CN102519587B - Device for measuring light intensity distribution of laser beams - Google Patents

Device for measuring light intensity distribution of laser beams Download PDF

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CN102519587B
CN102519587B CN 201110452954 CN201110452954A CN102519587B CN 102519587 B CN102519587 B CN 102519587B CN 201110452954 CN201110452954 CN 201110452954 CN 201110452954 A CN201110452954 A CN 201110452954A CN 102519587 B CN102519587 B CN 102519587B
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laser beam
intensity distribution
measurement
coil
focusing lens
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CN102519587A (en
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李玉清
王宏亮
马杰
汪丽蓉
赵延霆
肖连团
贾锁堂
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山西大学
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Abstract

本发明涉及激光光束光强的测量技术,具体是一种快速测量激光光束光强分布的简易装置。 The present invention relates to a laser beam intensity measurement techniques, in particular a quick simple measuring device of laser beam intensity distribution. 本发明解决了现有激光光束光强测量技术无法快速对激光光束横向光强分布进行测量、测量不灵活、以及操作繁琐的问题。 The present invention solves the laser beam intensity measurement can not be quickly lateral intensity distribution of the laser beam for measurement, the measurement is not flexible, and complicated operation problems. 快速测量激光光束光强分布的简易装置包括电动式扬声器、聚焦透镜、光电探测器、BNC连接线、积分电路、以及数字示波器;所述电动式扬声器包括支柱、永磁体、阻尼材料层、线圈、黑色遮光板、顶盖、以及线圈连接线;永磁体的下端面固定于支柱上端面。 Fast measuring laser beam intensity distribution means comprises a simple dynamic speaker, a focusing lens, a photodetector, BNC cable, the integrating circuit, and a digital oscilloscope; electric loudspeaker comprises a strut, the permanent magnets, damping material layer, a coil, black shading plate, a cap, and a coil connecting lines; the end face of the permanent magnet is fixed to the end face of the strut. 本发明有效解决了现有激光光束光强测量技术无法快速对激光光束横向光强分布进行测量、测量不灵活、以及操作繁琐的问题,适用于对激光光束横截面光强分布进行快速的测量。 The present invention effectively solves the problem of laser beam intensity measuring system of the laser beam can not be quickly lateral light intensity distribution measurement, the measurement is not flexible, and complicated operation problems for the laser beam cross section intensity distribution of fast measurement.

Description

测量激光光束光强分布的装置 Means the light intensity distribution of the laser beam measured

技术领域 FIELD

[0001] 本发明涉及激光光束光强的测量技术,具体是一种测量激光光束光强分布的装置。 [0001] The present invention relates to a laser beam intensity measurement techniques, in particular a device of the laser beam intensity distribution measurement.

背景技术 Background technique

[0002]自激光器诞生后,激光作为一种高亮度、方向性、单色性和相干性都很好的光源已被广泛应用在科研、测量、加工、医疗、通信以及军事等领域。 [0002] Since the birth of the laser, a laser as a high brightness, directivity, color and very good coherence light source has been widely used in research, measurement, processing, medical, communication and military fields. 在这些应用中,激光光束横向的光强分布(即光强在与光束传播方向垂直的横截面上的分布)作为评价激光光束质量的一项重要的技术性能指标一直受到人们的重视。 In these applications, the lateral light intensity distribution of the laser beam (i.e., the light intensity distribution in a cross section perpendicular to the propagation direction of the beam) as the evaluation of the quality of the laser beam is an important technical performance indicators has been attention. 根据共焦谐振腔理论,激光器一般输出的光束在与传播方向垂直的横截面上呈现为高斯型。 The theory of confocal resonator, the laser beam cross section is generally perpendicular to the output direction of propagation presents a Gaussian. 然而,由于实际激光器中采用的谐振腔形式多种多样,可获得激光器输出的激光束千差万别。 However, since the form of the actual laser cavity employed is varied, the laser beam can be obtained vary laser output. 在激光发展历史上,不同专业的人员根据各自不同的目的对高斯激光光束的光斑质量提出了不同的要求。 In laser history, people of different professions according to their different purposes of quality Gaussian laser beam spot presents different requirements. 为了满足各方面的需求,必须知道激光光束在横向截面上的光强分布曲线。 In order to meet the various needs, it is necessary to know the laser beam intensity profile in the transverse cross-section.

