CN203774267U - Blowing device - Google Patents
Blowing device Download PDFInfo
- Publication number
- CN203774267U CN203774267U CN201420149062.4U CN201420149062U CN203774267U CN 203774267 U CN203774267 U CN 203774267U CN 201420149062 U CN201420149062 U CN 201420149062U CN 203774267 U CN203774267 U CN 203774267U
- Authority
- CN
- China
- Prior art keywords
- pipeline
- blow device
- water conservancy
- conservancy diversion
- diversion module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Pipeline Systems (AREA)
Abstract
The utility model provides a blowing device which comprises flow-guiding modules connected with an equipment machine, and a plurality of pipelines, of which one end is connected with the flow-guiding modules and the other end is connected with a gas source. The equipment machine is added with the flow-guiding modules and the pipelines, wherein one end of the pipeline is connected with the flow-guiding modules and the other end is connected with the gas source; the gas source provides inert gases to carry out inert gas blowing in the equipment machine through the pipeline and the flow-guiding modules so as to discharge air and moisture in the air, thereby preventing halogen elements from reacting with the moisture to generate acid, and furthermore, preventing the acid from etching the equipment machine; and on one hand, the service life of the equipment machine can be improved, and on the other hand, the defects of wafers can be reduced.
Description
Technical field
The utility model relates to field of semiconductor manufacture, relates in particular to a kind of blow device.
Background technology
In semiconductor fabrication process, etching technics is a very important ring.Along with dwindling gradually of the characteristic size of semiconductor device, also more and more higher to the requirement of etching technics, precision and the degree etc. of etching are all had to great challenge.Under normal circumstances, the etching gas that etching apparatus adopts mostly is HBr and Cl
2.
After completing etching technics in the etching cavity of equipment board, wafer can transmit back in wafer cassette (FOUP).But, the part Br of the remained on surface of wafer or Cl halogen can with atmosphere in equipment board in steam react, generate corresponding acid, because equipment board inside is mostly metal material, therefore acid can be corroded corroding in equipment board, and then easily produce particle etc., and finally can cause greatly reduce the useful life of equipment board, when serious, can cause wafer defect to increase probability.
For existing problem, conventionally settling mode is the inside of Facilities Engineer's periodic cleaning equipment board, more the mode such as mechanical arm of exchange device board inside reduces the defect that wafer is caused, but, this kind of settling mode increased production cost greatly, affect the utilization rate of equipment, the safety that affects the production capacity of factory and jeopardize Facilities Engineer simultaneously.
Utility model content
The purpose of this utility model is to provide a kind of blow device, can carry out gas purging to equipment board inside, can reduce the humidity of equipment board inside, add the flow velocity of large equipment board internal gas, avoid forming the corrosion of acid to equipment board inside and the generation of reduction wafer defect.
To achieve these goals, the utility model proposes a kind of blow device, for gas purging is carried out in equipment board inside, described device comprises at least one water conservancy diversion module and multiple pipeline, wherein, described water conservancy diversion module is connected with described equipment board, and described pipeline one end connects water conservancy diversion module, and the other end connects source of the gas.
Further, described blow device also comprises a Pressure gauge, and described Pressure gauge is fixed on described pipeline.
Further, described blow device also comprises a pressure regulating valve, and described pressure regulating valve is fixed on described pipeline.
Further, described blow device also comprises valve on the other hand, and described hand valve is fixed on described pipeline.
Further, described water conservancy diversion module is 2, and is connected by described pipeline.
Further, described water conservancy diversion module is connected with described equipment board by screw.
Further, described pipeline is connected with described water conservancy diversion module by welding manner.
Further, described pipeline is also provided with homogenizing plate with one end that described water conservancy diversion module is connected.
Further, described homogenizing plate is circular, and is provided with multiple evenly distributed through holes.
Further, described pipeline is that diameter is the stainless steel pipeline of 1/2 inch.
