CN210176945U - Vacuum magnetic control rotary double-sided film coating clamp - Google Patents
Vacuum magnetic control rotary double-sided film coating clamp Download PDFInfo
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- CN210176945U CN210176945U CN201920453565.3U CN201920453565U CN210176945U CN 210176945 U CN210176945 U CN 210176945U CN 201920453565 U CN201920453565 U CN 201920453565U CN 210176945 U CN210176945 U CN 210176945U
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- clamp
- sample
- sample clamp
- stepping motor
- magnetic control
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- 239000007888 film coating Substances 0.000 title claims abstract description 5
- 238000009501 film coating Methods 0.000 title claims abstract description 5
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 18
- 239000010959 steel Substances 0.000 claims abstract description 18
- 230000001360 synchronised effect Effects 0.000 claims abstract description 4
- 238000000576 coating method Methods 0.000 claims description 24
- 239000011248 coating agent Substances 0.000 claims description 23
- 230000005484 gravity Effects 0.000 claims description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
The utility model discloses a vacuum magnetic control rotary double-sided film coating clamp, which comprises a stepping motor magnetic control driving device and a rotatable clamp device; the stepping motor magnetic control driving device comprises a vacuum chamber cavity, a stepping motor and a driving device thereof which are fixed on the vacuum chamber cavity, and a hollow rod piece welded on the vacuum chamber cavity. A gear is arranged on a rotating shaft of the stepping motor and is connected with the magnet rotating sleeve in a gear meshing mode. The hollow rod piece is welded with the vacuum chamber, the flexible steel wire rope is arranged in the hollow rod piece, and the upper end of the flexible steel wire rope is provided with magnets which are distributed circumferentially and can be matched with the magnet rotating sleeve to realize synchronous rotation. The rotatable clamp part comprises a sample clamp frame, a left sample clamp and a right sample clamp are correspondingly connected to the left side and the right side of the sample clamp frame, the left sample clamp and the right sample clamp can move on the sample frame to adapt to square samples of various sizes, and the left sample clamp and the right sample clamp can be fixed on the sample frame through screws.
Description
Technical Field
The utility model belongs to thin vacuum magnetron sputtering coating film field, concretely relates to rotatory two-sided coating film device of vacuum magnetic control.
Background
Magnetron sputtering is one type of Physical Vapor Deposition (PVD). The general sputtering method can be used for preparing multi-materials such as metal, semiconductor, insulator and the like, and has the advantages of simple equipment, easy control, large coating area, strong adhesive force and the like, while the magnetron sputtering method developed in the last 70 th century realizes high speed, low temperature and low damage. Since the high-speed sputtering is performed under a low pressure, it is necessary to effectively increase the ionization rate of the gas. Magnetron sputtering increases the sputtering rate by introducing a magnetic field at the surface of the target cathode, using the confinement of the magnetic field to charged particles to increase the plasma density.
The magnetron sputtering coating instrument applied at present can only carry out single-side coating, a coated sample is placed on a sample rack or transferred into a sample chamber, a new sample coating is supposed to be started, only a vacuum chamber is opened, the sample is replaced, and the vacuum is pumped to a proper vacuum environment, so that the process takes more time and the efficiency is low. By adopting the device, double-sided coating of the sample can be realized, and the working efficiency is greatly improved.
SUMMERY OF THE UTILITY MODEL
To the above-mentioned problem that exists among the prior art, the utility model aims to provide a rotatory two-sided coating film fixture device of vacuum magnetic control to realize the two-sided coating film of sample high-efficiently, high accuracy ground.
The utility model adopts the following technical scheme:
a vacuum magnetic control rotary double-sided coating clamp is characterized by comprising a stepping motor magnetic control driving device and a rotatable clamp device; the stepping motor magnetic control driving device comprises a vacuum chamber cavity, a stepping motor fixed on the vacuum chamber cavity and a hollow rod piece fixed on the vacuum chamber cavity; a stepping motor gear is arranged on a rotating shaft of the stepping motor, a magnet rotating sleeve is arranged at the top of the hollow rod piece, and the stepping motor gear is meshed with the magnet rotating sleeve; a flexible steel wire rope is arranged in the hollow rod piece, and magnets distributed circumferentially are arranged at the upper end of the flexible steel wire rope and can be matched with the magnet rotating sleeve to realize synchronous rotation; the rotatable clamp part comprises a sample clamp frame, a left sample clamp arranged on one side of the sample clamp frame and a right sample clamp arranged on the other side of the sample clamp frame, wherein the left sample clamp and the right sample clamp can move on the sample frame so as to be clamped.
