CN210176945U - A vacuum magnetron rotating double-sided coating fixture - Google Patents
A vacuum magnetron rotating double-sided coating fixture Download PDFInfo
- Publication number
- CN210176945U CN210176945U CN201920453565.3U CN201920453565U CN210176945U CN 210176945 U CN210176945 U CN 210176945U CN 201920453565 U CN201920453565 U CN 201920453565U CN 210176945 U CN210176945 U CN 210176945U
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- Prior art keywords
- sample
- clamp
- hollow rod
- fixture
- wire rope
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- 238000000576 coating method Methods 0.000 title claims abstract description 27
- 239000011248 coating agent Substances 0.000 title claims abstract description 26
- 230000001360 synchronised effect Effects 0.000 claims abstract description 4
- 230000005484 gravity Effects 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 description 12
- 239000010959 steel Substances 0.000 description 12
- 238000001755 magnetron sputter deposition Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
本实用新型公开了一种真空磁控旋转双面镀膜夹具，包括步进电机磁控驱动装置及可旋转夹具装置；所述步进电机磁控驱动装置包括真空室腔体，固定在真空室腔体上的步进电机及其驱动装置，焊接在真空室腔体上的中空杆件。步进电机转轴上装有齿轮，齿轮与磁铁旋转套筒通过齿轮啮合方式连接。中空杆件与真空室腔体焊接在一起，中空杆件里面有柔性钢丝绳，柔性钢丝绳上端有呈圆周分布的磁铁，可以和磁铁旋转套筒相配合实现同步旋转。所述可旋转夹具部分包括样品夹具架，在样品夹具架的左右两边相应连接有左右样品夹具，左右样品夹具可以在样品架上移动，以适应各种尺寸的方形样品，左右样品夹具可以通过螺丝固定在样品架上。
The utility model discloses a vacuum magnetic control rotating double-sided coating fixture, which comprises a stepping motor magnetic control driving device and a rotatable fixture device; the stepping motor magnetic control driving device comprises a vacuum chamber cavity and is fixed in the vacuum chamber cavity The stepper motor and its driving device on the body, and the hollow rod welded on the vacuum chamber cavity. A gear is installed on the rotating shaft of the stepping motor, and the gear and the magnet rotating sleeve are connected by means of gear meshing. The hollow rod is welded with the vacuum chamber cavity, and the hollow rod is provided with a flexible wire rope. The upper end of the flexible wire rope has magnets distributed in a circle, which can cooperate with the magnet rotating sleeve to realize synchronous rotation. The rotatable clamp part includes a sample clamp frame, and left and right sample clamps are connected to the left and right sides of the sample clamp frame. The left and right sample clamps can move on the sample frame to adapt to square samples of various sizes. The left and right sample clamps can be screwed through. fixed on the sample holder.
Description
Technical Field
The utility model belongs to thin vacuum magnetron sputtering coating film field, concretely relates to rotatory two-sided coating film device of vacuum magnetic control.
Background
Magnetron sputtering is one type of Physical Vapor Deposition (PVD). The general sputtering method can be used for preparing multi-materials such as metal, semiconductor, insulator and the like, and has the advantages of simple equipment, easy control, large coating area, strong adhesive force and the like, while the magnetron sputtering method developed in the last 70 th century realizes high speed, low temperature and low damage. Since the high-speed sputtering is performed under a low pressure, it is necessary to effectively increase the ionization rate of the gas. Magnetron sputtering increases the sputtering rate by introducing a magnetic field at the surface of the target cathode, using the confinement of the magnetic field to charged particles to increase the plasma density.
The magnetron sputtering coating instrument applied at present can only carry out single-side coating, a coated sample is placed on a sample rack or transferred into a sample chamber, a new sample coating is supposed to be started, only a vacuum chamber is opened, the sample is replaced, and the vacuum is pumped to a proper vacuum environment, so that the process takes more time and the efficiency is low. By adopting the device, double-sided coating of the sample can be realized, and the working efficiency is greatly improved.
SUMMERY OF THE UTILITY MODEL
To the above-mentioned problem that exists among the prior art, the utility model aims to provide a rotatory two-sided coating film fixture device of vacuum magnetic control to realize the two-sided coating film of sample high-efficiently, high accuracy ground.
The utility model adopts the following technical scheme:
a vacuum magnetic control rotary double-sided coating clamp is characterized by comprising a stepping motor magnetic control driving device and a rotatable clamp device; the stepping motor magnetic control driving device comprises a vacuum chamber cavity, a stepping motor fixed on the vacuum chamber cavity and a hollow rod piece fixed on the vacuum chamber cavity; a stepping motor gear is arranged on a rotating shaft of the stepping motor, a magnet rotating sleeve is arranged at the top of the hollow rod piece, and the stepping motor gear is meshed with the magnet rotating sleeve; a flexible steel wire rope is arranged in the hollow rod piece, and magnets distributed circumferentially are arranged at the upper end of the flexible steel wire rope and can be matched with the magnet rotating sleeve to realize synchronous rotation; the rotatable clamp part comprises a sample clamp frame, a left sample clamp arranged on one side of the sample clamp frame and a right sample clamp arranged on the other side of the sample clamp frame, wherein the left sample clamp and the right sample clamp can move on the sample frame so as to be clamped.
The vacuum magnetic control rotating double-sided coating clamp is characterized in that a left expandable sample clamp is arranged on the left sample clamp, a right expandable sample clamp is arranged on the right sample clamp, and the left expandable sample clamp corresponds to the right expandable sample clamp in position, so that a circular sample is clamped.
