CN103954789B - Ion velocity distribution transient measurement device and method - Google Patents
Ion velocity distribution transient measurement device and method Download PDFInfo
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- CN103954789B CN103954789B CN201410203422.9A CN201410203422A CN103954789B CN 103954789 B CN103954789 B CN 103954789B CN 201410203422 A CN201410203422 A CN 201410203422A CN 103954789 B CN103954789 B CN 103954789B
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Abstract
Ion velocity distribution transient measurement device and method, belongs to ion velocity distribution field of measuring technique.The present invention is that constantly change adjustable voltage is to measure electric current, to describe ion distribution function in order to solve existing multiple-grid probe measurement method needs, it is impossible to the problem measuring ion distribution function in real time.The DC source of device provides accelerating field for particle, and field coil provides magnetic deflection field for the particle after accelerated electric field acceleration, and the Motion Particles changing the direction of motion through magnetic deflection field collected by charge-trapping plate；Method is the electric current sensed by particle collection regions different on charge-trapping plate, it is thus achieved that the beam currents density of diverse location, thus obtains real-time ion velocity distribution.The present invention is for the transient measurement of ion velocity distribution.
Description
Technical field
The present invention relates to ion velocity distribution transient measurement device and method, belong to ion velocity distribution measurement technology
Field.
Background technology
Plasma be a kind of with free electron and charged ion the physical form as main component, when to gas continuous heating,
Make molecular breakdown be atom and ionize, be the formation of the gas being made up of ion, electronics and neutral particle, this gas
State is referred to as plasma.
Magnetic field is to have magneto motive a kind of particular matter to putting into magnet therein, and its basic feature is to execute moving charge
Add active force, i.e. electrical conductor or moving charged particle can be by the active force in magnetic field in magnetic field, wherein suffered by charged particle
Active force be referred to as Lorentz force, size and Orientation is by formulaDetermine, whereinSuffered by charged particle
Lorentz force, q is the electricity of band point particle, and v is the speed of band point particle,For magnetic flux density.
Electric field is a kind of particular matter existed in electric charge and variation magnetic field surrounding space, wherein field intensity everywhere in certain region
Equal in magnitude, direction is identical, then this region becomes uniform electric field.In uniform electric field, power is the most equal, and acceleration is constant.
Electric field force is active force suffered in electric charge is placed in electric field, or the effect applied by freedom of movement electric charge in the electric field
Power.In uniform electric field, the size of the electric field force that particle is subject to is F=Eq, and wherein F is electric field force, and E is electric field intensity, q
For the electricity of test charge, the electric field force direction that positive charge is subject to is identical with direction of an electric field, and negative charge is the most contrary.
The method of existing measurement ion velocity distribution is mainly multiple-grid sonde method.Fig. 4 show simple many gridded probes and surveys
Amount circuit diagram, C in figure1And C2All representing grid, K is collector, and U is power supply, about 30V, is used for repelling
Electronics, UCFor regulated power supply.The volume of metal electrode is the least, to reduce the interference that probe plasma causes.
Metal electrode apply a DC voltage and changes its magnitude of voltage within the specific limits, such as changing from-50V to+50V
Its magnitude of voltage, increases 0.1V～0.2V, the then current data in acquisition probe every time, obtains I V characteristic curve.Should
Use suitable computing formula, plasma key property parameter value can be tried to achieve from characteristic curve.
The method of existing multiple-grid probe measurement ion velocity distribution needs constantly to change adjustable voltage and measures electric current, with
Describe ion distribution function, also do not have a kind of well method can measure ion distribution function in real time.
Summary of the invention
The invention aims to solve existing multiple-grid probe measurement method and need constantly to change adjustable voltage to measure electric current, with
Describe ion distribution function, it is impossible to the problem measuring ion distribution function in real time, it is provided that a kind of ion velocity distribution wink
Time measurement apparatus and method
Ion velocity distribution transient measurement device of the present invention, it includes DC source, field coil and charge-trapping
Plate,
DC source is for providing accelerating field for particle；
Field coil is for providing magnetic deflection field for the particle after accelerated electric field acceleration；
Charge-trapping plate is arranged on the end side of field coil, for collecting the motion grain changing the direction of motion through magnetic deflection field
Son.
Being uniformly arranged multiple particle collection region on charge-trapping plate, adjacent particles collecting zone is electric isolution.