[0003] 到目前为止,人们发展了许多技术来测量激光光束的光强分布,如小孔探针法,CCD法和刀口法。 [0003] So far, many technologies have been developed to measure the intensity distribution of the laser beam, such as a hole probe method, knife edge method, and the CCD method. 其中,小孔探针法由于实验上很难做到孔与激光光束同心,因而在测光束光斑大小时精度难以保证,且测量光强时也不能很快地直接得到光强的分布曲线。 Wherein the aperture is difficult to do since the probe laser beam concentric with the hole on the test, so the spot size of the beam at the time of measurement is difficult to ensure accuracy, we can not be directly obtained light intensity distribution curve and quickly when the measured light intensity. CCD法虽然精度高,但只适合测低功率光束光斑的大小,有着明显的局限性,且不能定量地反映光强的变化。 CCD method, while high precision, but only for low power measurement of the beam spot size, has obvious limitations, and can not be quantitatively reflect the change in light intensity. 目前,刀口法被广泛用于测量高斯光束光强的分布。 Currently, knife-edge method is widely used to measure the intensity distribution of the Gaussian beam. 刀口法通常是将刀片固定在光学平移台上,可沿与光束传播方向垂直的方向切割光束,但需慢慢通过平移台调节多次测量透过刀口边缘的激光功率,因此不能快速地得到激光光束的光强分布曲线。 Knife-edge method is generally fixed to the blade in the optical translation stage, the light beam propagation direction may be a direction perpendicular to the cutting beam, laser power measurement subject slowly through multiple knife edge by adjusting the translation stage, the laser can not be obtained rapidly light intensity distribution curve of the light beam. 基于上述理由,有必要发明一种可以快速、准确、灵活地测量激光光束横截面光强分布的简易装置,以解决现有激光光束光强测量技术无法快速对激光光束横向光强分布进行测量、测量不灵活、以及操作繁琐的问题。 For these reasons, it is necessary to invent a fast, accurate, flexible and simple means to measure the laser beam cross section intensity distribution of the laser beam in order to solve the conventional techniques can not measure the intensity of the laser beam fast lateral light intensity distribution is measured, measurement inflexible and cumbersome operation problems.

发明内容 SUMMARY

[0004] 本发明为了解决现有激光光束光强测量技术无法快速对激光光束横向光强分布进行测量、测量不灵活、以及操作繁琐的问题,提供了一种测量激光光束光强分布的装置。 [0004] In order to solve the conventional laser beam intensity measurement can not be quickly lateral intensity distribution of the laser beam for measurement, the measurement is not flexible, and the problem of complicated operation, there is provided apparatus for measuring the laser beam intensity distribution.

[0005] 本发明是采用如下技术方案实现的:测量激光光束光强分布的装置,包括电动式扬声器、聚焦透镜、光电探测器、BNC连接线、积分电路、以及数字示波器;所述电动式扬声器包括支柱、永磁体、阻尼材料层、线圈、黑色遮光板、顶盖、以及线圈连接线;永磁体的下端面固定于支柱上端面;阻尼材料层固定于永磁体的上端面;线圈套接于永磁体的中部;黑色遮光板垂直固定于线圈上端面;顶盖固定于阻尼材料层上端面;线圈连接线连接于线圈两端;光电探测器位于聚焦透镜后侧焦点上;光电探测器的输出端通过BNC连接线与积分电路的输入端连接;积分电路的输出端与数字示波器的输入端连接;黑色遮光板位于聚焦透镜前侧。 [0005] The present invention adopts the following technical solution: a laser beam means a light intensity distribution measurement, including electric loudspeaker, a focusing lens, a photodetector, BNC cable, the integrating circuit, and a digital oscilloscope; the electric speaker comprising struts, the permanent magnets, damping material layer, a coil, a black light-shielding plate, a top cover, and a coil connecting wire; lower end surface of the permanent magnet is fixed to the strut end surface; damping material layer is secured to the upper end surface of the permanent magnet; sleeved coil the middle of the permanent magnet; black light shielding plate is vertically fixed to the coil end surface; securing the cover to the end face of the damping material layer; coil connection wires connected to both ends of the coil; photodetector positioned on the rear side focal point of the focus lens; the output of the photodetector via an input terminal connected to a BNC cable integrating circuit; an input terminal and output terminal of the integrating circuit is connected to a digital oscilloscope; black shading plate is the front side of the focusing lens.

