CN204230215U - A kind of mould and mold storage device completing the sheet operation of chip button limit fast - Google Patents

A kind of mould and mold storage device completing the sheet operation of chip button limit fast Download PDF

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Publication number
CN204230215U
CN204230215U CN201420800083.8U CN201420800083U CN204230215U CN 204230215 U CN204230215 U CN 204230215U CN 201420800083 U CN201420800083 U CN 201420800083U CN 204230215 U CN204230215 U CN 204230215U
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mould
chip
mainboard
mold
button limit
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朱燕
李有群
许静
廉鹏
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Tai Shi Core Micron Technology Co Ltd Of Ma'an Mountain
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Tai Shi Core Micron Technology Co Ltd Of Ma'an Mountain
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Abstract

The utility model discloses a kind of mould and the mold storage device that complete the sheet operation of chip button limit fast, belong to field of manufacturing semiconductor devices.Mould of the present utility model is disc-shaped, diameter D=78-[x]/2mm ([x] is the integer between 6-20), it makes material is blue film and plane release liners, die edge has a kerf, mold storage device of the present utility model comprises storing unit main body and mold storing box, also comprise clip, the bottom of mold storing box is semicircle.Mould of the present utility model and mold storage device structure simple, but reasonable in design, be easy to manufacture, use mould of the present utility model and mold storage device can realize buckleing limit operation to the batch of chip, compared with existing loaded down with trivial details button limit method, efficiency improves 70-80%, and button limit is effective, and the chip edge detained after the sheet of limit is neat, chip without any damage is hindered, cost is low, and the mould deposited is not easily damaged, long service life.

Description

A kind of mould and mold storage device completing the sheet operation of chip button limit fast
Technical field
The invention belongs to field of manufacturing semiconductor devices, more particularly, relate to a kind of mould and the mold storage device that complete the sheet operation of chip button limit fast.
Background technology
Along with light-emitting diode (LED) is in the appearance of nineteen sixty, LED starts to apply widely in our surrounding environment, play very important role in daily life, become one of the most valued light source technology, as various indicator light, display light source and lighting apparatus etc. can see the application of LED.Compared to traditional lighting source as fluorescent lamp, incandescent osram lamp etc., the advantages such as LED has high brightness, low-power consumption, the life-span is long, startup is fast, volume is little, environmental protection and energy saving, not easily generation visual fatigue, there is vast potential for future development, be subject to people's extensive concern.The manufacture craft of LED chip mainly comprises epitaxial growth, technique before chip, grinding and cutting, point survey and sorting etc., the important means of inspection LED photovoltaic performance is LED photovoltaic test, after treating the photo electric parameter testing of LED chip, the difference of contrast photo electric parameter need process chip, the poor chip part of photo electric parameter will be separated as limit sheet and the good chip of photo electric parameter, the operational method that deduction limit sheet is conventional first carries out pour mask operation to chip, then the limit sheet part of the mould fixed chip in the cavity of multiple embedded different-diameter size is adopted, limit sheet part is deducted after using heater heating.Owing to adopting the method not only consuming time but also consumptive material, have a strong impact on the production efficiency of LED chip, thus be badly in need of one more easily method button limit sheet carried out to chip operate, avoid the triviality of operation.
Through retrieval, China Patent Publication No. CN 103633198 A discloses a kind of LED chip manufacture method and LED chip, and this manufacture method comprises the patterned substrate adopting wafer fabrication with cutting passageway; At the described patterned substrate growing epitaxial layers with cutting passageway; The wafer of the complete epitaxial loayer of described growth is etched, make LED chip, wherein, not etching at least partially of region corresponding to described cutting passageway is retained in etching process, the LED chip manufacture method that this invention provides and LED chip, can improve the luminous efficiency of LED chip further, but the manufacture method in this invention does not improve the button limit sheet method of operation in LED chip production process.China Patent Publication No. CN 103612015 A discloses a kind of LED wafer cutting method, the cutting method of this invention is when cutting, first formed on wafer with the common cutting laser of low-power and cut trace together, and then cutting trace cut in common laser with stealthy cutting laser carries out stealth cutting, this cutting method can fundamentally in conjunction with wafer and the stealthy technique of cutting of the various rete of evaporation, avoid the fragmentation when cut channel formed due to cutting causes evaporation rete, but this cutting method cost is high, efficiency is low, be not suitable for the deduction of LED chip limit sheet, therefore need research one more easily method button limit sheet carried out to chip operate, avoid the triviality of operation.
