CN110757496A - Mechanical gripper for target material - Google Patents
Mechanical gripper for target material Download PDFInfo
- Publication number
- CN110757496A CN110757496A CN201911190398.9A CN201911190398A CN110757496A CN 110757496 A CN110757496 A CN 110757496A CN 201911190398 A CN201911190398 A CN 201911190398A CN 110757496 A CN110757496 A CN 110757496A
- Authority
- CN
- China
- Prior art keywords
- sleeve
- screw rod
- shaft hole
- hole
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/08—Gripping heads and other end effectors having finger members
- B25J15/10—Gripping heads and other end effectors having finger members with three or more finger members
- B25J15/103—Gripping heads and other end effectors having finger members with three or more finger members for gripping the object in three contact points
Abstract
A mechanical target gripper comprises a sleeve, a screw rod, a connecting cap, a connecting plate, at least three extending blocks, at least three connecting rods and a clamping jaw, wherein the screw rod penetrates through the sleeve and is in threaded connection with the sleeve; the side of the connecting plate far away from the operation part is provided with a first connecting lug in a protruding mode, the side of the extension block far away from the operation part is provided with a second connecting lug in a protruding mode, the first end of the connecting rod is rotatably connected with the first connecting lug, the middle of the connecting rod is rotatably connected with the second connecting lug, and the second end of the connecting rod is perpendicularly connected with the clamping jaw. Thus, the target is easy to grab and convenient to mount, dismount and transfer.
Description
Technical Field
The invention relates to the technical field of nano coating, in particular to a mechanical gripper for a target material.
Background
The sputtering method for preparing the nano material comprises the following steps: magnetron sputtering, bias sputtering, reactive sputtering, and the like. The principle of magnetron sputtering is as follows: the electrons collide with argon atoms in the process of accelerating to fly to the substrate under the action of the electric field, a large amount of argon ions and electrons are ionized, and the electrons fly to the substrate. The argon ions accelerate to bombard the target under the action of the electric field, so as to sputter a large amount of target atoms, and the neutral target atoms are deposited on the substrate to form a film. The secondary electrons are influenced by the magnetic force of the magnetic field Loran in the process of accelerating to fly to the substrate and are restrained in a plasma area close to the target surface, the plasma density in the area is high, and the secondary electrons do circular motion around the target surface under the action of the magnetic field.
The circular target is arranged on a target frame, a small gap is formed between the circumferential edge of the target and the target frame, and the diameter of the target is 15-30 mm. In the prior art, the target is mounted and dismounted by hands of a person, on one hand, the diameter of the target is large, and the target is difficult to grasp by the palm of the person; on the other hand, because the gap between the circumferential edge of the target and the target frame is small, fingers of a person are difficult to stretch into the gap; on the other hand, the hands of the user directly contact the target material, so that the side face of the target material is easily damaged and polluted.
Disclosure of Invention
In view of the above, the present invention provides a mechanical gripper for target materials, which is easy to grasp the target materials and convenient for the target materials to be mounted, dismounted and transferred, so as to solve the above problems.
A mechanical target gripper comprises a sleeve, a screw rod, a connecting cap, a connecting plate, at least three extending blocks, at least three connecting rods and a clamping jaw, wherein the screw rod penetrates through the sleeve and is in threaded connection with the sleeve; the side of the connecting plate far away from the operation part is provided with a first connecting lug in a protruding mode, the side of the extension block far away from the operation part is provided with a second connecting lug in a protruding mode, the first end of the connecting rod is rotatably connected with the first connecting lug, the middle of the connecting rod is rotatably connected with the second connecting lug, and the second end of the connecting rod is perpendicularly connected with the clamping jaw.
Further, a first through hole penetrates through the middle of the sleeve, an internal thread is arranged on the inner side wall of the first through hole of the sleeve, an external thread is arranged on the outer side wall of the screw rod, the screw rod penetrates through the first through hole of the sleeve, and the external thread of the screw rod is in threaded connection with the internal thread of the sleeve.
Further, the first end of the screw is connected with an operation part.
Furthermore, a second through hole is formed in the middle of the connecting plate, and the second end of the screw rod penetrates through the second through hole of the connecting plate and is in threaded connection with a nut.
Further, the circumferential outer side wall of the second end of the screw rod is provided with a first step groove in a concave mode, and the first step groove is abutted to the connecting plate.
Furthermore, a first shaft hole is formed in the first end of the connecting rod, a second shaft hole is formed in the first connecting protruding block, and a first rotating shaft penetrates through the first shaft hole and the second shaft hole.
Furthermore, a third shaft hole is formed in the middle of the connecting rod, a fourth shaft hole is formed in the second connecting lug, and a second rotating shaft penetrates through the third shaft hole and the fourth shaft hole.
