A kind of electron beam rapid shaping manufacturing equipment is swept system partially
Technical field
The utility model relates to electron Beam Machining field, and particularly a kind of electron beam rapid shaping manufacturing equipment is swept system partially.
Background technology
Electron beam rapid shaping is the desirable rapid shaping manufacturing technology of the complicated metal parts of high-performance, in fields such as Aero-Space, automobile and biomedicines, has vast potential for future development; Electron beam rapid shaping manufacturing technology be adopt electron beam under the control of computing machine by the information of part section profile deposite metal powder selectively, and by piling up layer by layer, until whole part has all melted, finally remove unnecessary powder and just obtain required three-dimensional objects.Compare with laser and beam-plasma rapid shaping, electron beam rapid shaping has very significantly advantage, and as high in capacity usage ratio, rapidoprint extensively, no reflection events, process velocity is fast, vacuum environment is pollution-free and operating cost is low etc.; And electron beam rapid shaping manufacturing equipment is a kind of high-tech product that combines the multiple technologies such as physical vacuum, precision optical machinery, electronic technology, electron optics, High-Voltage Technology, computing machine and control technology.
The electronics light path of electron gun mainly consists of focalizer and inclined to one side sweeping device, 3D element manufacture process z axle is completed by mechanical motion, x-y plane is completed by inclined to one side sweeping device, working mechanism and the mechanical motion of sweeping device have basic difference partially, and sweeping device relies on the movement locus that is used for operating electron beam in magnetic field partially.
Pass between deflection angle, the accelerating potential that electron beam produces after by scanister and the ampere turns of partially sweeping winding exciting current is:
In formula, N
dfor scanning umber of turn; I
dfor scanning winding exciting current; B is inclined to one side sweeping device distance between two poles; A is the net thickness of inclined to one side sweeping device magnetic pole pole shoe;
for deflection angle; At focalizer image space, being parallel to the distance that electron beam in a certain plane of principal plane departs from center (zero sweeps current electron beam spot position partially) is:
In formula, δ is electron beam off-centered distance in certain plane; H is the distance at this plane and scanister center.
In electron beam rapid shaping manufacturing equipment, require electron beam accurately to move fast, and the magnetic induction density in magnetic field is driven by exciting current, the magnetic induction density in static process magnetic field and exciting current have approximate linear relationship, dynamic process is due to the impact of the factors such as magnetic circuit additional dynamic loss, it is completely vertical that the track while scan that inclined to one side sweeping device two is swept axle partially in addition can not be accomplished by manufacturing process restriction, between the magnetic induction density in magnetic field and exciting current, be very complicated nonlinear relationship, therefore in the inclined to one side sweeping device of electron beam rapid shaping manufacturing equipment and their control system, emphasis will solve quick variation and the dynamic precision compensation problem in magnetic field.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of dynamic loss, introducing dynamic compensation function that can suppress magnetic field, offsets the dynamic added losses of full magnetic circuit and partially sweeps system to partially sweeping the electron beam rapid shaping manufacturing equipment of the impact of precision.
The technical scheme that the utility model solves the problems of the technologies described above is as follows: a kind of electron beam rapid shaping manufacturing equipment is swept system partially, comprises inclined to one side sweeping device, s winding power supply, t winding power supply and computer control unit;
Electron beam rapid shaping manufacturing equipment adopts magnetic field partially to sweep, described inclined to one side sweeping device is cylindrical-shaped structure, be installed on the position of electron gun electron beam outlet, comprise magnetic conduction framework, partially sweep winding and electron beam channel, described magnetic conduction framework is circular, inwall has equally distributed slot for winding, described partially sweeping described in winding comprises s winding and t winding, described s winding and t winding are all arranged in the slot for winding of magnetic conduction framework, it is that their axis differ 90 degree that described s winding is symmetric in the plane of vertical electron beam channel direction with t winding, described s winding and t winding are pressed respectively sinusoidal and cosine distribution coiling in this plane, described electron beam channel is placed in described partially sweeping in winding inner circle, magnetic conduction framework is made by the combined material of permeability magnetic material powder and organic insulation glue,
Described s winding power supply, it is connected with described s winding, will be to determining voltage signal
and rate of change carries out linear combination as total given signal, total given signal and sampling voltage signal U
sby comparing and amplifying after processing, adjust output voltage, to s winding output s winding current I
s;
Described t winding power supply, it is connected with described t winding, will be to determining voltage signal
and rate of change carries out linear combination as total given signal, total given signal and sampling voltage signal U
tby comparing and amplifying after processing, adjust output voltage, to t winding output t winding current I
t;
Described computer control unit is born the master control task of electron beam rapid shaping manufacturing equipment, and it is connected with s winding power supply, t winding power supply respectively, exports to determining voltage signal respectively to s winding power supply and t winding power supply
with
The beneficial effects of the utility model are: magnetic conduction framework, by permeability magnetic material powder and organic insulation glue moulding by casting, has reduced the dynamic loss in magnetic field.
