CN108624869A - Fixture and precipitation equipment for sheet material double-sided deposition coating - Google Patents
Fixture and precipitation equipment for sheet material double-sided deposition coating Download PDFInfo
- Publication number
- CN108624869A CN108624869A CN201810780071.6A CN201810780071A CN108624869A CN 108624869 A CN108624869 A CN 108624869A CN 201810780071 A CN201810780071 A CN 201810780071A CN 108624869 A CN108624869 A CN 108624869A
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- sheet material
- actuator
- support bar
- fixture
- deposition coating
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- 239000000463 material Substances 0.000 title claims abstract description 84
- 238000000576 coating method Methods 0.000 title claims abstract description 47
- 230000008021 deposition Effects 0.000 title claims abstract description 47
- 239000011248 coating agent Substances 0.000 title claims abstract description 45
- 238000001556 precipitation Methods 0.000 title claims abstract description 18
- 230000005291 magnetic effect Effects 0.000 claims abstract description 17
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 229910000828 alnico Inorganic materials 0.000 claims description 4
- 230000013011 mating Effects 0.000 claims description 3
- 230000002459 sustained effect Effects 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 13
- 238000004062 sedimentation Methods 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 5
- 230000006698 induction Effects 0.000 abstract description 3
- 238000000151 deposition Methods 0.000 description 40
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 229910052742 iron Inorganic materials 0.000 description 7
- 244000144985 peep Species 0.000 description 5
- 235000013495 cobalt Nutrition 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 230000005674 electromagnetic induction Effects 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003763 carbonization Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000000338 in vitro Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention provides a kind of fixtures and precipitation equipment for sheet material double-sided deposition coating, are related to coating deposition technical field of auxiliary equipment.The fixture for being used for sheet material double-sided deposition coating includes chuck body and the first actuator；Chuck body includes fixing piece for fixing sheet material and the second actuator being connect with fixing piece, and the second actuator can be rotated with the first actuator, to drive sheet material to overturn.The fixture of the present invention realizes the overturning of sheet material using power the effects that magnetoelectric induction power or magnetic force in not blow-on, the successive sedimentation that sheet material coated on both sides is realized under the premise of not changing stove existing structure, it is high, at low cost and easy to implement using the fixture double-sided deposition recoating efficiency.The present invention also provides a kind of precipitation equipment, including furnace body, the chuck body of above-mentioned fixture is located in furnace body, and the first actuator is located at outside furnace body, which is suitable for the continuous coating deposition of carry out two-sided to sheet material, efficient, with short production cycle.
Description
Technical field
The present invention relates to coatings to deposit technical field of auxiliary equipment, and sheet material double-sided deposition coating is used for more particularly, to one kind
Fixture and precipitation equipment.
Background technology
It in heated filament vapour deposition process prepares coating technique, such as prepares in diamond coatings technique, it is sometimes desirable in piece
The double-sided deposition diamond thin of material.At present there is no the depositing device specifically for double-sided deposition coating, it is limited to existing set
Standby structure often once can only deposit upper coating in the one side of sheet material face heated filament and air source, and another side is due to active matter
Matter can not reach and cannot deposit coating.
For this problem, the prior art generally takes following means：
So that the structure of gas circuit silk stove is more suitable for sheet material double-sided deposition at the initial stage of furnace design or Late reformation, i.e., on
Under all air inlets, although the stove of this structure disclosure satisfy that the requirement of sheet material double-sided deposition coating, this improved stove
It generally can only just be used as the sheet material of production coated on both sides, cannot go production again only needs the product (such as milling cutter) of one side deposition, drop
The low applicability of stove, and need using such mode to change stove existing structure, it is of high cost, complicated to be not easy to implement.
Another mode is first to deposit to then take out overturning sheet material deposition another side on one side, is generally required in this case
Again sheet material is taken out clamping again by blow-on, i.e., overturning 180 degree in situ.This method production efficiency is relatively low, will greatly increase
Production cycle mainly needs to vacuumize again, if heated filament is broken during blow-on, needs again upper silk and carbonization.
At least one of it is therefore desired to a kind of fixture is provided, can solve the above problems.
In view of this, special propose the present invention.
