CN104669086A - Crystal plate-chamfering device - Google Patents
Crystal plate-chamfering device Download PDFInfo
- Publication number
- CN104669086A CN104669086A CN201510064241.7A CN201510064241A CN104669086A CN 104669086 A CN104669086 A CN 104669086A CN 201510064241 A CN201510064241 A CN 201510064241A CN 104669086 A CN104669086 A CN 104669086A
- Authority
- CN
- China
- Prior art keywords
- sucker
- block
- fixed
- crystal wafer
- guide rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/16—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of diamonds; of jewels or the like; Diamond grinders' dops; Dop holders or tongs
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/16—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of diamonds; of jewels or the like; Diamond grinders' dops; Dop holders or tongs
- B24B9/161—Dops, dop holders
Abstract
The invention discloses a crystal plate-chamfering device, which comprises a working platform, a crystal plate-fixing assembly and a grinding assembly, wherein the working platform is of an L-shaped supporting structure, and a horizontal supporting block and a vertical supporting block are connected to form the working platform; the crystal plate-fixing assembly is arranged on the horizontal supporting block, a crystal plate to be machined is placed on the crystal plate-fixing assembly, and the crystal plate-fixing assembly pushes the crystal plate to horizontally move to the vertical supporting block; the grinding assembly is arranged on the vertical supporting block, and the grinding assembly drives a grinding wheel to vertically move along the vertical supporting block, so that the grinding wheel is pushed to the crystal plate to be machined to chamfer the crystal plate. The crystal plate-chamfering device is structurally simple, is convenient and efficient to operate, and has high machining precision and high production efficiency.
Description
Technical field
Crystal wafer production and processing field of the present invention, refers in particular to a kind of crystal wafer facing attachment.
Background technology
Crystal wafer work in-process has one chamfering process, because crystal wafer compares crisp fritter, and be generally difficult to have corresponding device to carry out clamping and grinding to it, and chamfering has dimensional requirement, free-hand clamping wheel grinding, is difficult to processing.
Summary of the invention
The technical problem to be solved in the present invention is for above-mentioned the deficiencies in the prior art, and provide a kind of structure simple, convenient to operation, machining accuracy is high, the crystal wafer facing attachment that production efficiency is high.
The technical scheme that the present invention takes is as follows: a kind of crystal wafer facing attachment, comprises workbench, wafer fixation kit and grinding subassembly, and wherein, above-mentioned workbench is L-type supporting construction, and workbench is formed by connecting by cross-brace block and vertical supporting block; Above-mentioned wafer fixation kit is arranged on cross-brace block, and wafer fixation kit places wafer to be processed, and promotes wafer transverse movement to vertical supporting block place; Above-mentioned grinding subassembly is arranged on vertical supporting block, and grinding subassembly driving emery wheel vertically back-up block carries out vertical motion, emery wheel to be pushed into wafer place to be processed, carries out grinding chamfering to wafer.
Preferably, described wafer fixation kit comprises the first holder, the first guide rail, the first guide groove, slide block, contiguous block, chuck, connecting rod, pushing block, push rod and cylinder.
Preferably, the first described guide rail is fixedly installed on the cross-brace block of workbench, and transversely back-up block extends; Above-mentioned first guide groove is embedded in the first guide rail, and along the first guide rail freely-movable; The upper end of the first guide groove is fixed on slide block, and is with movable slider transverse movement; Slide block is fixed with chuck, chuck is placed crystal wafer to be processed, slide block movement drives chuck motion, crystal wafer to be pushed to the bottom of emery wheel.
Preferably, the bottom of described slide block is fixed with contiguous block, and the left end of contiguous block is fixed with connecting rod, and the left end of connecting rod is fixed on pushing block, and the left end of pushing block is fixed on push rod, and push rod promotes pushing block transverse movement.
Preferably, described push rod is arranged in cylinder, the transverse movement of air cylinder driven push rod, to promote pushing block, connecting rod, contiguous block and slide block transverse movement according to this; The left end of above-mentioned cylinder is fixed on the first holder, and the first holder is fixed on the cross-brace block of workbench.
Preferably, described grinding subassembly comprises the second guide rail, the second guide groove, sliding seat, screw mandrel screw rodb base, the second holder, fixed head, motor and emery wheel.