Further, the terminal of clamping jaw and the sunken second step groove that is provided with of one side towards the first end of connecting rod.
Compared with the prior art, the mechanical target gripper comprises a sleeve, a screw rod, a connecting cap, a connecting plate, at least three extending blocks, at least three connecting rods and a clamping jaw, wherein the screw rod penetrates through the sleeve and is in threaded connection with the sleeve, the connecting cap is connected with one end of the sleeve, the connecting plate is slidably located in the connecting cap and is connected with one end of the screw rod, the at least three extending blocks are arranged on the circumferential side wall of the connecting cap at equal intervals, and the clamping jaw is connected with the tail end of each; the side of the connecting plate far away from the operation part is provided with a first connecting lug in a protruding mode, the side of the extension block far away from the operation part is provided with a second connecting lug in a protruding mode, the first end of the connecting rod is rotatably connected with the first connecting lug, the middle of the connecting rod is rotatably connected with the second connecting lug, and the second end of the connecting rod is perpendicularly connected with the clamping jaw. Thus, the target is easy to grab and convenient to mount, dismount and transfer.
Drawings
Embodiments of the invention are described below with reference to the accompanying drawings, in which:
fig. 1 is a perspective view of a mechanical gripper for a target according to the present invention.
Fig. 2 is a side cross-sectional view of a mechanical gripper for a target according to the present invention.
Fig. 3 is a schematic view of the application of the mechanical target gripper provided by the present invention.
Detailed Description
Specific embodiments of the present invention will be described in further detail below based on the drawings. It should be understood that the description herein of embodiments of the invention is not intended to limit the scope of the invention.
Referring to fig. 1 and 2, a mechanical target gripper 100 according to the present invention includes a sleeve 10, a screw 20 penetrating through the sleeve 10 and threadedly coupled to the sleeve 10, a connection cap 30 coupled to one end of the sleeve 10, a connection plate 40 slidably disposed in the connection cap 30 and coupled to one end of the screw 20, at least three extension blocks 31 disposed on a circumferential side wall of the connection cap 30 at equal intervals, at least three connection rods 50, and a clamping jaw 60 coupled to a distal end of the connection rod 50.
The middle part of sleeve 10 runs through and is provided with first through-hole, is provided with the internal thread on the inside wall of the first through-hole of sleeve 10, is provided with the external screw thread on the lateral wall of screw rod 20, and screw rod 20 passes the first through-hole of sleeve 10, and the external screw thread of screw rod 20 and the internal thread threaded connection of sleeve 10.
The middle part of the connecting cap 30 is provided with a circular accommodating cavity, and the middle part of the connecting plate 40 is provided with a second through hole.
The first end of the screw 20 is connected to an operating portion 21, so that a user can hold the operating portion 21 to rotate the screw 20. Meanwhile, the screw rod 20 is limited, and the screw rod 20 is prevented from being separated from the sleeve 10.
The second end of the screw 20 passes through the second through hole of the connecting plate 40 and is threadedly coupled to a nut 22.
The circumferential outer side wall of the second end of the screw 20 is concavely provided with a first step groove 23, and the outer surface of the second end of the screw 20 is provided with an external thread. The first step groove 23 abuts on the connection plate 40. The first stepped groove 23 and the nut 22 respectively limit the connecting plate 40 from both sides, so that the connecting plate 40 is fixedly connected with the screw 20.
A first connecting projection 41 is protrudingly provided on a side of the connecting plate 40 away from the operating portion 21, and a second connecting projection 311 is protrudingly provided on a side of the extending block 31 away from the operating portion 21.
The first end of the link 50 is rotatably connected to the first connecting protrusion 41, the middle portion thereof is rotatably connected to the second connecting protrusion 311, and the second end thereof is perpendicularly connected to the jaw 60.
In this embodiment, the first end of the connecting rod 50 is provided with a first shaft hole, the first connecting protrusion 41 is provided with a second shaft hole, and a first rotating shaft passes through the first shaft hole and the second shaft hole.
The middle of the connecting rod 50 is provided with a third shaft hole, the second connecting bump 311 is provided with a fourth shaft hole, and a second rotating shaft passes through the third shaft hole and the fourth shaft hole.
The end of the clamping jaw 60 and the side facing the first end of the connecting rod 50 are concavely provided with a second step groove 61.
Referring to fig. 3, the clamping jaw 60 is used to extend into the gap between the circumferential edge of the target 300 and the target holder 200, and the second stepped groove 61 abuts against the target 300. The screw 20 is moved axially relative to the sleeve 10 when rotated, e.g. to the right in fig. 3, so that the connecting rod 50 is rotated about the second axis of rotation, so that the three clamping jaws 60 clamp the target 300, and then the target mechanical gripper 100 is rotated as a whole, so that the target 300 can be removed from the target holder 200 or the target 300 can be mounted on the target holder 200.