Invention content
The first object of the present invention is to provide a kind of fixture for sheet material double-sided deposition coating, utilizes magnetoelectric induction power
Or the effects that magnetic force power realizes the overturning of sheet material in not blow-on, is realized under the premise of not changing stove existing structure
The successive sedimentation of sheet material coated on both sides, it is high, at low cost and easy to implement using the fixture double-sided deposition recoating efficiency.
The second object of the present invention is to provide a kind of precipitation equipment, including furnace body, above-mentioned to be applied for sheet material double-sided deposition
The chuck body of the fixture of layer is located in furnace body, and the first actuator is located at outside furnace body.Using the precipitation equipment it is two-sided to sheet material into
Row coating deposits efficient, with short production cycle.
In order to solve the above technical problems, spy of the present invention adopts the following technical scheme that：
In a first aspect, a kind of fixture for sheet material double-sided deposition coating is provided, including chuck body and the first driving
Part；The chuck body includes fixing piece for fixing sheet material and the second actuator being connect with the fixing piece, described
Second actuator can be rotated with first actuator, to drive sheet material to overturn.
Preferably, on the basis of technical solution of the present invention, first actuator and second actuator are only
It is on the spot magnetic part, preferably magnet, further preferred alnico magnet.
Preferably, on the basis of technical solution of the present invention, first actuator is magnet, second actuator
For feeromagnetic metal part；Or, first actuator is feeromagnetic metal part, second actuator is magnet.
Further, on the basis of technical solution of the present invention, the chuck body includes pedestal, is set to the bottom
On seat and the first support bar vertical with the pedestal and it is arranged on the first support rod and parallel with the pedestal
Second support bar；
One end of the second support bar is provided with the fixing piece, and the other end of the second support bar is provided with described
Second actuator.
Further, on the basis of technical solution of the present invention, the one end of the first support bar far from the pedestal
It is provided with load-bearing part, the load-bearing part includes load-carrying ring and along the axially projecting protruding portion of the load-carrying ring, described second
Strut penetrates the load-carrying ring and is positioned on the protruding portion.
Further, on the basis of technical solution of the present invention, the protruding portion includes being located at described second
The first end face and second end face of strut both sides, the first end face and the second end face are located on sustained height；Described
The outer wall of two supporting rods is equipped with spacer pin outstanding, can be erected on after so that the second support bar is rotated the first end face or
The second end face.
Further, on the basis of technical solution of the present invention, the first support bar includes the first hollow pipe and set
The first strut in first hollow pipe, the outer wall of first hollow pipe are equipped with the first fastener, pass through described the
One fastener can adjust the length of the first support bar；Preferably, first fastener is trip bolt.
Further, on the basis of technical solution of the present invention, the second support bar includes the second hollow pipe and set
The second strut in second hollow pipe, the outer wall of second hollow pipe are equipped with the second fastener, pass through described the
Two fasteners can adjust the length of the second support bar；Preferably, second fastener is trip bolt.
Further, on the basis of technical solution of the present invention, the fixing piece is geometrical clamp, and the geometrical clamp includes
Upper clamp plate and lower clamp plate, between the upper clamp plate and the lower clamp plate, the upper clamp plate and the lower clamp plate pass through sheet material
Third fastener fastens；Preferably, the third fastener is mating screw and nut.
Second aspect provides a kind of precipitation equipment, including furnace body, the above-mentioned fixture for sheet material double-sided deposition coating
Chuck body is located in furnace body, and the first actuator is located at outside furnace body.
Compared with prior art, the present invention has the advantages that：
(1) fixture provided by the present invention for sheet material double-sided deposition coating includes chuck body and the first actuator；Folder
Tool ontology includes fixing piece for fixing sheet material and the second actuator being connect with fixing piece, and the second actuator can be with the
One actuator rotates, to drive sheet material to overturn.In use, piece timber-used fixing piece is fixed, chuck body is placed in precipitation equipment
In furnace body (such as making the second actuator of chuck body at the peep hole of stove), the second actuator is located at precipitation equipment stove
In vitro, the first actuator outside stove is enable to control the second actuator in stove using power the effects that electromagnetic induction power or magnetic force
Rotation, and then the second actuator drives fixing piece, to drive sheet material to realize overturning.