Preferably, the second described guide rail is fixedly installed on the vertical supporting block of above-mentioned workbench, and vertically back-up block extends; Second guide groove is embedded in the second guide rail, and along the second guide rail freely-movable, the outer end of the second guide groove is fixed in sliding seat, and the upper end of sliding seat is inserted with screw mandrel, and is connected with wire rod thread; The upper end of screw mandrel is inserted in screw rodb base, and screw rodb base drives screw mandrel to rotate, to drive sliding seat along the second guide rail vertical motion; Above-mentioned screw rodb base is fixed on the second holder, and the second holder is fixed on the vertical supporting block of workbench.
Preferably, the left side of described sliding seat stretches out formation support platform, this support platform is removably fixed with fixed head, fixed head is fixed with motor, the motor shaft of motor extends downwardly through sliding seat, the lower end of motor shaft is fixed with emery wheel, motor is with sliding seat vertical motion, to make emery wheel move near crystal wafer to be processed, motor drives emery wheel to rotate, the crystal wafer periphery to polish, carries out chamfering.
Preferably, described crystal sucker comprises sucker, sucker, air slot and annular bothrium, and wherein, above-mentioned sucker is cylindrical structure, and sucker is arranged on sucker, and runs through sucker; Cannelure comprises at least two, and each cannelure is disposed on the end face of sucker, and to lower recess, forms crystal adsorption plane, to adsorb crystal; Above-mentioned air slot is arranged on the end face of sucker, and air slot connects sucker and annular bothrium, and sucker connects vacuum generator and the air pump of peripheral hardware, to make adsorption plane forms negative pressure, holds crystal wafer to be processed.
Preferably, described air slot is intersected to form as cross cell body by orthogonal two strip cell bodies, and the crosspoint of air slot is overlapping with sucker, and sucker is communicated with air slot; Two strip cell bodies extend to both sides in the annular trough body in outside, to make each annular trough body be communicated with sucker; The two ends of sucker extend to end face and the bottom surface of sucker respectively, and the bottom of sucker is provided with trachea, and the upper end of trachea is connected with sucker, and lower end is connected with tracheae, and tracheae is connected to vacuum generator and the air pump of peripheral hardware.
Beneficial effect of the present invention is:
The present invention is in actual production process, summary innovation draws, workbench is comprised by designing one, the crystal wafer facing attachment of wafer fixation kit and grinding subassembly, workbench is L-type supporting construction, be formed by connecting by cross-brace block and vertical supporting block, cross-brace block is provided with crystal fixation kit, grinding subassembly is arranged on vertical supporting block, first guide rail of crystal fixation kit is fixed on cross-brace seat, first guide rail is embedded with the first guide groove, first guide groove is fixed on slide block top, the bottom of slide block is fixed with contiguous block, contiguous block is connected on pushing block by connecting rod, pushing block is then fastened on the push rod of cylinder, the transverse movement of air cylinder driven push rod, thus promote slide block along the first guide rail transverse movement, slide block is provided with chuck, chuck is adsorbed with crystal wafer to be processed, slide block movement, crystal wafer to be pushed into the below of grinding subassembly, second guide rail of grinding subassembly is fixed on the vertical supporting block of workbench, second guide rail is embedded with the second guide groove, second guide groove is along the vertical freely-movable of the second guide rail, second guide groove is fixed in sliding seat, the top of sliding seat is inserted with screw mandrel, and be connected with wire rod thread, the top of screw mandrel is inserted in screw rodb base, screw rodb base drives screw mandrel to rotate, to drive sliding seat along the second guide rail vertical motion, sliding seat is fixed with motor, machine shaft is arranged on motor lower portion, machine shaft arranges emery wheel, sliding seat drives emery wheel to move to crystal wafer place to be processed, motor drives emery wheel to rotate, the crystal wafer periphery to polish, form chamfering.
Accompanying drawing explanation
Fig. 1 is perspective view of the present invention.
Fig. 2 is front view of the present invention.
Fig. 3 is the top view of Fig. 2.
Fig. 4 is one of perspective view of crystal sucker in Fig. 1.
Fig. 5 is the perspective view two of crystal sucker in Fig. 1.
