CN103954789A - Device and method for instantaneous measurement of ion velocity distribution function - Google Patents
Device and method for instantaneous measurement of ion velocity distribution function Download PDFInfo
- Publication number
- CN103954789A CN103954789A CN201410203422.9A CN201410203422A CN103954789A CN 103954789 A CN103954789 A CN 103954789A CN 201410203422 A CN201410203422 A CN 201410203422A CN 103954789 A CN103954789 A CN 103954789A
- Authority
- CN
- China
- Prior art keywords
- velocity distribution
- field
- ion velocity
- particle
- distribution function
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Accelerators (AREA)
- Plasma Technology (AREA)
Abstract
The invention discloses a device and method for instantaneous measurement of an ion velocity distribution function and belongs to the technical field of measurement of ion velocity distribution functions. The device and method for instantaneous measurement of the ion velocity distribution function aim to solve the problem that according to an existing multi-grid probe measurement method, in order to depict an iron distribution function, current is measured by continuously changing the adjustable voltage, and thus the iron distribution function cannot be measured in real time. According to the device for instantaneous measurement of the ion velocity distribution function, a direct-current power supply supplies an accelerating field to particles, a magnetic field coil provides a magnetic deflection field for the particles which are accelerated through the accelerating field, and a charge collection plate collects the moving particles with the moving direction changed through the magnetic deflection field. According to the method for instantaneous measurement of the ion velocity distribution function, the current density of particle beams at different positions is obtained through currents sensed by different particle collection areas on the charge collection plate, and thus the real-time ion velocity distribution function is obtained. The device and method are used for instantaneous measurement of the ion velocity distribution function.
Description
Technical field
The present invention relates to ion velocity distribution transient measurement device and method, belong to ion velocity distribution field of measuring technique.
Background technology
Plasma is a kind of physical form that free electron and charged ion be principal ingredient of take, when to gas continuous heating, making molecular breakdown is that atom also ionizes, and has just formed the gas being comprised of ion, electronics and neutral particle, and this gaseous state is called plasma.
Magnetic field is that the magnet to putting into wherein has magneto motive a kind of particular matter, its essential characteristic is to apply acting force to moving charge, be that electrical conductor or moving charged particle can be subject to the acting force in magnetic field in magnetic field, wherein the suffered acting force of charged particle is called as Lorentz force, and size and Orientation is by formula
determine, wherein
for the suffered Lorentz force of charged particle, q is the electric weight of band point particle, and v is the speed of band point particle,
for magnetic flux density.
Electric field is a kind of particular matter existing in electric charge and variation magnetic field surrounding space, field intensity equal and opposite in direction everywhere in certain region wherein, and direction is identical, and this region becomes uniform electric field.In uniform electric field, power is equal everywhere, and acceleration is constant.Electric field force is to be placed in the suffered acting force of electric field when electric charge, or the acting force applying for freedom of movement electric charge in electric field.The size of the electric field force that in uniform electric field, particle is subject to is F=Eq, and wherein F is electric field force, and E is electric field intensity, the electric weight that q is test charge, and the electric field force direction that positive charge is subject to is identical with direction of an electric field, and negative charge is contrary.
The method of existing measurement ion velocity distribution is mainly multiple-grid sonde method.Figure 4 shows that simple multiple-grid probe measurement circuit diagram, C in figure
1and C
2all represent grid, K is collector, and U is power supply, is about 30V, for repelling electronics, U
cfor regulated power supply.The volume of metal electrode is as far as possible little, the interference causing to reduce probe plasma.On metal electrode, apply a DC voltage and change within the specific limits its magnitude of voltage, such as changing its magnitude of voltage from-50V to+50V, increasing 0.1V～0.2V at every turn, then the current data in acquisition probe, obtains I-V family curve.Apply suitable computing formula, can try to achieve plasma key property parameter value from family curve.