The clamp structure of the present invention is simple, makes in stove in the case of not blow-on during not changing furnace structure, use
Sheet material overturning, can eliminate continuously to another side depositing coating and close stove and blow-on again after the one side depositing coating of sheet material
Work, it is easy to operate, production efficiency is improved, the production cycle is reduced and improves the service life of stove.Use this hair
Bright fixture realizes the successive sedimentation of sheet material coated on both sides, can preferably meet the requirement of sheet material double-sided deposition coating, raw
It produces efficient, at low cost and easy to implement.
(2) precipitation equipment provided by the invention, including furnace body, the fixture of the above-mentioned fixture for sheet material double-sided deposition coating
Ontology is located in furnace body, and the first actuator is located at outside furnace body.Had in view of the above-mentioned fixture for sheet material double-sided deposition coating
Advantage so that using present clip precipitation equipment also simultaneously have above-mentioned fixture institute it is advantageous, filled using the deposition
Sheet material can be carried out two-sided successive sedimentation by setting, and deposition efficiency is high, with short production cycle.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is that the structure of the chuck body of the fixture for sheet material double-sided deposition coating of one embodiment of the present invention is shown
It is intended to；
Fig. 2 is that the structure under the fixture use state for sheet material double-sided deposition coating of one embodiment of the present invention is shown
It is intended to；
Fig. 3 is the partial enlarged view at K in Fig. 1；
Fig. 4 is the structural representation of the load-bearing part of the fixture for sheet material double-sided deposition coating of one embodiment of the present invention
Figure.
Diagram：100- chuck bodies；110- fixing pieces；111- upper clamp plates；112- lower clamp plates；113- third fasteners；
The second actuators of 120-；130- pedestals；140- first support bars；The first hollow pipes of 141-；The first struts of 142-；143- first is tight
Firmware；150- second support bars；151- spacer pins；The second hollow pipes of 152-；The second struts of 153-；The second fasteners of 154-；
160- load-bearing parts；161- load-carrying rings；162- protruding portions；163- first end faces；164- second end faces；The first actuators of 200-；
300- peep holes.
Specific implementation mode
Technical scheme of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
The every other embodiment that personnel are obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the orientation of the instructions such as term "upper", "inner", "outside" or position are closed
System is merely for convenience of description of the present invention and simplification of the description to be based on the orientation or positional relationship shown in the drawings, rather than indicates
Or imply that signified device or element must have a particular orientation, with specific azimuth configuration and operation, therefore cannot understand
For limitation of the present invention.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
Can also be electrical connection to be mechanical connection；It can be directly connected, can also indirectly connected through an intermediary, Ke Yishi
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
Embodiment one
A kind of fixture for sheet material double-sided deposition coating is present embodiments provided, wherein Fig. 1 is a kind of implementation of the present invention
The structural schematic diagram of the chuck body of the fixture for sheet material double-sided deposition coating of mode；Fig. 2 is a kind of embodiment party of the present invention
Structural schematic diagram under the fixture use state for sheet material double-sided deposition coating of formula；Fig. 3 is the partial enlargement at K in Fig. 1
Figure；Fig. 4 is the structural schematic diagram of the load-bearing part of the fixture for sheet material double-sided deposition coating of one embodiment of the present invention.Such as
Shown in Fig. 1-4, fixture includes chuck body 100 and the first actuator 200；Chuck body 100 includes for fixing consolidating for sheet material
The second actuator 120 determined part 110 and connect with fixing piece 110, the second actuator 120 can be 200 turns with the first actuator
It is dynamic, to drive sheet material to overturn.
The hot-wire chemical gas-phase deposition stove of depositing device in hot-wire chemical gas-phase deposition technique such as top air inlet at present
It can not be suitable in sheet material two-sided while depositing coating (such as diamond thin), it usually needs after one side is deposited, weight
It is new to open furnace body, the another side of the subsequent continuous laid web of sheet material is overturn, this just extends the production cycle so that the life of this mode
It produces less efficient.
This implementation provides a kind of fixture, and chuck body 100 includes fixing piece 110 and the second actuator 120.Fixing piece
110, for fixed deposited sheet material, are not construed as limiting the structure and shape of fixing piece, as long as can stablize fixed sheet material.
Here sheet material indicates flaky deposited material, and the type to being deposited material is not construed as limiting, typical but non-limiting sheet material
The for example, electrode slice of degrading waste water.
Second actuator 120 is ined succession fixing piece 110, preferably intermediate to be connected by other component (such as body of rod), to second
The structure and shape of actuator are not construed as limiting, and fixing piece rotation are driven by the rotation of the second actuator, to make fixing piece consolidate
Fixed sheet material overturning.