Compared with the prior art, the mechanical target gripper comprises a sleeve 10, a screw 20 penetrating through the sleeve 10 and in threaded connection with the sleeve 10, a connecting cap 30 connected with one end of the sleeve 10, a connecting plate 40 slidably located in the connecting cap 30 and connected with one end of the screw 20, at least three extending blocks 31 arranged on the circumferential side wall of the connecting cap 30 at equal intervals, at least three connecting rods 50 and a clamping jaw 60 connected with the tail ends of the connecting rods 50; the side of the connecting plate 40 away from the operation portion 21 is provided with a first connecting bump 41 in a protruding manner, the side of the extension block 31 away from the operation portion 21 is provided with a second connecting bump 311 in a protruding manner, the first end of the connecting rod 50 is rotatably connected with the first connecting bump 41, the middle part of the connecting rod is rotatably connected with the second connecting bump 311, and the second end of the connecting rod is perpendicularly connected with the clamping jaw 60. Thus, the target is easy to grab and convenient to mount, dismount and transfer.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the scope of the present invention, and any modifications, equivalents or improvements that are within the spirit of the present invention are intended to be covered by the following claims.
Claims (8)
1. A mechanical gripper for target materials is characterized in that: the connecting device comprises a sleeve, a screw rod, a connecting cap, a connecting plate, at least three extending blocks, at least three connecting rods and a clamping jaw, wherein the screw rod penetrates through the sleeve and is in threaded connection with the sleeve, the connecting cap is connected with one end of the sleeve, the connecting plate is slidably positioned in the connecting cap and is connected with one end of the screw rod, the at least three extending blocks are arranged on the circumferential side wall of the connecting cap at equal intervals, and the clamping jaw is connected with the; the side of the connecting plate far away from the operation part is provided with a first connecting lug in a protruding mode, the side of the extension block far away from the operation part is provided with a second connecting lug in a protruding mode, the first end of the connecting rod is rotatably connected with the first connecting lug, the middle of the connecting rod is rotatably connected with the second connecting lug, and the second end of the connecting rod is perpendicularly connected with the clamping jaw.
2. The mechanical target gripper of claim 1, wherein: the middle of the sleeve is provided with a first through hole in a penetrating mode, an internal thread is arranged on the inner side wall of the first through hole of the sleeve, an external thread is arranged on the outer side wall of the screw rod, the screw rod penetrates through the first through hole of the sleeve, and the external thread of the screw rod is in threaded connection with the internal thread of the sleeve.
3. The mechanical target gripper of claim 1, wherein: the first end of the screw is connected with an operation part.
4. The mechanical target gripper of claim 3, wherein: and a second through hole is formed in the middle of the connecting plate, and the second end of the screw rod penetrates through the second through hole of the connecting plate and is in threaded connection with a nut.
5. The mechanical target gripper of claim 4, wherein: the circumference lateral wall of the second end of screw rod is sunken to be provided with first step groove, first step groove and connecting plate butt.
6. The mechanical target gripper of claim 1, wherein: the first end of the connecting rod is provided with a first shaft hole, the first connecting lug is provided with a second shaft hole, and a first rotating shaft penetrates through the first shaft hole and the second shaft hole.
7. The mechanical target gripper of claim 1, wherein: the middle part of the connecting rod is provided with a third shaft hole, the second connecting lug is provided with a fourth shaft hole, and a second rotating shaft penetrates through the third shaft hole and the fourth shaft hole.
8. The mechanical target gripper of claim 1, wherein: and a second step groove is concavely arranged at the tail end of the clamping jaw and on one side facing to the first end of the connecting rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911190398.9A CN110757496A (en) | 2019-11-28 | 2019-11-28 | Mechanical gripper for target material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911190398.9A CN110757496A (en) | 2019-11-28 | 2019-11-28 | Mechanical gripper for target material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110757496A true CN110757496A (en) | 2020-02-07 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911190398.9A Pending CN110757496A (en) | 2019-11-28 | 2019-11-28 | Mechanical gripper for target material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110757496A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111215951A (en) * | 2020-02-24 | 2020-06-02 | 天津科技大学 | Clamping manipulator capable of automatically feeding and discharging materials in conical mirror machining |
-
2019
- 2019-11-28 CN CN201911190398.9A patent/CN110757496A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111215951A (en) * | 2020-02-24 | 2020-06-02 | 天津科技大学 | Clamping manipulator capable of automatically feeding and discharging materials in conical mirror machining |
| CN111215951B (en) * | 2020-02-24 | 2021-10-26 | 天津科技大学 | Clamping manipulator capable of automatically feeding and discharging materials in conical mirror machining |
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