CN107195580B - Dual-purpose MOCVD substrate holder tray structure capable of synchronously growing on different substrate blocks - Google Patents
Dual-purpose MOCVD substrate holder tray structure capable of synchronously growing on different substrate blocks Download PDFInfo
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- CN107195580B CN107195580B CN201710366687.4A CN201710366687A CN107195580B CN 107195580 B CN107195580 B CN 107195580B CN 201710366687 A CN201710366687 A CN 201710366687A CN 107195580 B CN107195580 B CN 107195580B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68771—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting more than one semiconductor substrate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P60/00—Technologies relating to agriculture, livestock or agroalimentary industries
- Y02P60/20—Reduction of greenhouse gas [GHG] emissions in agriculture, e.g. CO2
- Y02P60/21—Dinitrogen oxide [N2O], e.g. using aquaponics, hydroponics or efficiency measures
Abstract
The invention discloses a dual-purpose MOCVD substrate tray structure capable of synchronously growing on different substrate blocks, which comprises a graphite tray, a substrate frame outer frame slice groove, a substrate outer frame installation reserved groove, a substrate frame graphite outer frame, a graphite substrate frame, a square slice groove, a substrate block installation reserved groove, a square substrate, a round substrate and a graphite gasket.
Description
Technical Field
The invention relates to the field of semiconductor epitaxial growth equipment such as MOCVD and the like, in particular to a dual-purpose MOCVD substrate rack tray structure capable of synchronously growing epitaxial structures on a plurality of different substrates.
Background
The semiconductor epitaxial growth technology such as Metal Organic Chemical Vapor Deposition (MOCVD) is the most critical technology in the research and industrialization of semiconductor device manufacturing such as LED chips, and the research of the influence of substrates with different types and different buffer layers on the device performance when the same device structure is grown has great significance; the existing MOCVD equipment only supports the whole growth epitaxial layer of a whole substrate, and is cut into blocks when a device is manufactured in the later stage, so that the process flow has a certain defects in some aspects, the square substrate blocks which are already cut cannot grow on the blocks, and the influence of the substrates of different types and different buffer layers on the device performance is inconvenient to study under the same growth condition.
Disclosure of Invention
The invention aims to solve the problems and provide a dual-purpose MOCVD substrate tray structure capable of synchronously growing on different substrate blocks.
The invention realizes the above purpose through the following technical scheme:
the invention comprises a graphite tray, a substrate frame outer frame sheet groove, a substrate frame mounting retaining groove, a substrate frame graphite outer frame, a graphite substrate frame, square sheet grooves, a substrate block mounting retaining groove, a square substrate, a round substrate and a graphite gasket, wherein three regular hexagonal substrate frame outer frame sheet grooves are formed in the graphite tray, a plurality of substrate frame mounting retaining grooves are formed in the edges of the substrate frame outer frame sheet grooves, three substrate frame graphite outer frames are positioned in the substrate frame outer frame sheet grooves, the graphite substrate frame is round, the graphite substrate frame is positioned in the substrate frame graphite outer frame, the graphite gasket is arranged at the bottom of the graphite substrate frame, the round substrate is arranged on the graphite gasket, four square sheet grooves are formed in the round substrate, the edge of each square sheet groove is provided with the substrate block mounting retaining groove, and the square substrate is positioned in each square sheet groove.
Specifically, a substrate number code is arranged on one side of the square slice groove and positioned on the round substrate. And a substrate frame outer frame slice groove numbering and coding is arranged on one side of the substrate frame outer frame slice groove and positioned on the graphite tray.
The invention has the beneficial effects that:
compared with the prior art, the dual-purpose MOCVD substrate rack tray structure capable of synchronously growing on different substrate blocks can enable growers to directly grow epitaxial structures on substrates which are cut into blocks according to the needs of the growers, can grow the epitaxial structures on a whole round substrate firstly and then cut according to the traditional method, can also enable the epitaxial structures grown on different substrates under the same conditions to conduct material test and device performance test comparison simultaneously, is very compatible in new and old processes, and is convenient for growers to select schemes to grow according to actual needs and study the influence of different substrates on growth results.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic cross-sectional view of the present invention;
FIG. 3 is a schematic cross-sectional view of a portion of an uncut circular substrate according to the present invention.
In the figure: 1-graphite tray, 2-substrate frame outer frame slice groove, 3-substrate outer frame installation left groove, 4-substrate frame slice groove numbering and coding, 5-substrate frame graphite outer frame, 6-graphite substrate frame, 7-square slice groove, 8-substrate block installation left groove, 9-substrate numbering and coding, 10-square substrate, 11-circular substrate and 12-graphite gasket.