The fixture of this implementation further includes the first actuator 200 being used cooperatively with the second actuator 120, passes through the first driving
The movement of part 200 enables the second actuator 120 to be rotated with the first actuator 200, to drive sheet material to overturn.
The composition of first actuator and the second actuator is not construed as limiting, it can be between the second actuator and the first actuator
By electromagnetic induction power or magneticaction, the second actuator 120 is enable to be rotated with the first actuator 200.
A kind of preferred embodiment, the first actuator are magnet, and the second actuator is magnet, is made under the magnetic force
First actuator can control the rotation of the second actuator.
The ingredient of magnet is the atoms such as iron, cobalt, nickel, and the internal structure of atom is more special, inherently has magnetic moment.Magnetic
Iron can generate magnetic field, have the characteristic for attracting the metals such as ferromagnetic material such as iron, nickel, cobalt.The shape of magnet is not construed as limiting,
Preferably, magnet is alnico magnet.Aluminium-nickel-cobalt magnetic ferromagnetic property is good, and Curie-point temperature is high, and curie point is at 500-600 DEG C, energy
Enough issued in higher furnace temperature waves preferable magnetism.
Another preferred embodiment, the first actuator are magnet, and the second actuator is the iron that can be attracted by magnet
Magnetic metalwork, feeromagnetic metal part refer to mainly being made of metals such as iron, nickel, cobalts, enable the first actuator under the magnetic force
Enough control the rotation of the second actuator.
Yet another preferred embodiment, the second actuator are magnet, and the first actuator is the iron that can be attracted by magnet
Magnetic metalwork, feeromagnetic metal part refer to the main metalwork made of the metals such as iron, nickel, cobalt, make first under the magnetic force
Actuator can control the rotation of the second actuator.
In use, chuck body is placed in precipitation equipment furnace body, (typical but non-limiting modes of emplacement for example can be
Second actuator of chuck body is placed at the peep hole of furnace body), the second actuator is located at outside precipitation equipment furnace body, profit
The effects that electricity consumption magnetic induction force or magnetic force power enable the first actuator outside stove control in stove the second actuator rotation, into
And the second actuator drives fixing piece, to drive sheet material to realize overturning.
Present clip is simple in structure, makes in stove in the case of not blow-on during not changing furnace structure, use
Sheet material is overturn, and the work for closing stove and blow-on again can be eliminated continuously to another side depositing coating after the one side depositing coating of sheet material
Make, it is easy to operate, production efficiency is improved, the production cycle is reduced and improves the service life of stove.Use the present invention
Fixture realize the successive sedimentation of sheet material coated on both sides, can preferably meet the requirement of sheet material double-sided deposition coating, produce
It is efficient, at low cost and easy to implement.
In a preferred embodiment, chuck body 100 include pedestal 130, be set on pedestal 130 and and pedestal
130 vertical first support bars 140 and it is set to second support bar in first support bar 140 and parallel with pedestal 130
150；One end of second support bar 150 is provided with fixing piece 110, and the other end of second support bar 150 is provided with the second actuator
120。
The setting of pedestal is further ensured that the stability of chuck body entirety, first support bar and second support bar constitute folder
Have ontology skeleton, connected by second support bar between fixing piece and the second actuator, second support bar is equivalent to shaft, when the
One actuator drives the rotation of the second actuator, to drive second support bar to rotate, and then drives fixing piece rotation, finally makes solid
Determine the fixed sheet material overturning of part.
In a preferred embodiment, the one end of first support bar 140 far from pedestal 130 is provided with load-bearing part 160,
Including load-carrying ring 161 and along the axially projecting protruding portion 162 of load-carrying ring 161, second support bar 150 penetrates holds load-bearing part 160
It carries ring 161 and is positioned on protruding portion 162.
For load-bearing part for carrying second support bar, load-bearing part includes load-carrying ring and protruding portion, and load-carrying ring and protruding portion can be with
Using integrated molding, load-carrying ring is in ring body structurc, is not construed as limiting to the size of load-carrying ring, the ring internal diameter of load-carrying ring can be slightly larger than
The external diameter of rod body of second support bar enables second support bar to be used cooperatively, be penetrated in load-carrying ring ring body with load-carrying ring.Protruding portion
It is to be formed by part along the axially extending of load-carrying ring, further can preferably carries second support bar, to the size of protruding portion
It is not construed as limiting, preferably the section of protruding portion is in the ring-type of part, can be matched with second support bar periphery.
