CN204913555U - Monocrystalline silicon chamfer lathe - Google Patents

Monocrystalline silicon chamfer lathe Download PDF

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Publication number
CN204913555U
CN204913555U CN201520534609.7U CN201520534609U CN204913555U CN 204913555 U CN204913555 U CN 204913555U CN 201520534609 U CN201520534609 U CN 201520534609U CN 204913555 U CN204913555 U CN 204913555U
Authority
CN
China
Prior art keywords
monocrystalline silicon
tailstock
workbench
bistrique
clamping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201520534609.7U
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Chinese (zh)
Inventor
秦建国
宗伟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Konglian Science And Technology Co Ltd
Original Assignee
Beijing Konglian Science And Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Konglian Science And Technology Co Ltd filed Critical Beijing Konglian Science And Technology Co Ltd
Priority to CN201520534609.7U priority Critical patent/CN204913555U/en
Application granted granted Critical
Publication of CN204913555U publication Critical patent/CN204913555U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a monocrystalline silicon chamfer lathe, including lathe bed and workstation, the workstation is by removing about roll screw actuation, is provided with the headstock and tailstock at the both ends of workstation, the tailstock includes the tailstock axle, its other end connection clamping device, be used for placing the work piece holder in the middle of the headstock and the tailstock, it is tight through the clamping device clamp, a side of workstation is provided with feeding device, feeding device installs the bistrique, feeding device connection director is used for realizing feeding of bistrique, the emery wheel is equipped with on the bistrique. To monocrystalline silicon material thin slice chamfer processing, luster -finish all around, carry out the integration of excircle processing to artifical crystalline materials such as monocrystalline silicon, sapphires, this equipment is a tractor serves several purposes equipment simultaneously, can realize monocrystalline silicon piece's polishing process.