Detailed Description
The invention is further described below with reference to the accompanying drawings:
as shown in fig. 1, 2 and 3: the invention comprises a graphite tray 1, a substrate frame outer frame sheet groove 2, a substrate frame graphite outer frame 5, a graphite substrate frame 6, square sheet grooves 7, a substrate block mounting sheet groove 8, square substrates 10, a round substrate 11 and graphite gaskets 12, wherein three regular hexagonal substrate frame outer frame sheet grooves 2 are arranged on the graphite tray 1, a plurality of substrate frame mounting sheet grooves 3 are arranged on the edge of the substrate frame outer frame sheet groove 2, the substrate frame graphite outer frame 5 is three, the substrate frame graphite outer frame 5 is positioned in the substrate frame outer frame sheet groove 2, the graphite substrate frame 6 is round, the graphite substrate frame 6 is positioned in the substrate frame graphite outer frame 5, the bottom in the graphite substrate frame 6 is provided with the graphite gaskets 12, the round substrate 11 is arranged on the round substrate 11, four square sheet grooves 7 are arranged on the round substrate 11, the square sheet grooves 7 are arranged on the edge of the square sheet grooves 7, the substrate block mounting sheet groove 8 is positioned in the substrate block groove 7.
Specifically, a substrate number code 9 is arranged on one side of the square slice groove 7 and positioned on the round substrate. And a substrate frame outer frame slice groove number code 4 is arranged on one side of the substrate frame outer frame slice groove 2 and positioned on the graphite tray 1.
In the structure of the MOCVD substrate frame tray, a plurality of hexagonal substrate frame outer frame sheet grooves 2 are arranged in a graphite tray 1 (three-sheet machine is taken as an example in the figure) and are used for accommodating substrate frame graphite outer frames 5, substrate frame installation retaining grooves 3 are reserved on the outer sides of several sides of the substrate frame outer frame sheet grooves 2, substrate frame sheet groove numbering and coding 4 are engraved beside the outer sides of the substrate frame outer frame sheet grooves 2, the substrate frame outer frame sheet grooves 2 at different positions can be distinguished by capital letters A, B, C and the like, and the substrate frame installation retaining grooves 3 corresponding to different substrate frame outer frame sheet grooves 2 can be designed into different numbers or positions, and different substrate frame outer frame sheet grooves 2 can be distinguished by utilizing the asymmetric position relation of the substrate frame installation retaining grooves 3. In fig. 1, the hexagonal substrate frame graphite outer frame 5 of the substrate frame is divided into a left half part and a right half part which are detachable, so that the disassembly is very convenient, after the disassembly, the outer edge of the hexagonal substrate frame graphite outer frame is hexagonal and is just placed in the substrate frame outer frame slice groove 2, the inner edge of the hexagonal substrate frame is circular, and the circular graphite substrate frame 6 which is not cut normally can be placed just, and the circular graphite substrate frame 6 which is the same as the circular substrate in size can be placed, and a plurality of cut square substrates 10 of different types can be placed in the graphite substrate frame 6, so that the dual-purpose compatibility of both cut substrates and uncut substrates is realized. The graphite substrate frame 6 is firstly provided with a plurality of square sheet grooves 7 for placing the cut square substrate blocks, a plurality of different cut square substrates 10 can be just placed in the square sheet grooves 7, a plurality of substrate block mounting and retaining grooves 8 are reserved outside the edge of each square sheet groove 7, meanwhile, substrate number code 9 is engraved beside each square sheet groove, arabic numerals of 1, 2, 3 and the like are used, so that when different types of substrate block growth are used for research, different substrate numbers can be represented by A1, A2, A3, …, B1, B2, B3, …, C, D1, D2, D3, … and the like, and the different substrate numbers are distinguished very clearly. Of course, the substrate block mounting grooves 8 corresponding to different square sheet grooves 7 may be designed to have different numbers or positions, and the different square sheet grooves 7 may be distinguished by the asymmetric positional relationship of the substrate block mounting grooves 8. Note that the design thickness of the graphite substrate holder 6 and the substrate holder graphite outer frame 5 is 2 times larger than the thickness of the cut square substrate 10 and the uncut circular substrate 11, so the depth of the substrate holder outer frame sheet groove 2 is 2 times that of the square sheet groove 7, the design just ensures that the square substrate 10, the graphite substrate holder 6, the upper end face of the substrate holder graphite outer frame 5 and the upper end face of the graphite tray 1 are flush, and the high-speed rotation of the graphite tray 1 is added during growth, so that uniform flow fields and temperature fields on all substrates can be ensured. The lower part of the uncut round substrate 11 is provided with a graphite gasket 12 with the same shape, size and thickness as the round shape, so that the design can ensure that the uncut round substrate 11, the upper end face of the substrate frame graphite outer frame 5 and the upper end face of the graphite tray 1 are flush, and the graphite tray 1 rotates at high speed during growth, so that even flow fields and temperature fields can be ensured on all substrates regardless of cut substrates or uncut substrates. Thus having good compatibility and uniformity. In fig. 1, the substrate frame graphite outer frame 5 is divided into left and right parts for easy disassembly, the inner circular edge is slightly tighter than the designed installation precision of the circular graphite substrate frame 6 or the uncut circular substrate 11, and the outer hexagonal outer edge and the designed installation precision of the hexagonal substrate frame outer frame sheet groove 2 are slightly looser, so that the disassembly is convenient for the whole, and when the graphite tray 1 runs at high speed, the circular graphite substrate frame 6 or the uncut circular substrate 11 is clamped tightly by the substrate frame graphite outer frame 5, so that flying chips can be prevented even though the circular graphite frame is circular, and the graphite tray 1 rotates horizontally at high speed, so that flying chips are not easy to occur compared with the prior circular square substrate 10 with the regular hexagonal outer edge and the square outer edge of the substrate frame graphite outer frame 5, therefore, the structure has good compatibility and uniformity, and has a certain function of preventing flying chips.