[0006] 工作时,激光器输出的激光光束经聚焦透镜会聚成一很细的点光束,点光束完全被位于聚焦透镜后侧焦点上的光电探测器收集。 When the [0006] work, the laser beam by the focusing lens converging the laser output into a very fine spot beam, the beam spot on the photodetector is completely positioned a focusing lens rear focal collection. 光电探测器将所探测到的光信号转换为电信号,电信号经BNC连接线接入积分电路进行积分处理,积分处理后的电信号连到数字示波器进行显示。 The photodetector detects the optical signal into an electrical signal via an integration process BNC cable access integration circuit, the integration processing electrical signals connected to a digital oscilloscope display. 具体工作时,向电动式扬声器的线圈通以合适方向的电流,由法拉第电磁感应定律可知,线圈将会上下快速振动。 When the concrete work, at a current of suitable direction, Faraday's law of electromagnetic induction coils of the electrodynamic loudspeaker, the coil will be quickly up and down vibration. 与此同时,黑色遮光板在线圈的带动下向上快速切割激光光束。 At the same time, the black shield coil driven upward fast cutting laser beam. 激光光束的光强随黑色遮光板的移动会发生快速变化。 Light intensity of the laser beam with the movement of the black shield will change rapidly. 该光强变化的激光光束经聚焦透镜会聚后完全被光电探测器收集且转换为电信号。 The change in light intensity of the laser beam converged by the focusing lens is completely collected and the photodetector into an electrical signal. 光电探测器输出的电信号为一条光束横截面上不同位置处光强的快变曲线,而经积分电路处理后的电信号则为光强的分布曲线。 Electrical signal output from the photodetector is an intensity of light at different positions of the beam cross section curves fast, and the light intensity distribution curve of the electrical signal by the integration circuit was treated. 由此,本发明所述的测量激光光束光强分布的装置即实现了针对激光光束横截面光强分布进行快速、准确、灵活的测量。 Thus, means for measuring the laser beam intensity distribution according to the present invention is achieved, i.e., for the laser beam cross-section intensity distribution of fast, accurate and flexible measurement. 在上述过程中,顶盖起到限制线圈向上运动的作用。 In the above process, the cap acts to limit the upward movement of the coil. 阻尼材料层则可以减小线圈振动对测量过程的影响,并增加电动式扬声器的使用效率和寿命。 Damping material layer can reduce the influence of vibration on measurement coil and increase the efficiency and life of the dynamic speaker. 基于上述过程,与现有激光光束光强测量技术相比,本发明所述的测量激光光束光强分布的装置实现了快速对激光光束横向光强分布进行测量,同时其测量更加灵活,操作更加简单。 Based on the above procedure, the conventional laser beam intensity measuring system as compared to a laser measuring apparatus according to the present invention, the beam intensity distribution of the laser beam to achieve rapid lateral light intensity distribution is measured, measurement while more flexible, the operation is more simple.

