamp 2 and the lower clamp 3 are driven by the converter rod 1 to rotate, the middle disc 32 is movably disposed between the bottom disc 31 and the upper disc 33, the middle disc 32 can rotate relative to the bottom disc 31 and the upper disc 33, a stop lever is disposed on a rotation track of a protruding portion of the middle disc 32 to limit the rotation of the middle disc 32, so that in the rotation process of the converter rod 1, the middle disc 32 stops rotating, the dial 36 on the middle disc 32 also stops moving, the upper disc 33 and the bottom disc 31 rotate relative to the middle disc 32, the upper disc 33 rotates to drive the rotation column 34 to move, and when the rotation column groove 341 moves to contact with the dial 36, the dial 36 dials 34 will dial to rotate.
Referring to fig. 7 and 8, in order to better hold the ball element 4, the end surfaces of the upper bracket 23 and the lower bracket 35 are provided with spherical grooves 5 matched with the ball element 4, the ball element 4 is further fixed by the spherical grooves 5, and the spherical grooves 5 with different sizes can be arranged according to the size of the ball element 4.
Specifically, for spherical parts 4 with different sizes, an upper bracket 23 and a lower bracket 35 with different sizes need to be adopted, and in order to facilitate replacement of the upper bracket 23 and the lower bracket 35, in this embodiment, the upper bracket 23 is separately connected with the turntable bearing 22, and the lower bracket 35 is separately connected with the rotating column 34.
Specifically, the upper bracket 23 is inserted into the turntable bearing 22, and the upper bracket 23 is connected with the turntable bearing 22 in an interference fit manner; the lower bracket 35 and the rotary column 34 are connected through threads, in a specific implementation process, the upper bracket 23 and the turntable bearing 22 can also be connected through threads, and the lower bracket 35 and the rotary column 34 can also be connected in an interference fit manner.
Referring to fig. 9, a plurality of fixing grooves 11 are formed in the converter rod 1, the base plate 21 and the upper plate 33 are screwed into the fixing grooves 11 through the fastening screws 6 to fix the positions of the base plate 21 and the upper plate 33, and then, in the process of clamping the sphere part 4, the lower clamp 3 is fixed on the converter rod 1 through the fastening screws 6, the sphere part 4 is placed between the upper clamp 2 and the lower clamp 3, the upper clamp 2 is moved down as much as possible to clamp the sphere part 4 between the upper clamp 2 and the lower clamp 3, and finally, the upper clamp 2 is fixed on the converter rod 1 through the fastening screws 4.
Specifically, in the jig of the present embodiment, when the spherical part 4 is coated, the spherical part 4 needs to be clamped, and no coating is applied to the position clamped by the upper bracket 23 and the lower bracket 35, so that a secondary coating is needed, and the clamping position of the upper bracket 23 and the lower bracket 35 is set at the coated position, so that the spherical part 4 which is not coated in the primary coating is partially coated, that is, the spherical surface of the spherical part 4 is completely coated.
The above-mentioned embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. Equivalent substitutes or changes made by the technical personnel in the technical field on the basis of the utility model are all within the protection scope of the utility model. The protection scope of the present invention is subject to the claims.
Claims (10)
1. A sphere part coating fixture for physical vapor deposition comprises an upper fixture and a lower fixture which are respectively fixed on a converter rod, and is characterized in that the upper fixture comprises a base plate sleeved on the converter rod, a plurality of turntable bearings are arranged on the base plate, and an upper support is arranged in each turntable bearing; the lower fixture comprises a base plate, a middle plate and an upper plate, wherein the base plate, the middle plate and the upper plate are sequentially sleeved on a converter rod, the upper plate is fixed on the converter rod, the upper plate is provided with a rotating column corresponding to a bearing position of the rotating plate, a lower support corresponding to a position of the upper support is arranged on the rotating column, the base plate is fixed on the upper plate, the middle plate is clamped between the base plate and the upper plate, the middle plate can rotate relative to the base plate and the upper plate, one side of the middle plate is provided with a protruding portion, a shifting sheet is arranged on the protruding portion, and the shifting sheet can shift the rotating column to rotate.
2. The ball part coating jig for physical vapor deposition as claimed in claim 1, wherein the turntable bearing and the rotation column are circumferentially and uniformly distributed on the base plate and the upper plate, respectively, centering on the shaft of the rotary furnace.
3. The ball part coating jig for physical vapor deposition as set forth in claim 1, wherein the upper plate is provided with a small cylinder protruding therefrom, and the lower end of the rotating cylinder is provided with a cylindrical hole for fitting with the small cylinder of the upper plate, the rotating cylinder being capable of rotating on the small cylinder.
4. The ball coating fixture for physical vapor deposition as claimed in claim 1, wherein the outer circumference of the rotation post is provided with a rotation post groove engaged with the pick.
5. The ball part coating jig for physical vapor deposition as claimed in claim 1, wherein the upper bracket is separately connected to the turntable bearing, and the lower bracket is separately connected to the rotation post.
6. The ball part coating clamp for physical vapor deposition of claim 5, wherein the upper bracket is inserted into the turntable bearing, and the upper bracket is connected with the turntable bearing in an interference fit manner.
7. The ball part coating jig for physical vapor deposition of claim 5, wherein the lower bracket is screw-coupled to the rotating cylinder.
8. The ball part coating jig for physical vapor deposition as claimed in claim 1, wherein the end surfaces of the upper holder and the lower holder are each provided with a spherical groove to be matched with the ball part.
9. The ball part coating jig for physical vapor deposition as set forth in claim 1, wherein the furnace bar is provided with a plurality of fixing grooves, and the base plate and the upper plate are each fixed in position by fastening screws screwed into the fixing grooves.
10. The ball part coating clamp for physical vapor deposition as claimed in claim 1, wherein the pick is fixed on the protruding part of the middle plate by a pick column and a pick screw, and the pick column is welded or bolted on the middle plate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202021458667.3U CN212375373U (en) | 2020-07-22 | 2020-07-22 | A spheroid part coating film anchor clamps for physical vapor deposition |
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CN202021458667.3U CN212375373U (en) | 2020-07-22 | 2020-07-22 | A spheroid part coating film anchor clamps for physical vapor deposition |
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CN212375373U true CN212375373U (en) | 2021-01-19 |
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CN202021458667.3U Active CN212375373U (en) | 2020-07-22 | 2020-07-22 | A spheroid part coating film anchor clamps for physical vapor deposition |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111850502A (en) * | 2020-07-22 | 2020-10-30 | 昆山欧思克精密工具有限公司 | A spheroid part coating film anchor clamps for physical vapor deposition |
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2020
- 2020-07-22 CN CN202021458667.3U patent/CN212375373U/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111850502A (en) * | 2020-07-22 | 2020-10-30 | 昆山欧思克精密工具有限公司 | A spheroid part coating film anchor clamps for physical vapor deposition |
CN111850502B (en) * | 2020-07-22 | 2024-07-30 | 昆山欧思克精密工具有限公司 | Sphere part coating clamp for physical vapor deposition |
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