The method of existing multiple-grid probe measurement ion velocity distribution needs constantly to change adjustable voltage and measures electric current, to describe ion distribution function, does not also have a kind of good method can measure in real time ion distribution function.
Summary of the invention
The present invention seeks to needs constantly change adjustable voltage to measure electric current in order to solve existing multiple-grid probe measurement method, to describe ion distribution function, can not measure in real time the problem of ion distribution function, a kind of ion velocity distribution transient measurement device and method is provided
Ion velocity distribution transient measurement device of the present invention, it comprises direct supply, field coil and charge-trapping plate,
Direct supply is used to particle that accelerating field is provided;
Field coil is used to the particle after accelerating field is accelerated that magnetic deflection field is provided;
Charge-trapping plate is arranged on the end side of field coil, for collecting the Motion Particles that changes direction of motion through magnetic deflection field.
A plurality of particle collections region is evenly set on charge-trapping plate, and adjacent particles collecting zone is electricity isolation.
An ion velocity distribution transient measurement method, it is realized based on above-mentioned ion velocity distribution transient measurement device,
After the accelerating field that positively charged particle provides through direct supply is accelerated, enter into the magnetic deflection field that field coil provides, after direction of motion deflects, move on charge-trapping plate in different particle collections region, by the electric current that on charge-trapping plate, different particle collections region senses, obtain the particle beams current density of diverse location, thereby obtain real-time ion velocity distribution.
It is perpendicular that the magnetic direction of magnetic deflection field and positively charged particle enter the direction of motion of magnetic deflection field.
Advantage of the present invention: the present invention is according to the positively charged particle characteristic that direction of motion deflects in magnetic field, be provided with charge-trapping plate, and then by the electric current that on charge-trapping plate, different particle collections region internal induction arrives, obtain the Density Distribution of the particle beam of diverse location, thereby obtain particle incident ion bundle velocity distribution.Apparatus of the present invention are simple in structure, and measurement result is accurate.The ion velocity distribution transient measurement method that adopts apparatus of the present invention to realize, by simple and effective charge-trapping method, has realized the measurement of ion instantaneous velocity, for the measurement of plasma beam instantaneous velocity provides new measurement approach.
Accompanying drawing explanation
Fig. 1 is the structural representation of ion velocity distribution transient measurement device of the present invention; In figure
represent positively charged particle,
represent electronegative particle, C
1and C
2be grid, the voltage that U is direct supply;
Fig. 2 is the charge-trapping schematic surface of charge-trapping plate;
Fig. 3 calculates the schematic diagram of particle rapidity according to particle position on charge-trapping plate;
Fig. 4 is multiple-grid probe measurement circuit diagram.
Embodiment
Embodiment one: below in conjunction with Fig. 1, present embodiment is described, ion velocity distribution transient measurement device described in present embodiment, it comprises direct supply 1, field coil 2 and charge-trapping plate 3,
Direct supply 1 is used to particle that accelerating field is provided;
Field coil 2 is used to the particle after accelerating field is accelerated that magnetic deflection field is provided;
Charge-trapping plate 3 is arranged on the end side of field coil 2, for collecting the Motion Particles that changes direction of motion through magnetic deflection field.
Embodiment two: below in conjunction with Fig. 1, present embodiment is described, present embodiment is described further embodiment one, evenly arranges a plurality of particle collections region on charge-trapping plate 3 described in present embodiment, and adjacent particles collecting zone is electricity isolation.
In present embodiment, as shown in Figure 1, in accelerating field region, positively charged particle
by electric field acceleration, obtain certain initial velocity and enter magnetic deflection field region, and electronegative particle
can be subject to electric field action power correcting action.
Magnetic deflection field region adds one perpendicular to the magnetic field of paper direction by N, S polar curve circle, and in magnetic field, charged particle can carry out Larmor's circumnutation and deflects.