In a preferred embodiment, protruding portion 162 includes the first end for being located at 150 both sides of second support bar
Face 163 and second end face 164, first end face 163 and second end face 164 are located on sustained height；The outer wall of second support bar 150
Equipped with spacer pin 151 outstanding, first end face 163 or second end face 164 can be erected on after so that second support bar 150 is rotated.
Protruding portion has first end face and second end face, and first end face and second end face in the same horizontal line, and pass through
Second support bar spacer pin outstanding make second support bar rotate after when spacer pin is gone at first end face or second end face position
First end face or second end face can stop that spacer pin is rotated further to which second support bar stops operating, and pass through this set energy
The slewing area for enough controlling second support bar, makes second support bar be gone at second end face from first end face, just rotates 180
Degree, can make rotation more it is accurate in place, realize accurate turn-over.
In a preferred embodiment, first support bar 140 includes the first hollow pipe 141 and to be sheathed on first hollow
The outer wall of the first strut 142 in pipe 141, the first hollow pipe 141 is equipped with the first fastener 143, passes through 143 energy of the first fastener
Enough adjust the length of first support bar 140.
First strut can move in the first hollow pipe, to adjust the length of first support bar, and it is tight by controlling
Firmware is fastened and fixed the first hollow pipe and the first strut, avoids the two that relative displacement occurs.Preferably, the first fastener is
Trip bolt.
In a preferred embodiment, second support bar 150 includes the second hollow pipe 152 and to be sheathed on second hollow
The outer wall of the second strut 153 in pipe 152, the second hollow pipe 152 is equipped with the second fastener 154, passes through 154 energy of the second fastener
Enough adjust the length of second support bar 150.
Second strut can move in the second hollow pipe, to adjust the length of second support bar, and it is tight by controlling
Firmware is fastened and fixed the second hollow pipe and the second strut, avoids the two that relative displacement occurs.Preferably, the second fastener is
Trip bolt.
By the height of adjusting first support bar and/or the length of second support bar, various sizes of sheet material is can adapt to,
Improve the adaptability of fixture.
In a preferred embodiment, fixing piece 110 is geometrical clamp, and geometrical clamp includes upper clamp plate 111 and lower clamp plate
112, for sheet material between upper clamp plate 111 and lower clamp plate 112, upper clamp plate 111 and lower clamp plate 112 are tight by third fastener 113
Gu.
Sheet material is carried out to stablize fixation by upper clamp plate and being fixedly clamped for lower clamp plate, prevents sheet material from occurring in deposition process
Offset.Preferably, third fastener is mating screw and nut.
Embodiment two
A kind of precipitation equipment is present embodiments provided, the present embodiment is improvement on the basis of embodiment 1,1 institute of embodiment
The technical solution of description also belongs to the present embodiment, and details are not described herein.
A kind of precipitation equipment is present embodiments provided, typical but non-limiting is, for example, hot-wire chemical gas-phase deposition stove,
Including furnace body, the chuck body 100 of the above-mentioned fixture for sheet material double-sided deposition coating is located in furnace body, the first actuator 200
Outside furnace body.
A kind of preferred embodiment, chuck body 100 are positioned in furnace body, sight of second actuator 120 close to furnace body
It examines at hole 300, the first actuator 200 is located at outside furnace body, when use with the second actuator at peep hole and at peep hole
It is mobile, the second actuator rotation the electromagnetic induction power or magnetic force the effects that under the interaction of power in control stove, Jin Er
Two actuators drive fixing piece, to drive sheet material to realize overturning.
In view of advantage possessed by the above-mentioned fixture for sheet material double-sided deposition coating so that use the heavy of present clip
Product device also has the institute of above-mentioned fixture advantageous simultaneously, and two-sided successive sedimentation can be carried out to sheet material using the precipitation equipment,
Deposition efficiency is high, with short production cycle.