On the basis of technique scheme, the utility model can also be done following improvement.
Further technical scheme, described s winding power supply comprises current rectifying and wave filtering circuit ZLs, power adjustment pipe T1s and T2s, diode D1s and D2s, sample resistance R7s, resistance R 1s~R6s, capacitor C 1s and operational amplifier ICs;
The input end of described current rectifying and wave filtering circuit ZLs connects two groups of alternating currents of outside input, the output common port of current rectifying and wave filtering circuit ZLs and one end of s winding join, cathode output end is connected to the collector of NPN type power adjustment pipe T1s, and cathode output end is connected to the collector of positive-negative-positive power adjustment pipe T2s;
The in-phase input end of described operational amplifier ICs is through resistance R 1s ground connection, and the inverting input of described operational amplifier ICs connects computer control unit voltage given signal through resistance R 3s, resistance R 2s
output terminal, described capacitor C 1s is in parallel with resistance R 3s, described resistance R 2s, resistance R 3s and capacitor C 1s form the input circuit of operational amplifier ICs, described R5s two ends are inverting input and the output terminal of concatenation operation amplifier ICs respectively, the output terminal of described operational amplifier ICs is connected with the base stage of power adjustment pipe T2s with power adjustment pipe T1s respectively through resistance R 6s, and the inverting input of operational amplifier ICs connects sample resistance R7s one end through resistance R 4s;
After being connected together, the emitter of described power adjustment pipe T1s and power adjustment pipe T2s is connected to one end of resistance R 7s, the other end ground connection of resistance R 7s, and join with the other end of s winding; The upper output of sample resistance R7s s winding current I
svoltage signal U
sfor feedback signal, the collector of the negative electrode of described diode D1s and power adjustment pipe T1s joins, the emitter of the anode of diode D1s and power adjustment pipe T1s joins, the collector of the anode of diode D2s and power adjustment pipe T2s joins, and the emitter of the negative electrode of diode D2s and power adjustment pipe T2s joins.
Adopt the beneficial effect of above-mentioned further scheme to be: magnetic field exists dynamic loss, when static excitation electric current and dynamic exciting current instantaneous value equate, the magnetic induction density instantaneous value of the magnetic deflection field producing is not wait, the input circuit of the operational amplifier ICs being comprised of R2s, R3s and C1s, voltage given signal is
and the linear combination of rate of change is as total given signal, makes s winding power supply have dynamic debugging functions,
instantaneous value is identical and rate of change is different, and the magnetic induction density instantaneous value of s axle magnetic deflection field remains unchanged substantially.
Further technical scheme, described t winding power supply comprises current rectifying and wave filtering circuit ZLt, power adjustment pipe T1t and T2t, diode D1t and D2t, sample resistance R7t, resistance R 1t~R6t, capacitor C 1t and operational amplifier ICt;
The input end of described current rectifying and wave filtering circuit ZLt connects two groups of alternating currents of outside input, the output common port of current rectifying and wave filtering circuit ZLt and one end of t winding join, cathode output end is connected to the collector of NPN type power adjustment pipe T1t, and cathode output end is connected to the collector of positive-negative-positive power adjustment pipe T2t;
The in-phase input end of described operational amplifier ICt is through resistance R 1t ground connection, and the inverting input of described operational amplifier ICt connects computer control unit voltage given signal through resistance R 3t, resistance R 2t
output terminal, described capacitor C 1t is in parallel with resistance R 3t, described resistance R 2t, resistance R 3t and capacitor C 1t form the input circuit of operational amplifier ICt, described R5t two ends are inverting input and the output terminal of concatenation operation amplifier ICt respectively, the output terminal of described operational amplifier ICt is connected with the base stage of power adjustment pipe T2t with power adjustment pipe T1t respectively through resistance R 6t, and the inverting input of operational amplifier ICt connects sample resistance R7t one end through resistance R 4t;
After being connected together, the emitter of described power adjustment pipe T1t and power adjustment pipe T2t is connected to one end of resistance R 7t, the other end ground connection of resistance R 7t, and join with the other end of t winding; The upper output of sample resistance R7t t winding current I
tvoltage signal U
tfor feedback signal, the collector of the negative electrode of described diode D1t and power adjustment pipe T1t joins, the emitter of the anode of diode D1t and power adjustment pipe T1t joins, the collector of the anode of diode D2t and power adjustment pipe T2t joins, and the emitter of the negative electrode of diode D2t and power adjustment pipe T2t joins.