Compared with prior art, the beneficial effects of the utility model are mainly reflected in: on equipment board, add water conservancy diversion module and pipeline, pipeline one end is connected with water conservancy diversion module, the other end connects source of the gas, thereby provide inert gas by pipeline and water conservancy diversion module, equipment board inside to be carried out the purging of inert gas by source of the gas, discharge the steam in atmosphere and atmosphere, generate acid thereby avoid halogen and steam to react, and then avoid the corrosion of acid to equipment board, the useful life that can improve equipment board on the one hand, can reduce on the other hand the generation of wafer defect.
Brief description of the drawings
Fig. 1 is the structural representation of blow device in the utility model one embodiment;
Fig. 2 is the structural representation of homogenizing plate in the utility model one embodiment.
Embodiment
Below in conjunction with schematic diagram, blow device of the present utility model is described in more detail, wherein represent preferred embodiment of the present utility model, should be appreciated that those skilled in the art can revise the utility model described here, and still realize advantageous effects of the present utility model.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as to restriction of the present utility model.
For clear, whole features of practical embodiments are not described.They in the following description, are not described in detail known function and structure, because can make the utility model chaotic due to unnecessary details.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details to realize developer's specific objective, for example, according to about system or about the restriction of business, change into another embodiment by an embodiment.In addition, will be understood that this development may be complicated and time-consuming, but be only routine work to those skilled in the art.
In the following passage, with way of example, the utility model is more specifically described with reference to accompanying drawing.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of aid illustration the utility model embodiment lucidly.
Please refer to Fig. 1, a kind of blow device has been proposed in the present embodiment, for gas purging is carried out in equipment board 10 inside, described device comprises at least one water conservancy diversion module 20 and multiple pipeline 21, wherein, described water conservancy diversion module 20 is connected with described equipment board 10, and described pipeline 21 one end connect water conservancy diversion module 20, and the other end connects source of the gas (scheming not shown).
In the present embodiment, described blow device also comprises a Pressure gauge 30, and described Pressure gauge 30 is fixed on described pipeline 21, for measuring the gas pressure in pipeline 21.Described blow device also comprises a pressure regulating valve 40, and described pressure regulating valve 40 is fixed on described pipeline 21, and described pressure regulating valve 40, for regulating the pressure of described pipeline 21 interior gases, is preferably controlled gas pressure in 0.5mpa left and right.Described blow device also comprises valve 50 on the other hand, and described hand valve 50 is fixed on described pipeline 21, can realize manual-lock and open described pipeline 21.
In the present embodiment, described water conservancy diversion module 20 is 2, and be connected by described pipeline 21, described water conservancy diversion module 20 is connected with the upper end of described equipment board 10 by screw, described pipeline 21 is connected with described water conservancy diversion module 20 by welding manner, and described pipeline 21 is also provided with homogenizing plate 22 with one end that described water conservancy diversion module 20 is connected.
Please refer to Fig. 2, described homogenizing plate 22 is circular, and is provided with multiple evenly distributed through holes 23, for making the flowing in described water conservancy diversion module 20 of gas uniform in pipeline 21, thereby can flow into uniformly in described equipment board 10, realize the comprehensive purging in equipment board 10.
In the present embodiment, described pipeline 21 is that diameter is the stainless steel pipeline of 1/2 inch, pipeline 21 one end can connect source of the gas, also can provide gas by factory's business, the gas adopting is preferably inert gas, and be dry inert gas, do not contain steam, produce acid thereby can avoid steam and halogen to react.
To sum up, in the blow device providing at the utility model embodiment, on equipment board, add water conservancy diversion module and pipeline, pipeline one end is connected with water conservancy diversion module, the other end connects source of the gas, thereby provide inert gas by pipeline and water conservancy diversion module, equipment board inside to be carried out the purging of inert gas by source of the gas, discharge the steam in atmosphere and atmosphere, generate acid thereby avoid halogen and steam to react, and then avoid the corrosion of acid to equipment board, in the useful life that can improve equipment board on the one hand, can reduce on the other hand the generation of wafer defect.
Above are only preferred embodiment of the present utility model, the utility model is not played to any restriction.Any person of ordinary skill in the field; not departing from the scope of the technical solution of the utility model; the technical scheme that the utility model is disclosed and technology contents make any type of variations such as replacement or amendment that are equal to; all belong to the content that does not depart from the technical solution of the utility model, within still belonging to protection range of the present utility model.