In addition, as can be seen by comparing fig. 1, 2 and 3, for the hexagonal substrate frame graphite outer frame 5, the lower part of the inner ring is provided with a circle of step circle protruding inwards, while the lower part of the cut graphite substrate frame 6 or the graphite gasket 12 below the uncut circular substrate is provided with a recessed step circle, so that the graphite substrate frame 6 or the graphite gasket 12 can be just clamped in the hexagonal substrate frame graphite outer frame 5, and therefore, the graphite substrate frame 6 or the circular gasket 12 can not fall off when being installed and removed, and the clamping groove is at the position of about 1/4 of the lower part, so that the structure not only ensures that the graphite substrate frame 6 or the circular gasket 12 can not fall off when being installed and removed, but also ensures that the whole graphite substrate frame 6 or the graphite gasket 12 is still stable when being grown, and is not easy to fly.
The foregoing has shown and described the basic principles and main features of the present invention and the advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (3)
1. A dual-purpose MOCVD substrate frame tray structure capable of synchronously growing on different substrate blocks is characterized in that: the graphite frame comprises a graphite tray, substrate frame outer frame sheet grooves, substrate frame mounting grooves, substrate frame graphite outer frames, a graphite substrate frame, square sheet grooves, substrate block mounting grooves, square substrates, round substrates and graphite gaskets, wherein three regular hexagonal substrate frame outer frame sheet grooves are formed in the graphite tray, a plurality of substrate frame mounting grooves are formed in the edges of the substrate frame outer frame sheet grooves, three substrate frame graphite outer frames are positioned in the substrate frame outer frame sheet grooves, the graphite substrate frame is round, the graphite substrate frame is positioned in the substrate frame graphite outer frames, the bottom of the graphite substrate frame is provided with the graphite gaskets, the round substrates are arranged on the graphite gaskets, four square sheet grooves are formed in the round substrates, the edge of each square sheet groove is provided with the corresponding substrate block mounting groove, and the square substrates are positioned in the corresponding square sheet grooves;
the design thickness of the graphite substrate frame and the substrate frame graphite outer frame is 2 times of the thickness of the cut square substrate and the uncut round substrate, and the depth of the substrate frame outer frame sheet groove is 2 times of the depth of the square sheet groove.
2. The dual-purpose MOCVD substrate tray structure capable of synchronously growing on different substrate blocks according to claim 1, wherein: and a substrate numbering and coding device is arranged on one side of the square sheet groove and positioned on the circular substrate.
3. The dual-purpose MOCVD substrate tray structure capable of synchronously growing on different substrate blocks according to claim 1, wherein: and a substrate frame outer frame slice groove numbering and coding is arranged on one side of the substrate frame outer frame slice groove and positioned on the graphite tray.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710366687.4A CN107195580B (en) | 2017-05-23 | 2017-05-23 | Dual-purpose MOCVD substrate holder tray structure capable of synchronously growing on different substrate blocks |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710366687.4A CN107195580B (en) | 2017-05-23 | 2017-05-23 | Dual-purpose MOCVD substrate holder tray structure capable of synchronously growing on different substrate blocks |
Publications (2)
| Publication Number | Publication Date |
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| CN107195580A CN107195580A (en) | 2017-09-22 |
| CN107195580B true CN107195580B (en) | 2023-05-05 |
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| CN201710366687.4A Active CN107195580B (en) | 2017-05-23 | 2017-05-23 | Dual-purpose MOCVD substrate holder tray structure capable of synchronously growing on different substrate blocks |
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