[0007] 进一步地,还包括腔体;腔体上开有与聚焦透镜前侧位置正对的通孔;电动式扬声器、聚焦透镜、光电探测器、BNC连接线、积分电路、数字示波器均位于腔体内;黑色遮光板位于通孔与聚焦透镜前侧之间。 [0007] Furthermore, further comprising a cavity; has a through hole with the focusing lens position is on the front side of the upper chamber; dynamic speaker, a focusing lens, a photodetector, BNC connection line, integration circuit, digital oscilloscopes are located cavity; black shading plate between the front through-holes in the side of the focusing lens. 工作时,激光器输出的激光光束穿过腔体上的通孔到达聚焦透镜进行会聚,最后被位于聚光透镜焦点上的光电探测器收集探测。 In operation, the laser output of the laser beam through the through-hole reaching the cavity converging focusing lens, a photodetector positioned on the last condenser lens focal collection probe.

[0008] 本发明有效解决了现有激光光束光强测量技术无法快速对激光光束横向光强分布进行测量、测量不灵活、以及操作繁琐的问题,适用于对激光光束横截面光强分布进行快速的测量。 [0008] The present invention effectively solves the problem of laser beam intensity measurement can not be quickly lateral intensity distribution of the laser beam for measurement, the measurement is not flexible, and operate the complicated problem for the laser beam cross section intensity distribution of fast Measurement.

附图说明 BRIEF DESCRIPTION

[0009] 图1是本发明的结构示意图。 [0009] FIG. 1 is a structural diagram of the present invention.

[0010] 图中:1-聚焦透镜,2-光电探测器,3-BNC连接线,4_积分电路,5_数字示波器,6-支柱,7-永磁体,8-阻尼材料层,9-线圈,10-黑色遮光板,11-顶盖,12-线圈连接线,13-腔体,14-通孔。 [0010] FIG: 1 - a focusing lens, a photodetector 2-, 3-BNC cable, the integrating circuit 4_, 5_ digital oscilloscope, the pillars 6-, 7 of permanent magnets, damping material layer 8-, 9- coil, black shield 10-, 11- cap, 12 coil connection wires, 13 cavity, 14 a through hole.

具体实施方式 Detailed ways

[0011] 测量激光光束光强分布的装置,包括电动式扬声器、聚焦透镜1、光电探测器2、BNC连接线3、积分电路4、以及数字示波器5 ; [0011] means of the laser beam intensity distribution measurement, including electric loudspeaker, the focusing lens 1, a photodetector 2, BNC cable 3, the integrating circuit 4, and the digital oscilloscope 5;

[0012] 所述电动式扬声器包括支柱6、永磁体7、阻尼材料层8、线圈9、黑色遮光板10、顶盖11、以及线圈连接线12 ;永磁体7的下端面固定于支柱6上端面;阻尼材料层8固定于永磁体7的上端面;线圈9套接于永磁体7的中部;黑色遮光板10垂直固定于线圈9上端面;顶盖11固定于阻尼材料层8上端面;线圈连接线12连接于线圈9两端; [0012] The electric loudspeaker comprises a strut 6, 7 of permanent magnets, damping material layer 8, a coil 9, a black light shielding plate 10, cover 11, and a coil connecting wire 12; the permanent magnet 7 fixed to the end face of the pillar 6 end surface; damping material layer 8 is fixed to the upper end surface of the permanent magnet 7; 9 sleeved coil 7 in the middle of the permanent magnet; black light shielding plate 10 is vertically fixed to the coil end surface 9; the top cover 11 is fixed to the upper end surface of the damping material layer 8; coil connection wire 12 is connected to the coil ends 9;

[0013] 光电探测器2位于聚焦透镜I后侧焦点上;光电探测器2的输出端通过BNC连接线3与积分电路4的输入端连接;积分电路4的输出端与数字示波器5的输入端连接;黑色遮光板10位于聚焦透镜I前侧; [0013] The photodetector 2 is positioned to focus on the rear focal lens I; the output of the photodetector 2 via BNC cable 3 is connected to the input terminal of the integrating circuit 4; an input terminal of the integrating circuit output terminal 4 and the digital oscilloscope 5 connection; black light shielding plate 10 located on the front side of the focusing lens I;