Finally it should be noted that：Above each embodiment is merely illustrative of the technical solution of the present invention, rather than its limitations；
Although with reference to aforementioned each embodiment, invention is explained in detail, it will be understood by those of ordinary skill in the art that：
It can still modify to the technical solution recorded in aforementioned each embodiment, either to which part or whole technologies
Feature carries out equivalent replacement；And these modifications or replacements, the present invention that it does not separate the essence of the corresponding technical solution is each to be implemented
The range of mode technical solution.
Claims (10)
1. a kind of fixture for sheet material double-sided deposition coating, which is characterized in that including chuck body and the first actuator；It is described
Chuck body includes fixing piece for fixing sheet material and the second actuator being connect with the fixing piece, second driving
Part can be rotated with first actuator, to drive sheet material to overturn.
2. the fixture according to claim 1 for sheet material double-sided deposition coating, which is characterized in that first actuator
It independently is magnetic part, preferably magnet, further preferably alnico magnet with second actuator.
3. the fixture according to claim 1 for sheet material double-sided deposition coating, which is characterized in that first actuator
For magnet, second actuator is feeromagnetic metal part；Or, first actuator is feeromagnetic metal part, second driving
Part is magnet.
4. being used for the fixture of sheet material double-sided deposition coating according to claim 1-3 any one of them, which is characterized in that the folder
Tool ontology includes pedestal, is set on the pedestal and the first support bar vertical with the pedestal and is set to described first
On supporting rod and the second support bar parallel with the pedestal；
One end of the second support bar is provided with the fixing piece, and the other end of the second support bar is provided with described second
Actuator.
5. the fixture according to claim 4 for sheet material double-sided deposition coating, which is characterized in that the first support bar
One end far from the pedestal is provided with load-bearing part, and the load-bearing part includes load-carrying ring and axially projecting along the load-carrying ring
Protruding portion, the second support bar penetrate the load-carrying ring and are positioned on the protruding portion.
6. the fixture according to claim 5 for sheet material double-sided deposition coating, which is characterized in that the protruding portion includes
It is located at the first end face and second end face of the second support bar both sides, the first end face and the second end face are located at
On sustained height；The outer wall of the second support bar is equipped with spacer pin outstanding, can be taken after so that the second support bar is rotated
Set on the first end face or the second end face.
7. the fixture according to claim 4 for sheet material double-sided deposition coating, which is characterized in that the first support bar
Including the first hollow pipe and the first strut being sheathed in first hollow pipe, the outer wall of first hollow pipe is equipped with first
Fastener can adjust the length of the first support bar by first fastener；Preferably, first fastener is
Trip bolt.
8. the fixture according to claim 4 for sheet material double-sided deposition coating, which is characterized in that the second support bar
Including the second hollow pipe and the second strut being sheathed in second hollow pipe, the outer wall of second hollow pipe is equipped with second
Fastener can adjust the length of the second support bar by second fastener；Preferably, second fastener is
Trip bolt.
9. being used for the fixture of sheet material double-sided deposition coating according to claim 1-3 any one of them, which is characterized in that described solid
It is geometrical clamp to determine part, and the geometrical clamp includes upper clamp plate and lower clamp plate, sheet material between the upper clamp plate and the lower clamp plate,
The upper clamp plate and the lower clamp plate are fastened by third fastener；Preferably, the third fastener be mating screw and
Nut.
10. a kind of precipitation equipment, which is characterized in that including furnace body, claim 1-9 any one of them is two-sided heavy for sheet material
The chuck body of the fixture of product coating is located in the furnace body, and first actuator is located at outside the furnace body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810780071.6A CN108624869A (en) | 2018-07-16 | 2018-07-16 | Fixture and precipitation equipment for sheet material double-sided deposition coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810780071.6A CN108624869A (en) | 2018-07-16 | 2018-07-16 | Fixture and precipitation equipment for sheet material double-sided deposition coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108624869A true CN108624869A (en) | 2018-10-09 |
Family
ID=63688918
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810780071.6A Pending CN108624869A (en) | 2018-07-16 | 2018-07-16 | Fixture and precipitation equipment for sheet material double-sided deposition coating |
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| CN (1) | CN108624869A (en) |
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| CN108977793A (en) * | 2018-10-19 | 2018-12-11 | 深圳先进技术研究院 | Fixture and precipitation equipment for sheet material depositing coating |
| CN109825813A (en) * | 2019-04-04 | 2019-05-31 | 浙江工业大学 | A kind of vacuum magnetic control rotary double-face coating clamp |
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