Description

Monocrystalline silicon beveler machine tool
Technical field
The utility model relates to work sheet crystal silicon manufacture field, relate to a kind of chamfer machining, the polishing that are applicable to single crystal silicon material thin slice surrounding particularly, Excircle machining is carried out to artificial crystal material simultaneously, once can clamping multi-disc single crystal silicon wafer, the processing of multistep operation can be realized, the monocrystalline silicon beveler machine tool of a tractor serves several purposes.
Background technology
In the chamfer machining of single crystal silicon material thin slice, complete the operation of chamfering, generally need to adopt vertical engraving lathe to replace grinding machine to complete processing, and processing work can only be carried out by clamping a slice labor cost at every turn.Therefore, need multiple devices to process respectively, floor space is large, and power consumption is high.Multiple technological process needs multiple clamping workpiece, personnel demand amount large, and production efficiency is low.
Summary of the invention
In order to solve existing equipment at every turn can only the equipment needed thereby that causes of clamping a slice work pieces process many and take up room large, the technical problems such as required manpower is many, the utility model provides a kind of monocrystalline silicon beveler machine tool.To chamfer machining, the polishing of single crystal silicon material thin slice surrounding, the artificial crystal material such as monocrystalline silicon, sapphire is carried out to the integration of Excircle machining, this equipment is a tractor serves several purposes equipment simultaneously, can realize the polishing process of monocrystalline silicon piece.
For achieving the above object, the technical solution of the utility model is:
A kind of monocrystalline silicon beveler machine tool, comprise lathe bed and workbench, described workbench is driven by ball-screw and moves left and right, the two ends of workbench are provided with the headstock and tailstock, described tailstock comprises tailstock spindle, its other end connects clamping device, place work piece fixture is used in the middle of the described headstock and tailstock, pass through gripping means grips, one side of described workbench is provided with feed arrangement, described feed arrangement is provided with bistrique, and described feed arrangement connection control device, for realizing the feeding of bistrique, described bistrique is equipped with emery wheel.
Preferably, described feed arrangement comprises motor, screw mandrel and feed slide, and described feed slide is by fixed block connection wire rod, and described motor drives screw mandrel linear reciprocating motion.
Preferably, described clamping device comprises motor pump, pressure-reducing valve, overflow valve, magnetic valve and filter, by pressure-reducing valve and overflow valve hydraulic control pressure, can control clamping device move forward and backward by magnetic valve.
Preferably, the upper end of described workbench is provided with high definition photoelectric microscope, and high definition photoelectric microscope connects measures display.
Preferably, described emery wheel is provided with 5 ~ 10 grind reliefs.
Compared with prior art, the beneficial effects of the utility model are:
(1), this device structure is rationally compact, and an equipment can carry out multi-disc clamping to single crystal silicon wafer respectively, and clamped one time can process 5-10 sheet single crystal silicon wafer simultaneously, and equipment carries out the polishing process that clamped one time can complete single crystal silicon wafer simultaneously.Meanwhile, equipment can also carry out Excircle machining to the artificial crystal material such as monocrystalline silicon, sapphire.Multistep operation can be completed by clamped one time.Decrease repeated clamping, improve machining accuracy and production efficiency thereof, decrease floor space, reduce taking of energy resource consumption and human resources, thus reduce production cost.
(2), in actual processing, to monocrystalline silicon chamfering, polishing, the machining accuracy of the hard brittle material cylindricalo grindings such as sapphire is higher and fineness is better.
Accompanying drawing explanation
Fig. 1 is the front view of the utility model monocrystalline silicon beveler machine tool.
Fig. 2 is the top view of the utility model monocrystalline silicon beveler machine tool.
Fig. 3 is the table feed schematic diagram of the utility model monocrystalline silicon beveler machine tool.
Fig. 4 is the grinding wheel feed schematic diagram of the utility model monocrystalline silicon beveler machine tool.
Fig. 5 is the work piece holder structural representation of the utility model monocrystalline silicon beveler machine tool.
Wherein: 1, workbench, 2, feed arrangement, 3, the headstock, 4, tailstock, 5, bistrique, 6, measure display, 7, work piece holder, 8, control box, 9, rolling lead screw, 10, tailstock spindle, 11, leading screw, 12, feed slide, 13, grinding head motor, 14, emery wheel, 15, clamping device, 16, high definition photoelectric microscope, 31, motor, 71, clamp system.
Detailed description of the invention
For making the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with detailed description of the invention also with reference to accompanying drawing, the utility model is further described.Should be appreciated that, these describe just exemplary, and do not really want to limit scope of the present utility model.In addition, in the following description, the description to known features and technology is eliminated, to avoid unnecessarily obscuring concept of the present utility model.
As shown in Figure 1 and Figure 2, equipment is made up of jointly workbench 1, feed arrangement 2, the headstock 3, tailstock 4, bistrique 5, measurement display 6, control box 8, ball-screw 9, tailstock spindle 10, leading screw 11, feed slide 12, grinding head motor 13, emery wheel 14, clamping device 15.
This monocrystalline silicon beveler machine tool comprises lathe bed and workbench 1, the headstock 3 and tailstock 4 is provided with at the two ends of workbench 1, tailstock 4 connects the clamping device 15 being used for clamping work pieces, and a side of described workbench is provided with feed arrangement 2 for realizing the feeding of bistrique 5, and described bistrique 5 is equipped with emery wheel 14.Drive headstock spindle to rotate by AC servo motor to rotate together with tailstock spindle 10, when the headstock 3 often rotates an angle, feed arrangement 2 also according to setting program feeding or retreat certain size value, rotate the numerical control linked movement relation with feed arrangement 2 by the headstock 3, realize the various different circular wafer chamfering of grinding.
The upper end of workbench is provided with high definition photoelectric microscope 16, high definition photoelectric microscope 16 connects measures display 6, measure display 6 and can show the image projected by high definition photoelectric microscope 16, use for the tool setting work before workpiece grinding and the testing after workpiece grinding-shaping.
Shown in Fig. 3, feed arrangement 2 comprises motor 31, screw mandrel 11 and feed slide 12, and described feed slide 12 is by fixed block connection wire rod 11, and described motor 31 drives screw mandrel linear reciprocating motion.Feed arrangement 2 is equipped with bistrique 5, and described feed arrangement 2 drives leading screw 11 rotation to realize feed slide 12 by AC servo motor and bistrique 5 is retreated.Bistrique 5 drives rotation by grinding head motor 13, and grinding spindle by the ribbed V-belt drives of grinding head motor 13 on belt pulley, thus realizes the High Rotation Speed of excircle grinding head main shaft.
Lathe bed and workbench 1 drive ball-screw 9 rotation to realize workbench 1 by AC servo motor and move left and right, by the movement of workbench 1, can realize the grinding of workpiece, the manufacturing procedures such as measurement.
Sand loading wheel 14 on bistrique 5, emery wheel 14 has 5 ~ 10 grind reliefs.
Clamping device 15, comprises motor pump, pressure-reducing valve, overflow valve, magnetic valve, filter, and carry out hydraulic control pressure height by pressure-reducing valve and overflow valve, high pressure is clamped condition, and low pressure is adjustment state.By adhesive and the disconnection of magnetic valve, the movable of clamping device 15 can be controlled.Withstand tailstock spindle 10 by clamping device 15 after clamping workpiece, thus reach the effect to Workpiece clamping.
Operation panel 8 can switch working methods such as handling manually, measure, be automatic.
As shown in Figure 5, work piece holder 7 can fill multi-disc circular wafer, fills 1 circular wafer and refills 1 dottle pin, then clamped by clamp system 71, be assembled into 11 every assembling mode, then its work piece holder 7 is contained in the middle of the headstock 3 and tailstock 4 and is clamped by clamping device 15.
Should be understood that, above-mentioned detailed description of the invention of the present utility model only for exemplary illustration or explain principle of the present utility model, and is not formed restriction of the present utility model.Therefore, any amendment made when not departing from spirit and scope of the present utility model, equivalent replacement, improvement etc., all should be included within protection domain of the present utility model.In addition, the utility model claims be intended to contain fall into claims scope and border or this scope and border equivalents in whole change and modification.