[0014] 还包括腔体13 ;腔体13上开有与聚焦透镜I前侧位置正对的通孔14 ;电动式扬声器、聚焦透镜1、光电探测器2、BNC连接线3、积分电路4、数字示波器5均位于腔体13内;黑色遮光板10位于通孔14与聚焦透镜I前侧之间。 [0014] further includes a cavity 13; the cavity 13 has a through-hole and the focus position of the lens front side 14 facing I; dynamic speaker, a focusing lens 1, a photodetector 2, BNC cable 3, the integrating circuit 4 , 13 digital oscilloscope 5 are located in the cavity; black light shielding plate 10 is located between the front side of the focusing lens 14 and the through hole I.

Claims (2)

1.一种测量激光光束光强分布的装置,其特征在于:包括电动式扬声器、聚焦透镜(I)、光电探测器(2)、BNC连接线(3)、积分电路(4)、以及数字示波器(5); 所述电动式扬声器包括支柱(6)、永磁体(7)、阻尼材料层(8)、线圈(9)、黑色遮光板(10)、顶盖(11)、以及线圈连接线(12);永磁体(7)的下端面固定于支柱(6)上端面;阻尼材料层(8)固定于永磁体(7)的上端面;线圈(9)套接于永磁体(7)的中部;黑色遮光板(10)垂直固定于线圈(9)上端面;顶盖(11)固定于阻尼材料层(8)上端面;线圈连接线(12)连接于线圈(9)两端; 光电探测器(2)位于聚焦透镜(I)后侧焦点上;光电探测器(2)的输出端通过BNC连接线(3)与积分电路(4)的输入端连接;积分电路(4)的输出端与数字示波器(5)的输入端连接;黑色遮光板(10)位于聚焦透镜(I)前侧。 1. An apparatus for a laser beam intensity distribution measurement, characterized by: a dynamic speaker, a focusing lens (the I), a photodetector (2), BNC cable (3), integrating circuit (4), and a digital the oscilloscope (5); a dynamic speaker comprising a strut (6), permanent magnets (7), the damping material layer (8), coil (9), a black light shielding plate (10), a cap (11), and a coil connected line (12); the permanent magnets (7) fixed to the strut end surface (6) on the end surface; damping material layer (8) is fixed to the upper end surface of the permanent magnet (7); a coil (9) is sleeved on the permanent magnet (7 ) middle; black light shielding plate (10) vertically fixed to the coil (9) end surface; the top cover (11) fixed to the damping material layer (8) on the end surface; winding connecting line (12) connected to the coil (9) at both ends ; photodetector (2) located at a focusing lens (I), a rear side focal point; photodetector (2) via an output terminal BNC cable (3) and an integrating circuit (4) connected to the input; integration circuit (4) the output of the digital oscilloscope (5) is connected to an input terminal; black light shielding plate (10) located on the front side of the focusing lens (I).
2.根据权利要求1所述的测量激光光束光强分布的装置,其特征在于:还包括腔体(13);腔体(13)上开有与聚焦透镜(I)前侧位置正对的通孔(14);电动式扬声器、聚焦透镜(I)、光电探测器(2)、BNC连接线(3)、积分电路(4)、数字示波器(5)均位于腔体(13)内;黑色遮光板(10 )位于通孔(14 )与聚焦透镜(I)前侧之间。 The measuring laser beam according to an intensity distribution apparatus as claimed in claim, characterized in that: further comprising a cavity (13); open to a cavity (13) and the focusing lens (I) facing the front side position a through hole (14); a dynamic speaker, a focusing lens (the I), a photodetector (2), BNC cable (3), integrating circuit (4), a digital oscilloscope (5) are located in the cavity (13); black shading plate (10) positioned between the front side of the through hole (14) and the focusing lens (I).
CN 201110452954 2011-12-30 2011-12-30 Device for measuring light intensity distribution of laser beams CN102519587B (en)

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