Summary of the invention
1. the problem that will solve
For consuming time, the problem such as complex operation, production efficiency are low that sheet operation in existing LED chip button limit exists, the utility model provides a kind of mould and the mold storage device that complete the sheet operation of chip button limit fast, mould of the present utility model is used to carry out chip when buckleing limit sheet operation, without the need to being heated by heater, can fast limit sheet be poured in finished film by means of only blue film above simple pressing sheet position, chip limit, complete the button limit operation of chip, mold storage device of the present utility model is for depositing the mould of chip button limit sheet operation, structure is simple, easy to use.
2. technical scheme
In order to solve the problem, the technical solution adopted in the present invention is as follows:
A kind of mould completing the sheet operation of chip button limit fast, mould is disc-shaped, and making material is blue film and plane release liners, and described die edge has a kerf, the distance of described otch distance mold center is the 1/7-1/8 of mould diameter, and the thickness of mould is 1-2mm.
Preferably, diameter D=78-[the x]/2mm of described mould, wherein x is the percent value of limit sheet in chip photo Parameter Map, and [x] expression is rounded to units according to the principle that rounds up to x.
Preferably, described [x] is the integer between 6-20.
Above-mentioned a kind of storing unit completing the mould of chip button limit sheet operation fast, comprise storing unit main body and mold storing box, described storing unit main body comprises the first mainboard and the second mainboard, and the first mainboard is connected with the second mainboard upper side edge, and two plate structures in an angle; Described mold storing box is positioned on the first mainboard and the second mainboard, and the bottom of mold storing box is semicircle, and size is mated with the mould described in claim 1.
Preferably, the angle between the first described mainboard and the second mainboard is 30-150 °.
Preferably, the first pole and the second pole is provided with between the first described mainboard and the second mainboard.
Preferably, the first described mainboard and the second mainboard are respectively equipped with 1-20 mold storing box.
Preferably, the top of described mold storing box is rectangle.
Preferably, mold storage device also comprises clip.
Preferably, the front end of described clip is that soft material is made.
3. beneficial effect
Compared to prior art, beneficial effect of the present invention is:
(1) mould completing the sheet operation of chip button limit fast of the present invention, can realize the batch button limit operation to chip, and compared with existing loaded down with trivial details button limit method, efficiency improves 70-80%, and button limit is effective;
(2) die edge of the present invention has a kerf, facilitate mold use, diameter D=78-[the x]/2mm of mould, determines the size of mould according to the BIN figure of the chip of each batch, control the removal amount of chip limit sheet to the full extent, high financial profit;
(3) mould structure of the present invention is simple, but reasonable in design, is easy to manufacture, and has beyond thought result of use, and the production efficiency making chip production enterprise detain limit sheet improves greatly;
(4) mold storage device of the present invention is for depositing the mould of button limit sheet operation, and convenient and practical, mold storage device is also furnished with the clip fetching chip, and the front end of clip is that soft material is made, and can not damage mould; Mold storing box on mold storage device is the groove in storing unit main body, and be semicircle bottom it, for depositing mould, top is rectangle, conveniently fetches.
Accompanying drawing explanation
Fig. 1 is the structural representation of mould in the present invention;
Fig. 2 is the structural representation of mold storage device in the present invention;
Fig. 3 is the front view of mold storage device in the present invention;
Fig. 4 is the structural representation of clip supporting with mold storage device in the present invention.
In figure: 1, storing unit main body; 101, the first mainboard; 102, the second mainboard; 103, the first pole; 104, the second pole; 2, mold storing box; 3, clip.
Embodiment
Below in conjunction with specific embodiment, the present invention is described further.