The vacuum magnetic control rotating double-sided coating clamp is characterized in that a left expandable sample clamp is arranged on the left sample clamp, a right expandable sample clamp is arranged on the right sample clamp, and the left expandable sample clamp corresponds to the right expandable sample clamp in position, so that a circular sample is clamped.
The vacuum magnetic control rotating double-sided film coating clamp is characterized in that a self-locking device is arranged at the end part of a hollow rod piece close to a rotatable clamp device, a connecting end is arranged on the rotatable clamp device through a sample clamp frame and fixedly connected with a flexible steel wire rope through the connecting end, an annular groove is formed in the connecting end, an arc-shaped groove which is 180 degrees in distribution is formed in the annular groove, and a sliding key in the self-locking device is tangent to the bottom surface of the arc-shaped groove under the action of gravity.
The vacuum magnetic control rotating double-sided coating clamp is characterized in that bearings are arranged at two ends of the flexible steel wire rope in the hollow rod piece.
The utility model has the advantages that: ingenious design, reasonable structure and convenient use. The device is used for carrying out double-sided coating on a sample, so that the coating process is greatly simplified, the coating time is reduced, the coating efficiency is improved, the stability and the accuracy of the measured binding force of the film and the substrate are ensured, and the device has important significance to the research field of the film.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural view of the clamp body of the present invention;
fig. 3 is a partial installation diagram of the flexible steel wire rope of the present invention;
fig. 4 is a schematic structural view of the self-locking device of the present invention;
in the figure: 1-magnet rotating sleeve, 2-vacuum chamber cavity, 3-stepping motor gear, 4-stepping motor, 5-hollow rod piece, 6-sliding key self-locking device, 7-first screw, 8-sample clamp frame, 9-second screw, 10-left expanding clamp, 11-left sample clamp, 12-right expanding clamp, 13-right sample clamp, 14-third screw, 15-fourth screw, 16-flexible steel wire rope, 17-round sample, 18-bearing, 19-magnet, 20-self-locking device, 21-connecting end and 22-annular groove.
Detailed Description
The technical scheme of the utility model is further described with the accompanying drawings of the specification as follows:
as shown in fig. 1-4, a vacuum magnetic control rotary double-sided coating fixture comprises a stepping motor driving device and a rotatable fixture device.
The stepping motor driving device comprises a vacuum chamber cavity 2, a stepping motor 4 fixed on the vacuum chamber cavity 2 and a hollow rod 5 welded on the vacuum chamber cavity 2, wherein a stepping motor gear 3 is arranged on a rotating shaft of the stepping motor 4, a magnet rotating sleeve 1 is sleeved at the upper end of the hollow rod 5, the stepping motor gear 3 is meshed with the magnet rotating sleeve 1, an annular magnet is arranged in the magnet rotating sleeve 1, a flexible steel wire rope 16 is arranged in the hollow rod 5, and bearings 18 are arranged at the two ends of the flexible steel wire rope 16 in the hollow rod 5; the upper end of the flexible steel wire rope 16 is provided with magnets 19 which are distributed in a circumferential manner, so that the flexible steel wire rope 16 can be matched with the magnet rotating sleeve 1 to realize synchronous rotation.
The end part of the hollow rod piece 5 is provided with a self-locking device 20 at a position close to the rotatable clamping device, the sample clamping frame 8 of the rotatable clamping device is provided with a connecting end 21 and is fixedly connected with the flexible steel wire rope 16 through the connecting end 21, the connecting end 21 is provided with an annular groove 22, the annular groove 22 is provided with an arc-shaped groove distributed by 180 degrees, and the sliding key 6 in the self-locking device 20 is tangent to the plane of the arc-shaped groove under the action of gravity, so that the positioning is carried out.
The rotatable fixture device comprises a sample fixture frame 8, wherein one end of the sample fixture frame 8 is fixedly connected with a flexible steel wire rope 16, a left sample fixture 11 and a right sample fixture 13 are correspondingly connected to the left side and the right side of the sample fixture frame 8, the left sample fixture 11 and the right sample fixture 13 can move on the sample frame 8, the left sample fixture 11 and the right sample fixture 13 are fixed on the sample frame 8 through screws, and the fixture is further provided with a left expandable sample fixture 10 and a right expandable sample fixture 12.