Adopt the beneficial effect of above-mentioned further scheme to be: magnetic field exists dynamic loss, when static excitation electric current and dynamic exciting current instantaneous value equate, the magnetic induction density instantaneous value of the magnetic deflection field producing is not wait, the input circuit of the operational amplifier ICt being comprised of R2t, R3t and C1t, voltage given signal is
and the linear combination of rate of change is as total given signal, makes t winding power supply have dynamic debugging functions,
instantaneous value is identical and rate of change is different, and the magnetic induction density instantaneous value of t axle magnetic deflection field remains unchanged substantially.
Accompanying drawing explanation
Fig. 1 is inclined to one side sweeping device structural representation;
Fig. 2 is the vertical view of Fig. 1;
Fig. 3 is s winding power supply schematic diagram;
Fig. 4 is t winding power supply schematic diagram;
Fig. 5 is electron gun structure schematic diagram.
In accompanying drawing, the list of parts of each label representative is as follows:
1, magnetic conduction framework, 2, partially sweep winding, 3, electron beam channel, 4, s winding power supply, 5, t winding power supply, 2-1, s winding, 2-2, t winding, 6, negative electrode, 7, grid partially, 8, anode, 9, focalizer, 10, sweeping device partially, 11, electron beam, 12, partially put down face.
Embodiment
Below in conjunction with accompanying drawing, principle of the present utility model and feature are described, example, only for explaining the utility model, is not intended to limit scope of the present utility model.
As shown in Figures 1 to 5, a kind of electron beam rapid shaping manufacturing equipment is swept system partially, comprises inclined to one side sweeping device 10, s winding power supply 4, t winding power supply 5 and computer control unit;
Electron beam rapid shaping manufacturing equipment adopts magnetic field partially to sweep, described inclined to one side sweeping device 10 is cylindrical-shaped structure, be installed on the position of electron gun electron beam 11 outlets, comprise magnetic conduction framework 1, partially sweep winding 2 and electron beam channel 3, described magnetic conduction framework 1 is circular, inwall has equally distributed slot for winding, the described winding 2 of partially sweeping comprises described s winding 2-1 and t winding 2-2, described s winding 2-1 and t winding 2-2 are all arranged in the slot for winding of magnetic conduction framework 1, it is that their axis differ 90 degree that described s winding 2-1 is symmetric in the plane of vertical electron beam channel direction with t winding 2-2, described s winding 2-2 and t winding 2-1 press respectively sinusoidal and cosine distribution coiling in this plane, described electron beam channel 3 is placed in described partially sweeping in winding 2 inner circles, magnetic conduction framework 1 is made by the combined material of permeability magnetic material powder and organic insulation glue,
Described s winding power supply 4, it is connected with described s winding 2-1, will be to determining voltage signal
and rate of change carries out linear combination as total given signal, total given signal and sampling voltage signal U
sby comparing and amplifying after processing, adjust output voltage, to s winding output exciting current I
s;
Described t winding power supply 5, it is connected with described t winding 2-2, will be to determining voltage signal
and rate of change carries out linear combination as total given signal, total given signal and sampling voltage signal U
tby comparing and amplifying after processing, adjust output voltage, to t winding output exciting current I
t;
Described computer control unit is born the master control task of electron beam rapid shaping manufacturing equipment, and it is connected with s winding power supply 4, t winding power supply 5 respectively, exports to determining voltage signal respectively to s winding power supply 4 and t winding power supply 5
with
Described s winding power supply 4 comprises current rectifying and wave filtering circuit ZLs, power adjustment pipe T1s and T2s, diode D1s and D2s, sample resistance R7s, resistance R 1s~R6s, capacitor C 1s and operational amplifier ICs;
The input end of described current rectifying and wave filtering circuit ZLs connects two groups of alternating currents of outside input, one end of the output common port of current rectifying and wave filtering circuit ZLs and s winding 2-1 joins, cathode output end is connected to the collector of NPN type power adjustment pipe T1s, and cathode output end is connected to the collector of positive-negative-positive power adjustment pipe T2s;