Claims (10)
1. a blow device, for gas purging is carried out in equipment board inside, is characterized in that, described device comprises at least one water conservancy diversion module and multiple pipeline, and wherein, described water conservancy diversion module is connected with described equipment board, described pipeline one end connects water conservancy diversion module, and the other end connects source of the gas.
2. blow device as claimed in claim 1, is characterized in that, described blow device also comprises a Pressure gauge, and described Pressure gauge is fixed on described pipeline.
3. blow device as claimed in claim 2, is characterized in that, described blow device also comprises a pressure regulating valve, and described pressure regulating valve is fixed on described pipeline.
4. blow device as claimed in claim 3, is characterized in that, described blow device also comprises valve on the other hand, and described hand valve is fixed on described pipeline.
5. blow device as claimed in claim 1, is characterized in that, described water conservancy diversion module is 2, and is connected by described pipeline.
6. blow device as claimed in claim 5, is characterized in that, described water conservancy diversion module is connected with described equipment board by screw.
7. blow device as claimed in claim 6, is characterized in that, described pipeline is connected with described water conservancy diversion module by welding manner.
8. blow device as claimed in claim 1, is characterized in that, described pipeline is also provided with homogenizing plate with one end that described water conservancy diversion module is connected.
9. blow device as claimed in claim 8, is characterized in that, described homogenizing plate is circular, and is provided with multiple evenly distributed through holes.
10. blow device as claimed in claim 1, is characterized in that, described pipeline is that diameter is the stainless steel pipeline of 1/2 inch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420149062.4U CN203774267U (en) | 2014-03-28 | 2014-03-28 | Blowing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420149062.4U CN203774267U (en) | 2014-03-28 | 2014-03-28 | Blowing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203774267U true CN203774267U (en) | 2014-08-13 |
Family
ID=51291425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420149062.4U Expired - Fee Related CN203774267U (en) | 2014-03-28 | 2014-03-28 | Blowing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203774267U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109751511A (en) * | 2017-11-07 | 2019-05-14 | 北京北方华创微电子装备有限公司 | A kind of pipeline protective device and method |
| CN109908968A (en) * | 2017-12-13 | 2019-06-21 | 中国科学院大连化学物理研究所 | The blowing device of honeycomb ceramic integral catalyzer is prepared based on slurry cladding process |
| CN110335838A (en) * | 2019-07-05 | 2019-10-15 | 北京北方华创微电子装备有限公司 | Transmitting device, transmission chamber and the method for preventing manipulator from corroding |
| CN111383886A (en) * | 2018-12-27 | 2020-07-07 | 中微半导体设备(上海)股份有限公司 | System for preventing corrosion of etching gas supply pipeline and plasma reactor operation method |
-
2014
- 2014-03-28 CN CN201420149062.4U patent/CN203774267U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109751511A (en) * | 2017-11-07 | 2019-05-14 | 北京北方华创微电子装备有限公司 | A kind of pipeline protective device and method |
| CN109908968A (en) * | 2017-12-13 | 2019-06-21 | 中国科学院大连化学物理研究所 | The blowing device of honeycomb ceramic integral catalyzer is prepared based on slurry cladding process |
| CN111383886A (en) * | 2018-12-27 | 2020-07-07 | 中微半导体设备(上海)股份有限公司 | System for preventing corrosion of etching gas supply pipeline and plasma reactor operation method |
| CN111383886B (en) * | 2018-12-27 | 2023-03-10 | 中微半导体设备(上海)股份有限公司 | System for preventing corrosion of etching gas supply pipeline and plasma reactor operation method |
| CN110335838A (en) * | 2019-07-05 | 2019-10-15 | 北京北方华创微电子装备有限公司 | Transmitting device, transmission chamber and the method for preventing manipulator from corroding |
| CN110335838B (en) * | 2019-07-05 | 2021-08-13 | 北京北方华创微电子装备有限公司 | Transmission device, transmission chamber and method for preventing corrosion of mechanical arm |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140813 Termination date: 20190328 |