Embodiment 1
As shown in Figure 1, a kind of mould completing the sheet operation of chip button limit fast, mould is disc-shaped, diameter D=78-[x]/2mm, wherein x is the percent value of limit sheet in chip photo Parameter Map, [x] represents and is rounded to units according to the principle that rounds up to x (the limit sheet part of chip is the poor chip of photo electric parameter, for guaranteeing that the chip of core does not mix the poor chip of photo electric parameter, ratio can be relaxed in right amount during button limit sheet, thus improve the quality of center dies.Therefore in enterprise practical production process, when [x] is for being 13 to make the mould of corresponding size by [x] during 6-10, when [x] is for being 18 to make the mould of corresponding size by [x] during 11-15, [x] is 16-20 by [x] is 23 to make the mould of corresponding size, the mould of preparation 3 sizes.), in the present embodiment, [x] is 6, be 13 to make the mould of corresponding size by [x] in actual production process, the making material of mould is blue film and plane release liners, and die edge has a kerf, the distance of otch distance mold center is 1/7 of mould diameter, and the thickness of mould is 1mm.
In order to obtain above-mentioned mould, a kind of manufacture method completing the mould of chip button limit sheet operation fast, the steps include:
A () prepares material: prepare blue film, plane release liners, ruler, pen, cutter and rope;
B blue film and plane release liners are heated to 30 DEG C by () on heating station, then the adhesive faces of blue film and plane release liners exasperate are fitted, drive the bubble between blue film and plane release liners away, obtain mould material;
C (), after the mould material obtained in step (b) is cooled to room temperature, utilizes ruler, pen and rope to draw the shape of mould according to claim 1 at the release paper of the plane of mould material;
D () obtains mould with cutter according to the mold shape cutting drawn in step (c).
The surface smoothness of mould prepared by the present embodiment is high, bubble-free between blue film and plane release liners, and the thickness of blue film is 380 μm, and basic weight is 93g/cm 2, extension rate is 88%, 180 ° of peel adhesion is 0.9N/mm, and hardness is moderate, to the damage that can not cause during chip button limit sheet chip, can be detained from chip by limit sheet easily simultaneously, easy to use, economic and practical.
Above-mentioned mould is used for completing the method that chip buckles limit sheet operation fast, the steps include:
(1) prepare material: transferring film, finished film, non-dust cloth, iron hoop and above-mentioned mould in preparation, wherein, middle transferring film is the blue film of individual layer, and finished film is the composite membrane that blue film and release liners are formed, and the blue film viscosity in finished film is greater than the viscosity of middle transferring film;
(2) by finished film tiling on the table, iron hoop, is then placed in the middle part of finished film upward by blue film, to be fastened by iron hoop iron hoop with the blue film of iron hoop periphery;
(3) the above-mentioned mould prepared is placed in the finished film in the middle of iron hoop, the light face of mould contacts with the blue film of finished film, to wait that the chip detaining limit sheet is placed on mould, wait that the chip surrounding of detaining limit sheet has black and white ring, the effect of black and white ring be conveniently fetch chip and make chip fetch in process not easily damaged;
(4) middle transferring film sticked on the chip waiting to detain limit sheet, then will wait that the black and white ring detaining limit sheet chip surrounding takes out, wherein, the size of transferring film is greater than the size of waiting to detain limit sheet chip;
(5) non-dust cloth is made the ball that diameter is 3cm, then press mould outer edge chip in step (4) with ball with the power of 25N size, chip is disconnected at die edge place;
(6) after pressing terminates, middle transferring film opened from edge, the chip having detained limit sheet is uncovered together along with middle transferring film, and the limit sheet of chip is stayed in finished film.
Limit sheet method is detained in the present embodiment, the button limit sheet operation to a slice chip within average 20 seconds, can be completed, and traditional button limit sheet method needs first pour mask, then at the condition lower buckle side sheet of heating, complete and 80 seconds are on average needed to the button limit sheet operation of a slice chip, in the present embodiment, mould makes the efficiency of buckleing limit sheet improve 75%, has very high using value.
In order to deposit the above-mentioned mould for detaining limit sheet operation, a kind of mould and mold storage device completing the sheet operation of chip button limit fast, as shown in Figures 2 and 3, comprise storing unit main body 1 and mold storing box 2, storing unit main body 1 comprises the first mainboard 101 and the second mainboard 102, first mainboard 101 is connected with the second mainboard 102 upper side edge, two plate structures in an angle, angle between first mainboard 101 and the second mainboard 102 is 30 °, is provided with the first pole 103 and the second pole 104 between the first mainboard 101 and the second mainboard 102; Mold storing box 2 is positioned on the first mainboard 101 and the second mainboard 102, first mainboard 101 and the second mainboard 102 are respectively equipped with 1 mold storing box 2, the bottom of mold storing box 2 is semicircle, size is mated with the mould described in claim 1, the top of mold storing box 2 is rectangle, facilitates fetching of mould.The mold storage device of the present embodiment also comprises clip 3, and as shown in Figure 4, the front end of clip 3 is that soft material is made, and can not damage mould, and is conveniently taken out from storing unit by mould.