The working process is as follows:
firstly, a circular sample 17 is placed in the grooves of the left expandable sample clamp 10 and the right expandable sample clamp 12, then the left expandable sample clamp 10 and the right expandable sample clamp 12 are moved to appropriate positions, all screws are tightened, and the effect of fixing the circular sample 17 is achieved. Subsequently, can carry out the coating film technology of circular sample 17, wait to accomplish the coating film technology to the one side of circular sample 17, open step motor 4, step motor gear 3 of step motor 4 rotates the rotation of driving magnet rotating sleeve 1, because the interact between the magnet, flexible wire rope 16 inside hollow rod 5 also follows the rotation, thereby it is rotatory to drive the anchor clamps body, when sliding key 6 in self-lock device 20 imbeds the arc recess just, the anchor clamps body rotates 180 degrees, step motor 4 stop work, carry out another planar coating film technology afterwards, reach the effect of two-sided coating film.
Claims (4)
1. A vacuum magnetic control rotary double-sided coating clamp is characterized by comprising a stepping motor magnetic control driving device and a rotatable clamp device; the stepping motor magnetic control driving device comprises a vacuum chamber cavity (2), a stepping motor (4) fixed on the vacuum chamber cavity (2) and a hollow rod piece (5) fixed on the vacuum chamber cavity (2); a stepping motor gear (3) is mounted on a rotating shaft of the stepping motor (4), a magnet rotating sleeve (1) is arranged at the top of the hollow rod piece (5), and the stepping motor gear (3) is meshed with the magnet rotating sleeve (1); a flexible steel wire rope (16) is arranged in the hollow rod piece (5), and magnets (19) which are circumferentially distributed are arranged at the upper end of the flexible steel wire rope (16) and can be matched with the magnet rotating sleeve (1) to realize synchronous rotation; the rotatable clamp part comprises a sample clamp frame (8), a left sample clamp (11) arranged on one side of the sample clamp frame (8) and a right sample clamp (13) arranged on the other side of the sample clamp frame (8), wherein the left sample clamp (11) and the right sample clamp (13) can move on the sample clamp frame (8) so as to be clamped.
2. The vacuum magnetic control rotating double-sided coating clamp according to claim 1, wherein a left expandable sample clamp (10) is arranged on the left sample clamp (11), a right expandable sample clamp (12) is arranged on the right sample clamp (13), and the left expandable sample clamp (10) and the right expandable sample clamp (12) correspond in position, so as to clamp a circular sample (17).
3. The vacuum magnetic control rotating double-sided film coating clamp as claimed in claim 1, wherein a self-locking device (20) is arranged at the end of the hollow rod member (5) near the rotatable clamp device, a connecting end (21) is arranged on the rotatable clamp device through a sample clamp frame (8) and is fixedly connected with the flexible steel wire rope (16) through the connecting end (21), an annular groove (22) is arranged on the connecting end (21), arc-shaped grooves distributed at 180 degrees are arranged on the annular groove (22), and a sliding key (6) in the self-locking device (20) is tangent to the bottom surface of the arc-shaped groove under the action of gravity.
4. The vacuum magnetic control rotating double-sided coating clamp according to claim 1, wherein bearings (18) are arranged inside the hollow rod member (5) at two ends of the flexible steel wire rope (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920453565.3U CN210176945U (en) | 2019-04-04 | 2019-04-04 | Vacuum magnetic control rotary double-sided film coating clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920453565.3U CN210176945U (en) | 2019-04-04 | 2019-04-04 | Vacuum magnetic control rotary double-sided film coating clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210176945U true CN210176945U (en) | 2020-03-24 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920453565.3U Expired - Fee Related CN210176945U (en) | 2019-04-04 | 2019-04-04 | Vacuum magnetic control rotary double-sided film coating clamp |
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| Country | Link |
|---|---|
| CN (1) | CN210176945U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109825813A (en) * | 2019-04-04 | 2019-05-31 | 浙江工业大学 | A kind of vacuum magnetic control rotary double-face coating clamp |
-
2019
- 2019-04-04 CN CN201920453565.3U patent/CN210176945U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109825813A (en) * | 2019-04-04 | 2019-05-31 | 浙江工业大学 | A kind of vacuum magnetic control rotary double-face coating clamp |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200324 |
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| CF01 | Termination of patent right due to non-payment of annual fee |