The in-phase input end of described operational amplifier ICs is through resistance R 1s ground connection, and the inverting input of described operational amplifier ICs connects computer control unit voltage given signal through resistance R 3s, resistance R 2s
output terminal, described capacitor C 1s is in parallel with resistance R 3s, described resistance R 2s, resistance R 3s and capacitor C 1s form the input circuit of operational amplifier ICs, described R5s two ends are inverting input and the output terminal of concatenation operation amplifier ICs respectively, the output terminal of described operational amplifier ICs is connected with the base stage of power adjustment pipe T2s with power adjustment pipe T1s respectively through resistance R 6s, and the inverting input of operational amplifier ICs connects sample resistance R7s one end through resistance R 4s;
After being connected together, the emitter of described power adjustment pipe T1s and power adjustment pipe T2s is connected to one end of resistance R 7s, the other end ground connection of resistance R 7s, and join with the other end of s winding 2-1; The upper output of sample resistance R7s s winding current I
svoltage signal U
sfor feedback signal, the collector of the negative electrode of described diode D1s and power adjustment pipe T1s joins, the emitter of the anode of diode D1s and power adjustment pipe T1s joins, the collector of the anode of diode D2s and power adjustment pipe T2s joins, and the emitter of the negative electrode of diode D2s and power adjustment pipe T2s joins.
Described t winding power supply 5 comprises current rectifying and wave filtering circuit ZLt, power adjustment pipe T1t and T2t, diode D1t and D2t, sample resistance R7t, resistance R 1t~R6t, capacitor C 1t and operational amplifier ICt;
The input end of described current rectifying and wave filtering circuit ZLt connects two groups of alternating currents of outside input, one end of the output common port of current rectifying and wave filtering circuit ZLt and t winding 2-2 joins, cathode output end is connected to the collector of NPN type power adjustment pipe T1t, and cathode output end is connected to the collector of positive-negative-positive power adjustment pipe T2t;
The in-phase input end of described operational amplifier ICt is through resistance R 1t ground connection, and the inverting input of described operational amplifier ICt connects computer control unit voltage given signal through resistance R 3t, resistance R 2t
output terminal, described capacitor C 1t is in parallel with resistance R 3t, described resistance R 2t, resistance R 3t and capacitor C 1t form the input circuit of operational amplifier ICt, described R5t two ends are inverting input and the output terminal of concatenation operation amplifier ICt respectively, the output terminal of described operational amplifier ICt is connected with the base stage of power adjustment pipe T2t with power adjustment pipe T1t respectively through resistance R 6t, and the inverting input of operational amplifier ICt connects sample resistance R7t one end through resistance R 4t;
After being connected together, the emitter of described power adjustment pipe T1t and power adjustment pipe T2t is connected to one end of resistance R 7t, the other end ground connection of resistance R 7t, and join with the other end of t winding 2-2; The upper output of sample resistance R7t t winding current I
tvoltage signal U
tfor feedback signal, the collector of the negative electrode of described diode D1t and power adjustment pipe T1t joins, the emitter of the anode of diode D1t and power adjustment pipe T1t joins, the collector of the anode of diode D2t and power adjustment pipe T2t joins, and the emitter of the negative electrode of diode D2t and power adjustment pipe T2t joins.
This device principle of work, computer control unit is exported to determining voltage signal to s winding power supply 4 and t winding power supply 5 respectively
with
described s winding power supply 4 will be to determining voltage signal
and rate of change carries out linear combination as total given signal, total given signal and sampling voltage signal U
sby comparing and amplifying after processing, adjust output voltage, to s winding stable output exciting current I
s; Described t winding power supply 5 will be to determining voltage signal
and rate of change carries out linear combination as total given signal, total given signal and sampling voltage signal U
tby comparing and amplifying after processing, adjust output voltage, to t winding stable output exciting current I
t.
The foregoing is only preferred embodiment of the present utility model, not in order to limit the utility model, all within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.