Embodiment 2
A kind of mould completing the sheet operation of chip button limit fast, mould is disc-shaped, diameter D=78-[x]/2mm, wherein x is the percent value of limit sheet in chip photo Parameter Map, [x] expression is rounded to units according to the principle that rounds up to x, in the present embodiment, [x] is 13, be 18 to make the mould of corresponding size by [x] in actual production process, the making material of mould is blue film and plane release liners, described die edge has a kerf, the distance of otch distance mold center is 2/15 of mould diameter, and the thickness of mould is 2mm.
In order to obtain above-mentioned mould, a kind of manufacture method completing the mould of chip button limit sheet operation fast, the steps include:
A () prepares material: prepare blue film, plane release liners, ruler, pen, cutter and rope;
B blue film and plane release liners are heated to 35 DEG C by () on heating station, then the adhesive faces of blue film and plane release liners exasperate are fitted, drive the bubble between blue film and plane release liners away, obtain mould material;
C (), after the mould material obtained in step (b) is cooled to room temperature, utilizes ruler, pen and rope to draw the shape of mould according to claim 1 at the release paper of the plane of mould material;
D () obtains mould with cutter according to the mold shape cutting drawn in step (c).
The surface smoothness of mould prepared by the present embodiment is high, bubble-free between blue film and plane release liners, and the thickness of blue film is 300 μm, and basic weight is 90g/cm 2, extension rate is 100%, 180 ° of peel adhesion is 0.5N/mm, and hardness is moderate, to the damage that can not cause during chip button limit sheet chip, can be detained from chip by limit sheet easily simultaneously, easy to use, economic and practical.
Above-mentioned mould is used for completing the method that chip buckles limit sheet operation fast, the steps include:
(1) prepare material: transferring film, finished film, non-dust cloth, iron hoop and above-mentioned mould in preparation, wherein, middle transferring film is the blue film of individual layer, and finished film is the composite membrane that blue film and release liners are formed, and the blue film viscosity in finished film is greater than the viscosity of middle transferring film;
(2) by finished film tiling on the table, iron hoop, is then placed in the middle part of finished film upward by blue film, to be fastened by iron hoop iron hoop with the blue film of iron hoop periphery;
(3) be placed on by the above-mentioned mould prepared in the finished film in the middle of iron hoop, the light face of mould contacts with the blue film of finished film, will wait that the chip detaining limit sheet is placed on mould;
(4) middle transferring film sticked on the chip waiting to detain limit sheet, then will wait that the black and white ring detaining limit sheet chip surrounding takes out, wherein, the size of transferring film is greater than the size of waiting to detain limit sheet chip;
(5) non-dust cloth is made the ball that diameter is 2cm, then press mould outer edge chip in step (4) with ball with the power of 18N size, chip is disconnected at die edge place;
(6) after pressing terminates, middle transferring film opened from edge, the chip having detained limit sheet is uncovered together along with middle transferring film, and the limit sheet of chip is stayed in finished film.
Limit sheet method is detained in the present embodiment, the button limit sheet operation to a slice chip within average 18 seconds, can be completed, and traditional button limit sheet method needs first pour mask, then at the condition lower buckle side sheet of heating, complete and 80 seconds are on average needed to the button limit sheet operation of a slice chip, in the present embodiment, mould makes the efficiency of buckleing limit sheet improve 85%, has very high using value.