A kind of ion velocity distribution transient measurement method, it is real based on above-mentioned ion velocity distribution transient measurement device
It is existing,
Positively charged particle, after the accelerating field that DC source provides is accelerated, enters into the magnetic deflection field that field coil provides
In, after the direction of motion deflects, move on charge-trapping plate in different particle collection regions, by charge-trapping plate not
The electric current sensed with particle collection region, it is thus achieved that the beam currents density of diverse location, thus obtain real-time ion speed
Degree distribution function.
The direction of motion that the magnetic direction of magnetic deflection field enters magnetic deflection field with positively charged particle is perpendicular.
Advantages of the present invention: the characteristic that the present invention deflects according to positively charged particle direction of motion in magnetic field, is arranged
Charge-trapping plate, and then by the electric current sensed in particle collection regions different on charge-trapping plate, it is thus achieved that diverse location
The Density Distribution of particle beam, thus obtain particle incident ion bundle VELOCITY DISTRIBUTION.Apparatus of the present invention simple in construction, measures
Result is accurate.Use the ion velocity distribution transient measurement method that apparatus of the present invention realize, by simple and effective electric charge
Collection method, it is achieved that the measurement of ion instantaneous velocity, the measurement for plasma beam instantaneous velocity provides new measurement way
Footpath.
Accompanying drawing explanation
Fig. 1 is the structural representation of ion velocity distribution transient measurement device of the present invention；In figureJust represent band
The particle of electric charge,Represent electronegative particle, C1And C2Being grid, U is the voltage of DC source；
Fig. 2 is the charged collection surface schematic diagram of charge-trapping plate；
Fig. 3 is the schematic diagram calculating particle rapidity according to particle position on charge-trapping plate；
Fig. 4 is multiple-grid probe measurement circuit diagram.
Detailed description of the invention
Detailed description of the invention one: present embodiment is described below in conjunction with Fig. 1, ion velocity distribution described in present embodiment
Transient measurement device, it includes DC source 1, field coil 2 and charge-trapping plate 3,
DC source 1 is for providing accelerating field for particle；
Field coil 2 is for providing magnetic deflection field for the particle after accelerated electric field acceleration；
Charge-trapping plate 3 is arranged on the end side of field coil 2, for collecting the motion changing the direction of motion through magnetic deflection field
Particle.
Detailed description of the invention two: present embodiment is described below in conjunction with Fig. 1, embodiment one is made further by present embodiment
Illustrate, charge-trapping plate 3 described in present embodiment be uniformly arranged multiple particle collection region, adjacent particles collecting zone in
Electric isolution.
In present embodiment, as it is shown in figure 1, in accelerating field region, positively charged particlePass through electric field acceleration
Obtain certain initial velocity and enter magnetic deflection field region, and electronegative particleThen can be returned by electric field action power
Beginning position.
Magnetic deflection field region adds the magnetic field being perpendicular to paper direction, charged particle in magnetic field by N, S polar curve circle
Larmor's circumnutation can be carried out deflect.
The positively charged particle deflected in magnetic deflection field region is because the difference of moving radius, and movement locus can occur
Separate, thus can move to positions different on charge-trapping plate 3, sense according to particle collection region on charge-trapping plate 3
The size of current arrived, can obtain the Density Distribution of the particle beam in this particle collection region, thus it is the most incident to obtain certain
The VELOCITY DISTRIBUTION of particle.
Detailed description of the invention three: illustrate that present embodiment, present embodiment are a kind of ion velocities below in conjunction with Fig. 1 to Fig. 3
Distribution function transient measurement method, it is real based on the ion velocity distribution transient measurement device described in embodiment one or two
It is existing,
Positively charged particle, after the accelerating field that DC source 1 provides is accelerated, enters into the deflection that field coil 2 provides
In magnetic field, after the direction of motion deflects, move on charge-trapping plate 3 in different particle collection regions, by charge-trapping
The electric current that on plate 3, different particle collection regions sense, it is thus achieved that the beam currents density of diverse location, thus obtain in real time
Ion velocity distribution.
Detailed description of the invention four: present embodiment is described below in conjunction with Fig. 1 to Fig. 3, embodiment three is made by present embodiment
Further illustrating, the magnetic direction of magnetic deflection field described in present embodiment enters the motion of magnetic deflection field with positively charged particle
Direction is perpendicular.
The operation principle of the present invention:
Assuming that a branch of plasma line, after accelerated electric field acceleration, only speed is different, then this plasma line is with identical
Incident angle enter magnetic deflection field region.