Detailed description of the invention
Below in conjunction with accompanying drawing, the invention will be further described:
As shown in Figures 1 to 5, the technical scheme that the present invention takes is as follows: a kind of crystal wafer facing attachment, comprises workbench 1, wafer fixation kit and grinding subassembly, wherein, above-mentioned workbench 1 is L-type supporting construction, and workbench 1 is formed by connecting by cross-brace block and vertical supporting block; Above-mentioned wafer fixation kit is arranged on cross-brace block, and wafer fixation kit places wafer to be processed, and promotes wafer transverse movement to vertical supporting block place; Above-mentioned grinding subassembly is arranged on vertical supporting block, and grinding subassembly driving emery wheel 20 vertically back-up block carries out vertical motion, emery wheel 20 is pushed into wafer place to be processed, carries out grinding chamfering to wafer.
Wafer fixation kit comprises the first holder 11, first guide rail 2, first guide groove 3, slide block 4, contiguous block 5, chuck 6, connecting rod 7, pushing block 8, push rod 9 and cylinder 10.
First guide rail 2 is fixedly installed on the cross-brace block of workbench 1, and transversely back-up block extends; Above-mentioned first guide groove 3 is embedded in the first guide rail 2, and along the first guide rail freely-movable; The upper end of the first guide groove 3 is fixed on slide block 4, and is with movable slider 4 transverse movement; Slide block 4 is fixed with chuck 6, chuck 6 places crystal wafer to be processed, slide block 4 moves and drives chuck 6 to move, crystal wafer is pushed to the bottom of emery wheel 20.
The bottom of slide block 4 is fixed with contiguous block 5, and the left end of contiguous block 5 is fixed with connecting rod 7, and the left end of connecting rod 7 is fixed on pushing block 8, and the left end of pushing block 8 is fixed on push rod 9, and push rod 9 promotes pushing block 8 transverse movement.
Push rod 9 is arranged in cylinder 10, and cylinder 10 drives push rod 9 transverse movement, to promote pushing block 8, connecting rod 7, contiguous block 5 and slide block 4 transverse movement according to this; The left end of above-mentioned cylinder 10 is fixed on the first holder 11, and the first holder 11 is fixed on the cross-brace block of workbench 1.
Grinding subassembly comprises the second guide rail 12, second guide groove 13, sliding seat 14, screw mandrel 15 screw rodb base 16, second holder 17, fixed head 18, motor 19 and emery wheel 20.
Second guide rail 12 is fixedly installed on the vertical supporting block of above-mentioned workbench 1, and vertically back-up block extends; Second guide groove 13 is embedded in the second guide rail 12, and along the second guide rail 12 freely-movable, the outer end of the second guide groove 13 is fixed in sliding seat 14, and the upper end of sliding seat 14 is inserted with screw mandrel 15, and is threaded with screw mandrel 15; The upper end of screw mandrel 15 is inserted in screw rodb base 16, and screw rodb base 16 drives screw mandrel 15 to rotate, to drive sliding seat 14 along the second guide rail 12 vertical motion; Above-mentioned screw rodb base 16 is fixed on the second holder 17, and the second holder 17 is fixed on the vertical supporting block of workbench 1.
The left side of sliding seat 14 stretches out formation support platform, this support platform is removably fixed with fixed head 18, fixed head 18 is fixed with motor 19, the motor shaft of motor 19 extends downwardly through sliding seat 14, and the lower end of motor shaft is fixed with emery wheel 20, and motor 19 is with sliding seat 14 vertical motion, to make emery wheel move near crystal wafer to be processed, motor 19 drives emery wheel 20 to rotate, to polish crystal wafer periphery, carries out chamfering.
Crystal sucker 6 comprises sucker 61, sucker 62, air slot 63 and annular bothrium 64, and wherein, above-mentioned sucker 61 is cylindrical structure, and sucker 62 is arranged on sucker 61, and runs through sucker 61; Cannelure 64 comprises at least two, and each cannelure 64 is disposed on the end face of sucker 61, and to lower recess, forms crystal adsorption plane, to adsorb crystal; Above-mentioned air slot 63 is arranged on the end face of sucker 61, and air slot 63 connects sucker 62 and annular bothrium 64, and sucker 62 connects vacuum generator and the air pump of peripheral hardware, to make adsorption plane forms negative pressure, holds crystal wafer to be processed.