In order to deposit the above-mentioned mould for detaining limit sheet operation, a kind of mould and mold storage device completing the sheet operation of chip button limit fast, as shown in Figures 2 and 3, comprise storing unit main body 1 and mold storing box 2, storing unit main body 1 comprises the first mainboard 101 and the second mainboard 102, first mainboard 101 is connected with the second mainboard 102 upper side edge, two plate structures in an angle, angle between first mainboard 101 and the second mainboard 102 is 150 °, is provided with the first pole 103 and the second pole 104 between the first mainboard 101 and the second mainboard 102; Mold storing box 2 is positioned on the first mainboard 101 and the second mainboard 102, first mainboard 101 and the second mainboard 102 are respectively equipped with 10 mold storing boxes 2, the bottom of mold storing box 2 is semicircle, size is mated with the mould described in claim 1, the top of mold storing box 2 is rectangle, facilitates fetching of mould.The mold storage device of the present embodiment also comprises clip 3, and as shown in Figure 4, the front end of clip 3 is that soft material is made, and can not damage mould, and is conveniently taken out from storing unit by mould.
Embodiment 3
A kind of mould completing the sheet operation of chip button limit fast, mould is disc-shaped, diameter D=78-[x]/2mm, wherein x is the percent value of limit sheet in chip photo Parameter Map, [x] expression is rounded to units according to the principle that rounds up to x, in the present embodiment, [x] is 20, be 23 to make the mould of corresponding size by [x] in actual production process, the making material of mould is blue film and plane release liners, described die edge has a kerf, the distance of otch distance mold center is 1/8 of mould diameter, and the thickness of mould is 1.5mm.
In order to obtain above-mentioned mould, a kind of manufacture method completing the mould of chip button limit sheet operation fast, the steps include:
A () prepares material: prepare blue film, plane release liners, ruler, pen, cutter and rope;
B blue film and plane release liners are heated to 33 DEG C by () on heating station, then the adhesive faces of blue film and plane release liners exasperate are fitted, drive the bubble between blue film and plane release liners away, obtain mould material;
C (), after the mould material obtained in step (b) is cooled to room temperature, utilizes ruler, pen and rope to draw the shape of mould according to claim 1 at the release paper of the plane of mould material;
D () obtains mould with cutter according to the mold shape cutting drawn in step (c).
The surface smoothness of mould prepared by the present embodiment is high, bubble-free between blue film and plane release liners, and the thickness of blue film is 500 μm, and basic weight is 100g/cm 2, extension rate is 80%, 180 ° of peel adhesion is 1.5N/mm, and hardness is moderate, to the damage that can not cause during chip button limit sheet chip, can be detained from chip by limit sheet easily simultaneously, easy to use, economic and practical.
Above-mentioned mould is used for completing the method that chip buckles limit sheet operation fast, the steps include:
(1) material is prepared: transferring film, finished film, non-dust cloth, iron hoop and above-mentioned mould in preparation;
(2) by finished film tiling on the table, finished film is the composite membrane that blue film and release liners are formed, and iron hoop, is then placed in the middle part of finished film upward by blue film, to be fastened by iron hoop iron hoop with the blue film of iron hoop periphery;
(3) be placed on by the above-mentioned mould prepared in the finished film in the middle of iron hoop, the light face of mould contacts with the blue film of finished film, will wait that the chip detaining limit sheet is placed on mould;
(4) middle transferring film sticked on the chip waiting to detain limit sheet, then will wait that the black and white ring detaining limit sheet chip surrounding takes out, wherein, the size of transferring film is greater than the size of waiting to detain limit sheet chip;
(5) non-dust cloth is made the ball that diameter is 2cm, then press mould outer edge chip in step (4) with ball with the power of 5N size, chip is disconnected at die edge place;
(6) after pressing terminates, middle transferring film opened from edge, the chip having detained limit sheet is uncovered together along with middle transferring film, and the limit sheet of chip is stayed in finished film.
Limit sheet method is detained in the present embodiment, the button limit sheet operation to a slice chip within average 25 seconds, can be completed, and traditional button limit sheet method needs first pour mask, then at the condition lower buckle side sheet of heating, complete and 80 seconds are on average needed to the button limit sheet operation of a slice chip, in the present embodiment, mould makes the efficiency of buckleing limit sheet improve 69%, has very high using value.