The vacuum magnetic control rotating double-sided film coating clamp is characterized in that a self-locking device is arranged at the end part of a hollow rod piece close to a rotatable clamp device, a connecting end is arranged on the rotatable clamp device through a sample clamp frame and fixedly connected with a flexible steel wire rope through the connecting end, an annular groove is formed in the connecting end, an arc-shaped groove which is 180 degrees in distribution is formed in the annular groove, and a sliding key in the self-locking device is tangent to the bottom surface of the arc-shaped groove under the action of gravity.
The vacuum magnetic control rotating double-sided coating clamp is characterized in that bearings are arranged at two ends of the flexible steel wire rope in the hollow rod piece.
The utility model has the advantages that: ingenious design, reasonable structure and convenient use. The device is used for carrying out double-sided coating on a sample, so that the coating process is greatly simplified, the coating time is reduced, the coating efficiency is improved, the stability and the accuracy of the measured binding force of the film and the substrate are ensured, and the device has important significance to the research field of the film.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural view of the clamp body of the present invention;
fig. 3 is a partial installation diagram of the flexible steel wire rope of the present invention;
fig. 4 is a schematic structural view of the self-locking device of the present invention;
in the figure: 1-magnet rotating sleeve, 2-vacuum chamber cavity, 3-stepping motor gear, 4-stepping motor, 5-hollow rod piece, 6-sliding key self-locking device, 7-first screw, 8-sample clamp frame, 9-second screw, 10-left expanding clamp, 11-left sample clamp, 12-right expanding clamp, 13-right sample clamp, 14-third screw, 15-fourth screw, 16-flexible steel wire rope, 17-round sample, 18-bearing, 19-magnet, 20-self-locking device, 21-connecting end and 22-annular groove.
Detailed Description
The technical scheme of the utility model is further described with the accompanying drawings of the specification as follows:
as shown in fig. 1-4, a vacuum magnetic control rotary double-sided coating fixture comprises a stepping motor driving device and a rotatable fixture device.
The stepping motor driving device comprises a vacuum chamber cavity 2, a stepping motor 4 fixed on the vacuum chamber cavity 2 and a hollow rod 5 welded on the vacuum chamber cavity 2, wherein a stepping motor gear 3 is arranged on a rotating shaft of the stepping motor 4, a magnet rotating sleeve 1 is sleeved at the upper end of the hollow rod 5, the stepping motor gear 3 is meshed with the magnet rotating sleeve 1, an annular magnet is arranged in the magnet rotating sleeve 1, a flexible steel wire rope 16 is arranged in the hollow rod 5, and bearings 18 are arranged at the two ends of the flexible steel wire rope 16 in the hollow rod 5; the upper end of the flexible steel wire rope 16 is provided with magnets 19 which are distributed in a circumferential manner, so that the flexible steel wire rope 16 can be matched with the magnet rotating sleeve 1 to realize synchronous rotation.
The end part of the hollow rod piece 5 is provided with a self-locking device 20 at a position close to the rotatable clamping device, the sample clamping frame 8 of the rotatable clamping device is provided with a connecting end 21 and is fixedly connected with the flexible steel wire rope 16 through the connecting end 21, the connecting end 21 is provided with an annular groove 22, the annular groove 22 is provided with an arc-shaped groove distributed by 180 degrees, and the sliding key 6 in the self-locking device 20 is tangent to the plane of the arc-shaped groove under the action of gravity, so that the positioning is carried out.
The rotatable fixture device comprises a sample fixture frame 8, wherein one end of the sample fixture frame 8 is fixedly connected with a flexible steel wire rope 16, a left sample fixture 11 and a right sample fixture 13 are correspondingly connected to the left side and the right side of the sample fixture frame 8, the left sample fixture 11 and the right sample fixture 13 can move on the sample frame 8, the left sample fixture 11 and the right sample fixture 13 are fixed on the sample frame 8 through screws, and the fixture is further provided with a left expandable sample fixture 10 and a right expandable sample fixture 12.
The working process is as follows:
firstly, a circular sample 17 is placed in the grooves of the left expandable sample clamp 10 and the right expandable sample clamp 12, then the left expandable sample clamp 10 and the right expandable sample clamp 12 are moved to appropriate positions, all screws are tightened, and the effect of fixing the circular sample 17 is achieved. Subsequently, can carry out the coating film technology of circular sample 17, wait to accomplish the coating film technology to the one side of circular sample 17, open step motor 4, step motor gear 3 of step motor 4 rotates the rotation of driving magnet rotating sleeve 1, because the interact between the magnet, flexible wire rope 16 inside hollow rod 5 also follows the rotation, thereby it is rotatory to drive the anchor clamps body, when sliding key 6 in self-lock device 20 imbeds the arc recess just, the anchor clamps body rotates 180 degrees, step motor 4 stop work, carry out another planar coating film technology afterwards, reach the effect of two-sided coating film.
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920453565.3U CN210176945U (en) | 2019-04-04 | 2019-04-04 | A vacuum magnetron rotating double-sided coating fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920453565.3U CN210176945U (en) | 2019-04-04 | 2019-04-04 | A vacuum magnetron rotating double-sided coating fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210176945U true CN210176945U (en) | 2020-03-24 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920453565.3U Expired - Fee Related CN210176945U (en) | 2019-04-04 | 2019-04-04 | A vacuum magnetron rotating double-sided coating fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210176945U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109825813A (en) * | 2019-04-04 | 2019-05-31 | 浙江工业大学 | A vacuum magnetron rotating double-sided coating fixture |
-
2019
- 2019-04-04 CN CN201920453565.3U patent/CN210176945U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109825813A (en) * | 2019-04-04 | 2019-05-31 | 浙江工业大学 | A vacuum magnetron rotating double-sided coating fixture |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200324 |