Air slot 63 intersects to form as cross cell body by orthogonal two strip cell bodies, and the crosspoint of air slot 3 is overlapping with sucker 62, and sucker 62 is communicated with air slot 63; Two strip cell bodies extend to both sides in the annular trough body 64 in outside, to make each annular trough body 64 be communicated with sucker 62; The two ends of sucker 62 extend to end face and the bottom surface of sucker 61 respectively, and the bottom of sucker 62 is provided with trachea 65, and the upper end of trachea 65 is connected with sucker 62, and lower end is connected with tracheae, and tracheae is connected to vacuum generator and the air pump of peripheral hardware.
Further, the present invention comprises workbench by design one, the crystal wafer facing attachment of wafer fixation kit and grinding subassembly, workbench is L-type supporting construction, be formed by connecting by cross-brace block and vertical supporting block, cross-brace block is provided with crystal fixation kit, grinding subassembly is arranged on vertical supporting block, first guide rail of crystal fixation kit is fixed on cross-brace seat, first guide rail is embedded with the first guide groove, first guide groove is fixed on slide block top, the bottom of slide block is fixed with contiguous block, contiguous block is connected on pushing block by connecting rod, pushing block is then fastened on the push rod of cylinder, the transverse movement of air cylinder driven push rod, thus promote slide block along the first guide rail transverse movement, slide block is provided with chuck, chuck is adsorbed with crystal wafer to be processed, slide block movement, crystal wafer to be pushed into the below of grinding subassembly, second guide rail of grinding subassembly is fixed on the vertical supporting block of workbench, second guide rail is embedded with the second guide groove, second guide groove is along the vertical freely-movable of the second guide rail, second guide groove is fixed in sliding seat, the top of sliding seat is inserted with screw mandrel, and be connected with wire rod thread, the top of screw mandrel is inserted in screw rodb base, screw rodb base drives screw mandrel to rotate, to drive sliding seat along the second guide rail vertical motion, sliding seat is fixed with motor, machine shaft is arranged on motor lower portion, machine shaft arranges emery wheel, sliding seat drives emery wheel to move to crystal wafer place to be processed, motor drives emery wheel to rotate, the crystal wafer periphery to polish, form chamfering.Further, device workbench internal fixtion has the first guide rail, first guide rail upper sleeve has a slide block, slide block is advanced by cylinder, cylinder is fixed with one piece of gripper shoe, gripper shoe is fixed with a fork-shaped support, this support is used to when cylinder output shaft resets stopping, when loading crystal wafer, crystal wafer is fixed on crystal sucker, cylinder output shaft end is connected with pushing block, push pedal and slide block are spirally connected by bolt, can by the distance between bolt adjusting slider and cylinder, thus can ensure cylinder the crystal wafer on slide block is accurately pushed to before emery wheel with emery wheel Precise Grinding, crystal sucker is rotatably connected on slide block by bearing, and pass through driving stepper motor, emery wheel also passes through driving stepper motor, conveying coolant apparatus also established by emery wheel side workbench, whole grinding wheel unit is fixed in sliding seat, sliding seat is inserted with the second guide rail, second slide block is driven by screw mandrel, thus regulate the upper-lower position of emery wheel, different positions is regulated according to different products.
Embodiments of the invention just introduce its detailed description of the invention, do not lie in and limit its protection domain.The technical staff of the industry can make some amendment under the inspiration of the present embodiment, therefore all equivalences done according to the scope of the claims of the present invention change or modify, and all belong within the scope of Patent right requirement of the present invention.
Claims (10)
1. a crystal wafer facing attachment, is characterized in that: comprise workbench (1), wafer fixation kit and grinding subassembly, and wherein, above-mentioned workbench (1) is L-type supporting construction, and workbench (1) is formed by connecting by cross-brace block and vertical supporting block; Above-mentioned wafer fixation kit is arranged on cross-brace block, and wafer fixation kit places wafer to be processed, and promotes wafer transverse movement to vertical supporting block place; Above-mentioned grinding subassembly is arranged on vertical supporting block, and grinding subassembly driving emery wheel (20) vertically back-up block carries out vertical motion, emery wheel (20) is pushed into wafer place to be processed, carries out grinding chamfering to wafer.