The positively charged particle deflecting in magnetic deflection field region is because the difference of moving radius; can there is separation in movement locus; can move to positions different on charge-trapping plate 3 thus; according to the size of current that on charge-trapping plate 3, particle collection region senses; can obtain the Density Distribution of the particle beam in this particle collection region, thereby obtain the velocity distribution of the particle of certain incident in a flash.
Embodiment three: below in conjunction with Fig. 1 to Fig. 3, present embodiment is described, present embodiment is a kind of ion velocity distribution transient measurement method, its ion velocity distribution transient measurement device based on described in embodiment one or two is realized,
After the accelerating field that positively charged particle provides through direct supply 1 is accelerated, enter into the magnetic deflection field that field coil 2 provides, after direction of motion deflects, move on charge-trapping plate 3 in different particle collections region, by the electric current that on charge-trapping plate 3, different particle collections region senses, obtain the particle beams current density of diverse location, thereby obtain real-time ion velocity distribution.
Embodiment four: present embodiment is described below in conjunction with Fig. 1 to Fig. 3, present embodiment is described further embodiment three, and it is perpendicular that the magnetic direction of magnetic deflection field and positively charged particle enter the direction of motion of magnetic deflection field described in present embodiment.
Principle of work of the present invention:
Suppose a branch of plasma line, only have speed different after accelerating field is accelerated, this plasma line enters magnetic deflection field region with identical incident angle.
The motion of particle in uniform magnetic field is larmor's precession:
R in formula
cfor Particles Moving radius of gyration, v
⊥the speed that particle moves in a circle in vertical magnetic field plane, ω
cfor Particles Moving cyclotron frequency, m is mass particle, and q is particle charging amount, and B is even magnetic induction density.
When particle enters in magnetic deflection field region, can produce Larmor's circumnutation, the initial velocity of particle is different, can produce different moving radius, when the particle beams deflects while moving to charge-trapping plate, separation can occur.On charge-trapping plate, the length of every fixed range is all electrically isolated from one.
On charge-trapping plate 3, on diverse location, senses the difference of size of current, can obtain the Density Distribution of particle beam on diverse location, and the particle rapidity of collecting on diverse location calculating process is as follows:
Known in Fig. 3, positive electricity particle is deflected and is moved to a certain position on collecting board by magnetic field, can be according to this position and field region size, pass through Pythagorean theorem, obtain the radius of gyration of Particles Moving on this position, by Larmor's circumnutation formula, can obtain the velocity magnitude of particle on this position.
According to the ratio of collecting magnitude of current size on diverse location, can obtain the distribution function of particle, and can determine Particles Moving speed on this position according to the final movement position of particle, both combinations, finally can reach the object of ion velocity distribution transient measurement.
Claims (4)
1. an ion velocity distribution transient measurement device, is characterized in that, it comprises direct supply (1), field coil (2) and charge-trapping plate (3),
Direct supply (1) is used to particle that accelerating field is provided;
Field coil (2) is used to the particle after accelerating field is accelerated that magnetic deflection field is provided;
Charge-trapping plate (3) is arranged on the end side of field coil (2), for collecting the Motion Particles that changes direction of motion through magnetic deflection field.
2. ion velocity distribution transient measurement device according to claim 1, is characterized in that, a plurality of particle collections region is evenly set on charge-trapping plate (3), and adjacent particles collecting zone is electricity isolation.
3. an ion velocity distribution transient measurement method, it is realized based on ion velocity distribution transient measurement device claimed in claim 2, it is characterized in that,
After the accelerating field that positively charged particle provides through direct supply (1) is accelerated, enter into the magnetic deflection field that field coil (2) provides, after direction of motion deflects, move in the upper different particle collections of charge-trapping plate (3) region, the electric current being sensed by the upper different particle collections of charge-trapping plate (3) region, obtain the particle beams current density of diverse location, thereby obtain real-time ion velocity distribution.