Claims (5)

1. a monocrystalline silicon beveler machine tool, comprise lathe bed and workbench, it is characterized in that, described workbench is driven by ball-screw and moves left and right, the two ends of workbench are provided with the headstock and tailstock, described tailstock comprises tailstock spindle, its other end connects clamping device, place work piece fixture is used in the middle of the described headstock and tailstock, by gripping means grips, a side of described workbench is provided with feed arrangement, and described feed arrangement is provided with bistrique, described feed arrangement connection control device, for realizing the feeding of bistrique, described bistrique is equipped with emery wheel.
2. monocrystalline silicon beveler machine tool according to claim 1, is characterized in that, described feed arrangement comprises motor, screw mandrel and feed slide, and described feed slide is by fixed block connection wire rod, and described motor drives screw mandrel linear reciprocating motion.
3. monocrystalline silicon beveler machine tool according to claim 1, it is characterized in that, described clamping device comprises motor pump, pressure-reducing valve, overflow valve, magnetic valve and filter, by pressure-reducing valve and overflow valve hydraulic control pressure, can control clamping device move forward and backward by magnetic valve.
4. monocrystalline silicon beveler machine tool according to claim 1, is characterized in that, the upper end of described workbench is provided with high definition photoelectric microscope, and high definition photoelectric microscope connects measures display.
5. monocrystalline silicon beveler machine tool according to claim 1, is characterized in that, described emery wheel is provided with 5 ~ 10 grind reliefs.
CN201520534609.7U 2015-07-23 2015-07-23 Monocrystalline silicon chamfer lathe Expired - Fee Related CN204913555U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520534609.7U CN204913555U (en) 2015-07-23 2015-07-23 Monocrystalline silicon chamfer lathe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520534609.7U CN204913555U (en) 2015-07-23 2015-07-23 Monocrystalline silicon chamfer lathe

Publications (1)

Publication Number Publication Date
CN204913555U true CN204913555U (en) 2015-12-30

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201520534609.7U Expired - Fee Related CN204913555U (en) 2015-07-23 2015-07-23 Monocrystalline silicon chamfer lathe

Country Status (1)

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CN (1) CN204913555U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109093480A (en) * 2016-08-29 2018-12-28 夏爱华 A kind of marble facing attachment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109093480A (en) * 2016-08-29 2018-12-28 夏爱华 A kind of marble facing attachment

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20151230

Termination date: 20160723