2. a kind of crystal wafer facing attachment according to claim 1, is characterized in that: described wafer fixation kit comprises the first holder (11), the first guide rail (2), the first guide groove (3), slide block (4), contiguous block (5), chuck (6), connecting rod (7), pushing block (8), push rod (9) and cylinder (10).
3. a kind of crystal wafer facing attachment according to claim 2, is characterized in that: described the first guide rail (2) is fixedly installed on the cross-brace block of workbench (1), and transversely back-up block extends; Above-mentioned first guide groove (3) is embedded in the first guide rail (2), and along the first guide rail freely-movable; The upper end of the first guide groove (3) is fixed on slide block (4), and is with movable slider (4) transverse movement; Slide block (4) is fixed with chuck (6), chuck (6) is upper places crystal wafer to be processed, and slide block (4) motion drives chuck (6) motion, crystal wafer to be pushed to the bottom of emery wheel (20).
4. a kind of crystal wafer facing attachment according to claim 3, it is characterized in that: the bottom of described slide block (4) is fixed with contiguous block (5), the left end of contiguous block (5) is fixed with connecting rod (7), the left end of connecting rod (7) is fixed on pushing block (8), the left end of pushing block (8) is fixed on push rod (9), and push rod (9) promotes pushing block (8) transverse movement.
5. a kind of crystal wafer facing attachment according to claim 4, it is characterized in that: described push rod (9) is arranged in cylinder (10), cylinder (10) drives push rod (9) transverse movement, to promote pushing block (8), connecting rod (7), contiguous block (5) and slide block (4) transverse movement according to this; The left end of above-mentioned cylinder (10) is fixed on the first holder (11), and the first holder (11) is fixed on the cross-brace block of workbench (1).
6. a kind of crystal wafer facing attachment according to claim 5, is characterized in that: described grinding subassembly comprises the second guide rail (12), the second guide groove (13), sliding seat (14), screw mandrel (15) screw rodb base (16), the second holder (17), fixed head (18), motor (19) and emery wheel (20).
7. a kind of crystal wafer facing attachment according to claim 6, is characterized in that: described the second guide rail (12) is fixedly installed on the vertical supporting block of above-mentioned workbench (1), and vertically back-up block extends; Second guide groove (13) is embedded in the second guide rail (12), and along the second guide rail (12) freely-movable, the outer end of the second guide groove (13) is fixed in sliding seat (14), and the upper end of sliding seat (14) is inserted with screw mandrel (15), and is threaded with screw mandrel (15); The upper end of screw mandrel (15) is inserted in screw rodb base (16), and screw rodb base (16) drives screw mandrel (15) to rotate, to drive sliding seat (14) along the second guide rail (12) vertical motion; Above-mentioned screw rodb base (16) is fixed on the second holder (17), and the second holder (17) is fixed on the vertical supporting block of workbench (1).
8. a kind of crystal wafer facing attachment according to claim 7, it is characterized in that: the left side of described sliding seat (14) stretches out formation support platform, this support platform is removably fixed with fixed head (18), fixed head (18) is fixed with motor (19), the motor shaft of motor (19) extends downwardly through sliding seat (14), the lower end of motor shaft is fixed with emery wheel (20), motor (19) is with sliding seat (14) vertical motion, to make emery wheel move near crystal wafer to be processed, motor (19) drives emery wheel (20) to rotate, the crystal wafer periphery to polish, carry out chamfering.
9. a kind of crystal wafer facing attachment according to claim 8, it is characterized in that: described crystal sucker (6) comprises sucker (61), sucker (62), air slot (63) and annular bothrium (64), wherein, above-mentioned sucker (61) is cylindrical structure, sucker (62) is arranged on sucker (61), and runs through sucker (61); Cannelure (64) comprises at least two, and each cannelure (64) is disposed on the end face of sucker (61), and to lower recess, forms crystal adsorption plane, to adsorb crystal; Above-mentioned air slot (63) is arranged on the end face of sucker (61), air slot (63) connects sucker (62) and annular bothrium (64), sucker (62) connects vacuum generator and the air pump of peripheral hardware, to make adsorption plane forms negative pressure, holds crystal wafer to be processed.