4. ion velocity distribution transient measurement method according to claim 3, is characterized in that, it is perpendicular that the magnetic direction of magnetic deflection field and positively charged particle enter the direction of motion of magnetic deflection field.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410203422.9A CN103954789B (en) | 2014-05-14 | 2014-05-14 | Ion velocity distribution transient measurement device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410203422.9A CN103954789B (en) | 2014-05-14 | 2014-05-14 | Ion velocity distribution transient measurement device and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103954789A true CN103954789A (en) | 2014-07-30 |
| CN103954789B CN103954789B (en) | 2016-08-24 |
Family
ID=51332087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410203422.9A Expired - Fee Related CN103954789B (en) | 2014-05-14 | 2014-05-14 | Ion velocity distribution transient measurement device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103954789B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104992414A (en) * | 2015-06-19 | 2015-10-21 | 中国科学技术大学 | Processing method of three-dimensional ion velocity focused image |
| CN107338419A (en) * | 2017-07-31 | 2017-11-10 | 京东方科技集团股份有限公司 | A kind of evaporation rate monitoring device and evaporated device |
| CN110364060A (en) * | 2019-06-26 | 2019-10-22 | 北京航空航天大学 | It is a kind of for studying the experimental provision of magnetic coil line |
| CN110740782A (en) * | 2017-03-27 | 2020-01-31 | 医科达私人有限公司 | System and method for magnetic field localization of charged particle beam end point |
| CN111551881A (en) * | 2020-05-12 | 2020-08-18 | 山东省肿瘤防治研究院（山东省肿瘤医院） | Nuclear magnetic resonance magnetic field measurement method and system based on particle accelerator |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050279946A1 (en) * | 2003-04-08 | 2005-12-22 | Cymer, Inc. | Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source |
| CN102883777A (en) * | 2010-02-10 | 2013-01-16 | 株式会社东芝 | Particle beam irradiation device and control method therefor |
| CN102967871A (en) * | 2012-11-12 | 2013-03-13 | 中国航天科技集团公司第五研究院第五一〇研究所 | Detection method for space low-energy electrons and protons |
| CN103675883A (en) * | 2013-12-06 | 2014-03-26 | 中国科学院空间科学与应用研究中心 | Low-pollution spatial medium-energy electron detector based on magnetic deflection technique |
-
2014
- 2014-05-14 CN CN201410203422.9A patent/CN103954789B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050279946A1 (en) * | 2003-04-08 | 2005-12-22 | Cymer, Inc. | Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source |
| CN102883777A (en) * | 2010-02-10 | 2013-01-16 | 株式会社东芝 | Particle beam irradiation device and control method therefor |
| CN102967871A (en) * | 2012-11-12 | 2013-03-13 | 中国航天科技集团公司第五研究院第五一〇研究所 | Detection method for space low-energy electrons and protons |
| CN103675883A (en) * | 2013-12-06 | 2014-03-26 | 中国科学院空间科学与应用研究中心 | Low-pollution spatial medium-energy electron detector based on magnetic deflection technique |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104992414A (en) * | 2015-06-19 | 2015-10-21 | 中国科学技术大学 | Processing method of three-dimensional ion velocity focused image |
| CN104992414B (en) * | 2015-06-19 | 2017-11-24 | 中国科学技术大学 | The processing method of three-dimensional ion velocity focused image |
| CN110740782A (en) * | 2017-03-27 | 2020-01-31 | 医科达私人有限公司 | System and method for magnetic field localization of charged particle beam end point |
| CN110740782B (en) * | 2017-03-27 | 2021-06-15 | 医科达私人有限公司 | System and method for magnetic field localization of charged particle beam end point |
| US11253728B2 (en) | 2017-03-27 | 2022-02-22 | Elekta Pty Ltd. | Systems and methods for magnetic field localization of charged particle beam end point |
| US11904183B2 (en) | 2017-03-27 | 2024-02-20 | Elekta Pty Ltd. | Systems and methods for magnetic field localization of charged particle beam end point |