Particle motion in uniform magnetic field is larmor's precession:
R in formulacFor Particles Moving radius of gyration, v⊥It is the speed that moves in a circle in vertical magnetic field plane of particle, ωcFor
Particles Moving cyclotron frequency, m is mass particle, and q is particle charging amount, and B is uniform magnetic induction.
In particle enters magnetic deflection field region, can produce Larmor's circumnutation, the initial velocity of particle is different, can produce
Different moving radius, when particle beam deflect move to charge-trapping plate time, it may occur that separate.On charge-trapping plate often
The length of fixed range is all electrically isolated from one.
Charge-trapping plate 3 senses on diverse location the difference of size of current, particle beam on diverse location can be obtained
Density Distribution, and the particle rapidity collected on diverse location to calculate process as follows:
From in Fig. 3, positive particles is deflected by magnetic field and moves to a certain position on collecting board, can be according to this
Position and field region size, by Pythagorean theorem, obtain the radius of gyration of Particles Moving on this position, Larmor return
Rotation equation of motion, i.e. can obtain the velocity magnitude of particle on this position.
The distribution function of particle can be obtained according to the ratio collecting magnitude of current size on diverse location, and final according to particle
Movement position may determine that Particles Moving speed on this position, both combine, ion velocity distribution may finally be reached
The purpose of transient measurement.
Claims (3)
1. an ion velocity distribution transient measurement method, it is based on the realization of ion velocity distribution transient measurement device,
This device includes DC source (1), field coil (2) and charge-trapping plate (3),
DC source (1) is for providing accelerating field for particle；
Field coil (2) is for providing magnetic deflection field for the particle after accelerated electric field acceleration；
Charge-trapping plate (3) is arranged on the end side of field coil (2), changes the direction of motion for collecting through magnetic deflection field
Motion Particles；
It is characterized in that,
Positively charged particle is after the accelerating field that DC source (1) provides is accelerated, and entering into field coil (2) provides
Magnetic deflection field in, the initial velocity of particle is different, can produce different moving radius, after the direction of motion deflects, fortune
Move in the upper different particle collection regions of charge-trapping plate (3), by the upper different particle collection regions sense of charge-trapping plate (3)
The electric current that should arrive, it is thus achieved that the beam currents density of diverse location, thus obtain real-time ion velocity distribution.
Ion velocity distribution transient measurement method the most according to claim 1, it is characterised in that magnetic deflection field
The direction of motion that magnetic direction enters magnetic deflection field with positively charged particle is perpendicular.
Ion velocity distribution transient measurement method the most according to claim 1 and 2, it is characterised in that electric charge is received
Being uniformly arranged multiple particle collection region on collection plate (3), adjacent particles collecting zone is electric isolution.
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| CN104992414B (en) * | 2015-06-19 | 2017-11-24 | 中国科学技术大学 | The processing method of three-dimensional ion velocity focused image |
| CN110740782B (en) * | 2017-03-27 | 2021-06-15 | 医科达私人有限公司 | System and method for magnetic field localization of charged particle beam end point |
| CN107338419B (en) * | 2017-07-31 | 2019-07-16 | 京东方科技集团股份有限公司 | A kind of evaporation rate monitoring device and evaporated device |
| CN110364060B (en) * | 2019-06-26 | 2021-03-23 | 北京航空航天大学 | Experimental device for be used for studying magnetic coil line |
| CN111551881B (en) * | 2020-05-12 | 2022-05-03 | 山东省肿瘤防治研究院（山东省肿瘤医院） | Nuclear magnetic resonance magnetic field measurement method and system based on particle accelerator |
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| CN102883777A (en) * | 2010-02-10 | 2013-01-16 | 株式会社东芝 | Particle beam irradiation device and control method therefor |
| CN102967871A (en) * | 2012-11-12 | 2013-03-13 | 中国航天科技集团公司第五研究院第五一〇研究所 | Detection method for space low-energy electrons and protons |
| CN103675883A (en) * | 2013-12-06 | 2014-03-26 | 中国科学院空间科学与应用研究中心 | Low-pollution spatial medium-energy electron detector based on magnetic deflection technique |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102883777A (en) * | 2010-02-10 | 2013-01-16 | 株式会社东芝 | Particle beam irradiation device and control method therefor |
| CN102967871A (en) * | 2012-11-12 | 2013-03-13 | 中国航天科技集团公司第五研究院第五一〇研究所 | Detection method for space low-energy electrons and protons |
| CN103675883A (en) * | 2013-12-06 | 2014-03-26 | 中国科学院空间科学与应用研究中心 | Low-pollution spatial medium-energy electron detector based on magnetic deflection technique |
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