In order to deposit the above-mentioned mould for detaining limit sheet operation, a kind of mould and mold storage device completing the sheet operation of chip button limit fast, as shown in Figures 2 and 3, comprise storing unit main body 1 and mold storing box 2, storing unit main body 1 comprises the first mainboard 101 and the second mainboard 102, first mainboard 101 is connected with the second mainboard 102 upper side edge, two plate structures in an angle, angle between first mainboard 101 and the second mainboard 102 is 90 °, is provided with the first pole 103 and the second pole 104 between the first mainboard 101 and the second mainboard 102; Mold storing box 2 is positioned on the first mainboard 101 and the second mainboard 102, first mainboard 101 and the second mainboard 102 are respectively equipped with 20 mold storing boxes 2, the bottom of mold storing box 2 is semicircle, size is mated with the mould described in claim 1, the top of mold storing box 2 is rectangle, facilitates fetching of mould.The mold storage device of the present embodiment also comprises clip 3, and as shown in Figure 4, the front end of clip 3 is that soft material is made, and can not damage mould, and is conveniently taken out from storing unit by mould.

Claims (10)

1. one kind completes the mould of chip button limit sheet operation fast, it is characterized in that: mould is disc-shaped, making material is blue film and plane release liners, and described die edge has a kerf, the distance of described otch distance mold center is the 1/7-1/8 of mould diameter, and the thickness of mould is 1-2mm.
2. a kind of mould completing the sheet operation of chip button limit fast according to claim 1, it is characterized in that: diameter D=78-[the x]/2mm of described mould, wherein x is the percent value of limit sheet in chip photo Parameter Map, and [x] expression is rounded to units according to the principle that rounds up to x.
3. a kind of mould completing the sheet operation of chip button limit fast according to claim 2, is characterized in that: described [x] is the integer between 6-20.
4. a kind of storing unit completing the mould of chip button limit sheet operation fast described in claim 1, it is characterized in that: comprise storing unit main body (1) and mold storing box (2), described storing unit main body (1) comprises the first mainboard (101) and the second mainboard (102), first mainboard (101) is connected with the second mainboard (102) upper side edge, and two plate structures in an angle; Described mold storing box (2) is positioned on the first mainboard (101) and the second mainboard (102), and the bottom of mold storing box (2) is semicircle, and size is mated with the mould described in claim 1.
5. a kind of storing unit completing the mould of chip button limit sheet operation fast according to claim 4, is characterized in that: the angle between described the first mainboard (101) and the second mainboard (102) is 30-150 °.
6. a kind of storing unit completing the mould of chip button limit sheet operation fast according to claim 4, is characterized in that: be provided with the first pole (103) and the second pole (104) between described the first mainboard (101) and the second mainboard (102).
7. a kind of storing unit completing the mould of chip button limit sheet operation fast according to claim 6, is characterized in that: described the first mainboard (101) and the second mainboard (102) are respectively equipped with 1-20 mold storing box (2).
8. a kind of storing unit completing the mould of chip button limit sheet operation fast according to claim 4, is characterized in that: the top of described mold storing box (2) is rectangle.
9. a kind of storing unit completing the mould of chip button limit sheet operation fast according to claim 4-8 any one, is characterized in that: mold storage device also comprises clip (3).
10. a kind of storing unit completing the mould of chip button limit sheet operation fast according to claim 9, is characterized in that: the front end of described clip (3) is that soft material is made.
CN201420800083.8U 2014-12-16 2014-12-16 A kind of mould and mold storage device completing the sheet operation of chip button limit fast Active CN204230215U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104505355A (en) * 2014-12-16 2015-04-08 马鞍山太时芯光科技有限公司 Method and mold for rapidly finishing chip edge sheet buckling operation, mold manufacturing method and mold storing device
CN107195580A (en) * 2017-05-23 2017-09-22 商洛学院 It is a kind of can various substrates block synchronous growth dual-purpose MOCVD substrate holders support holder structure

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104505355A (en) * 2014-12-16 2015-04-08 马鞍山太时芯光科技有限公司 Method and mold for rapidly finishing chip edge sheet buckling operation, mold manufacturing method and mold storing device
CN104505355B (en) * 2014-12-16 2017-07-07 马鞍山太时芯光科技有限公司 A kind of method and mould and mould making method and mold storage device for being rapidly completed the piece operation of chip button side
CN107195580A (en) * 2017-05-23 2017-09-22 商洛学院 It is a kind of can various substrates block synchronous growth dual-purpose MOCVD substrate holders support holder structure
CN107195580B (en) * 2017-05-23 2023-05-05 商洛学院 Dual-purpose MOCVD substrate holder tray structure capable of synchronously growing on different substrate blocks

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