10. a kind of crystal wafer facing attachment according to claim 9, it is characterized in that: described air slot (63) intersects to form as cross cell body by orthogonal two strip cell bodies, the crosspoint of air slot (3) is overlapping with sucker (62), and sucker (62) is communicated with air slot (63); Two strip cell bodies extend to both sides in the annular trough body (64) in outside, to make each annular trough body (64) be communicated with sucker (62); The two ends of sucker (62) extend to end face and the bottom surface of sucker (61) respectively, the bottom of sucker (62) is provided with trachea (65), the upper end of trachea (65) is connected with sucker (62), and lower end is connected with tracheae, and tracheae is connected to vacuum generator and the air pump of peripheral hardware.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510064241.7A CN104669086A (en) | 2015-02-09 | 2015-02-09 | Crystal plate-chamfering device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510064241.7A CN104669086A (en) | 2015-02-09 | 2015-02-09 | Crystal plate-chamfering device |
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| Publication Number | Publication Date |
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| CN104669086A true CN104669086A (en) | 2015-06-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510064241.7A Pending CN104669086A (en) | 2015-02-09 | 2015-02-09 | Crystal plate-chamfering device |
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| CN (1) | CN104669086A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105437072A (en) * | 2015-11-30 | 2016-03-30 | 湖州优创科技有限公司 | Belt type grinding machine clamping device for floor machining |
| CN107097114A (en) * | 2017-07-06 | 2017-08-29 | 张家港博洋机械制造有限公司 | A kind of fully-automatic chamfering machine |
| CN107538317A (en) * | 2016-06-28 | 2018-01-05 | 株式会社迪思科 | Processing unit (plant) |
| CN109551327A (en) * | 2018-11-21 | 2019-04-02 | 厦门家和兴钻石工具有限公司 | Edge polisher |
| CN110405571A (en) * | 2019-07-23 | 2019-11-05 | 西安奕斯伟硅片技术有限公司 | A kind of edge grinding device and method |
| CN112271154A (en) * | 2020-11-26 | 2021-01-26 | 福州大学 | Adjustable high-precision wafer edging carrying platform and use method |
| CN112847141A (en) * | 2019-10-31 | 2021-05-28 | 邓筑蓉 | Semiconductor wafer planarization system and use method |
| CN116604463A (en) * | 2023-06-20 | 2023-08-18 | 苏州博宏源机械制造有限公司 | Polishing device and method for improving edge flatness of wafer |
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| CN105437072A (en) * | 2015-11-30 | 2016-03-30 | 湖州优创科技有限公司 | Belt type grinding machine clamping device for floor machining |
| CN107538317A (en) * | 2016-06-28 | 2018-01-05 | 株式会社迪思科 | Processing unit (plant) |
| CN107097114A (en) * | 2017-07-06 | 2017-08-29 | 张家港博洋机械制造有限公司 | A kind of fully-automatic chamfering machine |
| CN109551327A (en) * | 2018-11-21 | 2019-04-02 | 厦门家和兴钻石工具有限公司 | Edge polisher |
| CN109551327B (en) * | 2018-11-21 | 2020-06-05 | 厦门家和兴钻石工具有限公司 | Edge grinding machine |
| CN110405571A (en) * | 2019-07-23 | 2019-11-05 | 西安奕斯伟硅片技术有限公司 | A kind of edge grinding device and method |
| CN110405571B (en) * | 2019-07-23 | 2021-05-18 | 西安奕斯伟硅片技术有限公司 | Edge grinding device and method |
| CN112847141A (en) * | 2019-10-31 | 2021-05-28 | 邓筑蓉 | Semiconductor wafer planarization system and use method |
| CN112271154A (en) * | 2020-11-26 | 2021-01-26 | 福州大学 | Adjustable high-precision wafer edging carrying platform and use method |
| CN116604463A (en) * | 2023-06-20 | 2023-08-18 | 苏州博宏源机械制造有限公司 | Polishing device and method for improving edge flatness of wafer |
| CN116604463B (en) * | 2023-06-20 | 2023-12-15 | 苏州博宏源机械制造有限公司 | Polishing device and method for improving edge flatness of wafer |
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