| CN107338419A (en) * | 2017-07-31 | 2017-11-10 | 京东方科技集团股份有限公司 | A kind of evaporation rate monitoring device and evaporated device |
| CN107338419B (en) * | 2017-07-31 | 2019-07-16 | 京东方科技集团股份有限公司 | A kind of evaporation rate monitoring device and evaporated device |
| CN110364060A (en) * | 2019-06-26 | 2019-10-22 | 北京航空航天大学 | It is a kind of for studying the experimental provision of magnetic coil line |
| CN110364060B (en) * | 2019-06-26 | 2021-03-23 | 北京航空航天大学 | Experimental device for be used for studying magnetic coil line |
| CN111551881A (en) * | 2020-05-12 | 2020-08-18 | 山东省肿瘤防治研究院（山东省肿瘤医院） | Nuclear magnetic resonance magnetic field measurement method and system based on particle accelerator |
| CN111551881B (en) * | 2020-05-12 | 2022-05-03 | 山东省肿瘤防治研究院（山东省肿瘤医院） | Nuclear magnetic resonance magnetic field measurement method and system based on particle accelerator |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103954789B (en) | 2016-08-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103954789A (en) | Device and method for instantaneous measurement of ion velocity distribution function | |
| Salop et al. | Measurements of the Electric Polarizabilities of the Alkalis Using the E− H Gradient Balance Method | |
| CN102540127B (en) | Calibration platform for space potential detector of low-orbit spacecraft | |
| Salomaa et al. | Velocity selector for heavy-ion separation | |
| CN105005070A (en) | Method and apparatus of distinguishing a suspected ion beam behind an accelerator analysis magnet | |
| Fang et al. | Impact factors in measurements of ion-current density produced by high-voltage DC wire's corona | |
| Meng et al. | Research on the detuning system of a cooling electron beam for the dielectronic recombination experiment at CSRm | |
| CN107037275A (en) | A kind of device for measuring single charged particle charge-mass ratio | |
| CN105910676B (en) | A kind of magnetic field detection method for the detection of mine heat furnace smelting key parameter | |
| Zhou et al. | Simulation of ion-flow field at the crossing of HVDC and HVAC transmission lines | |
| Zou et al. | Measurement method of ionic mobilities in direct current corona discharge in air | |
| Kahn et al. | Electrogasdynamic power generation | |
| Zhou et al. | Measurement and modeling of low-frequency current from hybrid AC/DC corona | |
| Kapetanakos et al. | Diagnostics of Non‐Neutral Plasmas Using an Induced‐Current Electrostatic Probe | |
| CN102610478B (en) | Charged particle beam measurement device | |
| CN202840243U (en) | Ionic wind air flow accelerating device and electric current density testing device thereof | |
| Feng et al. | FEM simulation of charge accumulation behaviours on polyimide surface in 10 kV negative high-voltage corona polarization process | |
| WO2009089443A1 (en) | Diagnostic methods and apparatus for an accelerator using induction to generate an electric field with a localized curl | |
| CN102856794A (en) | Ion wind flow accelerator and current density testing device thereof | |
| Li et al. | Surface charge measurement under AC voltage using active electrostatic probe and controllable phase truncation scheme | |
| Liebmann | Field Plotting and Ray Tracing in Electron Optics A Review of Numerical Methods | |
| CN105136009B (en) | Micro-displacement dynamic measurement system and method caused by a kind of laser Impulse coupling | |
| CN203164425U (en) | Device for measuring deuterium ion beam component in deuterium-tritium neutron tube | |
| Matsumoto et al. | Experimental investigation and numerical analysis of surface charge decay on acrylic and glass epoxy multilayer materials in air | |
| Erickson | Determination of plasma potentials and ion energies by ion extraction and energy analysis |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160824 Termination date: 20170514 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |