CN217026059U - Online sweep angle magnetic control deposition auxiliary device - Google Patents

Abstract

The utility model relates to an online grazing angle magnetic control deposition auxiliary device which comprises a vertically arranged shell (1), wherein a rotatable rotating shaft (2) is connected in the shell (1), a vertically arranged sample rack (3) is connected on the circumferential surface of the rotating shaft (2), the upper end of the rotating shaft (2) is connected with a stepping motor (4), and the stepping motor (4) is fixed on the shell (1). The utility model makes the sample and the deposition material form grazing incidence by the rotatable sample frame, has the function of adjusting the angle of the grazing incidence and realizes the purpose of preparing a plurality of nano-column functional films with porous structures in large area.

Description

Online grazing angle magnetic control deposition auxiliary device

Technical Field

The utility model relates to the technical field of grazing angle magnetic control deposition, in particular to an online grazing angle magnetic control deposition auxiliary device.

Background

The glancing angle deposition technology is a method for preparing a film with a complex nano structure based on physical vapor deposition, and is characterized in that a substrate is inclined at a certain angle to reduce the surface migration of adsorbed atoms, so that a functional film with a porous nano column structure is obtained.

The magnetron deposition technology is widely applied to the fields of semiconductors, thin-film solar cells, energy-saving glass and the like due to high sputtering rate and uniform film coating, the conventional online magnetron deposition technology can only realize vertical sputtering of a sample, the angle between the sample and a sputtering source cannot be adjusted, and the grazing angle deposition technology is only applied to trial production of small-size samples and cannot be used for large-area preparation.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide an online grazing angle deposition auxiliary device, which solves the problems of angle adjustment and large-area grazing angle sputtering of a sample in an online deposition technology.

The utility model adopts the following technical scheme:

the utility model provides an online grazing angle magnetic control deposit auxiliary device, includes the casing of a vertical setting, its characterized in that: the shell is internally connected with a rotatable rotating shaft, the circumferential surface of the rotating shaft is connected with a vertically arranged sample rack, the upper end of the rotating shaft is connected with a stepping motor, and the stepping motor is fixed on the shell.

Further, the pivot lower extreme is equipped with angle stop device, angle stop device is including fixing the cylinder in the pivot bottom, and the cover has angle location splint that can free rotation on the cylinder, and angle location splint card is on the sample frame, at cylinder bottom fixed connection screw rod, connects lock nut on the screw rod, and it is fixed or unclamp to press from both sides angle location splint through the rotatory elasticity of lock nut.

Furthermore, the angle positioning clamping plate comprises a sleeve in clearance fit with the cylinder, a pair of parallel clamping pieces are connected to the circumferential surface of the sleeve, and the sample rack is fixed between the two clamping pieces.

Furthermore, the matching surfaces of the pair of clamping pieces and the sample rack are tightly and fixedly connected with the sample rack through rubber pads.

Furthermore, an angle scale is arranged on the circumferential surface of the sleeve, and a pointer is arranged on the corresponding shell.

Further, the shell is rotatably connected with the rotating shaft through a bearing.

The utility model has the following beneficial effects:

according to the utility model, the sample and the deposited substance form grazing angle incidence through the rotatable sample frame, so that the angle adjusting function is realized, and various nano-column functional films with porous structures can be prepared; by arranging the angle limiting device, the angle of the glancing angle can be accurately positioned, so that the comparison and optimization of different process technologies in industrial production are facilitated, and the quality defect caused by sample shaking in production is reduced.

Drawings

FIG. 1 is a schematic view of the structure of the present invention;

FIG. 2 is a schematic view of the structure of FIG. 1 in direction A;

FIG. 3 is a schematic view of the construction of the angularly oriented clamp plate;

fig. 4 is a schematic view of an angle scale and a pointer position.

Description of the reference numerals: 1. a housing; 2. a rotating shaft; 3. a sample holder; 4. a stepping motor; 5. an angle limiting device; 51. a cylinder; 52. an angle positioning splint; 521. a sleeve; 522. a clip; 523. a rubber pad; 53. a screw; 54. locking the nut; 55. an angle scale; 56. a pointer; 6. a bearing; 7. a fixing plate; 8. a sputtering source.

Detailed Description

In order to make the present invention more clear, an on-line grazing angle magnetron deposition auxiliary device of the present invention is further described below with reference to the attached drawings, and the specific embodiments described herein are only used for explaining the present invention and are not used for limiting the present invention.

As shown in fig. 1, an online grazing angle magnetron deposition auxiliary device includes a vertically disposed housing 1, the housing 1 is cylindrical, and a vertical strip-shaped opening (not labeled in the figure) is disposed on a circumferential side wall of the housing 1, and the opening is used as an avoiding structure for installing a rotating member in the housing 1. Be equipped with rotatable pivot 2 in the casing 1, pivot 2 passes through the bearing and is connected with casing 1, and its concrete structure is: the upper part and the lower part of the rotating shaft 2 are connected through a bearing 6 to form a simple support structure supported at two ends, wherein the bearing 6 can be a sliding bearing or a rolling bearing and has the functions of axial and radial limiting, for example, the upper part of the rotating shaft 2 adopts a deep groove ball rolling bearing, and the lower part adopts a combination of the deep groove ball bearing and a plane thrust bearing so as to meet the operating environment of low speed and light load of the rotating shaft 2. The circumferential surface of the rotating shaft 2 can be connected with the sample frame 3 through key connection modes such as splines, flat keys and the like, and can also be fixedly connected with the sample frame 3 in a mechanical interference fit or welding mode, and the sample frame 3 is of a frame structure and can also be of a flat plate structure so as to meet the requirement of placing sample glass. The sample holder 3 protrudes outside the housing 1 through the opening. The upper end of the rotating shaft 2 is connected with a stepping motor 4 through a coupler, and the stepping motor 4 is fixed on the upper end face of the shell 1. The stepping motor 4 drives the rotating shaft 2 to rotate slowly at a low speed.

As shown in fig. 1 and 2, a fixing plate 7 is fixedly connected to the housing 1, and the fixing plate 7 is a steel plate with a relatively large size, and is used as a base for connecting with other components in a sputtering coating production line, thereby providing a stable connection condition for the online grazing angle magnetron deposition auxiliary device. A sputtering source 8 is arranged on one side of the device, and the sample holder 3 is driven to rotate through a rotating shaft 2, so that an included angle a between the sample holder and the sputtering source 8 in the injection direction is changed.

As shown in fig. 1 and 3, the lower end of the rotating shaft 2 is provided with an angle limiting device 5, and the angle limiting device 5 locks and fixes the rotating angle of the sample holder 3, so that the sample holder 3 is prevented from shaking in the industrial production process. It is including fixing the cylinder 51 at the coaxial setting in pivot 2 bottom, and the cover has angle location splint 52 that can free rotation on the cylinder 51, and angle location splint 52 card is on sample holder 3, at the coaxial screw rod 53 that sets up of cylinder 51 bottom fixed connection, connects lock nut 54 on the screw rod 53. The angle positioning clamping plate 52 comprises a sleeve 521 in clearance fit with the circumferential surface of the cylinder 51, the upper end and the lower end of the sleeve 521 are parallel to each other, the circumferential surface of the sleeve is connected with a pair of parallel clamping pieces 522, the inner plate surfaces of the two clamping pieces are respectively connected with a rubber pad 523, and the two clamping pieces are extruded by the rubber pad 523 to form fixed connection with the fixed sample rack 3. The locking function of the angle limiting device 5 is realized by manually rotating the locking nut 54 to be tightened or loosened so that the upper end and the lower end of the sleeve 521 of the angle positioning splint 52 are in clamping or loosening fit with the corresponding end surfaces. In the manufacturing process, the rotating shaft 2, the cylinder 51 and the screw 53 can be integrally processed, so that the manufacturing precision of parts can be improved, and the assembly process flow can be reduced.

As shown in fig. 4, an angle scale 55 is connected to the circumferential surface of the sleeve 521, and a pointer 56 is provided on the corresponding housing 1, so that the rotation angle of the sample holder 3 can be clearly read by the pointer 56.

The scheme is used in a vertical state. When the sample rack is used, the locking nut 54 is unscrewed, the stepping motor 4 is started, and the stepping motor 4 stops running after the sample rack 3 is rotated to a proper angle; the sample holder 3 will then be held in place by the angular positioning clamp 52 by manually tightening the locking nut 54.

The utility model has simple structure, is practical and convenient, can accurately control the rotating angle through the stepping motor, and realizes the function of accurate angle positioning of the sample rack by matching with the angle limiting device; the utility model can be directly used on the existing vertical magnetron sputtering coating production line, and realizes the online large-area grazing angle sputtering coating.

The foregoing is illustrative of the preferred embodiments of the present invention, and is not to be construed as limiting thereof in any way; those skilled in the art can make many possible variations and modifications to the disclosed solution, or to modify equivalent embodiments, without departing from the scope of the solution, using the methods and techniques disclosed above. Therefore, any simple modification, equivalent replacement, equivalent change and modification made to the above embodiments according to the technical essence of the present invention are still within the scope of the protection of the technical solution of the present invention.

Claims (6)

1. An online grazing angle magnetron deposition auxiliary device comprises a vertically arranged shell (1), and is characterized in that: rotatable pivot (2) of casing (1) in-connection connects sample holder (3) of vertical setting on the periphery of pivot (2), and pivot (2) upper end is connected with step motor (4), and step motor (4) are fixed on casing (1).

2. The on-line grazing angle magnetron deposition auxiliary device according to claim 1, characterized in that: the utility model discloses a sample frame, including cylinder (51) in pivot (2) bottom, but cylinder (51) upper cover has angle location splint (52) of free rotation, and angle location splint (52) card is on sample frame (3), and cylinder (51) bottom fixed connection screw rod (53), connect lock nut (54) on screw rod (53), press from both sides angle location splint (52) tight fixedly or loosen through lock nut (54) rotatory elasticity with angle location splint (52), pivot (2) lower extreme is equipped with angle stop device (5), angle stop device (5) are including fixing cylinder (51) in pivot (2) bottom.

3. The on-line grazing angle magnetron deposition auxiliary device according to claim 2, characterized in that: the angle positioning clamping plate (52) comprises a sleeve (521) in clearance fit with the cylinder (51), a pair of parallel clamping pieces (522) is connected to the circumferential surface of the sleeve, and the sample holder (3) is fixed between the two clamping pieces.

4. The on-line grazing angle magnetron deposition auxiliary device according to claim 3, characterized in that: the matching surfaces of the pair of clamping pieces (522) and the sample rack (3) are tightly and fixedly connected with the sample rack (3) through rubber pads (523).

5. The on-line grazing angle magnetron deposition auxiliary device according to claim 4, characterized in that: an angle scale (55) is arranged on the circumferential surface of the sleeve (521), and a pointer (56) is arranged on the corresponding shell (1).

6. An on-line grazing angle magnetron deposition assistance device according to claim 1 or 5, characterized in that: the shell (1) is rotatably connected with the rotating shaft (2) through a bearing.

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